WO2013151358A1 - Highly resilient metal o-ring seal - Google Patents

Description

High Resilience Metal O-ring Seals

The present invention relates to a high-elastic metal O-ring seal, and more particularly to a high-elastic metal O-ring seal made of a metal material to meet the poor operating conditions such as ultra-high pressure, ultra-high vacuum, ultra-low temperature in place of the rubber o-ring seal .

In general, rubber o-ring seals are most widely used in pressure and vacuum applications because they can be easily reusable due to high resilience as well as maintain airtightness even with low clamping force. However, rubber is susceptible to heat, which limits its use at high temperatures and is not suitable for use in ultra-high vacuum environments due to its gas permeability and release of rubber. Therefore, a metal material suitable for a poor environment where a rubber material cannot be used is mainly used.

However, metal O-ring seals, which are made of metal, require very high clamping force compared to rubber o-ring seals, and are used only once due to plastic deformation due to the remarkably low elastic restoring force or maintenance of the operating device due to frequent replacement frequency. There was a problem that the maintenance cost is increased.

Here, FIG. 1 is a schematic view showing a state in which a general metal o-ring seal is compressed by a constant load, and FIG. 2 shows a state when the metal o-ring seal is compressed by applying a predetermined load to the general metal o-ring seal and when the predetermined load is removed and restored. This is a graph of the compression / restore characteristic curve measured. In FIG. 2, 'Y ₀ ' is a load at which airtightness is maintained during compression of the metal O-ring seal, 'Y ₂ ' is a load corresponding to proper compression, and 'Y ₁ ' is leakage when the compression is released. It means the load, 'e ₂ ' represents the maximum compression amount.

1 and 2, a general metal O-ring seal is an elastic restoring force acts upon compression by a fastening means such as bolts or clamps, the elastic restoring force to maintain the airtight while narrowing the gap. The elastic restoring force is determined by the amount of elastic energy stored in the metal O-ring seal and affects the airtight performance and lifespan.

In other words, the compression and elasticity recovery characteristics of the metal O-ring seal are very important factors affecting the airtight performance and life time of the metal o-ring seals. Although flexible and elastically resilient materials such as rubber are most suitable for the sealing mechanism, rubber O-rings Metal O-ring seals used in an environment in which seals cannot be applied have a very low elastic restoring force as compared to rubber materials, so it is necessary to change the structure to a more flexible structure to improve elastic restoring force.

In order to solve this problem, a structure in which elastic resilience is improved by inserting graphite into the inside of a metal O-ring seal is recently developed, but its use is limited because the structure is very complicated, large, and expensive to manufacture. .

The present invention was created to solve the above problems, the object of the present invention by optimizing the shape to increase the flexibility of the structure, it is formed in a circular shape, the elastic resilience is significantly reduced compared to the existing product having a constant thickness from the outer peripheral surface to the inner peripheral surface It is to provide a high-elasticity metal O-ring seal to increase, and to improve the performance and life time.

The metal O-ring seal according to the present invention for achieving the above object is formed in the shape of a circular ring having a through-hole 110 formed therein, the shape and size of the outer circumferential surface 120 follows the existing product standards, the circumference of the vertical section In the metal o-ring seal which adjusts the thickness (t) from the outer circumferential surface 120 to the inner circumferential surface 130 in the direction to increase the elastic restoring force, the upper and lower sides along the circumference at both sides in the circumferential direction of the vertical section. The thickness (t) gradually becomes thinner, and the protrusions 140 protruded in the direction of the center C of the vertical section on the upper and lower inner circumferential surfaces 130 are formed on both sides of the protrusions 140. Groove 141 is formed.

On the other hand, the metal O-ring seal according to the present invention for achieving the above object is formed in the shape of a circular ring having a through-hole 110 formed therein, the shape and size of the outer circumferential surface 120 in accordance with the existing product standards, vertical cross section In the metal o-ring seal which increases the elastic restoring force by adjusting the thickness t from the outer circumferential surface 120 to the inner circumferential surface 130 in the circumferential direction of the upper and lower sides along the circumference at both sides in the circumferential direction of the vertical section. The thickness (t) gradually becomes thinner toward the lower side, and both side positions in the circumferential direction of the vertical section are respectively 0 degrees and 180 degrees, and the upper and lower sides are 90 degrees and 270 degrees, respectively, and are formed in a circular shape. When the cross-sectional diameter of the existing product having a constant thickness from the outer circumferential surface to the inner circumferential surface is 1D, the thickness t in the 0 degree direction is 0.071 to 0.197 D, and the thickness t in the 10 degree direction is 0.071 to 0.195 D in the 20 degree direction. Thickness (t) is 0.0 The thickness t of 70 to 0.191D, 30 degrees is 0.066 to 0.183D, the thickness t of 40 degrees is 0.062 to 0.171D, and the thickness t of 50 degrees is 0.055 to 0.155D, 60 degrees The thickness t is 0.041 to 0.136D, the thickness t in the 70 degree direction is 0.026 to 0.108D, the thickness t in the 80 degree direction is 0.017 to 0.086D, and the thickness t in the 90 degree direction is 0.016 to It is determined within 0.118D, each thickness t from the 90 degree direction to the 180 degree direction, the 180 degree direction to the 270 degree direction, and the 270 degree to 0 degree is the angle of the 0 degree direction to the 90 degree direction The thickness t may correspond to the thickness t of each angle.

In addition, the thickness t in the 75-degree direction is set to 0.016 to 0.048D, and the thickness t in the 85-degree direction is set to 0.016 to 0.109D. As the protrusions 140 protruded toward the center C, grooves 141 may be formed on both sides of the protrusions 140.

In addition, the thickness t in the 75-degree direction may be 0.048D, and the thickness t in the 85-degree direction may be 0.025D.

The thickness t in the 0 degree direction is 0.134D, the thickness t in the 10 degree direction is 0.133D, the thickness t in the 20 degree direction is 0.129D, and the thickness t in the 30 degree direction is 0.123D. , The thickness t in the 40 degree direction is 0.114D, the thickness t in the 50 degree direction is 0.101D, the thickness t in the 60 degree direction is 0.086D, and the thickness t in the 70 degree direction is 0.063D, 80 The thickness t in the FIG. Direction may be 0.034D, and the thickness t in the 90 degree direction may be 0.059D.

In addition, the metal o-ring seal, stainless steel, Inconel, Inconel X, Carbon steel, Aluminum, Monel, Copper, Tantalum may be made of any one metal material.

According to the metal O-ring seal according to the present invention, first, it is formed in a circular shape by optimizing the shape to increase the flexibility of the structure, the elastic restoring force is increased compared to the existing product having a constant thickness from the outer peripheral surface to the inner peripheral surface, life time and airtight performance This is excellent.

Second, because it is made of a relatively simple structure, the existing product and the manufacturing method is the same, it is possible to replace the existing product, and the performance and life time is relatively increased, it is possible to extend the regular replacement cycle of the metal O-ring seal.

Third, the shape and size of the outer circumferential surface of the metal O-ring seal follows the existing product standard, and it is used in various fields because it has a structure modified from the shape of the inner circumferential surface by adjusting the thickness of the inner circumferential surface irrelevant to the existing product standard. This has a possible advantage.

1 is a schematic view showing a state in which a general metal O-ring seal is compressed by a certain load,

Figure 2 is a graph showing the compression / restoration characteristic curve of a typical metal O-ring seal,

Figure 3 is a perspective view and a partially enlarged view showing the configuration of the metal O-ring seal according to a preferred embodiment of the present invention,

Figure 4 is a cross-sectional view showing a form cut in a vertical section of the metal O-ring seal according to an embodiment of the present invention,

5 is a conceptual diagram for explaining the thickness (t) for each angle (a) of the metal O-ring seal according to an embodiment of the present invention,

6a to 6d are graphs and data tables showing simulation data, compression / restoration characteristic curves, and data obtained through elasto-plastic analysis of existing products according to a preferred embodiment of the present invention.

7a to 7b is a simulation according to the compression / restoration of the metal projection ring (oil) having a shape optimization applied according to a preferred embodiment of the present invention,

7c shows the compression / restoration characteristics of the protruding metal O-ring seal applying the shape optimization according to the preferred embodiment of the present invention, and the seating load value between the existing product and the protruding metal o-ring seal according to the preferred embodiment of the present invention, plastic deformation. Table, and the elastic restoring force value (elastic energy)

8a to 8b is a simulation according to the compression / restoration of the projection-free metal O-ring seal applying the shape optimization according to a preferred embodiment of the present invention,

Figure 8c is the compression / restoration characteristics of the projection-free metal O-ring seal applying the shape optimization according to the preferred embodiment of the present invention, and the seating load value, plastic deformation between the existing product and the projection-free metal O-ring seal according to the preferred embodiment of the present invention Values, and a table comparing the elastic restoring force value (elastic energy), and

9 is a graph showing a characteristic curve according to compression / restoration of the metal protrusions having no protrusions and no protrusions to which shape optimization is applied according to a preferred embodiment of the present invention.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings. Prior to this, terms or words used in the present specification and claims should not be construed as being limited to the common or dictionary meanings, and the inventors should properly explain the concept of terms in order to best explain their own invention. Based on the principle that it can be defined, it should be interpreted as meaning and concept corresponding to the technical idea of the present invention.

Therefore, the embodiments described in the specification and the drawings shown in the drawings are only the most preferred embodiment of the present invention and do not represent all of the technical idea of the present invention, various modifications that can be replaced at the time of the present application It should be understood that there may be equivalents and variations.

First, with reference to Figures 3 to 5 will be described the configuration and function of the metal O-ring seal according to a preferred embodiment of the present invention.

The metal o-ring seal 100 according to the preferred embodiment of the present invention is a metal o-ring seal 100 having a high elastic restoring force by applying shape optimization, and has the following structural features.

The metal O-ring seal 100 according to the preferred embodiment of the present invention is formed in a circular ring shape having a through hole 110 formed therein so that the shape and size of the outer circumferential surface 120 conform to the existing product standards, and the circumferential direction of the vertical cross section. As the metal O-ring seal 100 to increase the elastic restoring force by adjusting the thickness (t), that is, the shape of the inner circumferential surface 130 from the outer circumferential surface 120 to the inner circumferential surface 130, as shown in FIGS. Likewise, the thickness (t) gradually becomes thinner toward both the upper and lower sides along the circumference at both side positions in the circumferential direction of the vertical section, and the center (C) of the vertical section on the upper and lower inner circumferential surfaces 130. It is a technical feature that the grooves 141 are formed on both sides of the protrusions 140 while the protrusions 140 protruded in the direction.

That is, the metal o-ring seal 100 according to the preferred embodiment of the present invention increases the flexibility of the shape of the inner circumferential surface 130 by adjusting the thickness t from the outer circumferential surface 120 to the inner circumferential surface 130 as described above. It can be formed into a structure to improve the elastic restoring force. Therefore, it is possible to increase the airtight performance and life time of the metal O-ring seal 100 while having a general purpose (applicability) by maintaining the outer shape of the existing product.

Hereinafter, by optimizing the shape to increase the flexibility of the structure will be described a process to demonstrate that the metal O-ring seal 100 has a remarkably improved elastic restoring force compared to the existing product having a constant thickness from the outer peripheral surface to the inner peripheral surface.

First, elasticity analysis is performed on the existing products that are actually used using finite elements method to calculate compression / restoration characteristics data and compare them with the main performance values of the existing products presented in the manufacturer's catalog. Verify the reliability of the analysis.

Here, the existing product is an existing product for the metal O-ring seal in the technical field to which the present invention belongs, the outer circumferential surface and the inner circumferential surface by forming a concentric circle means a metal O-ring seal uniform thickness.

6A is simulation data measuring a state when a predetermined load is applied to the existing product and compressed. FIG. 6B is simulation data measuring a state when the state is restored by removing the predetermined load. The circle indicated by solid line in 6b shows the shape of the existing product without load applied.

6C and 6D are graphs and tables showing compression / restore characteristic curves of existing products, seating load values, and permanent deformation values of existing products according to the simulation results, respectively.

As shown in Figure 6a to 6d, the seating load value (Seating Load) value of the existing product presented in the catalog of the manufacturer is 420, the seating load calculated by performing an elasticity analysis according to a preferred embodiment of the present invention The value is 427, and the permanent strain values are 0.84 and 0.86, respectively, showing slight differences such as 1.64% and 2.33%. That is, through this it is possible to verify the reliability of the elasto-plastic analysis according to the preferred embodiment of the present invention.

Here, Figure 7a is a simulation result (stress and strain distribution) obtained by compressing a fixed displacement load with respect to the shape of the optimized projection metal O-ring seal 100, Figure 7b is a state when the predetermined load is removed and restored 7A and 7B are measured simulation data, and the circle indicated by the solid line in FIG. 7A shows the shape of the oil-proof metal ring ring 100 in which the shape of the load-free state is optimized.

7C also shows It is a table comparing the existing load and the seating load, plastic deformation, and elastic energy between the protruding metal O-ring seals 100 according to the preferred embodiment of the present invention. .

As shown in FIGS. 7A to 7C and 9, the seating load value according to the compression / restoration characteristic data of the existing product calculated by performing the elastoplastic analysis is 427, whereas the optimized shape according to the preferred embodiment of the present invention. The seating load value according to the compression / restoration characteristic data of the metal O-ring seal 100 of 431 showed almost similar repulsion force, and the plastic deformation value and elastic restoring force value (elastic energy) of the conventional product were 0.86 and 85.3, whereas the present invention The plastic deformation value and the elastic restoring value (elastic energy) of the metal o-ring seal 100 according to the preferred embodiment of the present invention manufactured in the shape obtained by applying the optimization design according to the preferred embodiment of 0.56 and 129.2, respectively. The deviation of the data is 0.3 and 43.9, and the plastic deformation degree is 35% and the elastic restoring force (elastic energy) is improved by 34% compared with the conventional products. In other words, it can be verified that the confidentiality performance and the service life can be greatly improved.

Here, Figure 9 is a graph showing a characteristic curve according to the compression / restoration of the metal projection (oil) and the projection-free metal O-ring seal applying the shape optimization according to a preferred embodiment of the present invention.

As such, the shape and size of the outer circumferential surface 120 of the metal O-ring seal 100 according to the preferred embodiment of the present invention conforms to the existing product standard, from the outer circumferential surface 120 to the inner circumferential surface 130 in the circumferential direction of the vertical section. By adjusting the thickness (t) of the can obtain the optimized shape data to minimize the plastic deformation for each specification and maximize the elastic restoring force. According to the optimized shape data, referring to Figure 3, The thickness (t) gradually becomes thinner toward both the upper and lower sides along the circumference at both side positions in the circumferential direction, and the two side positions in the circumferential direction of the vertical section are respectively 0 degrees and 180 degrees, and the upper and lower sides are When the cross-sectional diameter of the existing product is 90 degrees and 270 degrees and is circular and the thickness from the outer peripheral surface to the inner peripheral surface is 1D, as shown in [Table 1] below, the thickness in the 0 degree direction (t) 0.071 to 0.197D, thickness t in 10 degree direction is 0.071 to 0.195D, thickness t in 20 degree direction is 0.070 to 0.191D, thickness t in 30 degree direction is 0.066 to 0.183D, 40 degree direction The thickness t is 0.062 to 0.171D, the thickness t in the 50 degree direction is 0.055 to 0.155D, the thickness t in the 60 degree direction is 0.041 to 0.136D and the thickness t in the 70 degree direction is 0.026 to 0.108D, the thickness t in the 75 degree direction is 0.016 to 0.048D, the thickness t in the 80 degree direction is 0.017 to 0.086D, and the thickness t in the 85 degree direction is 0.016 to 0.109D, the thickness in the 90 degree direction (t) is defined within 0.016 to 0.118D, each of 180 degrees in the 90 degrees, 180 degrees in the 90 degrees, 270 degrees in the 180 degrees, and 270 degrees to 0 degrees, respectively. The thickness t is preferably formed to have a thickness t corresponding to the thickness t of each angle in the 0 degree direction to the 90 degree direction.

Table 1 a (angle) t (thickness) Bound 0 0.134D 0.197-0.071D 10 0.133D 0.195-0.071D 20 0.129D 0.191-0.070D 30 0.123D 0.183-0.066D 40 0.114D 0.171 ~ 0.062D 50 0.101D 0.155 ~ 0.055D 60 0.086D 0.136-0.041D 70 0.063D 0.108 ~ 0.026D 75 0.048D 0.091-0.016D 80 0.034D 0.086-0.017D 85 0.025D 0.109 ~ 0.016D 90 0.059D 0.118-0.016D

More preferably, the thickness t in the 0 degree direction is 0.134D, the thickness t in the 10 degree direction is 0.133D, and the thickness t in the 20 degree direction is 0.129D, the thickness in the 30 degree direction ( t) is 0.123D, the thickness t in the 40 degree direction is 0.114D, the thickness t in the 50 degree direction is 0.101D, and the thickness t in the 60 degree direction is 0.086D, the thickness t in the 70 degree direction Is 0.063D, the thickness t in the 75 degree direction is 0.048D, the thickness t in the 80 degree direction is 0.034D, the thickness t in the 85 degree direction is 0.025D, and the thickness t in the 90 degree direction is 0.059 Can be D.

Next, when the protrusion 140 is not formed, that is, the non-protruding metal O-ring seal shape 100 will be described, FIG. 8A shows a constant shape of the optimized non-protruding metal O-ring seal 100. It is a simulation result (stress and strain distribution) obtained by compressing the displacement load, and FIG. 8B is simulation data measuring the state when the constant load is removed and restored, and the circle indicated by the solid line in FIGS. 8A and 8B is the load. The shape of this non-applied state shows the shape of the non-protrusion metal o-ring seal 100 optimized.

8C also shows This is a table comparing the existing load, the seating load, the plastic deformation, and the elastic energy between the non-protruding metal O-ring seals 100 according to the preferred embodiment of the present invention. .

As shown in FIGS. 8A to 8C and 9, the seating load value according to the compression / restore characteristic data of the existing product calculated by performing the elasto-plastic analysis is 427, whereas the optimized shape according to the preferred embodiment of the present invention. According to the compression / restoration characteristic data of the metal O-ring seal 100 of 420, the seating load value was 420, which showed almost similar repulsion force, and the plastic deformation value and the elastic restoring force value (elastic energy) of the conventional product were 0.86 and 85.3, The plastic deformation value and the elastic restoring force value (elastic energy) of the metal O-ring seal 100 according to the preferred embodiment of the present invention manufactured in the shape obtained through the compliant mechanism phase optimization and the shape optimization according to the preferred embodiment of the present invention 0.61 and 125.7, and the deviations of the data are 0.25 and 40.4, respectively, and the plastic deformation degree is 29% and the elastic restoring force (elastic energy) is improved by 32%. . In other words, it can be verified that the confidentiality performance and the service life can be greatly improved.

As such, the shape and size of the outer circumferential surface 120 of the non-protruding metal O-ring seal 100 according to the preferred embodiment of the present invention conforms to the existing standard, and in the circumferential direction of the vertical cross section at the outer circumferential surface 120. By adjusting the thickness t to the inner circumferential surface 130, optimized shape data can be obtained to minimize plastic deformation and maximize elastic resilience for each standard. Referring to FIG. 3, according to the optimized shape data, FIG. In the circumferential direction of the vertical section, the thickness (t) gradually becomes thinner toward the upper and lower sides along the circumference, and both sides of the vertical section in the circumferential direction are respectively 0 degrees and 180 degrees. The upper side and the lower side are 90 degrees and 270 degrees, respectively, and are formed in a circular shape, and when the cross-sectional diameter of the existing product having a constant thickness from the outer circumferential surface to the inner circumferential surface is 1D, 0.071 to 0.197D, The thickness (t) is 0.071 to 0.195D, the thickness t in the 20 degree direction is 0.070 to 0.191D, the thickness t in the 30 degree direction is 0.066 to 0.183D, and the thickness t in the 40 degree direction is 0.062 to 0.171 D, the thickness t in the 50 degree direction is 0.055 to 0.155D, the thickness t in the 60 degree direction is 0.041 to 0.136D, and the thickness t in the 70 degree direction is 0.026 to 0.108D, the thickness in the 75 degree direction ( t) is 0.016 to 0.048D, the thickness t in the 80 degree direction is 0.017 to 0.086D, the thickness t in the 85 degree direction is 0.016 to 0.109D, and the thickness t in the 90 degree direction is 0.016 to 0.118D The thickness t of each of the angle from 90 degrees to 180 degrees, the 270 degrees to 270 degrees, and from 270 to 0 degrees is determined by It is preferable that it is formed with the thickness t corresponding to (t).

More preferably, the thickness t in the 0 degree direction is 0.134D, the thickness t in the 10 degree direction is 0.133D, and the thickness t in the 20 degree direction is 0.129D, the thickness in the 30 degree direction ( t) is 0.123D, the thickness t in the 40 degree direction is 0.114D, the thickness t in the 50 degree direction is 0.101D, and the thickness t in the 60 degree direction is 0.086D, the thickness t in the 70 degree direction 0.063D, thickness t in the 75 degree direction is 0.048D, thickness t in the 80 degree direction is 0.034D, thickness t in the 85 degree direction is 0.025D, thickness t in the 90 degree direction is 0.025 Can be D.

On the other hand, the metal O-ring seal 100 according to a preferred embodiment of the present invention is made of any one metal material of stainless steel, Inconel, Inconel X, Carbon steel, Aluminum, Monel, Copper, Tantalum, or SS304 , SS316, SS321, SS347, Alloy600, Alloy718, AlloyX-750 or Monel 400 may be made of any one metal material. That is, the metal o-ring seal 100 according to the preferred embodiment of the present invention can be applied to the metal o-ring seal of the outer circumference.

By the configuration and function of the metal O-ring seal 100 according to the preferred embodiment of the present invention as described above, by optimizing the shape to increase the flexibility of the structure, the plastic deformation is minimized compared to the existing product and the elastic restoring force is remarkable As a result, the life time and the airtight performance are excellent.

In addition, since the structure is relatively simple, it can be manufactured by a method similar to the existing production method, and the frequent replacement of the metal o-ring seal is required, as well as the life time is relatively increased, so the regular replacement cycle of the metal o-ring seal is performed. Of course, the shape and size of the outer circumferential surface 120 of the metal O-ring seal 100 follows the existing standard, the inner circumferential surface by adjusting the thickness of the inner circumferential surface 130 irrelevant to the existing standard ( Since the shape of 130) is provided in an optimized structure, there is an advantage that it can be used universally in various fields.

As described above, although the present invention has been described by way of limited embodiments and drawings, the present invention is not limited thereto and is intended by those skilled in the art to which the present invention pertains. Of course, various modifications and variations are possible within the scope of equivalents of the claims to be described.

Claims (9)

The shape and size of the outer circumferential surface 120 is formed in the shape of a circular ring having a through-hole 110 formed therein, according to the existing standard, the thickness from the outer circumferential surface 120 to the inner circumferential surface 130 in the circumferential direction of the vertical section ( In the metal o-ring seal that adjusts t) to increase elastic restoring force, The metal O-ring seal, characterized in that the thickness (t) gradually becomes thinner toward the upper and lower sides along the circumference at both sides in the circumferential direction of the vertical section. The method of claim 1, The upper and lower inner circumferential surface 130 has a metal ring formed with grooves 141 formed on both sides of the protrusion 140 while the protrusions 140 protruded toward the center C of the vertical section. The method according to claim 1 or 2, In the circumferential direction of the vertical cross-section, the thickness t gradually becomes thinner toward the upper and lower sides along the circumference, Both sides of the vertical section in the circumferential direction are 0 degrees and 180 degrees, respectively, and the upper and lower sides are 90 and 270 degrees, respectively, and are formed in a circular shape, and the cross-sectional diameter of the existing product having a constant thickness from the outer circumferential surface to the inner circumferential surface is 1D. In this case, the thickness t in the 0 degree direction is 0.071 to 0.197 D, the thickness t in the 10 degree direction is 0.071 to 0.195 D, and the thickness t in the 20 degree direction is 0.070 to 0.191 D and 30 degrees. The thickness t is 0.066 to 0.183 D, the thickness t in the 40 degree direction is 0.062 to 0.171 D, the thickness t in the 50 degree direction is 0.055 to 0.155 D, and the thickness t in the 60 degree direction is 0.041 to 0.136. D, the thickness t in the 70-degree direction is 0.026 to 0.108D, the thickness t in the 80-degree direction is 0.017 to 0.086D, and the thickness t in the 90-degree direction is determined within 0.016 to 0.118D. The thickness t of 180 degrees in the direction of directions, 270 degrees in the direction of 180 degrees, and 270 degrees to 0 degrees, respectively, is in the directions of 0 degrees to 90 degrees. A metal O-ring seal formed with a thickness t corresponding to the thickness t. The method of claim 3, In addition, the thickness t in the 75-degree direction is determined to be 0.016 to 0.091D, and the thickness t in the 85-degree direction is set to 0.016 to 0.109D. Thus, the upper and lower inner circumferential surfaces 130 of the vertical section A metal o-ring seal, characterized in that the grooves 141 are formed on both sides of the protrusions 140 while the protrusions 140 are raised in the center (C) direction. The method of claim 4, wherein The thickness (t) of the 75 degree direction is 0.048D, the thickness (t) of the 85 degree direction is a metal O-ring seal, characterized in that 0.025D. The method of claim 5, The thickness t in the 0 degree direction is 0.134D, the thickness t in the 10 degree direction is 0.133D, the thickness t in the 20 degree direction is 0.129D, and the thickness t in the 30 degree direction is 0.123D, 40 The thickness t of the degree direction is 0.114D, the thickness t of the 50 degree direction is 0.101D, the thickness t of the 60 degree direction is 0.086D, and the thickness t of the 70 degree direction is 0.063D, the 80 degree direction The thickness (t) is 0.034D, the thickness of the 90 ° direction (t) is a metal O-ring seal, characterized in that 0.059D. The method of claim 6, When the protrusion 140 is not formed, the metal o-ring seal, wherein the thickness in the 90-degree direction is the same as the thickness of 0.025D in the 85-degree direction. The method of claim 5, The metal o-ring seal, Metal O-ring seal, characterized in that made of any one metal material of stainless steel, Inconel, Inconel X, Carbon steel, Aluminum, Monel, Copper, Tantalum.  The method of claim 5, The metal o-ring seal, Metal O-ring seal, characterized in that made of any one of the metal material of SS304, SS316, SS321, SS347, Alloy600, Alloy718, AlloyX-750 or Monel 400.

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