WO2012117930A1 - Imprinting apparatus - Google Patents

Abstract

Provided is an imprinting apparatus capable of controlling pressure applied to a film-like article to be formed. The imprinting apparatus is so configured as to transfer a pattern of a film-like mold (100) onto a film-like article to be formed (200) and provided with: a forming roll (1) for pressing the mold (100) and the article to be formed (200) on a circumferential surface of the roll (1) in a rotation direction for a predetermined distance (S); a mold transport means (2) for transporting the mold (100) to the forming roll (1); an article transport means (3) including an article feeding belt (31) with an endless track structure for transporting the article to be formed (200) to the forming roll (1); and a fixing means (4) for exposing the article to be formed (200) to light or heating the article (200) when the mold (100) and the article (200) are pressed by the forming roll (1).

Description

Imprint device

The present invention relates to an imprint apparatus for continuously transferring a molding pattern of a mold onto a molding object.

In recent years, nanoimprint technology has attracted attention as a method for forming micro-order and nano-order ultrafine patterns. In this method, a mold having a fine molding pattern is pressed on a molding object such as resin, and the molding pattern is transferred to the molding object (see, for example, Patent Document 1).

Here, when a plate-shaped mold is used for the imprint process, it takes time to press and release the mold and the object to be molded, which hinders improvement of throughput.

Therefore, it is considered that a mold pattern is continuously transferred to a resin film using a roll-shaped mold (see, for example, Patent Document 2).

International Publication Number WO2004 / 062886 JP2009-292008A

However, roll-shaped molds are difficult to manufacture and are very costly and time consuming. In addition, since the conventional film only feeds the film to the mold with only the roller, tension is applied to the film between the rollers, which causes damage to the film or the fact that the pattern cannot be accurately transferred due to expansion. there were.

Therefore, an object of the present invention is to provide an imprint apparatus that can control the pressure applied to a film-shaped object.

In order to achieve the above object, an imprint apparatus of the present invention is for transferring a molding pattern of a film-like mold onto a film-like molding object, and is a predetermined distance on the circumferential surface in the rotational direction. A molding roll for pressing the mold and the molding object during L, a mold conveying means for conveying the mold to the molding roll, and a molding feed belt having an endless track structure. And a fixing means for exposing or heating the molding object while the molding roll presses the mold and the molding object. It is characterized by that.

In this case, it is preferable to include at least a position adjusting means for adjusting one or more positions of the molding roll, the mold conveying means, and the molding object conveying means. Further, it is preferable to include a conveyance speed adjusting means for adjusting a speed at which the mold conveying means conveys the mold and a speed at which the molding object conveying means conveys the molding object.

Further, it is preferable to provide a fluid ejecting means for ejecting a fluid between the mold and the molding object.

In addition, when performing optical imprinting or thermal imprinting using radiant heat, the molding roll is formed of a material that can transmit light of a predetermined wavelength, and is disposed in the molding roll as the fixing unit. A light source can be used.

As the fixing means, a laser irradiation device or a far infrared irradiation device can be used.

The mold conveying means may have a mold feeding belt having an endless track structure.

Further, it is preferable to provide meandering preventing means for preventing meandering of the feed belt for molding.

Also, it is possible to use a film type and an endless track type.

It is the schematic which shows the structure of the imprint apparatus of this invention. It is the schematic which shows another structure of the imprint apparatus of this invention. It is the schematic which shows another structure of the imprint apparatus of this invention. It is a figure explaining the meandering prevention means which concerns on this invention. It is the schematic which shows another structure of the imprint apparatus of this invention.

Is transferred to a film-shaped object 200, and a forming roll 1 that presses the mold 100 and the object 200 for a predetermined distance L on the circumferential surface in the rotation direction, and a forming roll 1 A mold transporting means 2 for transporting the mold 100 to the molding roll, and a molding object transporting means 3 for transporting the molding object 200 to the molding roll 1, which has an annular track-shaped workpiece feeding belt 31 formed in an annular shape. The fixing roll 4 is mainly composed of a fixing unit 4 that exposes or heats the molding object 200 while the molding roll 1 presses the mold 100 and the molding object 200.

In the present specification, the predetermined distance L may be a distance that can secure a molding time required to transfer the molding pattern of the mold 100 to the molding object 200, and the conveyance speed of the molding object during the molding time. It may be longer than the multiplied distance.

Further, in this specification, the film form means a flexibility that can be deformed at least by a predetermined distance L in the rotational direction along the curved surface of the molding roll 1 when the mold 100 and the molding object 200 are pressed. It means what you have.

The molding object 200 may be any material that can transfer a molding pattern by optical imprinting or thermal imprinting. For example, a polymerization reaction (thermosetting) of a thermoplastic resin or a compound containing a polymerizable reactive group. Or a resin produced by photocuring). The resin 200a may be formed on the film-like base layer 200b by coating or the like.

Examples of the thermoplastic resin include cyclic olefin ring-opening polymerization / hydrogenated product (COP) and cyclic olefin-based resin such as cyclic olefin copolymer (COC), acrylic resin, polycarbonate, vinyl ether resin, perfluoroalkoxyalkane (PFA), and the like. Fluorine resin such as polytetrafluoroethylene (PTFE), polystyrene, polyimide resin, polyester resin, or the like can be used.

Resins produced by polymerization reaction (thermosetting or photocuring) of polymerizable reactive group-containing compounds include epoxide-containing compounds, (meth) acrylic acid ester compounds, vinyl ether compounds, bisallyl nadiimide compounds As described above, unsaturated hydrocarbon group-containing compounds such as vinyl groups and allyl groups can be used. In this case, it is possible to use the polymerization-reactive group-containing compounds alone for thermal polymerization, and to add a heat-reactive initiator to improve thermosetting. Is also possible. Furthermore, the thing which can add a photoreactive initiator and can advance a polymerization reaction by light irradiation and can form a shaping | molding pattern may be used. Organic peroxides and azo compounds can be preferably used as the heat-reactive radical initiator, and acetophenone derivatives, benzophenone derivatives, benzoin ether derivatives, xanthone derivatives and the like can be preferably used as the photoreactive radical initiator. The reactive monomer may be used without a solvent, or may be used after being dissolved in a solvent and desolvated after coating.

The molded object 200 is conveyed from, for example, the molded object supply roll 91, and after a predetermined molding pattern is transferred by the imprint apparatus of the present invention, the molded object 200 is recovered by the molded object recovery roll 92.

Note that the imprint apparatus of the present invention may include an application unit 6 for applying the photocurable resin 200a or the like onto the film-like base layer 200b to form the molding 200. Specifically, as shown in FIG. 2, a supply nozzle 61 for supplying a photocurable resin, and an application roller 62 for applying the photocurable resin supplied from the supply nozzle onto a film-like base layer while applying pressure. What is necessary is just to comprise.

As the film-shaped mold 100, for example, a predetermined molding pattern is formed on the resin produced by the polymerization reaction (thermosetting or photocuring) of the above-described thermoplastic resin or polymerizable reactive group-containing compounds using nanoimprint technology. What has been transcribed may be used.

The molding pattern formed on the mold 100 is not only a geometrical shape made up of irregularities, but also for transferring a predetermined surface state, such as a mirror surface transfer having a predetermined surface roughness, For transferring an optical element such as a lens having a curved surface. In addition, the molding pattern is formed in various sizes such as the minimum width of the convex portion and the concave portion in the plane direction is 100 μm or less, 10 μm or less, 2 μm or less, 1 μm or less, 100 nm or less, 10 nm or less. Also, dimensions in the depth direction are formed in various sizes such as 10 nm or more, 100 nm or more, 200 nm or more, 500 nm or more, 1 μm or more, 10 μm or more, 100 μm or more.

Further, it is preferable that the mold 100 has a circular endless track structure and can be used continuously.

The molding roll 1 presses the mold 100 and the molding object 200 with a constant pressure, and is formed in a cylindrical shape or a cylindrical shape having a circumferential surface that can secure at least a predetermined molding distance L sufficiently. Further, when a light source that emits light such as ultraviolet rays, far infrared rays, and lasers is disposed inside the molding roll 1 as the fixing unit 4, the molding roll 1 is made of a material that can transmit light of a predetermined wavelength of the light source, For example, it is formed of glass or resin. The molding roll 1 may be provided on the mold 100 side or the molding target 200 side.

The mold conveying means 2 is for conveying the mold 100 to the molding roll 1. For example, a cylindrical shape or a columnar shape that holds the annular mold 100 with the surface on which the molding pattern is formed is held together with the molding roll 1. What is necessary is just to comprise by the mold conveyance roll 21 and the mold conveyance drive means (not shown) which rotates at least any one of the molding roll 1 and the mold conveyance roll 21. When the molding roll 1 is disposed on the workpiece feed belt 31 side, as shown in FIG. 3, two or more annular molds 100 having the molding pattern formed on the outside are conveyed. It may be held by the roll 21 and at least one of the mold transport rolls 21 may be rotated by the mold transport driving means.

The mold conveying drive means may be any object as long as it can rotate the molding roll 1 or the mold conveying roll 21. For example, an electric motor capable of controlling the rotation speed can be used.

The mold conveying means 2 may have a mold feeding belt having an endless track structure formed in an annular shape. Accordingly, it is possible to prevent the mold 100 from being excessively pressurized and to be distorted or expanded, and to accurately transfer the molding pattern to the molding object 200.

The mold conveying roll 21 may be any one that can convey the mold 100 or the mold feeding belt 22 by friction with the back surface thereof. In addition, a plurality of holes are provided at the ends of the mold 100 and the mold feeding belt 22, and a plurality of convex portions that engage with the holes are provided on the mold conveyance roll 21, and the convex portions are conveyed while being caught in the holes. It may be.

The molding object conveying means 3 is for conveying the molding object 200 to the molding roll 1 and pressing the mold 100 and the molding object 200 together with the molding roll 1. As the molded article conveying means 3, for example, a molded article feeding belt 31, a molded article conveying roll 32 to 35 for moving the feeding belt 31, and a molded article conveying roll 32 to 35 are used. What is necessary is just to comprise mainly with the drive means (not shown) for to-be-molded article for rotating 1 or more.

The material to be molded feed belt 31 may be an endless track structure formed in an annular shape. Further, the surface on which the molding object 200 of the molding object feed belt 31 is placed is formed as smoothly as possible so that the pressure when the mold 100 and the molding object 200 are pressurized is uniform. Is preferred. For example, a metal, a resin, or the like can be used as the material of the molded article feeding belt 31. When the light source serving as the fixing unit 4 is disposed on the back side of the molded article feed belt 31, the molded article feed belt 31 is made of a material capable of transmitting light of a predetermined wavelength of the light source, such as a resin. Etc. are formed.

The molding object conveying rolls 32 to 35 may be any one that can convey the molding object feeding belt 31 by friction with the back surface thereof. Also, a plurality of holes are provided at the end of the workpiece feed belt 31, and a plurality of convex portions that engage with the holes are provided on the molding-conveying rolls 32 to 35, while the convex portions are hooked on the holes. It may be transported. In addition, the workpiece conveying rolls 32 and 35 are arranged at positions where the mold 100 and the workpiece 200 can be pressed in the rotation direction for a predetermined distance L on the circumferential surface in the molding roll 1.

The article conveying drive means may be any object for rotating the article conveying rolls 32 to 35. For example, an electric motor capable of controlling the rotation speed can be used.

Further, if the mold conveying means 2 includes a conveying speed adjusting means (not shown) for adjusting the speed at which the mold 100 is conveyed and the speed at which the article conveying means 3 conveys the article 200, molding is performed. From the relationship between the distance L and the conveyance speed of the molding object 200, the time (molding time) for pressing the mold 100 and the molding object 200 can be adjusted. As the conveyance speed adjusting means, for example, an inverter that can control the rotation speed of the electric motor can be used.

Thus, by using the molding feed belt 31, it is possible to prevent excessive tension from acting on the molding 200 from the molding supply roll to the molding recovery roll, An accurate pattern can be transferred without causing damage or elongation to the film. The molding supply roll 91 and the molding recovery roll 92 are configured to rotate in accordance with the moving speed of the molding 200. Therefore, the molded article 200 is hardly tensioned by the molded article supply roll 91 and the molded article collection roll 92.

The fixing unit 4 may use a light source that emits light of a predetermined wavelength that can cure the photo-curable resin (molded article 200) in the case of photoimprinting. As the light source, an ultraviolet lamp, a light emitting diode, or the like can be used. In the case of thermal imprinting, the thermoplastic resin (molded product) may be heated to a glass transition temperature or higher, or a heating means for curing the thermosetting resin (molded product 200) may be used. Any heating means may be used as long as it can directly or indirectly heat the article 200. For example, an electric heater, a laser irradiation device such as a semiconductor laser, a far infrared heater What irradiates such far infrared rays etc. can be used. Further, a cooling means 43 for cooling the article 200 or the article feed belt 31 heated by the heating means may be arranged. For example, as shown in FIG. 5, a mold transporting roll 23 is arranged so that the molding object 200 after passing through the molding roll 1 is not released from the mold 100, and the molding roll 1 and the mold transporting roll 23 are arranged. A cooling means 43 such as a blower for sending the molded article 200 or the molded article feed belt 31 between them may be disposed.

Further, the fixing means 4 is arranged in the molding roll 1 or on the back side of the molding object feed belt 31 facing the molding roll 1. When light such as laser or far infrared is used as the heating means, it is preferable that the mold 100 or the object feed belt 31 to which the light hits be black.

In addition, it is important to focus on the part to be heated with laser heating, but it is difficult to accurately form a roll-shaped mold like the conventional one in a cylindrical or columnar shape, and the focus cannot be controlled. It was. On the other hand, since the forming roll 1 of the present invention is provided as a separate body from the mold 100, it can be accurately formed in a cylindrical shape or a columnar shape. Therefore, the accuracy of the focus of the laser beam can be improved.

Further, in order to adjust the molding pressure and the molding distance L at which the molding roll 1 presses the mold 100 and the workpiece 200, any one or more positions of the molding roll 1, the mold conveying means 2 or the molding object conveying means 3 are used. It is preferable to provide position adjusting means for adjusting the angle. For example, if the position of the molding roll 1 is moved to the workpiece feed belt 31 side, the molding pressure or molding distance L can be increased, and if it is moved in the opposite direction, the molding pressure or molding distance L can be decreased. it can. In addition, the molding pressure and the molding distance L can be adjusted by moving not only the molding roll 1 but also the position of the molding object transporting roll 32. As the position adjusting means, any means can be used as long as it can move the forming roll 1, the object transporting roll 32, and the mold transporting roll 21. For example, the axis of the object transporting roll 32 is vertical. A ball screw that moves in a horizontal direction or an electric motor may be used.

Further, meandering prevention means for preventing meandering of the molding object feed belt may be provided in order to prevent the position of the molding object feed belt 31 from being displaced with respect to the molding object conveying rolls 32 to 35. . As the meandering preventing means, as shown in FIG. 4, for example, photoelectric sensors 51 and 52 for detecting the positions of both ends of the molding object feeding belt 31, and the molding object based on the detection information of the photoelectric sensors 51 and 52 An angle adjusting means for adjusting the angle of the workpiece conveying roll 34 with respect to the traveling direction of the feed belt 31 may be provided. As a result, when the molded article feed belt 31 is biased to one side, the light of the biased photoelectric sensor 52 is blocked, and it is detected that the molded article feed belt 31 is biased to the photoelectric sensor 52 side. Based on this detection signal, the angle adjusting means can change the angle of the workpiece transport roll 34 and return the workpiece feed belt 31 to its original position. When the workpiece belt 31 returns to its original position and the light from both the photoelectric sensors 51 and 52 can be detected, the angle adjusting means returns the angle of the workpiece transporting roll 34 to its original position.

Although not shown, fluid ejecting means for ejecting fluid between the mold 100 and the molding object 200 and releasing the mold 100 and the molding object 200 may be further provided. In this case, the fluid ejecting means includes an ejection port that ejects fluid between the mold 100 and the molding target 200, a flow rate adjusting unit that regulates the flow rate of the fluid ejected from the ejection port, and a fluid that supplies the fluid to the ejection port. Consists mainly of supply sources.

As the injection port, for example, a slit arranged so that a fluid can be injected between the mold 100 and the molding object 200 can be used. The width of the slit may be adjusted in accordance with the adhesive force between the mold 100 and the molded article 200, but for example, a slit having a width of 0.2 to 0.5 mm may be used. As another form of the injection port, it is also possible to use a multi-nozzle provided with a plurality at appropriate intervals.

The flow rate adjusting means may be any device as long as it can adjust the flow rate of the fluid ejected from the ejection port. Specifically, the fluid pressurized to 0.2 to 0.5 MPa with an accumulator may be ejected with a pulse of 50 to 300 ms. Of course, the flow velocity and pressure are not limited to these.

As the fluid supply source, an air compressor that sends gas to the injection port, a cylinder that stores compressed gas, or the like can be used.

DESCRIPTION OF SYMBOLS 1 Forming roll 2 Type | mold conveyance means 3 Molded object conveyance means 4 Fixing means 22 Mold feed belt 31 Mold feed belt 100 Mold 200 Mold

Claims (10)

An imprint apparatus for transferring a molding pattern of a film-like mold to a film-like molding object,
A molding roll that presses the mold and the workpiece during a predetermined distance L on the circumferential surface in the rotation direction;
Mold conveying means for conveying the mold to the molding roll;
A workpiece feeding means for feeding the workpiece with an endless track structure, and a workpiece conveying means for conveying the workpiece to the molding roll;
Fixing means for exposing or heating the molding while the molding roll presses the mold and the molding;
An imprint apparatus comprising: 2. The imprint apparatus according to claim 1, further comprising position adjusting means for adjusting at least one position of the forming roll, the mold conveying means, and the molding object conveying means. The in-feed according to claim 1 or 2, further comprising a conveyance speed adjusting means for adjusting a speed at which the mold conveying means conveys the mold and a speed at which the molding object conveying means conveys the molding object. Printing device. 4. The imprint apparatus according to claim 1, further comprising a fluid ejecting unit that ejects a fluid between the mold and the molding target. The imprint apparatus according to any one of claims 1 to 4, wherein the molding roll is made of a material that can transmit light of a predetermined wavelength, and the fixing unit is a light source disposed in the molding roll. . 6. The imprint apparatus according to claim 1, wherein the fixing unit irradiates a laser. 6. The imprinting apparatus according to claim 1, wherein the fixing unit irradiates far infrared rays. The imprinting apparatus according to any one of claims 1 to 7, wherein the mold conveying means includes a mold feeding belt having an endless track structure. The imprint apparatus according to any one of claims 1 to 8, further comprising meandering prevention means for preventing meandering of the molding belt. The imprint apparatus according to claim 1, wherein the imprint apparatus is a film and has an endless track type mold.

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