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WO2015029144A1 - Dispositif d'imagerie par rayons x et procédé d'imagerie par rayons x - Google Patents

Dispositif d'imagerie par rayons x et procédé d'imagerie par rayons x Download PDF

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Publication number
WO2015029144A1
WO2015029144A1 PCT/JP2013/072912 JP2013072912W WO2015029144A1 WO 2015029144 A1 WO2015029144 A1 WO 2015029144A1 JP 2013072912 W JP2013072912 W JP 2013072912W WO 2015029144 A1 WO2015029144 A1 WO 2015029144A1
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Prior art keywords
ray
subject
irradiated
ray imaging
imaging apparatus
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PCT/JP2013/072912
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English (en)
Japanese (ja)
Inventor
明男 米山
和浩 上田
英 南部
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Hitachi Ltd
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Hitachi Ltd
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/02—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
    • G01N23/04—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/223—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material by irradiating the sample with X-rays or gamma-rays and by measuring X-ray fluorescence
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N25/00—Investigating or analyzing materials by the use of thermal means
    • G01N25/72—Investigating presence of flaws

Definitions

  • the present invention relates to an X-ray imaging apparatus and an X-ray imaging method, and to an X-ray imaging apparatus and an X-ray imaging method for capturing an image of a subject.
  • An X-ray imaging method using an X-ray microscope as an X-ray imaging apparatus as a method for observing the inside of a subject microscopically in a non-destructive manner.
  • An X-ray imaging method using an X-ray microscope scans, that is, scans, an X-ray beam emitted from an X-ray source and collected by a condensing optical element such as a total reflection mirror or a zone plate on the surface of a subject.
  • a condensing optical element such as a total reflection mirror or a zone plate on the surface of a subject.
  • images indicating various states such as the density distribution of the subject are captured, that is, acquired.
  • An X-ray imaging method using such an X-ray microscope is described in Non-Patent Document 1, for example.
  • the intensity of transmitted X-rays transmitted through the subject mainly depends on the density of the subject. Therefore, by detecting the intensity of transmitted X-rays that have passed through the subject, it is possible to measure the position at which the surface of the subject is irradiated with X-rays, that is, the density of the subject at the irradiation position. Further, fluorescent X-rays having energy corresponding to each element contained in the subject are generated from the subject irradiated with X-rays. Therefore, the type of each element contained in the subject at the irradiation position is detected by detecting the intensity of the fluorescent X-ray corresponding to each element obtained by separating the energy of the fluorescent X-ray generated from the subject using, for example, a semiconductor detector. And the content can be measured.
  • the irradiation position at which the surface of the subject is irradiated with X-rays is adjusted as follows.
  • a standard sample such as a slit or knife edge is attached to a sample stage of an X-ray microscope, and X-rays detected when the standard sample is scanned from a state where the position of the standard sample is positioned around the X-ray irradiation position.
  • the X-ray irradiation position is confirmed on the basis of the fluctuation in intensity.
  • the holder holding the standard sample is removed from the sample stage of the X-ray microscope and attached to the sample stage of an optical microscope using, for example, visible light provided separately from the X-ray microscope.
  • the position of the standard sample is adjusted by the sample stage of the optical microscope so that the center of the visual field in the optical microscope coincides with the X-ray irradiation position.
  • the standard sample is removed from the holder, and the subject is held by the holder in place of the standard sample.
  • the position of the subject is adjusted by an alignment mechanism provided in the holder so that the center of the visual field in the optical microscope matches the position to be observed among the subjects.
  • the holder holding the object is removed from the sample stage of the optical microscope and attached to the sample stage of the X-ray microscope.
  • the focused X-ray is irradiated as an X-ray beam to the position to be observed in the subject.
  • the removal and attachment of the holder for holding the subject are repeated a plurality of times between the optical microscope using visible light and the X-ray microscope. For this reason, the alignment accuracy when adjusting the X-ray irradiation position cannot be improved more than the dimensional error caused by the alignment accuracy during machining, that is, a dimensional error of about several tens of ⁇ m.
  • a three-dimensional shape such as a concavo-convex shape is formed on the surface of the subject, it may be possible to compensate for the above dimensional error by aligning using the three-dimensional shape.
  • An object of the present invention is to provide a technique capable of easily specifying an irradiation position where a subject is irradiated with X-rays in an X-ray imaging apparatus.
  • An X-ray imaging apparatus emits an X-ray source from an X-ray source to an X-ray source that emits a first X-ray, a positioning unit that positions a subject, and a subject that is positioned by the positioning unit A condensing unit that condenses and irradiates the first X-ray.
  • the X-ray imaging apparatus also includes a first detection unit that detects a second X-ray transmitted through the subject by the first X-ray irradiated to the subject, and second X-ray intensity data detected by the first detection unit. And a processing unit for performing a calculation process and acquiring a first image of the subject.
  • the X-ray imaging apparatus includes a thermography that measures the first temperature distribution on the surface of the subject when the subject is irradiated with the first X-ray.
  • the first X-ray emitted from the X-ray source is condensed and irradiated on the object positioned by the positioning unit.
  • the first X-ray irradiated to the subject detects the second X-ray transmitted through the subject by the first detection unit, and the second detection unit detects the third X-ray generated from the subject irradiated with the first X-ray.
  • a calculation process is performed on the intensity data of the second X-ray detected by the first detector to obtain a first image of the subject, and the intensity data of the third X-ray detected by the second detector
  • An arithmetic process is performed to obtain a second image of the subject.
  • the first temperature distribution on the surface of the subject when the subject is irradiated with the first X-ray is measured by thermography.
  • the irradiation position where the subject is irradiated with the X-ray can be easily specified.
  • FIG. 1 is a perspective view illustrating an example of a configuration of an X-ray imaging apparatus according to a first embodiment.
  • 1 is a block diagram illustrating an example of a configuration of an X-ray imaging apparatus according to a first embodiment. It is a front view which shows the structure of an example of a zone plate. It is a perspective view which shows the structure of an example of a zone plate.
  • 2 is a plan view schematically showing a subject rotation positioning mechanism in the X-ray imaging apparatus of Embodiment 1.
  • FIG. 2 is a side view schematically showing a subject rotation positioning mechanism in the X-ray imaging apparatus of Embodiment 1.
  • FIG. FIG. 3 is a flowchart showing a part of the X-ray imaging process of the first embodiment.
  • FIG. 6 is a perspective view illustrating an example of a configuration of an X-ray imaging apparatus according to Embodiment 2.
  • FIG. 6 is a perspective view showing a configuration of an example of an absorption plate in the X-ray imaging apparatus of Embodiment 2.
  • FIG. 10 is a flowchart showing a part of the X-ray imaging process of the second embodiment. It is a figure which shows typically the example which displayed the operation screen for setting the upper limit of the temperature of a to-be-photographed object on the display apparatus.
  • FIG. 10 is a flowchart showing a part of the X-ray imaging process of the fourth embodiment.
  • FIG. 10 is a plan view schematically showing a subject rotation positioning mechanism in the X-ray imaging apparatus of Embodiment 4.
  • the constituent elements are not necessarily indispensable unless otherwise specified and apparently essential in principle. Needless to say.
  • FIG. 1 is a perspective view showing an example of the configuration of the X-ray imaging apparatus according to the first embodiment.
  • FIG. 2 is a block diagram illustrating an example of the configuration of the X-ray imaging apparatus according to the first embodiment.
  • the control unit 8, the processing unit 9, and the display device 10 are not shown.
  • 1 shows an example in which a mirror group composed of total reflection mirrors is used as the condensing optical element 2
  • FIG. 2 shows an example in which a zone plate is used as the condensing optical element 2. .
  • the X-ray imaging apparatus of the first embodiment includes an X-ray source 1, a condensing optical element 2, a subject holder 4 that holds a subject 3, a subject rotation positioning mechanism 5, and a first X It includes a line detector 6, a second X-ray detector 7, a control unit 8, a processing unit 9, a display device 10, and a thermography 11.
  • X-ray source 1 emits X-rays 12. Although it does not specifically limit as the X-ray source 1, for example, a synchrotron radiation light source or an undulator radiation light source can be used. At this time, as the X-rays 12 emitted from the X-ray source 1, for example, X-rays emitted from a synchrotron radiation source or an undulator radiation source are monochromatic to a wavelength of, for example, 0.1 nm by a monochromator Can be used.
  • the condensing optical element 2 is a condensing unit that condenses the X-ray 12 emitted from the X-ray source 1 and irradiates it as an X-ray beam.
  • the condensing optical element 2 is a total reflection mirror that collects light by totally reflecting the X-rays 12, that is, a total reflection mirror.
  • the total reflection mirrors 2a and 2b two elliptical cylindrical mirrors that respectively perform condensing by total reflection in two directions intersecting each other in a plane perpendicular to the optical path of the X-ray 12, that is, in the vertical direction and the horizontal direction, respectively. Can be used. That is, the X-ray 12 can be condensed at one point by total reflection in two directions intersecting each other in a plane perpendicular to the optical path of the X-ray 12.
  • a diffractive optical element that condenses light by diffracting X-rays 12 can be used as the condensing optical element 2.
  • a zone plate 2c can be used as the diffractive optical element.
  • a Fresnel zone plate can be preferably used.
  • FIG. 3 is a front view showing an example of the configuration of the zone plate
  • FIG. 4 is a perspective view showing an example of the configuration of the zone plate.
  • FIG. 3 is a diagram viewed from a direction parallel to the central axis 2f.
  • the zone plate 2c has a plurality of non-transmissive portions 2d that cannot transmit X-rays and a plurality of transmissive portions 2e that can transmit X-rays with a center axis 2f as a center. They are arranged concentrically alternately in the direction.
  • the zone plate 2c functions as a diffraction grating for the X-rays 12 that pass through the transmissive portion 2e by setting the width in the radial direction of each of the plurality of transmissive portions 2e to, for example, the width of about the wavelength of X-rays.
  • the X-rays 12 that are transmitted through the transmission part 2e of the zone plate 2c are diffracted, so that the X-rays 12 are condensed.
  • a zone plate 2c a plurality of non-transparent portions 2d that cannot transmit X-rays are embedded in a plate that transmits X-rays, or the surface of a plate that can transmit X-rays has X-rays. Can be used in which a plurality of non-transmissive portions 2d that cannot transmit light are formed.
  • the X-ray 12 can be condensed at one point by diffracting in two directions intersecting each other in a plane perpendicular to the optical path of the X-ray 12. Therefore, instead of the zone plate, the X-ray 12 can be condensed by the condensing optical element 2 formed by combining two diffractive optical elements, for example.
  • the advantages of using a diffractive optical element made of, for example, a zone plate 2c as the condensing optical element 2 will be considered.
  • adjusting the position of the zone plate 2c is easier than adjusting the positions of the total reflection mirrors 2a and 2b.
  • the zone plate 2c in principle, the use efficiency of X-rays is low and the loss of X-rays is large compared to the case where total reflection mirrors 2a and 2b are used.
  • the condensing optical element 2 it is preferable to select the optimum type of the condensing optical element 2 according to the type of the subject 3.
  • the subject 3 when the subject 3 is made of a material that is highly likely to be denatured even when the intensity of irradiated X-rays is small, such as a biological sample, it is preferable to use the zone plate 2 c as the condensing optical element 2.
  • the subject 3 when the subject 3 is made of a material that is less likely to be denatured even when the intensity of the irradiated X-ray is high, such as a metal material, it is preferable to use the total reflection mirrors 2 a and 2 b as the condensing optical element 2. .
  • the condensing optical element 2 is attached to the condensing optical element positioning mechanism 2g driven by a stepping motor, for example.
  • the condensing optical element positioning mechanism 2g can adjust the incident angle and irradiation position of the X-ray 12 with respect to the subject 3 by adjusting the position and angle of the condensing optical element 2.
  • the beam diameter of the X-ray beam (hereinafter also simply referred to as “beam”) at the irradiation position where the surface of the subject 3 is irradiated with the X-rays 12 can be adjusted to be minimum.
  • the subject 3 irradiated with the X-ray 12 is held by the subject holder 4.
  • the subject holder 4 is detachably attached to the subject rotation positioning mechanism 5, and the irradiation position where the subject 3 is irradiated with the X-rays 12 is adjusted by the subject rotation positioning mechanism 5 described below. That is, the subject rotation positioning mechanism 5 is a positioning unit that positions the subject 3.
  • FIGS. 5 and 6 are a plan view and a side view, respectively, schematically showing a subject rotation positioning mechanism in the X-ray imaging apparatus of the first embodiment.
  • the subject holder 4 (see FIG. 2) is not shown.
  • the subject rotation positioning mechanism 5 includes a rotation stage 5a, an XY stage 5b, and a Z stage 5c as stages for positioning the position of the subject 3 in each direction.
  • the XY stage 5b includes an X stage 5d and a Y stage 5e.
  • the rotary stage 5a is defined by, for example, an X-axis direction and a Y-axis direction orthogonal to the X-axis direction, and is, for example, a center parallel to the Z-axis direction orthogonal to the XY plane in the XY plane that is a horizontal plane.
  • the subject 3, the XY stage 5b, and the Z stage 5c held by the subject holder 4 are rotated about the axis CA.
  • the X stage 5d scans, that is, moves the subject 3, the Y stage 5e, and the Z stage 5c held in the subject holder 4 (see FIG. 2) in the X ′ direction, for example.
  • the Y stage 5e scans, that is, moves, the subject 3 and the Z stage 5c held by the subject holder 4 (see FIG. 2) in the Y ′ direction.
  • the Z stage 5c scans, that is, moves the subject 3 held by the subject holder 4 (see FIG. 2) in the Z-axis direction.
  • FIG. 5 and 6 show an example in which the XY stage 5b is disposed closer to the subject 3 than the rotating stage 5a.
  • the X-axis direction is a direction orthogonal to the direction in which the X-ray 12 is incident in the XY plane, and the Y-axis direction is parallel to the direction in which the X-ray 12 is incident.
  • the X ′ direction which is the scanning direction of the X stage 5d
  • the Y ′ direction is assumed to be a direction parallel to the Y-axis direction.
  • the Y-axis direction only needs to intersect the X-axis direction, and does not necessarily have to be orthogonal to the X-axis direction. Further, the central axis CA and the Z-axis direction need only intersect the XY plane, and do not necessarily have to be orthogonal to the XY plane.
  • a stage driven by a stepping motor or a stage driven by a piezoelectric element can be used as each stage constituting such a subject rotation positioning mechanism 5.
  • the driving time for accelerating / decelerating the stage is as long as about 0.1 to 1 s
  • the driving range is as large as about several mm or more. This is suitable for imaging a large subject 3.
  • the driving range is as small as several hundred ⁇ m
  • the driving time for accelerating and decelerating the stage is as extremely short as about 10 ms. 3 is suitable for imaging at high speed.
  • the subject rotation positioning mechanism 5 is a combination of a stage driven by a stepping motor and a stage driven by a piezoelectric element. Also good. In this case, the subject 3 can be roughly moved to the measurement start point by the stage driven by the stepping motor, and then the measurement can be performed while moving the subject 3 at a high speed by the stage driven by the piezoelectric element.
  • the first X-ray detector 6 is a first detection unit that detects transmitted X-rays 13 transmitted through the subject 3 by the X-rays 12 irradiated to the subject 3.
  • the intensity of the transmitted X-ray 13 that has passed through the subject 3 mainly depends on the density of the subject 3. Therefore, by detecting the intensity of the transmitted X-ray 13 that has passed through the subject 3 by the first X-ray detector 6, the position at which the surface of the subject 3 is irradiated with the X-ray 12, that is, the density distribution of the subject 3 at the irradiation position. An image can be taken, ie acquired.
  • an ion chamber, a PIN photodiode, or a scintillation counter can be used as the first X-ray detector 6, as the first X-ray detector 6, an ion chamber, a PIN photodiode, or a scintillation counter can be used. These have different sensitivity regions, and are suitable for detecting X-rays with higher intensity in the order of ion chamber, PIN photodiode, and scintillation counter. Therefore, as the first X-ray detector 6, an ion chamber, a PIN photodiode, or a scintillation counter can be used properly according to the intensity of the X-ray 12.
  • the second X-ray detector 7 is a second detector that detects fluorescent X-rays 14 generated from the subject 3 irradiated with the X-rays 12.
  • a fluorescent X-ray 14 having energy corresponding to each element contained in the subject 3 is generated from the subject 3 irradiated with the X-ray 12. Therefore, the type and content of each element contained in the subject 3 at the irradiation position is detected by detecting the intensity of the fluorescent X-ray corresponding to each element obtained by separating the energy of the fluorescent X-ray 14 generated from the subject 3. Can be measured.
  • the second X-ray detector 7 for detecting the fluorescent X-ray 14 a semiconductor detector or the like can be used.
  • spectral data indicating the wavelength dependency of the intensity is acquired and stored.
  • the energy corresponding to the element, that is, the intensity of the fluorescent X-ray with the wavelength can be extracted after the measurement, so that a distribution image of the element is taken. That is, can be obtained.
  • the second X-ray detector 7 may detect X-rays generated from the subject 3 irradiated with the X-rays 12 and other than the fluorescent X-rays 14.
  • the X-ray imaging apparatus may have only one of the first X-ray detector 6 and the second X-ray detector 7.
  • the control unit 8 controls operations of the subject rotation positioning mechanism 5, the first X-ray detector 6, the second X-ray detector 7, the processing unit 9, the display device 10, and the thermography 11. Details of the control by the control unit 8 will be described later in the description of the X-ray imaging method.
  • the processing unit 9 performs an arithmetic process on the intensity data of the transmitted X-ray 13 detected by the first X-ray detector 6 to capture, that is, acquire an image as a projection image of the subject 3. Further, the processing unit 9 performs an arithmetic process on the X-ray intensity data detected by the second X-ray detector 7 to capture, that is, acquire an image as a projection image of the subject 3. As described above, when the X-ray intensity data detected by the second X-ray detector 7 is, for example, the intensity data of the fluorescent X-ray 14, the distribution image of the element contained in the subject 3 can be captured. .
  • thermography 11 is attached to the subject 3 on the side where the X-ray 12 is irradiated, that is, the incident side, and measures the temperature distribution on the surface of the subject 3 when the subject 3 is irradiated with the X-ray 12.
  • the principle of temperature distribution measurement by the thermography 11 will be described.
  • W (Wm ⁇ 2 ) is the infrared radiation energy
  • ⁇ (Wm ⁇ 2 K ⁇ 4 ) is the Stefan-Boltzmann constant
  • T (K) is the temperature of the substance. Therefore, the temperature of the substance can be detected from the measurement of infrared radiation energy.
  • the subject 3 By irradiating the subject 3 with the X-ray 12, the subject 3 receives the energy of the X-ray 12 and the temperature of the subject 3 rises.
  • the diameter of the collected X-ray 12 as an X-ray beam is d ( ⁇ m)
  • the energy of the X-ray 12 is E (J)
  • the intensity of the irradiated X-ray 12 is I (number s ⁇ 1 )
  • the diameter d of the X-ray 12 as an X-ray beam is 5 ⁇ m
  • the energy E of the X-ray 12 is 10 keV, that is, 1.60 ⁇ 10 ⁇ 15 J
  • the intensity I of the irradiated X-ray 12 is 1.0 ⁇ 10 10 pieces.
  • the transmittance e is 99.95%, so the energy Ei received by the subject 3 per second is 8 ⁇ 10 ⁇ 9 Js ⁇ 1 .
  • the volume of the portion of the subject 3 to which the X-ray 12 is irradiated as an X-ray beam is 1.25 ⁇ 10 ⁇ 18 m 3 , and the density of the subject 3 is 1 gcm ⁇ 3.
  • thermography 11 the temperature resolution of general thermography is tens of mK or less. Therefore, according to the thermography 11, the temperature rise on the surface of the subject 3 due to the irradiation of the X-rays 12 can be easily detected.
  • thermography 11 a microbolometer type thermography using a germanium lens capable of microscopically observing a minute region can be preferably used as the thermography 11.
  • the spatial resolution is about the wavelength ⁇ of infrared rays, which is the diffraction limit.
  • the wavelength ⁇ of infrared rays used in thermography is about 10 ⁇ m. For this reason, it becomes possible to confirm the irradiation position directly on the spot with a positional accuracy of about 10 ⁇ m without being affected by mechanical reproducibility. That is, a spatial resolution of about 10 ⁇ m can be easily achieved.
  • the display device 10 displays the image of the subject 3 imaged by the processing unit 9 and the temperature distribution of the surface of the subject 3 measured by the thermography 11.
  • the X-ray 12 emitted from the X-ray source 1 is condensed by the condensing optical element 2 and positioned by the subject rotation positioning mechanism 5 while being held by the subject holder 4.
  • the object 3 is irradiated.
  • the transmitted X-rays 13 in which the X-rays 12 irradiated to the subject 3 are transmitted through the subject 3 are detected by the first X-ray detector 6.
  • the fluorescent X-rays 14 generated from the subject 3 irradiated with the X-rays 12 are detected by the second X-ray detector 7.
  • the processing unit 9 performs an arithmetic process on the intensity data obtained by repeatedly detecting the transmitted X-rays 13 by the first X-ray detector 6 while changing the irradiation position, and represents, for example, the density distribution of the subject 3.
  • An image is captured, that is, acquired.
  • the processing unit 9 performs an arithmetic process on the intensity data obtained by repeatedly detecting the fluorescent X-rays 14 by the second X-ray detector 7 while changing the irradiation position, and is contained in, for example, the subject 3.
  • An image representing the distribution of the content of each element is captured, that is, acquired.
  • Each image captured by the processing unit 9 is displayed by the display device 10.
  • thermography 11 the temperature distribution on the surface of the subject 3 when the subject 3 is irradiated with the X-rays 12 is measured by the thermography 11.
  • an X-ray imaging apparatus having only one of the first X-ray detector 6 and the second X-ray detector 7 may be used as the X-ray imaging apparatus (the same applies to the following embodiments).
  • FIG. 7 is a flowchart showing a part of the X-ray imaging process of the first embodiment.
  • various images of the subject 3 are processed in the following procedure under the control of the control unit 8 (see FIG. 2). Get by. That is, the control unit 8 controls the operation of each part of the X-ray imaging apparatus so that various images of the subject 3 are acquired according to the following procedure.
  • step S11 the knife edge is held by the subject holder 4 (step S11 in FIG. 7). And the position and angle of the condensing optical element 2 are adjusted, and a condensing state is adjusted (step S12 of FIG. 7).
  • step S11 the subject holder 4 holds the knife edge, and the subject holder 4 holding the knife edge is placed on the subject rotation positioning mechanism 5.
  • step S12 the incident angle and irradiation position of the X-ray 12 with respect to the subject 3 are adjusted by adjusting the position and angle of the condensing optical element 2 by the condensing optical element positioning mechanism 2g, as shown in FIG. Then, adjustment is made so that the beam diameter of the X-ray beam at the irradiation position where the surface of the subject 3 is irradiated with the X-ray 12 is minimized.
  • step S11 and step S12 for example, a knife edge using sharp teeth or the like is used instead of the subject 3.
  • the knife edge is scanned from a state where the knife edge is located around the beam, and the beam is gradually blocked.
  • the cross-sectional shape of the beam can be accurately calculated.
  • the cross-sectional shape of the beam is calculated based on the difference in the X-ray intensity detected by the first X-ray detector 6 with respect to a certain reference intensity.
  • step S13 the subject 3 is held by the subject holder 4 (step S13 in FIG. 7).
  • the subject holder 4 holding the subject 3 is placed on the subject rotation positioning mechanism 5 in place of another subject holder 4 holding the knife edge. That is, the object to be held held by the subject holder 4 is exchanged from the knife edge to the subject 3.
  • step S14 the position of the subject 3 is positioned by the subject rotation positioning mechanism 5 (step S14 in FIG. 7).
  • the subject 3 is irradiated with X-rays (step S15 in FIG. 7).
  • step S15 the X-ray 12 emitted from the X-ray source 1 is condensed by the condensing optical element 2 and irradiated onto the subject 3 positioned by the subject rotation positioning mechanism 5.
  • step S14 temperature distribution measurement is performed by the thermography 11, the irradiation position is confirmed (step S16 described later), and then the subject 3 is further moved to the measurement start position (described later). Step S17). For this reason, the X-ray irradiation position when the subject 3 is positioned in step S14 is different from the irradiation position when the intensity of the transmitted X-ray 13 is actually measured in step S18 described later. Good.
  • thermography 11 measures the temperature distribution on the surface of the subject 3 when the subject 3 is irradiated with the X-rays 12. Then, based on the measured temperature distribution of the surface of the subject 3, the irradiation position where the subject 3 is irradiated with the X-rays 12 is specified.
  • a position where a temperature higher than the ambient temperature is measured is specified as an actual X-ray irradiation position.
  • FIG. 8 is a diagram schematically showing an example in which the measurement result of the temperature distribution on the surface of the subject is displayed as an image on the display device.
  • the temperature distribution D1 of the surface of the subject 3 before the step S15 that is, before the subject 3 is irradiated with the X-rays 12, that is, before the X-ray irradiation, is thermographic. 11 is measured.
  • Step S15 to start irradiating the subject 3 with the X-rays 12
  • Step S16 while the subject 3 is irradiated with the X-rays 12, that is, the surface of the subject 3 being irradiated with X-rays
  • the temperature distribution D2 is measured by the thermography 11.
  • the temperature distribution D1 before X-ray irradiation and the temperature distribution D2 during X-ray irradiation are displayed side by side on the display device 10.
  • the actual irradiation position can be specified with high accuracy. Therefore, it can be accurately confirmed whether or not the actual irradiation position matches the desired irradiation position. Specifically, it can be accurately confirmed whether or not the difference value between the actual irradiation position and the desired irradiation position is larger than a preset setting value.
  • a difference value between the temperature at each position in the temperature distribution on the surface of the subject 3 before X-ray irradiation and the temperature at each position in the temperature distribution on the surface of the subject 3 during X-ray irradiation is calculated.
  • the distribution may be displayed.
  • the difference between the temperature before X-ray irradiation and the temperature during X-ray irradiation is easily understood. Therefore, it can be accurately confirmed whether or not the actual irradiation position matches the desired irradiation position. Specifically, it can be accurately confirmed whether or not the difference value between the actual irradiation position and the desired irradiation position is larger than a preset setting value.
  • the difference value between the actual irradiation position and the desired irradiation position is larger than a preset setting value
  • the difference value between the actual irradiation position and the desired irradiation position is equal to or less than the preset setting value. Then, the position of the subject 3 is again positioned by the subject rotation positioning mechanism 5.
  • step S17 the subject 3 is moved by the subject rotation positioning mechanism 5 so that the X-ray 12 is irradiated to the measurement start position where the measurement of the intensity of the transmitted X-ray 13 is started, for example.
  • step S18 the intensities of the transmitted X-ray 13 and the fluorescent X-ray 14 are measured while scanning the subject 3 (step S18 in FIG. 7).
  • the subject 3 positioned by the subject rotation positioning mechanism 5 is irradiated with the X-ray 12 emitted from the X-ray source 1 by being condensed by the condensing optical element 2.
  • the transmitted X-rays 13 transmitted through the subject 3 by the X-rays 12 irradiated to the subject 3 at each irradiation position are detected by the first X-ray detector 6, and the intensity of the transmitted X-rays 13 at each irradiation position is measured.
  • the fluorescent X-rays 14 generated from the subject 3 irradiated with the X-rays 12 at each irradiation position are detected by the second X-ray detector 7, and the intensity of the fluorescent X-rays 14 at each irradiation position is measured.
  • the intensity measurement of the transmitted X-ray 13 and the intensity measurement of the fluorescent X-ray 14 are repeated while scanning the object 3 by the object rotation positioning mechanism 5.
  • the intensity of the fluorescent X-ray 14 the intensity of the fluorescent X-ray corresponding to each element obtained by separating the energy of the fluorescent X-ray detected by the second X-ray detector 7 may be measured.
  • step S19 an image of the subject 3 is acquired and displayed based on the measured intensity data (step S19 in FIG. 7).
  • step S19 calculation processing is performed on the intensity data of the transmitted X-ray 13 at each irradiation position measured in step S18, that is, the intensity data of the transmitted X-ray 13 at each irradiation position detected by the first X-ray detector 6.
  • step S19 calculation is performed on the intensity data of the fluorescent X-rays 14 at each irradiation position measured in step S18, that is, the intensity data of the fluorescent X-rays 14 at each irradiation position detected by the second X-ray detector 7.
  • Processing is performed to acquire an image of the subject 3.
  • each image of the subject 3 acquired by the processing unit 9 is displayed by the display device 10.
  • step S19 when measuring the intensity
  • a distribution image indicating the distribution of elements contained in the subject 3 is acquired by performing arithmetic processing.
  • step S18 only one of the intensity measurement of the transmitted X-ray 13 and the intensity measurement of the fluorescent X-ray 14 may be performed.
  • step S19 an image of the subject 3 may be acquired based on only one of the intensity data of the transmitted X-ray 13 and the intensity data of the fluorescent X-ray 14.
  • step S18 when only the intensity measurement of the transmitted X-ray 13 is performed, an X-ray imaging apparatus that has the first X-ray detector 6 but does not have the second X-ray detector 7 is used as the X-ray imaging apparatus. May be.
  • an X-ray imaging apparatus that does not have the first X-ray detector 6 but has the second X-ray detector 7 is used as the X-ray imaging apparatus. May be.
  • the X-ray imaging method of Comparative Example 1 can be performed by, for example, an X-ray imaging apparatus obtained by removing the thermography 11 (see FIGS. 1 and 2) from the X-ray imaging apparatus of Embodiment 1.
  • the irradiation position at which the surface of the subject is irradiated with X-rays cannot be specified visually. Accordingly, the irradiation position at which the surface of the subject is irradiated with X-rays is adjusted as follows.
  • a standard sample such as a slit or knife edge is held by a holder corresponding to the subject holder 4 (see FIGS. 1 and 2), for example.
  • a holder holding the standard sample is mounted on a sample stage corresponding to, for example, the subject rotation positioning mechanism 5 (see FIGS. 1 and 2) of the X-ray imaging apparatus, and the standard sample held by the holder is the X-ray.
  • the position of the standard sample is positioned by the sample stage so as to be positioned around the irradiation position.
  • the X-ray irradiation position is confirmed based on the fluctuation in the X-ray intensity detected when the standard sample is scanned from the state where the position of the standard sample is positioned around the X-ray irradiation position.
  • the holder holding the standard sample is removed from the sample stage of the X-ray imaging apparatus and attached to the sample stage of an optical microscope using, for example, visible light provided separately from the X-ray imaging apparatus.
  • the position of the standard sample is adjusted by the sample stage of the optical microscope so that the center of the visual field in the optical microscope coincides with the X-ray irradiation position.
  • the standard sample is removed from the holder, and the subject is held by the holder in place of the standard sample.
  • the position of the subject is adjusted by an alignment mechanism provided in the holder so that the center of the visual field in the optical microscope matches the position to be observed among the subjects.
  • the holder holding the subject is removed from the sample stage of the optical microscope and attached to the sample stage of the X-ray imaging apparatus.
  • the condensed X-ray is irradiated as an X-ray beam to the position to be observed in the subject. That is, the X-ray irradiation position is adjusted.
  • the holder for holding the subject is removed and attached a plurality of times between the optical microscope using visible light and the X-ray imaging apparatus. For this reason, the alignment accuracy when adjusting the X-ray irradiation position cannot be improved more than the dimensional error caused by the alignment accuracy during machining, that is, a dimensional error of about several tens of ⁇ m.
  • the X-ray imaging apparatus includes a thermography in addition to an X-ray source, a condensing optical element, a subject rotation positioning mechanism, an X-ray detector, a control unit, and a processing unit.
  • Thermography measures the temperature distribution on the surface of a subject when irradiated with X-rays. Based on the temperature distribution of the surface of the subject measured by thermography, for example, a position where a temperature higher than the ambient temperature is measured is specified as an actual irradiation position. By specifying the X-ray irradiation position in this way, it is possible to confirm whether or not the actual irradiation position matches the desired irradiation position.
  • the X-ray irradiation position can be easily specified. Therefore, as in the X-ray imaging method of Comparative Example 1, the X-ray is such that the holder for holding the subject is removed and attached a plurality of times between the optical microscope using visible light and the X-ray imaging apparatus. There is no need to adjust the irradiation position. Therefore, the alignment accuracy when adjusting the X-ray irradiation position can be improved more than the dimensional error caused by the alignment accuracy during machining, that is, a dimensional error of about several tens of ⁇ m.
  • thermography is used to specify the irradiation position.
  • thermography is used to prevent damage to the subject.
  • FIG. 9 is a perspective view illustrating an example of the configuration of the X-ray imaging apparatus according to the second embodiment.
  • FIG. 10 is a perspective view illustrating a configuration of an example of an absorption plate in the X-ray imaging apparatus according to the second embodiment.
  • the X-ray imaging apparatus according to the second embodiment has the same intensity as that of each part constituting the X-ray imaging apparatus according to the first embodiment, and the intensity of X-rays irradiated to the subject 3.
  • a strength adjusting unit 15 for adjusting The strength adjusting unit 15 includes, for example, an absorption plate 15a and a positioning mechanism 15b.
  • the absorbing plate 15a absorbs a part of the X-ray 12 irradiated to the absorbing plate 15a, thereby attenuating, that is, reducing the intensity of the X-ray 12 emitted from the X-ray source 1.
  • the absorption plate 15 a includes, for example, a base 16, an opening 17 formed in the base 16, and a plurality of X-ray absorption factors, that is, attenuation factors (in the example shown in FIG. 10). Three) attenuation portions 18.
  • the absorption plate 15 a includes three attenuation units 18 a, 18 b, and 18 c as the attenuation unit 18.
  • Each of the attenuation portions 18a, 18b and 18c is made of an aluminum (Al) plate having a thickness different from each other, for example, 10 ⁇ m, 20 ⁇ m and 30 ⁇ m.
  • Al aluminum
  • the intensity of the X-ray 12 can be adjusted step by step to four different intensities.
  • the positioning mechanism 15b positions the absorption plate 15a.
  • the absorbing plate 15a is attached to a positioning mechanism 15b driven by, for example, a stepping motor.
  • the positioning mechanism 15b adjusts the position of the absorption plate 15a so that, for example, the opening 17 and any of the attenuation portions 18a, 18b, and 18c are arranged on the optical path of the X-ray 12.
  • strength of the X-ray 12 irradiated to the surface of the to-be-photographed object 3 can be adjusted in steps, for example to four types of different intensity
  • the thickness of the aluminum plate constituting the attenuation portion 18c formed on the absorption plate 15a is further increased to be a shielding portion that shields the X-rays 12, and the X-ray 12 emitted from the X-ray source 1 is shielded.
  • the irradiation of the X-ray 12 to the subject 3 can be stopped.
  • control unit 8 performs the intensity in addition to the operations of the subject rotation positioning mechanism 5, the first X-ray detector 6, the second X-ray detector 7, the processing unit 9, the display device 10, and the thermography 11.
  • the operation of the adjusting unit 15 is controlled.
  • FIG. 11 is a flowchart showing a part of the X-ray imaging process of the second embodiment.
  • various images of the subject 3 are processed by the following procedure under the control of the control unit 8 (see FIG. 9). Get by. That is, the control unit 8 controls the operation of each part of the X-ray imaging apparatus so that various images of the subject 3 are acquired according to the following procedure.
  • the X-ray imaging method of the second embodiment is the same as the X-ray imaging method of the first embodiment described with reference to FIG. 7 except that step S16 is not performed and the temperature distribution is measured by the thermography 11 in step S18.
  • step S16 is not performed and the temperature distribution is measured by the thermography 11 in step S18.
  • thermography 11 measures the temperature distribution on the surface of the subject 3 during X-ray irradiation. Then, based on the measured temperature distribution, the subject 3 is prevented from being damaged.
  • step S18 the control unit 8 determines whether or not the maximum temperature in the temperature distribution on the surface of the subject 3 during X-ray irradiation is equal to or lower than a predetermined upper limit temperature, that is, an upper limit value.
  • the control unit 8 does not issue a warning when it is determined that the maximum temperature is equal to or lower than the upper limit temperature, but issues a warning when it is determined that the maximum temperature exceeds the upper limit temperature.
  • the control unit 8 does not stop irradiation of the subject 3 with the X-ray 12 but determines that the maximum temperature exceeds the upper limit temperature.
  • step S18 the control unit 8 does not decrease the intensity of the X-ray 12 irradiated to the subject 3, but the maximum temperature exceeds the upper limit temperature. Is determined, the intensity of the X-ray 12 irradiated to the subject 3 is reduced.
  • FIG. 12 is a diagram schematically showing an example in which an operation screen for setting the upper limit value of the temperature of the subject is displayed on the display device.
  • a biological sample, an organic material, a metal material, or any other material can be selected as the material of the subject 3, and an upper limit temperature corresponding to each material can be set individually. Can do.
  • a recommended temperature is set as the upper limit temperature according to the material of the subject 3.
  • an upper limit temperature set to 42 ° C. for example, can be used as the upper limit temperature of the biological sample.
  • an upper limit temperature set to, for example, 80 ° C. can be used as the upper limit temperature of the organic material.
  • an upper limit temperature set to 120 ° C. for example, can be used as the upper limit temperature of the metal material.
  • a treatment when the maximum temperature in the temperature distribution on the surface of the subject exceeds a predetermined upper limit temperature that is, as a process when the temperature is abnormal, for example, whether the measurement is stopped (measurement is stopped). It is possible to select whether to reduce the intensity of the X-ray (intensity decrease) or only issue a warning (warning only).
  • any one of the attenuation portions 18a, 18b, and 18c formed on the absorbing plate 15a by the operator's operation, that is, manually (see FIG. 9) is moved on the optical path of the X-ray 12 by moving the absorption plate 15a by the positioning mechanism 15b. Thereby, the intensity
  • the shielding portion shields the X-rays 12 emitted from the X-ray source 1, and this shielding portion is
  • the absorbing plate 15a is moved by the positioning mechanism 15b so as to be arranged on the optical path of the X-ray 12. As a result, the X-ray irradiation to the subject 3 is stopped and the measurement is stopped.
  • a shielding unit that shields the X-ray 12 emitted from the X-ray source 1 is arranged on the optical path of the X-ray 12.
  • the absorbing plate 15a (see FIG. 10) is moved by the positioning mechanism 15b (see FIG. 9).
  • the irradiation of the X-ray 12 to the subject 3 is automatically stopped, and the measurement of the intensity of the transmitted X-ray 13 and the fluorescent X-ray 14 is automatically stopped.
  • the attenuation unit 18 when “strength reduction” is selected, when the maximum temperature exceeds the upper limit temperature, for example, the attenuation unit 18 (see FIG. 10) having a larger thickness is arranged on the optical path of the X-ray 12.
  • the absorbing plate 15a (see FIG. 10) is moved by the positioning mechanism 15b (see FIG. 9).
  • the intensity adjusting unit 15 automatically reduces the intensity of the X-ray 12 irradiated to the subject 3.
  • “Reduced strength (1/5)” is displayed. This is because the absorbing plate 15a is moved by the positioning mechanism 15b when the maximum temperature exceeds the upper limit temperature. This means that the intensity of X-rays is reduced to 1/5.
  • the upper limit temperature is set to a temperature close to the lower limit temperature at which the subject 3 is damaged
  • the maximum temperature in the temperature distribution on the surface of the subject 3 exceeds the upper limit temperature.
  • the subject 3 is damaged.
  • the temperature distribution on the surface of the subject 3 irradiated with the X-rays 12 is measured by the thermography 11, and the presence or absence of damage to the subject 3 is determined based on the measured temperature distribution. That is, when it is determined that the maximum temperature in the measured temperature distribution is equal to or lower than the upper limit temperature, it is determined that the subject 3 is not damaged, but the maximum temperature in the measured temperature distribution exceeds the upper limit temperature. If it is determined that the subject 3 is damaged, it is determined that the subject 3 is damaged. Thereby, the damage which generate
  • the intensity of the condensed X-ray is extremely large.
  • Degeneration such as discoloration and other damage may occur on the subject.
  • an irreversible change generated in the subject is detected by an optical microscope for monitoring using visible light installed around the subject. It will be.
  • the intensity of the irradiated X-ray is extremely high, for example, even if a measure such as reducing the intensity of the irradiated X-ray is taken after a slight discoloration is detected, heat is already generated inside the subject. There is a problem that the subject has been damaged, such as degeneration due to the like.
  • the X-ray imaging apparatus includes a thermography and intensity adjustment unit in addition to an X-ray source, a condensing optical element, a subject rotation positioning mechanism, an X-ray detector, a control unit, and a processing unit.
  • Thermography measures the temperature distribution on the surface of a subject when the subject is irradiated with X-rays.
  • the control unit issues a warning, stops the measurement, or irradiates the subject. Reduce the intensity of X-rays.
  • it is possible to take measures such as reducing the intensity of the irradiated X-ray before the subject is damaged. This can prevent the subject from being damaged.
  • thermography is used to specify the irradiation position
  • thermography is used to prevent the object from being damaged
  • thermography is used to specify the irradiation position and prevent damage to the subject.
  • the configuration of the X-ray imaging apparatus according to the third embodiment can be made the same as the configuration of the X-ray imaging apparatus according to the second embodiment described with reference to FIG.
  • the X-ray imaging method of the third embodiment can be the same as the X-ray imaging method of the first embodiment described with reference to FIG. 7 except for step S18 in FIG. Also in the third embodiment, as in the second embodiment, the control unit 8 (see FIG. 9) allows each part of the X-ray imaging apparatus to acquire various images of the subject 3. Control the behavior.
  • step S18 in FIG. 7 the same process as step S18 in FIG. 7 is performed to measure the intensity of the transmitted X-ray 13 and the intensity of the fluorescent X-ray 14, and the subject 3 is irradiated with the X-ray 12.
  • the temperature distribution on the surface of the subject 3 is measured by the thermography 11, and damage to the subject 3 is prevented based on the measured temperature distribution.
  • a method for preventing the subject 3 from being damaged can be the same as the X-ray imaging method according to the second embodiment described with reference to FIGS. 11 and 12.
  • the temperature distribution of the surface of the subject 3 irradiated with the X-rays 12 is measured by the thermography 11, and the subject 3 is measured based on the measured temperature distribution. The presence or absence of damage can also be determined.
  • the X-ray imaging apparatus of the third embodiment has a thermography in addition to the X-ray source, the focusing optical element, the subject rotation positioning mechanism, the X-ray detector, the control unit, and the processing unit. It has the same characteristics as those of the line imaging apparatus.
  • the thermography measures the temperature distribution on the surface of the subject when the X-ray is irradiated. As a result, the X-ray irradiation position can be easily specified, so that the alignment accuracy when adjusting the X-ray irradiation position can be improved. It has the same effect as the effect.
  • the X-ray imaging apparatus of the third embodiment has an intensity adjustment unit in addition to the same parts as the parts constituting the X-ray imaging apparatus of the first embodiment, and the X-ray imaging of the second embodiment.
  • the control unit issues a warning when it is determined that the maximum temperature in the temperature distribution of the surface of the subject measured by thermography exceeds the upper limit temperature. Alternatively, the measurement is stopped, or the intensity of X-rays irradiated on the subject is reduced.
  • the X-ray imaging apparatus of the third embodiment has the characteristics of the X-ray imaging apparatus of the first embodiment and the characteristics of the X-ray imaging apparatus of the second embodiment, and the X-ray of the first embodiment. It has the effect of the imaging device and the effect of the X-ray imaging device of the second embodiment.
  • the X-ray imaging method using the X-ray imaging apparatus of Embodiment 1 acquires an image as a projection image of a subject.
  • the X-ray imaging method using the X-ray imaging apparatus according to the fourth embodiment acquires a stereoscopic image including a cross-sectional image of a subject parallel to the optical path of the X-ray.
  • the configuration of the X-ray imaging apparatus according to the fourth embodiment can be the same as the configuration of the X-ray imaging apparatus according to the first embodiment described with reference to FIGS. 1 and 2, and the description thereof is omitted.
  • FIG. 13 is a flowchart showing a part of the X-ray imaging process of the fourth embodiment.
  • various images of the subject 3 are processed in the following procedure under the control of the control unit 8 (see FIG. 2). Get by. That is, the control unit 8 controls the operation of each part of the X-ray imaging apparatus so that various images of the subject 3 are acquired according to the following procedure.
  • the X-ray imaging method of the fourth embodiment is the same as the steps S11 to S18 of the X-ray imaging method of the first embodiment described with reference to FIG. The following steps S21 to S24 are included.
  • Steps S11 to S18 can be performed in the same manner as steps S11 to S18 in FIG. Among these, in step S18, as in step S18 of FIG. 7, the intensity of the transmitted X-ray 13 and the intensity of the fluorescent X-ray 14 are measured at each irradiation position while scanning the subject 3.
  • step S21 the subject 3 is rotated by an angle ⁇ (step S21).
  • the object holder 4 (see FIG. 2) is held around the central axis CA parallel to the Z-axis direction orthogonal to the XY plane.
  • the subject 3, the XY stage 5b, and the Z stage 5c are rotationally moved by an angle ⁇ by the rotary stage 5a.
  • step S22 it is determined whether or not the angle ⁇ of the rotary stage 5a, that is, the rotation angle ⁇ is larger than a preset upper limit angle ⁇ 1, that is, an upper limit value ⁇ 1 (step S22).
  • step S22 when it is determined in step S22 that the rotation angle ⁇ of the rotary stage 5a is not larger than the upper limit angle ⁇ 1, the process proceeds to step S23.
  • step S23 the scanning conditions of the X stage 5d and the Y stage 5e at the rotation angle ⁇ , that is, the scanning range are reset.
  • FIG. 14 is a plan view schematically showing a subject rotation positioning mechanism in the X-ray imaging apparatus of the fourth embodiment.
  • FIG. 14 shows a case where the rotation angle ⁇ is ⁇ . Further, in FIG. 14, as in FIG. 5, illustration of the subject holder 4 is omitted.
  • the X-axis direction is a direction orthogonal to the direction in which the X-ray 12 is incident
  • the Y-axis direction is the direction in which the X-ray 12 is incident. It is assumed that the direction is parallel to the direction.
  • the X ′ direction which is the scanning direction of the X stage 5d
  • the Y ′ direction is assumed to be a direction parallel to the Y-axis direction.
  • the maximum value of the scanning range X ′ ( ⁇ ) and the maximum value of the scanning range Y ′ ( ⁇ ) are both equal. Let XYmax.
  • each of the scanning range X ′ (0) and the scanning range Y ′ (0) is represented by the following formula (4) and the following formula (5).
  • X ′ (0) XYmax Formula (4)
  • the scanning of the subject 3 is performed by the X stage 5d and the Z stage 5c, but is not performed by the Y stage 5e.
  • each of the scanning range X ′ ( ⁇ ) and the scanning range Y ′ ( ⁇ ) is represented by the following formula (6) and the following formula (7).
  • X ′ ( ⁇ ) XYmax ⁇ cos ⁇ Formula (6)
  • the scanning of the subject 3 is performed by the X stage 5d, the Y stage 5e, and the Z stage 5c.
  • the scanning position of the Y stage 5e is moved according to the scanning position of the X stage 5d, that is, in conjunction with the scanning position.
  • the scanning range in the X-axis direction which is the direction orthogonal to the direction in which the X-ray 12 enters, is made the same in the XY plane regardless of the rotation angle ⁇ . can do.
  • the maximum value XYmax is equal to the length of the X stage 5d in the X ′ direction and the length of the Y stage 5e in the Y ′ direction.
  • the maximum value XYmax may not be equal to the length of the X stage 5d in the X ′ direction, and may not be equal to the length of the Y stage 5e in the Y ′ direction.
  • Step S23 the subject 3 is again moved to the measurement start position (Step S17), and the intensity of the transmitted X-ray and the intensity of the fluorescent X-ray are measured at each irradiation position while scanning the subject 3. (Step S18).
  • Step S18 the subject 3 is again rotated by the angle ⁇ (Step S21), and it is determined whether or not the rotation angle ⁇ of the rotary stage 5a is larger than a preset upper limit angle ⁇ 1 (Step S21). S22). Furthermore, when it is determined in step S22 that the rotation angle ⁇ of the rotary stage 5a is not larger than the upper limit angle ⁇ 1, the process proceeds to step S23 again.
  • step S23, step S17, step S18, step S21 and step S22 are repeated until it is determined in step S22 that the rotation angle ⁇ of the rotary stage 5a is larger than the upper limit angle ⁇ 1. That is, the subject 3 is rotated to a plurality of rotational positions by the rotary stage 5a around the central axis CA intersecting the optical path of the X-ray 12 irradiated to the subject 3, and step S18 is performed at each of the plurality of rotational positions. Then, the transmitted X-ray 13 is detected by the first X-ray detector 6, and the fluorescent X-ray 14 is detected by the second X-ray detector 7.
  • step S24 a cross-sectional image of the subject 3 is acquired and displayed as an image of the subject 3 based on the intensity data measured by repeating step S18.
  • step S24 at each of the plurality of rotational positions, step S18 is performed to perform calculation processing on the intensity data of the transmitted X-rays 13 detected by the first X-ray detector 6 to obtain a three-dimensional image, that is, a three-dimensional image. An image is reconstructed and a cross-sectional image of the subject 3 is acquired. Further, in step S24, at each of the plurality of rotational positions, step S18 is performed to perform calculation processing on the intensity data of the fluorescent X-rays 14 detected by the second X-ray detector 7, thereby obtaining a three-dimensional image, that is, A stereoscopic image is reconstructed, and a cross-sectional image of the subject 3 is acquired. Then, each cross-sectional image of the subject 3 acquired by the processing unit 9 is displayed by the display device 10.
  • the filter function is convolved with the value obtained by taking the logarithm of the intensity data of the transmitted X-ray 13. Further, a filtered back projection method that performs back projection can be used. Note that when the noise in the intensity data, that is, the intensity of the noise signal is large, the influence of the noise signal can be removed by using a filter that suppresses high-frequency components.
  • the logarithm of the intensity data of the fluorescent X-rays 14 is not taken, but directly on the intensity data of the fluorescent X-rays 14.
  • a method of convolving the filter function and performing back projection can be used.
  • the subject 3 self-absorbs the fluorescent X-rays, so that the subject 3 is generated from a portion where the distance from the second X-ray detector 7 is relatively large.
  • the intensity of the fluorescent X-ray 14 may be weakened.
  • the intensity of fluorescent X-rays 14 generated from a portion of the subject 3 that is relatively far from the second X-ray detector 7 is multiplied by a coefficient for correcting self-absorption.
  • step S16 after performing step S23, before performing step S17 again, step S16 can be performed and an irradiation position can also be confirmed by the thermography 11.
  • FIG. Whenever the rotation angle is changed, it is extremely difficult to remove the holder from the sample stage of the X-ray imaging apparatus and adjust the irradiation position as in Comparative Example 1 described in the first embodiment.
  • step S16 after performing step S23 and before performing step S17 again, it is possible to confirm whether or not the actual irradiation position matches the desired irradiation position. It can be acquired with higher accuracy.
  • step S18 only one of the intensity measurement of the transmitted X-ray 13 and the intensity measurement of the fluorescent X-ray 14 may be performed in step S18.
  • step S24 a cross-sectional image of the subject 3 may be acquired based on only one of the intensity data of the transmitted X-ray 13 and the intensity data of the fluorescent X-ray 14.
  • step S18 when only the intensity measurement of the transmitted X-ray 13 is performed, an X-ray imaging apparatus that has the first X-ray detector 6 but does not have the second X-ray detector 7 is used as the X-ray imaging apparatus. May be.
  • an X-ray imaging apparatus that does not have the first X-ray detector 6 but has the second X-ray detector 7 is used as the X-ray imaging apparatus. May be.
  • the X-ray imaging apparatus of the fourth embodiment has a thermography in addition to an X-ray source, a condensing optical element, a subject rotation positioning mechanism, an X-ray detector, a control unit, and a processing unit.
  • Thermography measures the temperature distribution on the surface of a subject when irradiated with X-rays. Based on the temperature distribution of the surface of the subject measured by thermography, for example, a position where a temperature higher than the ambient temperature is measured is specified as an actual irradiation position. By specifying the X-ray irradiation position in this way, it is possible to confirm whether or not the actual irradiation position matches the desired irradiation position.
  • the subject is rotated, and transmitted X-rays measured at each of a plurality of rotational positions or X-rays generated from the subject are detected. Intensity data is measured, and a cross-sectional image of the subject is formed based on the measured intensity data.
  • the irradiation position may be further shifted from the desired irradiation position when the rotation angle is changed, and the cross-sectional image of the subject cannot be obtained with high accuracy.
  • the X-ray imaging method using the X-ray imaging apparatus of the fourth embodiment it is possible to easily confirm whether or not the actual irradiation position matches the desired irradiation position before measurement. Therefore, the actual irradiation position can be easily adjusted so as to coincide with the desired irradiation position. Therefore, the subject can be rotated, and a cross-sectional image of the subject can be accurately acquired based on transmission X-rays measured at each of a plurality of rotational positions or X-ray intensity data generated from the subject.
  • thermography 11 provided in the X-ray imaging apparatus illustrated in FIG. 2 is used to specify the irradiation position.
  • thermography 11 and the intensity adjusting unit 15 provided in the X-ray imaging apparatus shown in FIG. it can.
  • thermography can be used to specify the irradiation position and prevent damage to the subject.
  • the present invention is effective when applied to an X-ray imaging apparatus and an X-ray imaging method.

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Abstract

La présente invention porte sur un dispositif d'imagerie par rayons X qui a une source (1) de rayons X destinée à émettre des rayons X (12) et un élément (2) optique de condensation destiné à condenser les rayons X (12) émis par la source (1) de rayons X et rayonner les rayons X sur un sujet (3) positionné par un mécanisme (5) rotatif de positionnement de sujet. En outre, le dispositif d'imagerie par rayons X a un premier détecteur (6) de rayons X destiné à détecter des rayons X (13) émis, qui sont des rayons X (12) qui ont été rayonnés sur le sujet (3) et ont traversé le sujet (3), et une unité (9) de traitement destinée à acquérir une image du sujet (3) par l'intermédiaire d'un traitement arithmétique des données d'intensité pour les rayons X (13) émis détectés par le premier détecteur (6) de rayons X. De façon supplémentaire, le dispositif d'imagerie par rayons X a un thermographe (11) destiné à mesurer la distribution de température de la surface du sujet (3) lorsque des rayons X (12) sont rayonnés sur le sujet.
PCT/JP2013/072912 2013-08-27 2013-08-27 Dispositif d'imagerie par rayons x et procédé d'imagerie par rayons x Ceased WO2015029144A1 (fr)

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