WO2015051679A1 - 一种用于多线切割的金属丝及其制造装置 - Google Patents
一种用于多线切割的金属丝及其制造装置 Download PDFInfo
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- WO2015051679A1 WO2015051679A1 PCT/CN2014/085268 CN2014085268W WO2015051679A1 WO 2015051679 A1 WO2015051679 A1 WO 2015051679A1 CN 2014085268 W CN2014085268 W CN 2014085268W WO 2015051679 A1 WO2015051679 A1 WO 2015051679A1
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/04—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools
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- This invention relates to a wire for multi-wire cutting, and more particularly to a wire for multi-wire cutting of hard materials such as crystalline silicon, silicon carbide, sapphire, crystal, etc., and a manufacturing apparatus therefor. Background technique
- the multi-wire cutting uses a wire as a carrier, and the wire carries a super-hard abrasive in a high-speed motion, and the high-hard material (such as crystalline silicon, silicon carbide, sapphire, crystal, etc.) is subjected to roll-cut grinding by the abrasive to realize cutting.
- This method has become the main production mode with the advantages of high cutting efficiency, small cutting kerf, less material loss, high cutting precision and good surface quality.
- the wire as the carrier carrying the abrasive, the stability during the cutting process and the ability to carry the abrasive play an extremely important role in cutting efficiency and product quality.
- the currently widely used wire is a circular structure with a smooth surface (straight wire), which has the outstanding advantage that the wire can uniformly carry the abrasive in the direction around which it is cut and fed, thereby providing a stable cutting surface quality.
- the surface area of the wire can be increased by increasing the diameter of the wire, thereby enhancing the ability of the wire to carry the abrasive to improve the cutting efficiency, at the expense of increasing the width of the kerf, resulting in material loss during the cutting process. Increase.
- the improvement of cutting efficiency can also be achieved by increasing the average particle size of the abrasive and the sharpness of the edges.
- the first is to try to make rough wire Increases the abrasive carrying capacity of the wire by increasing the roughness of the wire surface.
- JP2007 196312 proposes to spray an electrolyte onto the surface of a wire. The method causes the surface of the wire to have irregularities;
- W0 9/12670 proposes the concept of a micro-cavity wire, a soft surface wire, and a wire whose cross-section changes along the length;
- KR 2001 002689 describes a circular saw The wire forms a cavity on the circular saw wire by embossing.
- JP 2007 044841 proposes a substantially circular saw wire having a flat surface extending helically around the length of the saw wire, CN102380915A being essentially a natural extension of the above concept; US 2860862 is proposed to be pre-flattened
- the shape of the saw wire applies two helical deformations: first twisting the inner axis of the flat saw wire with a short lay length, and then twisting the saw wire with a longer lay length in a spiral shape.
- FR 750081 also describes spiral sawing wires with a circular or polygonal cross section.
- CN102205563A and CN102765141A are basically all natural extensions of the aforementioned ideas.
- JP 4057666 describes a metal saw wire, which is also twisted to make the straight wire into a spiral shape, and then stretched by a die. So far, the above efforts have not seen successful industrial implementation and application in the field of multi-wire cutting. The core reason is that the spiraling of the wire inevitably requires the twisting of the wire, thereby giving the metal ribbon a high twist. Internal stress, and the longer the wire, the higher the torsional internal stress, which leads to a strong self-winding tendency of the finished wire, which cannot be practically applied to multi-line cutting, which is prominent in the difficulty of completing a uniform long-distance winding take-up line. It is impossible or difficult to wire on the cutting line.
- JP 2004 276207 describes a single-wire or stranded wire having a spiral shape, and it is described that the single wire or stranded wire is guided through a pair of cogwheels to form a 'double-folded fold' in a single plane.
- the saw wire is first bent in the first direction, then the second bend is made in the second direction and opposite to the first direction (reverse bend), and then the strand is twisted and twisted
- the zigzag folds of length are superimposed on the long wave spiral.
- a significant drawback of this type of attempt is that the stranded structure results in a significant increase in the outer diameter of the utility envelope of the saw wire, resulting in unacceptable kerf widening and corresponding additional material loss.
- a third type of attempt has achieved a certain application success. It is a monofilament type metal saw wire disclosed by Ansel Mittal through Chinese patent CN100475398C, which performs wire on two or more planes.
- the bending thereby enhancing the ability of the wire to carry the abrasive to a certain extent, can achieve good results in some specific application environments.
- the disadvantage is that the bending of the saw wire is dominated by one plane, and the bending of other planes is gradually turned to the dominant plane during the cutting process, and finally a saw wire which is deformed substantially only in one plane is formed, thereby resulting in good cutting.
- the rate fluctuates.
- the bending structure due to the limited structural retention of the saw wire, in the case of a long cutting path, the bending structure has substantially or largely disappeared when the cutting line reaches the cutting end, resulting in a lower cutting yield than the cutting starting end. The yield has dropped significantly.
- Bekaert proposed a product concept equivalent to the second type (“spiral wire”) and the third type (“structural wire”) through CN102528940A.
- the basic principle is to be single.
- the wire is bent on the plane by means of a bite gear (or other deformation device), by twisting the wire (the plane around the axis of the wire is rotated to deform the device, or the plane of the deformation device is kept stationary but the same Rotate the receiving and unwinding shaft) to form a spiral wire, and then untwist the wire (rotate the plane of the deformation device opposite to the twisting direction, or keep the plane of the deforming device stationary but rotate in the same direction , release shaft) is partially or completely released due to twisting to the twisted wire of the wire Stress.
- the technical problem to be solved by the present invention is: to solve the common defects common to the conventional linear wire and the conventional structural wire. The closer the cutting tail is, the worse the ability of the wire to carry the abrasive, and the more serious the cutting yield is lowered. .
- the technical solution adopted by the present invention to solve the technical problem thereof is: a wire for multi-wire cutting, a) a plurality of protrusions are regularly distributed on the outer surface, and the apex of the protrusion is the highest point of the outer surface of the wire ;
- the apex of the protrusion is in contact with a circular or approximately circular inner surface of the virtual pipe, and the inner diameter of the virtual pipe is uniformly or uniformly changed;
- the inner diameter of the dummy pipe is less than 1.05 times the diameter of the wire bus bar, and the wire bus bar refers to a raw material for preparing the wire for multi-wire cutting;
- the surface hardness of the wire is regularly distributed, and both reach a local maximum at the apex of the wire protrusion or near the apex of the protrusion.
- the abrasive carrying capacity is enhanced, which is beneficial to improve the cutting efficiency and the cutting yield.
- the surface hardness is unevenly distributed, and the apex of the protrusion or the vicinity thereof is the highest in hardness and the wear resistance is the most. Strongly, the uneven distribution of the above outer diameter does not disappear because the metal wire wears along with the cutting process, thereby facilitating the maintenance of the yield uniformity from the cutting start end to the cutting end.
- the inner diameter of the dummy pipe is smaller than the diameter of the wire bus bar.
- the diameter of the wire for the multi-wire cutting is between 0.08-0. 60mm.
- the wire of the present invention is particularly suitable for multi-wire precision cutting which is sensitive to kerf loss.
- the diameter of the wire is generally preferably between 0.09 and 0.40 mm to minimize kerf loss.
- the axis between the apex of adjacent wire projections The distance is not more than 500 times the inner diameter of the virtual pipe.
- the surface of the wire is coated with a coating mainly composed of a resin material. Due to the heterogeneous nature of the wire, the bond to the wire is much faster than the straight wire.
- an inorganic filler is added to the resin material of the coating, and the inorganic filler includes diamond, silicon carbide, boron nitride, aluminum oxide, zirconium oxide, silicon nitride, carbonization.
- the inorganic filler includes diamond, silicon carbide, boron nitride, aluminum oxide, zirconium oxide, silicon nitride, carbonization.
- One or more of tungsten and graphite is significantly lower than that of the straight wire.
- the present invention relates to a wire for multi-wire cutting that can be used as an optimized bus for a fixed abrasive cutting line.
- the surface of the wire is compounded with a fixed cutting abrasive
- the fixed cutting abrasive comprises one or more of diamond, silicon carbide, boron nitride, aluminum oxide, zirconium oxide, silicon nitride or tungsten carbide.
- Hard material Fixed cutting abrasives have an average particle diameter between 5 ⁇ m and 100 ⁇ m.
- the above-mentioned apparatus for manufacturing a wire for multi-wire cutting comprising at least a wire reel, a pre-deformation mechanism for plastically deforming the wire bus bar, and a deformation strengthening mechanism for deforming the pre-deformed wire,
- the deformation strengthening mechanism is a cylindrical deformation drawing die, the cylindrical deformation
- the drawing die comprises at least a deformed tapered inlet and a cylindrical deformed sizing belt, and the inner diameter of the deformed tapered inlet is gradually reduced from the outside to the inside, and the inner diameter of the deformed sizing belt is consistent with the minimum inner diameter of the deformed tapered inlet, and the strain is fixed.
- the inner diameter of the wire is less than 1. 05 times the diameter of the wire.
- the pre-deformation mechanism includes an initial pre-deformation mechanism that deforms the wire busbar in one or more planes.
- the pre-deformation mechanism further includes a heterogeneous molding mechanism that plastically deforms the wire after the initial pre-deformation mechanism in the advancing direction of the wire and the direction of advancing.
- pre-deformation passing the straight wire busbar through the reel, and then entering the pre-deformation mechanism to perform pre-deformation processing of the wire at least once to process the pre-deformed wire containing plastic deformation;
- deformation strengthening pulling the driving wheel to pull the pre-deformed wire through the deformation strengthening mechanism, forming a wire with the invention by deforming the sizing belt;
- the wire is wound up through the wire tensioning system and the wire-receiving device.
- the invention has the beneficial effects that the abrasive carrying capacity is enhanced due to the uneven distribution of the outer diameter of the wire, which is advantageous for improving the cutting efficiency and the cutting yield, and at the same time, due to the uneven distribution of the surface hardness, and the apex of the protrusion or the vicinity thereof The highest hardness and the strongest wear resistance, the uneven distribution of the above outer diameter will not disappear because the metal wire wears along with the cutting process, thereby facilitating the maintenance of the yield consistency from the cutting start end to the cutting end.
- Figure 1 is a schematic view showing the structure of a wire bus bar before pre-deformation.
- Figure la is an axial view of the wire axis X of Figure 1.
- Figure lb is an axial view of the wire axis Y of Figure 1.
- Figure lc is an axial view of the wire axis Z of Figure 1, with black circles indicating the axis of the wire itself.
- Fig. 2 is a perspective view showing the structure of a pre-deformed wire in the first embodiment of the present invention.
- Figure 2a is an axial view of the wire axis X of Figure 2.
- Figure 2b is an axial view of the wire axis Y of Figure 2.
- Fig. 2c is an axial view of the axis Z of the wire of Fig. 2, the middle line of the figure being formed by projecting the axis of the wire itself.
- Fig. 3 is a perspective view showing the structure of the pre-deformed wire in the embodiment 2 of the present invention.
- Figure 3a is an axial view of the wire axis X of Figure 3.
- Figure 3b is an axial view of the wire axis Y of Figure 3.
- Figure 3c is an axial view of the wire axis Z of Figure 3, in which the center-like twisted line pattern is formed by the projection of the wire itself.
- FIG. 4 is a structural schematic view of the metal ribbon of FIG. 3 having an axial projection surface and a normal plane.
- Fig. 5 is a view showing the configuration of a wire manufacturing apparatus in the first embodiment of the present invention.
- Fig. 6 is a view showing the configuration of a wire manufacturing apparatus in a second embodiment of the present invention.
- Figure 7 is a schematic view showing the structure of a wire manufacturing apparatus in Embodiment 3 of the present invention.
- Fig. 8 is a view showing the structure of a cylindrical forming drawing die in the apparatus for producing a wire according to the present invention.
- Fig. 9 is a view showing the structure of a cylindrical deformation drawing die in the apparatus for manufacturing a wire according to the present invention.
- Figure 10 is a schematic view showing one of the structures of the finally prepared wire of the present invention.
- a wire for multi-wire cutting of the present invention is shown in Figure 10:
- the outer surface is regularly distributed with a plurality of protrusions 100, the apex of the protrusions 100 being the highest point of the outer surface of the wire;
- the apex of the protrusion 100 is in contact with a circular or approximately circular inner surface of the virtual pipe, and the inner diameter of the virtual pipe is uniformly or uniformly changed;
- the inner diameter of the dummy pipe is less than 1.05 times the diameter of the wire bus bar, and the wire bus bar refers to a raw material for preparing the wire lb for multi-wire cutting;
- the surface hardness of the wire is regularly distributed, and both reach a local maximum at the apex of the wire protrusion 100 or near the apex of the protrusion 100.
- the axial distance between the apexes of adjacent wire projections 100 is no more than 500 times the inner diameter of the virtual pipe.
- the present invention relates to a wire for multi-wire cutting that can be used as an optimized bus for a fixed abrasive cutting line.
- the surface of the wire is compounded with a fixed cutting abrasive
- the fixed cutting abrasive comprises one or more of diamond, silicon carbide, boron nitride, aluminum oxide, zirconium oxide, silicon nitride or tungsten carbide.
- Hard material Fixed cutting abrasives have an average particle diameter between 5 ⁇ m and 100 ⁇ m.
- the apparatus for manufacturing a wire for multi-wire cutting includes at least a reel 2, a pre-deformation mechanism 3 that plastically deforms a wire bus bar, and a deformation strengthening mechanism 4 that deforms the pre-deformed wire.
- the deformation strengthening mechanism 4 is a cylindrical deformation drawing die,
- the cylindrical deformation drawing die comprises at least a deformed tapered inlet 41 and a cylindrical deformed sizing belt 42.
- the inner diameter of the deformed tapered inlet 41 is gradually reduced from the outside to the inside, and the inner diameter of the deformed sizing belt 42 and the deformation cone are formed. 5 ⁇
- the inner diameter of the diameter of the wire is less than 1. 05 times.
- the method for producing a wire for multi-wire cutting of the present invention comprises the following steps:
- pre-deformation passing the straight wire busbar through the reel 2, and then entering the pre-deformation mechanism 3 to perform pre-deformation processing of the wire at least once, and processing a pre-deformed wire containing plastic deformation;
- deformation strengthening pulling the driving wheel 72 pulls the pre-deformed wire through the deformation strengthening mechanism 4, and forming the wire with the invention by deforming the sizing belt 42;
- the deformation-enhancing deformation strengthening mechanism 4 is a drawing driving wheel 72 for pulling the wire through the deformation strengthening mechanism to provide sufficient drawing tension, a wire-retracting constant tension system 5, and a wire take-up device 6;
- the deformation strengthening mechanism 4 is a cylindrical shape Deformation drawing die, as shown in FIG. 9, the cylindrical deformation drawing die includes a deformation tapered inlet 41 and a cylindrical deformation sizing belt 42, and the inner diameter of the deformed tapered inlet 41 is gradually reduced from the outside to the inside. 081 ⁇
- the inner diameter of the deformed sizing belt is 0. 081mm.
- the inner diameter of the deformed sizing belt is 0. 081mm.
- 2a, 2b and 2c are schematic views showing the structure of the straight metal bus bar in the present embodiment after passing through the pre-deformation mechanism 3.
- the deformation method of the pre-deformation mechanism 3 of this embodiment is as follows:
- the straight wire passes through the reel 2 in turn, and then enters the pre-deformation mechanism 3 to perform a pre-deformation process of the wire to process the wire la deformed in one plane, that is, the pre-deformation mechanism 3 includes only the initial pre-deformation mechanism 31.
- the wire la formed by the initial pre-deformation mechanism 31 has a plastic deformation portion 11, and as shown in Fig. 2, the plastic deformation portion 11 has a symmetrical uniform wave shape, and the outer diameter of the wire la is larger than the inner diameter of the deformation sizing tape 42. 01 ⁇ In this embodiment is 0. 13mm.
- the wire structure of the present invention includes various conditions for forming protrusions along the wire axis and/or the surrounding axis, and the protrusions may be evenly distributed or non-uniformly distributed.
- the pre-deformation mechanism 3 includes an initial pre-deformation mechanism 31 that deforms the wire bus bar in one plane or a plurality of planes, and further includes The heterogeneous molding mechanism 32 that plastically deforms the wire that has passed through the initial pre-deformation mechanism 31 in the advancing direction of the wire and the direction of advancing in the same direction.
- the heterogeneous molding mechanism 32 is a cylindrical forming drawing die, and the cylindrical forming drawing die includes at least a shaped tapered inlet 321 and a cylindrical shaped sizing tape 322, and the inner diameter of the shaped tapered inlet 321 is The outer diameter is gradually reduced, and the inner diameter of the molded sizing belt 322 coincides with the minimum inner diameter of the shaped tapered inlet 321 .
- the manufacturing method of the present embodiment is different from that of the first embodiment in that after the initial pre-deformation mechanism 31 is deformed, the heterogeneous molding mechanism 32 is also passed, and the pulling drive wheel 72 pulls the wire through the heterogeneous molding mechanism. 32. Due to the angle between the plurality of axes of rotation of the wire before the pre-deformation, and the constant tension of the wire reel 2 which continuously changes the direction of advancement of the wire, the deformed wire is in the advancing direction and surrounding The advancing direction encounters plastic deformation at the same time, and the corrugated plastic deformation portion of the unevenly deformed wire is twisted to form the wire la with the plastic deformation portion 11 as shown in FIG.
- the manufacturing apparatus of a wire according to the present embodiment is different from the first embodiment in that the pre-deformation mechanism 3 includes only the initial pre-deformation mechanism 31, and a mechanism for performing uneven deformation on two planes of the wire bus bar, The two planes are perpendicular to each other. Accordingly, the manufacturing method of the present embodiment is different from that of Embodiment 1 in the process of pre-deformation.
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Abstract
一种用于多线切割的金属丝，外径不均匀分布，所有外径最大点均与一圆形或近似圆形的虚拟管道内表面接触，且该虚拟管道的内径前后一致或均匀变化；金属丝的表面硬度同样呈不均匀分布，且均在上述金属丝外径最大点附近达到局部最大值。该金属丝用于游离磨料切割时，由于金属丝的外径不均匀分布带来磨料携带能力增强，有利于提高切割效率与切割良率，同时由于表面硬度不均匀分布，且凸起的顶点或者其附近因硬度最高而耐磨能力最强，上述外径不均匀分布不会因为金属线随切割进程磨损而消失，从而有利于保持从切割起始端到切割尾端的良率一致性。还公开了一种金属丝的制造装置。
Description
说 明 书
一种用于多线切割的金属丝及其制造装置 技术领域
本发明涉及一种用于多线切割的金属丝， 尤其是涉及用于多线切割晶体硅、 碳化硅、 蓝宝石、 水晶等硬质材料的金属丝， 以及其制造装置。 背景技术
多线切割是以金属丝作为载体， 由金属丝在高速运动中携带超硬磨料， 通 过磨料对高硬材料 （如晶体硅， 碳化硅， 蓝宝石， 水晶等） 进行滚挖研磨以实 现切割。 该方式以切割效率高、 切割锯缝小、 材料损失少、 切割精度高、 表面 质量好等优点成为当前的主要生产方式。 其中， 金属丝作为携带磨料的载体， 在切割过程中的稳定性以及携带磨料的能力， 对于切割效率及产品质量均起到 极其重要的作用。 目前广泛使用的金属丝是表面光滑的圆形结构 （直线式金属丝）， 其突出优 点在于金属丝能够在环绕其切割进给的方向均匀携带磨料， 从而带来稳定的切 割表面质量。 通常情况下， 可以通过增加金属丝的直径增加金属丝的表面积， 从而增强金属丝携带磨料的能力以提高切割效率， 代价是由此会引起锯缝的宽 度增加， 从而带来切割过程中材料损失的增加。 切割效率的提升亦可通过加大 磨料的平均粒径以及棱角尖锐度等方式实现。 几乎在多线切割诞生的同时， 追求提高金属丝 （"锯线"） 的磨料携带能力 的努力即已开始并且一直持续至今， 典型地可分为三类： 第一类是试图制造粗糙金属丝， 通过增加金属丝表面的粗糙度增加金属丝 的磨料携带能力。 例如 JP2007 196312 提出了通过向金属丝表面喷射电解液的
方式， 造成金属丝表面产生凹凸； W0 9/12670则提出了微凹腔金属丝， 软表面 金属丝， 以及横截面沿长度方向变化的金属丝等概念； KR 2001 002689则描述 了一种圆锯线， 通过压刻的方式在该圆锯线上形成凹腔。 此类尝试迄今尚未在 多线切割领域获得成功的工业化实施与应用， 核心原因在于磨料本身具备强大 的磨损能力，经过上述处理的金属丝表面，在进入切割进程中不久即会被磨光， 使得经过表面处理的金属丝与常规圆形表面光滑金属丝不再有任何区别。
第二类尝试是以对金属丝进行螺旋处理为基础。 例如， JP 2007 044841提 出了一种基本为圆形的锯线， 具有围绕锯线的长度方向成螺旋形延伸的扁平面， CN102380915A基本为上述概念的自然延展； US 2860862则提出对预先做成扁平 形状的锯线施加两次螺旋形变形： 首先用短的捻距绕扁平锯线的自身轴线加捻， 然后用更长的捻距以螺旋型对锯线加捻。 FR 750081也描述了采用圆形或多边形 横截面的螺旋形锯线。 CN102205563A以及 CN102765141A基本上均为前述思路的 自然延展。 JP4057666则描述了一种金属锯线， 同样是采用加捻的方式将直钢丝 先行变成螺旋型， 之后再通过拉模进行拉伸。 迄今为止， 上述努力在多线切割 领域同样未见成功的工业化实施与应用， 核心原因在于， 金属丝的螺旋化无可 避免地需要对金属丝进行加捻， 从而给金属丝带来很高的扭转内应力， 且金属 丝越长， 扭转內应力越高， 从而导致成品金属丝产生强烈的自我打卷倾向， 无 法实际应用于多线切割， 突出表现在很难完成均匀的长距离卷绕收线， 在切割 线网上无法或很难布线， 即使勉强用于短距离切割， 也会因为金属丝自身携带 的高扭转内应力造成线网无规律抖动， 导致无法接受的切割效果 （突出体现为 表面线痕与 TTV不良）。 第三类尝试， 是通过对金属丝在一个或多个平面内进行弯曲的方式， 制造
所谓的 "结构金属丝"。 例如 JP 2004 276207在描述了一种具有螺旋形的变形 单线或绞线之外， 还描述了上述单线或绞线被引导通过一对嵌齿轮， 从而在单 一平面内形成 '字形的双皱褶。在 Z字形皱褶中，锯线先在第一方向上弯曲， 然后在第二方向上进行第二次弯曲且与第一方向相反 （反向弯曲）， 然后再通过 绞线并捻将较短长度的 Z字形皱褶被叠加到长波螺旋形上。 该种尝试的明显缺 陷， 在于绞线结构会导致锯线的实用包络外径显著加大， 带来难以接受的锯缝 加宽和相应额外材料损失。 第三类尝试中取得了一定应用成功的， 是安塞尔米塔尔公司通过中国专利 CN100475398C公开的一种单丝型金属锯线， 其在两个或两个以上的平面内对金 属丝进行了弯曲， 从而在一定程度增强了金属丝携带磨料的能力在一些特定应 用环境下能够取得良好效果。 其缺陷在于， 该锯线的弯曲以一个平面为主导， 其他平面的弯曲在切割过程中会被逐渐转向到该主导平面， 最终形成基本上仅 在一个平面内变形的锯线， 从而导致切割良率波动， 同时由于该锯线的结构保 持能力有限， 在切割路径较长的情况下， 切割线到达切割尾端时弯曲结构已经 基本或大部消失， 导致切割尾端的良率较切割起始端的良率大幅下降。 为尝试 解决上述缺陷，贝卡尔特公司通过 CN102528940A提出了一种相当于第二类（"螺 旋金属丝"） 与第三类 （"结构金属丝"） 思路混合的产品概念， 基本做法是在单 一平面上利用嵌咬的齿轮 （或其他变形装置） 对金属丝制成弯曲， 通过对金属 丝进行加捻 （环绕金属丝的轴线旋转变形装置所在平面， 或保持变形装置所在 平面不动但同歩旋转收、 放线轴）， 形成螺旋形金属丝， 之后再对金属丝进行退 捻 （与加捻方向反向旋转变形装置所在平面， 或保持变形装置所在平面不动但 反向同歩旋转收、 放线轴） 以部分或全部释放掉由于加捻带给金属丝的扭转内
应力。 实施中发现， 因为必须的退捻， 导致制成的金属丝无论在环绕轴线的各 向均匀性上， 还是在结构保持能力方面， 均未较 CN100475398C提供的方法产生 提高。 CN102962901A及 CN102310489A则均为在 CN100475398C与 CN102528940A 概念上的自然延展， 未见独立技术贡献。 除了因为主变形平面的存在导致切割良率波动， 以及结构保持能力有限导 致切割尾部良率较切割起始部大幅下降外， 上述结构金属丝的另一显著弱点， 是金属丝的外包络直径大于金属丝母线， 从而导致锯缝加宽， 带来切割过程中 材料损失的增加。 尤其尴尬的是， 以锯缝加宽为代价使用结构金属丝， 经常不能带来想象中 的切割速度提高——因为多线切割的速度短板， 在于在切割尾部的切割速度： a)切割起始时金属丝尚未磨损， 线径最大， 携带磨料的能力本身就强， 此 时结构金属丝带来的表面立体结构更多属于锦上添花；
b)到达切割尾端时， 金属丝经过磨损， 线径变小 （当前行业晶硅线切水平 下， 金属丝到达切割尾部时的磨损量一般接近 10%)， 导致磨料携带能力 同比下降， 偏偏在这急迫需要结构金属丝表面立体结构为磨料携带雪中 送炭的阶段，结构金属丝的表面结构却常已基本消失 (尤其在长切割路径 的情况下）。 随着行业上持续不断的降本增效努力， 多线切割正越来越采用更长的工件 (硅棒等）， 更细的切割金属丝 （0. 08讓 -0. 115讓）， 导致切割路径不断加长， 进一歩局限了上述传统结构线的适用范围。 发明内容
本发明要解决的技术问题是： 化解传统直线式金属丝和传统结构金属丝共 有的普遍性缺陷一一越临近切割尾端， 金属丝携带磨料的能力越差， 切割良率 下降越严重的问题。 本发明解决其技术问题所采用的技术方案是： 一种用于多线切割的金属丝， a) 外表面有规律分布有若干凸起， 所述凸起的顶点为金属丝外表面的最高 点；
b)所述凸起的顶点与一圆形或近似圆形的虚拟管道内表面接触， 且该虚拟 管道的内径前后一致或均匀变化；
c)所述虚拟管道的内径小于金属丝母线直径的 1. 05倍， 所述金属丝母线是 指制备所述用于多线切割的金属丝的原材料；
d)金属丝的表面硬度呈有规律变化分布， 且均在金属丝凸起的顶点或者靠 近凸起的顶点的部位达到局部最大值。
由于金属丝的外径不均匀分布带来磨料携带能力增强， 有利于提高切割效 率与切割良率， 同时由于表面硬度不均匀分布， 且凸起的顶点或者其附近因硬 度最高而耐磨能力最强， 上述外径不均匀分布不会因为金属线随切割进程磨损 而消失， 从而有利于保持从切割起始端到切割尾端的良率一致性。 所述虚拟管道的内径小于金属丝母线直径。
本发明所述金属丝的应用场合， 是多线精密切割， 一般所述用于多线切割 的金属丝的直径在 0. 08-0. 60mm之间。
本发明所述金属丝， 尤其适用于对锯缝损失较敏感的多线精密切割， 此种 情况下，金属丝的直径一般会优选在 0.09-0.40mm之间，以尽可能降低锯缝损失。
为了确保磨料携带能力得到合理增强， 相邻的金属丝凸起的顶点之间的轴
向距离不大于虚拟管道内径的 500倍。
为提高金属丝的耐磨性， 所述的金属丝的表面涂覆有以树脂材料为主体的 涂层。 由于金属丝的异构特性， 涂层与金属丝的结合牢度较直金属丝有长足提 高。
为进一歩提高金属丝的耐磨性， 所述的涂层的树脂材料中加入无机填料， 所述的无机填料包括金刚石、 碳化硅、 氮化硼、 氧化铝、 氧化锆、 氮化硅、 碳 化钨、 石墨中的一种或几种。 同样由于金属丝的异构特性， 无机填料的脱落风 险较直金属丝情况显著降低。
本发明涉及的用于多线切割的金属丝， 可以作为固定磨料切割线的优化母 线。 此种情况下， 所述的金属丝的表面复合有固定切割磨料， 固定切割磨料包 括金刚石、 碳化硅、 氮化硼、 氧化铝、 氧化锆、 氮化硅或碳化钨中的一种或几 种硬质材料。 固定切割磨料的平均颗粒直径在 5 μ m-100 μ m之间。
一种上述的用于多线切割的金属丝的制造装置， 该装置至少包括过线轮、 对金属丝母线实施塑性变形的预变形机构、 对预变形后金属丝实施形变强化的 形变强化机构、 为拉动金属丝通过异构成型机构提供足够拉拔张力的拉拔驱动 轮、 收线恒张力系统和收线装置； 所述的形变强化机构为筒状形变拉拔模具， 所述的筒状形变拉拔模具至少包括形变锥形入口和筒状的形变定径带， 形变锥 形入口的内径由外至内逐渐缩小， 形变定径带的内径与形变锥形入口的最小内 径一致， 形变定径带内径小于金属丝母线直径的 1. 05倍。
所述预变形机构包括对金属丝母线在一个平面或多个平面内实施变形的初 始预变形机构。
所述预变形机构还包括在金属丝的前进方向和环绕前进的方向同歩对经过 初始预变形机构后的金属丝实施塑性变形的异构成型机构。
一种所述的金属丝制造装置的制造方法， 包括以下歩骤：
a) 预变形： 将直金属丝母线经过过线轮， 再进入预变形机构进行至少一次 金属丝的预变形加工， 加工出包含塑性变形的预变形金属丝；
b) 形变强化： 拉拔驱动轮拉动预变形后的金属丝通过形变强化机构， 通过 形变定径带后形成具备本发明的金属丝；
c) 收线： 将金属丝依次通过收线恒张力系统、 收线装置进行缠绕收线。 本发明的有益效果是， 由于金属丝的外径不均匀分布带来磨料携带能力增 强， 有利于提高切割效率与切割良率， 同时由于表面硬度不均匀分布， 且凸起 的顶点或者其附近因硬度最高而耐磨能力最强， 上述外径不均匀分布不会因为 金属线随切割进程磨损而消失， 从而有利于保持从切割起始端到切割尾端的良 率一致性。
附图说明
下面结合附图和实施例对本发明进一歩说明。 图 1 是预变形前的金属丝母线的结构示意图。
图 la是图 1中金属丝轴线 X轴向视图。 图 lb是图 1中金属丝轴线 Y轴向视图。 图 lc是图 1中金属丝轴线 Z轴向视图，图中黑圆点表示金属丝自身轴线。 图 2是本发明的实施例 1中经过预变形后的金属丝的立体结构示意图。 图 2a是图 2中金属丝轴线 X轴向视图。 图 2b是图 2中金属丝轴线 Y轴向视图。
图 2c是图 2中金属丝轴线 Z轴向视图， 图中中间的直线为金属丝自身轴线 投影形成的。
图 3是本发明的实施例 2中经过预变形后的金属丝的立体结构示意图。 图 3a是图 3中金属丝轴线 X轴向视图。
图 3b是图 3中金属丝轴线 Y轴向视图。 图 3c是图 3中金属丝轴线 Z轴向视图， 图中中心类似麻花的线型为金属丝 自身轴线投影形成的。
图 4是图 3的金属丝带有轴向投影面和法向面的结构示意图。 图 5是本发明的实施例 1中金属丝制造装置的结构示意图。
图 6是本发明的实施例 2中金属丝制造装置的结构示意图。 图 7是本发明的实施例 3中金属丝制造装置的结构示意图。
图 8是本发明金属丝的制造装置中筒状成型拉拔模具的结构示意图。
图 9是本发明金属丝的制造装置中筒状形变拉拔模具的结构示意图。
图 10是本发明最终制备得到的金属丝的其中一种结构示意图。
图中： la、 预变形后的金属丝， lb、 最终制备得到的金属丝， 100、 凸起， 11、 塑性变形部， 2、 过线轮， 3、 预变形机构， 31、 初始预变形机构， 32、 异 构成型机构， 321、 成型锥形入口， 322、 成型定径带， 4、 形变强化机构， 41、 形变锥形入口， 42、 形变定径带， 5、 收线恒张力系统， 6、 收线装置， 72、 拉 拔驱动轮， I、 轴向投影面， II、 法向面， d、 形变强化前金属丝的直径。
具体实施方式
现在结合附图对本发明作进一歩详细的说明。 这些附图均为简化的示意图， 仅以示意方式说明本发明的基本结构， 因此其仅显示与本发明有关的构成。
本发明的一种用于多线切割的金属丝， 如图 10所示：
a) 外表面有规律分布有若干凸起 100， 所述凸起 100的顶点为金属丝外表 面的最高点；
b)所述凸起 100的顶点与一圆形或近似圆形的虚拟管道内表面接触， 且该 虚拟管道的内径前后一致或均匀变化；
c)所述虚拟管道的内径小于金属丝母线直径的 1. 05倍， 所述金属丝母线是 指制备所述用于多线切割的金属丝 lb的原材料；
d)金属丝的表面硬度呈有规律变化分布， 且均在金属丝凸起 100的顶点或 者靠近凸起 100的顶点的部位达到局部最大值。
相邻的金属丝凸起 100的顶点之间的轴向距离不大于虚拟管道内径的 500 倍。
本发明涉及的用于多线切割的金属丝， 可以作为固定磨料切割线的优化母 线。 此种情况下， 所述的金属丝的表面复合有固定切割磨料， 固定切割磨料包 括金刚石、 碳化硅、 氮化硼、 氧化铝、 氧化锆、 氮化硅或碳化钨中的一种或几 种硬质材料。 固定切割磨料的平均颗粒直径在 5 μ m-100 μ m之间。
本发明的用于多线切割的金属丝的制造装置， 至少包括过线轮 2、对金属丝 母线实施塑性变形的预变形机构 3、对预变形后金属丝实施形变强化的形变强化 机构 4、 为拉动金属丝通过异构成型机构提供足够拉拔张力的拉拔驱动轮 72、 收线恒张力系统 5和收线装置 6; 所述的形变强化机构 4为筒状形变拉拔模具，
所述的筒状形变拉拔模具至少包括形变锥形入口 41和筒状的形变定径带 42，形 变锥形入口 41的内径由外至内逐渐缩小， 形变定径带 42的内径与形变锥形入 口 41的最小内径一致， 形变定径带 42内径小于金属丝母线直径的 1. 05倍。
本发明的用于多线切割的金属丝的制造方法， 包括以下歩骤：
a) 预变形： 将直金属丝母线经过过线轮 2， 再进入预变形机构 3进行至少 一次金属丝的预变形加工， 加工出包含塑性变形的预变形金属丝；
b ) 形变强化： 拉拔驱动轮 72拉动预变形后的金属丝通过形变强化机构 4， 通过形变定径带 42后形成具备本发明的金属丝；
c )收线：将金属丝依次通过收线恒张力系统 5、收线装置 6进行缠绕收线。 实施例 1
如图 5是本实施例的金属丝的制造装置， 包括依次设置的过线轮 2、对在金 属丝母线的一个平面内实施塑性凹凸变形的预变形机构 3、 对预变形后金属丝 la实施形变强化的形变强化机构 4、 为拉动金属丝通过形变强化机构提供足够 拉拔张力的拉拔驱动轮 72、 收线恒张力系统 5和收线装置 6 ; 所述的形变强化 机构 4为筒状形变拉拔模具， 如图 9所示， 所述的筒状形变拉拔模具包括形变 锥形入口 41和筒状的形变定径带 42， 形变锥形入口 41的内径由外至内逐渐缩 小， 形变定径带 42的内径与形变锥形入口 41的最小内径一致， 形变定径带 42 内径为金属丝母线直径的 0. 9倍， 本实施例中， 形变定径带内径为 0. 081mm。
本实施例的金属丝的制造装置的制造方法， 包括以下歩骤：
a)预变形： 将 0. 09mm直金属丝母线经过过线轮 2， 再进入预变形机构 3进 行一次金属丝的预变形加工， 加工出在一个平面的预变形金属丝 la; 金属丝母 线的结构如图 1、 图 la、 图 lb和图 lc中所示；
b) 形变强化： 拉拔驱动轮 72拉动预变形后的金属丝 la通过形变强化机构
4，通过形变定径带后形成虚拟管道内径为 0.081mm的金属丝， 该金属丝的结构 如图 10所示；
c) 收线： 将金属丝再依次通过收线恒张力系统 5、 收线装置 6进行缠绕收 线。
如图 2、 2a、 2b和 2c所示是本实施例中直金属丝母线经过预变形机构 3后 的结构示意图， 本实施例的预变形机构 3的变形方法如下：
直金属丝依次经过过线轮 2，再进入预变形机构 3进行一次金属丝的预变形 加工， 加工出在一个平面内变形的金属丝 la， 即预变形机构 3仅包括初始预变 形机构 31。 经过初始预变形机构 31形成的金属丝 la带有塑性变形部 11， 如图 2所示， 塑性变形部 11呈对称均匀的波浪形， 金属丝 la的外包络直径大于形变 定径带 42内径， 本实施例中为 0. 13mm。
本发明的金属丝结构包含沿金属丝轴线和 /或环绕轴线形成凸起的各种情 况， 并且所述凸起可以是均匀分布， 也可以是非均匀分布的。
实施例 2
如图 6是本实施例的金属丝的制造装置， 与实施例 1不同的是， 预变形机 构 3包括对金属丝母线在一个平面或多个平面内实施变形的初始预变形机构 31， 还包括在金属丝的前进方向和环绕前进的方向同歩对经过初始预变形机构 31后 的金属丝实施塑性变形的异构成型机构 32。
如图 8所示， 异构成型机构 32为筒状成型拉拔模具， 筒状成型拉拔模具至 少包括成型锥形入口 321和筒状的成型定径带 322，成型锥形入口 321的内径由 外至内逐渐缩小，成型定径带 322的内径与成型锥形入口 321的最小内径一致。
本实施例的制造方法与实施例 1不同的是， 经过一次初始预变形机构 31实 施变形后还经过异构成型机构 32，拉拔驱动轮 72拉动金属丝通过异构成型机构
32， 由于在预变形前金属丝经过若干个转动轴线之间存在夹角， 且不断转换金 属丝前进方向的过线轮 2而积累的扭曲内应力， 凹凸变形后的金属丝在前进方 向和环绕前进的方向同歩遭遇塑性变形， 使得凹凸变形后的金属丝的波浪形塑 性变形部发生扭曲， 形成带有如图 3所示的塑性变形部 11的金属丝 la。
实施例 3
如图 7是本实施例的金属丝的制造装置， 与实施例 1不同的是， 预变形机 构 3仅包括初始预变形机构 31，对金属丝母线的两个平面实施凹凸变形的机构， 所述两个平面相互垂直。 相应地， 本实施例的制造方法与实施例 1不同的是预 变形的过程。
以上述依据本发明的理想实施例为启示， 通过上述的说明内容， 相关工作 人员完全可以在不偏离本项发明技术思想的范围内， 进行多样的变更以及修改。 本项发明的技术性范围并不局限于说明书上的内容， 必须要根据权利要求范围 来确定其技术性范围。
Claims
1、 一种用于多线切割的金属丝， 其特征在于：
a)外表面有规律分布有若干凸起 （100)， 所述凸起 （100 ) 的顶点为金属丝 外表面的最高点；
b)所述凸起 （100 ) 的顶点与一圆形或近似圆形的虚拟管道内表面接触， 且 该虚拟管道的内径前后一致或均匀变化；
c)所述虚拟管道的内径小于金属丝母线直径的 1. 05倍， 所述金属丝母线是 指制备所述用于多线切割的金属丝 （lb ) 的原材料；
d)金属丝的表面硬度呈有规律变化分布， 且均在金属丝凸起 （100 ) 的顶点 或者靠近凸起 （100 ) 的顶点的部位达到局部最大值。
2、 如权利要求 1所述的用于多线切割的金属丝， 其特征在于： 所述虚拟管 道的内径小于金属丝母线直径。
3、 如权利要求 2所述的用于多线切割的金属丝， 其特征在于： 所述用于多 线切割的金属丝 ( lb ) 的直径在 0. 08-0. 60mm之间。
4、 如权利要求 3所述的用于多线切割的金属丝， 其特征在于： 所述用于多 线切割的金属丝 （lb ) 的直径在 0.09-0.40mm之间。
5、 如权利要求 1-4中任一项所述的用于多线切割的金属丝， 其特征在于： 相邻的金属丝凸起（100 )的顶点之间的轴向距离不大于虚拟管道内径的 500倍。
6、 如权利要求 1所述的用于多线切割的金属丝， 其特征在于： 所述的金属 丝的表面复合有固定切割磨料， 固定切割磨料包括金刚石、 碳化硅、 氮化硼、 氧化铝、 氧化锆、 氮化硅或碳化钨中的一种或几种硬质材料， 固定切割磨料的 平均颗粒直径在 5 μ m-100 μ m之间。
7、一种如权利要求 1-6中任一项所述的用于多线切割的金属丝的制造装置， 特征在于：至少包括过线轮（ 2 )、对金属丝母线实施塑性变形的预变形机构（ 3 )、
对预变形后金属丝实施形变强化的形变强化机构 （4)、 为拉动金属丝通过异构 成型机构提供足够拉拔张力的拉拔驱动轮 （72)、 收线恒张力系统 （5 ) 和收线 装置 （6) ; 所述的形变强化机构 （4) 为筒状形变拉拔模具， 所述的筒状形变拉 拔模具至少包括形变锥形入口 （41 ) 和筒状的形变定径带 （42)， 形变锥形入口 ( 41 )的内径由外至内逐渐缩小，形变定径带（ 42 )的内径与形变锥形入口（ 41 ) 的最小内径一致， 形变定径带 （42) 内径小于金属丝母线直径的 1. 05倍。
8、 如权利要求 7所述的用于多线切割的金属丝的制造装置， 特征在于： 所 述预变形机构 （3 )包括对金属丝母线在一个平面或多个平面内实施变形的初始 预变形机构 （31 )。
9、 如权利要求 8所述的用于多线切割的金属丝的制造装置， 特征在于： 所 述预变形机构 （3 ) 还包括在金属丝的前进方向和环绕前进的方向同歩对经过初 始预变形机构 （31 ) 后的金属丝实施塑性变形的异构成型机构 （32)。
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| CN107457926A (zh) * | 2017-09-03 | 2017-12-12 | 盛利维尔（中国）新材料技术股份有限公司 | 一种螺旋结构金刚线及其生产工艺 |
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