WO2015083345A1 - Wiring board with embedded components and manufacturing method thereof - Google Patents

Abstract

By preventing decreased adhesion between a core substrate and a wiring laminate unit, a wiring board with embedded components that has excellent reliability is provided. This wiring board with embedded components (10) is provided with a core substrate (11), components (100, 101), a resin filling material (93) and a wiring laminate unit (32). The components (100, 101) are housed in housing cavities (90, 91, respectively) in a state in which the core primary surface (12) and the component primary surface (102) are oriented in the same direction. The resin filling material (93) is filled into the gaps between lateral component surfaces (104) and inner wall surfaces (92) of the housing cavities (90, 91). Further, the core substrate (11) is provided with a bridge unit (61) positioned between adjacent housing cavities (90, 91), and with outer periphery units (62) on which a back-side conductor layer (81) is formed. The width of the bridge unit (61) is less than the total width of an outer peripheral unit (62) and a back-side conductor layer (81). The gap between the surface of the bridge unit (61) and the wiring laminate unit (32) is filled in with a portion of the resin filling material (93).

Description

Component built-in wiring board and manufacturing method thereof

The present invention relates to a component built-in wiring board in which components such as capacitors are accommodated and a method for manufacturing the same.

In recent years, semiconductor integrated circuit elements (IC chips) used as computer microprocessors and the like have become increasingly faster and more functional, with an accompanying increase in the number of terminals and a tendency to narrow the pitch between terminals. . In general, a large number of terminals are densely arranged on the bottom surface of an IC chip, and such a terminal group is connected to a terminal group on the motherboard side in the form of a flip chip. However, it is difficult to connect the IC chip directly on the mother board because there is a large difference in the pitch between the terminals of the terminal group on the IC chip side and the terminal group on the mother board side. For this reason, a method is usually employed in which a package is formed by mounting an IC chip on an IC chip mounting wiring board, and the package is mounted on a motherboard. In addition, it has been proposed to provide a capacitor in an IC chip mounting wiring board constituting this type of package in order to reduce switching noise of the IC chip and stabilize the power supply voltage. As an example, a wiring board in which a capacitor is embedded in a core substrate and a buildup layer formed by laminating an interlayer insulating layer and a conductor layer on the core main surface and the core back surface of the core substrate has been conventionally proposed (for example, (See Patent Documents 1 and 2).

Further, as the above-described IC chip mounting wiring board, a wiring board in which a plurality of capacitors are embedded in a core board has been proposed. An example of the method for manufacturing the wiring board will be described below. First, a core substrate 204 made of a resin material having a plurality of accommodation holes 203 that are open on both the core main surface 201 and the core back surface 202 is prepared (see FIG. 45). A main surface side conductor layer 205 is formed on substantially the entire core main surface 201, and a back surface side conductor layer 206 is formed on almost the entire core back surface 202. In addition, a capacitor 209 (see FIGS. 45 and 46) having a capacitor main surface 207 and a capacitor back surface 208 is prepared. Next, a taping step of attaching the adhesive tape 210 to the core back surface 202 side is performed, and the opening of the housing hole 203 on the core back surface 202 side is sealed in advance. And the accommodation process which accommodates the capacitor | condenser 209 in each of the some accommodation hole part 203 is performed, and the capacitor | condenser back surface 208 of each capacitor | condenser 209 is affixed on the adhesive surface of the adhesive tape 210, and is temporarily fixed (refer FIG. 45). Next, after performing a filling step of filling the resin filler 21 into the gap A1 between the inner wall surface of the accommodation hole 203 and the side surface of the capacitor 209, the capacitor 209 is fixed by curing and shrinking the resin filler 211 ( (See FIG. 46). And after peeling off the adhesive tape 210, while alternately laminating interlayer insulation layers and conductor layers on the core main surface 201 side, and forming a main surface side buildup layer, on the core back surface 202 side, Interlayer insulating layers and conductor layers are alternately laminated to form a back side buildup layer. As a result, a desired wiring board is obtained.

JP 2011-216740 A (FIG. 1 etc.) JP 2013-183029 A (FIG. 1 etc.)

However, as the number of capacitors 209 embedded in the core substrate 204 increases, the width of the bridge portion 212 of the core substrate 204 existing between the adjacent accommodation holes 203 decreases accordingly, and the core of the bridge portion 212 is reduced. The width of the back side conductor layer 206 formed on the back side 202 is also reduced. As a result, since the adhesive force between the back surface side conductor layer 206 and the adhesive tape 210 is reduced, when the resin filler 211 is filled in the gap A1, a part of the resin filler 211 is back surface side conductor layer. There is a possibility of sinking between 206 and the adhesive tape 210 (see the gap A2 in FIG. 47). In this case, the back side conductor layer 206 formed on the bridge portion 212 is covered with the resin filler 211, and the entire surface of the back side conductor layer 206 cannot be roughened. Further, a rising portion of the resin filler 211 is formed on the core back surface 202 side of the bridge portion 212. As a result, even if an interlayer insulating layer is formed on the core back surface 202 side, the interlayer insulating layer cannot be securely adhered to the surface of the back-side conductor layer 206. Therefore, a problem arises in the adhesion between the interlayer insulating layer and the back-side conductor layer 206, and delamination of the interlayer insulating layer is likely to occur. Therefore, the manufactured wiring board becomes defective and the reliability of the wiring board is lowered. There is a risk. *

The present invention has been made in view of the above-described problems, and an object of the present invention is to prevent a reduction in the adhesion between the core substrate and the wiring laminated portion, and to provide a component-embedded wiring substrate excellent in reliability and a method for manufacturing the same. Is to provide.

And as a means (means 1) for solving the said subject, it has a core main surface and a core back surface, and has a core which has two or more accommodation holes opened on both the core main surface side and the core back surface side. A plurality of components each having a substrate, a component main surface, a component back surface, and a component side surface, each of which is accommodated in the plurality of accommodating hole portions in a state in which the core main surface and the component main surface are directed to the same side; A resin filler filled in a gap between the inner wall surface of the housing hole formed in the core substrate and the side surface of the component, and an interlayer insulating layer and a conductor layer were laminated on the core back surface and the component back surface. A wiring board with a built-in component including a wiring laminated portion having a structure, wherein the core substrate includes a bridge portion positioned between adjacent accommodation hole portions, a plurality of the accommodation hole portions, and a back surface side surrounding the bridge portions. A conductor layer is formed on the back surface of the core. And the thickness of the bridge portion is thinner than the total thickness of the outer periphery portion and the back side conductor layer, and the gap between the surface of the bridge portion and the wiring laminate portion is There is a wiring board with a built-in component, which is filled with a part of the resin filler. *

When the back side conductor layer is formed on the entire core back side of the core substrate, the resin is interposed between the back side conductor layer formed on the bridge part and the wiring laminated part when fixing the component using the resin filler. There is a possibility that the filler may sink and cause a problem in the adhesion between the wiring laminated portion and the back side conductor layer. Therefore, in the component built-in wiring board of the above means 1, the back surface side conductor layer is formed so as to surround the bridge portion, and the back surface side conductor layer is not formed in the bridge portion. In this case, since the gap between the surface of the bridge portion and the wiring laminated portion is filled with a part of the resin filler, the above-described sinking is unlikely to occur. Therefore, since the core substrate and the wiring laminated portion are brought into close contact with each other, a component built-in wiring substrate having excellent reliability can be obtained. *

Further, as another means (means 2) for solving the above-described problem, a plurality of receiving hole portions having a core main surface and a core back surface and opening on both the core main surface side and the core back surface side are provided. A plurality of components each having a core substrate, a component main surface, a component back surface, and a component side surface, each housed in the plurality of housing holes with the core main surface and the component main surface facing the same side And a resin filler filled in a gap between the inner wall surface of the housing hole formed in the core substrate and the side surface of the component, an interlayer insulating layer and a conductor layer on the core back surface and the component back surface A wiring board with a built-in component including a wiring laminated portion having a laminated structure, wherein the core substrate surrounds a bridge portion positioned between adjacent accommodation hole portions, a plurality of the accommodation hole portions, and the bridge portions. A back side conductor layer is formed on the back side of the core. An island-like layer that is independent of the back surface side conductor layer and protrudes at the same height as the surface of the back surface side conductor layer is formed on the back surface of the core of the bridge portion. There is a wiring board with a built-in component, wherein a gap between a conductor layer and the island layer is filled with a part of the resin filler. *

When the back side conductor layer is formed on the entire core back side of the core substrate, the resin is interposed between the back side conductor layer formed on the bridge part and the wiring laminated part when fixing the component using the resin filler. There is a possibility that the filler may sink and cause a problem in the adhesion between the wiring laminated portion and the back side conductor layer. Therefore, in the component built-in wiring board of the above means 2, the back surface side conductor layer is formed so as to surround the bridge portion, and the bridge portion is independent from the back surface side conductor layer and has the same height as the surface of the back surface side conductor layer. An island-like layer protruding to the bottom is formed. In this case, since a part of the resin filler filled in the gap between the inner wall surface of the housing hole and the part side surface of the part flows into the gap between the back side conductor layer and the island layer (runs away), The above-mentioned sinking becomes difficult to occur. Therefore, since the core substrate and the wiring laminated portion are brought into close contact with each other, a component built-in wiring substrate having excellent reliability can be obtained. *

Further, in the component built-in wiring boards of the means 1 and 2, since the above-described resin filler is prevented from entering, it is difficult to form a raised portion of the resin filler on the core back surface side of the bridge portion. Therefore, the surface of the wiring laminated portion in contact with the core back surface can be flattened, and the dimensional accuracy of the wiring laminated portion is improved. Furthermore, in the component built-in wiring boards of the above means 1 and 2, since a plurality of receiving hole portions are formed in the core substrate and one component is received in one receiving hole portion, It is not necessary to increase the opening area of the part. Therefore, the strength of the core substrate can be ensured while increasing the number of components mounted. If a plurality of components are accommodated in one accommodation hole, the opening area of the accommodation hole is increased, and the strength of the core substrate is reduced. *

The core substrate constituting the component built-in wiring board is formed in a plate shape having a core main surface and a core back surface located on the opposite side, and has a plurality of receiving holes for receiving components. A material for forming the core substrate is not particularly limited, but a suitable core substrate is formed mainly of a polymer material. Specific examples of the polymer material for forming the core substrate include, for example, an epoxy resin, a polyimide resin, a bismaleimide / triazine resin, and a polyphenylene ether resin. In addition, a composite material of these resins and organic fibers such as glass fibers (glass woven fabric or glass nonwoven fabric) or polyamide fibers may be used. *

The core substrate has a bridge portion positioned between adjacent accommodation hole portions, and an outer peripheral portion in which a back surface side conductor layer surrounding the plurality of accommodation hole portions and the bridge portion is formed on the core back surface. Note that the back-side conductor layer can be formed of a conductive metal material or the like. Examples of the metal material constituting the back-side conductor layer include copper, silver, iron, cobalt, nickel, and the like. In particular, the metal material is preferably made of copper having high conductivity and low cost. Further, the back side conductor layer is preferably formed by plating. If it does in this way, a back side conductor layer can be formed simply and at low cost. However, the back side conductor layer may be formed by printing a metal paste. In the above means 1, the back side conductor layer has one through hole that exposes the core back side opening of the plurality of receiving holes and the core back side of the bridge part, and bridges from the opening end of the through hole. An overhanging part that projects toward the part may be provided, and the tip of the overhanging part may have a curved surface shape in plan view. In this way, even if thermal stress is applied to the resin filler, the stress concentration on the tip of the overhang portion (back side conductor layer) is alleviated by the curved outer surface. Therefore, the occurrence of cracks in the resin filler can be reliably prevented. *

The plurality of components have a component main surface, a component back surface, and a component side surface, and are respectively accommodated in the plurality of accommodating hole portions in a state where the core main surface and the component main surface face the same side. The shape of the component in plan view can be arbitrarily set, but in particular, it is preferably a polygonal shape in plan view having a plurality of sides. Examples of the polygonal shape in a plan view include a substantially rectangular shape in a plan view, a substantially triangular shape in a plan view, and a substantially hexagonal shape in a plan view, and in particular, a generally rectangular shape in a plan view. It is good. Here, the “substantially rectangular shape in plan view” does not mean only a complete shape in plan view but also includes a shape in which corners are chamfered and a shape in which a part of a side is a curve. *

Suitable components include capacitors, semiconductor integrated circuit elements (IC chips), MEMS (Micro Electro Mechanical Systems) elements manufactured by a semiconductor manufacturing process, and the like. *

Examples of suitable capacitors include a chip capacitor having a structure in which a plurality of internal electrode layers are stacked via a dielectric layer, and a structure in which a plurality of internal electrode layers are stacked via a dielectric layer. And a via array type capacitor in which a plurality of via conductors connected to a plurality of internal electrode layers are provided, and the plurality of via conductors are arranged in an array as a whole. *

Examples of the dielectric layer constituting the capacitor include a ceramic dielectric layer, a resin dielectric layer, and a dielectric layer made of a ceramic-resin composite material. The internal electrode layer and the via conductor are not particularly limited. For example, when the dielectric layer is a ceramic dielectric layer, it may be a metallized conductor. The metallized conductor is formed by applying a conductive paste containing metal powder by a conventionally well-known method, for example, a metallized printing method, followed by baking. *

Note that a resin filler is filled in the gap between the inner wall surface of the accommodation hole and the side surface of the component. The resin filler can be appropriately selected in consideration of insulation, heat resistance, moisture resistance, and the like. Preferable examples of the polymer material forming the resin filler include an epoxy resin, a phenol resin, a urethane resin, a silicone resin, and a polyimide resin. *

The wiring laminated portion constituting the component built-in wiring board has a structure in which an interlayer insulating layer and a conductor layer mainly composed of a polymer material are laminated on the core back surface and the component back surface. The wiring laminated portion (backside wiring laminated portion) is formed only on the core back surface and the component back surface, but has a structure in which an interlayer insulating layer and a conductor layer are laminated on the core main surface and the component main surface. A portion (main surface side wiring laminated portion) may be further formed. With such a configuration, an electric circuit can be formed not only on the back surface side wiring laminated portion but also on the main surface side wiring laminated portion, so that it is possible to further enhance the functionality of the component built-in wiring board.

The interlayer insulating layer can be appropriately selected in consideration of insulation, heat resistance, moisture resistance, and the like. Preferred examples of the polymer material for forming the interlayer insulating layer include thermosetting resins such as epoxy resins, phenol resins, urethane resins, silicone resins, polyimide resins, bismaleimide-triazine resins, xylene resins, polyester resins, Examples thereof include thermoplastic resins such as polycarbonate resin, acrylic resin, polyacetal resin, and polypropylene resin. *

Note that the conductor layer can be formed using a conductive metal material or the like. Examples of the metal material constituting the conductor layer include copper, silver, iron, cobalt, nickel and the like. In particular, the conductor layer is preferably made of copper having high conductivity and low cost. The conductor layer may be formed by plating. In this way, the conductor layer can be formed easily and at low cost. However, the conductor layer may be formed by printing a metal paste. *

Further, in the component built-in wiring board of the above means 2, an island layer is formed on the core back surface of the bridge portion independently of the back surface side conductor layer and protruding at the same height as the surface of the back surface side conductor layer. Here, the shape of the island layer in plan view can be arbitrarily set. For example, the plan view rectangular shape, the plan view triangular shape, the plan view circular shape, the plan view elliptical shape, and the plan view cross And the like. The island-like layer can be formed of a resin material, a ceramic material, a metal material, or the like, but is particularly preferably a metal material. In the case of using a metal material, the same material (material having conductivity) as the material constituting the back side conductor layer can be used, so that the manufacturing cost of the component built-in wiring board can be suppressed. Preferable examples of such a metal material include copper, silver, iron, cobalt, nickel and the like. In particular, the metal material is preferably made of copper having high conductivity and low cost. Moreover, as a suitable example of a resin material, an epoxy resin, a polyimide resin, a bismaleimide-triazine resin, a polyphenylene ether resin, a phenol resin etc. can be mentioned, for example. In addition, composite materials of these resins and glass fibers (glass woven fabric or glass nonwoven fabric) or organic fibers such as polyamide fibers may be used. Preferable examples of the ceramic material include alumina, aluminum nitride, silicon nitride, boron nitride, beryllia, mullite, glass ceramic and the like. *

A plurality of island layers may be formed on the back surface of the core of the bridge portion, and a region between adjacent island layers may have a slit shape. In this way, the surface of the wiring laminated portion in contact with the front end surface of each island layer and the surface of the wiring laminated portion in contact with the surface of the back side conductor layer can be flattened. The accuracy is further improved. *

Further, the plurality of island layers may be arranged in a direction orthogonal to a virtual line connecting the centers of the adjacent accommodation holes, or may have an elongated shape extending in parallel with the virtual line. Further, the island layer may have a curved shape in plan view. By doing so, a part of the resin filler smoothly flows into the gap between the back-side conductor layer and the island layer, so that the above-described submergence is further less likely to occur. Further, even if thermal stress is applied to the resin filler, the stress concentration on the outer peripheral portion of the island layer is alleviated by the curved outer surface. Therefore, generation | occurrence | production of the crack to a resin filler can be prevented. *

Note that a through-hole conductor penetrating the core main surface and the core back surface may be formed in the bridge portion, and the island layer may be a pad that is electrically connected to the end portion on the core back surface side of the through-hole conductor. In this way, since an electric circuit can be formed in the bridge portion, the function of the component built-in wiring board can be enhanced. Furthermore, a concave portion that opens on the back surface of the core and communicates between adjacent accommodation holes may be provided in a non-formation region where no island layer exists on the core back surface of the bridge portion. In this way, the resin filler flows into (is escaped from) the recesses in addition to the gaps between the back-side conductor layer and the island-like layer, so that the above-described submergence is further less likely to occur. *

Furthermore, as another means (means 3) for solving the above-mentioned problem, there is provided a method of manufacturing a component built-in wiring board according to the above means 1, wherein a core substrate preparation step for preparing the core substrate, and the core After the substrate preparation step, by forming a plurality of the receiving hole portions, a receiving hole portion forming step for obtaining the core substrate having the outer peripheral portion and the bridge portion, and after the receiving hole portion forming step, A conductor layer forming step of forming the back side conductor layer on the core back side so that the thickness of the bridge portion is thinner than the total thickness of the outer peripheral portion and the back side conductor layer; After the component preparing step for preparing the component, the conductor layer forming step, and the component preparing step, the accommodating step for accommodating the component in each of the accommodating holes, and the inner wall surface of the accommodating hole after the accommodating step And the above parts Filling a resin filler into a gap with the surface and covering the core back surface of the bridge portion with a part of the resin filler; and the resin covering the core back surface of the bridge portion after the filling step There is a method for manufacturing a wiring board with a built-in component, which includes a wiring laminated portion forming step of forming the wiring laminated portion on the front surface of the filler and the back surface of the component. *

When the back side conductor layer is formed on the entire core back side of the core substrate, the resin is interposed between the back side conductor layer formed on the bridge part and the wiring laminated part when fixing the component using the resin filler. There is a possibility that the filler may sink and cause a problem in the adhesion between the wiring laminated portion and the back side conductor layer. Therefore, in the method for manufacturing the component built-in wiring board of means 3 described above, in the conductor layer forming step, the back surface side conductor layer is formed so as to surround the bridge portion, and the thickness of the bridge portion is set to the outer peripheral portion and the back surface side conductor layer. It is thinner than the total thickness. In this case, by performing the filling step, the gap between the surface of the bridge portion and the wiring laminated portion is filled with a part of the resin filler, so that the above-described submergence hardly occurs. Therefore, when performing the wiring laminated portion forming step, the core substrate and the wiring laminated portion are surely brought into close contact with each other, so that a component built-in wiring substrate with excellent reliability can be obtained. *

Further, as another means (means 4) for solving the above-mentioned problem, there is provided a method of manufacturing a component built-in wiring board according to the above means 2, wherein a core substrate preparation step for preparing the core substrate, and the core After the substrate preparation step, by forming a plurality of the receiving hole portions, a receiving hole portion forming step for obtaining the core substrate having the outer peripheral portion and the bridge portion, and after the receiving hole portion forming step, A conductor layer forming step of forming the back side conductor layer on the core back surface, an island layer forming step of forming the island layer on the core back surface of the bridge portion after the accommodation hole forming step, and the plurality A component preparing step for preparing the component, a housing step for housing the component in a plurality of the housing holes after the conductor layer forming step, the island layer forming step, and the component preparing step, and the housing After the process, Filling the resin filler in the gap between the inner wall surface of the hole and the side surface of the component, and filling the gap between the back-side conductor layer and the island layer with a part of the resin filler; A wiring laminated portion forming step of forming the wiring laminated portion on the front surface of the resin filler filled in the gap between the back surface side conductor layer and the island-shaped layer and on the component back surface after the filling step; There is a method for manufacturing a component built-in wiring board. *

When the back side conductor layer is formed on the entire core back side of the core substrate, the resin is interposed between the back side conductor layer formed on the bridge part and the wiring laminated part when fixing the component using the resin filler. There is a possibility that the filler may sink and cause a problem in the adhesion between the wiring laminated portion and the back side conductor layer. Therefore, in the method of manufacturing the component built-in wiring board according to the above means 4, a conductor layer forming step of forming a back surface side conductor layer so as to surround the bridge portion is performed, and the bridge portion is independent from the back surface side conductor layer and An island-shaped layer forming step for forming an island-shaped layer protruding at the same height as the surface of the side conductor layer is performed. In this case, when the filling process is performed, a part of the resin filler filled in the gap between the inner wall surface of the accommodation hole and the side surface of the component flows into the gap between the back-side conductor layer and the island layer (runs away). As a result, the above-described sinking is less likely to occur. Therefore, when performing the wiring laminated portion forming step, the core substrate and the wiring laminated portion are surely brought into close contact with each other, so that a component built-in wiring substrate with excellent reliability can be obtained. *

Further, in the method of manufacturing the component built-in wiring board of the means 3 and 4, since the above-mentioned resin filler is prevented from entering when the filling step is performed, the resin filler swells on the core back surface side of the bridge portion. A part becomes difficult to be formed. Therefore, the surface of the wiring laminated portion formed on the back side of the core can be flattened, and the dimensional accuracy of the wiring laminated portion is improved. Further, in the method of manufacturing the component built-in wiring board of the means 3 and 4, a plurality of housing holes are formed in the core substrate in the housing hole forming process, and one component is housed in one housing hole in the housing process. Therefore, it is not necessary to increase the opening area of each receiving hole. Therefore, the strength of the core substrate can be ensured while increasing the number of components mounted. If a plurality of components are accommodated in one accommodation hole, the opening area of the accommodation hole is increased, and the strength of the core substrate is reduced. *

Hereinafter, a manufacturing method of the component built-in wiring board will be described. *

In the core substrate preparation step, the core substrate constituting the component built-in wiring substrate is prepared by a conventionally known method and prepared in advance. In the core substrate preparation step of the above means 4, a laminated plate having a back side conductor layer and a metal foil to be an island layer attached to the back surface of the core is prepared, and in the conductor layer formation step and the island layer formation step, a plurality of Forming a plating resist having an opening for exposing the housing hole and the bridge portion, and a covering portion for covering a portion to be an island layer on the core back surface of the bridge portion on the surface of the metal foil And a metal foil removing step for partially removing the metal foil by etching the exposed portion from the opening in the metal foil and on the outer peripheral side of the covering portion, and after the metal foil removing step, the plating resist And a resist removing step for removing. In this way, when forming the back side conductor layer and the island layer, it is not necessary to newly prepare a material for forming the back side conductor layer and the island layer. Can be easily formed. *

In the subsequent accommodation hole forming step, a core substrate having an outer peripheral portion and a bridge portion is obtained by forming a plurality of accommodation holes. In the subsequent conductor layer forming step, a back surface side conductor layer is formed on the core back surface of the outer peripheral portion. Here, in the above means 3, the thickness of the bridge portion is made larger than the total thickness of the outer peripheral portion and the back surface side conductor layer by forming the back surface side conductor layer on the core back surface of the outer peripheral portion in the conductor layer forming step. make it thin. Moreover, in the said means 4, an island-like layer formation process is performed after an accommodation hole part formation process, and an island-like layer is formed in the core back surface of a bridge | bridging part. In the island layer formation step, a plurality of island layers are formed on the back surface of the core of the bridge portion, and the plurality of island layers are filled with a resin filler in the gap between the back side conductor layer and the island layer in the filling step. It may extend along the flowing direction. In this way, a part of the resin filler smoothly flows into the gap between the back-side conductor layer and the island-like layer, so that the above-described sinking is further less likely to occur. *

In the core substrate preparation step of the means 3, a laminated plate having a metal foil to be a back side conductor layer attached to the back surface of the core is prepared. In the conductor layer formation step of the means 3, a plurality of receiving holes and bridges are prepared. Forming a plating resist having one opening on the surface of the metal foil to expose a portion of the core on the back surface of the core, and etching the exposed portion from the opening in the metal foil to form the metal foil A metal foil removing step for partially removing the resist and a resist removing step for removing the plating resist after the metal foil removing step may be performed. By doing so, it is not necessary to newly prepare a material for forming the back surface side conductor layer when forming the back surface side conductor layer, and therefore, the back surface side conductor layer can be easily formed.

In the component preparation step, a plurality of components constituting the component-embedded wiring board are prepared by a conventionally known method and prepared in advance. In the housing step, the components are housed in the plurality of housing holes, respectively. Further, in the filling step of the means 3, the resin filler is filled in the gap between the inner wall surface of the housing hole and the side surface of the component, and the core back surface of the bridge portion is covered with a part of the resin filler. In the filling step of the means 4, the resin filler is filled in the gap between the inner wall surface of the housing hole and the side surface of the component, and a part of the resin filler is put in the gap between the back side conductor layer and the island layer. Fill. *

When the filling process is completed, a resin filler in which the component back surface of the component covers the core back surface of the bridge portion (particularly, in means 4, the resin filler is filled in the gap between the back-side conductor layer and the island layer). If it is not flush with the surface of the wiring, the surface of the wiring laminated portion in contact with the back surface of the component and the surface of the resin filler covering the back surface of the core is flattened when forming the wiring laminated portion in the wiring laminated portion forming step. Therefore, the dimensional accuracy of the component built-in wiring board is lowered. Therefore, in the housing step and the filling step of the means 3, the core back surface side openings of the plurality of housing holes are closed with an adhesive tape having an adhesive surface, and the adhesive surface is applied to the back surface side conductor layer formed on the core back surface of the outer peripheral portion. On the other hand, the adhesive tape may be removed after the filling process, with the adhesive surface being separated from the core back surface of the bridge portion. In addition, the housing step and the filling step of the means 4 include closing the core back surface side openings of the plurality of housing holes with an adhesive tape having an adhesive surface, and forming the back surface side conductor layer and the bridge portion formed on the core back surface of the outer peripheral portion. It may be performed in a state where the adhesive surface is in close contact with the island-like layer formed on the back surface of the core, and the adhesive tape may be removed after the filling step. As described above, in the housing process, the component back side of the component is attached to the adhesive surface of the adhesive tape and temporarily fixed, and the component back surface of each component is formed on the core back surface and the surface of the back side conductor layer. Become the same. In particular, in the above means 4, since the adhesive tape is supported by the island-like layer, the adhesive tape is prevented from being bent, so that the positional accuracy of the parts attached to the adhesive surface of the adhesive tape is reduced. Is prevented. Therefore, it is possible to flatten the surface of the wiring laminated portion in contact with the back surface of the component and the surface of the back conductor layer, and the dimensional accuracy of the component built-in wiring board is improved. *

Thereafter, in the wiring laminated portion forming step of the means 3, the wiring laminated portion is formed on the surface of the resin filler covering the core back surface of the bridge portion and on the component back surface. Further, in the wiring laminated portion forming step of the above means 4, the wiring laminated portion is formed on the surface of the resin filler filled in the gap between the back side conductor layer and the island-like layer and on the back side of the component. The component built-in wiring board is manufactured through the above processes.

1 is a schematic sectional view showing a wiring board according to a first embodiment embodying the present invention. The schematic back view which shows a core board | substrate and a chip capacitor. FIG. 3 is a sectional view taken along line AA in FIG. 2. FIG. 3 is a sectional view taken along line BB in FIG. 2. The schematic plan view which shows a chip capacitor. FIG. 6 is a sectional view taken along the line CC of FIG. FIG. 6 is a sectional view taken along line DD of FIG. 5. The schematic sectional drawing which shows a core board | substrate preparatory process. Explanatory drawing which shows the process of forming a through-hole conductor and filling resin, and an accommodation hole part formation process. The schematic back view which shows the core board | substrate in an accommodation hole part formation process. Explanatory drawing which shows a resist formation process (conductor layer formation process). The schematic back view which shows the core board | substrate and plating resist in a resist formation process (conductor layer formation process). Explanatory drawing which shows a metal foil removal process and a resist removal process. The schematic back view which shows the core board | substrate in a metal foil removal process and a resist removal process. Explanatory drawing which shows the process of sticking an adhesive tape. Explanatory drawing which shows a accommodation process. The schematic plan view which shows the core board | substrate and chip capacitor in an accommodation process. Explanatory drawing which shows a filling process. Explanatory drawing which shows the process of forming an interlayer insulation layer and a via hole. Explanatory drawing which shows the process of forming a conductor layer and a via conductor. The schematic back view which shows the core board | substrate and chip capacitor in other embodiment. The schematic sectional drawing which shows the ceramic capacitor in other embodiment. The schematic sectional drawing which shows the wiring board in other embodiment. The schematic sectional drawing which shows the wiring board of 2nd Embodiment which actualized this invention. The schematic back view which shows a core board | substrate and a chip capacitor. FIG. 26 is a sectional view taken along line EE in FIG. 25. FIG. 26 is a sectional view taken along line FF in FIG. 25. Explanatory drawing which shows a core board | substrate preparatory process. Explanatory drawing which shows a resist formation process (a conductor layer formation process, an island-shaped layer formation process). The schematic back view which shows the core board | substrate and plating resist in a resist formation process (a conductor layer formation process, an island-shaped layer formation process). Explanatory drawing which shows a metal foil removal process and a resist removal process. The schematic back view which shows the core board | substrate in a metal foil removal process and a resist removal process. Explanatory drawing which shows the process of sticking an adhesive tape. Explanatory drawing which shows a accommodation process. The schematic plan view which shows the core board | substrate and chip capacitor in an accommodation process. Explanatory drawing which shows a filling process. Explanatory drawing which shows the process of forming an interlayer insulation layer and a via hole. The schematic back view which shows the core board | substrate and chip capacitor in other embodiment. The schematic back view which shows the core board | substrate in other embodiment. The schematic back view which shows the core board | substrate in other embodiment. The schematic back view which shows the core board | substrate in other embodiment. The principal part sectional view showing the core board in other embodiments. The principal part sectional view showing the core board in other embodiments. The schematic sectional drawing which shows the wiring board in other embodiment. Explanatory drawing which shows the manufacturing method of the wiring board in a prior art. Similarly, explanatory drawing of the manufacturing method of a wiring board. Explanatory drawing which shows the problem of a prior art.

First Embodiment Hereinafter, a first embodiment in which the component built-in wiring board of the present invention is embodied will be described in detail with reference to the drawings. *

As shown in FIG. 1, a component built-in wiring board 10 (hereinafter referred to as “wiring board 10”) of this embodiment is a wiring board for mounting an IC chip. The wiring substrate 10 includes a substantially rectangular core substrate 11, a main surface side buildup layer 31 formed on the core main surface 12 (upper surface in FIG. 1) of the core substrate 11, and a core back surface 13 of the core substrate 11. It consists of a back-side buildup layer 32 (wiring laminate) formed on (the lower surface in FIG. 1). *

The main surface side buildup layer 31 has a structure in which two interlayer insulating layers 33 and 35 made of a thermosetting resin (epoxy resin) and a conductor layer 41 made of copper are alternately laminated. In the present embodiment, the thermal expansion coefficient of the main surface side buildup layer 31 is about 10 to 60 ppm / ° C. (specifically, about 20 ppm / ° C.). The thermal expansion coefficient of the main surface side buildup layer 31 is an average value of measured values between 30 ° C. and the glass transition temperature (Tg). In the interlayer insulating layers 33 and 35, there are a plurality of main surface side via conductors 43 each formed by copper plating. *

As shown in FIG. 1, terminal pads 44 electrically connected to the conductor layer 41 through the main surface side via conductors 43 are formed in an array on the surface of the second interlayer insulating layer 35. ing. The terminal pad 44 of this embodiment is a so-called C4 pad (Controlled Collapsed Chip Connection pad). Further, the surface of the interlayer insulating layer 35 is almost entirely covered with the solder resist layer 50. An opening 46 for exposing the terminal pad 44 is formed at a predetermined portion of the solder resist layer 50. A plurality of solder bumps 45 are provided on the surface of the terminal pad 44. *

Each solder bump 45 is electrically connected to the surface connection terminal 22 of the IC chip 21 (semiconductor integrated circuit element). The IC chip 21 of the present embodiment is a plate-like object having a rectangular shape in plan view of 12.0 mm long × 12.0 mm wide × 0.9 mm thick, and has a thermal expansion coefficient of about 3 to 4 ppm / ° C. (specifically (Specifically, about 3.5 ppm / ° C.) of silicon. Each terminal pad 44 and each solder bump 45 are located in an area above the chip capacitors 100 and 101 in the main surface side buildup layer 31, and this area becomes an IC chip mounting area 23. The IC chip mounting area 23 is set on the surface 38 of the solder resist layer 50. *

As shown in FIG. 1, the back surface side buildup layer 32 has substantially the same structure as the main surface side buildup layer 31 described above. That is, the back-side buildup layer 32 has a thermal expansion coefficient of about 10 to 60 ppm / ° C. (specifically, about 20 ppm / ° C.), and two interlayer insulating layers 34 made of a thermosetting resin (epoxy resin). , 36 and conductor layers 42 made of copper are alternately laminated. The thermal expansion coefficient of the back side buildup layer 32 is an average value of measured values between 30 ° C. and the glass transition temperature (Tg). In the interlayer insulating layers 34 and 36, there are a plurality of back side via conductors 47 each formed by copper plating. *

Furthermore, pads 48 electrically connected to the conductor layer 42 via the back side via conductors 47 are formed in a lattice pattern at a plurality of locations on the lower surface of the second interlayer insulating layer 36. The lower surface of the interlayer insulating layer 36 is almost entirely covered with the solder resist layer 51. An opening 40 for exposing the pad 48 is formed at a predetermined position of the solder resist layer 51. On the surface of the pad 48, a plurality of solder bumps 49 are provided for electrical connection with a mother board (not shown). The wiring board 10 shown in FIG. 1 is mounted on a mother board (not shown) by each solder bump 49. *

As shown in FIGS. 1 to 4, the core substrate 11 of the present embodiment has a substantially rectangular shape in plan view of 25 mm length × 25 mm width × 0.8 mm thickness. The core substrate 11 is made of a thermosetting resin (epoxy resin), and has a thermal expansion coefficient of about 10 to 30 ppm / ° C. (specifically, 18 ppm / ° C.) in the plane direction (XY direction). The thermal expansion coefficient of the core substrate 11 is an average value of measured values between 0 ° C. and the glass transition temperature (Tg). *

A plurality of through-hole conductors 16 are formed in the core substrate 11 so as to penetrate the core main surface 12 and the core back surface 13. The through-hole conductor 16 connects and connects the core main surface 12 side and the core back surface 13 side of the core substrate 11. Note that the inside of the through-hole conductor 16 is filled with a filling resin 17 such as an epoxy resin. *

As shown in FIGS. 1 to 3, the core substrate 11 has two receiving holes 90 and 91 that are open on both the core main surface 12 side and the core back surface 13 side. That is, each accommodation hole 90, 91 is a through hole. Each of the receiving hole portions 90 and 91 has a substantially elliptical shape in plan view with a long side of 10 mm and a short side of 8 mm. The core substrate 11 includes a bridge portion 61 positioned between the adjacent accommodation hole portions 90 and 91, and an outer peripheral portion 62 that surrounds each of the accommodation hole portions 90 and 91 and the bridge portion 61. *

Further, a main surface side conductor layer 71 made of copper is formed on the core main surface 12 of the outer peripheral portion 62, and a back surface side conductor layer 81 made of copper is formed on the core back surface 13 of the outer peripheral portion 62. The main surface side conductor layer 71 is electrically connected to the upper end of the through-hole conductor 16, and the back surface side conductor layer 81 is electrically connected to the lower end of the through-hole conductor 16. That is, the through-hole conductor 16 has a function of electrically connecting the main surface side buildup layer 31 and the back surface side buildup layer 32. *

As shown in FIGS. 1 to 4, the back surface side conductor layer 81 exposes the core back surface 13 side opening of each housing hole 90, 91 and one through hole 82 that exposes the core back surface 13 of the bridge portion 61. have. That is, the back-side conductor layer 81 is a plain conductor formed only on the core back surface 13 of the outer peripheral portion 62, and is not formed on the core back surface 13 of the bridge portion 61. Further, the opening end of the through hole 82 is located on the outer peripheral side with respect to the opening ends of the accommodation hole portions 90 and 91. Furthermore, the back-side conductor layer 81 includes a pair of protruding portions 83 that are extended from the opening end of the through hole 82 toward the bridge portion 61. The two overhang portions 83 are located on opposite sides of the open end of the through hole 82 and project in a direction approaching each other. And the front-end | tip part of both the overhang | projection parts 83 has a curved surface shape by planar view. *

On the other hand, the main surface side conductor layer 71 has substantially the same structure as the back surface side conductor layer 81 described above. That is, as shown in FIGS. 1, 3, 4, and 17, the main surface side conductor layer 71 exposes the core main surface 12 side opening of each housing hole 90, 91 and also the core of the bridge portion 61. One through-hole 72 that exposes the main surface 12 is provided. That is, the main surface side conductor layer 71 is a plain conductor formed only on the core main surface 12 of the outer peripheral portion 62, and is not formed on the core main surface 12 of the bridge portion 61. Further, the opening end of the through hole 72 is located on the outer peripheral side with respect to the opening ends of the accommodation hole portions 90 and 91. Further, the main surface side conductor layer 71 includes a pair of projecting portions 73 that project from the opening end of the through hole 72 toward the bridge portion 61. The two overhanging portions 73 are located on opposite sides of the opening end of the through hole 72 and project in a direction approaching each other. And the front-end | tip part of both the overhang | projection parts 73 has a curved surface shape by planar view. *

As shown in FIG. 3, since the thickness T1 of the bridge portion 61 is equal to the thickness T2 of the outer peripheral portion 62 (specifically 0.8 mm), the thickness T1 of the bridge portion 61 is equal to the outer peripheral portion 62. And the main surface side conductor layer 71 and the back surface side conductor layer 81 are thinner than the total thickness. The thickness T1 of the bridge portion 61 is thinner than the total thickness of the outer peripheral portion 62 and the main surface side conductor layer 71 and the total thickness T3 of the outer peripheral portion 62 and the back surface side conductor layer 81. ing. *

As shown in FIGS. 1 to 4, the chip capacitor 100 (component) is housed in the housing hole 90, and the chip capacitor 101 (component) is similarly housed in the housing hole 91. It is housed in an embedded state. The chip capacitors 100 and 101 have the core main surface 12 and the capacitor main surface 102 of the core substrate 11 facing the same side, and the core back surface 13 and the capacitor back surface 103 of the core substrate 11 facing the same side. Contained in state. Further, the chip capacitors 100 and 101 are arranged in a region immediately below the IC chip mounting region 23 in the core substrate 11. *

As shown in FIGS. 1, 2, and 5 to 7, the chip capacitors 100 and 101 have one capacitor main surface 102 (upper surface in FIG. 1) as a component main surface and one capacitor back surface as a component back surface. 103 (lower surface in FIG. 1) and four capacitor side surfaces 104 which are component side surfaces. An interlayer insulating layer 33 constituting the main surface side buildup layer 31 is formed on the capacitor main surface 102, and an interlayer insulating layer 34 constituting the back surface side buildup layer 32 is formed on the capacitor back surface 103. Is formed. In addition, the chip capacitors 100 and 101 are alternately stacked with the power supply internal electrode layer 141 (internal electrode layer) and the ground internal electrode layer 142 (internal electrode layer) through the ceramic dielectric layer 105 (dielectric layer). The ceramic sintered body 106 arranged is provided. The ceramic sintered body 106 of the present embodiment is a plate-like object having a substantially rectangular shape in plan view with a length of 6.0 mm, a width of 4.0 mm, and a thickness of 0.8 mm. That is, the thickness of the ceramic sintered body 106 is equal to the thickness (0.8 mm) of the core substrate 11. The thermal expansion coefficient of the ceramic sintered body 106 is about 8 to 12 ppm / ° C., specifically about 9.5 ppm / ° C. The thermal expansion coefficient of the ceramic sintered body 106 is an average value of measured values between 30 ° C. and 250 ° C. The ceramic dielectric layer 105 is made of a sintered body of barium titanate, which is a kind of high dielectric ceramic, and functions as a dielectric (insulator) between the power internal electrode layer 141 and the ground internal electrode layer 142. To do. Each of the power supply internal electrode layer 141 and the ground internal electrode layer 142 is a layer formed mainly of nickel, and is disposed in every other layer in the ceramic sintered body 106. *

As shown in FIGS. 1, 2, and 5 to 7, a power supply electrode 111 and a ground electrode 121 are provided on a pair of capacitor side surfaces 104 facing each other in the ceramic sintered body 106, respectively. The capacitor main surface side end portion 112 and the capacitor back surface side end portion 113 of the power supply electrode 111 are located on the capacitor main surface 102 and the capacitor back surface 103, respectively. Similarly, the capacitor main surface side end portion 122 and the capacitor back surface side end portion 123 of the ground electrode 121 are also located on the capacitor main surface 102 and the capacitor back surface 103, respectively. Further, the power supply electrode 111 is connected to the plurality of power supply internal electrode layers 141, and the ground electrode 121 is connected to the plurality of ground internal electrode layers 142. The electrodes 111 and 121 are made of nickel as a main material, and the surface is covered with a copper plating layer (not shown). *

For example, when energization is performed from the electrodes 111 and 121 side and a voltage is applied between the internal electrode layer 141 for power supply and the internal electrode layer 142 for ground, for example, positive charges are accumulated in the internal electrode layer 141 for power supply, For example, negative charges accumulate in the electrode layer 142. As a result, the chip capacitors 100 and 101 function as capacitors. *

The power supply electrodes 111 of the chip capacitors 100 and 101 are connected to the surface connection terminals 22 of the IC chip 21 through a power supply conduction path including the main surface side via conductors 43, the conductor layers 41, the terminal pads 44 and the solder bumps 45. Electrically connected. Then, the ground electrodes 121 of the chip capacitors 100 and 101 are connected to the surface connection terminals 22 of the IC chip 21 through a ground conduction path including the main surface side via conductors 43, the conductor layers 41, the terminal pads 44 and the solder bumps 45. Electrically connected. As a result, power can be supplied from the chip capacitors 100 and 101 to the IC chip 21.

As shown in FIGS. 1 and 2, the gap between the inner wall surface 92 of the accommodation hole 90 and the capacitor side surface 104 of the chip capacitor 100, and the inner wall surface 92 of the accommodation hole portion 91 and the capacitor side surface 104 of the chip capacitor 101 The gap is filled with a resin filler 93 made of a polymer material (in this embodiment, an epoxy resin which is a thermosetting resin). The resin filler 93 has a function of fixing the chip capacitors 100 and 101 to the core substrate 11. Furthermore, the gap between the core main surface 12 (front surface) of the bridge portion 61 and the interlayer insulating layer 33 constituting the main surface side buildup layer 31, and the core back surface 13 (front surface) and back surface side buildup layer of the bridge portion 61. A gap with the interlayer insulating layer 34 constituting 32 is filled with a part of the resin filler 93. In the present embodiment, the size of the gap between the inner wall surface 92 of the receiving hole portions 90 and 91 and the capacitor side surface 104 of the chip capacitors 100 and 101 is set to 1 mm. And the thickness of the part affixed on the core main surface 12 of the bridge part 61 in the resin filler 93, and the thickness of the part affixed on the core back surface 13 of the bridge part 61 in the resin filler 93 Is set to 50 μm. *

Next, the manufacturing method of the wiring board 10 of this embodiment is demonstrated. *

First, in the core substrate preparation step, an intermediate product of the core substrate 11 is prepared by a conventionally known method and prepared in advance. Specifically, a copper foil 152 that becomes the main surface side conductor layer 71 is affixed to the core main surface 12 of the base material 151, and a copper foil 152 that becomes the back surface side conductor layer 81 on the core back surface 13 of the base material 151. A copper-clad laminate 150 (see FIG. 8) to which (metal foil) is attached is prepared, and this is used as an intermediate product of the core substrate 11. In addition, the base material 151 of the present embodiment is a plate-like object having a rectangular shape in plan view of 400 mm in length, 400 mm in width, and 0.8 mm in thickness. The intermediate product of the core substrate 11 is a multi-piece core substrate having a structure in which a plurality of regions to be the core substrate 11 are arranged vertically and horizontally along the plane direction. *

Next, drilling is performed on the core substrate 11 (copper-clad laminate 150) using a drill, and through holes for forming the through-hole conductors 16 are formed in advance at predetermined positions. Next, after performing electroless copper plating on the entire surface of the core substrate 11 including the inner wall surface of the through hole, the core main surface 12 and the core back surface 13, the electrolytic copper plating is performed. As a result, a plating layer 161 to be the through-hole conductor 16 is formed on the inner wall surface of the through hole (see FIG. 9). Further, a plating layer 162 to be the main surface side conductor layer 71 is formed on the core main surface 12, and a plating layer 163 to be the back surface side conductor layer 81 is formed on the core back surface 13 (see FIG. 9). Thereafter, the hollow portion of the plating layer 161 to be the through-hole conductor 16 is filled with an insulating resin material (epoxy resin) to form a filling resin 17 (see FIG. 9). Next, a plating layer 164 (see FIG. 9) is formed on the surfaces of the plating layers 162 and 163 by performing electroless copper plating according to a conventionally known method. *

In the accommodation hole forming step after the core substrate preparation step, the core substrate 11 is punched using a router to form a plurality of accommodation holes 90 and 91 (see FIGS. 9 and 10). At this point, the core substrate 11 having the outer peripheral portion 62 and the bridge portion 61 is obtained. *

In the conductor layer forming step after the housing hole forming step, the main surface side conductor layer 71 is formed on the core main surface 12 of the outer peripheral portion 62, and the back surface side conductor layer 81 is formed on the core back surface 13 of the outer peripheral portion 62. Specifically, the plating layers 162 to 164 are etched, and the plating layers 162 to 164 are patterned by, for example, a subtractive method. More specifically, first, a resist forming step is performed, and a dry film is laminated on the surface of the plating layer 164 on the core main surface 12 side and on the surface of the plating layer 164 on the core back surface 13 side. Next, by performing exposure and development on each dry film, a plating resist 170 having one opening 171 is formed (see FIGS. 11 and 12). From the opening 171 of the plating resist 170 formed on the core main surface 12 side, each of the receiving hole portions 90 and 91, the entire plating layer 164 that is a portion on the core main surface 12 of the bridge portion 61, and the outer periphery A part of the plating layer 164 formed on the core main surface 12 of the part 62 is exposed. In addition, from the opening 171 of the plating resist 170 formed on the core back surface 13 side, each of the receiving hole portions 90 and 91, the entire plating layer 164 that is a portion of the bridge portion 61 on the core back surface 13, and the outer peripheral portion 62. A part of the plating layer 164 formed on the core back surface 13 is exposed. In this state, the metal foil removing step is performed, and the exposed portions from the openings 171 in the plating layers 162 to 164 are etched to partially remove the copper foil 152 and the plating layers 162 to 164 (FIG. 13, FIG. (See FIG. 14). Thereafter, a resist removing step is performed, and the plating resist 170 is peeled (removed). As a result, the main surface side conductor layer 71 is formed on the core main surface 12, and the back surface side conductor layer 81 is formed on the core back surface 13 (see FIGS. 13 and 14). At this time, the thickness T1 (see FIG. 3) of the bridge portion 61 is the total thickness of the outer peripheral portion 62 and the main surface side conductor layer 71 and the total thickness of the outer peripheral portion 62 and the back surface side conductor layer 81. It is thinner than T3 (see FIG. 3). Further, a part of the plating layer 164 on the core main surface 12 side becomes a lid plating layer covering the end surface on the core main surface 12 side of the through-hole conductor 16, and a part of the plating layer 164 on the core back surface 13 side becomes a through-hole. This is a lid plating layer that covers the end surface of the conductor 16 on the core back surface 13 side. *

In the component preparation step (capacitor preparation step), the two chip capacitors 100 and 101 are prepared by a conventionally known method and prepared in advance.

The chip capacitors 100 and 101 are manufactured as follows. That is, a ceramic green sheet is formed, and a nickel paste for internal electrodes is screen printed on the green sheet and dried. As a result, a power internal electrode portion that will later become the power internal electrode layer 141 and a ground internal electrode portion that will become the ground internal electrode layer 142 are formed. Next, the green sheets with the power supply internal electrode portions and the green sheets with the ground internal electrode portions are alternately stacked, and each green sheet is integrated by applying a pressing force in the sheet stacking direction. To form a green sheet laminate. *

Furthermore, the paste is printed on the upper surface, the lower surface, and the side surface of the green sheet laminate, and the power supply electrode 111 and the ground electrode 121 are formed so as to cover the side end surfaces of the electrode portions on the side surface side of the green sheet laminate. Form. Thereafter, the green sheet laminate is dried to solidify the electrodes 111 and 121 to some extent. Next, the green sheet laminate is degreased and fired at a predetermined temperature for a predetermined time. As a result, barium titanate and nickel in the paste are simultaneously sintered to form a ceramic sintered body 106. Next, electroless copper plating (thickness of about 10 μm) is performed on each of the electrodes 111 and 121 included in the obtained ceramic sintered body 106. As a result, a copper plating layer is formed on the electrodes 111 and 121, and the chip capacitors 100 and 101 are completed. *

In the housing step after the conductor layer forming step and the component preparation step, first, the opening on the core back surface 13 side of each housing hole 90, 91 is sealed with a peelable adhesive tape 181 (see FIG. 15). At this time, the adhesive surface of the adhesive tape 181 is in close contact with the back-side conductor layer 81 formed on the core back surface 13 of the outer peripheral portion 62, while the adhesive surface is separated from the core back surface 13 of the bridge portion 61. The adhesive tape 181 is supported by a support table (not shown). Next, using a mounting device (manufactured by Yamaha Motor Co., Ltd.), the core main surface 12 and the capacitor main surface 102 are directed to the same side, and the core back surface 13 and the capacitor back surface 103 are directed to the same side. Thus, the chip capacitors 100 and 101 are accommodated in the accommodating holes 90 and 91, respectively (see FIGS. 16 and 17). At this time, the chip capacitors 100 and 101 are temporarily fixed by attaching the capacitor back surface 103 to the adhesive surface of the adhesive tape 181. *

In the subsequent filling step, a dispenser device is provided in the gap between the inner wall surface 92 of the accommodation hole 90 and the capacitor side surface 104 of the chip capacitor 100 and the gap between the inner wall surface 92 of the accommodation hole portion 91 and the capacitor side surface 104 of the chip capacitor 101. A resin filler 93 made of a thermosetting resin (manufactured by NAMICS Co., Ltd.) is filled using (manufactured by Asymtek) (see FIG. 18). At this time, the core main surface 12 and the core back surface 13 of the bridge portion 61 are covered with a part of the resin filler 93. In the fixing step after the filling step, the chip capacitors 100 and 101 are fixed in the accommodation holes 90 and 91 by curing the resin filler 93. Then, after the fixing step, the adhesive tape 181 is peeled (removed). Thereafter, the surface of the conductor layers 71, 81, the surface 94 of the resin filler 93 covering the core main surface 12 of the bridge portion 61, and the surface 95 of the resin filler 93 covering the core back surface 13 of the bridge portion 61 are roughened. I do. *

In the wiring laminated portion forming step after the fixing step, the main surface side buildup layer 31 is formed on the core main surface 12 and the back surface side buildup layer 32 is formed on the core back surface 13 based on a conventionally known method. Form. Specifically, first, an interlayer insulating layer 33 is formed by depositing a thermosetting epoxy resin on the surface 94 of the resin filler 93 and the capacitor main surface 102 (see FIG. 19). Further, an interlayer insulating layer 34 is formed by depositing a thermosetting epoxy resin on the surface 95 of the resin filler 93 and the capacitor back surface 103 (see FIG. 19). *

Further, laser drilling is performed using a YAG laser or a carbon dioxide gas laser to form a via hole 191 at a position where the main surface side via conductor 43 is to be formed and a position where the back surface side via conductor 47 is to be formed. A via hole 192 is formed in (see FIG. 19). Specifically, a via hole 191 penetrating the interlayer insulating layer 33 is formed to expose the surfaces (surfaces on the capacitor main surface 102 side) of the electrodes 111 and 121 constituting the chip capacitors 100 and 101. Also, a via hole 192 that penetrates the interlayer insulating layer 34 is formed to expose the surfaces (surfaces on the capacitor back surface 103 side) of the electrodes 111 and 121 constituting the chip capacitors 100 and 101. Then, after performing electroless copper plating on the surfaces of the interlayer insulating layers 33 and 34 and the inner surfaces of the via holes 191 and 192, an etching resist is formed, and then electrolytic copper plating is performed. Further, the etching resist is removed and soft etching is performed. As a result, the conductor layer 41 is patterned on the interlayer insulating layer 33 and the conductor layer 42 is patterned on the interlayer insulating layer 34 (see FIG. 20). At the same time, via conductors 43 and 47 are formed in the via holes 191 and 192, respectively. *

Next, an interlayer having a via hole (not shown) at a position where the main surface side via conductor 43 is to be formed by depositing a thermosetting epoxy resin on the interlayer insulating layer 33 and performing laser drilling. An insulating layer 35 is formed. Further, an interlayer insulating layer having via holes (not shown) at positions where the back side via conductors 47 are to be formed by depositing a thermosetting epoxy resin on the interlayer insulating layer 34 and performing laser drilling. 36 is formed. Next, electrolytic copper plating is performed according to a conventionally known method to form via conductors 43 and 47 inside the via holes. At the same time, the terminal pads 44 are formed on the interlayer insulating layers 35 and 36, and the pads 48 are formed on the interlayer insulating layers 35 and 36. *

Next, solder resist layers 50 and 51 are formed by applying a photosensitive epoxy resin on the interlayer insulating layers 35 and 36. Next, exposure and development are performed in a state where a predetermined mask is disposed, and openings 40 and 46 are formed in the solder resist layers 50 and 51. Further, solder bumps 45 are formed on the terminal pads 44, and solder bumps 49 are formed on the pads 48. It can be understood that the product in this state is a multi-cavity wiring board in which a plurality of product regions to be the wiring board 10 are arranged vertically and horizontally along the plane direction. Furthermore, when the multi-cavity wiring board is divided, a large number of wiring boards 10 which are individual products can be obtained simultaneously. *

Next, the IC chip 21 is placed in the IC chip mounting region 23 of the main surface side buildup layer 31 constituting the wiring board 10. At this time, the surface connection terminals 22 on the IC chip 21 side and the respective solder bumps 45 are aligned. Then, each solder bump 45 is reflowed by heating to a temperature of about 220 ° C. to 240 ° C., thereby joining each solder bump 45 and the surface connection terminal 22 to electrically connect the wiring substrate 10 side and the IC chip 21 side. Connect. As a result, the IC chip 21 is mounted in the IC chip mounting area 23 (see FIG. 1). *

Therefore, according to the present embodiment, the following effects can be obtained. *

(1) For example, as shown in FIG. 47, when the back side conductor layer 206 is formed on the core back side 202 of the bridge portion 212, the resin filler 211 is interposed between the back side conductor layer 206 and the adhesive tape 210. May sink and cause a problem in the adhesion between the back-side buildup layer formed on the core back surface 202 side and the back-side conductor layer 206. Therefore, in the wiring substrate 10 of this embodiment, the back surface side conductor layer 81 is formed so as to surround the bridge portion 61, and the back surface side conductor layer 81 is not formed in the bridge portion 61. In this case, since the gap between the front surface (core back surface 13) of the bridge portion 61 and the back-side buildup layer 32 is filled with a part of the resin filler 93, the above-described submergence hardly occurs. Therefore, since the core substrate 11 and the back surface side buildup layer 32 come into close contact with each other, the wiring substrate 10 having excellent reliability can be obtained. *

In addition, since the above-described resin filler is prevented from sinking, the raised portion of the resin filler 93 is hardly formed on the core back surface 13 side of the bridge portion 61. Therefore, the surface 39 of the back surface side buildup layer 32 (solder resist layer 51) in contact with the core back surface 13 can be flattened, and the dimensional accuracy of the back surface side buildup layer 32 is improved. *

(2) In this embodiment, since the conductor layer (back side conductor layer 81) is not formed on the core back surface 13 of the bridge portion 61, the contact area between the resin filler 93 covering the core back surface 13 and the bridge portion 61 is small. The adhesion strength between the two increases and the adhesion strength between the resin filler 93 and the interlayer insulating layer 34 constituting the back-side buildup layer 32 increases. As a result, the core substrate 11 and the back surface side buildup layer 32 come into close contact with each other more reliably. In addition, in this embodiment, since the conductor layer (main surface side conductor layer 71) is not formed on the core main surface 12 of the bridge portion 61, the resin filler 93 and the bridge portion 61 that cover the core main surface 12 are provided. The contact area is increased and the adhesion strength between the two is increased, and the adhesion strength between the resin filler 93 and the interlayer insulating layer 33 constituting the main surface side buildup layer 31 is increased. As a result, the core substrate 11 and the main surface side buildup layer 31 come into close contact with each other more reliably. Therefore, the occurrence of delamination and the like can be prevented, so that the wiring board 10 with even higher reliability can be obtained. *

(3) In the present embodiment, the two chip capacitors 100 and 101 are disposed immediately below the IC chip 21 mounted in the IC chip mounting region 23. For this reason, the wiring connecting the chip capacitors 100 and 101 and the IC chip 21 is shortened, and an increase in the inductance component of the wiring is prevented. Therefore, the switching noise of the IC chip 21 due to the chip capacitors 100 and 101 can be surely reduced, and the power supply voltage can be reliably stabilized. Further, since noise entering between the IC chip 21 and each of the chip capacitors 100 and 101 can be suppressed to a very low level, high reliability can be obtained without causing problems such as malfunctions. *

In addition, you may change the said 1st Embodiment as follows. *

-The accommodation hole parts 90 and 91 of the said 1st Embodiment were substantially elliptical holes in planar view. However, as shown in the core substrate 221 of FIG. 21, the receiving holes 222 and 223 may be holes having a substantially square shape in plan view in which the four corners have a curved shape in plan view. In this case as well, the back-side conductor layer 225 formed on the core back surface 224 has a pair of overhang portions 228 that protrude from the open end of the through hole 226 toward the bridge portion 227, and both overhangs It is preferable that the tip of the portion 228 has a curved surface shape in plan view. *

The main surface side conductor layer 71 of the first embodiment is formed only on the core main surface 12 of the outer peripheral portion 62, and is not formed on the core main surface 12 of the bridge portion 61. Similarly, the back-side conductor layer 81 of the first embodiment is formed only on the core back surface 13 of the outer peripheral portion 62 and is not formed on the core back surface 13 of the bridge portion 61. However, the main surface side conductor layer 71 may be formed on the core main surface 12 of the bridge portion 61 in addition to the core main surface 12 of the outer peripheral portion 62. *

In the first embodiment, the chip capacitors 100 and 101 are accommodated in the two accommodation holes 90 and 91, respectively. However, three or more accommodation holes are provided in the core substrate 11, and each of the accommodation holes is provided. A chip capacitor may be accommodated. *

In the first embodiment, the chip capacitors 100 and 101 are used as components accommodated in the accommodation holes 90 and 91. However, as shown in FIG. 22, a via array type ceramic capacitor 301 may be used as a component housed in the housing holes 90 and 91. The ceramic capacitor 301 has a structure in which power supply internal electrode layers 303 and ground internal electrode layers 304 are alternately stacked via ceramic dielectric layers 302. In addition, via conductors 307 and 308 are formed in the ceramic capacitor 301 so as to communicate between the capacitor main surface 305 (component main surface) and the capacitor back surface 306 (component back surface). The power supply via conductor 307 passes through each of the power supply internal electrode layers 303 and electrically connects them to each other. The ground via conductor 308 passes through each ground internal electrode layer 304 and electrically connects them to each other. The via conductors 307 and 308 are arranged in an array as a whole. On the capacitor main surface 305, a main surface side power supply electrode 309 and a main surface side ground electrode 310 are projected. The main surface side power supply electrode 309 is connected to the end of the power supply via conductor 307 on the capacitor main surface 305 side, and the main surface side ground electrode 310 is connected to the ground via conductor 308 on the capacitor main surface 305 side. Connected to the end. Further, on the capacitor back surface 306, a back surface side power supply electrode 311 and a back surface side ground electrode 312 are projected. The back side power supply electrode 311 is connected to the end of the power supply via conductor 307 on the capacitor back side 306 side, and the back side ground electrode 312 is connected to the end of the ground via conductor 308 on the capacitor back side 306 side. Has been. Note that an IC chip, DRAM, SRAM, a register, or the like may be used as a component accommodated in the accommodation holes 90 and 91.

In the first embodiment, the gap between the inner wall surface 92 of the accommodation hole 90, 91 and the capacitor side surface 104 of the chip capacitor 100, 101 is filled with the resin filler 93. However, as shown in the wiring board 320 of FIG. 23, the gap between the inner wall surface 323 of the accommodation hole portions 321 and 322 and the capacitor side surface 326 (component side surface) of the chip capacitors 324 and 325 (component) is formed on the main surface side build. The interlayer insulating layer 328 constituting the up layer 327 may be partly filled. That is, the interlayer insulating layer 328 may have a function as a resin filler. *

In the first embodiment, two chip capacitors 100 and 101 are electrically connected to one IC chip 21. However, two IC chips may be mounted in the IC chip mounting region set in the main surface side buildup layer 31, and the two chip capacitors 100 and 101 may be electrically connected to each IC chip. *

Second Embodiment Hereinafter, a second embodiment in which the component-embedded wiring board of the present invention is embodied will be described in detail with reference to the drawings. Here, the description will focus on the parts that differ from the first embodiment. In the present embodiment, the structure of the core substrate is different from that of the first embodiment. *

Specifically, as shown in FIG. 24, the core board 331 provided in the component built-in wiring board 330 (hereinafter referred to as “wiring board 330”) of the present embodiment is provided on both the core main surface 332 side and the core back surface 333 side. It has two receiving hole portions 334 and 335 that are open. The core substrate 331 includes a bridge portion 336 positioned between the adjacent accommodation hole portions 334 and 335, and an outer peripheral portion 337 surrounding each of the accommodation hole portions 334 and 335 and the bridge portion 336. *

Further, as shown in FIGS. 24 to 27, the main surface side conductor layer 341 made of copper is formed on the core main surface 332 of the outer peripheral portion 337, and the core back surface 333 of the outer peripheral portion 337 is made of copper. A back side conductor layer 351 is formed. The back surface side conductor layer 351 has one through hole 352 that exposes the core back surface 333 side opening of each of the receiving hole portions 334 and 335 and exposes the core back surface 333 side of the bridge portion 336. The back-side conductor layer 351 is a 35 μm-thick plain conductor formed only on the core back surface 333 of the outer peripheral portion 337, and is not formed on the core back surface 333 of the bridge portion 336. Further, the opening end of the through hole 352 is positioned on the outer peripheral side with respect to the opening ends of the accommodation hole portions 334 and 335. Further, the back-side conductor layer 351 includes a pair of protruding portions 353 that are extended from the opening end of the through hole 352 toward the bridge portion 336. The two overhang portions 353 are located on opposite sides of the opening end of the through hole 352 and project in a direction approaching each other. And the front-end | tip part of both the overhang | projection parts 353 has curved shape by planar view. *

On the other hand, the main surface side conductor layer 341 has substantially the same structure as the back surface side conductor layer 351 described above. That is, as shown in FIGS. 24, 26, 27, and 35, the main surface side conductor layer 341 exposes the core main surface 332 side opening of each of the receiving hole portions 334, 335 and the core of the bridge portion 336. It has one through hole 342 that exposes the main surface 332 side. The main surface side conductor layer 341 is a 35 μm thick plain conductor formed only on the core main surface 332 of the outer peripheral portion 337, and is not formed on the core main surface 332 of the bridge portion 336. Further, the opening end of the through hole 342 is located on the outer peripheral side with respect to the opening ends of the accommodation hole portions 334 and 335. Further, the main surface side conductor layer 341 includes a pair of protruding portions 343 that are extended from the opening end of the through hole 342 toward the bridge portion 336. Both projecting portions 343 are located on opposite sides of the opening end of the through hole 342 and project in a direction approaching each other. And the front-end | tip part of both overhang | projection parts 343 has curved shape by planar view. *

As shown in FIGS. 24 to 27, on the core back surface 333 of the bridge portion 336, a plurality (three in this embodiment) of back-side island layers 241 made of copper are formed. Each back-side island layer 241 has an elliptical shape in plan view with a major axis of 0.6 mm, a minor axis of 0.1 mm, and a thickness of 35 μm. Each back-side island layer 241 has an elongated shape extending in parallel with an imaginary line L1 (see FIG. 25) connecting the centers C1, C2 (see FIG. 25) of the adjacent accommodation holes 334, 335, and in plan view. It has a curved shape (shape with roundness). Each back-side island layer 241 is independent from the back-side conductor layer 351 and protrudes to the same height (thickness) as the surface of the back-side conductor layer 351. And the front end surface of each back surface island-like layer 241 is in contact with the interlayer insulating layer 364 constituting the back surface side buildup layer 362 (wiring laminated portion). Further, the back-side island layers 241 are arranged at equal intervals in the direction orthogonal to the virtual line L1. A region between the adjacent backside island-like layers 241 and a region between the adjacent overhanging portion 353 and the backside island-like layer 241 form a slit shape. Note that the minimum value of the size of the gap S1 (see FIGS. 25 and 27) between the adjacent backside island layers 241 and the overhanging portion 353 (backside conductor layer 351) and the backside island layer 241 The minimum value of the size of the gap S2 (see FIGS. 25 and 27) is 35 μm.

As shown in FIGS. 24, 26, 27, and 35, a plurality of (three in this embodiment) main surface side island-like layers 231 made of copper are formed on the core main surface 332 of the bridge portion 336. Has been. The main surface side island layer 231 has substantially the same structure as the above-described back surface island layer 241. That is, each main surface side island-like layer 231 has an elliptical shape in plan view with a major axis of 0.6 mm × minor axis of 0.1 mm × thickness of 35 μm. Each main-surface-side island-like layer 231 has an elongated shape extending in parallel with the imaginary line L1 and has a curved shape (a shape having a roundness) in plan view. Each main surface side island-like layer 231 is independent from the main surface side conductor layer 341 and protrudes to the same height (thickness) as the surface of the main surface side conductor layer 341. The leading end surface of each main surface side island layer 231 is in contact with the interlayer insulating layer 363 constituting the main surface side buildup layer 361. Further, the main surface side island layers 231 are arranged at equal intervals in the direction orthogonal to the virtual line L1. A region between the adjacent main surface side island layers 231 and a region between the adjacent overhanging portion 343 and the main surface side island layers 231 form a slit shape. Note that the minimum value of the size of the gap between adjacent main surface side island layers 231 and the size of the gap between the projecting portion 343 (main surface side conductor layer 341) and the main surface side island layers 231 are as follows. The minimum value is 35 μm for each.

24 and 25, the gap between the inner wall surface 338 of the accommodation hole 334 and the capacitor side surface 372 (component side surface) of the chip capacitor 370 (component), and the inner wall surface 338 of the accommodation hole 335 and the chip. A gap between the capacitor 371 (component) and the capacitor side surface 372 is filled with a resin filler 367 made of a polymer material (in this embodiment, an epoxy resin which is a thermosetting resin). Further, the gap between the core main surface 332 (front surface) of the bridge portion 336 and the interlayer insulating layer 363 constituting the main surface side buildup layer 361, and the core back surface 333 (front surface) of the bridge portion 336 and the back surface side buildup layer. A gap with the interlayer insulating layer 364 constituting the 362 is filled with a part of the resin filler 367. In other words, the gap between the main surface side conductor layer 341 and the main surface side island layer 231 and the gap S2 between the back surface side conductor layer 351 and the back surface side island layer 241 are filled with a part of the resin filler 367. It has been. In the present embodiment, the size of the gap between the inner wall surface 338 of the receiving hole portions 334 and 335 and the capacitor side surface 372 of the chip capacitors 370 and 371 is set to about 1 mm. Then, the thickness of the portion pasted on the core main surface 332 of the bridge portion 336 in the resin filler 367 and the thickness of the portion pasted on the core back surface 333 of the bridge portion 336 in the resin filler 367. Is set to 35 μm. *

Next, the manufacturing method of the wiring board 330 of this embodiment is demonstrated. Here, a core substrate preparation process, a conductor layer forming process, an island-shaped layer forming process, a housing process, a filling process, a wiring laminated portion forming process, and the like are different from the first embodiment. *

More specifically, in the core substrate preparation step, the copper foil 392 that becomes the main surface side conductor layer 341 and the main surface side island-like layer 231 is attached to the core main surface 332 of the base material 391, and the core back surface of the base material 391. A copper-clad laminate 390 (see FIG. 28) is prepared by attaching a copper foil 392 (metal foil) to be the back-side conductor layer 351 and the back-side island-like layer 241 to 333, and this is used as an intermediate product of the core substrate 331. To do. *

Further, in the conductor layer forming step after the accommodation hole forming step, the main surface side conductor layer 341 is formed on the core main surface 332 of the outer peripheral portion 337 and the back surface side conductor layer 351 is formed on the core back surface 333 of the outer peripheral portion 337. To do. Further, in the island layer forming step after the accommodation hole forming step, a plurality of main surface side island layers 231 are formed on the core main surface 332 of the bridge portion 336, and a plurality of back surfaces are formed on the core back surface 333 of the bridge portion 336. A side island layer 241 is formed. Specifically, the same plating layers 381, 382, and 383 as the plating layers 162, 163, and 164 of the first embodiment are etched, and the plating layers 381 to 383 are patterned by, for example, a subtractive method. *

More specifically, in the conductor layer forming step and the island layer forming step, first, a resist forming step is performed, on the surface of the plating layer 383 on the core main surface 332 side, and on the surface of the plating layer 383 on the core back surface 333 side. On the other hand, a dry film is laminated respectively. Next, by performing exposure and development on each dry film, a plating resist 386 having an opening 384 and a covering portion 385 is formed (see FIGS. 29 and 30). In addition, from the opening part 384 of the plating resist 386 formed on the core main surface 332 side, the plating layers formed on the core main surface 332 of the respective housing hole parts 334, 335, the bridge part 336, and the outer peripheral part 337. A part of 383 is exposed. Further, the covering portion 385 of the plating resist 386 formed on the core main surface 332 side covers a portion that becomes the main surface side island layer 231 on the core main surface 332 of the bridge portion 336. On the other hand, from the opening 384 of the plating resist 386 formed on the core back surface 333 side, each of the receiving hole portions 334 and 335, the bridge portion 336, and the plating layer 383 formed on the core back surface 333 of the outer peripheral portion 337. Some are exposed. Further, the covering portion 385 of the plating resist 386 formed on the core back surface 333 side covers a portion to be the back surface island layer 241 on the core back surface 333 of the bridge portion 336. *

Next, a metal foil removing process is performed, and the copper foil 392 and the plating layers 381 to 383 are etched by etching the portions of the plating layers 381 to 383 that are exposed from the openings 384 and are on the outer peripheral side of the covering portion 385. Are partially removed (see FIGS. 31 and 32). Thereafter, a resist removing step is performed, and the plating resist 386 is peeled (removed). As a result, the main surface side conductor layer 341 and the main surface side island layer 231 are formed on the core main surface 332, and the back surface side conductor layer 351 and the back surface side island layer 241 are formed on the core back surface 333. (See FIGS. 31 and 32). At this time, a part of the plating layer 383 on the core main surface 332 side becomes a lid plating layer covering the end surface on the core main surface 332 side of the through-hole conductor 387, and a part of the plating layer 383 on the core back surface 333 side is a through-hole. This is a lid plating layer that covers the end surface of the hole conductor 387 on the core back surface 333 side. *

Further, in the housing step after the conductor layer forming step, the island layer forming step, and the component preparation step, first, the opening on the core back surface 333 side of each housing hole 334, 335 is sealed with a peelable adhesive tape 388 (FIG. 33). At this time, the adhesive surface of the adhesive tape 388 is in close contact with the back-side conductor layer 351 formed on the core back surface 333 of the outer peripheral portion 337 and the back-side island layer 241 formed on the core back surface 333 of the bridge portion 336. It will be in the state. The adhesive tape 388 is supported by a support table (not shown). Next, using a mounting device (manufactured by Yamaha Motor Co., Ltd.), the core main surface 332 and the capacitor main surface 373 (component main surface) are directed to the same side, and the core back surface 333 and the capacitor back surface 374 (component back surface) ) Are directed to the same side, and the chip capacitors 370 and 371 are accommodated in the receiving holes 334 and 335, respectively (see FIGS. 34 and 35). At this time, the chip capacitors 370 and 371 are temporarily fixed by attaching the capacitor back surface 374 side to the adhesive surface of the adhesive tape 388. *

In the subsequent filling step, a dispenser device is provided in the gap between the inner wall surface 338 of the accommodation hole 334 and the capacitor side surface 372 of the chip capacitor 370 and the gap between the inner wall surface 338 of the accommodation hole 335 and the capacitor side surface 372 of the chip capacitor 371. (Asymtek Co., Ltd.) is used to fill a resin filler 367 (manufactured by NAMICS Co., Ltd.) made of thermosetting resin (see FIGS. 25 and 36). At this time, the gap between the main surface side conductor layer 341 and the main surface side island layer 231 is partially filled with the resin filler 367, and the gap S2 between the back surface side conductor layer 351 and the back surface side island layer 241. Part of the resin filler 367 is filled (see FIGS. 25 and 27). Each main surface side island-like layer 231 extends along the direction in which the resin filler 367 flows into the gap between the main surface side conductor layer 341 and the main surface side island-like layer 231 in the filling step. The material 367 smoothly flows into the gap between the main surface side conductor layer 341 and the main surface side island layer 231. Further, each back-side island layer 241 extends along the direction in which the resin filler 367 flows into the gap S2 between the back-side conductor layer 351 and the back-side island layer 241 in the filling step, and thus the resin filler 367. Smoothly flows into the gap S2 between the back-side conductor layer 351 and the back-side island layer 241. *

In the fixing step after the filling step, the chip capacitors 370 and 371 are fixed in the accommodation holes 334 and 335 by curing the resin filler 367. Then, after the fixing step, the adhesive tape 388 is peeled (removed). Thereafter, the surfaces of the conductor layers 341 and 351, the surfaces of the island layers 231 and 241, the surface 368 of the resin filler 367 filled in the gap between the main surface side conductor layer 341 and the main surface side island layer 231, and The surface 369 of the resin filler 367 filled in the gap S2 between the back side conductor layer 351 and the back side island layer 241 is roughened. *

In the wiring laminated portion forming step after the fixing step, first, on the surface 368 of the resin filler 367 filled in the gap between the main surface side conductor layer 341 and the main surface side island layer 231 and on the capacitor main surface 373. An interlayer insulating layer 363 is formed by applying a thermosetting epoxy resin (see FIG. 37). Further, by applying a thermosetting epoxy resin on the surface 369 of the resin filler 367 and the capacitor back surface 374 filled in the gap S2 between the back-side conductor layer 351 and the back-side island-like layer 241, the interlayer An insulating layer 364 is formed (see FIG. 37). Thereafter, by performing a process of forming interlayer insulating layers 365 and 366 on the interlayer insulating layers 363 and 364, the main surface side buildup layer 361 is formed on the core main surface 332, and the core back surface 333 is formed. A backside build-up layer 362 is formed thereon, and a multi-piece wiring board is obtained in which a plurality of product regions to be the wiring board 330 are arranged vertically and horizontally along the plane direction. Furthermore, when the multi-piece wiring board is divided, a large number of wiring boards 330 which are individual products can be obtained simultaneously. *

Therefore, according to the present embodiment, the following effects can be obtained in addition to the effects of the first embodiment. *

(4) For example, as shown in FIGS. 45 to 47, when the back side conductor layer 206 is formed on the entire core back side 202 of the core substrate 204, the gap between the back side conductor layer 206 and the adhesive tape 210 is increased. The resin filler 211 may sink and cause a problem in the adhesion between the back-side buildup layer and the back-side conductor layer 206 formed on the core back surface 202 side. Therefore, in the wiring board 330 of this embodiment, the back surface side conductor layer 351 is formed so as to surround the bridge portion 336, and the back surface side island-like layer 241 independent of the back surface side conductor layer 351 is formed in the bridge portion 336. ing. In this case, a part of the resin filler 367 filled in the gap between the inner wall surface 338 of the accommodation hole portions 334 and 335 and the capacitor side surface 372 of the chip capacitors 370 and 371 is a gap between the adjacent backside island layers 241. S1 (see FIGS. 25 and 27) and the gap S2 (see FIGS. 25 and 27) between the back-side conductor layer 351 and the back-side island layer 241 (see FIG. 25 and FIG. 27) flow, so that the above-described sinking occurs. It becomes difficult to do. Therefore, since the core substrate 331 and the back-side buildup layer 362 come into close contact with each other, the wiring substrate 330 with excellent reliability can be obtained. In other words, if a part of the resin filler 367 flows into the gap, a wiring pattern (island layer) can be installed in the bridge portion 336, so that the degree of freedom of wiring increases.

(5) In the accommodation step and the filling step of the present embodiment, the opening on the core rear surface 333 side of the accommodation hole 334 is closed with the adhesive tape 388, and the back side conductor layer 351 and the bridge portion formed on the core back surface 333 of the outer peripheral portion 337 This is performed in a state where the adhesive surface is in close contact with the back-side island layer 241 formed on the core back surface 333 of 336. Therefore, in the housing process, the capacitor back surface 374 side of the chip capacitors 370 and 371 is affixed to the adhesive surface of the adhesive tape 388 and temporarily fixed, and the capacitor back surface side ends of the electrodes 375 and 376 included in the respective chip capacitors 370 and 371 are provided. The surfaces of the portions 377 and 378 (see FIG. 25) are flush with the surface of the back-side conductor layer 351 formed on the core back surface 333. In addition, since the adhesive tape 388 is supported by the back-side island layer 241, the adhesive tape 388 is prevented from being bent, and thus the chip capacitors 370 and 371 attached to the adhesive surface of the adhesive tape 388 are prevented. A decrease in position accuracy is prevented. Therefore, the surface 360 of the back-side buildup layer 362 that is in contact with the capacitor back-side 374 side and the surface of the back-side conductor layer 351 can be flattened, so that the dimensional accuracy of the wiring board 330 is improved.

(6) In this embodiment, since the wiring pattern (back surface side island layer 241) is formed on the core back surface 333 of the bridge portion 336, the wiring pattern (back surface side conductor layer 351, back surface side island layer 241) and A contact area with the interlayer insulating layer 364 constituting the back-side buildup layer 362 is ensured, and the adhesion strength between them is increased. As a result, the core substrate 331 and the back surface side build-up layer 362 are surely adhered to each other. Moreover, in this embodiment, since the wiring pattern (main surface side island layer 231) is also formed on the core main surface 332 of the bridge portion 336, the wiring pattern (main surface side conductor layer 341, main surface side island shape) The contact area between the layer 231) and the interlayer insulating layer 363 constituting the main surface side buildup layer 361 is ensured, and the adhesion strength between them is increased. As a result, the core substrate 331 and the main surface side build-up layer 361 come into close contact with each other. Therefore, the occurrence of delamination and the like can be prevented, so that the wiring board 330 with even higher reliability can be obtained. Further, the amount of the resin filler 367 that flows into the gap between the surface of the bridge portion 336 and the build-up layers 361 and 362 is equivalent to the amount of the wiring pattern provided on the surface of the bridge portion 336 (core main surface 332 and core back surface 333). Since it can reduce, the manufacturing cost of the wiring board 330 can be held down. *

In addition, you may change the said 2nd Embodiment as follows. *

-The accommodation hole parts 334 and 335 of the said 2nd Embodiment were holes of a substantially elliptical shape in planar view. However, as shown in the core substrate 291 of FIG. 38, the receiving hole portions 292 and 293 may be holes having a substantially square shape in plan view in which the four corners have a curved shape in plan view. *

In the second embodiment, the back-side island layer 241 has an elliptical shape in plan view. However, as shown in the core substrates 251 and 252 of FIGS. 39 and 40, the island layer may be, for example, a back side island layer 253 having a rectangular shape in plan view, or a back surface having a circular shape in plan view. The side island layer 254 may be used. 41, the core back surface 263 of the bridge portion 262 has a plurality of types of island-like layers (here, the back-side island-like layer 264 having a rectangular shape in plan view and a cross-like shape in plan view). The back-side island-like layer 265) may be formed. *

42, as shown in the core substrate 271 of FIG. 42, a through-hole conductor 275 that penetrates the core main surface 273 and the core back surface 274 may be formed in the bridge portion 272. In this case, the main-surface-side island layer 276 serves as a pad that is electrically connected to the end of the through-hole conductor 275 on the core main surface 273 side, and the back-surface-side island-shaped layer 277 is the core back surface 274 of the through-hole conductor 275. The pad is electrically connected to the side end. In this way, an electrical circuit can be formed in the bridge portion 272, so that the functionality of the wiring board can be enhanced. *

43. As shown in the core substrate 281 of FIG. 43, in the core back surface 283 of the bridge portion 282, the back surface side island-like layer 284 is not formed, and an opening is opened in the core back surface 283 and communication between adjacent accommodation holes is performed. A concave portion 285 may be provided. In this way, the resin filler 286 flows into the recess 285 in addition to the gap between the adjacent backside island layers 284 and the gap between the backside conductor layer and the backside island layer 284 ( Therefore, the above-described diving is more unlikely to occur. *

In the second embodiment, the back-side island layer 241 is formed on the core back surface 333 of the bridge portion 336, and the main surface-side island layer 231 is formed on the core main surface 332 of the bridge portion 336. However, the main surface side island-like layer 231 may not be formed (see FIG. 44). In this case, the main surface side conductor layer 341 may be formed on the core main surface 332 of the bridge portion 336 in addition to the core main surface 332 of the outer peripheral portion 337. *

In the second embodiment, as in the first embodiment, the chip capacitors 370 and 371 are accommodated in the two accommodation holes 334 and 335, respectively. It is possible to change to a form in which one or more accommodation holes are provided and the chip capacitors are accommodated in the respective accommodation holes (see FIG. 41). *

-In the said 2nd Embodiment, the chip capacitors 370 and 371 similar to the said 1st Embodiment were used as components accommodated in the accommodation holes 334 and 335. FIG. However, also in the second embodiment, the via array type ceramic capacitor 301 shown in FIG. 22 can be used as a component accommodated in the accommodation holes 334 and 335. *

In the second embodiment, the same configuration as in the first embodiment, that is, the gap between the inner wall surface 338 of the receiving hole portions 334 and 335 and the capacitor side surface 372 of the chip capacitors 370 and 371 is formed by the resin filler 367. Had a buried configuration. However, as shown in the wiring board 400 of FIG. 44, the gap between the inner wall surface 403 of the accommodation holes 401 and 402 and the capacitor side surface 406 (component side surface) of the chip capacitors 404 and 405 (component) is formed on the main surface side build. The interlayer insulating layer 408 constituting the up layer 407 may be partly filled. That is, the interlayer insulating layer 408 may have a function as a resin filler. *

In the second embodiment, similar to the first embodiment, two chip capacitors 370 and 371 are electrically connected to one IC chip 409. However, two IC chips may be mounted on the IC chip mounting area 410 set in the main surface side buildup layer 361, and the two chip capacitors 370 and 371 may be electrically connected to each IC chip. *

Next, the technical ideas grasped by the embodiment described above are listed below.

(1) In the above-mentioned means 1, the back-side conductor layer is formed on the core back surface of the outer peripheral portion, but is not formed on the core back surface of the bridge portion. *

(2) In the above means 3, the back surface side conductor layer has one through hole that exposes the core back surface side opening of the plurality of receiving holes and exposes the core back surface of the bridge portion, Producing a wiring board with a built-in component, comprising a projecting portion that projects from the opening end of a through-hole toward the bridge portion, and the distal end portion of the projecting portion has a curved shape in plan view. Method. *

(3) Manufacturing of a component built-in wiring board characterized in that, in the above means 3, a fixing step of fixing the component by curing the resin filler is performed after the filling step and before the wiring laminated portion forming step. Method. *

(4) The component built-in wiring board according to the above means 2, wherein the tip surface of the island layer is in contact with the wiring laminated portion. *

(5) Manufacturing of a component built-in wiring board characterized in that, in the above means 4, a fixing step of fixing the component by curing the resin filler is performed after the filling step and before the wiring laminated portion forming step. Method.

10, 320, 330, 400 .. component built-in wiring board (wiring board)

11,221,251,252,261,271,281,291,331 ... core substrate

12, 273, 332 ... Core main surface

13,224,263,274,283,333 ... back of the core

32, 362 ... Back side build-up layer as a wiring laminate

34, 36, 364, 366 ... interlayer insulating layer

42 ... Conductor layer

61,227,262,272,282,336 ... bridge part

62,337 ... outer periphery

81, 225, 351 ... back side conductor layer

82, 226 ... through hole

83,228 ... overhang

90, 91, 222, 223, 292, 293, 321, 322, 334, 335, 401, 402 ... receiving hole

92, 323, 338, 403 ... inner wall surface of receiving hole

93,286,367 ... Resin filler

95,369 ... surface of resin filler

100, 101, 324, 325, 370, 371, 404, 405 ... chip capacitors as components

102, 305, 373: Capacitor main surface as a component main surface

103, 306, 374 ... Capacitor back surface as component back surface

104, 326, 372, 406 ... Capacitor side face as part side face

150, 390 ... Copper-clad laminate as a laminate

152,392 ... Copper foil as metal foil

170, 386 ... Plating resist

171, 384 ... opening

181,388 ... Adhesive tape

241, 253, 254, 264, 265, 277, 284 ... back side island layer as island layer

275,387 ... through-hole conductor

285 ... recess

301: Ceramic capacitor as a part

328, 408 ... Interlayer insulating layer as a resin filler

385 ... covering portion

C1, C2 ... Center of receiving hole

L1 ... Virtual line

S2: Clearance between the back side conductor layer and the island layer

T1 Thickness of the bridge part

T3: Total thickness of the outer peripheral portion and the back side conductor layer

Claims (16)

A core substrate having a core main surface and a core back surface, and having a plurality of receiving holes opened on both the core main surface side and the core back surface side;

A plurality of components each having a component main surface, a component back surface, and a component side surface, each housed in the plurality of housing holes in a state where the core main surface and the component main surface are directed to the same side;

A resin filler filled in a gap between an inner wall surface of the accommodation hole formed in the core substrate and the side surface of the component;

A wiring laminated portion having a structure in which an interlayer insulating layer and a conductor layer are laminated on the core back surface and the component back surface;

A component built-in wiring board comprising:

The core substrate has a bridge portion positioned between the adjacent accommodation hole portions, and an outer peripheral portion in which a plurality of the accommodation hole portions and a back surface side conductor layer surrounding the bridge portion are formed on the core back surface,

The thickness of the bridge portion is thinner than the total thickness of the outer peripheral portion and the back side conductor layer,

A gap between the surface of the bridge portion and the wiring laminated portion is filled with a part of the resin filler.

A wiring board with a built-in component. The back side conductor layer is

And having one through-hole exposing the core back side of the bridge portion and exposing the core back side opening of the plurality of receiving holes,

A projecting portion that projects from the opening end of the through hole toward the bridge portion;

The tip of the overhang has a curved shape in plan view

The component built-in wiring board according to claim 1. A core substrate having a core main surface and a core back surface, and having a plurality of receiving holes opened on both the core main surface side and the core back surface side;

A plurality of components each having a component main surface, a component back surface, and a component side surface, each housed in the plurality of housing holes in a state where the core main surface and the component main surface are directed to the same side;

A resin filler filled in a gap between an inner wall surface of the accommodation hole formed in the core substrate and the side surface of the component;

A wiring laminated portion having a structure in which an interlayer insulating layer and a conductor layer are laminated on the core back surface and the component back surface;

A component built-in wiring board comprising:

The core substrate has a bridge portion positioned between the adjacent accommodation hole portions, and an outer peripheral portion in which a plurality of the accommodation hole portions and a back surface side conductor layer surrounding the bridge portion are formed on the core back surface,

On the back surface of the core of the bridge portion, an island-like layer that is independent from the back surface side conductor layer and protrudes at the same height as the surface of the back surface side conductor layer is formed,

A gap between the back conductor layer and the island layer is filled with a part of the resin filler.

A wiring board with a built-in component. 4. The component built-in wiring board according to claim 3, wherein a plurality of the island layers are formed on the back surface of the core of the bridge portion, and a region between the adjacent island layers is formed in a slit shape. * 5. The component built-in wiring board according to claim 3, wherein the plurality of island-shaped layers are arranged in a direction orthogonal to a virtual line connecting the centers of the adjacent accommodation hole portions. * The component built-in wiring board according to claim 5, wherein the plurality of island layers have an elongated shape extending in parallel with the virtual line. * The component built-in wiring board according to claim 3, wherein the island layer has a curved shape in plan view. * In the bridge portion, a through-hole conductor that penetrates the core main surface and the core back surface is formed,

The island layer is a pad that is electrically connected to an end of the through hole conductor on the core back surface side.

The component built-in wiring board according to claim 3, wherein the wiring board has a built-in component. The concave portion that opens in the back surface of the core and communicates between the adjacent receiving hole portions is provided in a non-formation region where the island layer does not exist on the back surface of the core of the bridge portion. The component built-in wiring board according to any one of 3 to 8. * It is a manufacturing method of the component built-in wiring board according to claim 1 or 2,

A core substrate preparation step of preparing the core substrate;

After the core substrate preparation step, by forming a plurality of the receiving hole portions, a receiving hole portion forming step for obtaining the core substrate having the outer peripheral portion and the bridge portion;

By forming the back surface side conductor layer on the core back surface of the outer peripheral portion after the housing hole forming step, the thickness of the bridge portion is more than the total thickness of the outer peripheral portion and the back surface side conductor layer. A conductor layer forming step to reduce the thickness,

A component preparation step of preparing the plurality of components;

After the conductor layer forming step and the component preparation step, a housing step of housing the component in each of the plurality of housing holes,

After the housing step, filling the resin filler into the gap between the inner wall surface of the housing hole and the side of the component, and filling the core back surface of the bridge portion with a part of the resin filler,

After the filling step, a wiring laminated portion forming step of forming the wiring laminated portion on the surface of the resin filler covering the core back surface of the bridge portion and on the component back surface;

The manufacturing method of the component built-in wiring board characterized by including these. In the core substrate preparation step, prepare a laminated plate in which a metal foil to be the back side conductor layer is pasted on the back side of the core,

In the conductor layer forming step,

A resist forming step of forming a plating resist having a single opening on the surface of the metal foil to expose a plurality of the receiving hole portions and a portion of the bridge portion on the core back surface;

A metal foil removing step of partially removing the metal foil by etching an exposed portion from the opening in the metal foil;

After the metal foil removing step, a resist removing step for removing the plating resist;

The method of manufacturing a component built-in wiring board according to claim 10, wherein: In the housing step and the filling step, the core back surface side openings of the plurality of housing holes are closed with an adhesive tape having an adhesive surface, and the adhesive layer is formed on the back surface conductor layer formed on the core back surface of the outer peripheral portion. While closely contacting the surface, the adhesive surface is separated from the back surface of the core of the bridge portion,

The adhesive tape is removed after the filling step

12. The method of manufacturing a component built-in wiring board according to claim 10 or 11, wherein: A method of manufacturing a component built-in wiring board according to any one of claims 3 to 9,

A core substrate preparation step of preparing the core substrate;

After the core substrate preparation step, by forming a plurality of the receiving hole portions, a receiving hole portion forming step for obtaining the core substrate having the outer peripheral portion and the bridge portion;

After the housing hole forming step, a conductor layer forming step of forming the back side conductor layer on the core back surface of the outer peripheral portion;

After the accommodation hole forming step, an island-shaped layer forming step for forming the island-shaped layer on the back surface of the core of the bridge portion;

A component preparation step of preparing the plurality of components;

After completion of the conductor layer forming step, the island layer forming step, and the component preparation step, the accommodating step of accommodating the component in each of the plurality of accommodating holes,

After the accommodation step, the resin filler is filled in the gap between the inner wall surface of the accommodation hole and the side surface of the component, and a part of the resin filler is filled in the gap between the back-side conductor layer and the island layer. Filling process for filling,

After the filling step, a wiring laminated portion forming step of forming the wiring laminated portion on the surface of the resin filler filled in the gap between the back-side conductor layer and the island-like layer and on the component back surface;

The manufacturing method of the component built-in wiring board characterized by including these. In the core substrate preparation step, prepare a laminated plate in which a metal foil to be the back side conductor layer and the island layer is attached to the back side of the core,

In the conductor layer forming step and the island layer forming step,

A plating resist having a plurality of opening portions for exposing the receiving hole portions and the bridge portion, and a covering portion for covering a portion to be the island-like layer on the core back surface of the bridge portion, the surface of the metal foil A resist forming step to be formed on the substrate;

A metal foil removing step of partially removing the metal foil by etching a portion which is an exposed portion from the opening in the metal foil and which is an outer peripheral side of the covering portion;

After the metal foil removing step, a resist removing step for removing the plating resist;

The method for manufacturing a component built-in wiring board according to claim 13, wherein: In the housing step and the filling step, the core back surface side openings of the housing holes are closed with an adhesive tape having an adhesive surface, and the adhesive surface is brought into close contact with the back surface conductor layer and the island layer. Done in state

The adhesive tape is removed after the filling step

15. The method of manufacturing a component built-in wiring board according to claim 13 or 14. In the island layer formation step, a plurality of the island layers are formed on the core back surface of the bridge portion,

The plurality of island-like layers extend along a direction in which the resin filler flows into a gap between the back-side conductor layer and the island-like layer in the filling step.

The method for manufacturing a component built-in wiring board according to any one of claims 13 to 15.

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