WO2012088172A2 - Front opening large substrate container - Google Patents

Abstract

A flat panel substrate container provides a microenvironment for safely storing and allowing horizontal removal through a front door. In an embodiment of the invention, a robust shelf system has a plurality of stacked shelves that have a cantilevered state with the door open and a non-cantilevered state with the door closed. The container may be generally rectilinear in shape and conforming to the shape of the substrate panels. The container has an open front with a closed top wall, closed bottom wall, closed left side wall, closed right side wall, and closed back side wall. A plurality of shelves are secured to the back side wall and extend forwardly in a cantilevered fashion. In an embodiment of the invention, the shelves may be generally elongate slender shelf members formed of aluminum extrusions or assemblies that are arranged in two columns with a pair of such members provided for each substrate and defining a slot. Also inwardly extending edge supports are provided at the left side wall and right side wall for edge support of the substrates. In an embodiment of the invention, the elongate shelf members each have one of a pair of male and female portion that join as the door is closed to effectively "uncantilever" the elongate shelf members as the door closes the open front. All of the shelf members and the substrates thereon may be fixed into position at the end opposite the cantilevered connection to the container portion. The container may have a feature for overhead transport, such as lifting brackets, static dissipation features, and latching features.

Description

FRONT OPENING LARGE SUBSTRATE CONTAINER

RELATED APPLICATIONS

This application claims priority to U.S. Provisional Application Serial No. 61/425,223, filed December 20, 2010 and U.S. Provisional Application Serial No. 61/452,144, filed March 13, 201 1, which are incorporated by reference herein.

BACKGROUND OF THE INVENTION

Advances in semiconductor manufacturing have allowed processing of larger and larger substrates with smaller and smaller circuits thereon. For example, flat panels, particularly glass panel substrates are utilized for organic light emitting diodes and can be ultimately formed into smaller cellphone screens or large television screens. Final product considerations make it desireable to have the substrates and final products as thin as possible. And for large television screens, the panels have to be as large in area as possible. Thus, the need has arisen for the capability of storing in a contained environment large thin glass panels. It is preferable or necessary, to store such panels, before and intermediate processing steps such that the top exposed surface does not contact anything; this precludes stacking such panels on top of one another such that they engage one another. Rather, the panels may be stored in a spaced vertically stacked array. These panels are typically removed by elongate robotic arms extending under the glass panel to engage the bottom and lift and remove individual panels. The sag associated with larger and thinner panels currently limit the size of flat panel carriers and/or limit the density between shelves supporting the panels. It would be desireable to be able to store, safely retrieve individual glass substrates that are 1300 mm X 1500 mm in a carrier as compact as possible and that could hold 25 substrates in an enclosed microenvironment.

Such container would ideally provide a robust shelf system of minimal weight and maximal weight carrying capabilities, and that would minimize vibrations and flutter associated with large size substrate containers.

SUMMARY OF THE INVENTION

A flat panel substrate container provides a microenvironment for safely storing and allowing horizontal removal through a front door. In an embodiment of the invention, a robust shelf system has a plurality of stacked shelves that have a cantilevered state with the door open and a non-cantilevered state with the door closed. The container may be generally rectilinear in shape and conforming to the shape of the substrate panels. The container has an open front with a closed top wall, closed bottom wall, closed left side wall, closed right side wall, and closed back side wall. A plurality of shelves are secured to the back side wall and extend forwardly in a cantilevered fashion. In an embodiment of the invention, the shelves may be generally elongate slender shelf members formed of aluminum extrusions or assemblies that are arranged in two columns with a pair of such members provided for each substrate and defining a slot. Also inwardly extending edge supports are provided at the left side wall and right side wall for edge support of the substrates. In an embodiment of the invention, the elongate shelf members each have one of a pair of male and female portion that join as the door is closed to effectively "uncantilever" the elongate shelf members as the door closes the open front. All of the shelf members and the substrates thereon may be fixed into position at the end opposite the cantilevered connection to the container portion.

In an embodiment of the invention, a robust storage system has an outer grid framework and a plurality of cantilevered beams for support of large inserted substrates. The container may be generally rectilinear in shape and conforming to the shape of the substrate panels. In some embodiments the structural frame of the container is made of cast molded aluminum with unitary top and bottom structures and welded side members. The container portion has an open front with a closed top wall, closed bottom wall, closed left side wall, closed right side wall, and closed back side wall. The walls are comprised of clear panels in some embodiments allowing for a largely transparent container. A plurality of cantilevered beams are secured to the back side wall and extend forwardly toward the opening for the door. In an embodiment of the invention, the cantilevered beams may be generally elongate slender shelf members formed of aluminum or other rigid materials, such as carbon fiber assemblies, that are arranged in two columns with a pair of such members provided for each substrate. Also inwardly extending edge supports are provided at the left side wall and right side wall for edge support of the substrates. Each pair of cantilevered beams and the associated edge supports defining a slot for the substrates. Corner posts that form part of the support gridwork for each of the closed left side wall, the closed right side wall, the closed bottom wall and the closed top wall form a door frame defining the open front and that receives the door. The container is especially suitable for substrates for manufacturing flat panel screens including active matrix organic light emitting diode (AMOLED) screens. An advantage and feature of the invention is that the robustness and high level of structural integrity of the central shelves is provided, for example, only when needed, such as for transport, by simply applying and closing the door. With the container opened for insertion and removal of the substrates by high precision robotic arms, the shelves need less support and are less inclined to vibrate, move or flutter.

Doors used to close the container portions generally include two spaced-apart clear panel layers separated by a central cavity. Similarly to the walls of the container portion, a aluminum grid may support the clear panel layers. Certain embodiments of the invention utilize cooperating magnetic coupling pairs on the door and door frame. In an embodiment a magnetic door having Neo Dymium magnets mounted about the perimeter of the door that engage with complementary plates on the door frame. A layer of separation material provides a defined separation distance between the magnets and the cooperating plates to facilitate removal of the attached door. Some magnetic doors are equipped with a secondary latch system including a latch pin and spring loaded detent located near a perimeter location of the door. In certain embodiments, the magnetic doors contain a seal coupled about the inwardly facing perimeter surface of the door, while in other embodiments magnetic doors utilize a seal located on the container frame surrounding the large opening of the container. In other embodiments a rotary latch key door is used. Rotary latch key doors generally have a pair centrally located rotational members disposed in the cavity between the two spaced-apart clear panel layers of the door. A centrally located aperture in each of the rotational members allows for locking and unlocking the door by insertion of and rotation of a key. In some embodiments, corner guides of generally wedge-shaped profile are located about the perimeter of the door for precisely guiding the door to a proper seating location. In embodiments, the corner guides may match with similar corner guides mounted about the door frame, the corner guides may be formed of a polymer with additives such that they are conductive.

In some embodiments, an overhead transport design is utilized on the container consisting of keyed brackets disposed at each of the four top corners of the container. The keyed brackets may be conductive to provide a path to ground when the container is engaged by T-shaped engagement and hoisting keys. In other embodiments of the invention, breather filters are mounted in the container, for example in the door and/or the top of the container. In certain embodiments, the exterior of the container is made up of a window and skin assembly comprised of clear panels placed within elongate "U" shaped seals located within recesses of the container frame. The "U" shaped seals may be conductive to have electrostatic dissipative characteristics providing a provide a conductive path to the panel being held. Further, the transparent panels may themselves be electrostatic dissipative (ESD) and may have a smoke appearance associated therewith. In some embodiments, the container contains a plurality of Ultra High Molecular Weight Polyethylene (UHMW- PE) pads spaced about the bottom of the container for seating guides and some shock absorption during seating. The pads or feet can have fillers such as carbon to provide a conductive path for dissipating static electricity.

In embodiments of the invention, static dissipation features are provided to minimize damage due to accumulation and discharge of static charges. Such features include paths to ground provided by hoisting brackets, and/or feet on the bottom of the container portion. Additionally pads that the substrates sit on may be conductive or static dissipative to dissipate any charges thereon.

Accordingly, a robust sealable transportable container is disclosed with a high level of structural integrity is provided by the arrangement including the central cantilevered beams and substrate supports.

DESCRIPTION OF THE FIGURES

Figure 1 is a perspective view of a front opening container for large substrates according to the invention herein.

Figure 2 is a perspective view of a front opening container for large substrates according to the invention herein with the front door removed exposing the substates on the elongate shelf members.

Figure 3 is a front perspective view of the framework of a front opening container for large substrates and with the exterior panels removed according to the invention herein.

Figure 4 is a perspective rear view of the framework of Figure 3.

Figure 5 is a top plan view with the top wall removed with the door not engaged with the door frame of the container. Figure 6 is a top plan view of Figure 5 with the door being partially inserted into the door frame.

Figure 7 is a cross section of the container with the door in place in accord with the invention herein.

Figure 8 is a detailed elevational cross section of the container through the cooperating engagement members of the door and elongate shelf members.

Figure 9 is a continuation of the cross section of Figure 8.

Figure 10 is a graphic view of the door-shelf members cooperating engagement portions and with glass substrates in place on the shelves.

Figure 1 1 is an elevational view of the door of Figure 10 fully inserted and with substrate edge retainers on the door engaging the substrates.

Figure 12 is a perspective detailed view of inwardly extending edge supports from a side frame member with the exterior panels removed.

Figure 13 is a side view of the container including a depiction of the arrangement of elongate cantilever beams according to an embodiment of the invention.

Figure 14 is detailed rear view of a portion of the arrangement of the backstop and substrate edge supports according to an embodiment of the invention.

Figure 15 is a back corner perspective view of the framework of a front opening container for large substrates and with the front door, backstop components, cantilever beams, substrate edge supports and exterior panels removed according to the invention herein.

Figure 16 is a detailed perspective view of the bottom of the framework of Figure

4.

Figure 17 is a detailed perspective view of the coupling of the bottom of the framework to vertical members of the framework of Figure 4.

Figure 18 is a detailed perspective view of the coupling of the bottom of the framework to vertical members of the framework of Figure 4.

Figure 19 is a cross-sectional view taken at line 19-19 of Figure 21. Figure 20 is a perspective view of the end of a cantilever beam to cooperate with the columnar beam of Figure 19 according to an embodiment of the invention.

Figure 21 is a pictorial view of the backside of a vertical columnar member with the three adjustment screws and a central ball retaining screw associated with the cantilever beam adjustment assemble of Figures 19 and 20.

Figure 22 is a perspective view of a magnetic door for a front opening container for large substrates with a secondary latch design according to an embodiment of the invention.

Figure 23 is a detailed view of a portion of the secondary latch design shown in section A of Figure 22 according to an embodiment of the invention.

Figure 24 is a partial cutaway view of a portion of the secondary latch design shown in section A of Figure 22 according to an embodiment of the invention.

Figure 25 is a partial cross-sectional view of a portion of the secondary latch design shown in section A of Figure 22 according to an embodiment of the invention.

Figure 26 is a partial cross-sectional view of a portion of a door with magnet attachment means.

Figures 27 and 28 are views of a gasket seal mounted on a magnetic door according to an embodiment of the invention.

Figure 29 is a perspective view of a rotary latch key door and a front opening container for large substrates according to an embodiment of the invention.

Figure 30 is a perspective view of a rotary latch key for a front opening container for large substrates according to an embodiment of the invention.

Figure 31 shows a top view of a breath filter assembly according to an embodiment of the invention.

Figure 32 shows a side view of a breath filter assembly according to an embodiment of the invention.

Figures 33 is a cross-sectional view showing the attachment of a window or skin assembly for the outside panels of a front opening container for large substrates according to an embodiment of the invention. Figure 34 shows a perspective view of a front opening container for large substrates equipped with OHT (Overhead Transport) brackets according to an embodiment of the invention.

Figure 35 shows a perspective view of an OHT bracket according to an embodiment of the invention.

DETAILED DESCRIPTION

Referring to Figures 1 and 2, a front opening substrate container 20 is illustrated and generally comprises a container portion 22 with a door frame 24 defining a front opening 26 and a door 28 for closing the front opening. The container portion has a closed top 30, a closed bottom 32, a closed left side 34, a closed right side 36, a closed backside 38, and respective top wall 40, bottom wall 42, left wall 44, right wall 46, and back wall 48. In embodiments each wall area is at least four feet by four feet and provides an enclosed volume of at least sixty cubic feet.

Referring to Figures 1-4, the container portion 22 may be formed of a container framework 56 that has a skin or wall panels 58 attached thereto, such as by threaded connectors or rivets. The wall panels may be formed of polycarbonate or other materials. The framework is suitable formed of metal frame members, for example aluminum. The aluminum may be extruded and or machined, and assembled with fasteners or welded.

Referring to Figures 5-1 1, the container portion includes a plurality of elongate shelf members 62 that extend from rear vertical frame members 66 and may be secured thereto by threaded members 68. Each elongate shelf member has one portion of a pair of cooperating engagement portions, with the other portion being on the door. In the figures, a first cooperating portion 72 configured as a tapered protruding portion or spear, engages and second cooperating portion 76 configured as an aperture extending axially in the elongate shelf members 62.

The door cooperating engagement portions 72 may be attached to flanged channels 80 that are sized to be inserted into receiving regions 84 configured as channels on the door frame 88, see Figure 5b. The door may be covered with polycarbonate or other sheet material panels 90, see Figure 2, and may have latch mechanisms 92, viewing ports 94, and other equipment interfaces such as for robotic handling, purging, condition sensing, and the like. The substrates S have a front edge 102 that as the door is closed may be engaged by substrate edge retainers 106, see, for example, Figure 11. The container portion is advantageously arranged to provide left side and right side substrate edge supports 1 12 positioned on the side walls, such as on the side vertical frame members 120. The two columns 124 of elongate shelf members define at least two robotic access regions 130, 132 in which robotic arms 136, illustrated by the dashed lines of Figure 5, can reach underneath individual substrates, lift same up, and remove them. Or, of course, insert them, lower the individual substrates on the shelves, lower the robotic arm to separate same from the substrate and then remove the robotic arm. Additionally, a further central access region 140 may be located between the columns of elongate shelf members and allow a third robotic arm 144 to access a central portion of the substrates.

Referring to Figure 14, the substrate side edge supports 112 are advantageously configured as a cylinder portion 146 with an intermediate tapered surface 147 and an additional cylinder or rod shaped end piece portion 148. Each may be attached with threaded fasteners that extend through the vertical frame members into bores in the supports. The shelf members may have pads 149 formed of TPEs or other polymer materials to provide cushioning of the substrates. In one embodiment of the invention, the elongate cantilever beams 62 and substrate supports 112 provide an arrangement in which inserted substrates have a pitch of 45 mm, a lift clearance of 30 mm, and a distance from the bottom of the container to the first substrate of 105 mm.

Referring to Figures 5-1 1, the unique engagement action of the door when closed on the shelves is illustrated. The cantilever shelves are provided by the elongate shelf members that due to their length are somewhat susceptible to damage or bouncing when subjected to excessive loading or shock conditions. Such excessive loading is unlikely to occur when the substrates are being loaded or unloaded, with the door removed, in that the container portion is necessarily stationary when substrates are removed or inserted. Such loading or shock conditions are more likely to occur when the container is being moved or transported and then the door is preferably engaged in the door frame. In such a condition the elongate shelf members are now supported at both ends so they are not in a cantilevered state. Thus the shelf members, and the substrates thereon, are not as susceptible to shock conditions or excessive loading. In addition to the spear aperture configuration illustrated, it is contemplated other engaging cooperation portions are suitable and appropriate. The spear with the tapered end is particularly advantageous in that the point can enter the top of the aperture if the elongate shelf member is slightly tilted downward due to the weight of the substrate and the tapered surface entering the aperture can then lift the shelf member to a proper or normal position. It is contemplated that the spear could alternatively be on the door and the receiving apertures on the ends of the cantilevered shelves. With the spears all arranged in a vertical column aligned with the apertures in the elongate shelf members the shelf members all are simultaneously raised as the door is inserted.

Referring to Figures 1, 15-18, the container portion 22 may be formed of a container framework 156 that has a skin or wall panels 58 attached thereto, where the wall panels are preferably clear windows allowing for readily viewing the interior of the container. The window wall panels may generally be installed with the use of U-shaped seals that engage the edge portions of the sheets and that fit into cooperating recesses in the members. The wall panels may be formed of polycarbonate or other materials. The polycarbonate panels may have an electrostatic discharge property in some embodiments. Associated with such a characteristic, the windows may then have a "smoked" appearance.

The framework 156 may be formed of a grid of metal components. For example, aluminum members formed into grids. Also unitarily formed portions may be connected aluminum members that are welded at all primary joints, for example. The aluminum may be extruded and or machined, and assembled with fasteners or welded. The framework 156 may be constructed of uni-body top and bottom members 159, as shown in Figure 16. These uni-body members 159 can be molded as one piece from cast molded aluminum. The uni-body members are welded to vertical tubing members 160 to complete the framework 156, as shown in Figures 15-18. The framework structures may be anodized in such embodiments. The bottom and sides of the framework are completely smooth and all corners and intersections are designed to be rounded so as to avoid entrapment areas that may trap particles. Steel cast molds may be used to achieve the desired surface finish in some embodiments.

As illustrated in Figures 3, 4-7, 19-21, a number of components providing structure for support of substrates located within the container include cantilever beams 62, 162 (or elongate shelf members) and substrate supports 112. Specifically, the container portion includes a plurality of elongate cantilever beams 62, 162 that extend from rear vertical frame members 66, 177 (also referred to as the backstop) and may be secured thereto by fasteners or threaded members through apertures 170. The elongate cantilever beams 162 may be made from carbon fiber epoxy, for example, or aluminum. Each elongate cantilever beam 162 has an engagement surface 172 at one end which couples to the vertical frame members 66, 177, with the other end extending toward the door 28.

Figures 19-21 illustrate a cantilever beam attachment and adjustment system. The cantilever beam 162 is attached and adjusted by three screws 174, 175, 176 that extend from the back side of a vertical columnar member 177 through to the front side the member without threaded engagement and into the end of the cantilever beam 162 which has threaded bore holes 178 for receiving the screws. A pivot point that the screws adjust the cantilever beam end about is provided by a spherical ball that may be secured in place between divot 181 of the cantilever beam engagement surface 172 and recess 183 that may be adjusted by screw 185, also extending through the vertical columnar member 177. The three screws may then provide up-down and left right adjustment of the cantilever beam by pivoting the end of the beam about the pivot point provided by the spherical ball 179. The cantilever beams may be formed of aluminum or a carbon fiber based epoxy resin, or other suitable materials. Resin pads may be on top of the beams for contacting the substrates. Pads formed of polyetheretherketone (PEEK) are believed to be suitable. Also, carbon fiber or filler may be added to the PEEK for conductivity for ESD.

Various types of doors 28 are illustrated in Figures 22-30 used to close the container of the present invention. In some embodiments, the door may be an exclusively magnetically attached door 180, see Figure 26. These magnetically attached doors use perimeter magnets. The magnets may be Neo Dymium stainless steel plated and have a flux field of 1,022 Gauss, for example. Some such magnets may have dimensions of 101.6mm x 12.7 mm x 3.175 mm, for example. In the cross-sectional view of Figure 26, the door structure 84 can be seen covering both sides of the frame structure 186 the magnet is further shown mounted behind a angled magnet retainer 88 to hold the magnet in place and separate it from an engagement plate on the door frame.

Embodiments having a magnetically attached door may further utilize a secondary latch design 96 as shown in Figures 22-25. This type of latch system will prevent the door from falling off in the case of a load port error in which the door is not pushed back into the correct position. In general, the secondary latch design is an assembly located adjacent the periphery of the door 180. The assembly includes a latch pin 200 mounted within a passageway 202 in the latch housing that is surrounded by a plurality of guide bumps 204 surrounding the perimeter of the passageway in spaced apart relation as well as a latch pin guide and stop rail 206. The end of the latch pin has a latch pin hole 208 for interfacing with the loadport. Finally, the latch pin has detent positions 209 in the latch pin which lock and unlock via a spring loaded ball detent component 210.

In the case of magnetic doors, the door 180 or door frame 24, 124 may have a seal member 220 or material to provide sealing between the closed interior and exterior of the container when the door is closing the open front. A first embodiment where the seal is located on the frame of the door is shown in Figures 27, 28. This door seal may be made of vinyl and EPDM with an aluminum core. Placing the seal on the frame rather than the door will result in a thinner and lighter door. Typically a separation layer, such as EPDM (ethylene propylene diene monomer) will separate the magnets on the door from the cooperating plate or cooperating magnets in the door frame to reduce the adhesion of the door to the container portion and to facilitate removal of the door. In embodiments the magnets may also be secured on the door frame with cooperating plates of ferrous materials, or other magnets on the door.

In some embodiments, rotary latch key doors 230 can be used with the container in place of a magnetic door. Examples of latch key doors are shown in Figures 1, 2, 29, and 30. Rotary latch key doors generally have a pair centrally located rotational members 232 disposed in the cavity between the two spaced-apart clear panel layers of the door. A centrally located aperture 234 in each of the rotational members allows for locking and unlocking the door by insertion of a key. The rotational member may comprise cammed grooves 133 that linkages 235 engage by cam rollers 236 attached to the linkages to effect an extension and withdrawal of latching tips 237 from the edge of the door into the door frame. The linkages may be constrained between the two panels of transparent material by guides 238 fastened to the panels by screws 239, the guides secure and guide the linkages.

A further feature than may be implemented on either magnetic and rotary doors for the container are corner guides 240. Corner guides 240 are generally depicted in Figures 25, 27, and 2. Corner guides 240 are generally components of wedge shaped profiles and recesses. These corner guides are mounted around the perimeter of the door 28, two on a side, in locations offset from the corners of the door, as shown in Figure 25. Further, a corresponding material guide may be placed on the container frame. The material may be UHMW-PE (ultra high molecular weight polyethylene). Next, breather filters assemblies 150, as shown in Figures 31 and 32, may be installed in the container, such as at the door and top of the container. Specifically each filter assembly is made up of a breather filter media 152, a filter holder base 154, and a filter holder covering 156 forming a housing 157. When assembled, the breather filter media is located within housing and each filter assembly is placed within an opening in the container. Specifically, in embodiments, two filter assemblies are placed in the door and two filter assemblies are placed in the top of the container to dissipate heat.

The window and skin assembly can be better understood based on Figures 33. In general, the window panels 58 are placed within elongate "U" shaped seals 260 located within recesses 262 of the container framework 156. The "U" shaped seals may be generally conductive and accordingly provide a conductive seal and controlled electrostatic discharge capabilities to the panel being held. Additives to the polycarbonate associated with the controlled ESD characteristic, that is static discharging capability, provide the smoke appearance. These windows are made to resist a washing temp of 50 C in DI water and 90 C in hot air.

An embodiment of a container showing features of a overhead transport (OHT) design is shown in Figures 34 and 35. Specifically, brackets 270 are mounted to the top wall surface 40 of the container at proximate the each of the four top corners. The brackets 270 are generally arch-shaped and include a key shaped opening 272 in the top surface. More specifically, the key shaped opening has a circular central opening and two narrower rectangular spokes extending therefrom. These brackets allow for machinery to readily manipulate and transport these containers by simply engaging holes in the brackets with appropriately keyed projections, that is an inverted T, rotating the inverted T 90 degrees and then lifting. For example, in most embodiments, the OHT design is able to handle over 600kg on a single side.

The invention may be practiced in other embodiments not disclosed herein. References to relative terms such as upper and lower, front and back, left and right, or the like, are intended for convenience of description and are not contemplated to limit the invention, or its components, to any specific orientation. All dimensions depicted in the figures may vary with a potential design and the intended use of a specific embodiment of this invention without departing from the scope thereof. Each of the additional figures and methods disclosed herein may be used separately, or in conjunction with other features and methods, to provide improved devices, systems and methods for making and using the same. Therefore, combinations of features and methods disclosed herein may not be necessary to practice the invention in its broadest sense and are instead disclosed merely to particularly describe representative embodiments of the invention.

Claims

We Claim:

1. A substrate container for large substrate panels, the substrate container comprising a rectilinear container portion with a closed back wall, an open front, a closed left side wall, a closed right side, a closed bottom wall, a closed top wall, and a closed back wall, the substrate container further comprising a door sized to sealingly close the front opening thereby defining an interior space of at least 40 cubic feet, the container portion comprises a framework comprised of vertical columns and horizontal columns and a plurality of rigid polymer panels spanning the framework on the left side wall, the right side wall, the back side wall, the bottom wall, and the top wall,

wherein the substrate container has a plurality of horizontal slots arranged in a vertically stack, each slot defined by substrate defined by a plurality of rows of substrate side edge supports extending from the left side wall and the right side wall, and a plurality of cantilevered shelf members that extend forwardly from the closed back wall.

2. The substrate container of claim 1 wherein each cantilevered shelf member is attached to a vertical support member by way of three screws that are spaced around a pivot point, whereby adjustment of the three screws may provide a positioning of the cantilevered shelf member with respect to the vertical column.

3. The substrate container of claim 2 wherein each of the three screws is threadedly engaged with the cantilevered shelf member but is not threadedly engaged with the vertical support member.

4. The substrate container of any of the above claims wherein the rigid polymer panels spanning the framework are positioned interior of the framework on the top wall and the bottom wall and exterior the^' framework on the left side wall, the right side wall, and the back side wall.

5. The substrate container of any of the above claims wherein each substrate side edge support comprises a cylindrical portion abutting against a vertical support member of the framework, a tapered portion extending from the cylindrical portion, and a rod shaped end portion extending from the tapered portion.

6. The substrate container of any of the above claims wherein the front door comprises a framework and has an interior panel spanning the framework and an exterior panel spanning the framework thereby defining a door interior.

7. The substrate container of claim 6 wherein the front door has a periphery and the comprises a pair of latch mechanisms with latch tips extending outwardly from the periphery.

8. The substrate container of claim 6 wherein the front door has a periphery and comprises a plurality of magnets along the periphery and the front side of the container portion has a door frame with a plurality of magnetically attractable plates, and wherein one of the magnets on the door frame and one of the magnetically attractable plates have a spacer member so that the magnets do not directly contact the magnetically attractable plates.

9. The substrate container of any of the above claims wherein the framework is comprised of aluminum and wherein the panels are formed of a polymer.

10. The substrate container of any of the above claims wherein the panels are formed of a polymer and have static dissipative characteristic and wherein the panels are engaged in a plurality of slots in the framework with a U-shaped cushion material positioned between the panels and framework.

11. The substrate container of claim 10 wherein the U-shaped cushion material is formed of a static dissipative material.

12. The substrate container of any of the above claims further comprising a vent formed of a housing with a filter media therein and providing a pathway between the interior of the substrate container and the exterior of the container.

13. The substrate container of any of the above claims wherein the container has four upper corners and positioned at each corner is an upwardly facing slotted flange for engagement and lifting.

14. The substrate container of any of the above claims wherein the upper wall is formed of a gridwork and the bottom wall is formed of a gridwork, each gridwork comprising at least 12 squares defined by a pair of left right extending support members and a pair for forward backward support members.

15. The substrate container of any of the above claims wherein each of the cantilevered shelves has a T-shaped cross section.

16. The substrate container of any of the above claims wherein each of the cantilevered shelf members engages with the front door when the front door sealingly closes the front opening.

17. The substrate container of any of the above claims wherein each of the cantilevered shelf members engages with the front door by way of a projection and an aperture conformed to the projection, one of the projection and aperture positioned on an outer face of said each of the cantilevered shelf member and the other positioned on the door whereby when the front door sealingly closes the front opening each of the cantilevered shelf members is supported by the door.

18. The substrate container of any of the above claims wherein the door has a front side a back side and four peripheral sides, each peripheral side having a pair of wedge shaped door guides positioned thereon.

19. The substrate container of any of the above claims further comprising a lathing mechanism with key slots in the front door.

20. The substrate container of the above claims wherein the substrates seat on conductive pads on the cantilevered shelves and the shelves and framework provide a path to ground for dissipating static electricity charges.

21. The substrate container of the above claims wherein the polymer panels spanning the framework has conductive capabilities for discharging static electricity buildups thereon.

22. A aluminum framed large substrate carrier enclosing at least 60 cubic feet of volume and comprising a container portion and a door for sealing engagement with the container portion, the container portion comprising a plurality of cantilevered shelf members wherein each of the cantilevered shelf members engages with the front door by way of a projection and an aperture conformed to the projection, one of the projection and aperture positioned on an outer face of said each of the cantilevered shelf member and the other positioned on the door whereby when the front door sealingly closes the front opening each of the cantilevered shelf members is supported by the door.

23. A rectilinear aluminum framed substrate container with eight corners that has a transparent polymer skin and that has four lifting flanges at four upper corners, each lifting flange having a slot opening such that an inverted T-shaped key can be inserted, rotated for lifting engagement with the flange.

24. A rectilinear aluminum framed substrate container with eight corners that has a transparent polymer skin and that contains an interior volume of at least 60 cubic feet has an open front that receives a door within the open front.

25. The container of claim 24 wherein the door has a keyed cam wheel located in the door that is connected to linkages extending from the cam wheel to latch tips that extend and retract from the door to engage the door frame.

26. The container of claim 24 wherein wedge shaped polymer door guides are attached to the periphery of the door for guiding the door into position in the opening of the container.

27. The container of claim 24 wherein breather filter cartridges are replaceable in the container to provide air pressure equalization of interior to the exterior of the container.

28. The container of claim 24 wherein the door is secured in the door opening by way of magnets.

29. The container of claim 24 wherein the door is further secured by a latching pin that extends and retracts from the door into the door frame that defines the door opening.

30. A aluminum framed large substrate container enclosing at least 60 cubic feet of volume and comprising a container portion and a door for sealing engagement with the container portion, the container portion comprising a plurality of cantilevered shelf members, the substrate container further comprising a breather filter for equalizing internal pressure in the substrate container to ambient pressure.

31. The substrate container of any of the above claims in combination with active matrix organic light emitting diode (AMOLED) screens

32. A aluminum framed large substrate carrier enclosing at least 60 cubic feet of volume and comprising a plurality of cantilevered shelf members defining a plurality of spaced slots, each cantilevered shelf member attached to a back wall by way of at least three screws that are spaced around a pivot positioned intermediate each cantilevered shelf member and the back wall, whereby adjustment of the three screws effects positioning of the cantilevered shelf member with respect to the back wall.

33. A aluminum framed large substrate carrier enclosing at least 60 cubic feet of volume with a plurality of spaced slots defined therein and comprising a transparent polymer skin with conductive capabilities for discharging static electricity buildups.