WO2013089148A1 - 高分子圧電材料、およびその製造方法 - Google Patents
高分子圧電材料、およびその製造方法 Download PDFInfo
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/85—Piezoelectric or electrostrictive active materials
- H10N30/857—Macromolecular compositions
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C35/00—Heating, cooling or curing, e.g. crosslinking or vulcanising; Apparatus therefor
- B29C35/02—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C55/00—Shaping by stretching, e.g. drawing through a die; Apparatus therefor
- B29C55/005—Shaping by stretching, e.g. drawing through a die; Apparatus therefor characterised by the choice of materials
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C55/00—Shaping by stretching, e.g. drawing through a die; Apparatus therefor
- B29C55/02—Shaping by stretching, e.g. drawing through a die; Apparatus therefor of plates or sheets
- B29C55/10—Shaping by stretching, e.g. drawing through a die; Apparatus therefor of plates or sheets multiaxial
- B29C55/12—Shaping by stretching, e.g. drawing through a die; Apparatus therefor of plates or sheets multiaxial biaxial
- B29C55/16—Shaping by stretching, e.g. drawing through a die; Apparatus therefor of plates or sheets multiaxial biaxial simultaneously
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C71/00—After-treatment of articles without altering their shape; Apparatus therefor
- B29C71/02—Thermal after-treatment
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G63/00—Macromolecular compounds obtained by reactions forming a carboxylic ester link in the main chain of the macromolecule
- C08G63/02—Polyesters derived from hydroxycarboxylic acids or from polycarboxylic acids and polyhydroxy compounds
- C08G63/06—Polyesters derived from hydroxycarboxylic acids or from polycarboxylic acids and polyhydroxy compounds derived from hydroxycarboxylic acids
- C08G63/08—Lactones or lactides
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/09—Forming piezoelectric or electrostrictive materials
- H10N30/098—Forming organic materials
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C71/00—After-treatment of articles without altering their shape; Apparatus therefor
- B29C71/02—Thermal after-treatment
- B29C2071/022—Annealing
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29K—INDEXING SCHEME ASSOCIATED WITH SUBCLASSES B29B, B29C OR B29D, RELATING TO MOULDING MATERIALS OR TO MATERIALS FOR MOULDS, REINFORCEMENTS, FILLERS OR PREFORMED PARTS, e.g. INSERTS
- B29K2067/00—Use of polyesters or derivatives thereof, as moulding material
- B29K2067/04—Polyesters derived from hydroxycarboxylic acids
- B29K2067/046—PLA, i.e. polylactic acid or polylactide
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29K—INDEXING SCHEME ASSOCIATED WITH SUBCLASSES B29B, B29C OR B29D, RELATING TO MOULDING MATERIALS OR TO MATERIALS FOR MOULDS, REINFORCEMENTS, FILLERS OR PREFORMED PARTS, e.g. INSERTS
- B29K2995/00—Properties of moulding materials, reinforcements, fillers, preformed parts or moulds
- B29K2995/0003—Properties of moulding materials, reinforcements, fillers, preformed parts or moulds having particular electrical or magnetic properties, e.g. piezoelectric
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29K—INDEXING SCHEME ASSOCIATED WITH SUBCLASSES B29B, B29C OR B29D, RELATING TO MOULDING MATERIALS OR TO MATERIALS FOR MOULDS, REINFORCEMENTS, FILLERS OR PREFORMED PARTS, e.g. INSERTS
- B29K2995/00—Properties of moulding materials, reinforcements, fillers, preformed parts or moulds
- B29K2995/0037—Other properties
- B29K2995/0039—Amorphous
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29K—INDEXING SCHEME ASSOCIATED WITH SUBCLASSES B29B, B29C OR B29D, RELATING TO MOULDING MATERIALS OR TO MATERIALS FOR MOULDS, REINFORCEMENTS, FILLERS OR PREFORMED PARTS, e.g. INSERTS
- B29K2995/00—Properties of moulding materials, reinforcements, fillers, preformed parts or moulds
- B29K2995/0037—Other properties
- B29K2995/004—Semi-crystalline
Definitions
- the present invention relates to a polymer piezoelectric material and a method for producing the same.
- PZT PBZrO 3 —PbTiO 3 -based solid solution
- PZT contains lead
- a piezoelectric material a polymer piezoelectric material having a low environmental load and high flexibility is being used.
- polymer piezoelectric materials are mainly classified into the following two types.
- a Pauling type polymer represented by nylon 11, polyvinyl fluoride, polyvinyl chloride, polyurea, etc., a polyvinylidene fluoride ( ⁇ type) (PVDF), a vinylidene fluoride-trifluoroethylene copolymer (P ( VDF-TrFE)) (75/25) and the like.
- PVDF polyvinylidene fluoride
- PVDF-TrFE vinylidene fluoride-trifluoroethylene copolymer
- polymeric piezoelectric materials are not as good as PZT in piezoelectricity, and improvement in piezoelectricity is required. For this reason, attempts have been made to improve the piezoelectricity of the polymeric piezoelectric material from various viewpoints.
- the ferroelectric polymers PVDF and P have excellent piezoelectricity among the polymers, and the piezoelectric constant d 31 is 20 pC / N or more.
- the film material formed from PVDF and P (VDF-TrFE) by orienting polymer chains in the stretching direction by stretching operation, and then applying different charges on the front and back of the film by corona discharge, An electric field is generated in the direction perpendicular to the film surface, and permanent dipoles containing fluorine in the side chains of the polymer chain are oriented parallel to the electric field direction to impart piezoelectricity.
- PVDF is the most piezoelectric material among the above polymer piezoelectric materials, but the dielectric constant is relatively high among the polymer piezoelectric materials and is 13. Therefore, the piezoelectric d constant is divided by the dielectric constant. The value of the piezoelectric g constant (open voltage per unit stress) becomes small. Moreover, although PVDF has good conversion efficiency from electricity to sound, improvement in the conversion efficiency from sound to electricity has been expected.
- polymers having optical activity such as polypeptides and polylactic acid
- polylactic acid polymers exhibit piezoelectricity only by mechanical stretching operation.
- polylactic acid has a small volume fraction of side chains with respect to the main chain and a large ratio of permanent dipoles per volume, and can be said to be an ideal polymer among the polymers having helical chirality.
- polylactic acid that exhibits piezoelectricity only by stretching treatment does not require poling treatment and the piezoelectricity does not decrease over several years.
- polylactic acid has various piezoelectric characteristics
- polymer piezoelectric materials using various polylactic acids have been reported.
- a polymer piezoelectric material that exhibits a piezoelectric constant of about 10 pC / N at room temperature by stretching a molded product of polylactic acid has been disclosed (see, for example, JP-A-5-152638).
- high piezoelectricity of about 18 pC / N is produced by a special orientation method called forging (see, for example, JP-A-2005-213376). .
- the piezoelectric material (film) disclosed in the above Japanese Patent Laid-Open Nos. 5-152638 and 2005-213376 is produced mainly by stretching in a uniaxial direction, it is easily split in a direction parallel to the stretching direction. There was a problem that the tear strength in a specific direction was low. Hereinafter, the tear strength in a specific direction is also referred to as “longitudinal tear strength”.
- the piezoelectric materials disclosed in Japanese Patent Laid-Open Nos. 5-152638 and 2005-213376 are insufficient in transparency.
- the piezoelectric constant d 14 is large, excellent transparency, lowering of the vertical tear strength is an object to provide a polymeric piezoelectric material is suppressed and a manufacturing method thereof.
- a helical chiral polymer having optical activity with a weight average molecular weight of 50,000 to 1,000,000, crystallinity obtained by DSC method of 20% to 80%, and microwave transmission molecular orientation A polymer piezoelectric material, wherein the product of the normalized molecular orientation MORc and the crystallinity is 25 to 250 when the reference thickness measured by the meter is 50 ⁇ m.
- [10] A method for producing the piezoelectric polymer material according to any one of [1] to [9], wherein the amorphous crystalline sheet containing the helical chiral polymer is heated to pre-crystallize the sheet And a second step of simultaneously stretching the pre-crystallized sheet in the biaxial direction.
- the amorphous sheet is heated at a temperature T represented by the following formula until the crystallinity becomes 1% to 70%.
- Tg represents the glass transition temperature of the helical chiral polymer.
- an amorphous sheet containing polylactic acid as the helical chiral polymer is heated at 20 ° C. to 170 ° C. for 5 seconds to 60 minutes.
- the manufacturing method of the polymeric piezoelectric material as described in [11].
- large piezoelectric constant d 14 is excellent in transparency, longitudinal tear strength polymeric piezoelectric material decrease is suppressed in and a manufacturing method thereof can be provided.
- the polymeric piezoelectric material of the present invention includes an optically active helical chiral polymer (hereinafter also referred to as “optically active polymer”) having a weight average molecular weight of 50,000 to 1,000,000, and is crystallized by a DSC method.
- the product of the normalized molecular orientation MORc and the crystallinity is 25 to 250 when the degree is 20% to 80% and the reference thickness measured by the microwave transmission type molecular orientation meter is 50 ⁇ m. is there.
- the piezoelectric material by the above structure large piezoelectric constant d 14 is excellent in transparency, longitudinal tear strength can be a polymeric piezoelectric material decrease is suppressed in the (tear strength of the specific direction).
- a high piezoelectricity is achieved by setting the crystallinity in the range of 20% to 80% and setting the product of the MORc and the crystallinity to 25 to 250. While maintaining the property (large piezoelectric constant d 14 ) and high transparency, it is possible to suppress a phenomenon in which the longitudinal crack strength (the tear strength in a specific direction) decreases.
- a decrease in tear strength in a specific direction is sometimes referred to as “longitudinal tear strength decreases”, and a state in which the tear strength in a specific direction is low is referred to as “longitudinal tear strength is low”
- the phenomenon in which the tear strength in a specific direction is suppressed is sometimes referred to as “longitudinal tear strength is improved”, and the phenomenon in which the tear strength in a specific direction is decreased
- the suppressed state is sometimes referred to as “high longitudinal crack strength” or “excellent longitudinal crack strength”.
- the “piezoelectric constant d 14 ” is one of the tensors of the piezoelectric constant, and is based on the degree of polarization generated in the direction of the shear stress when a shear stress is applied in the direction of the stretching axis of the stretched material. Ask. Specifically, the generated charge density per unit shear stress is defined as d 14. Numerical piezoelectric constant d 14 indicating that piezoelectricity is higher the larger. In the present specification, when simply referred to as “piezoelectric constant”, it means “piezoelectric constant d 14 ”.
- the piezoelectric constant d 14 is the value calculated by the following method. That is, a rectangular film having a longitudinal direction at an angle of 45 ° with respect to the stretching direction is used as a test piece. An electrode layer is provided on the entire front and back of the main surface of the test piece, and when an applied voltage E (V) is applied to the electrode, the amount of strain in the longitudinal direction of the film is X. The value obtained by dividing the applied voltage E (V) by the film thickness t (m) is the electric field strength E (V / m), and the amount of strain in the longitudinal direction of the film when E (V) is applied is X. , d 14 is the value defined by 2 ⁇ strain amount X / field strength E (V / m).
- the piezoelectric constant d 14 includes one measured by a displacement method (unit: pm / V) and one measured by a resonance method (unit: pC / N).
- the helical chiral polymer having optical activity refers to a polymer having molecular optical activity in which the molecular structure is a helical structure.
- the helical chiral polymer having optical activity having a weight average molecular weight of 50,000 to 1,000,000 is also referred to as “optically active polymer”.
- the optically active polymer include polypeptides, cellulose, cellulose derivatives, polylactic acid resins, polypropylene oxide, poly ( ⁇ -hydroxybutyric acid), and the like.
- the polypeptide include poly (glutarate ⁇ -benzyl), poly (glutarate ⁇ -methyl) and the like.
- the cellulose derivative include cellulose acetate and cyanoethyl cellulose.
- the optically active polymer preferably has an optical purity of 95.00% ee or higher, more preferably 99.00% ee or higher, from the viewpoint of improving the piezoelectricity of the polymeric piezoelectric material. More preferably, it is% ee or more. Desirably, it is 100.00% ee.
- the optical purity of the optically active polymer is a value calculated by the following formula.
- Optical purity (% ee) 100 ⁇
- Optical purity (% ee) 100 ⁇
- the value obtained by the method using a high performance liquid chromatography is used for the quantity [mass%] of the L form of an optically active polymer and the quantity [mass%] of the D form of an optically active polymer. Details of the specific measurement will be described later.
- a compound having a main chain containing a repeating unit represented by the following formula (1) is preferable from the viewpoint of increasing optical purity and improving piezoelectricity.
- Examples of the compound having the repeating unit represented by the formula (1) as a main chain include polylactic acid resins. Among them, polylactic acid is preferable, and L-lactic acid homopolymer (PLLA) or D-lactic acid homopolymer (PDLA) is most preferable.
- polylactic acid is preferable, and L-lactic acid homopolymer (PLLA) or D-lactic acid homopolymer (PDLA) is most preferable.
- PLLA L-lactic acid homopolymer
- PDLA D-lactic acid homopolymer
- the polylactic acid resin refers to “polylactic acid”, “copolymer of L-lactic acid or D-lactic acid and a copolymerizable polyfunctional compound”, or a mixture of both.
- the above-mentioned “polylactic acid” is a polymer in which lactic acid is polymerized by an ester bond and is connected for a long time, a lactide method via lactide, and a direct polymerization method in which lactic acid is heated in a solvent under reduced pressure and polymerized while removing water It is known that it can be manufactured by, for example.
- polylactic acid examples include L-lactic acid homopolymers, D-lactic acid homopolymers, block copolymers containing at least one polymer of L-lactic acid and D-lactic acid, and L-lactic acid and D-lactic acid.
- examples include graft copolymers containing at least one polymer.
- Examples of the “copolymerizable polyfunctional compound” include glycolic acid, dimethyl glycolic acid, 3-hydroxybutyric acid, 4-hydroxybutyric acid, 2-hydroxypropanoic acid, 3-hydroxypropanoic acid, 2-hydroxyvaleric acid, 3 -Hydroxyvaleric acid, 4-hydroxyvaleric acid, 5-hydroxyvaleric acid, 2-hydroxycaproic acid, 3-hydroxycaproic acid, 4-hydroxycaproic acid, 5-hydroxycaproic acid, 6-hydroxycaproic acid, 6-hydroxy Hydroxycarboxylic acids such as methylcaproic acid and mandelic acid, glycolides, cyclic esters such as ⁇ -methyl- ⁇ -valerolactone, ⁇ -valerolactone and ⁇ -caprolactone, oxalic acid, malonic acid, succinic acid, glutaric acid, adipic acid , Pimelic acid, azelaic acid, sebacic acid, undecanedioic acid, Polyvalent carboxylic acids such as decaned
- the “copolymer of L-lactic acid or D-lactic acid and a copolymerizable polyfunctional compound” includes a block copolymer or a graft copolymer having a polylactic acid sequence capable of forming a helical crystal.
- the concentration of the structure derived from the copolymer component in the optically active polymer is preferably 20 mol% or less.
- the optically active polymer is a polylactic acid polymer
- the number of moles of the structure derived from lactic acid in the polylactic acid polymer and the structure derived from a compound copolymerizable with lactic acid (copolymer component) It is preferable that the copolymer component is 20 mol% or less based on the total.
- the optically active polymer (for example, polylactic acid resin) is obtained by, for example, a method obtained by directly dehydrating and condensing lactic acid described in JP-A-59-096123 and JP-A-7-033861. It can be produced by a ring-opening polymerization method using lactide, which is a cyclic dimer of lactic acid, described in Patents 2,668,182 and 4,057,357.
- the optically active polymer for example, polylactic acid-based resin
- the optically active polymer obtained by each of the above production methods has an optical purity of 95.00% ee or more, for example, when polylactic acid is produced by the lactide method, It is preferable to polymerize lactide whose optical purity is improved to 95.00% ee or higher by crystallization operation.
- the optically active polymer according to this embodiment has a weight average molecular weight (Mw) of 50,000 to 1,000,000.
- Mw weight average molecular weight
- the lower limit of the weight average molecular weight of the optically active polymer is preferably 100,000 or more, and more preferably 150,000 or more.
- the upper limit of the weight average molecular weight of the optically active polymer exceeds 1,000,000, it becomes difficult to mold the optically active polymer (for example, to form a film shape by extrusion molding or the like).
- the upper limit of the weight average molecular weight is preferably 800,000 or less, and more preferably 300,000 or less.
- the molecular weight distribution (Mw / Mn) of the optically active polymer is preferably 1.1 to 5, more preferably 1.2 to 4, from the viewpoint of the strength of the polymeric piezoelectric material. Further, it is preferably 1.4 to 3.
- the weight average molecular weight Mw and molecular weight distribution (Mw / Mn) of the polylactic acid polymer are measured by gel permeation chromatography (GPC) by the following GPC measurement method.
- -GPC measuring device Waters GPC-100 -column- Made by Showa Denko KK, Shodex LF-804 -Sample preparation-
- a polylactic acid polymer is dissolved in a solvent (for example, chloroform) at 40 ° C. to prepare a sample solution having a concentration of 1 mg / ml.
- a solvent for example, chloroform
- -Measurement condition 0.1 ml of the sample solution is introduced into the column at a solvent [chloroform], a temperature of 40 ° C., and a flow rate of 1 ml / min.
- polylactic acid polymer commercially available polylactic acid may be used.
- examples of commercially available polylactic acid include PURASORB (PD, PL) manufactured by PURAC, LACEA (H-100, H-400) manufactured by Mitsui Chemicals, Ingeo 4032D, 4043D manufactured by NatureWorks, and the like.
- the optically active polymer When a polylactic acid resin is used as the optically active polymer, the optically active polymer should be produced by the lactide method or the direct polymerization method in order to increase the weight average molecular weight (Mw) of the polylactic acid resin to 50,000 or more. Is preferred.
- the polymeric piezoelectric material according to this embodiment may contain only one kind of the optically active polymer described above, or may contain two or more kinds.
- the content of the optically active polymer (the total content when there are two or more types; the same shall apply hereinafter) is not particularly limited, but is within the total mass of the polymeric piezoelectric material. It is preferable that it is 80 mass% or more. When the content is 80% by mass or more, the piezoelectric constant tends to be larger.
- the polymer piezoelectric material of the present embodiment is a known component represented by other components (for example, polyvinylidene fluoride, polyethylene resin, and polystyrene resin) other than the optically active polymer described above, as long as the effects of the present embodiment are not impaired. Or a known crystal nucleating agent such as phthalocyanine, or the like, or a silica, hydroxyapatite, montmorillonite, or the like. Moreover, it is preferable that the polymeric piezoelectric material of this embodiment contains stabilizers, such as a carbodiimide compound represented by the carbodilite (trademark) from a viewpoint of suppressing the structural change by hydrolysis etc. more.
- stabilizers such as a carbodiimide compound represented by the carbodilite (trademark) from a viewpoint of suppressing the structural change by hydrolysis etc. more.
- the polymeric piezoelectric material of the present embodiment has the above-mentioned optically active polymer (that is, an optical activity having a weight average molecular weight (Mw) of 50,000 to 1,000,000) as long as the effects of the present embodiment are not impaired.
- optically active polymer that is, an optical activity having a weight average molecular weight (Mw) of 50,000 to 1,000,000
- Mw weight average molecular weight
- a helical chiral polymer other than the helical chiral polymer may be included.
- the polymeric piezoelectric material of this embodiment may contain at least one inorganic filler.
- an inorganic filler such as hydroxyapatite may be nano-dispersed in the polymer piezoelectric material in order to make the polymer piezoelectric material a transparent film in which the generation of voids such as bubbles is suppressed.
- voids such as bubbles
- the content of the inorganic filler with respect to the total mass of the polymeric piezoelectric material is preferably less than 1% by mass.
- the content of the component other than the optically active polymer is preferably 20% by mass or less based on the total mass of the polymer piezoelectric material. More preferably, it is 10 mass% or less.
- the polymeric piezoelectric material of the present embodiment may contain at least one crystallization accelerator (crystal nucleating agent).
- the crystal accelerator (crystal nucleator) is not particularly limited as long as the effect of promoting crystallization is recognized, but is a substance having a crystal structure having a face spacing close to the face spacing of the crystal lattice of the optically active polymer. It is desirable to select. This is because a substance with a close spacing is more effective as a nucleating agent.
- the organic substances zinc phenylsulfonate, melamine polyphosphate, melamine cyanurate, zinc phenylphosphonate, calcium phenylphosphonate, magnesium phenylphosphonate, inorganic Examples thereof include talc and clay.
- zinc phenylphosphonate is most preferable because the face spacing is most similar to the face spacing of polylactic acid and provides a good crystal formation promoting effect.
- the commercially available crystal accelerator can be used. Specific examples include zinc phenylphosphonate; Eco Promote (manufactured by Nissan Chemical Industries, Ltd.) and the like.
- the content of the crystal nucleating agent is usually 0.01 to 1.0 part by weight, preferably 0.01 to 0.5 part by weight, based on 100 parts by weight of the optically active polymer. From the viewpoint of maintenance, it is particularly preferably 0.02 to 0.2 parts by weight. When the content of the crystal nucleating agent is 0.01 parts by weight or more, the effect of promoting crystallization can be obtained more effectively. When the content of the crystal nucleating agent is less than 1.0 part by weight, the crystallization rate can be more easily controlled.
- a polymeric piezoelectric material does not contain components other than the helical chiral polymer which has optical activity from a viewpoint of transparency.
- the optically active polymer is oriented.
- the molecular orientation degree MOR Molecular Orientation Ratio
- the microwave measurement method That is, the sample surface (film surface) is placed in a microwave resonant waveguide of a well-known microwave molecular orientation measuring apparatus (also referred to as a microwave transmission type molecular orientation meter) in the microwave traveling direction. ) To be vertical.
- the sample is rotated 0 to 360 ° in a plane perpendicular to the traveling direction of the microwave, and the microwave transmitted through the sample is transmitted.
- the degree of molecular orientation MOR is determined by measuring the strength.
- the normalized molecular orientation MORc can be measured with a known molecular orientation meter such as a microwave molecular orientation meter MOA-2012A or MOA-6000 manufactured by Oji Scientific Instruments Co., Ltd. at a resonance frequency near 4 GHz or 12 GHz.
- the normalized molecular orientation MORc can be controlled by crystallization conditions (for example, heating temperature and heating time) and stretching conditions (for example, stretching temperature and stretching speed) at the time of producing the polymeric piezoelectric material.
- the normalized molecular orientation MORc can be converted into a birefringence ⁇ n obtained by dividing the retardation amount (retardation) by the thickness of the film. Specifically, retardation can be measured using RETS100 manufactured by Otsuka Electronics Co., Ltd. MORc and ⁇ n are approximately in a linear proportional relationship, and when ⁇ n is 0, MORc is 1.
- the piezoelectric constant is increased (piezoelectric constant d 14 measured by a displacement method at 25 ° C. is preferably 1 Pm/V or more), excellent transparency, longitudinal tear strength.
- the piezoelectric constant of the polymeric piezoelectric material is a value measured as follows. First, the polymeric piezoelectric material is cut at 40 mm in the stretching direction (MD direction) and 40 mm in the direction orthogonal to the stretching direction (TD direction) to produce a rectangular test piece. Next, the obtained test piece is set on a test stand of a sputtering thin film forming apparatus JSP-8000 manufactured by ULVAC, and the coater chamber is evacuated (for example, 10 ⁇ 3 Pa or less) by a rotary pump.
- test piece is sputtering performed on one surface of the test piece for 500 seconds on an Ag (silver) target under the conditions of an applied voltage of 280 V and a sputtering current of 0.4 A).
- Ag silver
- the other surface of the test piece is sputtered for 500 seconds under the same conditions to coat Ag on both sides of the test piece to form an Ag conductive layer.
- a 40 mm ⁇ 40 mm test piece (polymer piezoelectric material) having an Ag conductive layer formed on both sides is formed in a direction of 45 mm and a direction of 45 ° with respect to the stretching direction (MD direction) of the polymer piezoelectric material. Cut to 5 mm in an orthogonal direction, and cut out a rectangular film of 32 mm ⁇ 5 mm. This is a piezoelectric constant measurement sample.
- the upper limit of the piezoelectric constant is not particularly limited, but from the viewpoint of balance such as transparency described later, the piezoelectric material using the helical chiral polymer is preferably 50 pm / V or less, and more preferably 30 pm / V or less. From the viewpoint of the balance with similarly transparency is preferably a piezoelectric constant d 14 measured by a resonance method is not more than 15pC / N.
- the “MD direction” is a direction in which the film flows (Machine Direction)
- the “TD direction” is a direction perpendicular to the MD direction and parallel to the main surface of the film (Transverse Direction). ).
- the crystallinity of the polymer piezoelectric material is determined by the DSC method.
- the crystallinity of the polymer piezoelectric material of the present embodiment is 20% to 80%, preferably 30% to 70%.
- the crystallinity is within the above range, the piezoelectricity, transparency, and longitudinal tear strength of the polymeric piezoelectric material are well balanced, and when the polymeric piezoelectric material is stretched, whitening and breakage are unlikely to occur and it is easy to manufacture.
- the crystallinity is less than 20%, the piezoelectricity tends to decrease.
- the crystallinity exceeds 80%, the longitudinal crack strength and transparency tend to decrease.
- the crystallinity is more preferably 40.8% or less, and particularly preferably 40.0% or less, from the viewpoint of further improving the longitudinal crack strength and transparency.
- the crystallinity of the polymer piezoelectric material can be adjusted in the range of 20% to 80% by adjusting the crystallization and stretching conditions when manufacturing the polymer piezoelectric material. .
- the transparency of the polymeric piezoelectric material can be evaluated, for example, by visual observation or haze measurement.
- the polymeric piezoelectric material preferably has an internal haze with respect to visible light of 40% or less.
- the internal haze is applied to a polymeric piezoelectric material having a thickness of 0.03 mm to 0.05 mm in accordance with JIS-K7105 using a haze measuring machine [TC Density Co., Ltd., TC-HIII DPK]. It is a value when it is used and measured at 25 ° C., and details of the measuring method will be described in detail in Examples.
- the internal haze of the polymeric piezoelectric material is more preferably 20% or less, and further preferably 5% or less. Further, the internal haze of the polymeric piezoelectric material is preferably 2.0% or less, and particularly preferably 1.0% or less, from the viewpoint of further improving the longitudinal crack strength. Further, the lower the internal haze of the polymeric piezoelectric material, the better. However, from the viewpoint of balance with the piezoelectric constant, etc., it is preferably 0.0% to 40%, preferably 0.01% to 20%. Is more preferable, 0.01% to 5% is more preferable, 0.01% to 2.0% is further preferable, and 0.01% to 1.0% is particularly preferable.
- internal haze refers to the internal haze of the polymeric piezoelectric material of the present invention.
- the internal haze is haze excluding haze due to the shape of the outer surface of the polymeric piezoelectric material, as will be described later in Examples.
- the normalized molecular orientation MORc is preferably 1.0 to 15.0, and more preferably 4.0 to 10.0. If the normalized molecular orientation MORc is 1.0 or more, there are many optically active polymer molecular chains (for example, polylactic acid molecular chains) arranged in the stretching direction, and as a result, the rate of formation of oriented crystals increases. High piezoelectricity can be expressed. If the normalized molecular orientation MORc is 15.0 or less, the longitudinal crack strength is further improved.
- the product of the crystallinity of the polymeric piezoelectric material and the normalized molecular orientation MORc is 25 to 250.
- a decrease in longitudinal tear strength that is, tear strength in a specific direction
- the product of the crystallinity of the polymeric piezoelectric material and the normalized molecular orientation MORc is less than 25, the piezoelectricity tends to decrease.
- the product of the crystallinity of the polymeric piezoelectric material and the normalized molecular orientation MORc exceeds 250, the longitudinal crack strength and transparency tend to decrease.
- the product of the crystallinity and MORc is more preferably 50 to 200, and more preferably 100 to 190.
- the product of the crystallinity of the polymeric piezoelectric material and the normalized molecular orientation MORc is 25 to 250. Can be adjusted to the range.
- the longitudinal tear strength of the polymeric piezoelectric material of the present embodiment is measured according to the test method “right angle tear method” described in “Tear Strength of Plastic Film and Sheet” of JIS K 7128-3. It is evaluated based on strength.
- T represents the tear strength (N / mm)
- F represents the maximum tear load
- d represents the thickness (mm) of the test piece.
- the piezoelectric polymer material has a low dimensional change rate at a temperature under heating, particularly in an environment in which it is incorporated and used in a device or device such as a speaker or a touch panel described later. This is because if the dimensions of the piezoelectric material change in the environment of use of the device or the like, the position of the wiring or the like connected to the piezoelectric material may be moved to cause malfunction of the device or the like.
- the dimensional stability of the polymeric piezoelectric material is evaluated by the dimensional change rate before and after being treated for 10 minutes at 150 ° C., which is a temperature slightly higher than the usage environment of the device.
- the dimensional change rate is preferably 10% or less, and more preferably 5% or less.
- the crystallinity can be adjusted to 20% to 80%, and the product of the normalized molecular orientation MORc and the crystallinity can be adjusted to 25 to 250.
- this method for example, crystallization and stretching (any of which may be the first) are performed on an amorphous sheet containing the optically active polymer described above, and the crystallization and stretching Adjusting the crystallinity to 20% to 80% and adjusting the product of the normalized molecular orientation MORc and the crystallinity to 25 to 250.
- crystallization and stretching is a concept including preliminary crystallization described later and annealing treatment described later.
- the non-crystalline sheet refers to a sheet obtained by heating an optically active polymer alone or a mixture containing an optically active polymer to a temperature equal to or higher than the melting point Tm of the optically active polymer and then rapidly cooling it.
- An example of the rapid cooling temperature is 50 ° C.
- the optically active polymer such as polylactic acid polymer
- the optically active polymer is used alone as a raw material for the polymeric piezoelectric material (or amorphous sheet).
- a mixture of two or more of the optically active polymers described above such as polylactic acid polymers
- a mixture of at least one of the optically active polymers described above and at least one of the other components. May be used.
- the above mixture is preferably a mixture obtained by melt kneading.
- optically active polymers to be mixed are mixed with a melt kneader (manufactured by Toyo Seiki Co., Ltd., Laboplast Mixer) under conditions of mixer rotation speed 30 rpm to 70 rpm, 180 ° C. to 250 ° C.
- a melt kneader manufactured by Toyo Seiki Co., Ltd., Laboplast Mixer
- mixer rotation speed 30 rpm to 70 rpm 180 ° C. to 250 ° C.
- the first embodiment of the method for producing a piezoelectric polymer material of the present invention includes, for example, an optically active polymer (that is, a helical chiral polymer having optical activity having a weight average molecular weight of 50,000 to 1,000,000).
- the pre-crystallized sheet is stretched, thereby The stretching force can be efficiently applied to the polymer portion having low crystallinity between the microcrystals in the crystallized sheet.
- the optically active polymer can be efficiently oriented in the main stretching direction. Specifically, by stretching the pre-crystallized sheet, finely oriented crystals are formed in the polymer portion having low crystallinity between the microcrystals and at the same time generated by pre-crystallization.
- the spherulites are broken, and the lamellar crystals constituting the spherulites are oriented in the stretching direction in a daisy chain connected to the tie molecular chain.
- a desired value of MORc can be obtained.
- stretching the said precrystallized sheet a sheet
- a polymer piezoelectric material having excellent dimensional stability can be obtained by adjusting the manufacturing conditions.
- the polymer chains in the low-crystallinity portion inside the pre-crystallized sheet are unwound by stretching, and the molecular chains are aligned in the stretch direction.
- the tear strength with respect to the force from is improved, the tear strength with respect to the force from the direction substantially parallel to the stretching direction may be decreased.
- a second step of stretching In the first embodiment, in the second step (stretching step), when the pre-crystallized sheet is stretched (also referred to as main stretching) in order to enhance piezoelectricity, the stretching direction of the main stretching is simultaneously or sequentially performed. Biaxial stretching is performed in which the pre-crystallized sheet is stretched (also referred to as secondary stretching) in the direction intersecting with.
- the molecular chain in the sheet can be oriented not only in the direction of the main stretching axis but also in the direction intersecting with the main stretching axis, the normalized molecular orientation MORc and the crystallinity
- the product can be suitably adjusted to a specific range (specifically 25 to 250). As a result, it is possible to increase the longitudinal crack strength while enhancing the piezoelectricity and maintaining the transparency.
- the optically active polymer is a polymer having molecular optical activity in which the molecular structure is a helical structure.
- the amorphous sheet containing the optically active polymer may be commercially available, or may be produced by a known film forming means such as extrusion.
- the amorphous sheet may be a single layer or a multilayer.
- the first step in the first embodiment is a step of obtaining a pre-crystallized sheet by heating an amorphous sheet containing an optically active polymer.
- a non-crystalline sheet is heat-treated to form a pre-crystallized sheet (the first step).
- the obtained pre-crystallized sheet may be set in a drawing apparatus and drawn (second step), or (off-line processing), or 2) the amorphous sheet is drawn into the drawing apparatus.
- Set and heated in a stretching device to form a pre-crystallized sheet (above, the first step), and the obtained pre-crystallized sheet is subsequently stretched in the stretching device (above, the second step). There may be (inline processing).
- the heating temperature T for pre-crystallizing the amorphous state sheet containing the optically active polymer is not particularly limited. However, in terms of enhancing the piezoelectricity and transparency of the polymer piezoelectric material to be produced.
- the temperature is preferably set so that the glass transition temperature Tg of the optically active polymer and the following formula are satisfied and the crystallinity is 1 to 70%.
- the glass transition temperature Tg [° C.] of the optically active polymer and the melting point Tm [° C.] of the optically active polymer mentioned above are calculated with respect to the optically active polymer using the above-mentioned differential scanning calorimeter (DSC).
- DSC differential scanning calorimeter
- the heat treatment time for pre-crystallization satisfies the desired crystallinity and the normalized molecular orientation MORc of the polymer piezoelectric material after stretching (after the second step) and the stretched
- the product with the crystallinity of the polymeric piezoelectric material may be adjusted to 25 to 250, preferably 50 to 200, more preferably 100 to 190.
- the heat treatment time becomes longer, the degree of crystallinity after stretching increases, and the normalized molecular orientation MORc after stretching also increases.
- the heat treatment time is shortened, the degree of crystallinity after stretching also decreases, and the normalized molecular orientation MORc after stretching also decreases.
- the sheet becomes harder and a greater stretching stress is applied to the sheet, so that the portion with relatively low crystallinity in the sheet also becomes more oriented, and after stretching It is considered that the normalized molecular orientation MORc also increases.
- the crystallinity of the pre-crystallized sheet before stretching becomes low, the sheet becomes soft and the stretching stress becomes more difficult to be applied to the sheet, so that the portion with relatively low crystallinity in the sheet becomes weakly oriented.
- the normalized molecular orientation MORc after stretching is also considered to be low.
- the heat treatment time varies depending on the heat treatment temperature, the thickness of the sheet, the molecular weight of the resin constituting the sheet, and the type or amount of additives.
- the substantial heat treatment time for crystallizing the sheet is the preheating that may be performed before the stretching step (second step) described later, and when the amorphous sheet is preheated at a temperature for crystallization, This corresponds to the sum of the preheating time and the heat treatment time in the precrystallization step before preheating.
- the heat treatment time for the amorphous sheet is preferably 5 seconds to 60 minutes, and more preferably 1 minute to 30 minutes from the viewpoint of stabilizing the production conditions.
- it may be heated at 20 ° C. to 170 ° C. for 5 seconds to 60 minutes (preferably 1 minute to 30 minutes). preferable.
- the reason why the piezoelectricity and the like are improved by stretching is that the spherulite is presumed to be in a spherulitic state, stress due to stretching is concentrated in a portion having a relatively high crystallinity in the pre-crystallized sheet, and the spherulites are being destroyed.
- Orientation improves the piezoelectricity (piezoelectric constant d 14 ), while stretching stress is applied to a portion having a relatively low crystallinity via the spherulite, and the orientation of the relatively low portion is promoted, so This is because the constant d 14 ) is considered to be improved.
- the crystallinity of the stretched sheet is set to 20% to 80%, preferably 30% to 70%. Therefore, the degree of crystallinity of the pre-crystallized sheet immediately before stretching is set to 1% to 70%, preferably 2% to 60%.
- the crystallinity of the pre-crystallized sheet may be the same as the measurement of the crystallinity of the polymer piezoelectric material of the present embodiment after stretching.
- the thickness of the pre-crystallized sheet is mainly determined by the thickness of the polymeric piezoelectric material to be obtained by stretching in the second step and the stretching ratio, but is preferably 50 ⁇ m to 1000 ⁇ m, more preferably about 200 ⁇ m to 800 ⁇ m. It is.
- the stretching method in the second step (stretching step) is not particularly limited. Stretching for forming oriented crystals (also referred to as main stretching) and stretching performed in a direction intersecting the direction of stretching. A combined method can be used. By stretching the polymer piezoelectric material, a polymer piezoelectric material having a large principal surface area can be obtained.
- the “main surface” means the surface having the largest area among the surfaces of the polymeric piezoelectric material.
- the polymeric piezoelectric material of the present invention may have two or more principal surfaces.
- the polymer piezoelectric material is a plate-like body having two surfaces A each having a surface A of 10 mm ⁇ 0.3 mm square, a surface B having 3 mm ⁇ 0.3 mm square, and a surface C having 10 mm ⁇ 3 mm square.
- the main surface of the polymeric piezoelectric material is a surface C, which has two main surfaces.
- the area of the main surface in the present embodiment is preferably 5 mm 2 or more, and more preferably 10 mm 2 or more.
- the molecular chain of polylactic acid polymer contained in the polymer piezoelectric material can be oriented in one direction and aligned with high density, which is higher It is estimated that piezoelectricity can be obtained.
- the molecular chain of the polymer in the sheet is mainly oriented in the stretching direction, so that there is a risk that the longitudinal crack strength due to the force from the direction substantially perpendicular to the stretching direction is lowered. is there.
- the stretching process when stretching for enhancing piezoelectricity (also referred to as main stretching), simultaneously or sequentially, the pre-crystallized sheet is stretched in a direction crossing the main stretching direction (secondary stretching).
- biaxial stretching also referred to as stretching
- a polymer piezoelectric material having an excellent balance of piezoelectricity, transparency, and longitudinal crack strength can be obtained.
- sequential stretching refers to a stretching method in which stretching is performed in a uniaxial direction and then stretching in a direction intersecting with the stretching direction.
- the biaxial stretching method in the second step is not particularly limited, and a general method can be used. Specifically, roll stretching (stretching in the MD direction) and tenter stretching (stretching in the TD direction). It is preferable to use a combination of these. At this time, from the viewpoint of production efficiency, it is preferable to set the direction in which the stretching ratio is large (for example, the main stretching direction) to the TD direction and the direction in which the stretching ratio is low (for example, the secondary stretching direction) to the MD direction. Biaxial stretching may be performed simultaneously or sequentially, but is preferably performed simultaneously (that is, simultaneous biaxial stretching).
- simultaneous biaxial stretching is preferable because, in the case of sequential stretching, in the second and subsequent stretching, a force is applied in a direction crossing the direction of the first stretching, so that the film is longitudinally split during stretching. Because there is a fear.
- sequential stretching it is preferable to reduce the stretching ratio performed first from the viewpoint of suppressing longitudinal tearing of the film during the second and subsequent stretching.
- the “MD direction” is a direction in which the film flows
- the “TD direction” is a direction perpendicular to the MD direction and parallel to the main surface of the film.
- the draw ratio can be adjusted so that the product of the crystallinity, MORc, and crystallinity of the polymeric piezoelectric material after stretching (or after annealing if an annealing process described later) is within the above-mentioned range.
- the draw ratio of main stretching is preferably 2 to 8 times, more preferably 2.5 to 5 times, and particularly preferably 2.7 to 4.5 times.
- the stretching ratio of the secondary stretching is preferably 1 to 4 times, more preferably 1.2 to 2.5 times, and more preferably 1.2 to 2.3 times.
- the stretching speed is not particularly limited, but usually, the main stretching speed and the secondary stretching speed are adjusted according to the magnification.
- the main stretching speed is often set to twice the secondary stretching.
- the stretching speed may be set to a speed usually used, and is not particularly limited, but is often adjusted to a speed at which the film does not break during stretching.
- the stretching temperature of the polymeric piezoelectric material is 10 ° C. to 20 ° C. from the glass transition temperature of the polymeric piezoelectric material when the polymeric piezoelectric material is stretched only by a tensile force, such as a uniaxial stretching method or a biaxial stretching method. It is preferable that the temperature range be as high as about ° C.
- preheating When the pre-crystallized sheet is stretched, preheating may be performed immediately before stretching in order to facilitate stretching of the sheet. This preheating is generally performed in order to soften the sheet before stretching and facilitate stretching, so that the sheet before stretching is crystallized and does not harden the sheet. It is normal. However, as described above, in the first embodiment, since pre-crystallization is performed before stretching, the pre-heating may be performed together with pre-crystallization. Specifically, preheating and precrystallization can be performed by performing preheating at a temperature higher or longer than the normal temperature in accordance with the heating temperature and heat treatment time in the precrystallization step described above.
- the polymer piezoelectric material after the stretching treatment is subjected to a certain heat treatment (hereinafter also referred to as “annealing treatment”).
- the annealing temperature is preferably about 80 ° C. to 160 ° C., more preferably 100 ° C. to 155 ° C.
- the temperature application method for the annealing treatment is not particularly limited, and examples thereof include a method of directly heating using a hot air heater or an infrared heater, a method of immersing the polymer piezoelectric material in a liquid such as heated silicon oil, and the like.
- the temperature application time of the annealing treatment is preferably 1 second to 60 minutes, more preferably 1 second to 300 seconds, and further preferably heating in the range of 1 second to 60 seconds.
- the degree of orientation may decrease due to the growth of spherulites from the molecular chains of the amorphous portion at a temperature higher than the glass transition temperature of the polymeric piezoelectric material. May decrease.
- the polymeric piezoelectric material annealed as described above is preferably cooled rapidly after the annealing treatment.
- “rapidly cool” means that the annealed polymer piezoelectric material is immersed in ice water or the like immediately after the annealing process and cooled to at least the glass transition point Tg or less. It means that no other treatment is included in the dipping time.
- the rapid cooling method includes a method of immersing the annealed polymer piezoelectric material in a coolant such as ethanol, methanol, or liquid nitrogen containing water, ice water, ethanol, or dry ice, or by spraying a liquid spray with a low vapor pressure to evaporate.
- a coolant such as ethanol, methanol, or liquid nitrogen containing water, ice water, ethanol, or dry ice
- the method of cooling by latent heat is mentioned.
- To continuously cool the polymer piezoelectric material it is possible to rapidly cool the polymer piezoelectric material by bringing it into contact with a metal roll controlled to a temperature not higher than the glass transition temperature Tg of the polymer piezoelectric material. It is. Further, the number of times of cooling may be only once, or may be two or more. Furthermore, annealing and cooling can be alternately repeated. In addition, when the annealing is performed on the polymer piezoelectric material that has been subjected to the above-described stretching treatment
- a second embodiment of the method for producing a polymeric piezoelectric material of the present invention includes a step of stretching a sheet containing an optically active polymer (preferably an amorphous sheet) mainly in a uniaxial direction, an annealing step, Are included in this order.
- the step of stretching mainly in the uniaxial direction is a step of performing at least main stretching (further performing secondary stretching if necessary).
- the conditions of the step of stretching mainly in the uniaxial direction and the annealing treatment step are such that the crystallinity of the polymer piezoelectric material to be produced is 20% to 80%, and the normalized molecule The product of the orientation MORc and the crystallinity is appropriately adjusted so as to be 25 to 250.
- the preferable conditions of the step of extending mainly in the uniaxial direction and the annealing treatment step in the second embodiment are the same as the conditions of the second step and the annealing treatment step in the first embodiment, respectively. In the second embodiment, it is not necessary to provide the first step (preliminary crystallization step) in the first embodiment.
- Polymeric piezoelectric material of the present invention, or large piezoelectric constant d 14 is as described, transparency, because it is excellent piezoelectric material vertically tear strength, speakers, headphones, a touch panel, remote controller, microphone, water microphone, Ultrasonic transducer, ultrasonic applied measuring instrument, piezoelectric vibrator, mechanical filter, piezoelectric transformer, delay device, sensor, acceleration sensor, impact sensor, vibration sensor, pressure sensor, tactile sensor, electric field sensor, sound pressure sensor, display It can be used in various fields such as fans, pumps, variable focus mirrors, sound insulation materials, sound insulation materials, keyboards, acoustic equipment, information processing equipment, measurement equipment, medical equipment, and the like.
- the polymeric piezoelectric material of the present invention is preferably used as a piezoelectric element having at least two surfaces and having electrodes on the surfaces.
- the electrodes only need to be provided on at least two surfaces of the polymeric piezoelectric material.
- limit especially as said electrode For example, ITO, ZnO, IZO (trademark), a conductive polymer, etc. are used.
- the polymer piezoelectric material of the present invention and an electrode can be repeatedly stacked and used as a laminated piezoelectric element.
- the unit having two repetitions is a laminated piezoelectric element in which electrodes, polymer piezoelectric material, electrodes, polymer piezoelectric material, and electrodes are stacked in this order.
- one layer of the polymer piezoelectric material may be the polymer piezoelectric material of the present invention, and the other layers may not be the polymer piezoelectric material of the present invention.
- the laminated piezoelectric element includes a plurality of polymer piezoelectric materials of the present invention, if the optical activity of the optically active polymer contained in one layer of the polymer piezoelectric material of the present invention is L, the other layers The optically active polymer contained in this polymeric piezoelectric material may be L-form or D-form. The arrangement of the polymeric piezoelectric material can be appropriately adjusted according to the use of the piezoelectric element.
- a first layer of a piezoelectric polymer material containing an L-type optically active polymer as a main component is laminated with a second polymeric piezoelectric material containing an L-type optically active polymer as a main component via an electrode.
- the uniaxial stretching direction (main stretching direction) of the first polymeric piezoelectric material intersects, preferably orthogonally intersects, the uniaxial stretching direction (main stretching direction) of the second polymeric piezoelectric material. It is preferable because the direction of displacement between the polymeric piezoelectric material and the second polymeric piezoelectric material can be made uniform, and the piezoelectricity of the entire laminated piezoelectric element is enhanced.
- the first layer of the polymeric piezoelectric material containing the L-type optically active polymer as the main component is laminated with the second polymeric piezoelectric material containing the D-type optically active polymer as the main component via the electrode.
- the first uniaxial stretching direction (main stretching direction) of the first polymeric piezoelectric material is arranged so as to be substantially parallel to the uniaxial stretching direction (main stretching direction) of the second polymeric piezoelectric material. This is preferable because the directions of displacement of the polymeric piezoelectric material and the second polymeric piezoelectric material can be made uniform, and the piezoelectricity of the entire laminated piezoelectric element is enhanced.
- the transparency of the electrode specifically means that the internal haze is 40% or less (total light transmittance is 60% or more).
- the piezoelectric element using the polymer piezoelectric material of the present invention can be applied to the above-described various piezoelectric devices such as speakers and touch panels.
- a piezoelectric element provided with a transparent electrode is suitable for application to a speaker, a touch panel, an actuator, and the like.
- Example 1 A polylactic acid resin (registered trademark LACEEA, H-400 (weight average molecular weight Mw: 200,000)) manufactured by Mitsui Chemicals, Inc. is put into an extruder hopper and extruded from a T-die while being heated to 220 to 230 ° C. A pre-crystallized sheet having a thickness of 230 ⁇ m was formed by contact with a cast roll at 0 ° C. for 0.3 minutes (pre-crystallization step) The crystallinity of the pre-crystallized sheet was measured and found to be 4%.
- LACEEA weight average molecular weight Mw: 200,000
- Examples 2 to 8, Comparative Examples 1 and 2 Next, in the production of the polymeric piezoelectric material of Example 1, the precrystallization conditions and the stretching conditions were changed to the conditions shown in Table 1 in the same manner, and the high values of Examples 2 to 8 and Comparative Examples 1 to 2 were high. A molecular piezoelectric material was prepared. In Examples 5 to 8, the main stretching direction was the MD direction, and the secondary stretching direction was the TD direction.
- the sample solution was cooled to room temperature, neutralized by adding 20 mL of 1.0 mol / L hydrochloric acid solution, and the Erlenmeyer flask was sealed and mixed well.
- 1.0 mL of the sample solution was placed in a 25 mL volumetric flask, and HPLC sample solution 1 was prepared with 25 mL of mobile phase.
- 5 ⁇ L of the HPLC sample solution 1 was injected into the HPLC apparatus, the D / L body peak area of polylactic acid was determined under the following HPLC conditions, and the amount of L body and the amount of D body were calculated.
- -HPLC measurement conditions - ⁇ Column Optical resolution column, SUMICHIRAL OA5000 manufactured by Sumika Chemical Analysis Co., Ltd.
- Measurement conditions 0.1 ml of the sample solution was introduced into the column at a solvent (chloroform), a temperature of 40 ° C. and a flow rate of 1 ml / min, and the sample concentration in the sample solution separated by the column was measured with a differential refractometer.
- a universal calibration curve was prepared using a polystyrene standard sample, and the weight average molecular weight (Mw) of each resin was calculated.
- Table 1 shows the measurement results of the resins used in Examples and Comparative Examples.
- “LA” represents LACEA H-400.
- Glass transition temperature Tg, melting point Tm, and crystallinity Each of the polymeric piezoelectric materials of Examples and Comparative Examples was accurately weighed in an amount of 10 mg, and measured using a differential scanning calorimeter (DSC-1 manufactured by Perkin Elmer Co., Ltd.) under a temperature rising rate of 10 ° C./min. A melting endotherm curve was obtained. From the obtained melting endotherm curve, melting point Tm, glass transition temperature Tg, specific heat capacity Cp and crystallinity were obtained.
- the “internal haze” referred to in the present application refers to the internal haze of the polymeric piezoelectric material of the present invention, and the measurement method is a general method. Specifically, the internal haze (hereinafter also referred to as internal haze (H1)) of each of the polymer piezoelectric materials of Examples and Comparative Examples was measured by measuring light transmittance in the thickness direction. More specifically, the haze (H2) is measured in advance by sandwiching only silicon oil (Shin-Etsu Silicone (trademark) manufactured by Shin-Etsu Chemical Co., Ltd., model number: KF96-100CS) between two glass plates.
- Si oil Shin-Etsu Silicone (trademark) manufactured by Shin-Etsu Chemical Co., Ltd., model number: KF96-100CS
- the haze (H2) and haze (H3) in the above formula were measured by measuring the light transmittance in the thickness direction using the following apparatus under the following measurement conditions.
- Measuring device Tokyo Denshoku Co., Ltd., HAZE METER TC-HIIIDPK Sample size: 30 mm wide x 30 mm long (see Table 2 for thickness)
- Measurement conditions Conforms to JIS-K7105 Measurement temperature: Room temperature (25 ° C)
- piezoelectric constant d 14 (by displacement method)
- a 40 mm ⁇ 40 mm test piece (polymer piezoelectric material) having an Ag conductive layer formed on both sides is formed in a direction of 45 mm and a direction of 45 ° with respect to the stretching direction (MD direction) of the polymer piezoelectric material.
- a rectangular film of 32 mm ⁇ 5 mm was cut into 5 mm in the orthogonal direction. This was used as a piezoelectric constant measurement sample.
- a sine wave AC voltage of 10 Hz, 300 Vpp was applied to the obtained sample, the difference distance between the maximum value and the minimum value of the displacement of the film was measured with a laser spectral interference displacement meter SI-1000 manufactured by Keyence Corporation. .
- the measured amount of displacement (mp-p) divided by the reference length of the film 30 mm is used as the amount of strain, and the amount of strain applied to the film is the electric field strength ((applied voltage (V)) / (film thickness)).
- V applied voltage
- a value obtained by multiplying the value divided by 2 by 2 was defined as a piezoelectric constant d 14 (pm / V).
- the tear strength in the MD direction was determined in accordance with the test method “Right-angle tear method” described in “Plastic film and sheet tear strength” of JIS K 7128-3.
- the longitudinal tearability was evaluated by measuring the thickness and tear strength in the TD direction.
- the tear strength in the MD direction and the tear strength in the TD direction are both large, it means that the decrease in the longitudinal tear strength is suppressed.
- the fact that at least one of the tear strength in the MD direction and the tear strength in the TD direction is low means that the longitudinal tear strength has decreased.
- T F / d
- T the tear strength (N / mm)
- F the maximum tear load
- d the thickness (mm) of the test piece.
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Abstract
Description
現在知られている高分子圧電材料は、主に以下の2種類に大別される。すなわち、ナイロン11、ポリフッ化ビニル、ポリ塩化ビニル、ポリ尿素などに代表されるポーリング型高分子と、ポリフッ化ビニリデン(β型)(PVDF)、フッ化ビニリデン-トリフルオロエチレン共重合体(P(VDF-TrFE))(75/25)などに代表される強誘電性高分子との2種類である。
また、上記特開平5-152638号公報や特開2005-213376号公報に示される圧電材料はいずれも透明性が不十分である。
本発明においては上記事情に鑑み、圧電定数d14が大きく、透明性に優れ、縦裂強度の低下が抑制された高分子圧電材料及びその製造方法を提供することを目的とする。
[1]重量平均分子量が5万~100万である光学活性を有するヘリカルキラル高分子を含み、DSC法で得られる結晶化度が20%~80%であり、かつ、マイクロ波透過型分子配向計で測定される基準厚さを50μmとしたときの規格化分子配向MORcと前記結晶化度との積が25~250である、高分子圧電材料。
[2]前記結晶化度が40.8%以下である、[1]に記載の高分子圧電材料。
[3]可視光線に対する内部ヘイズが40%以下である、[1]または[2]に記載の高分子圧電材料。
[4]前記規格化分子配向MORcが1.0~15.0である、[1]~[3]のいずれか1項に記載の高分子圧電材料。
[5]25℃において変位法で測定した圧電定数d14が1pm/V以上である、[1]~[4]のいずれか1項に記載の高分子圧電材料。
[6]前記ヘリカルキラル高分子が、下記式(1)で表される繰り返し単位を含む主鎖を有するポリ乳酸系高分子である、[1]~[5]のいずれか1項に記載の高分子圧電材料。
[8] 前記ヘリカルキラル高分子の含有量が80質量%以上である、[1]~[7]のいずれか1項に記載の高分子圧電材料。
[9] 可視光線に対する内部ヘイズが1.0%以下である、[1]~[8]のいずれか1項に記載の高分子圧電材料。
[10][1]~[9]のいずれか1項に記載の高分子圧電材料を製造する方法であって、前記ヘリカルキラル高分子を含む非晶状態のシートを加熱して予備結晶化シートを得る第一の工程と、前記予備結晶化シートを同時に2軸方向に延伸する第二の工程と、を含む、高分子圧電材料の製造方法。
[11]前記予備結晶化シートを得る第一の工程において、下記式で表される温度Tにおいて、結晶化度が1%~70%になるまで前記非晶状態のシートを加熱する、[10]に記載の高分子圧電材料の製造方法。
Tg-40℃≦T≦Tg+40℃
(Tgは、前記ヘリカルキラル高分子のガラス転移温度を表す。)
[12]前記予備結晶化シートを得る第一の工程において、前記ヘリカルキラル高分子としてポリ乳酸を含む非晶状態のシートを20℃~170℃で、5秒~60分加熱する、[10]または[11]に記載の高分子圧電材料の製造方法。
[13]前記第二の工程の後に、アニール処理をする[10]~[12]のいずれか1項に記載の高分子圧電材料の製造方法。
圧電材料を上記構成とすることで、圧電定数d14が大きく、透明性に優れ、縦裂強度(特定方向についての引裂強さ)の低下が抑制された高分子圧電材料とすることができる。
より詳細には、上記構成の高分子圧電材料では、結晶化度を20%~80%の範囲とし、かつ、前記MORcと前記結晶化度との積を25~250とすることにより、高い圧電性(大きい圧電定数d14)及び高い透明性を維持したまま、縦裂強度(特定方向についての引裂強さ)が低下する現象を抑制できる。
また、本明細書中では、特定方向についての引裂強さが低下する現象が抑制されることを「縦裂強度が向上する」ということがあり、特定方向についての引裂強さが低下する現象が抑制された状態を「縦裂強度が高い」または「縦裂強度に優れる」ということがある。
すなわち、延伸方向に対して、斜め45°の方向を長手方向とした矩形フィルムを試験片とする。この試験片の主面の表裏全面に電極層を設け、この電極に印加電圧E(V)を加えたとき、フィルムの長手方向の歪量をXとする。印加電圧E(V)をフィルムの厚さt(m)で割った値を電界強度E(V/m)とし、E(V)印加したときのフィルムの長手方向の歪量をXとしたとき、d14は、2×歪量X/電界強度E(V/m)で定義される値である。
圧電定数d14には変位法で測定されるもの(単位:pm/V)と、共振法により測定されるもの(単位:pC/N)とがある。
光学活性を有するヘリカルキラル高分子とは、分子構造が螺旋構造である分子光学活性を有する高分子をいう。
以下、重量平均分子量が5万~100万である光学活性を有するヘリカルキラル高分子を、「光学活性高分子」ともいう。
光学活性高分子としては、例えば、ポリペプチド、セルロース、セルロース誘導体、ポリ乳酸系樹脂、ポリプロピレンオキシド、ポリ(β―ヒドロキシ酪酸)等を挙げることができる。前記ポリペプチドとしては、例えば、ポリ(グルタル酸γ-ベンジル)、ポリ(グルタル酸γ-メチル)等が挙げられる。前記セルロース誘導体としては、例えば、酢酸セルロース、シアノエチルセルロース等が挙げられる。
光学純度(%ee)=100×|L体量-D体量|/(L体量+D体量)
すなわち、『「光学活性高分子のL体の量〔質量%〕と光学活性高分子のD体の量〔質量%〕との量差(絶対値)」を「光学活性高分子のL体の量〔質量%〕と光学活性高分子のD体の量〔質量%〕との合計量」で割った(除した)数値』に、『100』をかけた(乗じた)値を、光学純度とする。
さらに、前記の各製造方法により得られた光学活性高分子(例えばポリ乳酸系樹脂)は、光学純度を95.00%ee以上とするために、例えば、ポリ乳酸をラクチド法で製造する場合、晶析操作により光学純度を95.00%ee以上の光学純度に向上させたラクチドを、重合することが好ましい。
本実施形態に係る光学活性高分子は、重量平均分子量(Mw)が、5万~100万である。光学活性高分子の重量平均分子量の下限が、5万未満であると光学活性高分子を成型体としたときの機械的強度が不十分となる。光学活性高分子の重量平均分子量の下限は、10万以上であることが好ましく、15万以上であることがさらに好ましい。一方、光学活性高分子の重量平均分子量の上限が100万を超えると、光学活性高分子を成形すること(例えば、押出成型などによりフィルム形状などに成形すること)が難しくなる。
重量平均分子量の上限は、80万以下であることが好ましく、30万以下であることがさらに好ましい。
また、前記光学活性高分子の分子量分布(Mw/Mn)は、高分子圧電材料の強度の観点から、1.1~5であることが好ましく、1.2~4であることがより好ましい。さらに1.4~3であることが好ましい。なお、ポリ乳酸系高分子の重量平均分子量Mwと、分子量分布(Mw/Mn)は、ゲル浸透クロマトグラフ(GPC)を用い、下記GPC測定方法により、測定される。
Waters社製GPC-100
-カラム-
昭和電工社製、Shodex LF-804
-サンプルの調製-
ポリ乳酸系高分子を40℃で溶媒(例えば、クロロホルム)へ溶解させ、濃度1mg/mlのサンプル溶液を準備する。
-測定条件-
サンプル溶液0.1mlを溶媒〔クロロホルム〕、温度40℃、1ml/分の流速でカラムに導入する。
本実施形態に係る高分子圧電材料において、光学活性高分子の含有量(2種以上である場合には総含有量。以下同じ。)には特に制限はないが、高分子圧電材料全質量中に対して、80質量%以上であることが好ましい。
上記含有量が80質量%以上であることにより、圧電定数がより大きくなる傾向がある。
本実施形態の高分子圧電材料は、本実施形態の効果を損なわない限度において、既述の光学活性高分子以外のその他の成分(例えば、ポリフッ化ビニリデン、ポリエチレン樹脂やポリスチレン樹脂に代表される公知の樹脂や、シリカ、ヒドロキシアパタイト、モンモリロナイト等の無機フィラー、フタロシアニン等の公知の結晶核剤等)を含有していてもよい。
また、本実施形態の高分子圧電材料は、加水分解などによる構造変化をより抑制する観点から、カルボジライト(登録商標)に代表されるカルボジイミド化合物などの安定化剤を含むのが好ましい。
また、本実施形態の高分子圧電材料は、本実施形態の効果を損なわない限度において、既述の光学活性高分子(即ち、重量平均分子量(Mw)が5万~100万である光学活性を有するヘリカルキラル高分子)以外のヘリカルキラル高分子を含んでいてもよい。
本実施形態の高分子圧電材料は、無機フィラーを少なくとも1種含有していてもよい。
例えば、高分子圧電材料を、気泡等のボイドの発生を抑えた透明なフィルムとするために、高分子圧電材料中に、ヒドロキシアパタイト等の無機フィラーをナノ分散してもよいが、無機フィラーをナノ分散させるためには、凝集塊の解砕に大きなエネルギーが必要であり、また、無機フィラーがナノ分散しない場合、フィルムの透明度が低下する場合がある。従って、本実施形態に係る高分子圧電材料が無機フィラーを含有するときは、高分子圧電材料全質量に対する無機フィラーの含有量は、1質量%未満とすることが好ましい。 なお、高分子圧電材料が光学活性高分子以外の成分を含む場合、光学活性高分子以外の成分の含有量は、高分子圧電材料全質量中に対して、20質量%以下であることが好ましく、10質量%以下であることがより好ましい。
本実施形態の高分子圧電材料は、結晶促進剤(結晶核剤)を少なくとも1種含有していてもよい。
結晶促進剤(結晶核剤)としては、結晶化促進の効果が認められるものであれば、特に限定されないが、光学活性高分子の結晶格子の面間隔に近い面間隔を持つ結晶構造を有する物質を選択することが望ましい。面間隔が近い物質ほど核剤としての効果が高いからである。例えば、光学活性高分子としてポリ乳酸系樹脂を用いた場合、有機系物質であるフェニルスルホン酸亜鉛、ポリリン酸メラミン、メラミンシアヌレート、フェニルホスホン酸亜鉛、フェニルホスホン酸カルシウム、フェニルホスホン酸マグネシウム、無機系物質のタルク、クレー等が挙げられる。それらのうちでも、最も面間隔がポリ乳酸の面間隔に類似し、良好な結晶形成促進効果が得られるフェニルホスホン酸亜鉛が好ましい。なお、使用する結晶促進剤は、市販されているものを用いることができる。具体的には例えば、フェニルホスホン酸亜鉛;エコプロモート(日産化学工業(株)製)等が挙げられる。
結晶核剤の上記含有量が0.01重量部以上であると、結晶促進の効果がより効果的に得られる。結晶核剤の上記含有量が1.0重量部未満であると、結晶化速度をより制御しやすい。
本実施形態の高分子圧電材料中では、光学活性高分子が配向している。
この配向を表す指標として、「分子配向度MOR」がある。分子配向度MOR(Molecular Orientation Ratio)は、分子の配向の度合いを示す値であり、以下のようなマイクロ波測定法により測定される。すなわち、試料(フィルム)を、周知のマイクロ波分子配向度測定装置(マイクロ波透過型分子配向計ともいう)のマイクロ波共振導波管中に、マイクロ波の進行方向に前記試料面(フィルム面)が垂直になるように配置する。そして、振動方向が一方向に偏ったマイクロ波を試料に連続的に照射した状態で、試料をマイクロ波の進行方向と垂直な面内で0~360°回転させて、試料を透過したマイクロ波強度を測定することにより分子配向度MORを求める。
MORc = (tc/t)×(MOR-1)+1
(tc:補正したい基準厚さ、t:試料厚さ)
規格化分子配向MORcは、公知の分子配向計、例えば王子計測機器株式会社製マイクロ波方式分子配向計MOA-2012AやMOA-6000等により、4GHzもしくは12GHz近傍の共振周波数で測定することができる。
具体的には、レターデーションは大塚電子株式会社製RETS100を用いて測定することができる。またMORcとΔnとは大凡、直線的な比例関係にあり、かつΔnが0の場合、MORcは1になる。
本実施形態に係る高分子圧電材料は、圧電定数が大きく(25℃において変位法で測定した圧電定数d14が、好ましくは1pm/V以上)、透明性、縦裂強度に優れる。
本実施形態において、高分子圧電材料の圧電定数は、次のようにして測定される値をいう。
まず、高分子圧電材料を、延伸方向(MD方向)に40mm、延伸方向に直交する方向(TD方向)に40mmでそれぞれカットして、矩形の試験片を作製する。次に、アルバック社製スパッタ薄膜形成装置JSP-8000の試験台に、得られた試験片をセットし、ロータリーポンプによりコータチャンバー内を真空状態(例えば、10-3Pa以下)にする。その後、Ag(銀)ターゲットに、印加電圧280V、スパッタリング電流0.4A)の条件で、試験片の一方の面に500秒間スパッタリング処理をする。次いで、試験片の他方の面を、同様の条件で500秒間スパッタリング処理をして、試験片の両面にAgを被覆し、Agの導電層を形成する。
計測した変位量(mp-p)を、フィルムの基準長30mmで割った値を歪量とし、この歪量をフィルムに印加した電界強度((印加電圧(V))/(フィルム厚))で割った値に2を乗じた値を圧電定数d14とする。
具体的には、25℃における変位法で測定した圧電定数d14は1pm/V以上が好ましく、3pm/V以上がより好ましく、4pm/V以上がさらに好ましい。また圧電定数の上限は特に限定されないが、後述する透明性などのバランスの観点からは、ヘリカルキラル高分子を用いた圧電材料では50pm/V以下が好ましく、30pm/V以下がより好ましい。
また、同様に透明性とのバランスの観点からは共振法で測定した圧電定数d14が15pC/N以下であることが好ましい。
高分子圧電材料の結晶化度は、DSC法によって求められるものであり、本実施形態の高分子圧電材料の結晶化度は20%~80%であり、30%~70%が好ましい。前記範囲に結晶化度があれば、高分子圧電材料の圧電性、透明性、縦裂強度のバランスがよく、また高分子圧電材料を延伸するときに、白化や破断がおきにくく製造しやすい。
具体的には、結晶化度が20%未満であると、圧電性が低下する傾向がある。
また、結晶化度が80%を超えると、縦裂強度及び透明性が低下する傾向がある。
前記結晶化度は、縦裂強度及び透明性をより向上させる観点より、40.8%以下が更に好ましく、40.0%以下が特に好ましい。
高分子圧電材料の透明性は、例えば、目視観察やヘイズ測定により評価することができる。
高分子圧電材料は、可視光線に対する内部ヘイズが40%以下であることが好ましい。ここで内部ヘイズは、厚さ0.03mm~0.05mmの高分子圧電材料に対して、JIS-K7105に準拠して、ヘイズ測定機〔(有)東京電色製、TC-HIII DPK〕を用いて25℃で測定したときの値であり、測定方法の詳細は実施例において詳述する。
高分子圧電材料の前記内部ヘイズは、20%以下であることがより好ましく、5%以下であることが更に好ましい。更に、高分子圧電材料の前記内部ヘイズは、縦裂強度をより向上させる観点からは、2.0%以下が好ましく、1.0%以下が特に好ましい。
また、高分子圧電材料の前記内部ヘイズは、低ければ低いほどよいが、圧電定数などとのバランスの観点からは、0.0%~40%であることが好ましく、0.01%~20%であることがさらに好ましく、0.01%~5%がさらに好ましく、0.01%~2.0%がさらに好ましく、0.01%~1.0%が特に好ましい。
なお、本願でいう「内部ヘイズ」とは、本発明の高分子圧電材料の内部へイズをいう。内部へイズとは、実施例において後述するように前記高分子圧電材料の外表面の形状によるヘイズを除外したヘイズである。
本実施形態の高分子圧電材料は、規格化分子配向MORcが1.0~15.0であることが好ましく、4.0~10.0であることがより好ましい。
規格化分子配向MORcが1.0以上であれば、延伸方向に配列する光学活性高分子の分子鎖(例えばポリ乳酸分子鎖)が多く、その結果、配向結晶の生成する率が高くなり、より高い圧電性を発現することが可能となる。
規格化分子配向MORcが15.0以下であれば、縦裂強度が更に向上する。
本実施形態において、高分子圧電材料の結晶化度と規格化分子配向MORcとの積は25~250である。この範囲に調整することで、高い圧電性及び高い透明性が維持され、かつ、縦裂強度(即ち、特定方向についての引裂強さ)の低下が抑制される。
高分子圧電材料の結晶化度と規格化分子配向MORcとの積が25未満であると、圧電性が低下する傾向がある。
高分子圧電材料の結晶化度と規格化分子配向MORcとの積が250を超えると、縦裂強度及び透明性が低下する傾向がある。
上記結晶化度とMORcとの積は、さらに好ましくは50~200、さらに好ましくは100~190である。
本実施形態の高分子圧電材料の縦裂強度は、JIS K 7128-3の「プラスチックーフィルム及びシートの引裂強さ」に記載の試験方法「直角形引裂法」に準拠して測定された引裂強さに基づいて評価される。
ここで、引張試験機のクロスヘッド速度は毎分200mmとし、引裂強さは下式より算出する。
T=F/d
上記式において、Tは引裂強さ(N/mm)、Fは最大引裂荷重、dは試験片の厚さ(mm)を表す。
高分子圧電材料は、加熱下、特に後述するスピーカーやタッチパネルなどのデバイスや機器等に組み込まれ使用される環境下の温度での寸法変化率が低い方が好ましい。圧電材料の寸法がデバイスなどの使用環境下で変化すると、圧電材料に接続されている配線などの位置を動かし、デバイスなどの誤作動を引き起こす恐れがあるからである。高分子圧電材料の寸法安定性は、後述するようにデバイスなどの使用環境よりも少し高い温度である150℃で、10分間処理した前後の寸法変化率で評価される。寸法変化率は、10%以下が好ましく、5%以下がさらに好ましい。
本発明の高分子圧電材料を製造する方法としては、前記結晶化度を20%~80%に調整でき、かつ、前記規格化分子配向MORcと前記結晶化度との積を25~250に調整できる方法であれば特に制限されない。
この方法として、例えば、既述の光学活性高分子を含む非晶状態のシートに対して結晶化及び延伸(いずれが先であってもよい)を施す方法であって、前記結晶化及び前記延伸の各条件を調整することにより、前記結晶化度を20%~80%に調整し、かつ、前記規格化分子配向MORcと前記結晶化度との積を25~250に調整する方法を用いることができる。
なお、ここでいう「結晶化」は、後述の予備結晶化及び後述のアニール処理を包含する概念である。
上述の混合物は、溶融混練して得られた混合物であることが好ましい。
具体的には、例えば、2種類以上の光学活性高分子を混合する場合や、1種類以上の光学活性高分子にその他の成分(例えば上述の無機フィラーや結晶核剤)を混合する場合は、混合する光学活性高分子を(必要に応じその他の成分とともに)、溶融混練機〔東洋精機社製、ラボプラストミキサー〕を用い、ミキサー回転数30rpm~70rpm、180℃~250℃の条件で、5分~20分間溶融混練することで、複数種の光学活性高分子のブレンド体や光学活性高分子と無機フィラーなどの他の成分とのブレンド体を得ることができる。
本発明の高分子圧電材料の製造方法の第1の実施形態は、例えば、光学活性高分子(即ち、重量平均分子量が5万~100万である光学活性を有するヘリカルキラル高分子)を含む非晶状態のシートを加熱して予備結晶化シートを得る第一の工程と、前記予備結晶化シートを2軸方向に延伸する(例えば、主として1軸方向に延伸しつつ同時または逐次的に前記延伸方向とは別の方向に延伸する)第二の工程と、を含む。
よって、圧電定数が高く、内部ヘイズが低いフィルムを形成するためには、圧電定数に寄与する配向結晶を、内部ヘイズを増大させない程度の微小サイズで効率よく形成することが好ましい。
具体的には、前記予備結晶化シートを延伸することにより、微結晶と微結晶との間の結晶性が低い高分子部分内に、微細な配向結晶が生成すると同時に、予備結晶化によって生成された球晶がくずれ、球晶を構成しているラメラ晶が、タイ分子鎖につながれた数珠繋ぎ状に延伸方向に配向する。これにより、所望の値のMORcを得ることができる。
このため、前記予備結晶化シートを延伸することにより、圧電定数を大きく低下させることなく、内部ヘイズが低いシートを得ることができる。さらに製造条件を調整することで寸法安定性に優れる高分子圧電材料を得ることができる。
この第1の実施形態では、第二の工程(延伸工程)において、圧電性を高めるために予備結晶化シートを延伸(主延伸ともいう)する際、同時にまたは逐次的に前記主延伸の延伸方向と交差する方向に予備結晶化シートを延伸(副次的延伸ともいう)する2軸延伸を行う。これにより、シート内の分子鎖を、主たる延伸の軸の方向だけでなく、主たる延伸の軸と交差する方向にも配向させることができるので、前記規格化分子配向MORcと前記結晶化度との積を、特定の範囲(具体的には25~250)に好適に調整することができる。
その結果、圧電性を高め、透明性を維持しつつ、さらに縦裂強度をも向上させることができる。
また、前述のとおり、光学活性高分子は、分子構造が螺旋構造である分子光学活性を有する高分子である。
光学活性高分子を含む非晶状態のシートは、市場から入手可能なものでもよく、押出成形などの公知のフィルム成形手段で作製されたものでもよい。非晶状態のシートは単層であっても、多層であっても構わない。
第1の実施形態における第一の工程は、光学活性高分子を含む非晶状態のシートを加熱して予備結晶化シートを得る工程である。
Tg-40℃≦T≦Tg+40℃
(Tgは、光学活性高分子のガラス転移温度を表す。)
すなわち、延伸により圧電性などが向上する理由は、球晶状態にあると推測される、予備結晶化シート中の結晶性が比較的高い部分に延伸による応力が集中し、球晶が破壊されつつ配向することで圧電性(圧電定数d14)が向上する一方、球晶を介して延伸応力が結晶性の比較的低い部分にもかかり、この比較的低い部分の配向を促し、圧電性(圧電定数d14)を向上させるためと考えられるからである。
第二の工程(延伸工程)における延伸方法は特に制限されないが、配向結晶を形成するための延伸(主な延伸ともいう)と、前記延伸の方向に対して交差する方向に施す延伸と、を組み合わせた方法を用いることができる。高分子圧電材料を延伸することにより、主面の面積が大きな高分子圧電材料を得ることもできる。
一方、前述のように一方向のみに延伸した場合、シート内の高分子の分子鎖が主に延伸方向に配向するため、延伸方向と略直交方向からの力による縦裂強度が低下する恐れがある。
そこで、延伸工程において、圧電性を高めるための延伸(主延伸ともいう)をする際に、同時にまたは逐次的に、前記主延伸の方向と交差する方向に予備結晶化シートを延伸(副次的延伸ともいう)する2軸延伸を行うことで、圧電性、透明性、縦裂強度のバランスに優れる高分子圧電材料を得ることができる。
なお、ここで言う「逐次的な延伸」とは、まず1軸方向に延伸した後に、前記延伸の方向と交差する方向に延伸する延伸方法をいう。
2軸延伸は同時に行なっても、逐次的に行なってもよいが、同時に行なうこと(即ち、同時2軸延伸)が好ましい。
同時2軸延伸が好ましい理由は、逐次延伸の場合には、二回目以降の延伸において、一回目の延伸の方向と交差する方向に力を加えることになるため、フィルムが延伸中に縦裂けする恐れがあるからである。
また、同様に、逐次延伸を行なう場合は、二回目以降の延伸中のフィルムの縦裂けを抑制する観点から、最初に行なう延伸の倍率を小さくすることが好ましい。
なお、前述のとおり、「MD方向」とはフィルムの流れる方向であり、「TD方向」とは、前記MD方向と直交し、フィルムの主面と平行な方向である。
また、延伸速度も特に限定されないが、通常は、倍率に応じて主延伸の速度と副次的延伸の速度が調整される。具体的には、主延伸倍率が副次的延伸の倍率の2倍に設定された場合は、主延伸の速度は副次的延伸の2倍に設定されることが多い。延伸速度は通常用いられる速度に設定すればよく、特に限定されないが、フィルムが延伸時に破断することないような速度に調整されることが多い。
この予熱は、一般的には延伸前のシートを軟らかくし延伸しやすくするために行なわれるものであるため、前記延伸前のシートを結晶化してシートを硬くすることがない条件で行なわれるのが通常である。
しかし、上述したように第1の実施形態においては、延伸前に予備結晶化を行なうため、前記予熱を、予備結晶化を兼ねて行なってもよい。具体的には、上述した予備結晶化工程における加熱温度や加熱処理時間に合わせて、予熱を通常行なわれる温度よりも高い温度や長い時間行なうことで、予熱と予備結晶化を兼ねることができる。
圧電定数を向上させる観点から、延伸処理を施した後の高分子圧電材料を、一定の熱処理(以下「アニール処理」とも称する)することが好ましい。アニール処理の温度は、概ね80℃~160℃であることが好ましく、100℃~155℃あることがさらに好ましい。
アニール処理の温度印加方法は、特に限定されないが、熱風ヒータや赤外線ヒータを用いて直接加熱する方法や、加熱したシリコンオイルなどの液体に高分子圧電材料を浸漬する方法等が挙げられる。このとき、線膨張により高分子圧電材料が変形すると、実用上平坦なフィルムを得ることが困難になるため、高分子圧電材料に一定の引張応力(例えば、0.01MPa~100Mpa)を印加し、高分子圧電材料がたるまないようにしながら温度を印加することが好ましい。
アニール処理において、「急冷する」とは、アニール処理した高分子圧電材料を、アニール処理直後に、例えば氷水中等に浸漬して、少なくともガラス転移点Tg以下に冷やすことをいい、アニール処理と氷水中等への浸漬との間に他の処理が含まれないことをいう。
連続的に高分子圧電材料を冷却するには、高分子圧電材料のガラス転移温度Tg以下の温度に管理された金属ロールと、高分子圧電材料とを接触させるなどして、急冷することが可能である。また、冷却の回数は、1回のみであっても、2回以上であってもよく、さらには、アニールと冷却とを交互に繰り返し行なうことも可能である。また前述の延伸処理を施した後の高分子圧電材料について前記アニールを行うと、アニール前に比べてアニール後の高分子圧電材料が縮むことがある。
本発明の高分子圧電材料の製造方法の第2の実施形態は、光学活性高分子を含むシート(好ましくは非晶状態のシート)を主として1軸方向に延伸する工程と、アニール処理工程と、をこの順で含む。
第2の実施形態において、主として1軸方向に延伸する工程は、少なくとも主延伸を行う(必要に応じ、更に副次的延伸を行う)工程である。
第2の実施形態における、主として1軸方向に延伸する工程及びアニール処理工程の各条件は、製造される高分子圧電材料の前記結晶化度が20%~80%となり、かつ、前記規格化分子配向MORcと前記結晶化度との積が25~250となるように適宜調整される。
その他、第2の実施形態における、主として1軸方向に延伸する工程及びアニール処理工程の好ましい条件は、それぞれ、第1の実施形態における第二の工程及びアニール処理工程の条件と同様である。
なお、第2の実施形態では、第1の実施形態における第一の工程(予備結晶化工程)を設ける必要はない。
本発明の高分子圧電材料は、以上説明したように圧電定数d14が大きく、透明性、縦裂強度に優れた圧電材料であるので、スピーカー、ヘッドホン、タッチパネル、リモートコントローラー、マイクロホン、水中マイクロホン、超音波トランスデューサ、超音波応用計測器、圧電振動子、機械的フィルター、圧電トランス、遅延装置、センサー、加速度センサー、衝撃センサー、振動センサー、感圧センサー、触覚センサー、電界センサー、音圧センサー、ディスプレイ、ファン、ポンプ、可変焦点ミラー、遮音材料、防音材料、キーボード、音響機器、情報処理機、計測機器、医用機器などの種々の分野で利用することができる。
また、積層圧電素子に複数の本発明の高分子圧電材料が含まれる場合は、ある層の本発明の高分子圧電材料に含まれる光学活性高分子の光学活性がL体ならば、他の層の高分子圧電材料に含まれる光学活性高分子はL体であってもD体であってもよい。高分子圧電材料の配置は圧電素子の用途に応じて適宜調整することができる。
三井化学(株)製ポリ乳酸系樹脂(登録商標LACEA、H-400(重量平均分子量Mw:20万)を押出成形機ホッパーに入れて、220~230℃に加熱しながらTダイから押し出し、50℃のキャストロールに0.3分間接触させ厚さ230μmの予備結晶化シートを製膜した(予備結晶化工程)。前記予備結晶化シートの結晶化度を測定したところ4%であった。
得られた予備結晶化シートを80℃に加熱しながら、テンター方式でTD方向に3.0倍(主延伸)、ロールツーロール方式でMD方向に2.0倍(副次的延伸)まで同時2軸延伸を行い、フィルムを得た(延伸工程)。
前記延伸工程の後のフィルムを、ロールツーロールで、145℃に加熱したロール上に接触させアニール処理し、急冷して、高分子圧電材料を作製した(アニール処理工程)。なお、前記急冷は、アニール処理後のフィルムを20℃~30℃の大気に接触させ、さらにフィルム巻取機の金属ロールに接触させることにより、フィルム温度を急速に室温近傍に降温させることによって行った。
次いで、実施例1の高分子圧電材料の作製において、予備結晶化条件や延伸条件を、表1に示す条件に変更した他は同様にして、実施例2~8、比較例1~2の高分子圧電材料を作製した。
実施例5~8では、主延伸の方向をMD方向とし、副次的延伸の方向をTD方向とした。
50mLの三角フラスコに1.0gのサンプル(高分子圧電材料)を秤り込み、IPA(イソプロピルアルコール)2.5mLと、5.0mol/L水酸化ナトリウム溶液5mLとを加えた。次に、サンプル溶液が入った前記三角フラスコを、温度40℃の水浴に入れ、ポリ乳酸が完全に加水分解するまで、約5時間攪拌した。
-HPLC測定条件-
・カラム
光学分割カラム、(株)住化分析センター製 SUMICHIRAL OA5000
・測定装置
日本分光社製 液体クロマトグラフィ
・カラム温度
25℃
・移動相
1.0mM-硫酸銅(II)緩衝液/IPA=98/2(V/V)
硫酸銅(II)/IPA/水=156.4mg/20mL/980mL
・移動相流量
1.0ml/分
・検出器
紫外線検出器(UV254nm)
ゲル浸透クロマトグラフ(GPC)を用い、下記GPC測定方法により、実施例および比較例の各高分子圧電材料に含まれる樹脂(光学活性高分子)の分子量分布(Mw/Mn)を測定した。
-GPC測定方法-
・測定装置
Waters社製GPC-100
・カラム
昭和電工社製、Shodex LF-804
・サンプルの調製
実施例および比較例の各高分子圧電材料を、それぞれ40℃で溶媒〔クロロホルム〕へ溶解させ、濃度1mg/mlのサンプル溶液を準備した。
・測定条件
サンプル溶液0.1mlを溶媒(クロロホルム)、温度40℃、1ml/分の流速でカラムに導入し、カラムで分離されたサンプル溶液中のサンプル濃度を示差屈折計で測定した。樹脂の分子量は、ポリスチレン標準試料にてユニバーサル検量線を作成し、各樹脂の重量平均分子量(Mw)を算出した。実施例、比較例で用いた樹脂について測定した結果を表1に示した。なお、表1において、「LA」はLACEA H-400を表す。
以上のようにして得られた実施例1~8、比較例1~2の高分子圧電材料について、それぞれ、ガラス転移温度Tg、融点Tm、結晶化度、比熱容量Cp、厚さ、内部ヘイズ、圧電定数、MORc、寸法変化率を測定し、縦裂性評価を行った。
評価結果を表2に示す。
なお、具体的には、次のようにして測定した。
実施例および比較例の各高分子圧電材料を、それぞれ10mg正確に秤量し、示差走査型熱量計(パーキンエルマー社製DSC-1)を用い、昇温速度10℃/分の条件で測定し、融解吸熱曲線を得た。得られた融解吸熱曲線から融点Tm、ガラス転移温度Tg、比熱容量Cpおよび結晶化度を得た。
実施例および比較例の各高分子圧電材料を上記示差走査型熱量計で測定したときに、1g当たり1℃上昇させるのに要した熱量を測定した。測定条件はTg、Tmと同様の条件で測定した。
実施例および比較例の各高分子圧電材料を、MD方向に50mm、TD方向に50mmカットして、50mm×50mmの矩形フィルムを切り出した。このフィルムを85℃にセットしたオーブン中に吊り下げて、30分間アニール処理(以下、この寸法変化率評価のためのアニール処理を「アニールB」とする)した。その後、アニールB前後のMD方向のフィルム矩形辺長の寸法をノギスで測定し、下式に従い、寸法変化率(%)を算出し、その絶対値により、寸法安定性を評価した。寸法変化率が小さいほど寸法安定性が高いことを示す。
寸法変化率(%)=100×((アニールB前のMD方向の辺長)-(アニールB後のMD方向の辺長さ))/(アニールB前のMD方向の辺長)
本願でいう「内部ヘイズ」とは本発明の高分子圧電材料の内部へイズのことをいい、測定方法は一般的な方法で測定される。
具体的には、実施例および比較例の各高分子圧電材料の内部ヘイズ(以下、内部ヘイズ(H1)ともいう)は、厚さ方向の光透過性を測定することにより、測定した。より詳細には、予めガラス板2枚の間に、シリコンオイル(信越化学工業株式会社製信越シリコーン(商標)、型番:KF96-100CS)のみを挟んでヘイズ(H2)を測定し、次にシリコンオイルで表面を均一に塗らしたフィルム(高分子圧電材料)を、ガラス板2枚で挟んでヘイズ(H3)を測定し、下記式のようにこれらの差をとることで、実施例および比較例の各高分子圧電材料の内部ヘイズ(H1)を得た。
内部ヘイズ(H1)=ヘイズ(H3)-ヘイズ(H2)
測定装置:東京電色社製、HAZE METER TC-HIIIDPK
試料サイズ:幅30mm×長さ30mm(厚さは表2参照)
測定条件:JIS-K7105に準拠
測定温度:室温(25℃)
両面にAgの導電層が形成された40mm×40mmの試験片(高分子圧電材料)を、高分子圧電材料の延伸方向(MD方向)に対して45°なす方向に32mm、45°なす方向に直交する方向に5mmにカットして、32mm×5mmの矩形のフィルムを切り出した。これを、圧電定数測定用サンプルとした。得られたサンプルに、10Hz、300Vppの正弦波の交流電圧を印加したときの、フィルムの変位の最大値と最小値の差分距離を、キーエンス社製レーザ分光干渉型変位計SI-1000により計測した。計測した、変位量(mp-p)を、フィルムの基準長30mmで割った値を歪量とし、この歪量をフィルムに印加した電界強度((印加電圧(V))/(フィルム厚))で割った値に2を乗じた値を圧電定数d14(pm/V)とした。
実施例および比較例の各高分子圧電材料について、規格化分子配向MORcを、王子計測機器株式会社製マイクロ波方式分子配向計MOA-6000により測定した。基準厚さtcは、50μmに設定した。
実施例および比較例の各高分子圧電材料について、JIS K 7128-3の「プラスチックーフィルム及びシートの引裂強さ」に記載の試験方法「直角形引裂法」に準拠し、MD方向の引裂強さ及びTD方向の引裂強さをそれぞれ測定することにより、縦裂性評価を行った。
縦裂性評価において、MD方向の引裂強さ及びTD方向の引裂強さがいずれも大きいことが、縦裂強度の低下が抑制されていることを意味している。換言すれば、MD方向の引裂強さ及びTD方向の引裂強さの少なくとも一方が低いことが、縦裂強度が低下したことを意味している。
引裂強さの測定において、引張試験機のクロスヘッド速度は毎分200mmとした。
引裂強さ(T)は下式より算出した。
T=F/d
上記式において、Tは引裂強さ(N/mm)、Fは最大引裂荷重、dは試験片の厚さ(mm)を表す。
また、実施例1~8では、透明性に優れ(即ち、内部ヘイズが低く)、かつ、高い圧電定数(1pm/V以上)を示した。
一方、比較例2では、実施例1~8と圧電定数はほぼ同等であったが、実施例1~8と比較して縦裂強度(ここでは、MD方向の引裂強さ)が低下した。
なお、表2において、「N.D.」は、測定を省略したために測定結果が無いことを示している。
本明細書に記載された全ての文献、特許出願、および技術規格は、個々の文献、特許出願、および技術規格が参照により取り込まれることが具体的かつ個々に記された場合と同程度に、本明細書中に参照により取り込まれる。
Claims (13)
- 重量平均分子量が5万~100万である光学活性を有するヘリカルキラル高分子を含み、DSC法で得られる結晶化度が20%~80%であり、かつ、マイクロ波透過型分子配向計で測定される基準厚さを50μmとしたときの規格化分子配向MORcと前記結晶化度との積が25~250である、高分子圧電材料。
- 前記結晶化度が40.8%以下である、請求項1に記載の高分子圧電材料。
- 可視光線に対する内部ヘイズが40%以下である、請求項1に記載の高分子圧電材料。
- 前記規格化分子配向MORcが1.0~15.0である、請求項1に記載の高分子圧電材料。
- 25℃において変位法で測定した圧電定数d14が1pm/V以上である、請求項1に記載の高分子圧電材料。
- 前記ヘリカルキラル高分子は、光学純度が95.00%ee以上である、請求項1に記載の高分子圧電材料。
- 前記ヘリカルキラル高分子の含有量が80質量%以上である、請求項1に記載の高分子圧電材料。
- 可視光線に対する内部ヘイズが1.0%以下である、請求項1に記載の高分子圧電材料。
- 請求項1~請求項9のいずれか1項に記載の高分子圧電材料を製造する方法であって、
前記ヘリカルキラル高分子を含む非晶状態のシートを加熱して予備結晶化シートを得る第一の工程と、前記予備結晶化シートを同時に2軸方向に延伸する第二の工程と、を含む、高分子圧電材料の製造方法。 - 前記予備結晶化シートを得る第一の工程において、下記式で表される温度Tにおいて、結晶化度が1%~70%になるまで前記非晶状態のシートを加熱する、請求項10に記載の高分子圧電材料の製造方法。
Tg-40℃≦T≦Tg+40℃
(Tgは、前記ヘリカルキラル高分子のガラス転移温度を表す。) - 前記予備結晶化シートを得る第一の工程において、前記ヘリカルキラル高分子としてポリ乳酸を含む非晶状態のシートを20℃~170℃で、5秒~60分加熱する、請求項10に記載の高分子圧電材料の製造方法。
- 前記第二の工程の後に、アニール処理をする、請求項10に記載の高分子圧電材料の製造方法。
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| US13/981,488 US20140051825A1 (en) | 2011-12-13 | 2012-12-12 | Polymeric piezoelectric material, and process for producing the same |
| KR1020137028533A KR101489115B1 (ko) | 2011-12-13 | 2012-12-12 | 고분자 압전 재료 및 그 제조 방법 |
| JP2013520315A JP5313414B1 (ja) | 2011-12-13 | 2012-12-12 | 高分子圧電材料、およびその製造方法 |
| CN201280019129.6A CN103493235B (zh) | 2011-12-13 | 2012-12-12 | 高分子压电材料及其制造方法 |
| EP12857014.0A EP2662910B1 (en) | 2011-12-13 | 2012-12-12 | Polymeric piezoelectric material and method for manufacturing same |
| US15/263,862 US9905750B2 (en) | 2011-12-13 | 2016-09-13 | Polymeric piezoelectric material, and process for producing the same |
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| US15/263,862 Division US9905750B2 (en) | 2011-12-13 | 2016-09-13 | Polymeric piezoelectric material, and process for producing the same |
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| EP (1) | EP2662910B1 (ja) |
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| WO2022065454A1 (ja) | 2020-09-25 | 2022-03-31 | 三井化学株式会社 | 圧電デバイス、力センサー、及び生体情報取得デバイス |
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| CN105723534A (zh) * | 2013-11-26 | 2016-06-29 | 三井化学株式会社 | 高分子压电材料及其制造方法 |
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| JPWO2016002604A1 (ja) * | 2014-07-02 | 2017-04-27 | 三井化学株式会社 | 高分子圧電材料、積層体、高分子圧電材料の製造方法および積層体の製造方法 |
| US20170317268A1 (en) * | 2014-11-14 | 2017-11-02 | Mitsui Chemicals, Inc. | Polymeric piezoelectric film |
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| WO2018194180A1 (ja) | 2017-04-20 | 2018-10-25 | 三井化学株式会社 | 圧電基材、力センサー及びアクチュエータ |
| WO2019031414A1 (ja) | 2017-08-09 | 2019-02-14 | 三井化学株式会社 | センサモジュール及びこれを備えた圧力分布センサ |
| WO2020059573A1 (ja) | 2018-09-19 | 2020-03-26 | 三井化学株式会社 | 人体検出装置、ベッド装置及び人体検出システム |
| WO2022065454A1 (ja) | 2020-09-25 | 2022-03-31 | 三井化学株式会社 | 圧電デバイス、力センサー、及び生体情報取得デバイス |
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| Publication number | Publication date |
|---|---|
| KR20140003616A (ko) | 2014-01-09 |
| EP2662910B1 (en) | 2017-02-01 |
| US9905750B2 (en) | 2018-02-27 |
| JPWO2013089148A1 (ja) | 2015-04-27 |
| EP2662910A4 (en) | 2014-11-19 |
| CN103493235B (zh) | 2015-09-02 |
| US20140051825A1 (en) | 2014-02-20 |
| US20160380180A1 (en) | 2016-12-29 |
| JP5313414B1 (ja) | 2013-10-09 |
| KR101489115B1 (ko) | 2015-02-02 |
| CN103493235A (zh) | 2014-01-01 |
| EP2662910A1 (en) | 2013-11-13 |
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