WO2012037733A1 - 一种场发射阳极板、场发射光源及其制备方法 - Google Patents
一种场发射阳极板、场发射光源及其制备方法 Download PDFInfo
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- WO2012037733A1 WO2012037733A1 PCT/CN2010/077312 CN2010077312W WO2012037733A1 WO 2012037733 A1 WO2012037733 A1 WO 2012037733A1 CN 2010077312 W CN2010077312 W CN 2010077312W WO 2012037733 A1 WO2012037733 A1 WO 2012037733A1
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Definitions
- the invention belongs to the technical field of electric light sources, and in particular relates to a field emission anode plate, a field emission light source and a preparation method thereof.
- the electric light source industry has always been a hot topic in the world's countries, and it plays a very important role in the world economy.
- the light source widely used at present is a gas discharge light source.
- the principle of the light source is to charge the interior of the lamp to a mixed gas containing mercury, and to illuminate the phosphor by ultraviolet light generated by gas discharge luminescence or gas discharge.
- the pulsed light flash of gas discharge light source is easy to cause human visual fatigue, and mercury pollution environment, with the advancement of society and science and technology, research and development of energy-saving and environmentally friendly green light source to replace traditional light source has become an important topic for countries to compete for research.
- the field emission light source is one of the electric light sources. It is an emerging light source and has the advantages of high current density, low power consumption, fast response, etc. It has important application prospects in the field of vacuum electronics such as flat panel display, X-ray source and microwave amplifier.
- the principle is that under the action of an electric field, an electron emitter such as a metal tip or a carbon nanotube at a low potential emits electrons, and bombards the phosphor at a high potential to emit visible light.
- a sulfide, an oxide or a silicate phosphor is used as an anode luminescent material.
- Oxide or silicate phosphors have relatively poor conductivity. Under electron beam bombardment, charge accumulation is likely to occur at the anode, causing a drop in potential difference between the two poles, which affects the luminous efficiency of the device.
- the anode plate made of a conductive sulfide phosphor is prone to decomposition of sulfides under a long electron beam excitation, releasing gas, which not only reduces the vacuum of the device, but also "poisons" the cathode. This ultimately reduces the life of the device.
- the powder may fall off under the electron beam bombardment, causing the cathode shielding of the device and the uneven illumination of the anode, which reduces the life of the device.
- the object of the present invention is to overcome the above deficiencies of the prior art and to provide a field emission anode plate with good conductivity, high light transmittance and stable electron impact resistance;
- the present invention also provides a method of preparing the above field emission light source.
- a field emission anode plate comprising a transparent ceramic substrate having an anode conductive layer bonded to a surface of the transparent ceramic substrate, the transparent ceramic substrate emitting light under excitation of a cathode ray.
- a field emission light source comprising a field emission anode plate, a field emission cathode plate and a support, the field emission anode plate being the member;
- the field emission cathode plate comprising a substrate and the substrate a surface-bonded cathode conductive layer;
- the anode conductive layer is disposed opposite to the cathode conductive layer, and the two ends of the support body are respectively sealedly connected to the field emission anode plate and the field emission cathode plate, and the support body and the field are respectively
- the emitter anode plate and the field emission cathode plate form a vacuum chamber.
- the field emission anode plate comprises a transparent ceramic substrate, the transparent ceramic substrate has an anode conductive layer bonded to a surface thereof, and the transparent ceramic substrate is at the cathode Illuminating under ray excitation;
- the field emission cathode plate comprises a substrate and a cathode conductive layer bonded to the surface of the substrate;
- An anode conductive layer of the field emission anode plate is disposed opposite to a cathode conductive layer of the field emission cathode plate, and two ends of the insulating support body are respectively connected to the field emission anode plate and the field emission cathode plate , the support body, the field emission anode plate and the field emission cathode plate form a cavity;
- An exhaust port is disposed on the cavity, and a low-melting glass solder is coated on the joint of the insulating support, the field emission anode plate and the field emission cathode plate, and then heat sealed, and finally the cavity is A vacuum is applied to seal the exhaust port to obtain the field emission source.
- the field emission anode plate of the invention adopts a transparent ceramic capable of emitting light under the excitation of a cathode ray as a substrate, and the transparent ceramic substrate effectively improves the light transmittance and electron impact resistance of the field emission anode plate, and enhances the stability performance of the anode plate. Corrosion resistance and wear resistance, at the same time, the field emission anode plate can be uniformly illuminated, and the cost is low; the field emission light source made of the field emission anode plate has high luminous intensity and uniform illumination, stable luminescence performance, corrosion resistance and wear resistance. The characteristic and long service life; the preparation method of the field emission light source is simple, the production efficiency is improved, the production cost is reduced, and the industrial production is suitable.
- FIG. 1 is a schematic structural view of a field emission anode plate of the present invention
- FIG. 2 is a schematic structural view of a field emission light source of the present invention
- FIG. 3 is another schematic structural view of a field emission light source of the present invention.
- FIG. 4 is a schematic flow chart of a method for preparing a field emission light source of the present invention.
- the embodiment of the invention provides a field emission anode plate 1 with good conductivity, high light transmittance and stable electron impact resistance.
- a field emission anode plate 1 As shown in FIG. 1, it includes a transparent ceramic substrate 10 on the surface of which an anode conductive layer 11 is bonded, which is illuminated by a cathode ray.
- the field emission anode plate 1 is made of a transparent ceramic capable of emitting light under the excitation of a cathode ray, thereby effectively improving the light transmittance and electron impact resistance of the field emission anode plate 1, and the transparent ceramic substrate enhances the anode.
- the plate 1 has stable performance, corrosion resistance and wear resistance, so that the field emission anode plate 1 can uniformly emit light and has low cost.
- the material of the transparent ceramic substrate 10 in the above embodiment is preferably Y 2 O 3 :Eu transparent ceramic, Y 2 O 2 S:Eu transparent ceramic, Y 2 SiO 5 :Tb transparent ceramic, Gd 2 O 2 S: Tb
- Y 2 O 3 :Eu transparent ceramic preferably Y 2 O 3 :Eu transparent ceramic
- Y 2 O 2 S Eu transparent ceramic
- Gd 2 O 2 S Tb
- One of transparent ceramics, LaAlO 3 :Tm transparent ceramics, and LaGaO 3 :Tm transparent ceramics have high transparency and stability, strong electron impact resistance, and good corrosion resistance and wear resistance.
- the thickness of the transparent ceramic substrate 10 of the present embodiment is preferably 0.5-30 mm, and the transparent ceramic substrate 10 of the thickness can effectively enhance the compressive and mechanical resistance thereof, and the compressive and mechanical resistance thereof increases as the thickness thereof increases. The ability will also increase with the increase, but the thickness is not too thick, too thick transparent ceramic substrate 10 will affect its appearance, increase its weight, increase its economic cost of production.
- the thickness of the anode conductive layer 11 is preferably 10 nm to 300 ⁇ m, and the material thereof is preferably aluminum metal, silver, magnesium, copper or gold. The thickness of the anode conductive layer 11 determines the efficiency of electron penetration and also determines the sheet resistance of the conductive layer. That is, the luminous efficiency of the field emission light source is determined.
- Embodiments of the present invention also provide a field emission light source made of the field emission anode plate 1 described above.
- the field emission light source comprises a field emission anode plate 1, a field emission cathode plate 2 and a support body 3; the field emission anode plate 1 comprises a transparent ceramic substrate 10, and an anode conductive is combined on one surface thereof.
- the transparent ceramic substrate 10 emits light under the excitation of a cathode ray;
- the field emission cathode plate 2 comprises a substrate 20 and a cathode conductive layer 21 combined with the substrate 20; the two ends of the support body 3 are respectively associated with the field emission anode plate 1
- the field emission cathode plate 2 is sealingly connected, and a vacuum chamber 4 is formed by the support body 3, the field emission anode plate 1 and the field emission cathode plate 2, and the anode conductive layer 11 of the field emission anode plate 1 and the field emission cathode plate 2 are
- the cathode conductive layers 21 are oppositely disposed.
- the outer surface of the anode conductive layer 11 and the outer surface of the cathode conductive layer 21 are both in the vacuum chamber 4, and the field emission light source comprises the above-mentioned emitter anode plate 1 so that the light-emitting intensity is high and the light is uniform, and the light-emitting property is stable. It has corrosion and wear resistance and long service life.
- the spacing between the field emission anode plate 1 and the field emission cathode plate 2 is preferably 200 ⁇ m. -3cm.
- the spacing of the range can effectively ensure that electrons penetrate the anode conductive layer 11 in the anode plate 1 to improve the luminous efficiency of the field emission source.
- the substrate 20 of the field emission cathode plate 2 includes a planar body 201 disposed opposite to the anode conductive layer 11 and the cathode body 201 is bonded to the cathode conductive layer 21, and the substrate is 20 degrees.
- the thickness is preferably from 0.5 to 30 mm.
- the substrate 20 ensures the field emission cathode plate 2 to withstand compression and mechanical strength, and provides a support body for the cathode conductive layer 21.
- the cathode conductive layer 21 of the field emission cathode plate 2 includes a conductive layer 210 bonded to the planar body 201, and a cathode layer 211 bonded to the outer surface of the conductive layer 210.
- the conductive layer 210 is mainly electrically conductive, and its resistance is preferably greater than 0 ohms and less than or equal to 7 ohms; the cathode layer 211 functions as an electron emitter to provide a stable flow of electrons toward the anode conductive layer 11.
- the substrate 20 may also be provided with a plurality of planar bodies; the two ends of the support body 3 are respectively sealed with the field emission anode plate 1 and the field emission cathode plate 2 in the following manners:
- the first way as shown in Fig. 2, the two ends of the support body 3 are respectively sealedly connected with the outer surface of the transparent ceramic substrate 10 of the field emission anode plate 1 and the outer surface of the substrate 20 of the field emission cathode plate 2, and the anode conductive layer 11 and the cathode are electrically conductive.
- the layers 21 are all within the vacuum chamber 4.
- This method is a preferred embodiment of the present embodiment, and can simultaneously reduce the production cost and enhance the safety performance of the field emission light source and reduce the production cost while achieving the function of the field emission cathode plate 2 equally.
- the third mode (not shown): the two ends of the support body 3 are respectively sealedly connected to the outer surface of the transparent ceramic substrate 10 of the field emission anode plate 1 and the outer surface of the cathode conductive layer 21 of the field emission cathode plate 2, and the anode conductive layer 11 and The cathode layers 211 are all in the vacuum chamber 4; or the two ends of the support body 3 are respectively sealedly connected to the outer surface of the anode conductive layer 11 of the field emission anode plate 1 and the outer surface of the substrate 20 of the field emission cathode plate 2, and the cathode conductive layer 21 It is in the vacuum chamber 4.
- the conductive layer 210 is preferably one of an indium tin oxide layer, a silver layer, a metal aluminum layer, a gold layer or a chromium layer, and the thickness thereof is preferably 100.
- Um-250 nm; the cathode layer 211 is preferably one of a carbon nanotube layer, a zinc oxide nanowire layer or a copper oxide nanowire layer, and has a thickness of preferably 0.5 to 30 um.
- the embodiment of the present invention further provides a method for preparing the field emission light source.
- the process flow chart of the method is shown in FIG. 4, and the method includes the following steps:
- a field emission anode plate 1 (see FIG. 1), a field emission cathode plate 2, and an insulating support 3 (see FIG. 2) are obtained;
- the field emission anode plate 1 includes a transparent ceramic substrate 10 and an anode bonded to the surface of the transparent ceramic substrate 10.
- a conductive layer 11 the transparent ceramic substrate emits light under the excitation of a cathode ray;
- the field emission cathode plate 2 comprises a substrate 20 and a cathode conductive layer 21 bonded to the surface of the substrate 20;
- the anode conductive layer 11 of the field emission anode plate 1 is disposed opposite to the cathode conductive layer 21 of the field emission cathode plate 2, and the two ends of the insulating support body 3 are respectively connected to the field emission anode plate 1 and the field emission cathode plate 2, so that the support Body 3, field emission anode plate 1 and field emission cathode plate 2 constitute a cavity 4;
- An exhaust port (not shown) is disposed on the cavity 4, and a low-melting glass solder is coated on the joint of the insulating support 3, the field emission anode plate 1 and the field emission cathode plate 2, and then heat-sealed, and finally The cavity 4 is evacuated and the exhaust port is sealed to obtain the field emission light source.
- the materials and thicknesses of the transparent ceramic substrate 10, the anode conductive layer 11, the substrate 20, and the cathode conductive layer 21 are as described above, and are not described herein for the sake of space.
- the insulating support 3 is preferably first cleaned, such as acetone, ethanol and deionized water.
- the field emission anode plate 1 and the field emission cathode plate 2 are respectively obtained as follows:
- a transparent ceramic substrate 10 (see FIG. 1) is obtained, the transparent ceramic substrate 10 is polished, washed, dried, and then the anode conductive layer 11 is plated on the surface of the transparent ceramic substrate 10 to obtain the anode plate 1.
- Field emission cathode plate 2 A substrate 20 is obtained (see Figs. 2 and 3), the substrate 20 is polished, washed, dried, and then a conductive layer 210 and a cathode layer 211 are sequentially plated on the surface of the substrate 20.
- the transparent ceramic substrate 10 and the substrate 20 in the field emission anode plate 1 and the field emission cathode plate 2 are preferably cleaned by acetone, ethanol and deionized water, and may of course be cleaned by other means; drying may be air dried and baked. Drying in a dry manner, of course, can also be dried in other ways.
- the manner in which the surface of the transparent ceramic substrate 10 of the field emission anode plate 1 is plated with the anode conductive layer 11 is preferably a vapor deposition method or a magnetron sputtering method, and of course, other methods may be employed.
- the material of the substrate 20 of the field emission cathode plate 2 may be selected from the prior art, and the surface of the substrate 20 may be coated with a conductive layer 210 such as an indium tin oxide layer, a silver layer, a metal aluminum layer, a gold layer or a chromium layer.
- a plating method or a growth method may be employed in which a cathode layer 211 such as a carbon nanotube layer, a zinc oxide nanowire layer or a copper oxide nanowire layer is plated on the outer surface of the conductive layer 210.
- the two ends of the support body 3 are respectively sealed with the field emission anode plate 1 and the field emission cathode plate 2, and the above manners may be used. Let me repeat.
- the temperature of the heat sealing is preferably 380-550 ° C, and the time is 5-90 min, and the temperature and time can effectively ensure the melting of the low melting glass solder, and the insulating support
- the body 3, the field emission anode plate 1 and the field emission cathode plate 2 are sealed at the joint.
- the evacuation in this step is evacuated through an exhaust port that communicates with the cavity 4.
- the vacuum degree of vacuuming is preferably from 1 ⁇ 10 -5 to 9.9 ⁇ 10 -5 Torr, in order to obtain a vacuum chamber 4 having a higher degree of vacuum, the degree of vacuum is preferably achieved by using an exhaust station, in order to obtain a better vacuum.
- the degree of vacuum is preferably achieved by using an exhaust station, in order to obtain a better vacuum.
- the preparation method of the above field emission light source only needs to seal the relevant components as required, and the final product can be obtained by vacuuming, the process is simple, the production efficiency is improved, the production cost is reduced, and the product is suitable for industrial production.
- the red light field emission light source structure is as shown in FIG. 2, and the field emission light source comprises a field emission anode plate 1, a field emission cathode plate 2 and a support body 3; and the field emission anode plate 1 comprises Y 2 O 3 with a thickness of 0.5 mm.
- the ITO thin film conductive layer 210 and the CNT thin film cathode layer 211 are in the vacuum chamber 4.
- the aluminum film anode conductive layer 11 is disposed opposite to the CNT thin film cathode layer 211, and the pitch therebetween is 200 ⁇ m.
- the specific preparation method is as follows:
- Field emission anode plate 1 preparation Y 2 O 3 :Eu transparent ceramic substrate 10 having a size of 70 ⁇ 50 ⁇ 0.5 mm is cut, and both upper and lower sides are polished, and then Y 2 O 3 :Eu The transparent ceramic substrate 10 is ultrasonically treated by acetone, absolute ethanol and deionized water for 20 min, respectively, and then the cleaned Y 2 O 3 :Eu transparent ceramic substrate 10 is air-dried, and finally on a Y 2 O 3 :Eu transparent ceramic substrate. The surface of the 10 is vapor-deposited with an Al film as the anode conductive layer 11.
- the two ends of the support body 3 are respectively connected to the outer surface of the transparent ceramic substrate 10 of the field emission anode plate 1 and the surface body 201 of the substrate 20 of the field emission cathode plate 2, so that the support body 3 and the field emission
- the anode plate 1 and the field emission cathode plate 2 constitute a cavity 4, and the aluminum film anode conductive layer 11 is disposed opposite to the CNT film cathode layer 211, and an exhaust pipe is disposed at a corner of the field emission cathode plate 2 at a corner.
- the configured low-melting glass slurry is applied to the field emission cathode plate 2, the junction between the field emission anode plate 1 and the support body 3, and then heated to 380 ° C for 90 minutes for sealing, to be low-melting glass paste
- a getter is added to the exhaust port, placed in the exhaust station, and the cavity 4 is evacuated to 1 ⁇ 10 -5 , baked, and then sealed to obtain the red light field.
- the light source is emitted.
- the green light field emission light source structure is as shown in FIG. 3.
- the field emission light source comprises a field emission anode plate 1, a field emission cathode plate 2 and a support body 3; and the field emission anode plate 1 comprises a 25 mm thickness Y 2 SiO 5 :
- the Tb transparent ceramic substrate 10 is bonded to a surface thereof with a silver film anode conductive layer 11 having a thickness of 100 ⁇ m;
- the field emission cathode plate 2 comprises a substrate 20 having a thickness of 025 mm and a cathode conductive layer 21 bonded to a surface body 201 of the substrate 20.
- the cathode conductive layer 21 and the surface body 201 sequentially combine a chromium thin film conductive layer 210 having a thickness of 100 ⁇ m and a zinc nanowire thin film cathode layer 211 having a thickness of 10 ⁇ m; a silver film anode conductive layer of the support body 3 and the field emission anode plate 1 respectively
- the outer surface is sealed and connected to the chromium thin film conductive layer 210 of the field emission cathode plate 2, and the vacuum storage body 4 is formed by the support body 3, the field emission anode plate 1 and the field emission cathode plate 2, wherein the zinc nanowire film cathode layer 211 is in the vacuum chamber 4.
- the aluminum film anode conductive layer 11 is disposed opposite to the CNT film cathode layer 211, and the pitch therebetween is 0.8 cm.
- the preparation method is as follows:
- Field emission anode plate 1 preparation Y 2 SiO 5 :Tb transparent ceramic substrate 10 having a size of 70 ⁇ 50 ⁇ 25 mm is cut, and both upper and lower sides are polished, and then Y 2 SiO 5 :Tb is transparent.
- the ceramic substrate 10 is ultrasonically treated by acetone, absolute ethanol and deionized water for 30 min, respectively, and then the cleaned Y 2 SiO 5 :Tb transparent ceramic substrate 10 is air-dried, and finally on the Y 2 SiO 5 :Tb transparent ceramic substrate 10 A silver film having a thickness of 100 ⁇ m was sputter-coated on the surface as the anode conductive layer 11.
- the two ends of the support body 3 are respectively connected to the outer surface of the anode conductive layer 11 of the field emission anode plate 1 and the outer surface of the cathode conductive layer 21 of the field emission cathode plate 2, and the silver film anode conductive layer 11 and
- the zinc oxide nanowire film cathode layer 211 is disposed oppositely such that the support body 3, the field emission anode plate 1 and the field emission cathode plate 2 constitute a cavity 4, and the support between the field emission anode plate 1 and the field emission cathode plate 2 3 Install an exhaust pipe in the gap, and then apply the configured low-melting glass paste to the field emission cathode plate 2, the junction between the field emission anode plate 1 and the support body 3, and then heat to 450 ° C for 30 min.
- the preparation of the blue light-emitting field emitting device is similar in structure to that of Embodiment 1, except that the two ends of the support body 3 are respectively opposite to the outer surface of the anode conductive layer 11 of the field emission anode plate 1 and the substrate 20 of the field emission cathode plate 2.
- the outer surface is sealingly connected and the cathode conductive layer 21 is in the vacuum chamber 4.
- the preparation method is as follows:
- (1) Field emission anode plate 1 preparation LaAlO 3 :Tm transparent ceramic substrate 10 having a size of 70 ⁇ 50 ⁇ 30 mm is cut, and both upper and lower sides are polished, and then LaAlO 3 :Tm transparent ceramic substrate 10 is sequentially processed. After ultrasonic treatment with acetone, absolute ethanol and deionized water for 30 min, respectively, the cleaned LaAlO 3 :Tm transparent ceramic substrate 10 was air-dried, and finally a layer of 300 ⁇ m was magnetron sputtered on the surface of LaAlO 3 :Tm transparent ceramic substrate 10. A magnesium film of a thickness is used as the anode conductive layer 11.
- the two ends of the support body 3 are respectively connected to the outer surface of the anode conductive layer 11 of the field emission anode plate 1 and the outer surface edge of the cathode conductive layer 21 of the field emission cathode plate 2, so that the support body 3 and the field emission
- the anode plate 1 and the field emission cathode plate 2 constitute a cavity 4, and the magnesium film anode conductive layer 11 is disposed opposite to the copper oxide nanowire film cathode layer 211, and the spacing between the two is 3 cm, and the field emission anode plate 1 and
- An exhaust pipe is installed in the gap of the support body 3 between the field emission cathode plates 2, and the configured low-melting glass paste is applied to the field emission cathode plate 2, between the field emission anode plate 1 and the support body 3.
- the joint is heated to 550 ° C for 5 min for sealing. After the low-melting glass paste is cooled and solidified, it is placed in the exhaust station, and the chamber 4 is evacuated to 9.9 ⁇ 10 -5 , baked, and then Sealing off, the red light field emission source is obtained.
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Description
Claims (10)
- 一种场发射阳极板,其特征在于:包括透明陶瓷基板,在所述透明陶瓷基板一表面上结合有阳极导电层,所述透明陶瓷基板在阴极射线激发下发光。
- 根据权利要求1所述的场发射阳极板,其特征在于:所述透明陶瓷基板的材质为Y2O3:Eu透明陶瓷、Y2O2S:Eu透明陶瓷、Y2SiO5:Tb透明陶瓷、Gd2O2S: Tb透明陶瓷、LaAlO3:Tm透明陶瓷、LaGaO3:Tm透明陶瓷中的一种。
- 根据权利要求1或2所述的场发射阳极板,其特征在于:所述透明陶瓷基板厚度为0.5-30mm;所述阳极导电层厚度为10nm-300μm,所述阳极导电层的材质为金属铝、银、镁、铜或金。
- 一种场发射光源,包括一场发射阳极板、一场发射阴极板和支撑体,其特征在于:所述场发射阳极板为权利要求1-3任一项所述的构件;所述场发射阴极板包括衬底和与所述衬底表面结合的阴极导电层;所述阳极导电层与所述阴极导电层相对设置,所述支撑体两端分别与所述场发射阳极板和场发射阴极板密封连接,由所述支撑体、场发射阳极板和场发射阴极板构成一真空腔体。
- 根据权利要求4所述的场发射光源,其特征在于:所述场发射阳极板和场发射阴极板间距为200μm-3cm。
- 根据权利要求4或5所述的场发射光源,其特征在于:所述衬底包括一平面本体,所述平面本体与阳极导电层相对设置,所述阴极导电层结合在所述平面本体与阳极导电层相对的表面上。
- 根据权利要求6所述的场发射光源,其特征在于:所述阴极导电层包括与平面本体结合的导电层,和与所述导电层外表面结合的阴极层;所述导电层为氧化铟锡层、银层、金属铝层、金层或者铬层,所述阴极层为碳纳米管层、氧化锌纳米线层或氧化铜纳米线层;所述衬底度厚度为0.5-30mm;所述导电层的厚度为100 um-250nm;所述阴极层厚度为0.5-30um。
- 一种场发射光源制备方法,包括如下步骤:制备一场发射阳极板、场发射阴极板和绝缘支撑体;所述场发射阳极板包括透明陶瓷基板,所述透明陶瓷基板一表面上结合有阳极导电层,所述透明陶瓷基板在阴极射线激发下发光;所述场发射阴极板包括衬底和与所述衬底表面结合的阴极导电层;将所述场发射阳极板的阳极导电层与所述场发射阴极板的阴极导电层相对设置,再将所述绝缘支撑体两端分别与所述场发射阳极板与所述场发射阴极板连接,使得所述支撑体、场发射阳极板和场发射阴极板构成一腔体;在所述腔体上设置排气口,再在所述绝缘支撑体、场发射阳极板和场发射阴极板连接处上涂覆上低熔点玻璃焊料,然后加热封接,最后将所述腔体抽真空,密封排气口,得到所述场发射光源。
- 根据权利要求8所述的场发射光源制备方法,其特征在于:所述阳极板的制备方法如下:取透明陶瓷基板,将所述透明陶瓷基板清洗、干燥,再在所述透明陶瓷基板表面镀阳极导电层,得到所述的场发射阳极板。
- 根据权利要求9所述的场发射光源制备方法,其特征在于:所述抽真空真空度为1×10-5~9.9×10-5¬;所述加热封接的温度为380-550℃,时间为5-90min;所述透明陶瓷基板表面镀阳极导电层的方式为蒸镀法或磁控溅射法。
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010800680999A CN103003910A (zh) | 2010-09-26 | 2010-09-26 | 一种场发射阳极板、场发射光源及其制备方法 |
| US13/822,187 US20130175918A1 (en) | 2010-09-26 | 2010-09-26 | Field emission anode plate, field emission light source and manufacturing method for light source |
| EP10857447.6A EP2620972A4 (en) | 2010-09-26 | 2010-09-26 | FIELD EMISSION PLATE, FIELD EMISSION LIGHT SOURCE AND MANUFACTURING METHOD FOR A LIGHT SOURCE |
| JP2013526297A JP5648127B2 (ja) | 2010-09-26 | 2010-09-26 | 電界放出陽極板、電界放出光源及びその製造方法 |
| PCT/CN2010/077312 WO2012037733A1 (zh) | 2010-09-26 | 2010-09-26 | 一种场发射阳极板、场发射光源及其制备方法 |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/CN2010/077312 WO2012037733A1 (zh) | 2010-09-26 | 2010-09-26 | 一种场发射阳极板、场发射光源及其制备方法 |
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| US (1) | US20130175918A1 (zh) |
| EP (1) | EP2620972A4 (zh) |
| JP (1) | JP5648127B2 (zh) |
| CN (1) | CN103003910A (zh) |
| WO (1) | WO2012037733A1 (zh) |
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| US20140021500A1 (en) * | 2010-12-20 | 2014-01-23 | Ocean's King Lighting Science & Technology Co., Ltd. | Light emitting device and manufacturing method thereof |
| CN103646847A (zh) * | 2013-12-07 | 2014-03-19 | 四川天微电子有限责任公司 | 紫外线发射器 |
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| See also references of EP2620972A4 * |
Also Published As
| Publication number | Publication date |
|---|---|
| JP5648127B2 (ja) | 2015-01-07 |
| EP2620972A4 (en) | 2014-04-02 |
| JP2013541134A (ja) | 2013-11-07 |
| CN103003910A (zh) | 2013-03-27 |
| EP2620972A1 (en) | 2013-07-31 |
| US20130175918A1 (en) | 2013-07-11 |
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