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WO2016036019A1 - Appareil de transport de substrats - Google Patents

Appareil de transport de substrats Download PDF

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Publication number
WO2016036019A1
WO2016036019A1 PCT/KR2015/008283 KR2015008283W WO2016036019A1 WO 2016036019 A1 WO2016036019 A1 WO 2016036019A1 KR 2015008283 W KR2015008283 W KR 2015008283W WO 2016036019 A1 WO2016036019 A1 WO 2016036019A1
Authority
WO
WIPO (PCT)
Prior art keywords
belt
substrate
cassette
transfer member
transfer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/KR2015/008283
Other languages
English (en)
Korean (ko)
Inventor
양창실
김태룡
박종인
권기청
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
BI EMT Co Ltd
Original Assignee
BI EMT Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by BI EMT Co Ltd filed Critical BI EMT Co Ltd
Priority to CN201580016379.8A priority Critical patent/CN106537575A/zh
Publication of WO2016036019A1 publication Critical patent/WO2016036019A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • H10P72/3202—
    • H10P72/30—

Definitions

  • the present invention relates to a substrate transfer apparatus, and more particularly, to a substrate transfer apparatus capable of moving flat plate-like substrates at regular intervals.
  • substrate processing processes such as deposition, etching, and cleaning are generally performed.
  • the substrates In order to perform these processes, the substrates must be moved by maintaining a constant interval in each process.
  • Such a conveyor simply has a function of moving the substrates placed on the upper side, so that the intervals of the substrates that are introduced into the upper portion of the conveyor are not constant.
  • An object of the present invention is to provide a substrate transfer apparatus capable of moving a plurality of substrates while maintaining a constant gap, to solve the above problems.
  • the substrate transfer apparatus of the present invention comprises: a cassette in which a plurality of substrates are inserted; And a second transfer member configured to transfer the substrate inserted into the cassette in one direction, the second transfer member comprising: a second belt configured to move in one direction to the substrate formed in an orbital shape and placed on an upper surface thereof; A plurality of locking protrusions protruding from and spaced apart from each other on an upper surface of the second belt; And a second driving part for rotating the second belt, wherein the substrate supplied to the second belt from the cassette is in contact with the locking protrusion to prevent relative movement of the substrate with respect to the second belt. do.
  • the second transfer member may further include a guide member disposed at both sides of the transfer direction of the second belt to guide both sides of the substrate transferred in one direction by the second belt.
  • the guide member is mounted to be movable in the vertical direction of the conveying direction of the second belt.
  • the protruding length of the locking projections is larger than the thickness of the substrate.
  • the locking projection is formed in a shape in which the width of the upper surface is smaller than the width of the lower surface.
  • the cassette is elevated in the vertical direction to supply the substrate inserted into the substrate to the second transfer member.
  • a first transfer member disposed between the cassette and the second transfer member to transfer the substrate supplied from the cassette to the second transfer member.
  • the first transfer member may include a first belt configured to transfer the substrate, which has an orbital shape and is placed on an upper surface thereof, to the second belt; And a first driving part for rotating the first belt, wherein the cassette is lifted in the vertical direction to lower the substrate inserted into the upper surface of one end of the first belt.
  • the substrate supplied to the second belt is in contact with the locking projection to prevent relative movement of the substrate with respect to the second belt.
  • the first transfer member further comprises a belt moving unit for linearly moving the first belt in the cassette direction.
  • the plurality of substrates may be moved in one direction while maintaining a constant interval at all times by the locking protrusion formed on the second belt, so that the pickup device may easily move the substrate at a predetermined time interval.
  • FIG. 1 is a perspective view of a substrate transfer apparatus according to an embodiment of the present invention
  • FIG. 2 is a side view of the substrate transfer apparatus according to the embodiment of the present invention.
  • FIG. 3 is a plan view of a substrate transfer apparatus according to an embodiment of the present invention.
  • 4a to 4c is an operation process of the cassette and the first transfer member in the substrate transfer apparatus according to an embodiment of the present invention
  • 5a to 5c is an operation process diagram of the first transfer member and the second transfer member in the substrate transfer apparatus according to an embodiment of the present invention
  • FIG 1 is a perspective view of a substrate transfer apparatus according to an embodiment of the present invention
  • Figure 2 is a side view of a substrate transfer apparatus according to an embodiment of the present invention
  • Figure 3 is a plan view of a substrate transfer apparatus according to an embodiment of the present invention.
  • 4A to 4C are diagrams illustrating the operation of the cassette and the first transfer member in the substrate transfer apparatus according to the embodiment of the present invention
  • FIGS. 5A to 5C illustrate the first transfer in the substrate transfer apparatus according to the embodiment of the present invention.
  • the operation process diagram of a member and a 2nd conveying member is shown.
  • the substrate transfer apparatus of the present invention includes a cassette 10, a first transfer member 20, and a second transfer member 30.
  • the cassette 10 has a plurality of substrates 40 (a wafer, a silicon substrate, etc.) inserted therein and are stacked in the vertical direction.
  • substrates 40 a wafer, a silicon substrate, etc.
  • the cassette 10 has a discharge hole 11 which is opened up and down and forward in the center of the center, so that the cassette 10 supports the edge of the substrate 40.
  • the cassette 10 is installed to be lifted up and down.
  • the cassette 10 is disposed inside the frame 17, and the cassette 10 is moved upward and downward by using an elevating cylinder 15 located above.
  • the first transfer member 20 is disposed between the cassette 10 and the second transfer member 30 to transfer the substrate 40 supplied from the cassette 10 to the second transfer member 30. It serves to transfer.
  • the first transfer member 20 includes a first belt 21, a first driving unit 22, and a belt moving unit 23.
  • the first belt 21 has an orbital shape and transfers the substrate 40 discharged from the cassette 10 to the second transfer member 30 on an upper surface thereof.
  • One end of the first belt 21 is disposed adjacent to the cassette 10, and the other end of the first belt 21 is disposed adjacent to the second transfer member 30.
  • one end of the first belt 21 is inserted into the discharge hole 11 of the cassette 10, and the cassette is brought into surface contact with a lower portion of the substrate 40 inserted into the cassette 10.
  • the substrate 40 is transferred from the 10.
  • the first driving part 22 is made of a motor or the like to rotate the first belt 21.
  • the belt moving part 23 linearly moves the first belt 21 in the cassette 10 direction.
  • the belt moving unit 23 preferably moves only one end of the first belt 21 in the direction of the cassette 10, not the entirety of the first belt 21.
  • the belt moving part 23 is made of a structure that is stretched in the cassette 10 direction, such as a cylinder.
  • the first transfer member 20 further includes a tension adjusting member (not shown) to prevent the tension of the first belt 21 from being changed by the movement of the belt moving unit 23. To lose.
  • the tension control member moves the first belt 21 having a predetermined length in the direction of the cassette 10, the first belt 21 is always changed by changing the moving path of the first belt 21. It is possible to maintain the same tension, and such a tension adjusting member is sufficient to use a conventionally known parts, more detailed description thereof will be omitted.
  • the cassette 10 is lowered to the upper surface of the one end of the first belt 21, the substrate 40 is raised and lowered in the vertical direction as described above and inserted inserted therein, the first belt 21 Moves the substrate 40 placed thereon in the direction of the second transfer member 30.
  • the second transfer member 30 serves to transfer the substrate 40 inserted into the cassette 10 in one direction.
  • the second transfer member 30 receives the substrate 40 transferred from the cassette 10 to the first transfer member 20 from the first transfer member 20 and transfers it in one direction.
  • the second transfer member 30 includes a second belt 31, a locking protrusion 32, a second driving unit 33, a guide member 34, and the like.
  • the second belt 31 is formed in an orbital shape, and moves the substrate 40 on the upper surface in one direction, that is, in the opposite direction to the cassette 10.
  • the locking protrusion 32 is formed of a plurality of protrusions are spaced apart from each other on the upper surface of the second belt (31).
  • the plurality of the locking projections 32 spaced apart from each other to be spaced at regular intervals.
  • the locking projection 32 is the substrate 40 supplied from the first belt 21 to the second belt 31 is in contact with the locking projection 32 to the second belt 31 The relative movement of the substrate 40 is prevented so that the spacing of the substrate 40 placed on the second belt 31 is always kept constant.
  • the protruding length of the locking projection 32 is larger than the thickness of the substrate 40.
  • the locking protrusion 32 is formed in a shape in which the width of the upper surface is smaller than the width of the lower surface, a separate pickup device for moving the substrate 40 placed on the second transfer member 30 to another place is the substrate ( 40) to be easily lifted in the vertical direction of the second belt (31).
  • the locking protrusion 32 may be integrally formed with the second belt 31, or may be separately formed and coupled through laser or bonding.
  • the second driving part 33 is made of a motor to rotate the second belt 31.
  • the guide member 34 is disposed on both sides of the transfer direction of the second belt 31 to guide both sides of the substrate 40 transferred in one direction by the second belt 31.
  • the guide member 34 is movably mounted in the vertical direction of the transfer direction of the second belt 31 so that the plurality of transferred substrates 40 can be moved along the same line.
  • the present invention may directly supply the substrate 40 inserted into the cassette 10 without the first transfer member 20 to the second transfer member 30.
  • one end of the second transfer member 30 is disposed adjacent to the cassette 10.
  • the cassette 10 is moved in a horizontal direction and disposed adjacent to one end of the first belt 21.
  • one end of the first belt 21 is moved in the direction of the second transfer member 30 so that the cassette 10 is easily moved in the horizontal direction.
  • one end of the first belt 21 is disposed below the discharge hole 11 of the cassette 10 by using the belt moving part 23.
  • the substrate 40 is transported in the opposite direction of the cassette 10 while contacting the upper surface of the rotating first belt 21.
  • the substrate 40 moved from the cassette 10 to the first transfer member 20 is moved to the second transfer member 30 as shown in FIG. 5.
  • the substrate 40 moving in one direction from the first belt 21 is transferred to the second belt 31.
  • the first belt 21 and the second belt 31 there may be a difference in speed between the first belt 21 and the second belt 31, in particular, when the moving speed of the first belt 21 is faster than the moving speed of the second belt 31.
  • the substrate 40 placed on the first belt 21 moves in one direction faster than the moving speed of the second belt 31.
  • the substrate 40 is in contact with the locking protrusion 32 to prevent relative movement of the substrate 40 with respect to the second belt 31, and the locking protrusion 32 is prevented. It is possible to move in the state placed on the second belt (31) between.
  • the substrate ( 40 may be slipped on the upper surface of the second belt 31, in which case the substrate 40 may be prevented from being pushed by the locking protrusion 32 as illustrated in FIG. 5C.
  • the plurality of substrates 40 may be moved in one direction while maintaining a constant interval by the locking protrusions 32 formed on the second belt 31.
  • the substrate 40 placed on the second belt 31 is moved to another place by a separate pickup device.
  • the substrate transfer apparatus of the present invention is not limited to the above-described embodiments, and may be variously modified and implemented within the range in which the technical idea of the present invention is permitted.
  • the present invention can be applied to a device for transferring a substrate, such as a semiconductor substrate, LCD, solar cell.

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Warehouses Or Storage Devices (AREA)

Abstract

La présente invention concerne un appareil de transport de substrats et en particulier un appareil de transport de substrats apte à transporter des substrats plats à des intervalles réguliers. L'appareil de transport de substrats selon la présente invention comprend : une cassette dans laquelle de multiples substrats sont insérés et disposés ; et un second élément de transport pour transporter dans une seule direction les substrats insérés et disposés dans la cassette. Le second élément de transport comprend : une seconde courroie ayant une forme de chenille et transportant dans un seul sens les substrats disposés sur son côté supérieur ; de multiples saillies d'arrêt faisant saillie du côté supérieur de la seconde courroie et ayant des espaces entre elles ; et une seconde unité d'entraînement pour faire tourner la seconde courroie, et le mouvement relatif des substrats par rapport à la seconde courroie est arrêté lorsque les substrats apportés de la cassette à la seconde courroie entrent en contact avec les saillies d'arrêt.
PCT/KR2015/008283 2014-09-02 2015-08-07 Appareil de transport de substrats Ceased WO2016036019A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201580016379.8A CN106537575A (zh) 2014-09-02 2015-08-07 基板移送装置

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR10-2014-0116166 2014-09-02
KR1020140116166A KR101606705B1 (ko) 2014-09-02 2014-09-02 기판 이송장치

Publications (1)

Publication Number Publication Date
WO2016036019A1 true WO2016036019A1 (fr) 2016-03-10

Family

ID=55440032

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/KR2015/008283 Ceased WO2016036019A1 (fr) 2014-09-02 2015-08-07 Appareil de transport de substrats

Country Status (3)

Country Link
KR (1) KR101606705B1 (fr)
CN (1) CN106537575A (fr)
WO (1) WO2016036019A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109920749A (zh) * 2017-12-12 2019-06-21 湘潭宏大真空技术股份有限公司 一种大面积玻璃基板装载机

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101894476B1 (ko) 2016-12-01 2018-10-04 김성용 기판 정렬 투입장치
CN106735933A (zh) * 2016-12-27 2017-05-31 天津曼科科技有限公司 一种太阳能硅晶片自动切割机
KR102350865B1 (ko) * 2017-02-23 2022-01-13 주식회사 원익아이피에스 기판처리시스템 및 그에 사용되는 기판교환모듈
KR101817315B1 (ko) * 2017-07-27 2018-01-11 주식회사 크럭셀 영상판 반송장치 및 이를 이용한 영상판 스캐너
CN117316830B (zh) * 2023-11-28 2024-02-02 成都高投芯未半导体有限公司 一种半导体封装系统及控制方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001010711A (ja) * 1999-06-28 2001-01-16 Naohito Miyashita 伸縮可能なベルトコンベアー
KR20130062837A (ko) * 2011-12-05 2013-06-13 주식회사 테라세미콘 기판 이송 시스템
JP2014007193A (ja) * 2012-06-21 2014-01-16 Kawasaki Heavy Ind Ltd 基板搬送システム
KR20140033496A (ko) * 2011-09-29 2014-03-18 카와사키 주코교 카부시키 카이샤 반송 시스템

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20100040037A (ko) 2008-10-09 2010-04-19 김병준 기판이송용 트레이 및 이를 구비한 진공처리장치

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001010711A (ja) * 1999-06-28 2001-01-16 Naohito Miyashita 伸縮可能なベルトコンベアー
KR20140033496A (ko) * 2011-09-29 2014-03-18 카와사키 주코교 카부시키 카이샤 반송 시스템
KR20130062837A (ko) * 2011-12-05 2013-06-13 주식회사 테라세미콘 기판 이송 시스템
JP2014007193A (ja) * 2012-06-21 2014-01-16 Kawasaki Heavy Ind Ltd 基板搬送システム

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109920749A (zh) * 2017-12-12 2019-06-21 湘潭宏大真空技术股份有限公司 一种大面积玻璃基板装载机

Also Published As

Publication number Publication date
CN106537575A (zh) 2017-03-22
KR101606705B1 (ko) 2016-03-28
KR20160027716A (ko) 2016-03-10

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