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WO2012063445A1 - Dispositif électroluminescent organique et procédé de production pour celui-ci - Google Patents

Dispositif électroluminescent organique et procédé de production pour celui-ci Download PDF

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Publication number
WO2012063445A1
WO2012063445A1 PCT/JP2011/006174 JP2011006174W WO2012063445A1 WO 2012063445 A1 WO2012063445 A1 WO 2012063445A1 JP 2011006174 W JP2011006174 W JP 2011006174W WO 2012063445 A1 WO2012063445 A1 WO 2012063445A1
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Prior art keywords
organic
layer
substrate
protective layer
display device
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PCT/JP2011/006174
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English (en)
Japanese (ja)
Inventor
剛 平瀬
内田　秀樹
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Sharp Corp
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Sharp Corp
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y20/00—Nanooptics, e.g. quantum optics or photonic crystals
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B33/00—Electroluminescent light sources
    • H05B33/10—Apparatus or processes specially adapted to the manufacture of electroluminescent light sources
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/80—Constructional details
    • H10K59/87—Passivation; Containers; Encapsulations
    • H10K59/873—Encapsulations
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K2102/00—Constructional details relating to the organic devices covered by this subclass
    • H10K2102/301—Details of OLEDs
    • H10K2102/331—Nanoparticles used in non-emissive layers, e.g. in packaging layer
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/80—Constructional details
    • H10K59/87—Passivation; Containers; Encapsulations
    • H10K59/871—Self-supporting sealing arrangements

Definitions

  • the present invention relates to an organic EL display device including an organic electroluminescence element (organic electroluminescence element: hereinafter referred to as “organic EL element”) and a method for manufacturing the same.
  • organic electroluminescence element organic electroluminescence element: hereinafter referred to as “organic EL element”
  • organic EL display devices have attracted attention as next-generation flat panel display devices such as full-color displays.
  • This organic EL display device is a self-luminous display device, has excellent viewing angle characteristics, high visibility, low power consumption, and can be reduced in thickness, so that demand is increasing.
  • This organic EL display device has a plurality of organic EL elements arranged in a predetermined arrangement.
  • Each of the plurality of organic EL elements includes a first electrode (anode) formed on an insulating substrate, an organic layer having a light emitting layer formed on the first electrode, and a first electrode formed on the organic layer. 2 electrodes (cathode).
  • the causes of such deterioration of the light emission characteristics include deterioration of the organic layer due to moisture from the outside air that has entered the organic EL element, oxidation of the electrode due to oxygen in the outside air, and these moisture and oxygen. For example, peeling between the organic layer and the electrode due to the above can be mentioned.
  • an organic EL display device having a structure for removing such moisture and oxygen has been proposed. More specifically, for example, an organic EL element in which an organic layer is sandwiched between a pair of opposed electrodes, an airtight container that houses the organic EL element and blocks outside air, and an organic container in the airtight container
  • An organic EL display device is disclosed that includes a drying unit that is disposed separately from the EL element and chemically adsorbs moisture (see, for example, Patent Document 1).
  • an organic EL display device provided with a sealing resin for protecting the organic EL element from moisture and oxygen has been proposed. More specifically, in an organic EL device in which at least an anode, an organic light emitting layer and a cathode are laminated on a substrate, nitriding is performed on the surface of the organic EL device which is a laminated structure composed of an anode, an organic light emitting layer and a cathode. There has been proposed an organic EL element in which a protective layer formed of silicon or the like and a resin sealing film made of resin on the protective layer are provided.
  • An organic EL display device including a sealing material is disclosed.
  • the organic EL display element described in Patent Document 3 has a problem that it is not possible to cope with the narrow frame of the organic EL display device because it is necessary to provide a sealing material.
  • the present invention has been made in view of the above-described problems, and an object thereof is to provide an organic EL display device capable of preventing deterioration of characteristics of an organic EL element due to an acid or an alkali, and a manufacturing method thereof.
  • an organic EL display device of the present invention includes a first substrate, a second substrate provided opposite to the first substrate, a first substrate, a first substrate, An organic EL element provided between the two substrates, a protective layer formed on the first substrate and covering the surface of the organic EL element, and a nanoparticle layer formed on the protective layer and containing nanoparticles. It is characterized by providing.
  • the nanoparticle layer can function as a sealing material, it is not necessary to provide a sealing material separately as in the prior art, and as a result, it is possible to cope with the narrowing of the frame of the organic EL display device. become.
  • pinholes and cracks formed in the protective layer can be filled with nanoparticles, in the display area of the organic EL display device, pinholes and cracks are formed and the protective layer whose surface is uneven is flattened. can do. Accordingly, it is possible to prevent display unevenness in the display area.
  • the nanoparticles may be at least one selected from the group consisting of zirconia particles, ceria particles, alumina particles, spinel particles, and rutile particles.
  • the organic EL element can be formed without increasing the thickness of the protective layer. Since it is possible to protect from moisture, it is possible to reduce the thickness of the protective layer provided on the surface of the organic EL element. Therefore, it is possible to shorten the film formation time of the protective layer and to reduce the cost when forming the protective layer.
  • a nanoparticle layer containing nanoparticles having excellent moisture resistance for example, zirconia particles
  • the nanoparticle layer may have a thickness of 0.5 ⁇ m to 50 ⁇ m.
  • pinholes and cracks formed in the protective layer can be reliably filled with nanoparticles, and the protective layer can be reliably thinned.
  • the protective layer may have a thickness of 10 nm to 10 ⁇ m.
  • the moisture resistance of the organic EL element can be sufficiently ensured without increasing the thickness of the protective layer.
  • the average particle diameter of the nanoparticles may be 10 nm or less.
  • the pinholes and cracks formed in the protective layer are filled with nanoparticles without causing the inconvenience that the film adhesion of the protective layer is reduced due to the film stress of the nanoparticle layer, resulting in film peeling. It becomes possible to do.
  • the organic EL display device of the present invention may further include an adhesive layer provided on the surface of the nanoparticle layer, and the second substrate may be bonded to the nanoparticle layer via the adhesive layer.
  • the adhesive layer can function as a sealing layer, it is not necessary to provide a sealing film separately from the adhesive layer for attaching the second substrate.
  • the organic EL display device manufacturing method of the present invention includes an organic EL element forming step of forming an organic EL element on a substrate, a protective layer forming step of forming a protective layer covering the organic EL element on the substrate, and a protective layer And a step of forming a nanoparticle layer containing nanoparticles.
  • pinholes and cracks formed in the protective layer can be filled with nanoparticles by forming a nanoparticle layer containing nanoparticles on the surface of the protective layer. Therefore, it is possible to provide an organic EL display device that can prevent deterioration in characteristics of the organic EL element due to the entry of acid or alkali.
  • pinholes and cracks formed in the protective layer can be filled with nanoparticles, in the display area of the organic EL display device, pinholes and cracks are formed and the protective layer whose surface is uneven is flattened. can do. Therefore, it is possible to provide an organic EL display device that can prevent display unevenness in the display area.
  • the method for producing an organic EL display device of the present invention is characterized in that the nanoparticles are at least one selected from the group consisting of zirconia particles, ceria particles, alumina particles, spinel particles, and rutile particles.
  • the organic EL element can be formed without increasing the thickness of the protective layer. Therefore, it is possible to reduce the thickness of the protective layer provided on the surface of the organic EL element. Therefore, it is possible to provide an organic EL display device that can shorten the film formation time of the protective layer and can reduce the cost when forming the protective layer.
  • a nanoparticle layer containing nanoparticles having excellent moisture resistance for example, zirconia particles
  • an organic EL display device having a protective layer for blocking moisture, it is possible to prevent deterioration of the characteristics of the organic EL element due to the entry of acid or alkali.
  • FIG. 1 is a plan view of an organic EL display device according to an embodiment of the present invention.
  • FIG. 2 is a cross-sectional view taken along the line AA in FIG. It is sectional drawing for demonstrating the organic layer which comprises the organic EL element with which the organic EL display apparatus which concerns on embodiment of this invention is provided. It is a figure for demonstrating the manufacturing method of the organic electroluminescence display which concerns on embodiment of this invention. It is a figure for demonstrating the manufacturing method of the organic electroluminescence display which concerns on embodiment of this invention. It is a figure for demonstrating the manufacturing method of the organic electroluminescence display which concerns on embodiment of this invention. It is a figure for demonstrating the manufacturing method of the organic electroluminescence display which concerns on embodiment of this invention. It is a figure for demonstrating the manufacturing method of the organic electroluminescence display which concerns on embodiment of this invention.
  • FIG. 1 is a plan view of an organic EL display device according to an embodiment of the present invention
  • FIG. 2 is a cross-sectional view taken along the line AA in FIG.
  • FIG. 3 is sectional drawing for demonstrating the organic layer which comprises the organic EL element with which the organic EL display apparatus which concerns on embodiment of this invention is provided.
  • the organic EL display device 1 is formed on an element substrate 30 that is a first substrate, a sealing substrate 20 that is a second substrate facing the element substrate 30, and the element substrate 30.
  • an organic EL element 4 provided between the element substrate 30 and the sealing substrate 20 is provided.
  • the element substrate 30 has a display region D in which the organic EL elements 4 are arranged.
  • the organic EL elements 4 are formed in a matrix on the surface of the element substrate 30 facing the sealing substrate 20.
  • the element substrate 30 and the sealing substrate 20 are formed of an insulating material such as glass or plastic, for example.
  • the organic EL element 4 includes a first electrode 6 (anode) provided on the surface of the element substrate 30, an organic layer 7 provided on the surface of the first electrode 6, And a second electrode 8 (cathode) provided on the surface of the organic layer 7.
  • a plurality of first electrodes 6 are formed in a matrix at predetermined intervals on the surface of the element substrate 30, and each of the plurality of first electrodes 6 constitutes each pixel region of the organic EL display device 1. .
  • the first electrode 6 is formed of, for example, Au, Ni, Pt, ITO (indium-tin oxide), or a laminated film of ITO and Ag.
  • the organic layer 7 is formed on the surface of each first electrode 6 partitioned in a matrix. As shown in FIG. 3, the organic layer 7 is formed on the hole injection layer 9, the hole transport layer 10 formed on the surface of the hole injection layer 9, and the surface of the hole transport layer 10. , A light emitting layer 11 that emits one of red light, green light, and blue light, an electron transport layer 12 formed on the surface of the light emitting layer 11, and an electron injection layer formed on the surface of the electron transport layer 12 13. And the organic layer 7 is comprised by laminating
  • the hole injection layer 9 is for increasing the efficiency of hole injection into the light emitting layer 11.
  • Examples of the material for forming the hole injection layer 9 include benzine, styrylamine, triphenylamine, porphyrin, triazole, imidazole, oxadiazole, polyarylalkane, phenylenediamine, arylamine, oxazole, anthracene, fluorenone, Examples include hydrazone, stilbene, triphenylene, azatriphenylene, or derivatives thereof, or heterocyclic conjugated monomers, oligomers, or polymers such as polysilane compounds, vinylcarbazole compounds, thiophene compounds, or aniline compounds. .
  • the hole transport layer 10 is for increasing the efficiency of hole injection into the light emitting layer 11 as with the hole injection layer 9 described above.
  • a material for forming the hole transport layer 10 the same material as the hole injection layer 9 described above can be used.
  • the light emitting layer 11 is a region in which holes and electrons are injected from each of the two electrodes when a voltage is applied by the first electrode 6 and the second electrode 8, and the holes and electrons are recombined.
  • the light emitting layer 11 is formed of a material having high luminous efficiency, and is formed of, for example, an organic material such as a low molecular fluorescent dye, a fluorescent polymer, or a metal complex.
  • tris (8-quinolinolato) aluminum complex, bis (benzoquinolinolato) beryllium complex, tri (dibenzoylmethyl) phenanthroline europium complex ditoluyl vinyl biphenyl are mentioned.
  • the electron transport layer 12 is for transporting electrons injected from the second electrode 8 to the light emitting layer 11.
  • Examples of the material forming the electron transport layer 12 include quinoline, perylene, phenanthroline, bisstyryl, pyrazine, triazole, oxazole, oxadiazole, fluorenone, and derivatives or metal complexes thereof.
  • examples include tris (8-hydroxyquinoline) aluminum, anthracene, naphthalene, phenanthrene, pyrene, anthracene, perylene, butadiene, coumarin, acridine, stilbene, 1,10-phenanthroline, or derivatives or metal complexes thereof. It is done.
  • the electron injection layer 13 is for transporting electrons injected from the second electrode 8 to the light emitting layer 11, similarly to the electron transport layer 12 described above, and the material for forming the electron injection layer 13 is described above.
  • the same material as the electron transport layer 12 can be used.
  • the second electrode 8 has a function of injecting electrons into the organic layer 7.
  • the second electrode 8 is made of, for example, a magnesium alloy (such as MgAg), an aluminum alloy (such as AlLi, AlCa, or AlMg), metallic calcium, or a metal having a small work function.
  • the organic EL display device 1 is provided with a protective layer 15 on the surface of the organic EL element 4 for protecting the organic EL element 4 from moisture and oxygen.
  • the protective layer 15 is provided so as to cover the organic EL element 4, and examples of the material for forming the protective layer 15 include inorganic materials such as SiO 2 and SiON. Further, from the viewpoint of sufficiently securing the moisture resistance of the organic EL element 4 without increasing the thickness of the protective layer 15, the thickness of the protective layer 15 is preferably 5 nm to 10 ⁇ m.
  • the organic EL display device 1 is characterized in that a nanoparticle layer 16 containing nanoparticles 18 is provided on the surface of the protective layer 15 as shown in FIG. .
  • metal materials such as zirconia particles, ceria particles, alumina particles, spinel particles, and rutile particles can be used.
  • zirconia having excellent moisture resistance as the material of the nanoparticles 18 from the viewpoint of effectively suppressing the ingress of moisture into the organic EL element 4.
  • the kind of the nanoparticle 18 contained in the nanoparticle layer 16 is not particularly limited, and may be set as appropriate.
  • the average particle size of the nanoparticles 18 is preferably 10 nm or less. This is because when the average particle diameter is larger than 10 nm, it may be difficult to fill the pinholes and cracks formed in the protective layer 15 with the nanoparticles 18. Further, when the average particle diameter is larger than 10 nm, the film stress of the nanoparticle layer 16 may cause a disadvantage that the adhesion with the protective layer 15 is lowered and the film is peeled off.
  • the average particle size refers to 50% particle size (D50), and a particle size distribution measuring device (Nikkiso Co., Ltd., Nanotrac (registered trademark) particle size distribution measuring device UPA-EX150) applying the laser Doppler method, etc. Can be measured.
  • the thickness of the nanoparticle layer 16 is 0.5 ⁇ m to 50 ⁇ m from the viewpoint of surely filling the pinholes and cracks formed in the protective layer 15 with the nanoparticles 18 and surely reducing the thickness of the protective layer 15. Preferably there is.
  • the pinholes and cracks formed in the protective layer 15 can be filled with the nanoparticles 18, the pinholes and cracks are formed in the display region D, and the protective layer 15 having an uneven surface is planarized. be able to. Therefore, it is possible to prevent display unevenness from occurring in the display area D and its peripheral area.
  • the protective layer in order to avoid the disadvantage that the characteristic deterioration of the organic EL element is caused by acid or alkali passing through pinholes or cracks formed in the protective layer, the protective layer It is also conceivable to form a thicker film. However, when the protective layer is formed thick, it takes a long time to form the protective layer, and there is a problem in that the cost for forming the protective layer increases.
  • the thickness of the protective layer 15 is increased by providing the nanoparticle layer 16 containing nanoparticles 18 (for example, the above-described zirconia particles) having excellent moisture resistance on the surface of the protective layer 15. Without this, the organic EL element 4 can be protected from moisture. Therefore, the protective layer 15 provided on the surface of the organic EL element 4 can be thinned. As a result, the film formation time of the protective layer 15 can be shortened, and the cost for forming the protective layer 15 can be reduced.
  • the nanoparticle layer 16 containing nanoparticles 18 for example, the above-described zirconia particles
  • an adhesive layer 17 is provided on the surface of the nanoparticle layer 16, and the sealing that faces the element substrate 30 through the adhesive layer 17.
  • the stop substrate 20 is provided on the element substrate 30.
  • the adhesive layer 17 functions as a resin sealing layer. Therefore, it is not necessary to provide a sealing film separately from the adhesive layer 17 for attaching the sealing substrate 20.
  • the nanoparticle layer 16 containing the nanoparticles 18 can function as a transparent resin layer. Therefore, even when the nanoparticle layer 16 containing the nanoparticles 18 is provided, the optical characteristics of the display region D can be sufficiently ensured.
  • 4 to 10 are views for explaining a method of manufacturing the organic EL display device according to the embodiment of the present invention.
  • an ITO film is patterned by a sputtering method on an element substrate 30 such as a glass substrate having a substrate size of 300 ⁇ 400 mm and a thickness of 0.7 mm, and the first electrode 6 is formed.
  • the film thickness of the first electrode 6 is, for example, about 150 nm.
  • the organic layer 7 including the light emitting layer 11 and the second electrode 8 are formed on the first electrode 6 by vapor deposition using a metal mask.
  • the element substrate 30 provided with the first electrode 6 is placed in the chamber of the vapor deposition apparatus.
  • the inside of the chamber of the vapor deposition apparatus is maintained at a vacuum degree of 1 ⁇ 10 ⁇ 5 to 1 ⁇ 10 ⁇ 4 (Pa) by a vacuum pump.
  • the element substrate 30 provided with the first electrode 6 is installed in a state where two sides are fixed by a pair of substrate receivers attached in the chamber.
  • the vapor deposition materials of the hole injection layer 9, the hole transport layer 10, the light emitting layer 11, the electron transport layer 12, and the electron injection layer 13 are sequentially evaporated from the vapor deposition source, so that the hole injection layer 9, the hole
  • the organic layer 7 is formed on the first electrode 6 in the pixel region as shown in FIG. 5.
  • Element 4 is formed.
  • a crucible charged with each evaporation material can be used as the evaporation source.
  • the crucible is installed in the lower part of the chamber, and the crucible is equipped with a heater, and the crucible is heated by the heater.
  • the various vapor deposition materials charged in the crucible become evaporated molecules and jump out upward in the chamber.
  • m-MTDATA common to all RGB pixels
  • a hole injection layer 9 made of 4,4,4-tris (3-methylphenylphenylamino) triphenylamine) is formed with a film thickness of, for example, 25 nm through a mask.
  • a hole transport layer 10 made of ⁇ -NPD (4,4-bis (N-1-naphthyl-N-phenylamino) biphenyl) is provided on the hole injection layer 9 in common to all the RGB pixels.
  • the film is formed with a film thickness of 30 nm through the mask.
  • 30 weight of 2,6-bis ((4'-methoxydiphenylamino) styryl) -1,5-dicyanonaphthalene (BSN) is added to di (2-naphthyl) anthracene (ADN).
  • % Mixed material is formed with a film thickness of, for example, 30 nm on the hole transport layer 10 formed in the pixel region through a mask.
  • a mixture of 5% by weight of coumarin 6 in ADN is formed on the hole transport layer 10 formed in the pixel region through a mask with a film thickness of, for example, 30 nm. .
  • the blue light-emitting layer 11 is obtained by mixing 2.5% by weight of AND with 4,4′-bis (2- ⁇ 4- (N, N-diphenylamino) phenyl ⁇ vinyl) biphenyl (DPAVBi).
  • DPAVBi 4,4′-bis (2- ⁇ 4- (N, N-diphenylamino) phenyl ⁇ vinyl) biphenyl
  • a film having a thickness of 30 nm is formed on the hole transport layer 10 formed in the pixel region through the mask.
  • 8-hydroxyquinoline aluminum (Alq3) is formed as an electron transport layer 12 with a film thickness of, for example, 20 nm through a mask, common to all RGB pixels.
  • lithium fluoride (LiF) is formed as an electron injection layer 13 on the electron transport layer 12 with a film thickness of, for example, 0.3 nm through a mask.
  • a cathode made of magnesium silver (MgAg) is formed as the second electrode 8 with a film thickness of 10 nm, for example.
  • a protective layer 15 for protecting the organic EL element 4 is formed on the surface of the organic EL element 4 with a thickness of 3 ⁇ m, for example.
  • the protective layer 15 is formed by laminating an inorganic material such as SiO 2 or SiON on the surface of the organic EL element 4 by vapor deposition, sputtering, chemical vapor deposition, or the like.
  • the organic EL element 4 is formed so as to cover it.
  • the solvent is evaporated by baking (for 40 minutes or more) in the range of 60 ° C. to 100 ° C., as shown in FIG.
  • a nanoparticle layer 16 having a thickness of 10 ⁇ m is formed on the surface of the layer 15 so as to cover the protective layer 15.
  • an adhesive layer 17 made of, for example, an epoxy resin is formed on the nanoparticle layer 16.
  • an adhesive agent which comprises the contact bonding layer 17 does not specifically limit as an adhesive agent which comprises the contact bonding layer 17.
  • various resin adhesives such as a butyral resin and an acrylic resin other than an epoxy resin, are used, for example. Can do.
  • a differential pressure in a vacuum atmosphere under predetermined conditions (for example, a pressure of 100 Pa or less, a dew point temperature of ⁇ 30 ° C. or less, preferably a dew point temperature of ⁇ 70 ° C. or less).
  • a pressure of 100 Pa or less for example, a pressure of 100 Pa or less, a dew point temperature of ⁇ 30 ° C. or less, preferably a dew point temperature of ⁇ 70 ° C. or less.
  • the ultraviolet ray to be irradiated is preferably 0.5 to 10 J, and more preferably 1 to 6 J.
  • heat treatment 70 ° C. or higher and 120 ° C. or lower, 10 minutes or longer and 2 hours or shorter is performed in the air in order to accelerate the curing of the resin.
  • the organic EL display device 1 shown in FIGS. 1 and 2 is manufactured.
  • the nanoparticle layer 16 containing the nanoparticles 18 is provided on the protective layer 15. Accordingly, since pinholes and cracks formed in the protective layer 15 can be filled with the nanoparticles 18, it is possible to prevent the deterioration of the characteristics of the organic EL element 4 due to the entry of acid or alkali.
  • the nanoparticle layer 16 can function as a sealing material, it is not necessary to provide a sealing material separately as in the prior art, and as a result, it is possible to cope with the narrowing of the frame of the organic EL display device 1. Is possible.
  • the protective layer 15 in which pinholes and cracks are formed in the display region D and the surface is uneven is provided. It can be flattened. Accordingly, display unevenness can be prevented in the display area D.
  • the nanoparticles 18 are configured to use at least one kind of particles selected from the group consisting of zirconia particles, ceria particles, alumina particles, spinel particles, and rutile particles. Therefore, by providing the nanoparticle layer 16 containing the nanoparticles 18 (for example, the above-mentioned zirconia particles) excellent in moisture resistance on the surface of the protective layer 15, the organic EL without increasing the thickness of the protective layer 15. Since the element 4 can be protected from moisture, the protective layer 15 provided on the surface of the organic EL element 4 can be thinned. As a result, the film formation time of the protective layer 15 can be shortened, and the cost for forming the protective layer 15 can be reduced.
  • the nanoparticle layer 16 containing the nanoparticles 18 for example, the above-mentioned zirconia particles
  • the thickness of the nanoparticle layer 16 is set to 0.5 ⁇ m to 50 ⁇ m. Therefore, pinholes and cracks formed in the protective layer 15 can be reliably filled with the nanoparticles 18 and the protective layer 15 can be reliably thinned.
  • the average particle diameter of the nanoparticles 18 is set to 10 nm or less. Accordingly, the pinholes and cracks formed in the protective layer 15 are filled with the nanoparticles 18 without causing the disadvantage that the film stress of the nanoparticle layer 16 reduces the adhesion with the protective layer 15 to cause film peeling. It becomes possible to do.
  • the thickness of the protective layer 15 is set to 5 nm to 10 ⁇ m. Therefore, the moisture resistance of the organic EL element 4 can be sufficiently ensured without increasing the thickness of the protective layer 15.
  • a solution in which zirconia particles and a binder resin are mixed in a solvent is applied by a dispenser.
  • a spin coating method or an ink jet method is used instead of applying by the dispenser.
  • the solution may be applied by a method such as a method.
  • polymethyl methacrylate resin is used as the binder resin.
  • an epoxy resin, polyimide resin, polycarbonate resin, acrylic resin, or the like may be used.
  • the present invention is suitable for an organic EL display device including an organic EL element and a manufacturing method thereof.

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Nanotechnology (AREA)
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  • Electroluminescent Light Sources (AREA)

Abstract

L'invention concerne un dispositif électroluminescent organique (1) qui comprend : un substrat d'élément (30) ; un substrat d'étanchéité (20) disposé en face du substrat d'élément (30) ; un élément électroluminescent organique (4) qui est formé au-dessus du substrat d'élément (30) et qui est disposé entre le substrat d'élément (30) et le substrat d'étanchéité (20) ; une couche protectrice (15) qui est formée au-dessus du substrat d'élément (30) et qui couvre la surface de l'élément électroluminescent organique (4) ; et une couche de nanoparticules (16) qui est formée au-dessus de la couche protectrice (15) et qui contient des nanoparticules (18).
PCT/JP2011/006174 2010-11-12 2011-11-04 Dispositif électroluminescent organique et procédé de production pour celui-ci Ceased WO2012063445A1 (fr)

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JP2010253782 2010-11-12
JP2010-253782 2010-11-12

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WO2012063445A1 true WO2012063445A1 (fr) 2012-05-18

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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105552248A (zh) * 2016-01-26 2016-05-04 纳晶科技股份有限公司 一种电致发光器件的封装结构及其封装方法
CN110246985A (zh) * 2019-06-21 2019-09-17 京东方科技集团股份有限公司 电致发光器件、其制备方法及显示装置
CN110416436A (zh) * 2019-08-29 2019-11-05 京东方科技集团股份有限公司 一种薄膜封装结构、显示装置及封装方法
US11158835B2 (en) * 2017-03-17 2021-10-26 Boe Technology Group Co., Ltd. Manufacturing method of display substrate, display substrate, and display device
CN115191012A (zh) * 2020-02-28 2022-10-14 夏普株式会社 显示装置及显示装置的制造方法

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