WO2016190360A1 - Air purification system - Google Patents

Abstract

[Problem] To provide an air purification system with which it is possible to achieve a reduction in cost by using a large amount of activated charcoal as an adsorbent material in an adsorption unit. [Solution] This air purification system is characterized by being provided with: an adsorption-type air purification device having two adsorption units of which the adsorption performance can be regenerated, a configuration being adopted such that the adsorption performance of one of the adsorption units is regenerated when the other adsorption unit is adsorbing pollutants from within the processing air; an air conditioning device for controlling the temperature and humidity of air that has been purified by the air purification device; and an HEPA device to which the air of which the temperature and humidity have been controlled by the air conditioning device is supplied; 70% or more of the adsorbent material in the adsorption units of the air purification device comprising activated charcoal; the air conditioning device being capable of controlling the temperature and humidity of air that is within a range of –10°C to 80°C to within ranges of 20-27°C and 40-50%, respectively; and the HEPA device having a function for removing particles that are 0.3 µm or greater in size.

Description

Air purification system

The present invention relates to an air purification system for purifying process air sent from a clean room or the like.

Patent No. 5303143 (patent document 1) filed by the present applicant has two adsorption units capable of regenerating adsorption capacity, and one adsorption unit adsorbs a contaminant in the process air while the other adsorbs. As an adsorption-type air cleaning device in which the adsorption capacity of the adsorption unit is regenerated, an air purification device in which a three-layer type adsorption unit is adopted is disclosed.

The three-layer type adsorption unit comprises an adsorbent layer a containing activated carbon and a solid basic substance, an adsorbent layer b containing a solid acidic substance, and an adsorbent layer c containing activated carbon and a solid basic substance. It has become. The solid basic substance constituting the adsorbent layer a and the adsorbent layer c is selected from magnesium oxide, magnesium silicate, calcium silicate, sepiolite, alumina and zeolite, and is a solid constituting the adsorbent layer b The acidic substance is a complex oxide of titanium and silicon and vanadium oxide.

This air purification device exhausts from the clean work space, ammonia is 0.05 ppb or less, NOx which is nitrogen oxide is 0.1 ppb or less, SOx which is sulfur oxide is 0.1 ppb or less, chlorine ion Organic molecular contaminants containing Cl − of 0.1 ppb or less and amines can be removed to 2 ppb or less in terms of hexadecane. That is, the air purification device is an extremely high performance air purification device.

Patent No. 5303143 Patent No. 4047639 Patent No. 4645417

As mentioned above, the air cleaning device disclosed in Patent Document 1 is an extremely high performance air cleaning device, but the cost of the adsorption unit is high. The inventor of the present invention has intensively studied about using a large amount of low-cost activated carbon as an adsorbent of the adsorption unit.

According to the inventors of the present invention, when the amount of activated carbon in the adsorbent is large, the amount of dust due to the activated carbon contained in the air after the adsorption treatment is large, and it becomes necessary to remove the dust.

However, the present inventor has found that the problem can be overcome by using the HEPA device for removing the dust. In particular, it has been found that by controlling the temperature and humidity of air after adsorption treatment, the dust removal performance by the HEPA device can be enhanced, and the life of the performance can be extended. The cause of the fact is considered that the failure of the HEPA device due to static electricity occurs in the excessively low humidity, and the clogging of the HEPA device due to the condensation or the proliferation of the mold occurs in the excessively high humidity.

The present invention has been made based on the above background, and an object of the present invention is to provide an air purification system that can realize low cost by using a large amount of activated carbon as an adsorbent of an adsorption unit.

The present invention has two systems of adsorption units capable of regenerating adsorption capacity so that the adsorption capacity of the other adsorption unit is regenerated when one adsorption unit is adsorbing a contaminant in the process air. An adsorption type air cleaning device, an air conditioning device for controlling the temperature and humidity of air cleaned by the air cleaning device, and air whose temperature and humidity are controlled by the air conditioning device An air purification system comprising the HEPA device, wherein 70% or more of the adsorbent of the adsorption unit of the air purification device is made of activated carbon, and the air conditioner is -10.degree. C. to 80.degree. Air in the range of 20.degree. C. to 27.degree. C. and a humidity of 40% to 50%, the HEPA device has the ability to remove particles of 0.3 .mu.m or more, Dress Air that has passed through the ammonia 5ppb or less, acetone 10 [mu] g / ^{m 3} or less, NOx is the nitrogen oxide is 20ppb or less, air cleaning of sulfur oxides (SOx), characterized in that it is cleaned to below 20ppb System.

According to the present invention, low cost can be realized by using a large amount of activated carbon as the adsorbent of the adsorption unit. In addition, dust due to activated carbon contained in air after adsorption treatment can be effectively removed by HEPA device, and HEPA device by controlling temperature and humidity of air after adsorption treatment by air conditioner. The dust removal performance can be enhanced, and the life of the performance can be extended.

Preferably, the air conditioner controls air of 36 m ³ / min or less in the range of -10 ° C. to 80 ° C. with an accuracy of ± 0.1 ° C. with respect to the target temperature in the range of 20 ° C. to 27 ° C. It is possible and controllable with an accuracy of ± 0.5% for a target humidity in the range of 40% to 50%.

By controlling the temperature and humidity of the air cleaned by the air cleaner under such conditions, the air conditioner further improves the dust removal performance by the HEPA device and also prolongs the life of the performance. can do.

Further, according to the present inventors, the adsorption unit preferably has an SV value in the range of 8000 to 10000. If this range is exceeded, the life of the adsorption performance will be extended, but the case will become large. On the other hand, if it falls below this range, it can be miniaturized and it is convenient, but the life of the adsorption performance becomes short.

Moreover, it is preferable that HEPA apparatus cleans | cleans the air which passed the said HEPA apparatus until a volatile organic compound becomes 10 micrograms / m < ³ > or less.

Further, the present invention has two adsorption units capable of regenerating adsorption capacity, and when one adsorption unit adsorbs a contaminant in the processing air, the adsorption capacity of the other adsorption unit is regenerated An air conditioner of the adsorption type, an air conditioner for controlling the temperature and humidity of the air cleaned by the air cleaner, and an air for which the temperature and humidity are controlled by the air conditioner An air purification system comprising: a HEPA device, wherein the adsorbent material of the adsorption unit of the air purification device is 55 wt% of a first mixed material mainly composed of activated carbon, And 45 wt% of the second mixed material, wherein the first mixed material includes 70 wt% or more of activated carbon, and the air conditioner includes the air conditioner in a range of −10 ° C. to 80 ° C. Sky Can be controlled in the range of 20 ° C. to 27 ° C. and at a humidity of 40% to 50%, and the HEPA device has the ability to remove particles of 0.3 μm or more and has passed through the HEPA device The air is an air purification system characterized in that ammonia is 5 ppb or less, acetone is 10 μg / m ³ or less, NOx which is nitrogen oxide is 20 ppb or less, SOx which is sulfur oxide is cleaned to 20 ppb or less. is there.

Further, the present invention has two adsorption units capable of regenerating adsorption capacity, and when one adsorption unit adsorbs a contaminant in the processing air, the adsorption capacity of the other adsorption unit is regenerated An air conditioner of the adsorption type, an air conditioner for controlling the temperature and humidity of the air cleaned by the air cleaner, and an air for which the temperature and humidity are controlled by the air conditioner An air purification system comprising: a ULPA device supplied with the adsorbent, wherein the adsorbent material of the adsorption unit of the air purification device is 55 wt% of a first mixed material mainly composed of activated carbon, And 45 wt% of the second mixed material, wherein the first mixed material includes 70 wt% or more of activated carbon, and the air conditioner includes the air conditioner in a range of −10 ° C. to 80 ° C. Sky Can be controlled in the range of 20 ° C. to 27 ° C. and at a humidity of 40% to 50%, and the ULPA device has the ability to remove particles of 0.1 μm or more, and it passes through the ULPA device The air is an air purification system characterized in that ammonia is 5 ppb or less, acetone is 10 μg / m ³ or less, NOx which is nitrogen oxide is 20 ppb or less, SOx which is sulfur oxide is cleaned to 20 ppb or less. is there.

According to each of the above systems, low cost can be realized by using two types of mixed materials containing a large amount of activated carbon and a large amount of ceramics as the adsorbent of the adsorption unit. In addition, dust derived from activated carbon contained in air after adsorption treatment can be effectively removed by HEPA device or ULPA device, and temperature and humidity of air after adsorption treatment are controlled by air conditioner. Can increase the dust removal performance by the HEPA device or the ULPA device, and can extend the life of the performance.

In each of the above systems, it is preferable that the first mixed material contains 20 to 22 wt% of aluminum oxide and 4 to 6 wt% of silicon dioxide.
Preferably, the second mixed material contains silicon dioxide or alumina as the ceramic, and contains 6.5 wt% to 8.5 wt% of vanadium pentoxide as a catalyst.

According to the present invention, low cost can be realized by using a large amount of activated carbon as the adsorbent of the adsorption unit. In addition, dust derived from activated carbon contained in air after adsorption treatment can be effectively removed by HEPA device or ULPA device, and temperature and humidity of air after adsorption treatment are controlled by air conditioner. Can increase the dust removal performance by the HEPA device or the ULPA device, and can extend the life of the performance.

It is a schematic front view of the air purification system of one embodiment of the present invention. FIG. 2 is a schematic rear view of the air purification system of FIG. 1; It is a schematic block diagram of the air purification system of FIG. It is a graph which shows the air purification performance of the air purification system of FIG. It is a block diagram which shows the detail of a structure of the air purification apparatus of FIG. It is a block diagram which shows the structural example of the air conditioning apparatus of FIG. It is a block diagram which shows the other structural example of the air conditioning apparatus of FIG.

Hereinafter, an embodiment of the present invention will be described in detail with reference to the attached drawings. FIG. 1 is a schematic front view of an air purification system 100 according to an embodiment of the present invention, FIG. 2 is a schematic rear view of the air purification system 100 of FIG. 1, and FIG. 1 is a schematic block diagram of an air purification system 100. FIG.

As shown in FIGS. 1 to 3, an air purification system 100 according to the present embodiment includes an air purification device 101 for adsorbing contaminants in the introduced process air to clean the process air, and an air cleaner. The air conditioner 102 controls the temperature and humidity of the air cleaned by the air conditioner 101, the HEPA device 103 to which the air whose temperature and humidity is controlled by the air conditioner 102 is supplied, and And an exhaust cooling unit 104 for cooling the exhaust generated during regeneration of the adsorption capacity.

The air cleaning apparatus 101 has two systems of adsorption units 101a and 101b capable of regenerating adsorption capacity, and when one adsorption unit adsorbs a contaminant in the processing air, the adsorption capacity of the other adsorption unit Is an adsorptive air cleaner that is adapted to be regenerated. Although the detailed structure will be described later, it is the same as that disclosed in Japanese Patent No. 5303143 (patent document 1) except that 70% or more of the adsorbent of the adsorption unit is made of activated carbon. Further, the SV value of the suction unit of this embodiment is 9000. The SV value is the space velocity (Space Velocity), which is a value expressed by the flow rate of gas passing through the adsorption unit (m ³ / h) / the volume of adsorbent in the adsorption unit (m ³ ). Means

The air conditioner 102 is a device capable of controlling air in the range of −10 ° C. to 80 ° C. to the humidity of 40% to 50% within the range of 20 ° C. to 27 ° C. The air conditioning apparatus 102 according to the present embodiment has an accuracy of ± 0.1 ° C. with respect to a target temperature within the range of 20 ° C. to 27 ° C., with an air of 36 m ³ / min or less in the range of −10 ° C. And can be controlled with an accuracy of ± 0.5% for a target humidity in the range of 40% to 50%. A more detailed structure, which will be described later, is disclosed in Japanese Patent No. 4047639 (Patent Document 2).

The HEPA device 103 is a HEPA device having the capability of removing particles of 0.3 μm or more (specifically, the removal rate is 99.99%).

According to the present embodiment, the air having passed through the HEPA device 103 has 5 ppb or less of ammonia, 10 μg / m ³ or less of acetone, 20 ppb or less of NOx which is a nitrogen oxide, and 20 ppb or less of SOx which is a sulfur oxide, Volatile organic compounds are cleaned to less than 10 μg / m ³ . These numerical values are the required specifications of the air after the cleaning intended by the present invention, and together with the data on the air cleaning performance by the actual experimental machine of the air cleaning system 100 of the present embodiment, FIG. Show. Here, IPA is isopropyl alcohol, PGMEA is 1-methoxy-2-propyl acetate (propylene glycol monomethyl ether acetate), and siloxane is a compound having a skeleton of silicon and oxygen, Si-O-Si The bond (siloxane bond) is a bond (= siloxane), and Dopant PB is an impurity (P: phosphorus, B: boron) used in the semiconductor manufacturing process.

As described above, according to the present embodiment, since 70% or more (for example, 75%) of the adsorbent of the adsorption unit is activated carbon, low cost can be realized. In addition, dust caused by activated carbon contained in air after adsorption treatment can be effectively removed by the HEPA device 103, and sufficient air cleaning performance can be exhibited. The adsorbent preferably contains 70 wt% or more of activated carbon, 20 to 22 wt% of aluminum oxide, and 4 to 6 wt% of silicon dioxide. In this case, good removal and cleaning ability can be secured while effectively suppressing the cost. In the present inventors' intensive studies, the cost of the first mixed material is extremely effectively suppressed when the first mixed material contains 70 wt% or more of activated carbon, 21 wt% of aluminum oxide, and 6 wt% of silicon dioxide. Good removal and cleaning ability was ensured.

Furthermore, the dust removal performance by the HEPA device 103 can be enhanced by controlling the temperature and humidity of the air after the adsorption processing by the air conditioner 102, and the life of the performance can be extended.

In particular, the air conditioning apparatus 102 according to the present embodiment is configured to adjust the air having 36 m ³ / min or less in the range of -10 ° C to 80 ° C to ± 0.1 ° C with respect to the target temperature in the range of 20 ° C to 27 ° C Control with an accuracy of ± 0.5% with respect to a target humidity within the range of 40% to 50%, the dust removal performance by the HEPA device 103 is further enhanced, In addition, the life of the performance can be further extended.

In the above embodiment, the HEPA device 103 may be replaced by a ULPA device having a capability of removing particles of 0.1 μm or more. In this case, it is possible to cope with a more clean environment such as an operating room.

In addition, the inventor of the present invention has found that the adsorbent material of the adsorption unit includes a first mixed material of 55 wt% containing activated carbon as a main component and a second mixed material of 45 wt% containing ceramic as a main component. Even in the case where the material contains 70 wt% or more of activated carbon (when the ratio of the activated carbon to the first mixed material is 70 wt% or more), it is possible to effectively reduce the cost while in the air. It was found that dust can be adsorbed. Ceramics are advantageous in that they can easily support the catalyst at low cost, and the use of ceramics can easily enhance the cleaning effect of the adsorption unit, and the lifetime of the HEPA device or ULPA device. You can extend it. The ceramic is preferably silicon dioxide or alumina, and the supported catalyst is preferably vanadium pentoxide. In this case, the second mixed material preferably contains 6.5 wt% to 8.5 wt% of vanadium pentoxide. On the other hand, the first mixed material preferably contains 20 to 22 wt% of aluminum oxide and 4 to 6 wt% of silicon dioxide.
As described above, the first mixed material includes 20 to 22 wt% of aluminum oxide and 4 to 6 wt% of silicon dioxide, and the second mixed material includes silicon dioxide or alumina as a ceramic, In addition, when the catalyst contains 6.5 wt% to 8.5 wt% of vanadium pentoxide, it is possible to secure an adsorption capacity such that the equilibrium adsorption amount of acetone is 16 wt% or more. As a result, the dust removal ability and the air cleaning ability required in the clean room in the semiconductor manufacturing facility can be sufficiently secured by a simple adsorbent. In the intensive study of the inventor of the present invention, when the first mixed material contains 70 wt% or more of activated carbon, 21 wt% of aluminum oxide, and 6 wt% of silicon dioxide, the cost is extremely effectively suppressed. However, good removal and cleaning ability was secured. Further, the ceramic which is the main component in the second mixed material is contained in the ratio of 55 to 90 wt% in the second mixed material. When the second mixed material contains silicon dioxide as a ceramic, titanium dioxide may be contained in the second mixed material.

(Details of Configuration of Air Purification Device 101)
Details of the configuration of the air purification device 101 will be described with reference to FIG. FIG. 5 corresponds to FIG. 2 of Patent Document 1.

In the air cleaning apparatus 101 (also referred to as batch TSA apparatus 10) shown in FIG. 5, the processing air flows from the processing air inlet 1 into the high performance filter (1) 11 for removing particulate contaminants, and then 1) Through the valve 12, it flows into the adsorbent unit (A) 13A of the (A) system in the adsorption mode. After the molecular contaminant is adsorbed and removed by the adsorbent unit (A) 13A, it becomes ultra high purity air, and the distributor (A) 14A installed between the adsorbent unit (A) 13A and the second valve 15 Flow into The adsorbent unit (A) 13A corresponds to the adsorption unit 101a in FIGS. 1 to 3 described above.

A part of ultra-high purity air is branched by the distributor (A) and used as regeneration air. The regeneration air is air used in the step (regeneration mode) of sending the heated air (regeneration air) to the adsorbent unit in which the adsorption mode has ended and desorbing the adsorbed impurities.

In the distributor (A) 14A, when the adsorption mode is (A), the regeneration mode is (B). Here, (A) ultra-high purity air flowing from the system through the second valve 15 to the ultra-high purity air delivery port 16 and regenerating air flowing from the second valve 15 through the regenerating air heating unit 28 to the (B) system The flow rate ratio of is a predetermined flow rate ratio in the range of 1: 1 to 1: 0.05. Note that the atmosphere may be introduced directly using a regenerative air introduction fan without using a distributor.

The ultra high purity air which has been branched and passed through the distributor (A) 14A flows in the ultra high purity air duct (A) 18A and flows through the second valve 15 and the ultra high purity air delivery duct 19 to be ultra high. It flows into the purity air delivery port 16.

In the adsorbent unit (A) 13A and the adsorbent unit (B) 13B, 70% or more of the adsorbent is activated carbon and is formed in a honeycomb shape, but is plate-like, sheet-like or granular (billet-like) May be Examples of the activated carbon include activated coke, graphite, carbon, activated carbon fiber and the like. The adsorbent unit (B) 13B corresponds to the adsorption unit 101b in FIGS. 1 to 3 described above.

As the first valve 12 and the second valve 15 of the air cleaning device 101, it is desirable to use a four-port automatic switching valve described in Japanese Patent No. 4644517 (Patent Document 3).

The regeneration operation of the air purification apparatus 101 (batch TSA apparatus 10) will be described. In the distributor (A) 14A shown in FIG. 5, when the adsorption mode is the (A) system, the regeneration mode is the (B) system, so from the (A) system through the second valve 15 ultra high purity The supply air flowing to the air delivery port 16 and the regeneration air flowing from the second valve 15 to the (B) system through the regeneration air heating unit 28 are distributed at a flow ratio in the range of 1: 1 to 1: 0.05. Ru.

The regeneration mode is composed of a heating time zone and a cooling time zone. When the regeneration mode is the heating time zone, the regeneration air branched by the distributor (A) 14A of FIG. 5 is boosted by the regeneration air blower 22 through the regeneration air three-way valve 20 and is supplied to the regeneration air preheater 24. It flows in and recovers the waste heat of the high temperature regenerated air. Thereby, the regeneration air itself is preheated from normal temperature to 150 to 200 ° C. Next, the regeneration air flows into the regeneration air heater 25, is heated to 200 to 250 ° C., flows out, and passes through the second valve 15 through the ultra-high purity air duct (B) 18B and the distributor (B) 14B to obtain the adsorbent unit (B) Flow into 13B.

The adsorbent is heated by the regeneration air heated to 200 to 250 ° C. flowing into the adsorbent unit (B) 13B, and in the previous cycle, when the system (B) is in the adsorption mode, it adsorbs to the adsorbent at normal temperature Contaminants such as ammonia that have been removed are desorbed and mixed in the flow of the regenerated air at high temperature.

The concentration of pollutants such as ammonia in the regeneration air is equivalent to that in the ultra-high purity air branched from the distributor (A) 14A. Moreover, since this is heated to a high temperature and used for desorption, the adsorption equilibrium partial pressure is significantly lower than the adsorption equilibrium partial pressure at normal temperature. When heating to 200 to 250 ° C, the thermal expansion causes the volumetric flow rate of the regenerated air to be 1.61 to 1.78 times that of the clean air at normal temperature, and the thermal energy necessary for desorption of the adsorbed substance is of course the adsorbent A sufficient flow rate can be provided as the amount of regeneration air flowing through the bed, and the molecular contaminants in the bed are completely desorbed and discharged from the adsorbent unit.

The regenerated air flowing out of the adsorbent unit (B) 13B is cooled to 60 to 70 ° C. by the regeneration air preheater 24 through the first valve 12, and at the same time, heat exchange is performed to preheat the regeneration air at normal temperature. The exhaust air is discharged from the regeneration air outlet 27 to the exhaust gas cooling unit 104.

Next, when the regeneration mode reaches the cooling time zone, the regeneration air pressurized by the regeneration air blower 22 flows through the regeneration air preheater 24 and the regeneration air heater 25 and the ultra high purity air duct (secondary valve 15 B) Flow into adsorbent unit (B) 13B via 18B and distributor (B) 14B. When the regeneration mode is in the cooling time zone, the regeneration air heater 25 is not energized, so the regeneration air that has flowed in is at normal temperature, the adsorbent unit (B) 13B, the first valve 12, the regeneration air preheater 24, It flows through the regeneration air outlet 27. Naturally, immediately after switching from the heating time zone to the cooling time zone, the regeneration air at normal temperature is the regeneration air preheater 24, the regeneration air heater 25, the second valve 15, the ultrahigh purity air duct 18B, the distributor (B ) 14B flows through the adsorbent unit (B) 13B, the regeneration air preheater 24, and the regeneration air outlet 27 while cooling.

When the (A) system in the adsorption mode is switched to the regeneration mode, the regeneration air heater 25 is energized as a heating time zone, so the regeneration air has an ultra-high purity air duct (A) 18A, a distributor ( A) The heat flows through 14A, the adsorbent unit (A) 13A, the regeneration air preheater 24, and the regeneration air outlet 27 while heating.

When the adsorption mode is (B), the regeneration mode is (A), so the process air flows through the first valve 12 and the adsorbent unit (B) 13B to become clean air, and the distributor (B) 14B, the second valve 15, and the ultra-high purity air delivery port 16 sequentially flow, and the regeneration air branched by the distributor (B) 14B is the regeneration air three-way valve 20, the regeneration air blower 22, the regeneration air preheater 24, the regeneration The air heater 25, the second valve 15, the ultra-high purity air duct (A) 18A, the adsorbent unit (A) 13A, the first valve 12, the regeneration air preheater 24, and the regeneration air outlet 27 flow in this order and processed Ru.

(Details of the configuration of the air conditioner 102)
The configuration of the air conditioner 102 is the same as the configuration of the industrial air conditioner described in Patent Document 2. Hereinafter, the contents of Patent Document 2 are substantially reproduced.

The configuration of the air conditioner 102 will be described with reference to the embodiment shown in FIG. 6. The refrigeration cycle of the air conditioner 102 comprises a compressor 14, an oil separator 16, a condenser 17, an electronic expansion valve 18, and an accumulator 13. Connect them with piping to circulate and form the refrigerant. The cooling dehumidifier 1 is disposed and stored on the intake air inlet 22 a side upstream of the duct, and the heater 2, the heater 3, the humidifier 4 and the humidifier heater 5 are also disposed downstream of the cooling dehumidifier 1. The blower 11 is disposed and stored in the duct 22 located on the side, the duct 22 on the downstream side of the humidifier 4 is the suction port 11a, and the discharge port 11b is a duct for discharging the adjusted supply air. It is connected to the downstream supply air outlet 22b.

The intake air is introduced into the intake air inlet 22a on the upstream side of the duct and flows into the cooling dehumidifier 1, as shown by the left arrow in FIG. The temperature sensor 35 and the intake air-related humidity sensor 36 measure the flow rate, flow rate, temperature, and related humidity of the intake air. On the other hand, at the same time, the supply air is supplied by the supply air temperature sensor 8, supply air related humidity sensor 6, and supply air static pressure sensor 28 in the duct downstream side to the outlet 11b of the blower 11 and the supply air outlet 22b. The temperature of the air and the relative humidity are measured and input to the calculation means 26. Further, the total pressure of the environment at the place where the air conditioning apparatus 102 is installed is measured by the pressure sensor 33 provided on the outer surface of the air conditioning apparatus 102 and is input to the calculation means 26.

Various values are calculated by the calculating means 26 using the various measured values input, and the amount of water in the intake air: M ₁ X ₁ / (1 + X ₁ ) [kg (water) / h] (2) Moisture content of supply air: M ₂ X ₂ / (1 + X ₂ ) [kg (water) / h], (3) Temperature of intake air: T ₁ [° C], (4) Temperature of supply air: T ₂ [° C.], (5) air temperature after heating: t _A [° C.], the magnitude of (X) M ₁ X ₁ / (1 + X ₁ ) and M ₂ X ₂ / (1 + X ₂ ) , (Y) Calculate the magnitude of T ₁ and T ₂ -Δt. (Z) If T ₁ <T ₂ −Δt, further, the magnitude of T ₁ and t _A is calculated. Here, M ₁ [kg (wet air) / h] is the mass flow rate of intake air, X ₁ [kg (water) / kg (dry air)] is the absolute humidity of intake air, M ₂ [kg (wet air) / H] is the mass flow rate of the supplied air, and X ₂ [kg (water) / kg (dry air)] is the absolute humidity of the supplied air. Further, .DELTA.t is a value determined by the use condition of the blower 11 attached to the air conditioner, and a measurement value is incorporated in advance in the calculation means. Further, the temperature difference between t _A and T ₂ -Δt is a value determined by the performance of the heater 2, and a measurement value is incorporated in advance in the calculation means.

From these calculation results, the combinations of intake air conditions and supply air conditions can be classified into five types 1 to 5 shown in Table 4. In addition, places that consume energy can be classified into I to IV shown in Table 4. In each case, (A) necessary cooling and dehumidifying temperature, (B) necessary cooling and dehumidifying heat, (C) necessary refrigerant evaporation temperature, (D) necessary heating heat, and (E) calculation value of necessary humidifying heat Output control signals, and input the respective control signals to the compressor / motor inverter 32, the fan motor inverter 31, and the electronic expansion valve controller 19 so that the number of revolutions of the compressor motor 15, the fan, respectively. The rotational speed of the motor 12 and the opening degree of the electronic expansion valve 18 are controlled.

[Repletion based on rule 26 21.07.2016]

Since the air flowing into the cooling dehumidifier 1 is cooled to a necessary temperature and at the same time a heat quantity corresponding to a predetermined dehumidifying amount is given to the refrigerant by heat exchange, the amount of water to be dehumidified in the cooling dehumidifier 1 is condensed And can be separated. It is detected using the air temperature sensor 23 after dehumidification whether it could cool to the required temperature.

Further, the air flowing out of the cooling dehumidifier 1 and flowing into the heater 2 is detected by the supply air temperature sensor 8 provided in the vicinity of the supply air outlet 22 b and is input to the calculation means 26. _A heater heater so as to have a necessary heating temperature: t _A [° C.] by a control system including the supply air temperature sensor 8, the computing means 26, the heater heater 3, and the heater temperature controller 9. Control the amount of electricity applied to 3. After the heating, the air temperature sensor 24 is used to detect whether the required heating temperature has been reached.

The air that has flowed into the humidifier 4 is detected by a supply air related humidity sensor 6 provided near the supply air outlet 22 b, and is input to the calculation means 26. A control system comprising the supply air-related humidity sensor 6, the calculating means 26, the humidifier heater 5 and the humidifier temperature controller 7 causes the humidifier heater 5 to evaporate and vaporize the necessary amount of humidified water. Control the amount of electricity applied. Whether the necessary amount of humidified water is evaporated or vaporized is detected using a humidifier temperature sensor 25 provided in the humidifier 4. The air flowing out of the humidifier 4 and flowing into the suction port 11a of the blower 11 is boosted by the blower 11 and flows through the duct 22 connected to the discharge port of the air conditioner 102 through the discharge port 11b. It is discharged from the discharge port 22b and supplied to the use point.

FIG. 7 is a diagram showing the configuration of another embodiment of the air conditioner. The refrigeration cycle of the air conditioning apparatus shown in FIG. 7 basically includes the same apparatus as the apparatus shown in FIG. 6, and is connected by similar piping to circulate the refrigerant. In this air conditioning apparatus, the duct 22 for introducing intake air is branched into the main flow duct 39 and the subflow duct 40 at a position upstream from the inflow port of the cooling dehumidifier 1, and intake air is respectively upstream of the duct 22. It differs in that it was configured to flow into the ducts 39, 40.

In the main flow duct 39, the cooling dehumidifier 1 is disposed. The main flow duct 39 is disposed at an intermediate position between the outlet of the cooling dehumidifier 1 and the inlet of the heater 2, and the cooling dehumidifier 1 is It is comprised so that the downstream end of the diverted sidestream duct 40 may be united. The intake air is introduced by the intake air flow rate sensor 34, the intake air temperature sensor 35, and the intake air related humidity sensor 36 when introduced into the intake air inlet 22a as shown by the left arrow in FIG. After the flow velocity of air, temperature, and relative humidity are measured, it branches and flows into the main flow duct 39 and the side flow duct 40.

Intake air flowing in the main flow duct 39 is taken at the intake air inlet 22a by the intake air flow rate sensor 34, the intake air temperature sensor 35, and the intake air related humidity sensor 36, respectively. After being measured, it flows into the cooling dehumidifier 1. Further, the intake air that has flowed into the side flow duct 40 measures the flow rate or flow rate of the air flowing in the side flow duct 40 by the side flow duct velocity sensor 41, and the air flowing in the main flow duct 39 and the side flow duct 40 The measured value of the flow velocity or flow rate of Further, in the duct 22 to the outlet 11b of the blower 11 and the supply air outlet 22b, the supply air measures the temperature and the related humidity by the supply air temperature sensor 8 and the supply air relation humidity sensor 6, and the calculation means 26 Enter in The total pressure of the environment is measured using a pressure sensor 33 installed on the outer surface of the air conditioning apparatus, and the measured value is input to the calculation means 26.

Various values are calculated by the calculating means 26 using various input measured values, and the amount of water in the intake air: M ₁ X ₁ / (1 + X ₁ ) [kg (water) / h] ], (2) Moisture content of supply air: M ₂ X ₂ / (1 + X ₂ ) [kg (water) / h], (3) Temperature of intake air: T ₁ [° C.], (4) Temperature of supply air : T ₂ [° C.], (5) Air temperature after heating: t _A [° C.], the magnitude of (X) M ₁ X ₁ / (1 + X ₁ ) and M ₂ X ₂ / (1 + X ₂ ) In the case where (Y) T ₁ and T ₂ -Δt are calculated or (Z) T ₁ <T ₂ -Δt, it is further possible to calculate the size of T ₁ and t _A as shown in FIG. Are the same as in the embodiment of FIG.

Furthermore, based on the calculation results, the combinations of intake air conditions and supply air conditions are classified into five types 1 to 5 in Table 4 and energy consuming locations according to I to IV in Table 4, respectively. For the case, (A) necessary cooling dehumidification temperature, (B) necessary cooling dehumidifying heat amount, (C) necessary refrigerant evaporation temperature, (D) necessary heating heat amount, (E) converting the required value of humidification heat amount required The control signals are output and the control signals are input to the compressor / motor inverter 32, the fan motor inverter 31, and the electronic expansion valve controller 19, respectively. The number of rotations of the compressor motor 15 and the fan motor 12 The control of the rotational speed of the valve and the opening degree of the electronic expansion valve 18 is also the same as in the first embodiment.

Note that the air flowing into the cooling dehumidifier 1 in the main flow duct 39 is cooled to a necessary temperature, and at the same time, the heat is equivalent to a predetermined amount of dehumidification to be given to the refrigerant by heat exchange. It is also the same as the above embodiment to condense the amount of water to be done to enable separation, and to detect whether the temperature has been cooled to the required temperature using the air temperature sensor after dehumidification.

Furthermore, the air that has flowed out of the cooling dehumidifier 1 and merged with the air that has flowed in the subflow duct 40 downstream flows into the heater 2, but at that time the supply air temperature sensor provided near the supply air outlet 22b It detects by 8 and inputs to the calculating means 26. The air flowing into the heater 2 is required to have a necessary heating temperature: t _A [° C., by a control system including the supply air temperature sensor 8, the computing means 26, the heater heater 3, and the heater temperature controller 9. Control of the amount of electricity applied to the heater 5 so as to become], and detection of the required heating temperature using the air temperature sensor 24 after heating are also the same as in the above embodiment. is there.

The air that has flowed into the humidifier 4 is detected by a supply air related humidity sensor 6 provided near the supply air outlet 22 b and is input to the calculation means 26. A humidifier heater is configured to evaporate and vaporize a necessary amount of humidified water by a control system including the supply air-related humidity sensor 6, the arithmetic unit 26, the humidifier heater 5, and the humidifier temperature controller 7. Control of the amount of electricity applied to 5 and detecting whether the necessary amount of humidified water is evaporated or vaporized using the humidifier temperature sensor 25 provided in the humidifier 4 It is the same as the example.

Next, the calculation method based on the numerical value obtained by each measurement means in the air conditioning apparatus will be described. (1) Total pressure of environment (usually atmospheric pressure), (2) Intake air Flow rate or flow rate or total pressure of blower, (3) temperature of intake air, (4) relative humidity of intake air can be measured at any time, and further, (5) temperature of supply air, (6) relative humidity of supply air (7 ) Since the static pressure of the supply air can be set at any time, input those values into the calculation means, the mass flow of intake air: M ₁ [kg (wet air) / h], absolute humidity: X ₁ [kg ( Water) / kg (dry air)], wet air enthalpy (hereinafter referred to as "enthalpy"): i ₁ [kJ / kg (dry air)] mass flow of feed air to adjust: M ₂ [kg (wet air) / H], absolute humidity: X ₂ [kg (water) / kg (dry air)], enthalpy: i ₂ [kJ / kg (dry air)] is determined.

These numerical values are values calculated taking into consideration all the weather conditions. Since it may be difficult to attach a flow velocity or flow rate sensor depending on the air conditioner, if the relationship between the total pressure and the air volume of the blower is built in advance in the calculation means, the total pressure of the blower at that time can be obtained. By calculating, the air volume, that is, the flow rate can be obtained. In the present invention, in addition to the calculation of the above-mentioned numerical value, the following calculation is performed by the calculation means.

[1] The moisture content of the intake air is greater than the moisture content of the supply air to be adjusted, and the temperature of the intake air: T ₁ [° C.] is higher than the temperature T ₂ -Δt [° C] at the blower inlet of the supply air In the case of M ₁ X ₁ / (1 + X ₁ ) ≧ M ₂ X ₂ / (1 + X ₂ ), and T ₁ TT ₂ −Δt, cooling and dehumidification is obtained, and the following (1) The amount of dehumidification required by the equation: ΔW [kg (water) / h] is calculated using calculation means. [Delta] t [[deg.] C.] is a temperature increase caused by the adiabatic compression of air by the blower, and is a value determined by the operating conditions of the blower. These measured values are incorporated in advance in the calculation means. And since (DELTA) W has shown the required dehumidification amount, in (1) Formula, in the case of (DELTA) W> = 0, it is not necessary to humidify.

ΔW = M ₁ X ₁ / (1 + X ₁ ) -M ₂ X ₂ / (1 + X ₂ ) (1)
Next, the absolute humidity of air at the outlet of the cooling dehumidifier: X _C [kg (water) / kg (dry air)] is calculated by equation (2).

X _C = M ₂ X ₂ / [(M _1- ΔW) (1 + X ₂ )-M ₂ X ₂ ] (2)
Further, the water vapor pressure in the air at the outlet of the cooling dehumidifier: p [kPa] is calculated by the equation (3), and subsequently, the required cooling dehumidification temperature, ie, the temperature of the air at the outlet of the cooling dehumidifier: Calculate T _C [° C.].

p _C = πX _C /(0.6220 2 + X _C ) ........ (3)
T _C = f ⁻¹ (p _C ) ............ (4)
Here, π [kPa] is the total pressure of the environment, and p _C [kPa] is the saturated water vapor pressure at the temperature: T _c [° C.]. The functional relationship p _C = f (T _C ) of p _C and T _C is incorporated in the calculation means. The equation (4) is an inverse function of P _c = f (T _c ).

Subsequently, the enthalpy of air at the outlet of the cooling dehumidifier: i _C [kJ / kg (dry air)] is determined to obtain the necessary amount of cooling dehumidification heat, ie, cooling dehumidification heat load: Q ₁ [kJ / h] (5 ) To calculate.

Q ₁ = M ₁ i ₁ / (1 + X ₁ )-(M ₁ -ΔW) i _C / (1 + X _C ) (5)
The use of Q _1, can decide the amount of circulating refrigerant required, further, because it determines the rotational speed of the compressor motor 15 is not necessary to consume excessive energy. That is, power saving can be achieved.

In this case, since ΔW00 and T _C <T ₂ −Δt, heating is necessary but humidification is not necessary. That is, the power for humidification can be reduced.

Necessary evaporation temperature of refrigerant: T _R [° C.] is obtained by the equation (6).

T _R = [T _1- T _C exp {(S / Q ₁ ) (T _1- T _C )}] / [1-exp {(S / Q ₁ ) (T _1- T _C )}] · · · ( 6)
In the equation (6), S [kJ / h · ° C.] is a constant determined by the cooling dehumidifier, and a measurement value is incorporated in advance in the calculation means. The temperature of intake air: T ₁ [° C.] is a measured value, and the temperature of air at the outlet of the cooling dehumidifier: T _C [° C.] is a calculated value according to the equation (4) above, and the required amount of heat for cooling and dehumidification: Q ₁ [KJ / h] is a value calculated by the equation (5). Further, as described above, the temperature difference between t _A and T ₂ -Δt is a measurement value incorporated in advance in the calculation means.

[2] Next, the moisture content of the intake air is greater than the moisture content of the supply air to be adjusted, and the temperature T ₁ [° C.] of the intake air is the temperature at the blower inlet of the supply air: T ₂ −Δt [° C. In the case of lower than M ₁ × ₁ / (1 + X ₁ )> M ₂ × ₂ / (1 + X ₂ ), and T ₁ <T _2- Δt, cooling and dehumidification is achieved. Then, the required amount of dehumidification: ΔW [kg (water) / h] is calculated by the equation (1).

In this _{way, T 1, T 2, T} C, t A, X 1, X 2, X C, the value of the ΔW is determined, enthalpy in the cooling dehumidifier _inlet: i 1 [kJ / kg (dry Air)], enthalpy at the cooling dehumidifier outlet: i _C [kJ / kg (dry air)], enthalpy at the heater outlet: i _A [kJ / kg (dry air)]: enthalpy at the humidifier outlet: i ₃ [ kJ / kg (dry air)] can be calculated, therefore, necessary heat for cooling and dehumidification: Q ₁ [kJ / h], heat required for air cooling: Q ₁₁ [kJ / h], necessary for condensation of water The amount of heat: Q ₁₂ [kJ / h], the necessary amount of heating heat: Q ₂ [kJ / h], and the necessary amount of humidified heat: Q ₃ [kJ / h] can be calculated. In the case of the above [1], since there is no need for humidification, ΔW = 0 and Q ₃ = 0.

Next, the absolute humidity of air at the outlet of the cooling dehumidifier: X _C [kg (water) / kg (dry air)] is calculated by the equation (2). Subsequently, the partial pressure of water vapor in air at the outlet of the cooling dehumidifier: p _C [kPa] is calculated by the equation (3), and further, the necessary cooling dehumidifying temperature: T _c [° C.] is calculated by the equation (4). After calculating the enthalpy of air at the outlet of the cooling dehumidifier: i _C [kJ / kg (dry air)], the necessary amount of heat for cooling dehumidification, that is, the heat load for cooling dehumidification: Q ₁ [kJ / k Let h] be calculated by the equation (5). In this case, since ΔW> 0 and T _C <T ₂ −Δt, heating is necessary but humidification is not necessary. That is, power for humidification becomes unnecessary, and power can be saved. Then, as described above, since S, T ₁ , T _c and Q ₁ are given, the necessary refrigerant temperature: T _R [° C.] can be calculated by the equation (6).

Similarly, [3] the moisture content of the intake air is less than the moisture content of the feed air to be adjusted, and the temperature of the intake air: T ₁ [° C.] is the temperature at the blower inlet of the feed air: T ₂ When higher than −Δt [° C.], that is, when M ₁ X ₁ / (1 + X ₁ ) <M ₂ X ₂ / (1 + X ₂ ) and T ₁ TT ₂ −Δt, and [4] When the moisture content of the intake air is less than the moisture content of the supply air to be adjusted, and the temperature of the intake air: T ₁ [° C] is lower than the temperature at the blower inlet of the supply air: T _2- Δt [° C] That is, when M ₁ X ₁ / (1 + X ₁ ) <M ₂ X ₂ / (1 + X ₂ ) and T ₁ <T ₂ −Δt and T ₁ ≦ t _A , further, [5] incorporation The moisture content of the air is less than the moisture content of the supply air to be adjusted, and the intake air Temperature _{T 1} [° C.] temperature at the blower inlet of the supply _air: If _T 2 _-Δt [℃] lower than, _{i.e., M 1 X 1 / (1} + X 1) at _{<M 2 X 2 / (1} + X 2) And, each of the devices is controlled by calculating for the case of T ₁ <T ₂ −Δt and T ₁ > t _A.

100 air purification system 101 air purification device 102 air conditioner 103 HEPA device 104 exhaust cooling unit

Claims (9)

An adsorption system comprising two adsorption units capable of regenerating adsorption capacity, wherein the adsorption capacity of the other adsorption unit is to be regenerated when one adsorption unit is adsorbing a contaminant in the processing air Type air cleaner, and
An air conditioner controlling temperature and humidity of air cleaned by the air cleaning device;
A HEPA device supplied with air whose temperature and humidity are controlled by the air conditioner;
An air purification system comprising
70% or more of the adsorbent of the adsorption unit of the air purification device comprises activated carbon,
The air conditioner can control air in the range of -10 ° C. to 80 ° C. within the range of 20 ° C. to 27 ° C. and the humidity of 40% to 50%.
The HEPA device has the ability to remove particles of 0.3 μm or more,
The air passing through the HEPA apparatus is characterized in that the ammonia is 5 ppb or less, acetone is 10 μg / m ³ or less, NOx which is nitrogen oxide is 20 ppb or less, and SOx which is sulfur oxide is cleaned to 20 ppb or less. Air purification system. The air conditioner can control air of 36 m ³ / min or less in the range of -10 ° C to 80 ° C with an accuracy of ± 0.1 ° C with respect to the target temperature in the range of 20 ° C to 27 ° C. The air cleaning system according to claim 1, wherein the air cleaning system is controllable with an accuracy of ± 0.5% with respect to a target humidity within the range of 40% to 50%. The air purification system according to claim 1 or 2, wherein the adsorption unit has an SV value in the range of 8000 to 10000. The air purification system according to any one of claims 1 to 3, wherein the air having passed through the HEPA device is cleaned of volatile organic compounds to 10 μg / m ³ or less. An adsorption system comprising two adsorption units capable of regenerating adsorption capacity, wherein the adsorption capacity of the other adsorption unit is to be regenerated when one adsorption unit is adsorbing a contaminant in the processing air Type air cleaner, and
An air conditioner controlling temperature and humidity of air cleaned by the air cleaning device;
A ULPA device supplied with air whose temperature and humidity are controlled by the air conditioner;
An air purification system comprising
70% or more of the adsorbent of the adsorption unit of the air purification device comprises activated carbon,
The air conditioner can control air in the range of -10 ° C. to 80 ° C. within the range of 20 ° C. to 27 ° C. and the humidity of 40% to 50%.
The ULPA device has the ability to remove particles greater than 0.1 μm,
The air passing through the ULPA apparatus is characterized in that the ammonia is 5 ppb or less, acetone is 10 μg / m ³ or less, NOx which is nitrogen oxide is 20 ppb or less, and SOx which is sulfur oxide is cleaned to 20 ppb or less. Air purification system. An adsorption system comprising two adsorption units capable of regenerating adsorption capacity, wherein the adsorption capacity of the other adsorption unit is to be regenerated when one adsorption unit is adsorbing a contaminant in the processing air Type air cleaner, and
An air conditioner controlling temperature and humidity of air cleaned by the air cleaning device;
A HEPA device supplied with air whose temperature and humidity are controlled by the air conditioner;
An air purification system comprising
The adsorbent of the adsorption unit of the air purification apparatus includes 55 wt% of a first mixed material mainly composed of activated carbon and 45 wt% of a second mixed material mainly composed of ceramics,
The first mixed material contains 70 wt% or more of activated carbon,
The air conditioner can control air in the range of -10 ° C. to 80 ° C. within the range of 20 ° C. to 27 ° C. and the humidity of 40% to 50%.
The HEPA device has the ability to remove particles of 0.3 μm or more,
The air passing through the HEPA apparatus is characterized in that the ammonia is 5 ppb or less, acetone is 10 μg / m ³ or less, NOx which is nitrogen oxide is 20 ppb or less, and SOx which is sulfur oxide is cleaned to 20 ppb or less. Air purification system. An adsorption system comprising two adsorption units capable of regenerating adsorption capacity, wherein the adsorption capacity of the other adsorption unit is to be regenerated when one adsorption unit is adsorbing a contaminant in the processing air Type air cleaner, and
An air conditioner controlling temperature and humidity of air cleaned by the air cleaning device;
A ULPA device supplied with air whose temperature and humidity are controlled by the air conditioner;
An air purification system comprising
The adsorbent of the adsorption unit of the air purification apparatus includes 55 wt% of a first mixed material mainly composed of activated carbon and 45 wt% of a second mixed material mainly composed of ceramics,
The first mixed material contains 70 wt% or more of activated carbon,
The air conditioner can control air in the range of -10 ° C. to 80 ° C. within the range of 20 ° C. to 27 ° C. and the humidity of 40% to 50%.
The ULPA device has the ability to remove particles greater than 0.1 μm,
The air passing through the ULPA apparatus is characterized in that the ammonia is 5 ppb or less, acetone is 10 μg / m ³ or less, NOx which is nitrogen oxide is 20 ppb or less, and SOx which is sulfur oxide is cleaned to 20 ppb or less. Air purification system. The first mixed material contains 20 to 22 wt% of aluminum oxide and 4 to 6 wt% of silicon dioxide.
The air purification system according to claim 6 or 7, characterized in that: The second mixed material contains silicon dioxide or alumina as the ceramic and 6.5 wt% to 8.5 wt% of vanadium pentoxide as a catalyst.
The air purification system according to any one of claims 6 to 8, characterized in that:

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