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WO2013045249A1 - Spectromètre à foyer commun et procédé d'imagerie dans un spectromètre à foyer commun - Google Patents

Spectromètre à foyer commun et procédé d'imagerie dans un spectromètre à foyer commun Download PDF

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Publication number
WO2013045249A1
WO2013045249A1 PCT/EP2012/067418 EP2012067418W WO2013045249A1 WO 2013045249 A1 WO2013045249 A1 WO 2013045249A1 EP 2012067418 W EP2012067418 W EP 2012067418W WO 2013045249 A1 WO2013045249 A1 WO 2013045249A1
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WO
WIPO (PCT)
Prior art keywords
light
light source
spectrometer
holes
spectrally
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/EP2012/067418
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German (de)
English (en)
Inventor
Anton Schick
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Siemens Corp
Original Assignee
Siemens AG
Siemens Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG, Siemens Corp filed Critical Siemens AG
Priority to JP2014532305A priority Critical patent/JP5840789B2/ja
Priority to EP12769970.0A priority patent/EP2764336A1/fr
Publication of WO2013045249A1 publication Critical patent/WO2013045249A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/2803—Investigating the spectrum using photoelectric array detector
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/2823—Imaging spectrometer
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/0036—Scanning details, e.g. scanning stages
    • G02B21/0044—Scanning details, e.g. scanning stages moving apertures, e.g. Nipkow disks, rotating lens arrays
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J2003/1204—Grating and filter
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J2003/1208—Prism and grating

Definitions

  • the present invention relates to a confocal Spektrome ⁇ ter and a method for imaging in a confocal spectrometer.
  • Confocal spectrometers work on the basis of optical systems, which have a common focus. As a result, a spatially pointwise measurement of scattered light can be made on an object to be imaged.
  • Previous single-channel spectrometers generally use a line scan camera to record the spectrum for a channel. Therefore, it is only possible by rasterization of the object surface, that is, to capture a spatially resolved image of the object over a temporal scan.
  • Multi-channel spectrometers use a camera chip for the cell-like scanning of a surface, with a spectral resolution on the camera chip in a direction perpendicular to the spatial resolution.
  • Such systems are also known as so-called hyperspectral imaging systems ("hyperspectral imaging").
  • hyperspectral imaging Even with these systems, a rasterization of the object surface for imaging the object is necessary.
  • Document EP 1 984 770 B1 discloses a confocal spectroscopy system wherein a coding of a profile of an object takes place via the spectral profile of a polychromatic light source.
  • an imaging optical system is used with chronic matic aberration to witness a wavelength dependent position of the mapping focus along the optical axis to he ⁇ .
  • Document DE 697 300 30 T2 discloses a confocal spectroscopic imaging system in which modulator means are used for imaging an illumination pattern onto an object to be imaged so that a spatial resolution of the object is possible via the illumination pattern sequence.
  • Spectrum of the reflected or scattered light to produce an image contrast provides.
  • One aspect of the present invention therefore consists in a confocal spectrometer, comprising a broadband light source, a rotatable first diaphragm device arranged in front of the light source with a structured arrangement of a multiplicity of through holes, which is designed to pass through the field of view of an object to be imaged
  • An essential idea of the invention is a fully ⁇ constant spatial resolution simultaneously with a full spectral resolution of the image of an object in a
  • the confocal technique is used with an imaging diaphragm device and a detector diaphragm device corresponding to the imaging diaphragm device, wherein the diaphragm devices each have a structured pattern of through-holes exhibit.
  • different diaphragm devices can be used if the dispersion element is not arranged in the imaging optics.
  • a different beam path for incident and reflected light can be realized within the imaging optics, so that the same diaphragm device can be used for imaging and light detection.
  • the spectrometer may comprise a rotatable second diaphragm device having a structured arrangement of a multiplicity of through holes which corresponds to the structured arrangement of the plurality of through holes of the first diaphragm device, the second diaphragm device being arranged between the dispersion element and the detector device is such that the light reflected from the object, spectrally dispersed light is imaged by confocal arrangement of the structured multi ⁇ number of through holes of the second diaphragm device to the detector device.
  • the second diaphragm device can be displaceable perpendicular to the optical axis of the spectrometer for selecting a wavelength of the reflected light of the object to be detected by the detector device. This advantageously enables the mechanical selection of a wavelength of the reflected light to be imaged. As a result, complete spatially and spectrally resolved images of an object can be confocal detected in a very short time.
  • the first diaphragm device and / or the second diaphragm device may be a Nipkow disc. In this way a geometrically opti ⁇ -optimized illumination of the entire object can overlapping by various through holes he ⁇ follow without incident light.
  • the imaging optics may include a first optical path for the light striking the object from the light source and a second optical path for having the reflected light from the object, and the dispersion element may be arranged in the second optical path.
  • the first diaphragm device may comprise a multiplicity of cylindrical lenses which are designed to image light of the light source onto the gaps of the first slotted screen. This offers the advantage that the light intensity of the light source can be maximally exploited, since almost all the light of the light source can be collimated onto the gap grid.
  • the dispersion element may comprise a prism, a diffraction grating, an interference filter or an acousto-optic modulator.
  • the detector device may comprise a CCD sensor array, a CMOS sensor array or an avalanche photodiode array.
  • the detector device can be designed to spectrally resolve reflected pixels of the object along an array axis. This is particularly advantageous because individual image pixels of the Ob ⁇ jekts can be mapped to a respective sub-array of pixels of the array of the detector device. Using this sub-arrays of pixels can be created then both spatially and spectrally resolved images of an object, which an in ⁇ formation enrichment means particularly for medical imaging applications in spatial representations of objects.
  • the light source may be a white light source.
  • each spectral component is advantageously at any time during imaging equally available in the reflected light spectrum for detection. In particular, can thereby be construed simultaneously ER- different Wel ⁇ lenandern of the reflected light spectrum.
  • the present invention in another aspect, provides a method of imaging in a confocal spectrometer, comprising the steps of imaging a broadband light source through a rotatable aperture device having a structured array of a plurality of through holes, focusing the image of the patterned array of the plurality of through holes on an object being imaged, the spectral dispersion of the light reflected by the Whether ⁇ ject light using a dispersing element, focusing the reflected spectrally dispersed
  • the method may include the step of translating the rotatable aperture device along the dispersion axis direction to select the wavelength of the detected light.
  • the method may comprise the step of shifting the dispersion element perpendicularly to the optical axis of the spectrometer for selecting the wavelength of the detected light.
  • FIG. 1 is a schematic representation of a confocal
  • FIG. 2 shows a schematic representation of a diaphragm device of a confocal spectrometer
  • Fig. 3 is a schematic representation of an image of a
  • Fig. 5 is a schematic representation of an image of a
  • Fig. 6 shows a schematic representation of a diaphragm device of a confocal spectrometer
  • Fig. 7 is a schematic representation of a method for
  • Fig. 8 is a schematic representation of a confocal
  • a spectrometer according to one aspect of the invention.
  • Fig. 9 is a schematic representation of a shutter device of a confocal spectrometer according to a white ⁇ more advanced aspect of the invention
  • Fig. 10 is a schematic representation of a confocal
  • Fig. 11 is a schematic representation of a method for
  • Imaging in a confocal spectrometer shows.
  • the described embodiments and developments can, if appropriate, combine with one another as desired. Further possible refinements, developments and implementations of the invention also include combinations of the features of the invention which have not been explicitly mentioned above or described below with regard to the exemplary embodiments.
  • Fig. 1 shows a schematic representation of a confocal spectrometer 100.
  • the spectrometer 100 comprises a Abbil ⁇ training system 1, which is adapted Sieren 11 to focus on an object to spectroscopy rendes 16 light from a light source ⁇ .
  • the spectrometer 100 also includes a detector System 2, which is adapted to detect light scattered and / or reflected by the object 16 and to generate therefrom an image of the object 16.
  • the imaging system 1 comprises a light source 11.
  • Light source 11 may be a broadband or polychromatic ⁇ cal light source 11, that is, a light source 11 emits the light over a wide frequency or wavelength range.
  • the light source 11 may be a white light source, a globar, a Nernst lamp, a nickel-chromium filament, a halogen gas discharge lamp, a xenon gas discharge lamp, a superluminescent diode, an LED or a similar polychromatic light source.
  • the spectral wavelength range which includes the emission spectrum of the light source 11 in the UV region, are in the Be ⁇ range of the visible light and / or in the infrared range.
  • the light emitted by the light source 11 can be collimated via a lens 12 to a parallel beam and directed to a first aperture device 14.
  • the first diaphragm device 14 may have a slit-shaped or slot-shaped grid. An example of such a slit-shaped grid is shown schematically in FIG. 2.
  • the first diaphragm device 14 in FIG. 2 has a structure of passage slots 14 k .
  • the through slots may be arranged in a slit pattern such that two adjacent passage gaps 14k and 14k + i are spaced by a lateral predetermined distance.
  • the number of passage gaps 14 k can be arbitrarily large.
  • the width of the passage gaps 14 k can be arbitrarily large.
  • the passage gaps 14k can have a County ⁇ ge, which may correspond to the length of the region on the object to be dissolved sixteenth
  • the collimated light on cylindrical lenses 13a in a cylindrical lens assembly 13 on the column of the split screen 14 k first aperture device 14 are focused. It can be assigned to each one of the cylindrical lenses 13a each passage gap 14 k.
  • the cylindrical lens assembly 13 may be integrally connected to the first aperture device 14. Through the cylindrical lenses 13, a higher proportion of the light of the light source 11 for the projection of the
  • Spattrasters 14 k of the first aperture device 14 are used on the object 16.
  • the first shutter device 14 can be light passing through focus ⁇ Siert via a first imaging optics 15 on the object sixteenth
  • the object 16 is illuminated on its surface on a focal point 16a by the light of the light source 11.
  • the illumination takes place in the pattern of the slit structure of the first diaphragm device 14.
  • a tube optic 15a and an objective lens device 15b can be used.
  • a beam splitter element may be disposed 15c, which may be at ⁇ game as a polarizing beam splitter, an interference filter or the like, an incident light beam dividing optical element.
  • the scattered or reflected light is directed via a beam path with an op ⁇ tables axis in the detector system. 2
  • the detector system 2 has a spectrally dispersive element 21, which causes a spectral splitting of the broadband reflected light of the object along a dispersion ⁇ direction.
  • the dispersion direction axis D can be perpendicular to the optical axis A, so that the spectral ⁇ rale information of the scattered or reflected light along the dispersion direction axis D is resolved.
  • the dispersion element 21 can be, for example, a prism, a diffraction grating, a holographic grating, a blaze grating, an acousto-optic modulator, an interference filter or similar element.
  • the spectrally dispersed light can be focused on a second diaphragm device 23 via a focusing lens 22.
  • the second diaphragm device 23 can in particular have a slot grid similar to the first diaphragm device 14.
  • the spectrally dispersed light is imaged through the second aperture device 23 onto a detector device 24.
  • detector device 24 it may be possible to use a one-dimensional sensor array, for example a CCD sensor array, a CMOS sensor array, an avalanche-photodiode array or a similar line matrix of light-sensitive ones, as detector device 24
  • the detector device 24 can be moved in this case to the second diaphragm device 23 together along the dispersion direction of axis D, so that by the second diaphragm device 23 each have a check-in part of the spectrally dispersed light of the Dispersionsele ⁇ ments 21 selected and select ⁇ formed on the detector means 24 can be.
  • a second aperture device 23 it may also be possible not to use a second aperture device 23.
  • a two-dimensional sensor array for example a CCD sensor array, a CMOS sensor array, an avalanche photodiode array or a similar planar matrix of photosensitive sensor elements can then be used as detector device 24.
  • each wavelength portion of the spectrally dispersed light along the array axis parallel to the dispersion direction axis D can be detected.
  • the spectrally dispersed light can be focused directly on the detector device 24 via the focusing lens 22.
  • An exemplary embodiment of such a detector device 24 is shown schematically in FIG. 3 for the purpose of illustration. 3 shows a detector device 24, which has an array 24a of detector pixels.
  • the detector pixels can grasp as to ⁇ for example, individual sensor elements of the array 24a ⁇ .
  • the beam grid 14 k of the first diaphragm device 14 is thereby confocal imaged onto the detector array 24 a. Since ⁇ at arises, for example, a beam pattern of Spaltabbil ⁇ applications 25 k -
  • the gap 25 shown pictures k respectively correspond to a specific wavelength of the reflected and spectrally dispersed light.
  • a spatial resolution of the object 16 takes place in the vertical direction, while along an array axis S a spectral resolution can take place.
  • the neighboring pixel 26 k + i, n forms a pixel of the object 16 following the pixel 26 k , n in a lateral spatial direction, while the neighboring pixel 26k, n + i a on the pixel 26k, n in the vertical spatial direction following image point of the object 16 abbil ⁇ det.
  • a spectral resolution of the respective image point of the object 16 can be done within each under Ar ⁇ rays because the spectrally dispersive element 21 causes a spectral splitting of the object image along the Dis ⁇ persions therapiessachse D, which can coincide for instance with the array axis S.
  • the selection of the range to be determined spectral of the reflected light k may, for example, via the electronic control of the lying respectively along the array axis S spectrally zugeord ⁇ Neten pixels within the sub-arrays 26, take place n.
  • FIG. 4 shows a schematic illustration of a second diaphragm device 23.
  • the second diaphragm device 23 can have a cleavage raster 23 k , which can correspond to the cleavage raster of the first diaphragm device 14.
  • the second diaphragm device 23 can select a specific spectrally split-up part of the reflected light.
  • the displacement of the second diaphragm device 23 By varying the displacement of the second diaphragm device 23 to different predetermined distances d the entire spectrum of GE ⁇ scattered or reflected light can 26 k, n of the detector array 24a shown ⁇ the array along the axis S of a sub-array.
  • Fig. 5 shows a schematic representation of a beispielhaf ⁇ th illustration of a spectral component of the image of the object 16.
  • a by a predetermined distance d with respect to the first mask device 14 laterally displaced diaphragm device 23 reflect a gap pattern 23 k on the Detek- torarray 24a.
  • This gap pattern 23 k is displaced with respect to the gap pattern 25 k along the array axis S and at the same time forms another spectral region of the scattered or reflected light of the object on the detector array 24 a.
  • a spatial resolution of the object that is to say an imaging, and a spectral resolution of the object can take place at the same time.
  • the spectral image acquisition can take place, for example, via a scanning lateral offset movement of the diaphragm device 23.
  • FIG. 6 shows a schematic illustration of a second diaphragm device 23 which, in addition to a first fissure grid 23 k, has a second gap grid 27 k , which is offset from the first fissure grid 23 k by a predetermined distance.
  • the number of slit raster is shown in FIG. 6 only by way of example with two Darge ⁇ represents - it can be used in principle any number of slit ⁇ screens for selecting a variety of wavelength ranges to be resolved. Due to the pre-selection of the wavelength ranges, it is no longer necessary, the second
  • one-dimensional detector array 24a can be ⁇ sets with high Lichtempfind ⁇ friendliness, such as avalanche photodiode array, since in any case only a predetermined gap area of the detector device 24 can be used for detecting the light from the object sixteenth
  • a conceivable application is the achievement of spectral contrast between benign tissue and tumor tissue in imaging tissue diagnostics.
  • FIG. 7 shows a schematic illustration of a method 200 for imaging in a confocal spectrometer, in particular in a confocal spectrometer 100, as shown in FIG.
  • the method 200 includes, as a first step 201, mapping a broadband light source to a first aperture device having a first cleavage pattern of a main cleavage direction to produce a cleavage pattern.
  • the light source can be, for example, a white light source or a polychromatic light source.
  • the imaging of the light source can be carried out in such a way that the light source on the Column of the first split screen is mapped using a plurality of cylindrical lenses associated with the columns.
  • a spectral dispersion of the light reflected by the object takes place along a dispersion axis which is perpendicular to the main-gap direction.
  • the prospectus ⁇ rale dispersion can for example be performed using a prism, a diffraction grating, an interference filter, or an acousto-optic modulator.
  • focusing of the spectrally dispersed reflected light on a detector device can take place. It may be possible to focus the spectrally dispersed light to a second diaphragm device with egg ⁇ nem second nip gap height of the main direction of the first gap grid. It is possible that a part of the light reflected from the object with a beam splitter element from the beam path of the image of the slit pattern takes place.
  • the reflected light is detected to generate a spectrally resolved image of the object.
  • the detection of the reflected light can be carried out, for example, with a two-dimensional CCD sensor array, a CMOS sensor array or an avalanche photodiode array.
  • the re ⁇ inflected image points of the object can be resolved along an array axis spectrally. If a second diaphragm device is used, to select the wavelength of the detected light, it may be possible to shift the second diaphragm device along the dispersion axis direction for selecting the wavelength of the detected light.
  • a one-dimensional array such as a sensitive eindimensiona ⁇ les avalanche photodiode array can be used as a detector device, which with the second diaphragm device can be displaced together along the dispersion axis direction.
  • Fig. 8 shows a schematic representation of a confocal spectrometer 300.
  • the spectrometer 300 comprises a Abbil ⁇ training system 1, which is adapted to light of a
  • the spectrometer 300 further includes a detector system 2 that is configured to detect and diffuse light scattered and / or reflected by the object 16 to produce an image of the object 16 therefrom.
  • the imaging system 1 comprises a light source 11.
  • Light source 11 may be a broadband or polychromatic see light source 11, that is, a light source 11 emits the light over a wide frequency or wavelength range.
  • the light source 11 may be a white ⁇ light source, a globar, a Nernst lamp, a nickel-chromium Wendel, a halogen gas discharge lamp, a xenon gas discharge lamp, a superluminescent diode, an LED or a similar polychromatic light source.
  • the spectral wavelength range which the emission spectrum of the light source 11 comprises can be in the UV range, in the range of visible light and / or in the infrared range.
  • the light emitted by the light source 11 can be collimated via a lens 12 to a parallel beam and directed to a first aperture device 34.
  • the first aperture 34 may have a structured An ⁇ arrangement of a plurality of through holes, so-called pinholes.
  • An example of such a struc tured ⁇ arrangement may be a Nipkow disc, as shown in ⁇ way of example in Fig. 9.
  • the first diaphragm device 34 in FIG. 9 is circular and has a structure of through-holes 35 k .
  • the through holes 35k may be formed along circular, concentric shear panels 36 k of different diameter may be arranged so that two adjacent points of through-holes 35 k and 35 k + i are spaced along the periphery of the first diaphragm device 34 by a predetermined distance.
  • the number of through holes 35 k can be arbitrarily large.
  • An aperture device 34 may also be referred to as a Nipkow disc. It may be provided in the imaging system 1 that the collimated light is focused via lenses 33a in a lens arrangement 33 onto the through holes of the first diaphragm device 34. In this case, each through hole 34 k may each be associated with one of the lenses 33 a.
  • the lens assembly 33 may be integrally connected to the first aperture device 34. Through the lenses 33, a higher proportion of the light of the light source 11 for the projection of the
  • Structure of through holes 34 k of the first aperture device 34 are used on the object 16.
  • the light passing through the first diaphragm device 14 can be focused onto the object 16 via a first imaging optical system 15.
  • the object 16 is illuminated on its surface on a focal point 16a by the light of the light source 11.
  • the illumination takes place via a rotation of the first diaphragm device 34 over the entire field of view of the object 16.
  • a tube optic 15a and an objective lens device 15b can be used.
  • a beam splitter element 15c may be arranged, which in ⁇ example, a polarizing beam splitter, an interference filter or a similar, an incident light beam dividing optical component may be.
  • the scattered or reflected light is directed via a beam path with an op ⁇ tables axis A in the detector system. 2
  • the detector system 2 has a spectrally dispersive element 41, which causes a spectral splitting of the broadband reflected light of the object along a dispersion ⁇ direction.
  • the dispersion direction axis D can be perpendicular to the optical axis A, so that the spectral ⁇ rale information of the scattered or reflected light along the dispersion direction axis D is resolved.
  • the dispersion element 41 may, for example, a prism, a
  • the spectrally dispersed light can se a sierlin- 22 to a second diaphragm device 43 focuses the ⁇ .
  • the second shutter device 43 may in this case 34 similar through hole pattern 35 having k insbesonde re ⁇ a of the first shutter device.
  • the spectrally dispersed light is imaged through the second aperture device 43 onto a detector device 24.
  • the detector device 24 may comprise, for example, a two-dimensional CCD sensor array, a CMOS sensor array, an avalanche photodiode array or a similar matrix of photosensitive sensor elements.
  • the second diaphragm device 43 can rotate about an axis B, so that the rotation of the through holes with those of the through holes 35 k of the first diaphragm device 34 matches. Thereby, can be imaged by the object 16 Reflectors ⁇ oriented or scattered confocal with the first Blendenvor ⁇ direction 43rd This means that a Tie ⁇ fenseletation can be done, since only pixels on the object 16, within the focal depth of the focal point 16 lie ⁇ gene can be mapped through the second diaphragm device 43rd Due to the spectral dispersion of the dispersion element 41 along the dispersion axis D, a lateral offset of the second diaphragm device 43 along this dispersion direction axis D to a spectral selection of the confocal detected light of the object 16 can take place.
  • a prism 41 can be rotated, or an acousto-optic modulator 41 can be driven accordingly.
  • FIG. 10 shows a schematic representation of another confocal spectrometer 400.
  • the spectrometer 400 in FIG. 10 essentially differs from the spectrometer 300 in FIG. 8 in that the first diaphragm device 34 is used as a common illumination and imaging device.
  • the first mask device 34 is an imaging optical system 45 is provided, can be realized in the 45e through beam splitter elements 45a, 45b, 45c, 45d and 45f mirror elements and different beam paths of the incident and re ⁇ inflected light.
  • a polarizer 41 can be provided behind the lens 12, which linearly polarizes the light emitted by the light source 11. The incident light passes through
  • Beam splitters 45a and 45b in a straight line if they have polarization-dependent beam splitters, for example, s-polarizing beam splitters.
  • the incident light is guided along the beam path W to the object.
  • a phase rotation of the polarization can take place by 90 °.
  • the optical path lengths over the beam paths W and X can be identical.
  • a spectrally dispersive element 43 such as a prism, which causes a spectral splitting of the reflected or scattered light of the object.
  • FIG. 11 shows a schematic representation of a method 500 for imaging in a confocal spectrometer, in particular in a confocal spectrometer 300 or 400, as explained in connection with FIGS. 8 to 10.
  • a wide-band light source is imaged by a rotatable diaphragm device with a structured arrangement of a multiplicity of through-holes.
  • the light source may comprise a white light source or a polychromatic light source.
  • the rotatable diaphragm device may comprise, for example, a Nipkow disc.
  • the image of the structured arrangement of the plurality of through holes is focused on an object to be imaged.
  • the imaging of the light source may include imaging the light source onto the patterned arrangement of the plurality of through holes using a plurality of lenses associated with the through holes.
  • a spectral dispersants carried yawing of the object by the reflected light by using egg ⁇ nes dispersion element such as a prism, a diffraction grating, an interference filter or an acousto-optical modulator.
  • the spectrally dispersed reflected light is focused on a rotatable diaphragm device having a structured arrangement of a multiplicity of through holes.
  • the rotatable diaphragm device can be displaced perpendicular to the optical axis of the spectrometer for selecting the wavelength of the detected light.
  • the dispersion element may be displaced perpendicular to the optical axis of the spectrometer for selecting the wavelength of the detected light.
  • a fifth step 505 is a detection of passing through the rotary screen device reflected light to generate a spectrally resolved image of the Whether ⁇ jekts occurs. Detecting the reflected light can be carried out with a CCD sensor array, a CMOS sensor array or an AVA lanche photodiode array so that the re ⁇ inflected image points of the object can be resolved along an array axis spectrally.
  • the invention relates to a confocal spectrometer, comprising a broadband light source, a light source located in front of the light source.
  • Neten rotatable first aperture device having a structured arrangement of a plurality of through holes, which is adapted to illuminate the field of view of an object to be imaged by the light source, an imaging optics, which is adapted to an image of the struk ⁇ tur convinced arrangement of the plurality of through holes to focus on the object, a dispersion element configured to spectrally disperse the light reflected from the object along a dispersion axis perpendicular to the optical axis of the imaging optics, and a detector device configured to generate the spectrally dispersed reflected light for generation of a spectrally resolved image of the object.

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Abstract

L'invention concerne un spectromètre à foyer commun doté : d'une source de lumière à large bande; d'un premier dispositif diaphragme tournant disposé devant la source de lumière, pourvu d'un ensemble structuré d'une multitude de trous traversants et conçu pour éclairer par l'intermédiaire de la source de lumière le champ de vision d'un objet à reproduire; d'une optique d'imagerie qui est conçue pour focaliser une image de l'ensemble structuré de la multitude de trous traversants sur l'objet; d'un élément de dispersion qui est conçu pour disperser spectralement la lumière réfléchie par l'objet le long d'un axe de dispersion perpendiculairement à l'axe optique de l'optique d'imagerie; et d'un dispositif détecteur qui est conçu pour capter la lumière réfléchie, dispersée spectralement, pour la production d'une image résolue spectralement de l'objet.
PCT/EP2012/067418 2011-09-29 2012-09-06 Spectromètre à foyer commun et procédé d'imagerie dans un spectromètre à foyer commun Ceased WO2013045249A1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2014532305A JP5840789B2 (ja) 2011-09-29 2012-09-06 共焦点分光計および共焦点分光計における画像形成方法
EP12769970.0A EP2764336A1 (fr) 2011-09-29 2012-09-06 Spectromètre à foyer commun et procédé d'imagerie dans un spectromètre à foyer commun

Applications Claiming Priority (2)

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DE102011083726A DE102011083726A1 (de) 2011-09-29 2011-09-29 Konfokales Spektrometer und Verfahren zur Bildgebung in einem konfokalen Spektrometer
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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114279564A (zh) * 2021-12-23 2022-04-05 中国科学院国家空间科学中心 一种并行压缩感知计算层析成像光谱仪及其成像光谱重建方法
CN119984087A (zh) * 2025-01-02 2025-05-13 中国科学院长春光学精密机械与物理研究所 基于空间编码的干涉共焦测量系统及其测量方法
CN119984045A (zh) * 2025-01-22 2025-05-13 哈尔滨工业大学 一种偏振调控高精度线光谱共焦测量装置

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102011083718A1 (de) * 2011-09-29 2013-04-04 Siemens Aktiengesellschaft Konfokales Spektrometer und Verfahren zur Bildgebung in einem konfokalen Spektrometer
DE102013112376B4 (de) * 2013-11-11 2016-12-01 Gigahertz-Optik Gmbh Spektrometersystem
US10072921B2 (en) * 2014-12-05 2018-09-11 Kla-Tencor Corporation Methods and systems for spectroscopic beam profile metrology having a first two dimensional detector to detect collected light transmitted by a first wavelength dispersive element
JP6539501B2 (ja) * 2015-05-28 2019-07-03 株式会社トプコン 測量装置
WO2018134861A1 (fr) * 2017-01-17 2018-07-26 ギガフォトン株式会社 Système de mesure de diffusion thomson et système de génération de lumière euv
DE102020110298A1 (de) 2020-04-15 2021-09-30 Carl Zeiss Industrielle Messtechnik Gmbh Vorrichtung und Verfahren zur optischen Messung einer Oberflächentopographie
JP7410969B2 (ja) * 2020-06-11 2024-01-10 東莞市神州視覚科技有限公司 スペクトル共焦点測定装置及び測定方法
CN113418470B (zh) * 2021-07-08 2023-01-31 西安工业大学 光谱扫描共焦单次曝光数字全息测量系统及测量方法
CN114674435B (zh) * 2022-03-11 2024-10-01 中国科学院西安光学精密机械研究所 一种双色散多光谱目标模拟器及模拟方法

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19713362A1 (de) * 1997-03-29 1998-10-01 Zeiss Carl Jena Gmbh Konfokale mikroskopische Anordnung
DE69730030T2 (de) 1997-11-17 2005-07-21 MAX-PLANCK-Gesellschaft zur Förderung der Wissenschaften e.V. Konfokales Spektroskopiesystem und -verfahren
DE102006007172A1 (de) * 2006-02-08 2007-08-16 Universität Stuttgart Verfahren und Anordnung zur schnellen, ortsaufgelösten, flächigen, spektroskopischen Analyse, bzw. zum Spectral Imaging oder zur 3D-Erfassung mittels Spektroskopie
DE102007019267A1 (de) * 2007-04-24 2008-10-30 Degudent Gmbh Messanordnung sowie Verfahren zum dreidimensionalen Messen eines Objekts
EP1984770B1 (fr) 2006-02-08 2009-09-09 Sirona Dental Systems GmbH Procédé et dispositif conçus pour une technique confocale chromatique de mesure 3d rapide et robuste

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2363857A (en) * 2000-06-23 2002-01-09 Yokogawa Electric Corp Nipkow disk confocal scanner with optical image separation system
JP5190773B2 (ja) * 2008-05-29 2013-04-24 横河電機株式会社 創薬スクリーニング装置

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19713362A1 (de) * 1997-03-29 1998-10-01 Zeiss Carl Jena Gmbh Konfokale mikroskopische Anordnung
DE69730030T2 (de) 1997-11-17 2005-07-21 MAX-PLANCK-Gesellschaft zur Förderung der Wissenschaften e.V. Konfokales Spektroskopiesystem und -verfahren
DE102006007172A1 (de) * 2006-02-08 2007-08-16 Universität Stuttgart Verfahren und Anordnung zur schnellen, ortsaufgelösten, flächigen, spektroskopischen Analyse, bzw. zum Spectral Imaging oder zur 3D-Erfassung mittels Spektroskopie
EP1984770B1 (fr) 2006-02-08 2009-09-09 Sirona Dental Systems GmbH Procédé et dispositif conçus pour une technique confocale chromatique de mesure 3d rapide et robuste
DE102007019267A1 (de) * 2007-04-24 2008-10-30 Degudent Gmbh Messanordnung sowie Verfahren zum dreidimensionalen Messen eines Objekts

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114279564A (zh) * 2021-12-23 2022-04-05 中国科学院国家空间科学中心 一种并行压缩感知计算层析成像光谱仪及其成像光谱重建方法
CN114279564B (zh) * 2021-12-23 2024-04-30 中国科学院国家空间科学中心 一种并行压缩感知计算层析成像光谱仪及其成像光谱重建方法
CN119984087A (zh) * 2025-01-02 2025-05-13 中国科学院长春光学精密机械与物理研究所 基于空间编码的干涉共焦测量系统及其测量方法
CN119984045A (zh) * 2025-01-22 2025-05-13 哈尔滨工业大学 一种偏振调控高精度线光谱共焦测量装置

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