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WO2014063947A1 - Dispositif destiné à absorber un faisceau laser - Google Patents

Dispositif destiné à absorber un faisceau laser Download PDF

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Publication number
WO2014063947A1
WO2014063947A1 PCT/EP2013/071446 EP2013071446W WO2014063947A1 WO 2014063947 A1 WO2014063947 A1 WO 2014063947A1 EP 2013071446 W EP2013071446 W EP 2013071446W WO 2014063947 A1 WO2014063947 A1 WO 2014063947A1
Authority
WO
WIPO (PCT)
Prior art keywords
absorption
cone
laser beam
absorption body
incidence
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/EP2013/071446
Other languages
German (de)
English (en)
Inventor
Bernd Armbruster
Markus Weber
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Trumpf Laser GmbH
Original Assignee
Trumpf Laser GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Trumpf Laser GmbH filed Critical Trumpf Laser GmbH
Publication of WO2014063947A1 publication Critical patent/WO2014063947A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/003—Light absorbing elements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/70—Auxiliary operations or equipment
    • B23K26/702—Auxiliary equipment
    • B23K26/704—Beam dispersers, e.g. beam wells
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/005—Optical devices external to the laser cavity, specially adapted for lasers, e.g. for homogenisation of the beam or for manipulating laser pulses, e.g. pulse shaping

Definitions

  • the present invention relates to a device for absorbing an incident laser beam, comprising a dispersing optics for expanding the incident laser beam and having an absorption body which has an inlet opening tapering in the direction of incidence of the expanded laser beam.
  • Absorption devices are known in which the diverging optics are immersed with their one side in an absorption liquid which absorbs the laser beam which has been widened by the diverging optical system.
  • the slightest contamination in the absorption liquid can lead to the impurity burn into the diverging optics and make them unusable over time.
  • Absorption devices are also known, in which the laser beam, after being widened by the diffusing optics, impinges on two plates for absorption, which are aligned with one another in such a way that they form a wedge-shaped cavity or a wedge-shaped inlet opening.
  • the expanded laser beam enters the wedge-shaped cavity and is reflected several times on the absorbing plates, with each reflection successively absorbing a large part of the radiation energy.
  • these absorption devices are comparatively large, usually expensive to assemble and, in particular, difficult to seal, which results in high overall production costs.
  • JP2011-82298 is also known an absorption device with a trained as a hollow absorption cone absorption body.
  • the diffusion optics there is preceded by a diffusion plate with an antireflection coating or a diffractive optical system, so that the incident laser beam is influenced even before it strikes the dispersing optics, in particular slightly increased in diameter.
  • the laser beam After the laser beam has been further widened by the diverging optics, it repeatedly impinges on the cone-inside absorption surface of the absorption cone by repeatedly reflecting.
  • the heat generated by the absorption of the radiation energy in the absorption cone is dissipated by flushing the outside of the cone with water.
  • This absorption device is also comparatively large, which limits its applicability, in particular for compact applications.
  • a second absorption body is arranged with a surrounding the expanded laser beam passage opening, which tapers against the (original) direction of incidence of the laser beam.
  • the first absorption body does not completely absorb but partially back-reflected laser radiation from the second absorption body is completely or at least largely absorbed, so that no back-reflected laser radiation reaches the diverging optics or even exits through it from the absorption device.
  • a laser beam reflected back against the original direction of incidence of the laser beam impinges on the surface of the second absorption body and is reflected therefrom, with a certain proportion of the radiation energy being absorbed with each impact.
  • an area between the diverging optics and the first absorption body is thus advantageously used for absorbing back-reflected laser radiation.
  • the back-reflected laser radiation or the back reflections are minimized so that the absorption device can advantageously be made more compact, namely shorter in the direction of incidence of the laser beam.
  • the inlet opening of the first absorption body and the passage opening of the second absorption body adjoin each other steplessly, since otherwise there would be stages at which there could be an undirected scattering of laser radiation.
  • the first and / or the second absorption body are each formed as a hollow absorption cone.
  • the cone opening angles of the first and second absorption cone are between see 20 ° and 40 ° and can advantageously be the same.
  • the first absorption cone on a blunt compared to its cone angle angle conical tip which allows an even shorter or more compact design of the absorption device.
  • the absorption bodies are preferably formed from copper and / or aluminum, which have a layer which is highly absorbent for the laser wavelength, so that a high proportion of the radiation energy, in particular about 95% of the radiation energy, is absorbed with each impingement of laser radiation.
  • the high-absorbency layer e.g. made of black-chrome, black anodized, black-nickel or other known for the laser wavelength highly absorbent materials.
  • the device 1 shown in FIG. 1 serves to absorb an incident laser beam 2 and comprises a diverging optics 3 for widening or fanning the incident laser beam 2 and a first hollow absorption cone 4, which tapers in the direction of incidence 5 of the laser beam 2 and one in comparison to the cone opening angle ßi blunt conical tip 6 has.
  • the diffusing optics 3 is typically a diverging lens, in particular a biconcave lens.
  • the expanded or fanned laser beam 2 enters the cone opening (inlet opening) 7 of the first absorption cone 4, strikes the absorbent cone inner surface 8 and is reflected several times, each time a hitting the cone inner surface 8, a certain proportion of the radiant energy is absorbed.
  • the incoming radiation energy of the laser beam 2 is correspondingly high, then it is possible for the laser beam 2 to propagate to the cone tip 6 and then to be reflected back, ie to propagate in the direction 9 toward the diverging optical system 3, counter to the original direction of incidence 5 of the laser beam 2.
  • a second hollow absorption cone or tapering counter to the direction of incidence 5 between the diffusing optics 3 and the first absorption cone 4 is a second hollow absorption cone or tapering counter to the direction of incidence 5.
  • truncated cone 10 which surrounds the incident expanded laser beam 2.
  • the cone opening angle ⁇ 2 of the second absorption cone 9 is chosen to be so large that the expanded laser beam 2 entering the cone opening (passage opening) 11 of the second absorption cone 10 does not strike the absorbent inner cone surface 12.
  • the two cone opening angles i, ß 2 can be about the same size and be about 30 ° ⁇ 10 °.
  • the two absorption cones 4, 10 are made of material, such as copper and / or aluminum, and have a highly absorbing for the laser wavelength layer, so advantageously at each impingement of the laser beam 2 about 95% of the radiant energy is absorbed.
  • the mode of action of the second absorption cone 9 is shown schematically in FIG. 2.
  • a single beam 2a reflected against the original direction of incidence 5 of the laser beam 2 strikes the absorbing inner cone surface 12 of the second absorption cone 10 at an angle of incidence ⁇ 1 with respect to the incident slot 13 and is subjected to the same angle of incidence CH reflected at the inner cone surface 12. If now, as shown in Fig.
  • the angle of incidence CH is greater than half the cone opening angle ß 2 , ie ai> 1 / 2ß 2
  • the reflected single beam 2b has a directed back towards the diverging lens 3 propagation component.
  • the reflected single beam 2b again encounters the absorbing inner cone surface 12 of the second absorption cone 10 at an opposite location smaller incident angle 02 ( ⁇ 2 ⁇ ) with respect to the Einfalllots 13 and is reflected at the same angle of incidence a 2 on the inner surface of the cone 12.
  • the angle of incidence a 2 is smaller than half the cone opening angle ß 2 , ie a 2 ⁇ / ß 2
  • the reflected single beam 2c has no back in the direction of the diverging lens 3, but only in the direction the first absorption cone 4 directed propagation component.
  • the single jet 2c finally enters the first absorption cone 4 again, optionally after further reflections on the inner cone surface 12 of the second absorption cone 10. In this case, a certain portion of the radiant energy is absorbed even with each impact on the Kegelinnenoberfikiee 12 of the second absorption cone 10, until finally the radiant energy of the laser beam 2 is completely absorbed.
  • the two absorption cones 4, 10 with their conical inner surfaces 8, 12 adjoin one another steplessly.
  • the two absorption cones 4, 10 are each surrounded by an annular space 15, 16 through which cooling water flows, which is bounded on the inside by the conical outer surfaces of the two absorption cones 4, 10.
  • the cooling water supply lines and outlets of the annular spaces 15, 16 are each denoted by 17 and 18.
  • the two absorption bodies can each also be formed by two plates, which are aligned with one another in such a way that they form a wedge-shaped inlet opening.
  • the wedge-shaped inlet opening of the one, first absorption body tapers in the direction of incidence of the expanded laser beam, and the wedge-shaped inlet opening of the arranged between the diverging optics and the first absorption body other, second absorption body surrounds the expanded laser beam and tapers counter to the direction of incidence of the laser beam.

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Optics & Photonics (AREA)
  • Electromagnetism (AREA)
  • Plasma & Fusion (AREA)
  • General Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • Laser Beam Processing (AREA)
  • Lasers (AREA)

Abstract

L'invention concerne un dispositif d'absorption (1) destiné à absorber un faisceau laser (2) incident comprenant une optique divergente (3) pour élargir le faisceau laser (2) incident et un corps d'absorption (4) qui présente une ouverture d'entrée (7) se rétrécissant dans le sens d'incidence (5) du faisceau laser (2) élargi. Selon l'invention, un deuxième corps d'absorption (10) pourvu d'une ouverture de passage (11) qui entoure le faisceau laser (2) élargi et qui se rétrécit dans le sens opposé au sens d'incidence (5) du faisceau laser (2) est disposé entre l'optique divergente (3) et le premier corps d'absorption (4).
PCT/EP2013/071446 2012-10-26 2013-10-14 Dispositif destiné à absorber un faisceau laser Ceased WO2014063947A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102012219635.8A DE102012219635A1 (de) 2012-10-26 2012-10-26 Vorrichtung zur Absorption eines Laserstrahls
DE102012219635.8 2012-10-26

Publications (1)

Publication Number Publication Date
WO2014063947A1 true WO2014063947A1 (fr) 2014-05-01

Family

ID=49356434

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2013/071446 Ceased WO2014063947A1 (fr) 2012-10-26 2013-10-14 Dispositif destiné à absorber un faisceau laser

Country Status (2)

Country Link
DE (1) DE102012219635A1 (fr)
WO (1) WO2014063947A1 (fr)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105938209A (zh) * 2015-03-02 2016-09-14 发那科株式会社 光吸收器
US10473828B2 (en) 2018-04-13 2019-11-12 Raytheon Company Beam dumps having tailored absorbing surfaces
CN112531447A (zh) * 2020-12-18 2021-03-19 上海波刺自动化科技有限公司 一种杂散光吸收装置、激光加工头及光纤激光器
CN113376845A (zh) * 2021-06-21 2021-09-10 中国工程物理研究院激光聚变研究中心 一种杂散光吸收装置
CN115494569A (zh) * 2022-11-16 2022-12-20 中国航天三江集团有限公司 一种无水化和差异吸收率的激光截止器

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2531495B (en) 2014-06-16 2017-04-12 Apollo Fire Detectors Ltd Smoke detector
WO2016138951A1 (fr) * 2015-03-04 2016-09-09 Trumpf Lasersystems For Semiconductor Manufacturing Gmbh Piège à faisceau, dispositif de guidage de faisceau, dispositif de production de rayonnement euv et procédé d'absorption d'un faisceau
CN107431327B (zh) * 2015-03-13 2018-10-30 日产自动车株式会社 光衰减装置
DE102019205222B4 (de) 2019-04-11 2021-11-04 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren zur Terminierung optischer Strahlung sowie dafür ausgebildete optische Strahlfalle
CN111208643A (zh) * 2020-01-21 2020-05-29 武汉锐科光纤激光技术股份有限公司 高功率激光衰减器
DE102024110159A1 (de) * 2024-04-11 2025-10-16 TRUMPF Lasersystems for Semiconductor Manufacturing SE Hornartige geformte Strahlfalle für Laserstrahlung und Laseranlage Damit

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US20030210465A1 (en) * 2002-05-10 2003-11-13 The Boeing Company Light trap and associated light focusing assembly
US20080089382A1 (en) * 2006-10-16 2008-04-17 Eigler Lynne C Planar beam dump
JP2011082298A (ja) 2009-10-06 2011-04-21 Mitsubishi Electric Corp レーザ光吸収装置及びその固体レーザ装置
EP2602645A1 (fr) * 2011-12-09 2013-06-12 Agency For Defense Development Décharge de faisceau pour compteur de particules ou détecteur de fluorescence

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US4864098A (en) * 1988-05-19 1989-09-05 Rofin-Sinar, Inc. High powered beam dump
DE102004038321B4 (de) * 2003-11-21 2022-05-25 Leica Microsystems Cms Gmbh Lichtfalle
US9477041B2 (en) * 2010-07-30 2016-10-25 Kla-Tencor Corporation Low stray light beam dump with fiber delivery

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20030210465A1 (en) * 2002-05-10 2003-11-13 The Boeing Company Light trap and associated light focusing assembly
US20080089382A1 (en) * 2006-10-16 2008-04-17 Eigler Lynne C Planar beam dump
JP2011082298A (ja) 2009-10-06 2011-04-21 Mitsubishi Electric Corp レーザ光吸収装置及びその固体レーザ装置
EP2602645A1 (fr) * 2011-12-09 2013-06-12 Agency For Defense Development Décharge de faisceau pour compteur de particules ou détecteur de fluorescence

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105938209A (zh) * 2015-03-02 2016-09-14 发那科株式会社 光吸收器
US10126470B2 (en) 2015-03-02 2018-11-13 Fanuc Corporation Optical absorber which absorbs light beam
US10473828B2 (en) 2018-04-13 2019-11-12 Raytheon Company Beam dumps having tailored absorbing surfaces
US10802181B2 (en) 2018-04-13 2020-10-13 Raytheon Company Beam dumps having tailored absorbing surfaces
CN112531447A (zh) * 2020-12-18 2021-03-19 上海波刺自动化科技有限公司 一种杂散光吸收装置、激光加工头及光纤激光器
CN113376845A (zh) * 2021-06-21 2021-09-10 中国工程物理研究院激光聚变研究中心 一种杂散光吸收装置
CN113376845B (zh) * 2021-06-21 2022-03-18 中国工程物理研究院激光聚变研究中心 一种杂散光吸收装置
CN115494569A (zh) * 2022-11-16 2022-12-20 中国航天三江集团有限公司 一种无水化和差异吸收率的激光截止器
CN115494569B (zh) * 2022-11-16 2023-02-03 中国航天三江集团有限公司 一种无水化和差异吸收率的激光截止器

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Publication number Publication date
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