[go: up one dir, main page]

WO2012015264A2 - Full-range calibration apparatus for a spectrometer for analysis of the light spectrum, and method for acquiring information using the apparatus - Google Patents

Full-range calibration apparatus for a spectrometer for analysis of the light spectrum, and method for acquiring information using the apparatus Download PDF

Info

Publication number
WO2012015264A2
WO2012015264A2 PCT/KR2011/005582 KR2011005582W WO2012015264A2 WO 2012015264 A2 WO2012015264 A2 WO 2012015264A2 KR 2011005582 W KR2011005582 W KR 2011005582W WO 2012015264 A2 WO2012015264 A2 WO 2012015264A2
Authority
WO
WIPO (PCT)
Prior art keywords
wavelength
light
information
spectrometer
light source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/KR2011/005582
Other languages
French (fr)
Korean (ko)
Other versions
WO2012015264A3 (en
Inventor
김지현
전만식
정운상
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Industry Academic Cooperation Foundation of KNU
Original Assignee
Industry Academic Cooperation Foundation of KNU
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Industry Academic Cooperation Foundation of KNU filed Critical Industry Academic Cooperation Foundation of KNU
Publication of WO2012015264A2 publication Critical patent/WO2012015264A2/en
Publication of WO2012015264A3 publication Critical patent/WO2012015264A3/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/18—Generating the spectrum; Monochromators using diffraction elements, e.g. grating
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/04—Slit arrangements slit adjustment

Definitions

  • the present invention relates to an apparatus for calibrating a whole area of a spectroscope for light source spectrum analysis and a method for acquiring information in the apparatus, and more particularly, to obtain accurate wavelength information and pixel information on a spectrometer using a wavelength scan filter as an input light source.
  • the present invention relates to a method for calibrating a full-spectrum spectrometer for a light source spectrum analysis, and a method for acquiring information in the apparatus.
  • a spectrometer spectroscopy light emitted from a light source and a prism spectrometer using light refraction and a grating spectrometer using diffraction phenomenon are used.
  • the separation of light in the spectrometer is the width of the slit. If the width is large, the peak becomes wider and the separation is difficult. If the width is narrow, the peak becomes sharp and the separation function is improved. On the other hand, the intensity of the light decreases as the amount of light passing through decreases.
  • Spectral analysis also refers to the measurement of electromagnetic radiation absorbed, scattered, and emitted by an analyte.
  • Spectrum analysis is the largest class of instrumental analysis because there are so many types of radiation that can be recorded and the way in which it is measured is very different for each method.
  • the most commonly used spectral analysis is to measure the amount of electromagnetic radiation emitted by the instrument when it is absorbed by the analyte.
  • Absorption occurs when a quantum of radiation, known as a photon, strikes a molecule and causes the molecule to become excited (high energy). When absorption occurs, the incident radiation passes through the sample, reducing its intensity.
  • Absorption spectrophotometry or absorption spectrophotometry is a technique for measuring the amount of absorption for sample analysis.
  • the analyte is placed in a container and the absorption is measured by examining the wavelength of the incident and absorbed radiation over the spectral region.
  • the radiation intensity or absorption obtained here can be plotted as a function of the wavelength or energy of the incident line, and the component of the analyte can be identified from the wavelength at which the peak appears.
  • the existing spectral analysis method is very complicated.
  • the pixel information of the spectrometer is obtained by using a separate light source, and the approximate pixel information of the corresponding wavelength is obtained instead of the entire pixel.
  • the approximate pixel information of the corresponding wavelength is obtained instead of the entire pixel.
  • the present invention is for analyzing the light source spectrum for obtaining accurate wavelength information of the input light source by scanning the pixel information of the light source on the spectrometer and the entire area of the input light source using a wavelength scanning filter
  • the present invention provides a method for calibrating an entire region of a spectroscope and a method for obtaining information in the apparatus.
  • the apparatus for calibrating a full-spectrum spectrometer for a light source spectrum analysis includes: a wavelength scan filter for scanning a light generated from an input light source and selecting a specific wavelength; A spectrometer which detects a signal of pixel information through the camera in the incident light when light having a specific wavelength selected by the wavelength scan filter is incident; And obtain light spectral wavelength information through light spectral analysis on light of a specific wavelength selected by the wavelength scan filter, and obtain one-to-one mapping between the obtained light spectral wavelength information and the pixel information sensed by the spectrometer. And an optical spectrum analyzer for acquiring wavelength information and pixel information.
  • the information acquisition method in the full-field calibration apparatus of the spectrometer for light source spectrum analysis to achieve the objects of the present invention, the step of selecting a specific wavelength by scanning the light generated from the input light source; Detecting a signal of pixel information through a camera in the selected specific wavelength of light; Obtaining light spectral wavelength information through light spectral analysis on the light of the selected specific wavelength; And one-to-one mapping of the obtained light spectrum wavelength information and the sensed pixel information to obtain accurate wavelength information and pixel information of the entire area of the input light source.
  • the wavelength information and the pixel information of the spectrometer and the entire area of the input light source can be scanned using a wavelength scan filter to obtain simple and accurate wavelength information and pixel information compared to the conventional complex method. This is possible and marketability is good.
  • FIG. 1 is a view showing the structure of a full-range calibration device of the spectrometer for light source spectrum analysis according to an embodiment of the present invention
  • FIG. 2 is a view showing the structure of each type of wavelength scan filter in the full-range calibration apparatus according to an embodiment of the present invention
  • FIG. 3 is a diagram illustrating a method for acquiring wavelength information and pixel information in a full area calibration apparatus according to an embodiment of the present invention
  • FIG. 4 is a graph showing pixel versus wavelength information of a light source measured in a full area calibration apparatus according to an embodiment of the present invention.
  • FIG. 1 is a view showing the structure of the full-range calibration device of the spectrometer for the light source spectrum analysis according to an embodiment of the present invention
  • Figure 2 is a structure of each type of wavelength scan filter in the full-range calibration device according to an embodiment of the present invention Figure is shown.
  • the apparatus for calibrating a full region includes a circulator 10, a wavelength scanning filter 20, an optical fiber coupler 30, and a spectrometer 40. ), And an optical spectrum analyzer (OSA) 50.
  • OSA optical spectrum analyzer
  • the circulator 10 transmits the light generated from the input light source to the wavelength scan filter 20.
  • the wavelength scan filter 20 scans the light emitted from the circulator 10 and separates the light into wavelengths, and selects a specific wavelength from the separated wavelengths so that the light of the selected wavelength is passed through the spectrometer 40 through the optical fiber coupler 30. ) And the light spectrum analyzer 50.
  • the wavelength scan filter 20 may be configured as a transmissive wavelength variable filter or a reflective wavelength variable filter as shown in FIG. 2B, as shown in FIG. 2A, and in addition, an embodiment of the present invention. You can also apply other types of filters that can perform.
  • the optical fiber coupler 30 is a device for distributing and combining optical signals in an optical fiber, and an embodiment of the present invention distributes light having a wavelength selected by the wavelength scan filter 20 to the spectrometer 40 and the optical spectrum analyzer 50. .
  • the spectrometer 40 detects pixel information from light of a selected wavelength incident from the wavelength scan filter 20, that is, a line scan camera (CMOS camera or CCD array) detects light of the wavelength selected and incident from the wavelength scan filter 20. A signal is detected by pixel information of a corresponding wavelength through the array (44).
  • CMOS camera or CCD array line scan camera
  • the spectrometer 40 also includes a collimator 41, a diffraction grating or prism 42, a focusing lens 43, and a line scan camera 41. can do.
  • the collimator 41 receives the light separated through the wavelength scan filter 20, and makes the incident light (light) into parallel light.
  • the incident light is emitted with the effective NA at the end of the optical fiber.
  • the diffraction grating 42 diffracts incident light at a predetermined angle for each wavelength. At this time, the diffracted light proceeds aligned by wavelength.
  • the focusing lens 43 makes the diffracted light emitted by the diffraction grating 42 at an angle back into parallel light.
  • the optical spectrum analyzer 50 obtains the wavelength information of the light spectrum by analyzing the light spectrum from the incident light, and performs a one-to-one mapping of the pixel information of the camera detected by the spectrometer 40 and the wavelength information of the light spectrum. Acquire accurate wavelength information and pixel information of the region.
  • the wavelength scan filter 20 since the wavelength scan filter 20 selects and sends a wavelength, the wavelength scan filter 20 has a diffraction angle suitable for the path of the wavelength.
  • the diffracted light of the corresponding wavelength is thus passed through the focusing lens 43 and is incident on the line scan camera (CCD or CMOS camera) 44.
  • the line scan camera CCD or CMOS camera
  • the spectrometer 40 in the line scan camera 44 when the light source is separated by the slit in the wavelength scan filter 20 to be the pixel position corresponding to the wavelength, the spectrometer 40 in the line scan camera 44, the position information for all the pixels Since it is obtained, information about the pixels of the spectrometer 40 can be known.
  • the pixel information of the wavelength can be known but the exact value of the wavelength is not known. Measure and get the exact value of the wavelength.
  • the wavelength scan filter 20 may be configured as one of a transmission wavelength tunable filter and a reflection wavelength tunable filter.
  • the wavelength scan filter 20 may include a collimator 101 and a diffraction grating. a grating 102, a focusing lens 103, a slit 104, and a mirror 105.
  • the collimator 101, the diffraction defect 102, and the focusing lens 103 are formed in pairs of symmetrical structures with respect to the slit, and the light of a specific wavelength selected from the slit 104 is advanced again in the reverse order.
  • a mirror 105 is formed to reflect light of a specific wavelength selected from the slit 104 so that the light proceeds in the reverse order.
  • the collimator 101 injects the light incident through the circulator 10 into the diffraction grating 102 as parallel light, and passes the light incident from the diffraction grating 102 in the reverse order to the spectrometer 40 and the light spectrum. Incident to the analyzer 50.
  • the diffraction grating 102 speculates the incident parallel light at different wavelengths and injects light incident from the focusing lens 103 in the reverse order to the collimator 101.
  • the focusing lens 103 aligns the spectroscopic light incident from the diffraction grating 102 for each wavelength and injects light incident from the slit 104 in the reverse order to the diffraction grating 102.
  • the slit 104 is a unitary structure that can move from side to side and selects a particular wavelength spectra from the spectroscopic light incident through the focusing lens 103.
  • the spectrometer for the light source spectrum configured as described above has all the pixel information for each wavelength and shows more accurate spectral performance by using the pixel information for the entire region. .
  • FIG. 3 is a diagram illustrating a method for acquiring wavelength information and pixel information in a full area calibration apparatus according to an exemplary embodiment of the present invention.
  • the apparatus for correcting the entire area receives the light source and injects light from the input light source into the wavelength scan filter 20 through the circulator 10.
  • step 220 the wavelength scan filter 20 of the full-field calibration apparatus scans the light of the incident input light source to select a specific wavelength, and then, in step 230, the spectrometer 40 and the optical spectrum analyzer 50 Incident).
  • the steps 220 and 230 the light of the incident light source is incident on the diffraction grating 102 by parallel light by the collimator 101, and is spectroscopically diffracted by the diffraction grating 102 at different wavelengths.
  • the spectroscopic light proceeds aligned by the focusing lens 103, and only a specific wavelength is selected by the slit 104, and the light of the selected wavelength is again focused in the focusing lens 103, the diffraction grating 102 and the collimator. Incident on the spectrometer 40 and the optical spectrum analyzer 50 via 101.
  • the spectrometer 40 of the full-area calibration apparatus detects a signal having pixel information of the light of the selected wavelength through the camera. Accordingly, in step 250, the optical spectrum analyzer 50 performs a one-to-one mapping of the signal detected by the spectrometer 40, that is, the pixel information of the camera and the optical spectrum wavelength information obtained by optical spectrum analysis of the light of the incident wavelength. Thus, in operation 260, the full-range calibration apparatus acquires accurate wavelength information and pixel information of the entire area of the input light source according to the one-to-one mapping result.
  • the results obtained through this process can be displayed as a graph of the pixel-to-wavelength information of the measured light source as shown in FIG. 5 attached thereto. You can get information.

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)

Abstract

The present invention relates to a full-range calibration apparatus for a spectrometer for analysis of the light spectrum and to a method for acquiring information using the apparatus. Using a wavelength scan filter, the full-range calibration apparatus scans light generated by an input light source and selects a specific wavelength, enables the spectrometer to sense a signal of pixel information from light of the selected specific wavelength through a camera, enables a light spectrum analyzer to perform analysis on the light of the selected specific wavelength so as to acquire optical spectrum wavelength information, and performs one-to-one mapping between the thus-acquired optical spectrum wavelength information and the aforementioned sensed pixel information, thereby acquiring wavelength information and pixel information in a simpler and more accurate manner than complicated conventional methods. Therefore, the apparatus of the present invention can be used with a variety of light sources, and is thus highly marketable.

Description

광원 스펙트럼 분석용 분광기의 전 영역 교정 장치 및 그 장치에서 정보 획득 방법Full range calibration device of spectroscope for light source spectrum analysis and information acquisition method in the device

본 발명은 광원 스펙트럼 분석용 분광기의 전 영역 교정 장치 및 그 장치에서 정보 획득 방법에 관한 것으로서, 더욱 상세하게는 입력 광원을 파장 스캔형 필터를 이용하여 정확한 파장 정보 및 스펙트로미터 상의 픽셀 정보를 획득하기 위한 광원 스펙트럼 분석용 분광기의 전 영역 교정 장치 방법 및 그 장치에서 정보 획득 방법에 관한 것이다.The present invention relates to an apparatus for calibrating a whole area of a spectroscope for light source spectrum analysis and a method for acquiring information in the apparatus, and more particularly, to obtain accurate wavelength information and pixel information on a spectrometer using a wavelength scan filter as an input light source. The present invention relates to a method for calibrating a full-spectrum spectrometer for a light source spectrum analysis, and a method for acquiring information in the apparatus.

일반적으로 분광기는 광원으로부터 방출되는 광을 분광시키는 것으로 빛의 굴절을 이용한 프리즘 분광기와 회절 현상을 이용한 격자(grating) 분광기가 있다. 분광기에서 광의 분리에 관계되는 것은 슬릿의 넓이로서 넓이가 크면 피크는 넓어져 분리가 잘 안되고, 좁으면 피크가 날카로와져서 분리 기능이 좋아진다. 반면 광의 세기는 통과 광량이 적어져 감소한다.Generally, a spectrometer spectroscopy light emitted from a light source, and a prism spectrometer using light refraction and a grating spectrometer using diffraction phenomenon are used. The separation of light in the spectrometer is the width of the slit. If the width is large, the peak becomes wider and the separation is difficult. If the width is narrow, the peak becomes sharp and the separation function is improved. On the other hand, the intensity of the light decreases as the amount of light passing through decreases.

또한, 스펙트럼 분석법은 분석물에 의해 흡수, 산란, 방출되는 전자기 복사선을 측정하는 것을 말한다. 기록할 수 있는 복사선의 종류가 매우 많고 이를 측정하는 방식이 각 방법마다 매우 다르기 때문에 스펙트럼 분석법이 기기분석의 가장 큰 부류를 이룬다. 가장 많이 사용되는 스펙트럼 분석법은 기기에 의해 방출되는 전자기 복사선이 분석물에 의해 흡수될 때 그 흡수량을 재는 것이다. 광자로 알려진 복사선의 한 양자가 분자에 충돌해 그 분자가 어떤 들뜬 상태(에너지가 높은 상태)로 될 때 흡수가 일어난다. 복사선에 대한 흡수가 일어나면 입사되는 복사선은 시료를 통과하면서 그 세기가 감소한다. 시료분석을 하기 위해 흡수량을 측정하는 기술이 흡광광도법 혹은 흡수분광광도법이다.Spectral analysis also refers to the measurement of electromagnetic radiation absorbed, scattered, and emitted by an analyte. Spectrum analysis is the largest class of instrumental analysis because there are so many types of radiation that can be recorded and the way in which it is measured is very different for each method. The most commonly used spectral analysis is to measure the amount of electromagnetic radiation emitted by the instrument when it is absorbed by the analyte. Absorption occurs when a quantum of radiation, known as a photon, strikes a molecule and causes the molecule to become excited (high energy). When absorption occurs, the incident radiation passes through the sample, reducing its intensity. Absorption spectrophotometry or absorption spectrophotometry is a technique for measuring the amount of absorption for sample analysis.

분석물을 용기 속에 넣고 스펙트럼 영역에 걸쳐 입사·흡수되는 방사선의 파장을 조사하여 그 흡수량을 측정한다. 여기서 얻게 되는 복사선 세기 또는 흡수량을 입사선의 파장이나 에너지의 함수로 표시하여 그림으로 나타내면, 피크가 나타나는 파장으로부터 분석물의 성분을 확인할 수 있다.The analyte is placed in a container and the absorption is measured by examining the wavelength of the incident and absorbed radiation over the spectral region. The radiation intensity or absorption obtained here can be plotted as a function of the wavelength or energy of the incident line, and the component of the analyte can be identified from the wavelength at which the peak appears.

이와 같이 기존의 스펙트럼 분석 방법은 매우 복잡한 방식이며, 기존 방식에서 픽셀 정보를 얻기 위해서는 별도의 광원을 사용하여 스펙트로미터의 픽셀 정보를 전체 픽셀이 아닌 해당 파장에 대한 대략적인 픽셀 정보를 얻고 나머지 영역에 대해서는 산술적 계산을 통해 획득하여 정확한 픽셀정보를 얻기 어렵다는 문제점이 있다.As such, the existing spectral analysis method is very complicated. In order to obtain pixel information from the conventional method, the pixel information of the spectrometer is obtained by using a separate light source, and the approximate pixel information of the corresponding wavelength is obtained instead of the entire pixel. There is a problem that it is difficult to obtain accurate pixel information by acquiring through arithmetic calculation.

상술한 바와 같은 문제점을 해결하기 위해 본 발명은 스펙트로미터 상에서 광원의 픽셀 정보와, 입력 광원의 전 영역을 파장 스캔형 필터를 사용하여 스캔함으로써 정확한 입력 광원의 파장 정보를 획득하기 위한 광원 스펙트럼 분석용 분광기의 전 영역 교정 장치 방법 및 그 장치에서 정보 획득 방법을 제공함에 있다.In order to solve the problems described above, the present invention is for analyzing the light source spectrum for obtaining accurate wavelength information of the input light source by scanning the pixel information of the light source on the spectrometer and the entire area of the input light source using a wavelength scanning filter The present invention provides a method for calibrating an entire region of a spectroscope and a method for obtaining information in the apparatus.

상기 본 발명의 목적들을 달성하기 위한 광원 스펙트럼 분석용 분광기의 전 영역 교정 장치는, 입력 광원에서 발생한 빛을 스캔하여 특정 파장을 선택하는 파장 스캔 필터; 상기 파장 스캔 필터에서 선택된 특정 파장의 빛이 입사되면 입사된 빛에서 카메라를 통해 픽셀 정보의 신호를 감지하는 스펙트로미터; 및 상기 파장 스캔 필터에서 선택된 특정 파장의 빛에서 광 스펙트럼 분석을 통해 광 스펙트럼 파장 정보를 얻고, 얻은 광 스펙트럼 파장 정보와 상기 스펙트로미터에서 감지된 픽셀 정보를 일대일 매핑시켜 입력 광원의 전 영역에 대한 정확한 파장 정보 및 픽셀 정보를 획득하는 광 스펙트럼 분석기를 포함하는 것을 특징으로 한다. In order to achieve the above object of the present invention, the apparatus for calibrating a full-spectrum spectrometer for a light source spectrum analysis includes: a wavelength scan filter for scanning a light generated from an input light source and selecting a specific wavelength; A spectrometer which detects a signal of pixel information through the camera in the incident light when light having a specific wavelength selected by the wavelength scan filter is incident; And obtain light spectral wavelength information through light spectral analysis on light of a specific wavelength selected by the wavelength scan filter, and obtain one-to-one mapping between the obtained light spectral wavelength information and the pixel information sensed by the spectrometer. And an optical spectrum analyzer for acquiring wavelength information and pixel information.

또한, 상기 본 발명의 목적들을 달성하기 위한 광원 스펙트럼 분석용 분광기의 전 영역 교정 장치에서 정보 획득 방법은, 입력 광원에서 발생한 빛을 스캔하여 특정 파장을 선택하는 단계; 상기 선택된 특정 파장의 빛에서 카메라를 통해 픽셀 정보의 신호를 감지하는 단계; 상기 선택된 특정 파장의 빛에서 광 스펙트럼 분석을 통해 광 스펙트럼 파장 정보를 얻는 단계; 및 상기 얻은 광 스펙트럼 파장 정보와 상기 감지된 픽셀 정보를 일대일 매핑시켜 입력 광원의 전 영역에 대한 정확한 파장 정보 및 픽셀 정보를 획득하는 단계를 포함하는 것을 특징으로 한다.In addition, the information acquisition method in the full-field calibration apparatus of the spectrometer for light source spectrum analysis to achieve the objects of the present invention, the step of selecting a specific wavelength by scanning the light generated from the input light source; Detecting a signal of pixel information through a camera in the selected specific wavelength of light; Obtaining light spectral wavelength information through light spectral analysis on the light of the selected specific wavelength; And one-to-one mapping of the obtained light spectrum wavelength information and the sensed pixel information to obtain accurate wavelength information and pixel information of the entire area of the input light source.

본 발명은 스펙트로미터의 픽셀 정보와 입력 광원의 전 영역을 파장 스캔 필터를 사용하여 스캔함으로써 기존의 복잡한 방식에 비해 간단하면서 정확한 파장 정보 및 픽셀 정보를 얻을 수 있으므로 광원 분야 및 여러 가지 광원에 대한 적용이 가능하여 시장성이 좋다.According to the present invention, the wavelength information and the pixel information of the spectrometer and the entire area of the input light source can be scanned using a wavelength scan filter to obtain simple and accurate wavelength information and pixel information compared to the conventional complex method. This is possible and marketability is good.

도 1은 본 발명의 실시예에 따른 광원 스펙트럼 분석용 분광기의 전 영역 교정 장치의 구조를 도시한 도면, 1 is a view showing the structure of a full-range calibration device of the spectrometer for light source spectrum analysis according to an embodiment of the present invention,

도 2는 본 발명의 실시예에 따른 전 영역 교정 장치에서 파장 스캔 필터의 종류별 구조를 도시한 도면, 2 is a view showing the structure of each type of wavelength scan filter in the full-range calibration apparatus according to an embodiment of the present invention,

도 3은 본 발명의 실시예에 따라 전 영역 교정 장치에서 파장 정보 및 픽셀 정보를 획득하기 위한 방법을 도시한 도면, 3 is a diagram illustrating a method for acquiring wavelength information and pixel information in a full area calibration apparatus according to an embodiment of the present invention;

도 4는 본 발명의 실시예에 따라 전 영역 교정 장치에서 측정된 광원의 픽셀 대 파장 정보의 그래프를 도시한 도면.4 is a graph showing pixel versus wavelength information of a light source measured in a full area calibration apparatus according to an embodiment of the present invention.

이하, 본 발명의 바람직한 실시예들을 첨부된 도면들을 참조하여 상세히 설명한다. 본 발명을 설명함에 있어, 관련된 공지 기능 혹은 구성에 대한 구체적인 설명이 본 발명의 요지를 불필요하게 흐릴 수 있다고 판단되는 경우 그 상세한 설명을 생략한다.Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. In describing the present invention, if it is determined that detailed descriptions of related known functions or configurations may unnecessarily obscure the subject matter of the present invention, the detailed description thereof will be omitted.

또한, 도면 전체에 걸쳐 유사한 기능 및 작용을 하는 부분에 대해서는 동일한 도면 부호를 사용한다.In addition, the same reference numerals are used for parts having similar functions and functions throughout the drawings.

덧붙여, 명세서 전체에서, 어떤 부분이 다른 부분과 '연결'되어 있다고 할때, 이는 '직접적으로 연결'되어 있는 경우뿐만 아니라, 그 중간에 다른 소자를 사이에 두고 '간접적으로 연결'되어 있는 경우도 포함한다. 또한 어떤 구성 요소를 '포함'한다는 것은, 특별히 반대되는 기재가 없는 한 다른 구성요소를 제외하는 것이 아니라, 다른 구성요소를 더 포함할 수 있는 것을 의미한다.In addition, throughout the specification, when a part is 'connected' to another part, it is not only 'directly connected' but also 'indirectly connected' with another element in between. Include. In addition, the term 'comprising' a certain component means that the component may be further included, without excluding the other component unless specifically stated otherwise.

우선, 본 발명의 실시예에 따른 광원 스펙트럼 분석용 분광기의 전 영역 교정 장치의 구조를 첨부된 도면들을 참조하여 구체적으로 설명하기로 한다. First, the structure of an apparatus for calibrating a full area of a spectroscope for light source spectrum analysis according to an embodiment of the present invention will be described in detail with reference to the accompanying drawings.

도 1은 본 발명의 실시예에 따른 광원 스펙트럼 분석용 분광기의 전 영역 교정 장치의 구조를 도시한 도면이고, 도 2는 본 발명의 실시예에 따른 전 영역 교정 장치에서 파장 스캔 필터의 종류별 구조를 도시한 도면이다. 1 is a view showing the structure of the full-range calibration device of the spectrometer for the light source spectrum analysis according to an embodiment of the present invention, Figure 2 is a structure of each type of wavelength scan filter in the full-range calibration device according to an embodiment of the present invention Figure is shown.

상기 도 1을 참조하면, 전 영역 교정 장치는 써큘레이터(Circulator)(10), 파장 스캔 필터(Wavelength Scanning Filter)(20), 광섬유 커플러(Fiber Coupler)(30), 스펙트로미터(Spectrometer)(40), 광 스펙트럼 분석기(OSA : Optical Spectrum Analyzer)(50)를 포함하여 구성할 수 있다. Referring to FIG. 1, the apparatus for calibrating a full region includes a circulator 10, a wavelength scanning filter 20, an optical fiber coupler 30, and a spectrometer 40. ), And an optical spectrum analyzer (OSA) 50.

써큘레이터(10)는 입력 광원에서 발생한 빛을 파장 스캔 필터(20)로 전달한다. The circulator 10 transmits the light generated from the input light source to the wavelength scan filter 20.

파장 스캔 필터(20)는 써큘레이터(10)로부터 나온 빛을 스캔하여 빛을 파장별로 분리하고, 분리된 파장에서 특정 파장을 선택하여 선택된 파장의 빛을 광섬유 커플러(30)를 통해 스펙트로미터(40) 및 광 스펙트럼 분석기(50)로 입사시킨다. 또한, 파장 스캔 필터(20)는 상기 도 2a에 도시된 바와 같이, 투과형 파장 가변형 필터 또는 상기 도 2b에 도시된 바와 같이, 반사형 파장 가변형 필터로 구성될 수 있으며, 이 외에도 본 발명의 실시예를 수행할 수 있는 다른 종류의 필터를 적용할 수도 있다. The wavelength scan filter 20 scans the light emitted from the circulator 10 and separates the light into wavelengths, and selects a specific wavelength from the separated wavelengths so that the light of the selected wavelength is passed through the spectrometer 40 through the optical fiber coupler 30. ) And the light spectrum analyzer 50. In addition, the wavelength scan filter 20 may be configured as a transmissive wavelength variable filter or a reflective wavelength variable filter as shown in FIG. 2B, as shown in FIG. 2A, and in addition, an embodiment of the present invention. You can also apply other types of filters that can perform.

광섬유 커플러(30)는 광섬유에서 광 신호를 분배 결합하는 장치로서, 본 발명의 실시예서는 파장 스캔 필터(20)에서 선택된 파장의 빛을 스펙트로미터(40) 및 광 스펙트럼 분석기(50)로 분배한다. The optical fiber coupler 30 is a device for distributing and combining optical signals in an optical fiber, and an embodiment of the present invention distributes light having a wavelength selected by the wavelength scan filter 20 to the spectrometer 40 and the optical spectrum analyzer 50. .

스펙트로미터(40)는 파장 스캔 필터(20)로부터 입사된 선택된 파장의 빛에서 픽셀 정보를 감지 즉, 파장 스캔 필터(20)에서 선택되어 입사된 파장의 빛을 라인 스캔 카메라(CMOS 카메라 또는 CCD 어레이(array))(44)를 통해 해당 파장의 픽셀 정보로 신호를 감지한다. The spectrometer 40 detects pixel information from light of a selected wavelength incident from the wavelength scan filter 20, that is, a line scan camera (CMOS camera or CCD array) detects light of the wavelength selected and incident from the wavelength scan filter 20. A signal is detected by pixel information of a corresponding wavelength through the array (44).

또한, 스펙트로미터(40)는 콜리메이트(collimator)(41), 회절격자(diffraction grating, 또는 프리즘)(42), 포커싱 렌즈(focusing lens)(43) 및 라인 스캔 카메라(41)를 포함하여 구성할 수 있다. The spectrometer 40 also includes a collimator 41, a diffraction grating or prism 42, a focusing lens 43, and a line scan camera 41. can do.

콜리메이터(41)는 파장 스캔 필터(20)를 통해 분리된 빛이 입사되고, 입사된 빛(광)을 평행광으로 만들어준다. 여기서 입사된 빛은 광파이버의 끝단에서 유효NA를 지니고 발산하게 된다. 회절 격자(42)는 일정각을 가지고 입사된 빛을 파장별로 회절시킨다. 이때 회절된 빛은 파장별로 정렬되어 진행된다. 포커싱 렌즈(43)는 회절 격자(42)에 의해 일정각을 가지고 발산되는 회절된 빛을 다시 평행광으로 만들어준다. The collimator 41 receives the light separated through the wavelength scan filter 20, and makes the incident light (light) into parallel light. The incident light is emitted with the effective NA at the end of the optical fiber. The diffraction grating 42 diffracts incident light at a predetermined angle for each wavelength. At this time, the diffracted light proceeds aligned by wavelength. The focusing lens 43 makes the diffracted light emitted by the diffraction grating 42 at an angle back into parallel light.

광 스펙트럼 분석기(50)는 입사된 빛에서 광 스펙트럼 분석하여 광 스펙트럼의 파장 정보를 얻고, 스펙트로미터(40)에서 감지된 카메라의 픽셀 정보와 상기 광 스펙트럼의 파장 정보를 일대일 매핑시킴으로써 입력 광원의 전 영역의 정확한 파장 정보와 픽셀 정보를 획득한다. The optical spectrum analyzer 50 obtains the wavelength information of the light spectrum by analyzing the light spectrum from the incident light, and performs a one-to-one mapping of the pixel information of the camera detected by the spectrometer 40 and the wavelength information of the light spectrum. Acquire accurate wavelength information and pixel information of the region.

상술한 바와 같이, 파장 스캔 필터(20)에서 파장을 선택하여 보내므로 해당 파장의 경로에 적합한 회절각을 지니게 된다. 따라서 회절된 해당 파장의 빛은 포커싱 렌즈(43)를 통과해 라인 스캔 카메라(CCD 또는 CMOS의 카메라)(44)로 입사된다. 이때 반응하는 픽셀이 해당 파장에 대한 픽셀 위치가 되는 것으로 파장 스캔 필터(20)에서 광원을 슬릿에 의해 분리할 경우, 스펙트로미터(40)에서는 라인 스캔 카메라(44)에서 모든 픽셀들에 대한 위치 정보를 획득하므로 스펙트로미터(40)의 픽셀에 대한 정보를 알 수 있게 된다. 하지만 상기 도 1의 파장 스캔 필터(20)와 스펙트로미터(40)만을 사용할 경우 해당 파장에 대한 픽셀 정보는 알 수 있으나 해당 파장의 정확한 값을 알지 못하므로 광 스펙트럼 분석기(50)를 통해 해당 파장 값을 측정하여 해당 파장의 정확한 값을 구한다. As described above, since the wavelength scan filter 20 selects and sends a wavelength, the wavelength scan filter 20 has a diffraction angle suitable for the path of the wavelength. The diffracted light of the corresponding wavelength is thus passed through the focusing lens 43 and is incident on the line scan camera (CCD or CMOS camera) 44. In this case, when the light source is separated by the slit in the wavelength scan filter 20 to be the pixel position corresponding to the wavelength, the spectrometer 40 in the line scan camera 44, the position information for all the pixels Since it is obtained, information about the pixels of the spectrometer 40 can be known. However, when only the wavelength scan filter 20 and the spectrometer 40 of FIG. 1 are used, the pixel information of the wavelength can be known but the exact value of the wavelength is not known. Measure and get the exact value of the wavelength.

상기 도 2를 참조하면, 파장 스캔 필터(20)는 투과형 파장 가변형 필터 및 반사형 파장 가변형 필터 중 하나로 구성될 수 있으며, 파장 스캔 필터(20)는 콜리메이터(collimator)(101), 회절 격자(diffraction grating)(102), 포커싱 렌즈(focusing lens)(103), 슬릿(Translating slit)(104) 및 거울(105)로 이루어져 있다. 여기서 투과형 파장 가변형 필터는 슬릿을 기준으로 콜리메이터(101), 회절 결자(102), 포커싱 렌즈(103)가 대칭 구조의 쌍으로 형성되어, 슬릿(104)에서 선택된 특정 파장의 빛을 역순으로 다시 진행되도록 한다. 반면, 반사형 파장 가변형 필터는 슬릿(104)에서 선택된 특정 파장의 빛을 반사시켜 빛이 역순으로 진행되도록 하기 위한 거울(105)이 형성되어 있다. Referring to FIG. 2, the wavelength scan filter 20 may be configured as one of a transmission wavelength tunable filter and a reflection wavelength tunable filter. The wavelength scan filter 20 may include a collimator 101 and a diffraction grating. a grating 102, a focusing lens 103, a slit 104, and a mirror 105. Here, in the transmissive wavelength variable filter, the collimator 101, the diffraction defect 102, and the focusing lens 103 are formed in pairs of symmetrical structures with respect to the slit, and the light of a specific wavelength selected from the slit 104 is advanced again in the reverse order. Be sure to On the other hand, in the reflective tunable filter, a mirror 105 is formed to reflect light of a specific wavelength selected from the slit 104 so that the light proceeds in the reverse order.

콜리메이터(101)는 써큘레이터(10)를 통해 입사된 빛을 평행광으로 회절 격자(102)에 입사시키고, 회절 격자(102)로부터 역순으로 진행되어 입사되는 빛을 스펙트로미터(40) 및 광 스펙트럼 분석기(50)로 입사시킨다. The collimator 101 injects the light incident through the circulator 10 into the diffraction grating 102 as parallel light, and passes the light incident from the diffraction grating 102 in the reverse order to the spectrometer 40 and the light spectrum. Incident to the analyzer 50.

회절 격자(102)는 입사된 평행광을 각기 다른 파장으로 분광시키고, 포커싱 렌즈(103)에서 역순으로 입사되는 빛을 콜리메이터(101)로 입사시킨다. The diffraction grating 102 speculates the incident parallel light at different wavelengths and injects light incident from the focusing lens 103 in the reverse order to the collimator 101.

포커싱 렌즈(103)는 회절 격자로(102)부터 입사된 분광된 빛을 파장별로 정렬하고, 슬릿(104)으로부터 역순으로 입사되는 빛을 회절 격자(102)로 입사시킨다. The focusing lens 103 aligns the spectroscopic light incident from the diffraction grating 102 for each wavelength and injects light incident from the slit 104 in the reverse order to the diffraction grating 102.

슬릿(104)은 좌우로 움직일 수 있는 단일 구조로서, 포커싱 렌즈(103)를 통해 입사된 분광된 빛에서 분광된 특정 파장을 선택한다. The slit 104 is a unitary structure that can move from side to side and selects a particular wavelength spectra from the spectroscopic light incident through the focusing lens 103.

이와 같이 구성된 광원 스펙트럼 분석용 분광기는 상술한 바와 같은 스펙트로미터(40)를 이용함으로써, 각 파장에 대한 픽셀 정보를 모두 함께 지니게 되며, 전 영역에 대한 픽셀 정보를 이용하여 보다 정확한 분광성능을 보이게 된다. By using the spectrometer 40 as described above, the spectrometer for the light source spectrum configured as described above has all the pixel information for each wavelength and shows more accurate spectral performance by using the pixel information for the entire region. .

그러면 이와 같은 구조를 갖는 광원 스펙트럼 분석용 분광기의 전 영역 교정 장치에서 정확한 파장 정보 및 픽셀 정보를 획득하기 위한 방법을 첨부된 도면을 참조하여 구체적으로 설명하기로 한다. Next, a method for acquiring accurate wavelength information and pixel information in the apparatus for calibrating a full-spectrum spectrometer of a light source spectrum analyzer having such a structure will be described in detail with reference to the accompanying drawings.

도 3은 본 발명의 실시예에 따라 전 영역 교정 장치에서 파장 정보 및 픽셀 정보를 획득하기 위한 방법을 도시한 도면이다. 3 is a diagram illustrating a method for acquiring wavelength information and pixel information in a full area calibration apparatus according to an exemplary embodiment of the present invention.

상기 도 3을 참조하면, 210단계에서 전 영역 교정 장치는 광원을 입력받아 입력된 광원에서 나온 빛을 써큘레이터(10)를 통해 파장 스캔 필터(20)로 입사시킨다. Referring to FIG. 3, in step 210, the apparatus for correcting the entire area receives the light source and injects light from the input light source into the wavelength scan filter 20 through the circulator 10.

220단계에서 전 영역 교정 장치의 파장 스캔 필터(20)에서는 입사된 입력 광원의 빛을 스캔하여 특정 파장을 선택한 후, 230단계에서 선택된 특정 파장의 빛을 스펙트로미터(40) 및 광 스펙트럼 분석기(50)로 입사시킨다. 이러한 220단계 및 230단계를 구체적으로 설명하면, 입사된 광원의 빛은 콜리메이터(101)에 의해 평행광으로 회절 격자(102)에 입사되어 회절 격자(102)에 의해 각기 다른 파장으로 분광된다. 이렇게 분광된 빛은 포커싱 렌즈(103)에 의해 정렬되어 진행하고 슬릿(104)에 의해 특정 파장만이 선택되고, 선택된 파장의 빛은 다시 역순으로 포커싱 렌즈(103), 회절 격자(102) 및 콜리메이터(101)를 거쳐 스펙트로미터(40) 및 광 스펙트럼 분석기(50)로 입사된다. In step 220, the wavelength scan filter 20 of the full-field calibration apparatus scans the light of the incident input light source to select a specific wavelength, and then, in step 230, the spectrometer 40 and the optical spectrum analyzer 50 Incident). In detail, the steps 220 and 230, the light of the incident light source is incident on the diffraction grating 102 by parallel light by the collimator 101, and is spectroscopically diffracted by the diffraction grating 102 at different wavelengths. The spectroscopic light proceeds aligned by the focusing lens 103, and only a specific wavelength is selected by the slit 104, and the light of the selected wavelength is again focused in the focusing lens 103, the diffraction grating 102 and the collimator. Incident on the spectrometer 40 and the optical spectrum analyzer 50 via 101.

240단계에서 전 영역 교정 장치의 스펙트로미터(40)에서는 입사된 선택 파장의 빛을 카메라를 통해 픽셀 정보로 신호를 감지한다. 이에 따라 250단계에서 광 스페트럼 분석기(50)는 스펙트로미터(40)에서 감지된 신호 즉, 카메라의 픽셀 정보와, 입사된 파장의 빛을 광 스펙트럼 분석하여 얻은 광 스펙트럼 파장 정보를 일대일 매핑시킨다. 이로 인해 260단계에서 전 영역 교정 장치는 일대일 매핑 결과에 따라 입력 광원의 전 영역에 대한 정확한 파장 정보 및 픽셀 정보를 획득한다. In step 240, the spectrometer 40 of the full-area calibration apparatus detects a signal having pixel information of the light of the selected wavelength through the camera. Accordingly, in step 250, the optical spectrum analyzer 50 performs a one-to-one mapping of the signal detected by the spectrometer 40, that is, the pixel information of the camera and the optical spectrum wavelength information obtained by optical spectrum analysis of the light of the incident wavelength. Thus, in operation 260, the full-range calibration apparatus acquires accurate wavelength information and pixel information of the entire area of the input light source according to the one-to-one mapping result.

이러한 과정을 통해 얻은 결과를 첨부된 도 5에 도시된 바와 같이 측정된 광원의 픽셀 대 파장 정보의 그래프로 표시할 수 있으며, 이를 통해 본 발명의 실시예에서는 입력 광원의 전 영역에 대한 픽셀 대 파장 정보를 얻을 수 있다. The results obtained through this process can be displayed as a graph of the pixel-to-wavelength information of the measured light source as shown in FIG. 5 attached thereto. You can get information.

한편, 본 발명의 상세한 설명에서는 구체적인 실시예들에 관하여 설명하였으나, 본 발명의 범위에서 벗어나지 않는 한도 내에서 여러 가지 변형이 가능함은 물론이다. 그러므로 본 발명의 범위는 설명된 실시예들에 국한되어 정해져서는 안되며 후술하는 발명청구의 범위뿐 만 아니라 이 발명청구의 범위와 균등한 것들에 의해 정해져야 한다.On the other hand, in the detailed description of the present invention has been described with respect to specific embodiments, various modifications are possible without departing from the scope of the invention. Therefore, the scope of the present invention should not be limited to the described embodiments, but should be defined not only by the scope of the following claims, but also by the equivalents of the claims.

Claims (8)

입력 광원에서 발생한 빛을 스캔하여 특정 파장을 선택하는 파장 스캔 필터;A wavelength scan filter configured to scan light generated from an input light source and select a specific wavelength; 상기 파장 스캔 필터에서 선택된 특정 파장의 빛이 입사되면 입사된 빛에서 카메라를 통해 파장별 픽셀 정보를 감지하는 스펙트로미터; 및A spectrometer for detecting pixel information for each wavelength through the camera from the incident light when light having a specific wavelength selected by the wavelength scan filter is incident; And 상기 파장 스캔 필터에서 선택된 특정 파장의 빛에서 광 스펙트럼 분석을 통해 광 스펙트럼 파장 정보를 얻고, 얻은 광 스펙트럼 파장 정보와 상기 스펙트로미터에서 감지된 픽셀 정보를 일대일 매핑시켜 입력 광원의 전 영역에 대한 정확한 파장 정보 및 픽셀 정보를 획득하는 광 스펙트럼 분석기를 포함하는 것을 특징으로 하는 광원 스펙트럼 분석용 분광기의 전 영역 교정 장치.The optical spectrum wavelength information is obtained through light spectrum analysis on light of a specific wavelength selected by the wavelength scan filter, and the obtained wavelength information and the pixel information detected by the spectrometer are mapped one-to-one to accurately correct wavelengths of the entire area of the input light source. And a light spectrum analyzer for acquiring the information and the pixel information. 제1항에 있어서, The method of claim 1, 입력 광원에서 발생한 빛을 상기 파장 스캔 필터로 전달하는 써큘레이터; 및 A circulator configured to transfer light generated from an input light source to the wavelength scan filter; And 상기 파장 스캔 필터에서 선택된 파장의 빛을 상기 스펙트로미터 및 상기 광 스펙트럼 분석기로 분배하는 광섬유 커플러를 더 포함하는 것을 특징으로 하는 광원 스펙트럼 분석용 분광기의 전 영역 교정 장치.And an optical fiber coupler for distributing the light of the wavelength selected by the wavelength scan filter to the spectrometer and the optical spectrum analyzer. 제1항에 있어서, 상기 파장 스캔 필터는,The method of claim 1, wherein the wavelength scan filter, 상기 입력 광원에 발생한 빛을 평행광으로 입사시키는 콜리메이터;A collimator for injecting light generated in the input light source into parallel light; 상기 콜리메이터로부터 입사된 평행광을 각기 다른 파장으로 분광시키는 회절격자;A diffraction grating for spectroscopy parallel light incident from the collimator at different wavelengths; 분광된 빛을 파장별로 정렬하는 포커싱 렌즈; 및A focusing lens for aligning the spectroscopic light by wavelength; And 상기 포커싱 렌즈를 통해 입사된 파장별 빛에서 분광된 특정 파장을 선택하는 슬릿을 포함하는 것을 특징으로 하는 광원 스펙트럼 분석용 분광기의 전 영역 교정 장치.And a slit for selecting a specific wavelength spectroscopically from the light for each wavelength incident through the focusing lens. 제3항에 있어서, 상기 파장 스캔 필터는,The method of claim 3, wherein the wavelength scan filter, 반사형 파장 가변형 필터를 이용하며, 상기 슬릿에 의해 선택된 특정 파장의 빛을 반사시켜 역순으로 진행시키는 거울을 더 포함하는 것을 특징으로 하는 광원 스펙트럼 분석용 분광기의 전 영역 교정 장치.And a mirror which reflects light of a specific wavelength selected by the slit and proceeds in the reverse order, using a reflective wavelength tunable filter. 제3항에 있어서, The method of claim 3, 상기 파장 스캔 필터는 투과형 파장 가변형 필터를 이용하며, 상기 슬릿을 기준으로 상기 콜리메이터, 상기 회절 격자 및 상기 포커싱 렌즈가 서로 대칭된 구조의 쌍으로 형성되어 상기 선택된 파장의 빛을 역순으로 진행시킴을 특징으로 하는 광원 스펙트럼 분석용 분광기의 전 영역 교정 장치.The wavelength scan filter uses a transmissive wavelength tunable filter, and the collimator, the diffraction grating, and the focusing lens are formed in a pair of symmetrical structures with respect to the slit to advance light of the selected wavelength in reverse order. Full range calibration device of spectrometer for light source spectrum analysis. 입력 광원에서 발생한 빛을 스캔하여 특정 파장을 선택하는 단계;Selecting a specific wavelength by scanning light generated from the input light source; 상기 선택된 특정 파장의 빛에서 카메라를 통해 파장별 픽셀 정보를 감지하는 단계;Sensing pixel information for each wavelength through a camera in the selected specific wavelength of light; 상기 선택된 특정 파장의 빛에서 광 스펙트럼 분석을 통해 광 스펙트럼 파장 정보를 얻는 단계;Obtaining light spectral wavelength information through light spectral analysis on the light of the selected specific wavelength; 상기 얻은 광 스펙트럼 파장 정보와 상기 감지된 픽셀 정보를 일대일 매핑시켜 입력 광원의 전 영역에 대한 정확한 파장 정보 및 픽셀 정보를 획득하는 단계를 포함하는 것을 특징으로 하는 광원 스펙트럼 분석용 분광기의 전 영역 교정 장치에서 정보 획득 방법.A one-to-one mapping of the obtained light spectral wavelength information and the sensed pixel information to obtain accurate wavelength information and pixel information of the entire area of the input light source; How to get information from 제6항에 있어서, The method of claim 6, 상기 입력 광원에서 발생한 빛을 스캔하여 특정 파장을 선택하는 단계는, Selecting a specific wavelength by scanning the light generated from the input light source, 상기 입력 광원에 발생한 빛을 평행광으로 입사시키는 단계;Incident light generated by the input light source into parallel light; 상기 입사된 평행광을 각기 다른 파장으로 분광시키는 단계;Spectroscopy the incident parallel light at different wavelengths; 분광된 빛을 파장별로 정렬하는 단계; 및Sorting the spectroscopic light by wavelength; And 정렬된 빛에서 분광된 특정 파장을 선택하는 단계를 포함하는 것을 특징으로 하는 광원 스펙트럼 분석용 분광기의 전 영역 교정 장치에서 정보 획득 방법.And selecting a specific wavelength spectroscopically in the aligned light. 제7항에 있어서, The method of claim 7, wherein 상기 선택된 특정 파장의 빛을 역순으로 진행시키는 단계를 더 포함하는 것을 특징으로 하는 광원 스펙트럼 분석용 분광기의 전 영역 교정 장치에서 정보 획득 방법.The method of claim 1, further comprising the step of advancing the light of the selected specific wavelength in the reverse order.
PCT/KR2011/005582 2010-07-30 2011-07-29 Full-range calibration apparatus for a spectrometer for analysis of the light spectrum, and method for acquiring information using the apparatus Ceased WO2012015264A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR1020100074054A KR101078135B1 (en) 2010-07-30 2010-07-30 Full range calibration device of spectroscope for light source spectrum analysis and information acquisition method in the device
KR10-2010-0074054 2010-07-30

Publications (2)

Publication Number Publication Date
WO2012015264A2 true WO2012015264A2 (en) 2012-02-02
WO2012015264A3 WO2012015264A3 (en) 2012-05-18

Family

ID=45033601

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/KR2011/005582 Ceased WO2012015264A2 (en) 2010-07-30 2011-07-29 Full-range calibration apparatus for a spectrometer for analysis of the light spectrum, and method for acquiring information using the apparatus

Country Status (2)

Country Link
KR (1) KR101078135B1 (en)
WO (1) WO2012015264A2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115372270A (en) * 2021-05-20 2022-11-22 智谱科技有限公司 Spectral integration calibration method and multi-spectral spectrometer
CN116678497A (en) * 2023-08-03 2023-09-01 山东大学 Automatic calibration device and method for spectrometer

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101423964B1 (en) 2012-07-20 2014-07-31 광주과학기술원 Method and apparutus for processing optical signal of spectrometer
CN103868591A (en) * 2012-12-12 2014-06-18 西安西光创威光电有限公司 Rapid non-scan multispectral imaging system and method thereof
KR101528332B1 (en) 2014-01-09 2015-06-15 한국과학기술연구원 Apparatus and method for extreme ultra-violet spectrometer calibration
KR101526870B1 (en) * 2014-04-30 2015-06-09 광주과학기술원 Random transmittance filter module, transmittance estimation method for the Random transmittance filter module, and spectrometer using the same
KR101500688B1 (en) 2014-05-29 2015-03-11 한국과학기술연구원 Apparatus and method for extreme ultra-violet spectrometer calibration
KR102375036B1 (en) 2017-08-02 2022-03-15 삼성전자주식회사 Spectrum measurement apparatus and method, calibration method of spectrum measurement apparatus
KR102498122B1 (en) 2017-11-21 2023-02-09 삼성전자주식회사 Spectroscopy device, spectroscopy method and biological signal measuring apparatus
KR102659953B1 (en) * 2021-08-30 2024-04-24 한국공학대학교산학협력단 Method and apparatus for wavelength identification using light power
KR20250143006A (en) * 2024-03-21 2025-09-30 한국기계연구원 Integrated module type spectroscopic system and method for diagnosing process using the same

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5303165A (en) 1992-02-12 1994-04-12 The Perkin-Elmer Corporation Standardizing and calibrating a spectrometric instrument
GB9701627D0 (en) * 1997-01-27 1997-03-19 Plessey Telecomm Wavelength manager
US6175750B1 (en) 1999-03-19 2001-01-16 Cytometrics, Inc. System and method for calibrating a reflection imaging spectrophotometer
JP4592969B2 (en) 2001-02-01 2010-12-08 浜松ホトニクス株式会社 Spectroscopic apparatus and spectral method
JP2005156343A (en) 2003-11-26 2005-06-16 Shimadzu Corp Spectroscopic device and optical filter for spectroscopic device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115372270A (en) * 2021-05-20 2022-11-22 智谱科技有限公司 Spectral integration calibration method and multi-spectral spectrometer
CN116678497A (en) * 2023-08-03 2023-09-01 山东大学 Automatic calibration device and method for spectrometer
CN116678497B (en) * 2023-08-03 2023-12-19 山东大学 Automatic calibration device and method for spectrometer

Also Published As

Publication number Publication date
WO2012015264A3 (en) 2012-05-18
KR101078135B1 (en) 2011-10-28

Similar Documents

Publication Publication Date Title
WO2012015264A2 (en) Full-range calibration apparatus for a spectrometer for analysis of the light spectrum, and method for acquiring information using the apparatus
US9360366B1 (en) Self-referencing spectrometer on mobile computing device
US6690466B2 (en) Spectral imaging system
US7414717B2 (en) System and method for detection and identification of optical spectra
US20170219433A1 (en) Spectroscopic measurement method and spectroscopic measurement device
Ding et al. Smartphone-based spectrometer with high spectral accuracy for mHealth application
US8537354B2 (en) System and method for instrument response correction based on independent measurement of the sample
US10393579B2 (en) Miniature spectrometer and a spectroscopic method
WO2005074525A2 (en) Entangled-photon fourier transform spectroscopy
US20110085164A1 (en) Method and apparatus for automated spectral calibration
US20070165210A1 (en) High-density channels detecting device
US9194798B2 (en) Imaging based refractometer for hyperspectral refractive index detection
JP3796024B2 (en) Weak emission spectrometer
JP5917572B2 (en) Spectroscopic measurement apparatus and image partial extraction apparatus
KR101054017B1 (en) Calibration method of the spectrometer
JP5429698B2 (en) Spectroscopic analyzer for microscope and spectroscopic analysis method of spectroscopic analyzer for microscope
US12099009B2 (en) Method and apparatus for surface plasmon resonance imaging
CN108713135B (en) A spectral analysis system
TW201829991A (en) Spectrometric apparatus and spectrometric method
AU2006255359A1 (en) A spectrometric apparatus for measuring shifted spectral distributions
CN116026760A (en) Wavelength type SPR sensing system and method
Brims et al. Introducing Cottonscope: A rapid and precise measurement of cotton fibre maturity based on siromat
Kung et al. Development of an ultraspectral imaging system by using a concave monochromator
EP4330642B1 (en) Electromagnetic radiation measurement device
JP6260157B2 (en) Spectrometer

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 11812793

Country of ref document: EP

Kind code of ref document: A2

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 11812793

Country of ref document: EP

Kind code of ref document: A2