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WO2013064395A1 - Dispositif permettant de déterminer de façon optique la géométrie de surface d'un échantillon tridimensionnel - Google Patents

Dispositif permettant de déterminer de façon optique la géométrie de surface d'un échantillon tridimensionnel Download PDF

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Publication number
WO2013064395A1
WO2013064395A1 PCT/EP2012/070965 EP2012070965W WO2013064395A1 WO 2013064395 A1 WO2013064395 A1 WO 2013064395A1 EP 2012070965 W EP2012070965 W EP 2012070965W WO 2013064395 A1 WO2013064395 A1 WO 2013064395A1
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WIPO (PCT)
Prior art keywords
line
focus
dispersive
optical arrangement
plane
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PCT/EP2012/070965
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German (de)
English (en)
Inventor
Miro Taphanel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Karlsruher Institut fuer Technologie KIT
Fraunhofer Gesellschaft zur Foerderung der Angewandten Forschung eV
Original Assignee
Karlsruher Institut fuer Technologie KIT
Fraunhofer Gesellschaft zur Foerderung der Angewandten Forschung eV
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Publication of WO2013064395A1 publication Critical patent/WO2013064395A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2210/00—Aspects not specifically covered by any group under G01B, e.g. of wheel alignment, caliper-like sensors
    • G01B2210/50—Using chromatic effects to achieve wavelength-dependent depth resolution

Definitions

  • the present invention relates to an apparatus for optically determining the surface geometry of a three-dimensional sample, which is also referred to below as a confocal chromatic line triangulation sensor.
  • Confocal systems, confocal chromatic systems and also triangulation sensors for optical 3D surface measurement are already known from the prior art. See, for example, DIN EN ISO 25178-602: 2011-01.
  • the corresponding confocal sensors usually have a punctiform measuring spot. If the three-dimensional structure of a surface of an object or a sample is to be detected, then the surface can be traced out in a grid pattern. Two principles have prevailed here.
  • a dispersive element focuses the light at different levels depending on the wavelength. Reflected light, which is focused on the surface, has a significantly higher intensity than light that is not focused (see also the aforementioned standard) .A spectrometer then identifies the wavelength with the highest intensity Distance surface
  • a point sensor does not allow an efficient detection of a surface, as a meandering Ab ⁇ drive the entire surface with a lot of time is necessary.
  • the illumination of the individual measuring points is additionally superimposed.
  • the intensity of the focused wavelength is less pronounced than the superimposed wavelengths.
  • the measuring points must therefore not be too close to each other, so they must each have a distance from each other, so that the intensity of the laterally superimposed light is not too strong. See here e.g. the product
  • the object of the present invention is therefore to provide a device for optically determining the surface geometry of a three-dimensional sample, with the three-dimensional
  • the present invention enables an optical contactless measurement of the three-dimensional surface geometry of a sample or an object, wherein the surface is detected line by line.
  • a plurality of individual measurement points in a row next to one another are simultaneously available for scanning, so that a certain width, that is to say an entire line, can be detected with one measurement process at a time. Moving the scanned object (or device relative to this object) then allows scanning of the next line.
  • the present invention thus extends the idea of a confocal chromatic sensor known per se to the effect that not only one measuring point at a time is available, but at this time an entire line (ie a one-dimensional line) with measuring points lying close to each other at the same time can be evaluated.
  • the present invention initially starts from the confocal chromatic point sensor known per se, in which a polychromatic point source (light source together with a punctiform aperture arranged behind it) is split chromatically by a lens so that different focus points result on the optical axis. If a surface is held in this chromatically split light cone, the result is that exactly one wavelength is focused exactly on this point and all other wavelengths are focused either in front of or behind it. Although all monochromatic wavelengths are superimposed on the surface of the measurement spot (measurement spot), the intensity of the focused wavelength is significantly higher, but due to the superimposition, a spectrometer is required that can measure the wavelength of the intensity maximum.
  • a device for optically determining the surface geometry of a three-dimensional sample now has: a polychromatic light source, a slit diaphragm arranged in the beam path of this light source, a dispersive and focusing optical arrangement arranged in the beam path after the slit diaphragm and designed and / or arranged in this way is that they are the image of the slit diaphragm for different wavelengths in the spectrum of Light source focused on different, on a predefined surface (hereinafter also referred to as focus line area) in the spatial space ⁇ hereinafter also by the world coordinate system with the three faxsi- see coordinates x, y and z) spaced lines (hereinafter also referred to as focus lines), and an imaging optical arrangement.
  • a predefined surface hereinafter also referred to as focus line area
  • focus lines spaced lines
  • the two func ⁇ NEN the dispersion and the focusing can be realized with a single optical element.
  • a plurality of optical elements for example a first element for the dispersion and a second element for the focusing.
  • the imaging optical arrangement forms sections of the focal line area (preferably: the entire focus line area on which the individual wavelengths of the polychromatic spectrum of the light source come to rest) and / or at least several, but preferably all, of the focus lines on one and the same line that follow also referred to as a scan line, focused in space from.
  • the scanning line can then be scanned by a spatially resolving and wavelength-resolving detection element (for example, a line detector comprising individual RGB pixels), ie optically detected.
  • the sample is positioned in space (or inserted into the field of the focus lines) in such a way that the sample (or at least a surface portion of it) intersects the focal line area.
  • a spatially resolving and wavelength-resolving detection element is understood to mean a detector having different wavelengths in the spectrum can detect the polychromatic light source separately from each other, so the wavelength of each incident on the individual detector pixels light can determine.
  • it may be an RGB line sensor.
  • the dispersive and focusing optical arrangement is designed and / or arranged such that the image of the slit diaphragm for several (preferably: all) wavelengths in the spectrum of the light source from one and the same side of the focus line surface on exactly this focal line area
  • the predetermined focus line surface in the preferred case is a plane (focus line plane)
  • all optical elements of the device according to the invention lying on the radiation incident side ie the light source, the slit diaphragm and the dispersive and focusing optical arrangement
  • the dispersive and focusing optical arrangement then focused from this half space, the individual focus lines spaced apart on the focus line plane .
  • the imaging optical arrangement and the detection element are then preferably on the other side of the focal line plane, that is arranged in the other half-space.
  • the dispersive and focusing optical arrangement adapted and / or arranged such that the focus line surface is not more cuts for the different wavelengths, the beam path after the jeweili ⁇ gen focus line. In the device according to the invention then cuts for each wavelength of the spectrum of the polychromatic light source the beam path the predetermined focus line area exactly once.
  • the optical axis of the incident beam path is preferably a finite angle of eg greater than 10 °, preferably greater than 20 °, preferably 30 ° inclined with respect to the focal line plane (the focus lines are thus not formed on the optical axis, but in a tilted plane).
  • the dispersive and focusing optical arrangement is thus formed and / or arranged such that the
  • Slit diaphragm for the different wavelengths on a predefined plane in space, the focus line plane, is shown focused.
  • the (optionally a plurality of individual optical elemen ⁇ te comprehensive) dispersive and focusing optical arrangement of a hand, and the imaging optical arrangement, on the other hand (or at least each individual of the respective assembly-forming optical ele- ments) can be realized symmetrically seen relative to the focus line surface.
  • the focus line surface has a focus line plane, this means that the dispersive and focusing optical array on one side of this plane and the imaging optical see arrangement on the other side of this plane seen ⁇ as in respect to this plane arranged mirror-symmetrical to each other and / or are aligned.
  • the beam output side ⁇ eg half-space of the image Denden optical arrangement have a preferably arranged directly in front of the detection element slit. This can, viewed in relation to the focal line area, be arranged symmetrically (in the case of a focal line plane: mirror-symmetrical with respect to this plane) to the slit diaphragm of the polychromatic light source.
  • the gap width of the two slit diaphragms is preferably in the range between 10 ⁇ m and 300 ⁇ m.
  • the dispersive and focusing optical arrangement as the essential optical imaging element on a simultaneously acting as a dispersive and as a focusing element reflective concave grid.
  • the imaging optical arrangement may have a reflective, concave grid acting simultaneously as a dispersive and a focusing element.
  • the two gratings are preferably arranged mirror-symmetrically to the focus line plane and aligned.
  • Such reflective concave gratings which act simultaneously as the primary dispersive element and as the primary focusing element, are known to those skilled in the art (see, for example, the so-called reflective concave blazed holographic gratings of Edmund Optics Inc. , 101 East Gloucester Pike, Barrington, NJ 08007-1380 USA).
  • the imaging optical arrangement then preferably comprises a lens (camera lens) and can be used as a simple line scan. mera (or area camera, in which only a single line is exploited) be formed.
  • the objective then forms the focus line surface and / or the focus lines focused on a scan line lying in the focus line surface itself.
  • the imaging optical arrangement in which the scanning line on the side of the imaging optical arrangement, e.g. is positioned in the corresponding half-space laterally of the focus line plane, the imaging optical arrangement can thus be positioned, formed and aligned so that it focuses a focused directly on the focus line surface scan line.
  • the imaging optical arrangement as well as the detection element are preferably also positioned in the focal line plane for this purpose.
  • the dispersive and focusing optical arrangement may be formed in multiple parts from ⁇ , ie it may be a dispersive element
  • the dispersive element of the dispersive and focusing optical arrangement is preferably a transmission grating or a prism (preferably a straight-line prism).
  • the focusing part of the dispersive and focusing optical arrangement may be a focusing system comprising a plurality of lenses in one
  • a dispersive element or a dispersive device
  • a focusing optical system which may preferably also be designed in Scheimpflug arrangement
  • dispersive and focusing arrangement conceivable, provided that they meet the prescribed function to focus terraced illustration of different focal lines ⁇ surface.
  • dispersive and focusing optical arrangement it is conceivable to form the dispersive and focusing optical arrangement as a lens system with wavelength-dependent refractive index.
  • a dispersive (that is, the refractive index changes with wavelength) and / or a diffractive (that is, the light is diffracted differently for different wavelengths) element e.g. as the chromatic aberration ausnutzendes grid and / or prism can be formed, be arranged.
  • This element (s) must then satisfy the above-mentioned condition of the focal line area, wherein a suitable imaging optics can be added for realizing the desired beam path, preferably incident from a single side on the focal line area.
  • the location and wavelength-resolution detection element in the beam path of the imaging optical arrangement may comprise a line sensor. This can be positioned at the point of scan line or seen in the beam path directly behind one of the abtrucken- at the site of Abtastli ⁇ never positioned further slit diaphragm be arranged the optical arrangement.
  • the detection element can have an area sensor.
  • a sensor line of this surface sensor is positioned at the location of the scanning line or, viewed in the beam path, arranged immediately behind a further slit diaphragm of the imaging optical arrangement positioned at this location.
  • the detection element may be, for example, a line sensor in the form of a one-dimensional line array or even an area sensor in the form of a two-dimensional area array of pixels which can detect, separate and detect the different wavelengths of the focus lines.
  • a line sensor in the form of a one-dimensional line array or even an area sensor in the form of a two-dimensional area array of pixels which can detect, separate and detect the different wavelengths of the focus lines.
  • RGB cameras with corresponding pixels can be used for this purpose. It is exploited that monochromatic light can produce a color impression on an RGB sensor. By means of a calibration can be deduced from this color impression on a wavelength.
  • the device To scan the cutting line of the surface of the sample, either the sample relative to the device or vice versa, the device must be moved relative to the sample.
  • an arrangement is provided according to the invention comprising a device according to one of the preceding claims and a drive unit for realizing this relative movement.
  • the sample with a space x, y, z sliding sample holder through the
  • Focus line surface of the device immovably moved in the space x, y, z.
  • a sample holder fixed in space, fixing the sample, and to position the device on a displacement table which is movable relative to the sample or to the sample holder.
  • the device or the focus area realized by them in the space can be moved relative to the sample.
  • Figure 2 is a sketch for the incidence of
  • FIG. 3 shows a basic embodiment of the present invention with an imaging optical arrangement designed mirror-symmetrically to the dispersive and focusing optical arrangement.
  • FIG. 4 shows a plan view of an arrangement according to FIG. 3.
  • Figure 5 shows a first concrete embodiment of the construction of a device according to the invention with a symmetry between the dispersive and focusing optical arrangement on the one hand and the imaging optical arrangement on the other.
  • a second concrete embodiment of the present invention with a non-symmetrical structure.
  • a third concrete Auscul ⁇ tion example with a separate from a dispersive element formed focusing system in both the dispersive and focusing optical arrangement and in the imaging optical arrangement. a non-inventive, alternative approach.
  • FIG. 1 a shows a sketch of a basic structure (without the imaging optical arrangement 6, cf. FIG. 3) for carrying out the invention in the Cartesian spatial space x, y, z.
  • a gap Aperture 3a (gap width between 10 and 300 ⁇ m) is arranged in the beam path 2 of the light source 1 behind the slit diaphragm 3a, which is designed and arranged such that it images the slit diaphragm 3a for the different wavelengths in the visible emission spectrum of the polychromatic light source 1, each focused on different, on a predefined surface, which is here a plane (focus line plane 5 parallel to the yz plane), spaced lines, the focus lines Discretely spaced apart individual wavelengths in the spectrum of the light source
  • All focal lines Ii 1 to 4 are parallel to the cleavage direction 3a in the y direction.
  • detector e.g. in the form of a sensor with a pixel line aligned parallel to the y-direction, which can distinguish the individual wavelengths or colors of the visible light of the source 1 from one another, it is possible to obtain color information obtainable by means of this sensor for the above-described y-coordinate
  • the entire object surface P can be scanned step by step or line by line.
  • Components such as sliding tables, ekthalter, ... to realize the corresponding relative movement are known in the art.
  • FIGS. 1a and 1b With the structure of the present invention outlined in FIGS. 1a and 1b, the following advantages can be achieved in comparison with the prior art:
  • a simple single-line pixel detector from, for example, RGB camera pixels can be used as the detector or detection element.
  • a significant increase in the measurement speed can be achieved, since by using such as an RGB camera no more spectrometer must be used.
  • fewer and less expensive components are needed to perform the 3D surface scan. Since all of the optical imaging elements used (compare, in particular, also below, FIGS.
  • the chromatically split light 2 in the focal point or in the focus lines 1 is unmixed, there is a fo kissed light spot on a surface of monochromatic light.
  • the color impression of monochromatic light can not be changed by the surface color of the sample P.
  • a spectrometer can be dispensed with and the color impression of an RGB camera can be used to directly deduce the wavelength and thus the height information.
  • the device according to the invention is also not designed to be telecentric.
  • the telecentric constructions inherent disadvantages that less
  • a one-dimensional slit 2 is preset.
  • the slit diaphragm is imaged wavelength-dependent by the dispersive and focusing optical arrangement 4.
  • the optical arrangement 4 is so pronounced that the focus lines 1 are located one above the other in a focal line plane 5 in the z-direction.
  • the demixing is achieved by organizing the focal lines of the individual wavelengths in one plane and the light 2 of the illumination 1 (relative to the optical axis of light source 1, slit 3a and optical arrangement 4) is incident on the plane 5 only from one side.
  • This tilt angle is thus chosen so that all light rays incident on the side of the plane 5 of the focus lines 1.
  • Such a tilting has the consequence that in the presence of a surface of a
  • Probe P demixing of the polychromatic light takes place in the plane 5 of the focus lines.
  • the focus points are organized in one plane.
  • imaging optical Anord ⁇ voltage must 6 are formed and arranged to image the focus points, or so-lines on the detection element, that only the sharply on the line of intersection between the object upper Smile Friend and the predefined focus line surface, that is Focused imaged wavelength is sharply imaged on the detection element (whereas all non-focused on the corresponding cutting line incident wavelengths then just not be allowed to focus on the detection element).
  • the focal points or lines 1 of the different wavelengths ⁇ , the linienflä ⁇ che 5 form in a predefined geometric shape, then it must for these focal lines - or interface apply that any possible, emanating from the source 1 illumination beam in the beam path 2 from the same side (ie, for example, in Figure la from left to the focal plane 5 lying half space) from this focus line surface and never hits after exactly one-time impact again this focus line surface pierces.
  • the individual focus lines 1 need not be arranged vertically one above the other, for example also an oblique arrangement conceivable.
  • these optics 4, 6 When using an identical imaging optics on the radiation incidence side and the radiation failure side, ie an identical dispersive and optical arrangement on the one hand and imaging optical arrangement on the other hand, these optics 4, 6 usually symmetric, e.g. mirror symmetry to a focal line plane 5, are arranged.
  • Tilt angle between the optical axis of the elements 1, 3a and 4 on the one hand and the level 5 on the other ⁇ be selected in a range which is limited by the following two conditions (see also Figure 2, identical reference numerals designate identical elements of the device):
  • the minimum tilting is achieved if the angle of the langwel ⁇ ligsten, still provided for imaging wavelength (here, the angle of the wavelength ⁇ 4) relative to the yz plane to zero.
  • a smaller tilt from level 5 would cause this longest wavelength light to pierce level 5 from the other side.
  • the maximum tilt angle is given by the angle of the shortest wave still provided for imaging light (here: ⁇ ) to the horizontal or to the xy plane. If an even greater tilt angles can be set, the object P would be illuminated from below, which is no longer with the detection element 8 (see below) according ⁇ weisbar.
  • Tilt angle results in its concrete size ultimately from the interaction of the Aperture diaphragm (angle of the cone of light in the beam path 2 after the slit diaphragm 3a), the wavelengths intended for imaging ⁇ the steepest and flattest beam of light) and the plane 5 of the focal points. If the above-described condition is fulfilled, then the light on the surface P segregates independently of the concrete surface geometry. However, the segregation takes place only at the point at which the plane 5 of the focus lines intersects the surface P. (This statement is strictly speaking only for one
  • FIG. 3 outlines a basic arrangement for the present invention in accordance with the principle sketched in FIGS. 1 and 2, which is characterized by a mirror-symmetrical arrangement of the focusing-plane 5 of the dispersive and focusing optical arrangement 4 on the one hand and the imaging optical arrangement 6 on the other hand.
  • the individual elements of the optical arrangement 4 on the one hand and the individual elements of the optical arrangement 6 on the other hand are arranged on both sides of the plane 5 in pairs mirror-symmetrically to this plane, designed and aligned unless otherwise stated below.
  • identical reference numerals denote identical components in comparison with FIGS. 1 and 2.
  • the dispersive and focusing optical arrangement 4 is arranged and aligned on one side ⁇ left half space 5a) of the plane of symmetry 5 such that all the wavelengths ⁇ used for imaging are made of this
  • the imaging optical arrangement 6 is now arranged and mirror-symmetrical to the arrangement 4 so formed and aligned that the focus lines 1 ⁇ to I4 in the beam path 2 by this imaging arrangement 6 focused on one and the same line, the scan line 7, are shown.
  • the scanning line 7 is in the half space opposite half space 5a mirror-symmetrical ⁇ with respect to the plane 5) positioned to the gap opening 3a, so represents the superimposed with respect to the individual wavelength ⁇ image of the gap 3a. At the location of the scan line 7 is
  • Detection element 8 in the form of a one-dimensional, mirror-symmetrical ⁇ with respect to the plane 5) to the gap 3a, so arranged in the y-direction, aligned RGB pixel detector.
  • the varying z coordinates of a sample P introduced into the line field Ii to I can thus be detected spatially resolved and resolved in a wavelength-resolved manner along the focal lines or in the y direction.
  • FIG. 4 which shows a structure corresponding to FIG. 3 in plan view (that is, opposite to the z-direction)
  • optically identical optics for the dispersive and focusing optical arrangement 4 on the beam output side that is to say as the imaging optical arrangement 6 may even be advantageous if, as shown in FIG. 4, an arrangement 6 is used for the optical imaging, which collects more light (in the spatial dimension in the direction of the sensor, ie the y-direction, as far as possible all light should be exploited)
  • the plane 5 of the focus lines is always parallel to the longitudinal direction of the gap 3a and the longitudinal direction of the line sensor 8.
  • FIG. 5 now shows a concrete structure of the invention, in which the two optical tasks of the dispersive and focusing arrangement 4, ie the splitting of the light into its components as a function of wavelength (dispersive element) and the focusing of this split light onto the focal line surface 5 (focusing element) , is solved by a single assembly (reflective, concave grating 10).
  • Identical reference symbols again designate identical components as in FIGS. 1 to 4.
  • the polychromatic light 2 of the source 1 is after the gap 3a first (to allow a compact space of the entire device) led to a first mirror 9a, the beam path 2 on a reflective concave holographic grating. 10a of the Edmund Optics Inc. company.
  • the mirror 9a and the grating 10a taking over both the dispersive and the focusing function thus form the dispersive and focusing optical arrangement 4 in the half space 5a to the left (ie on the radiation input side of the) focus line plane 5.
  • the imaging optical arrangement 6 of the beam output side in the half space lying on the right of the plane 5 also has a reflective, concave, holographic grating 10b and, in the beam path thereafter, a plane mirror 9b.
  • the two mirrors 9a and 9b are arranged mirror-symmetrically to the plane 5 and aligned and formed identically. The same applies to the two grids 10a and 10b.
  • the focal lines Ii, 1 2 ,... Of the plane 5 are thus focused on the mirror 10b via the mirror 9b Scanned line 7 shown.
  • the beam path on the beam output side is mirror-symmetrical (to plane 5) to the beam path on the incident side.
  • an imaging gap 3b is arranged on the radiation output side (which is identical to the column 3a), which additionally shields the single-line detector 8 positioned at the location of the scan line 7 against this beam component which is undesirable for the detection.
  • this gap 3b is not necessary and can accordingly be omitted.
  • An additional imaging optics in the form of e.g. a lens or the like for imaging the output beam path on the detection element 8 is thus not necessary.
  • each incident wavelength is generated in the corresponding pixel along the y-axis.
  • Direction a different color impression (at varying along the y-direction height z of the surface P), which uniquely identifies this wavelength and thus the local height.
  • a one-time calibration of the sensor 8 is necessary in order to determine the correlation wavelength / color on the one hand and the assigned height of the sample P in the z-direction on the other hand.
  • the two gratings 10a and 10b are so formed that the focal lines 1 do not lie on a plane but on a focus line surface in the form of a sphere portion.
  • the construction results in this case by means of the so-called Rowland circle (compare, for example, also L.
  • the corresponding grating must be calculated for the spectrum of the light source 1. Accordingly, it is of course not only possible to use light sources emitting in the visible range (about 350-750 nm) as the light source 1, but also, for example, as a light source. also in the UV range or in the IR range emitting.
  • Figure 6 shows a second concrete embodiment of the present invention, which basically How the embodiment shown in Figure 5 is realized, so that only the differences will be described below.
  • the optical arrangement 6, which in this case consists of a simple camera lens of an RGB camera, is arranged here in the focal line plane 5 just like the individual line of the RGB camera serving as detection element 8. 6 and 8 are formed in the camera body 13.
  • the viewing direction of the camera 6, 8 is in the plane 5 in -z- direction, ie from above on the individual focus lines 1. Accordingly, the focal length of the camera lens designed as an optical arrangement 6 thus the field of the individual focus lines Ii, l 2f .. ., at least in sections sharply imaged on a single, in the plane 5 and parallel to the y-direction RGB line 8 as a detection element.
  • the variant shown has the advantage of a simpler construction than the variant of the invention shown in FIG. 5, since it only considers the focal line plane or the now colored surface of the sample P with a commercially available line scan camera. (Areas outside the section line between sample surface P and level 5 are indicated by the forming optical arrangement 6 to other, not used for evaluation, not lying in the plane 5 single lines of the line scan camera. ⁇ Prerequisite for the construction shown is that the depth of field of the camera used together with the lens sufficient to the entire desired measurement range, ie a Sufficient section of the plane 5 seen in the z-direction, sharp image.
  • FIG. 7 shows an arrangement which is fundamentally identical to the arrangement shown in FIG. 3, so that only the differences will be described below.
  • FIG. 7 shows a further concrete embodiment of the present invention, in which the dispersive and focusing optical arrangement 4 has a plurality of individual optical elements (ie, the dispersion and focusing functions are separate). The same then applies to the symmetrical to the focal plane 5 formed optical arrangement. 6
  • the dispersive and focusing arrangement 4 initially has a first collection point.
  • Lens 12a ' through which the polychromatic light 1 is imaged after the slit diaphragm 3a to infinity.
  • This parallel light impinges in the beam path 2 after the converging lens 12a ' on a dispersive optical element IIa, which is here designed as a transmission grating and that the light decomposed into its spectral components (shown at the wavelengths ⁇ to ⁇ 3 , the 3 correspond to wavelengths shown).
  • a prism in particular a straight-viewing prism (also called a dispersion prism).
  • Each wavelength ⁇ to ⁇ 3 thus leaving the Transmissi- onsgitter IIa at a different angle and is incident on a second converging lens 12 '' of the arrangement 4.
  • This second condenser lens 12a '' of the arrangement 4 focuses the light of the different wavelengths ⁇ (each of which for the individual wavelengths ⁇ to ⁇ 3 is parallel, but in each case incident on the converging lens 12a '' at a different angle) on a virtual plane Ela.
  • a sharp intermediate image of the gap 3a arises for each wavelength.
  • This plane Ela is used as the focal plane of a Scheimpflug arrangement.
  • the focus line plane 5 forms the image plane of these known to those skilled in Scheimpflug configuration and the lens main plane of the Scheimpflug is a further, third collecting lens 12a '' 'of the assembly 4 is positioned (this plane is indicated by the stressesszei ⁇ chen E2a).
  • this plane is indicated by the strainszei ⁇ chen E2a.
  • the planes Ela, E2a and 5 intersecting in the common intersection line P £ (in which the Scheimpflug condition is fulfilled) form the three planes for which the Scheimpflug condition is fulfilled
  • Scheimpflug condition will thus be the sharp Plots of the gap (ie, the focus lines of the gap) on the plane Ela imaged on the focal plane 5.
  • the Scheimpflug condition in the line P s is satisfied, ie the intermediate image plane Ela is optically focused by the converging lens 12a '''in the plane E2a on the focus line plane 5.
  • this dispersive and focusing optical arrangement thus form the three lenses 12a ' to
  • Scheimpflug arrangement on the side of the imaging optical arrangement 6 is the focus line plane 5), the focus line plane 5, the plane E2b and the plane Elb thus also intersect in the
  • the symmetrical optical structure 6 takes over the imaging function on the detection element 8.
  • the functions "focus” and “dispersion” therefore need not necessarily be solved by one and the same optical element (on the imaging side, the element IIb forms the dispersive element of the arrangement 6 and the three lenses 12b 'to 12b' '' form the focusing system 12b ⁇ .
  • FIG. 8 does not show the present invention but an alternative procedure: If the surface color of the sample P is known or if it is measured separately, the illumination by the source 1 does not necessarily have to be monochromatically demixed. It can be three light sources in eg blue, red and green (light sources ⁇ -LQ, ...) via a Lin ⁇ se Scheimpflug arrangement (tilted lens 4 ') are mapped. Thus, a rainbow pattern can be projected using, for example, an RGB projector. The colors are laterally projected at an angle so that the color encodes a specific height. Alternatively, no RGB projector can be used, but a prism, in combination with white light.
  • the actual illumination plane is defined blurred, so that the individual wavelengths in the plane 5 ', by the imaging optical assembly 6' with the Detection element 8 'is considered sitting in this plane 5', mix. This mixing results in a rainbow pattern. Thus, a correlation can again be found between the height in the z direction and the measured color.
  • the disadvantage when no monochromatic light or monochromatic separation is used is that the surface color of the sample P falsifies the result. Thus, the surface color must be measured extra or only monochrome surfaces may be measured.
  • the present invention ( Figures 1 to 5 and 7) can be used for any specular and non-specular objects for their surface measurement. Only with too dark objects, which reflect too little light, the invention can not be used. Due to the expected high speeds are also inline processes of interest, the device erfindungsgeraäße can thus be used in particular in the form of a workstation for complex processes. Particularly with reflective surfaces, for example la ⁇ For short- surfaces, the invention has great advantages in terms of fast and flexible measurement has.
  • a concrete application is, for example, the conductor track or printed circuit board inspection.

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  • Engineering & Computer Science (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

La présente invention concerne un dispositif permettant de déterminer de façon optique la géométrie de surface d'un échantillon tridimensionnel, comportant une source de lumière polychromatique, un diaphragme à fente disposé dans la trajectoire du rayonnement émis par la source de lumière, un système optique de dispersion et de focalisation lequel est disposé dans ladite trajectoire du rayonnement en aval du diaphragme à fente et lequel est réalisé et/ou disposé de façon à focaliser pour différentes longueurs d'onde présentes dans le spectre de la source de lumière, la représentation produite par le diaphragme de fente afin d'obtenir différentes lignes espacées les unes des autres sur une surface prédéfinie (plan des lignes focales), et un système optique de représentation lequel focalise dans l'espace au moins certaines parties du plan des lignes focales et/ou plusieurs, de préférence toutes les lignes focales, de manière à obtenir une seule ligne (ligne de balayage) qui est balayée par un élément de détection permettant une résolution spatiale et une résolution selon les longueurs d'onde ou qui peut être balayée ainsi, ledit échantillon pouvant être positionné ou étant positionné dans l'espace de manière à couper la surface des lignes focales.
PCT/EP2012/070965 2011-11-03 2012-10-23 Dispositif permettant de déterminer de façon optique la géométrie de surface d'un échantillon tridimensionnel Ceased WO2013064395A1 (fr)

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DE201110117523 DE102011117523B3 (de) 2011-11-03 2011-11-03 Vorrichtung zur optischen Bestimmung der Oberflächengeometrie einer dreidimensionalen Probe
DE102011117523.0 2011-11-03

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