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WO2012015264A2 - Appareil d'étalonnage de pleine plage pour un spectromètre pour analyse de spectre optique, et procédé pour acquérir une information à l'aide de l'appareil - Google Patents

Appareil d'étalonnage de pleine plage pour un spectromètre pour analyse de spectre optique, et procédé pour acquérir une information à l'aide de l'appareil Download PDF

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Publication number
WO2012015264A2
WO2012015264A2 PCT/KR2011/005582 KR2011005582W WO2012015264A2 WO 2012015264 A2 WO2012015264 A2 WO 2012015264A2 KR 2011005582 W KR2011005582 W KR 2011005582W WO 2012015264 A2 WO2012015264 A2 WO 2012015264A2
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WIPO (PCT)
Prior art keywords
wavelength
light
information
spectrometer
light source
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Ceased
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PCT/KR2011/005582
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English (en)
Korean (ko)
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WO2012015264A3 (fr
Inventor
김지현
전만식
정운상
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Industry Academic Cooperation Foundation of KNU
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Industry Academic Cooperation Foundation of KNU
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Publication of WO2012015264A2 publication Critical patent/WO2012015264A2/fr
Publication of WO2012015264A3 publication Critical patent/WO2012015264A3/fr
Anticipated expiration legal-status Critical
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/18—Generating the spectrum; Monochromators using diffraction elements, e.g. grating
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/04—Slit arrangements slit adjustment

Definitions

  • the present invention relates to an apparatus for calibrating a whole area of a spectroscope for light source spectrum analysis and a method for acquiring information in the apparatus, and more particularly, to obtain accurate wavelength information and pixel information on a spectrometer using a wavelength scan filter as an input light source.
  • the present invention relates to a method for calibrating a full-spectrum spectrometer for a light source spectrum analysis, and a method for acquiring information in the apparatus.
  • a spectrometer spectroscopy light emitted from a light source and a prism spectrometer using light refraction and a grating spectrometer using diffraction phenomenon are used.
  • the separation of light in the spectrometer is the width of the slit. If the width is large, the peak becomes wider and the separation is difficult. If the width is narrow, the peak becomes sharp and the separation function is improved. On the other hand, the intensity of the light decreases as the amount of light passing through decreases.
  • Spectral analysis also refers to the measurement of electromagnetic radiation absorbed, scattered, and emitted by an analyte.
  • Spectrum analysis is the largest class of instrumental analysis because there are so many types of radiation that can be recorded and the way in which it is measured is very different for each method.
  • the most commonly used spectral analysis is to measure the amount of electromagnetic radiation emitted by the instrument when it is absorbed by the analyte.
  • Absorption occurs when a quantum of radiation, known as a photon, strikes a molecule and causes the molecule to become excited (high energy). When absorption occurs, the incident radiation passes through the sample, reducing its intensity.
  • Absorption spectrophotometry or absorption spectrophotometry is a technique for measuring the amount of absorption for sample analysis.
  • the analyte is placed in a container and the absorption is measured by examining the wavelength of the incident and absorbed radiation over the spectral region.
  • the radiation intensity or absorption obtained here can be plotted as a function of the wavelength or energy of the incident line, and the component of the analyte can be identified from the wavelength at which the peak appears.
  • the existing spectral analysis method is very complicated.
  • the pixel information of the spectrometer is obtained by using a separate light source, and the approximate pixel information of the corresponding wavelength is obtained instead of the entire pixel.
  • the approximate pixel information of the corresponding wavelength is obtained instead of the entire pixel.
  • the present invention is for analyzing the light source spectrum for obtaining accurate wavelength information of the input light source by scanning the pixel information of the light source on the spectrometer and the entire area of the input light source using a wavelength scanning filter
  • the present invention provides a method for calibrating an entire region of a spectroscope and a method for obtaining information in the apparatus.
  • the apparatus for calibrating a full-spectrum spectrometer for a light source spectrum analysis includes: a wavelength scan filter for scanning a light generated from an input light source and selecting a specific wavelength; A spectrometer which detects a signal of pixel information through the camera in the incident light when light having a specific wavelength selected by the wavelength scan filter is incident; And obtain light spectral wavelength information through light spectral analysis on light of a specific wavelength selected by the wavelength scan filter, and obtain one-to-one mapping between the obtained light spectral wavelength information and the pixel information sensed by the spectrometer. And an optical spectrum analyzer for acquiring wavelength information and pixel information.
  • the information acquisition method in the full-field calibration apparatus of the spectrometer for light source spectrum analysis to achieve the objects of the present invention, the step of selecting a specific wavelength by scanning the light generated from the input light source; Detecting a signal of pixel information through a camera in the selected specific wavelength of light; Obtaining light spectral wavelength information through light spectral analysis on the light of the selected specific wavelength; And one-to-one mapping of the obtained light spectrum wavelength information and the sensed pixel information to obtain accurate wavelength information and pixel information of the entire area of the input light source.
  • the wavelength information and the pixel information of the spectrometer and the entire area of the input light source can be scanned using a wavelength scan filter to obtain simple and accurate wavelength information and pixel information compared to the conventional complex method. This is possible and marketability is good.
  • FIG. 1 is a view showing the structure of a full-range calibration device of the spectrometer for light source spectrum analysis according to an embodiment of the present invention
  • FIG. 2 is a view showing the structure of each type of wavelength scan filter in the full-range calibration apparatus according to an embodiment of the present invention
  • FIG. 3 is a diagram illustrating a method for acquiring wavelength information and pixel information in a full area calibration apparatus according to an embodiment of the present invention
  • FIG. 4 is a graph showing pixel versus wavelength information of a light source measured in a full area calibration apparatus according to an embodiment of the present invention.
  • FIG. 1 is a view showing the structure of the full-range calibration device of the spectrometer for the light source spectrum analysis according to an embodiment of the present invention
  • Figure 2 is a structure of each type of wavelength scan filter in the full-range calibration device according to an embodiment of the present invention Figure is shown.
  • the apparatus for calibrating a full region includes a circulator 10, a wavelength scanning filter 20, an optical fiber coupler 30, and a spectrometer 40. ), And an optical spectrum analyzer (OSA) 50.
  • OSA optical spectrum analyzer
  • the circulator 10 transmits the light generated from the input light source to the wavelength scan filter 20.
  • the wavelength scan filter 20 scans the light emitted from the circulator 10 and separates the light into wavelengths, and selects a specific wavelength from the separated wavelengths so that the light of the selected wavelength is passed through the spectrometer 40 through the optical fiber coupler 30. ) And the light spectrum analyzer 50.
  • the wavelength scan filter 20 may be configured as a transmissive wavelength variable filter or a reflective wavelength variable filter as shown in FIG. 2B, as shown in FIG. 2A, and in addition, an embodiment of the present invention. You can also apply other types of filters that can perform.
  • the optical fiber coupler 30 is a device for distributing and combining optical signals in an optical fiber, and an embodiment of the present invention distributes light having a wavelength selected by the wavelength scan filter 20 to the spectrometer 40 and the optical spectrum analyzer 50. .
  • the spectrometer 40 detects pixel information from light of a selected wavelength incident from the wavelength scan filter 20, that is, a line scan camera (CMOS camera or CCD array) detects light of the wavelength selected and incident from the wavelength scan filter 20. A signal is detected by pixel information of a corresponding wavelength through the array (44).
  • CMOS camera or CCD array line scan camera
  • the spectrometer 40 also includes a collimator 41, a diffraction grating or prism 42, a focusing lens 43, and a line scan camera 41. can do.
  • the collimator 41 receives the light separated through the wavelength scan filter 20, and makes the incident light (light) into parallel light.
  • the incident light is emitted with the effective NA at the end of the optical fiber.
  • the diffraction grating 42 diffracts incident light at a predetermined angle for each wavelength. At this time, the diffracted light proceeds aligned by wavelength.
  • the focusing lens 43 makes the diffracted light emitted by the diffraction grating 42 at an angle back into parallel light.
  • the optical spectrum analyzer 50 obtains the wavelength information of the light spectrum by analyzing the light spectrum from the incident light, and performs a one-to-one mapping of the pixel information of the camera detected by the spectrometer 40 and the wavelength information of the light spectrum. Acquire accurate wavelength information and pixel information of the region.
  • the wavelength scan filter 20 since the wavelength scan filter 20 selects and sends a wavelength, the wavelength scan filter 20 has a diffraction angle suitable for the path of the wavelength.
  • the diffracted light of the corresponding wavelength is thus passed through the focusing lens 43 and is incident on the line scan camera (CCD or CMOS camera) 44.
  • the line scan camera CCD or CMOS camera
  • the spectrometer 40 in the line scan camera 44 when the light source is separated by the slit in the wavelength scan filter 20 to be the pixel position corresponding to the wavelength, the spectrometer 40 in the line scan camera 44, the position information for all the pixels Since it is obtained, information about the pixels of the spectrometer 40 can be known.
  • the pixel information of the wavelength can be known but the exact value of the wavelength is not known. Measure and get the exact value of the wavelength.
  • the wavelength scan filter 20 may be configured as one of a transmission wavelength tunable filter and a reflection wavelength tunable filter.
  • the wavelength scan filter 20 may include a collimator 101 and a diffraction grating. a grating 102, a focusing lens 103, a slit 104, and a mirror 105.
  • the collimator 101, the diffraction defect 102, and the focusing lens 103 are formed in pairs of symmetrical structures with respect to the slit, and the light of a specific wavelength selected from the slit 104 is advanced again in the reverse order.
  • a mirror 105 is formed to reflect light of a specific wavelength selected from the slit 104 so that the light proceeds in the reverse order.
  • the collimator 101 injects the light incident through the circulator 10 into the diffraction grating 102 as parallel light, and passes the light incident from the diffraction grating 102 in the reverse order to the spectrometer 40 and the light spectrum. Incident to the analyzer 50.
  • the diffraction grating 102 speculates the incident parallel light at different wavelengths and injects light incident from the focusing lens 103 in the reverse order to the collimator 101.
  • the focusing lens 103 aligns the spectroscopic light incident from the diffraction grating 102 for each wavelength and injects light incident from the slit 104 in the reverse order to the diffraction grating 102.
  • the slit 104 is a unitary structure that can move from side to side and selects a particular wavelength spectra from the spectroscopic light incident through the focusing lens 103.
  • the spectrometer for the light source spectrum configured as described above has all the pixel information for each wavelength and shows more accurate spectral performance by using the pixel information for the entire region. .
  • FIG. 3 is a diagram illustrating a method for acquiring wavelength information and pixel information in a full area calibration apparatus according to an exemplary embodiment of the present invention.
  • the apparatus for correcting the entire area receives the light source and injects light from the input light source into the wavelength scan filter 20 through the circulator 10.
  • step 220 the wavelength scan filter 20 of the full-field calibration apparatus scans the light of the incident input light source to select a specific wavelength, and then, in step 230, the spectrometer 40 and the optical spectrum analyzer 50 Incident).
  • the steps 220 and 230 the light of the incident light source is incident on the diffraction grating 102 by parallel light by the collimator 101, and is spectroscopically diffracted by the diffraction grating 102 at different wavelengths.
  • the spectroscopic light proceeds aligned by the focusing lens 103, and only a specific wavelength is selected by the slit 104, and the light of the selected wavelength is again focused in the focusing lens 103, the diffraction grating 102 and the collimator. Incident on the spectrometer 40 and the optical spectrum analyzer 50 via 101.
  • the spectrometer 40 of the full-area calibration apparatus detects a signal having pixel information of the light of the selected wavelength through the camera. Accordingly, in step 250, the optical spectrum analyzer 50 performs a one-to-one mapping of the signal detected by the spectrometer 40, that is, the pixel information of the camera and the optical spectrum wavelength information obtained by optical spectrum analysis of the light of the incident wavelength. Thus, in operation 260, the full-range calibration apparatus acquires accurate wavelength information and pixel information of the entire area of the input light source according to the one-to-one mapping result.
  • the results obtained through this process can be displayed as a graph of the pixel-to-wavelength information of the measured light source as shown in FIG. 5 attached thereto. You can get information.

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  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)

Abstract

La présente invention porte sur un appareil d'étalonnage de pleine plage pour un spectromètre pour analyse de spectre optique, et sur un procédé pour acquérir une information à l'aide de l'appareil. L'appareil d'étalonnage de pleine plage effectue un balayage, à l'aide d'un filtre de balayage de longueur d'onde, d'une lumière générée par une source de lumière d'entrée, de façon à sélectionner une longueur d'onde spécifique, permet au spectromètre de détecter un signal d'information de pixel à partir d'une lumière à la longueur d'onde spécifique sélectionnée par l'intermédiaire d'une caméra, permet à un analyseur de spectre optique d'effectuer une analyse de spectre optique sur la lumière à la longueur d'onde spécifique sélectionnée de façon à acquérir une information de longueur d'onde de spectre optique, et effectue une projection de un à un entre l'information de longueur d'onde de spectre optique ainsi acquise et l'information de pixel détectée précédemment mentionnée, de façon à acquérir ainsi une information de longueur d'onde et une information de pixel d'une manière plus simple et plus précise que celle des procédés classiques compliqués. Par conséquent, l'appareil selon la présente invention peut être utilisé avec une variété de sources de lumière, et est ainsi hautement commercialisable.
PCT/KR2011/005582 2010-07-30 2011-07-29 Appareil d'étalonnage de pleine plage pour un spectromètre pour analyse de spectre optique, et procédé pour acquérir une information à l'aide de l'appareil Ceased WO2012015264A2 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR10-2010-0074054 2010-07-30
KR1020100074054A KR101078135B1 (ko) 2010-07-30 2010-07-30 광원 스펙트럼 분석용 분광기의 전 영역 교정 장치 및 그 장치에서 정보 획득 방법

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WO2012015264A2 true WO2012015264A2 (fr) 2012-02-02
WO2012015264A3 WO2012015264A3 (fr) 2012-05-18

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CN115372270A (zh) * 2021-05-20 2022-11-22 智谱科技有限公司 光谱整合校正方法及多光谱光谱仪
CN116678497A (zh) * 2023-08-03 2023-09-01 山东大学 一种光谱仪自动校准装置及方法

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KR101423964B1 (ko) 2012-07-20 2014-07-31 광주과학기술원 분광계의 광 신호 처리 방법 및 그 장치
CN103868591A (zh) * 2012-12-12 2014-06-18 西安西光创威光电有限公司 快速非扫描多光谱成像系统及其方法
KR101528332B1 (ko) 2014-01-09 2015-06-15 한국과학기술연구원 극자외선 발생 및 분광기 캘리브레이션 장치 및 그 방법
KR101526870B1 (ko) * 2014-04-30 2015-06-09 광주과학기술원 랜덤필터모듈, 랜덤필터모듈의 투과율 검출방법, 및 랜덤필터모듈를 이용하는 분광기
KR101500688B1 (ko) 2014-05-29 2015-03-11 한국과학기술연구원 극자외선 분광기 캘리브레이션 장치 및 그 방법
KR102375036B1 (ko) 2017-08-02 2022-03-15 삼성전자주식회사 스펙트럼 측정 장치 및 방법과, 스펙트럼 측정 장치의 캘리브레이션 방법
KR102498122B1 (ko) 2017-11-21 2023-02-09 삼성전자주식회사 분광 장치와, 분광 방법, 및 생체신호 측정장치
KR102659953B1 (ko) * 2021-08-30 2024-04-24 한국공학대학교산학협력단 광파워를 이용한 파장 판별 장치 및 파장 판별 방법
KR20250143006A (ko) * 2024-03-21 2025-09-30 한국기계연구원 통합 모듈형 분광 시스템 및 이를 이용한 공정 진단방법

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Publication number Priority date Publication date Assignee Title
CN115372270A (zh) * 2021-05-20 2022-11-22 智谱科技有限公司 光谱整合校正方法及多光谱光谱仪
CN116678497A (zh) * 2023-08-03 2023-09-01 山东大学 一种光谱仪自动校准装置及方法
CN116678497B (zh) * 2023-08-03 2023-12-19 山东大学 一种光谱仪自动校准装置及方法

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WO2012015264A3 (fr) 2012-05-18
KR101078135B1 (ko) 2011-10-28

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