CN1313331C - Clean container structure - Google Patents

Abstract

The invention relates to a clean container structure, which is characterized in that a support frame is directly placed in a front opening of a clean container body and is contained in an inner containing chamber of the clean container body, an upper taking-off plate and a lower taking-off plate are respectively arranged on the upper part and the lower part of the clean container body, and the upper taking-off plate and the lower taking-off plate are mutually assembled with the support frame. Because the clean container body does not need to be provided with openings at other positions as the traditional holding frame, the clean container body is very convenient to manufacture and assemble, the structural strength of the clean container body is not damaged, and meanwhile, the air tightness of the chamber in the clean container body can be maintained under the condition that the area of the opening of the clean container body is reduced, thereby preventing external moisture or micro-dust particles from entering the clean container body.

Description

Clean container structure

technical field

The invention relates to a clean container structure, in particular to a clean container structure which is suitable for rationalizing the transmission mode of load-carrying force, and can improve structural strength and precision, air tightness, and electrostatic protection.

Background technique

At present, the wafers produced by the semiconductor factory are often accommodated and arranged horizontally in a wafer boat. The wafer boat has a plurality of supporting flanges and can be used to insert multiple wafers. The lower side plate of the clean container body is then covered by the cover of the clean container body to protect each wafer, so that it can maintain ultra-high cleanliness during the process of transmission, storage, loading and unloading during production and manufacturing environment without being polluted by particulate dust.

Please refer to Fig. 1, which is a three-dimensional exploded view of a known clean container structure, wherein a clean container body 91, an upper board 92, and a wafer boat 93 are shown, and an upper side plate 911 of the clean container body 91 is provided with an upper group The hole 913 and the lower side plate 912 are provided with a lower set of holes 914, and the crystal boat 93 is inserted into the inner chamber 910 of the clean container body 91 by the lower set of holes 914, and the upper plate 92 is taken out. Then pass through the upper assembly hole 913 to be assembled with the top 931 of the wafer boat 93 .

However, the design in which an upper assembly hole 913 and a lower assembly hole 914 are directly provided on the upper side plate 911 and the lower side plate 912 of the clean container body 91 is not only difficult and expensive to manufacture and assemble, but also It is also easy to cause the structural strength of the clean container body 91 to be damaged. In addition, the clean container body 91 has too many openings and the area is too large, and the airtightness of the inner chamber 910 is also easily affected, so it is easy to cause external moisture or dust particles to enter, which is not very ideal, and can only be added. Airtight gasket to strengthen its airtight effect. In addition, since there are too many dead angles in components such as the clean container body 91 , it is easy to make cleaning and drying difficult when using related cleaning equipment for cleaning.

Contents of the invention

The main purpose of the present invention is to provide a clean container structure, which can improve the structural strength of the clean container body, and the force transmission mode is better when the load is heavy, and the clean container will not be affected by deformation due to the load when it is automatically transported. Precision, while maintaining the airtightness of the inner chamber of the clean container body, it can also provide the effect of electrostatic protection, and it is easy to clean, dry and other maintenance operations.

In order to achieve the above purpose, the clean container structure of the present invention mainly includes a clean container body, a support frame, an upper take-off plate, and a lower take-off plate. Wherein, the clean container body also includes an inner chamber, a front opening, an upper plate, and a lower plate, and several through holes are formed on the upper plate, and several through holes are formed on the lower plate.

In addition, the support frame is accommodated in the inner chamber of the above-mentioned clean container body, and the support frame includes an upper horizontal plate and two side plates, wherein the two side plates extend downward from the two sides of the upper horizontal plate respectively. , and the top of the upper horizontal plate is also protruding upwards with several upper fixing structures, and the bottom of the two side plates is respectively protruding downwards with several lower fixing structures, and the two side plates also include an inner surface respectively, on the two inner surfaces There are also several slots respectively.

In addition, the upper take-off plate is arranged above the upper plate of the clean container body, and the upper take-off plate includes several upper fixing components, which respectively correspond to several through holes passing through the upper plate of the clean container body and are respectively fixed on the support Several upper fixing structures of the horizontal plates on the frame. The lower take-off plate is arranged under the lower plate of the above-mentioned clean container body, and the lower take-off plate includes several lower fixing components, which are respectively fixed to the two supporting frames corresponding to several perforations passing through the lower plate of the clean container body. Several lower fixing structures at the bottom of the side panels.

As can be seen from the above, the support frame of the present invention can be directly inserted into and accommodated in the inner chamber of the clean container body through the front opening of the clean container body. A hole is set at the position for accommodating the support frame during assembly. In this case, the clean container body is not only very convenient in manufacture and assembly, but also has an excellent force transmission method when bearing a heavy load, and the structural strength of the clean container body It will also not be damaged, which helps clean containers not be deformed due to load and affect the position accuracy of the support frame slot during automatic transmission. At the same time, when the opening area of the clean container body is reduced, the airtightness of the inner chamber of the clean container body can also be maintained, effectively isolating external moisture or dust particles from entering the clean container body, and the function of the clean container can also be improved. Or the maintenance effect when the manufacturing process needs to be filled with inert gas. In addition, due to the modular assembly method and innovative concept of the support frame, it has significant benefits on the overall production quality of the clean container body, the flexibility of material selection, and the reduction of production costs.

In addition, the above-mentioned supporting frame for carrying the wafer can be made of conductive material, so that an electrostatic protection function (Electrostatic Discharge, ESD) can be formed. Therefore, the electrostatic protection function of the clean container body and the supporting frame can also be used. Get a good build.

The bracing frame of the present invention can still be connected with a horizontal plate at the bottom of its two side plates. In addition, the upper horizontal plate, the two side plates, and the lower horizontal plate of the aforementioned support frame can be manufactured in an integrated manner.

Description of drawings

Fig. 1 is a three-dimensional exploded view of a known clean container structure.

Fig. 2 is an exploded perspective view of the first preferred embodiment of the present invention.

Fig. 3 is a three-dimensional assembled view of the first preferred embodiment of the present invention.

FIG. 4 is a cross-sectional view of the fixing structure and the fixing assembly in FIG. 3 .

Fig. 5 is an exploded perspective view of the second preferred embodiment of the present invention.

Fig. 6 is a three-dimensional assembled view of the second preferred embodiment of the present invention.

Wherein, the reference signs are explained as follows:

1 clean container body 11 inner chamber 12 front opening

13 Upper board 131 Through hole 14 Lower board

141 perforation 15 left side plate 151 left grip

16 Right side board 2 Support frame 21 Upper horizontal board

211 Upper fixing structure 212 Fastening holes 22 Side panels

221 bottom 222 lower fixed structure 223 top

224 buckle hook 225 inner side 226 slot

3 Upper take-off plate 31 Upper fixing component 311 Upper bolt

312 upper through holes 4 lower take-off plates 41 lower fixed components

411 lower bolt 412 lower through hole 5 support frame

51 upper horizontal plate 52 side plate 521 bottom

53 lower horizontal plates 61, 62 wafers 7 O-rings

8 grounding piece

Detailed ways

In order to further understand the technical content of the present invention, two preferred specific embodiments are illustrated as follows.

Please also refer to FIG. 2 which is an exploded perspective view of the first preferred embodiment of the present invention, FIG. 3 is a perspective combined view of the first preferred embodiment of the present invention, and FIG. 4 is a sectional view of the fixing structure and fixing components of FIG. 3 , which shows a clean container structure, which includes a clean container body 1, a support frame 2, an upper take-off plate 3, and a lower take-off plate 4.

The clean container body 1 among the accompanying drawings also includes an inner chamber 11, a front opening 12, an upper plate 13, a lower plate 14, a left side plate 15, and a right side plate 16, on the left side plate The outer group of 15 is provided with a left handle 151, is provided with a right handle (not shown) in the opposite group on the outside of right side plate 16, and is provided with several through holes 131 in upper plate 13, and in lower plate 14 Several perforations 141 are provided on both sides of the body.

In addition, the support frame 2 in the drawings is a crystal boat for inserting the wafer 61 in this embodiment, and it is directly inserted into the front opening 12 of the clean container body 1 and accommodated in the clean container body 1. Inside the inner chamber 11 of the container body 1, and the support frame 2 includes an upper horizontal plate 21 and two side plates 22, wherein the two side plates 22 extend downward from the two sides of the upper horizontal plate 21 respectively, and the The two side plates 22 respectively include an inner surface 225 , and a plurality of slots 226 are respectively provided on the two inner surfaces 225 for inserting a plurality of wafers 61 . The upper direction of the upper horizontal plate 21 is provided with several upper fixing structures 211, and the bottoms 221 of the two side plates 22 are respectively provided with several lower fixing structures 222. In this embodiment, the upper fixing structures 211 and the lower The fixing structures 222 each use a screw hole.

In addition, the upper take-off plate 3 in the accompanying drawings is arranged on the top of the upper plate 13 of the clean container body 1, and this upper take-off plate 3 includes several upper fixing assemblies 31. In this embodiment, each upper fixing assembly 31 includes There is an upper bolt 311 and an upper through hole 312, and each upper bolt 311 respectively passes through each upper through hole 312 and each through hole 131 of the upper plate 13 of the clean container body 1, and is then screwed correspondingly to the support frame 2 screw holes of each upper fixing structure 211 of the upper horizontal plate 21 .

Similarly, the lower take-off plate 4 is arranged under the lower plate 14 of the clean container body 1, and the two sides of the lower take-off plate 4 respectively include several lower fixing assemblies 41. In this embodiment, each lower fixing assembly 41 is respectively It includes a lower bolt 411 and a lower through hole 412, and each lower bolt 411 respectively passes through each lower through hole 412 and each through hole 141 of the lower plate 14 of the clean container body 1, and is then correspondingly screwed to the two sides of the support frame 2 screw holes of each lower fixing structure 222 on the bottom 221 of the board 22 .

In the above-mentioned assembly process, a left grounding member 8 and a right grounding member (not shown) are connected between the left handle 151 and the right handle (not shown) and the lower take-off plate 4 respectively, which are respectively made of It is made of conductive material, and the left handle 151 and the right handle (not shown) are also made of conductive material. In addition, between each upper fixing component 31 and each upper fixing structure 211, and between each lower fixing component 41 and each lower fixing structure 222, three O-rings 7 can be set respectively, which can be used for sealing The inner chamber 11 of the container body 1 is clean and airtight.

In addition, after the above-mentioned structure is assembled, the upper and lower take-off plates 3, 4 and the support frame 2 are directly assembled with each other to form an integrated force-bearing situation. The force on the support frame 2 has nothing to do with the clean container body 1, so the problem that the clean container body 1 is deformed due to improper external force and affects the precision function or damage of the support frame can be avoided.

From the above, it can be seen that the support frame 2 is directly inserted into the front opening 12 of the clean container body 1 and accommodated in the inner chamber 11 of the clean container body 1. Therefore, the clean container body 1 does not need to be installed in other parts as in the known technology. A hole is provided at the position for accommodating the support frame 2. In this case, the clean container body 1 is not only very convenient in manufacture and assembly, but also the structural strength of the clean container body 1 will not be damaged. At the same time, In the situation that the opening area of the clean container body 1 is reduced, the airtightness of the inner chamber 11 of the clean container body 1 can also be maintained, thereby preventing external moisture or dust particles from entering the clean container body 1 . In addition, due to the modular assembly method and innovative concept, the support frame 2 has significant benefits on the overall production quality of the clean container body 1, the flexibility of material selection, and the reduction of production costs. In addition, since the opening area of the clean container body 1 has been greatly reduced, there is relatively no problem of too many dead angles. Therefore, it is easy to clean and dry when using related cleaning equipment for cleaning.

Please refer to FIG. 2 again. In this embodiment, the two sides of the upper horizontal plate 21 of the above-mentioned support frame 2 respectively include two fastening holes 212, and the tops 223 of the two side plates 22 respectively include two fastening hooks. 224, which are the two fastening holes 212 that can be respectively fastened to the two sides of the upper horizontal plate 21, that is, the upper horizontal plate 21 and the two side plates 22 are designed in a separate way in this embodiment, and of course they can also be integrated. Forming design.

Please refer to FIG. 3 again, the above-mentioned support frame 2 for carrying the wafer 61 is made of polyetherimide plus carbon fiber (Polyetherimide, PEI & Carbon Fiber) conductive material in this embodiment, thereby An electrostatic protection function (Electrostatic Discharge, ESD) can be formed, of course, other equivalent materials such as polyether ether ketone plus carbon fiber (Polyetheretherketon, PEEK & Carbon Fiber) can also be used. Through the aforementioned design method, the electrostatic protection function of the clean container body 1 and the support frame 2 can also be well established. Of course, the upper and lower take-and-pay plates 3, 4 can also be made of conductive materials, which can further increase the electrostatic protection function. At the same time, the left handle 151 and the right handle (not shown) can cooperate with the left and right grounding elements 8 which are also made of conductive material to increase their electrostatic protection function.

Please also refer to Fig. 5, which is a three-dimensional exploded view of the second preferred embodiment of the present invention, and Fig. 6, which is a three-dimensional assembly view of the second preferred embodiment of the present invention, and its main structure is the same as that of the above-mentioned first preferred embodiment, The only difference is that the support frame 5 used to carry the wafer 62 in this embodiment also includes a lower horizontal plate 53, which is connected to the bottom 521 of the two side plates 52 of the support frame 5, and the support frame 5 The upper horizontal plate 51, the two side plates 52, and the lower horizontal plate 53 are manufactured in an integral molding manner. Of course, the above-mentioned upper horizontal plate 51 , the two side plates 52 , and the lower horizontal plate 53 can also be manufactured in a separate way as in the above-mentioned first preferred embodiment.

The above-mentioned embodiments are only examples for convenience of description, and the scope of rights claimed by the present invention should be determined by the claims, rather than limited to the above-mentioned embodiments. The carrier of the present invention is naturally not limited to semiconductors, such as wafers, and other products such as photomasks and glass substrates that require a clean manufacturing process environment are all used.

Claims (20)

1. A clean container structure, comprising: A clean container body, including an inner chamber, a front opening, an upper plate, and a lower plate, and the upper plate is provided with several through holes, and the lower plate is provided with several through holes; A support frame is accommodated in the inner compartment of the clean container body, and the support frame includes an upper horizontal plate and two side plates which extend downward from the two sides of the upper horizontal plate respectively, and the upper horizontal plate Several upper fixing structures are protruding upward from the upper direction, and several lower fixing structures are respectively protruding downward on the bottom of the two side plates, and the two side plates respectively include an inner surface, and the two inner surfaces are respectively provided with several slots; An upper take-off plate, which is arranged above the upper plate of the clean container body, and the upper take-off plate includes several upper fixing components, which are respectively fixed to the support frame corresponding to the through holes passing through the upper plate of the clean container body said upper fixing structure of the upper cross plate; and The lower take-off board is arranged under the lower plate of the clean container body, and the lower take-out board includes several lower fixing components, which are respectively fixed to the two sides of the support frame corresponding to the perforations passing through the lower plate of the clean container body The lower fixing structure at the bottom of the board. 2 . The clean container structure according to claim 1 , wherein the upper horizontal plate and the two side plates of the support frame are integrally formed. 3 . 3. The clean container structure as claimed in claim 1, wherein the upper fixing structures of the upper horizontal plate of the support frame are respectively a screw hole, and the upper fixing components of the upper access plate include an upper bolt respectively , and an upper through hole, the upper bolts respectively pass through the upper through holes and correspondingly screw locked in the screw holes. 4. The clean container structure as claimed in claim 1, wherein the lower fixing structures at the bottom of the two side plates of the support frame are respectively a screw hole, and the lower fixing components of the lower take-off plate respectively include a lower bolt , and a through hole, and the lower bolts respectively pass through the lower through holes and are correspondingly screw-locked in the screw holes. 5. The clean container structure according to claim 1, wherein at least one O-ring is arranged between the upper fixing component and the upper fixing structure, and the connection between the lower fixing component and the lower fixing structure At least one O-ring is also arranged between them. 6. The clean container structure according to claim 1, wherein the two sides of the upper horizontal plate of the support frame respectively include at least one fastening hole, and the tops of the two side plates respectively include at least one fastening hook are respectively corresponding to the at least one fastening hole fastened on two sides of the upper horizontal plate. 7 . The clean container structure as claimed in claim 1 , wherein the support frame, the upper access plate, and the lower access plate are made of conductive materials. 8. The clean container structure as claimed in claim 1, wherein the clean container body also includes a left side plate and a right side plate, and the outer side of the left side plate is provided with a left handle, the right side The outer set of boards is provided with a right hand grip. 9. The clean container structure as claimed in claim 8, wherein the clean container body further comprises a left grounding piece and a right grounding piece, the left grounding piece is connected between the left handle and the lower take-off plate In between, the right grounding piece is connected between the right handle and the lower take-off plate. 10. The clean container structure according to claim 9, wherein the left handle, the right handle, the left grounding piece, and the right grounding piece are respectively made of conductive materials. 11. A clean container structure, comprising: A clean container body, including an inner chamber, a front opening, an upper plate, and a lower plate, and the upper plate is provided with several through holes, and the lower plate is provided with several through holes; A support frame is accommodated inside the inner compartment of the clean container body, and the support frame includes an upper horizontal plate, two side plates, and a lower horizontal plate, wherein the two side plates are formed by the upper horizontal plate and the upper horizontal plate respectively. The side extends downward, the lower horizontal plate is connected to the bottom of the two side plates, several upper fixing structures protrude upward from the upper direction of the upper horizontal plate, and several lower fixing structures protrude downward from the bottom of the two side plates. structure, and the two side plates respectively include an inner surface, and the two inner surfaces are respectively provided with several slots; An upper take-off plate is arranged above the upper plate of the clean container body, and the upper take-off plate includes several upper fixing components, which respectively pass through the through holes of the upper plate of the clean container body and are respectively fixed on the support said upper fixing structure of the upper horizontal plate; and The lower take-off plate is arranged under the lower plate of the clean container body, and the lower take-off plate includes several lower fixing components, which respectively correspond to the perforations passing through the lower plate of the clean container body and are respectively fixed on the two supporting frames. The lower fixing structure at the bottom of the side panel. 12. The clean container structure as claimed in claim 11, wherein the upper horizontal plate, the two side plates, and the lower horizontal plate of the supporting frame are manufactured in an integrated manner. 13. The clean container structure according to claim 11, wherein the upper fixing structures of the upper horizontal plate of the support frame are respectively a screw hole, and the upper fixing components of the upper taking and paying board respectively include an upper bolt, and an upper through hole, the upper bolts respectively pass through the upper through holes and correspondingly screw locked in the screw holes. 14. The clean container structure according to claim 11, wherein the lower fixing structures at the bottom of the two side plates of the support frame are respectively a screw hole, and the lower fixing components of the lower take-off plate respectively include a lower bolt , and a through hole, and the lower bolts respectively pass through the lower through holes and are correspondingly screw-locked in the screw holes. 15. The clean container structure according to claim 11, wherein at least one O-ring is arranged between the upper fixing component and the upper fixing structure, and the connection between the lower fixing component and the lower fixing structure At least one O-ring is also arranged between them. 16. The clean container structure according to claim 11, wherein the two sides of the upper horizontal plate of the support frame respectively include at least one fastening hole, and the tops of the two side plates respectively include at least one fastening hook are respectively corresponding to the at least one fastening hole fastened on two sides of the upper horizontal plate. 17. The clean container structure as claimed in claim 11, wherein the supporting frame, the upper take-off plate, and the lower take-off plate are made of conductive material. 18. The clean container structure according to claim 11, wherein the clean container body further comprises a left side plate and a right side plate, and a left side handle is provided on the outer side of the left side plate, and the right side The outer set of boards is provided with a right hand grip. 19. The clean container structure according to claim 18, wherein the clean container body further comprises a left grounding piece and a right grounding piece, and the left grounding piece is connected between the left handle and the lower take-out plate , the right grounding piece is connected between the right handle and the lower take-and-pay plate. 20. The clean container structure according to claim 19, wherein the left handle, the right handle, the left grounding piece, and the right grounding piece are respectively made of conductive materials.

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