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WO2010058759A1 - Dispositif de contrôle de corps transparents - Google Patents

Dispositif de contrôle de corps transparents Download PDF

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Publication number
WO2010058759A1
WO2010058759A1 PCT/JP2009/069459 JP2009069459W WO2010058759A1 WO 2010058759 A1 WO2010058759 A1 WO 2010058759A1 JP 2009069459 W JP2009069459 W JP 2009069459W WO 2010058759 A1 WO2010058759 A1 WO 2010058759A1
Authority
WO
WIPO (PCT)
Prior art keywords
light
transparent body
defect
image
photographing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2009/069459
Other languages
English (en)
Japanese (ja)
Inventor
俊彦 鈴木
英俊 松本
宗寿 加藤
信 楜澤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AGC Inc
Original Assignee
Asahi Glass Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asahi Glass Co Ltd filed Critical Asahi Glass Co Ltd
Priority to EP09827540.7A priority Critical patent/EP2352012A4/fr
Publication of WO2010058759A1 publication Critical patent/WO2010058759A1/fr
Priority to US13/112,576 priority patent/US8648905B2/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/958—Inspecting transparent materials or objects, e.g. windscreens
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/21—Polarisation-affecting properties
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G01N2021/8812—Diffuse illumination, e.g. "sky"
    • G01N2021/8816—Diffuse illumination, e.g. "sky" by using multiple sources, e.g. LEDs
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
    • G01N21/896—Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod
    • G01N2021/8967—Discriminating defects on opposite sides or at different depths of sheet or rod

Definitions

  • the present invention relates to a transparent body inspection apparatus, and more particularly to a transparent body inspection apparatus that inspects a transparent body having no birefringence.
  • Patent Document 1 As an inspection method for inspecting a transparent body, there is a defect inspection method for plate glass described in Patent Document 1.
  • illumination is applied from the side end surface of the plate glass, and the surface of the plate glass is imaged by the imaging optical system from the surface side of the plate glass to detect the brightness of the image per fixed area. The defect is judged.
  • This inspection method utilizes the fact that if the plate glass has internal defects such as bubbles and foreign matters, the light is diffusely reflected and exits from the upper and lower surfaces of the plate glass.
  • an irradiation light source is installed on one surface side of a plate glass, an imaging optical system is arranged on the other surface side of the plate glass, the imaging optical system images the plate glass, and is based on transmitted light.
  • a method is described for detecting defects by processing an image.
  • Patent Document 2 describes a transparent body detection system that detects transparent foreign matter inside a transparent bottle (an empty bottle or a bottle containing a transparent liquid).
  • the transparent body detection system described in Patent Document 2 is provided on an illumination device that irradiates a planar bottle with planar light and a light projecting surface of the illumination device, and polarizes the planar light in a specific direction.
  • a light-projecting side polarizing plate a light receiving polarizing plate and a television camera are provided on the side opposite to the light projecting side polarizing plate with the bottle at the center. The light projecting side polarizing plate and the light receiving polarizing plate are set so that their polarization directions coincide.
  • Patent Document 2 rotates a bottle and repeats imaging with a TV camera while the bottle rotates once, and there is a portion that appears as a dark lump in the image taken by the TV camera. If there is a transparent foreign matter, it is determined.
  • Patent Document 2 also describes a case in which the light-projecting side polarizing plate and the light-receiving polarizing plate are set to be orthogonal to each other, and if there is a portion that appears as a bright lump in the image, it is determined that there is a transparent foreign object. Yes.
  • Patent Document 2 describes a slide actuator that slides a polarizing plate in a horizontal plane and a slide actuator controller that drives and controls the slide actuator.
  • Japanese Patent Laid-Open No. 6-294749 paragraphs 0024, 0035, FIG. 1, FIG. 3, FIG. 9
  • Japanese Unexamined Patent Publication No. 2002-98650 paragraph 0081-0098, FIG. 22-24, paragraph 0062, FIG. 14
  • defects inside the transparent body can be classified into three types.
  • the first defect is a defect that scatters light. Specifically, it is a defect that scatters light that enters the transparent body and travels through the transparent body.
  • the second defect is a defect that blocks light. Specifically, it is a defect that blocks light that enters the transparent body and travels through the transparent body.
  • the third defect is a defect whose refractive index is changed inside the transparent body.
  • the first defect is referred to as a scattering defect
  • the second defect is referred to as a light shielding defect.
  • the third defect can also be referred to as a defect that causes depolarization, and is hereinafter referred to as a depolarization defect.
  • Patent Document 1 describes an inspection method in which illumination is applied from a side end surface of a plate glass and the surface of the plate glass is imaged by an imaging optical system from the surface side of the plate glass. If an apparatus that inspects by this method is used, the presence or absence of scattering defects can be determined.
  • Patent Document 1 describes an inspection method in which an irradiation light source is installed on one side of a plate glass, an imaging optical system is arranged on the other side of the plate glass, and the imaging optical system images the plate glass. ing. If an apparatus that performs inspection by this method is used, the presence or absence of a light-shielding defect can be determined.
  • the inspection target when using a plurality of devices to determine the presence or absence of one type of defect for each device, the inspection target must be transferred to another device in order to inspect the presence or absence of a plurality of types of defects. . Therefore, it takes time to complete the inspection.
  • an object of the present invention is to provide a transparent body inspection apparatus that can specify how deep a defect exists when a defect exists inside the transparent body to be inspected.
  • Another object of the present invention is to provide a transparent body inspection apparatus capable of determining the presence or absence of defects for a plurality of types of defects.
  • Aspect 1 of the present invention is a light irradiation means (for example, the first light source 4 and the second light source 5) for irradiating light to a transparent body, and a photographing means for photographing the transparent body, and has a depth of field.
  • a light irradiation means for example, the first light source 4 and the second light source 5
  • a photographing means for photographing the transparent body, and has a depth of field.
  • Photographing means for example, photographing means 2) shallower than the height of the transparent body
  • photographing driving means for example, photographing driving means 3
  • Defect determining means for example, defect determining means 12
  • the image capturing means When the image is taken multiple times while moving in the direction approaching or moving away from the transparent body, and the defect determination means has non-uniform luminance of pixels in the image taken by the imaging means Took the picture
  • the defect determination means has non-uniform luminance of pixels in the image taken by the imaging means Took the picture
  • Aspect 2 of the present invention is the aspect 1, wherein the defect determination means includes a defect photographed image in which the luminance of pixels is nonuniform among the plurality of images photographed while the photographing means moves in one direction.
  • a transparent body inspection apparatus that determines that a defect exists within the depth of field when a defect photographed image having the highest contrast among the defect photographed images is photographed.
  • Aspect 3 of the present invention is the aspect 1 or aspect 2, in which the photographing drive means moves the photographing means at a constant speed when moving the photographing means in a direction approaching the transparent body and a direction away from the transparent body.
  • a transparent body inspection device in which the photographing means photographs the transparent body while moving at a constant speed.
  • Aspect 4 of the present invention is the light irradiation means according to any one of aspects 1 to 3, wherein the light irradiation means has a side wall that is perpendicular to the upper surface of the transparent body and on which a plurality of point light sources are arranged (for example, , At least the first light source 4), and the point light source (for example, the point light source 13 a ) at the end closer to the photographing means is closer to the photographing means than the surface on the photographing means side of the transparent body
  • the point light source (for example, the point light source 13 b ) at the end far from the photographing unit is disposed at a position farther from the photographing unit than the surface of the transparent body opposite to the photographing unit.
  • a transparent body inspection apparatus is provided.
  • Aspect 5 of the present invention provides the transparent body inspection apparatus according to aspect 4, wherein the plurality of point light sources are arranged so that the positions of the point light sources are shifted from each other in a plurality of adjacent rows.
  • an imaging unit e.g., the imaging unit 2 for imaging a transparent body and a first light irradiation unit (e.g., the first light source 4) that irradiates the transparent body with light from the side.
  • a second light irradiating means for example, the second light source 5 for irradiating the transparent body with light from the opposite side to the photographing means so as to sandwich the transparent body between the photographing means and the photographing means.
  • a defect determination means for example, defect determination means 12 for determining the presence or absence of a defect in the transparent body based on whether or not the luminance of pixels in the captured image is non-uniform
  • the defect determination means includes the defect determination means
  • the first light irradiating means determines whether or not the luminance of the pixels in the image photographed in a state where the transparent body is irradiated with light
  • the second light irradiating means is the transparent body.
  • the brightness of the pixels in the image taken with the light irradiated is uneven.
  • Aspect 7 of the present invention is the polarizing plate according to aspect 6 in which the second light irradiating means irradiates polarized light and blocks the polarized light emitted from the second light irradiating means and directed to the photographing means (for example, photographing).
  • Side polarizing plate 8 polarizing plate driving means (for example, polarizing plate driving means 10) for changing the arrangement state of the polarizing plate, and an image for determining the presence or absence of scattering defects that are defects that scatter light.
  • At the time of scattering determination image shooting at least the first light irradiation means is irradiated with light, and at the time of light blocking determination image shooting which is an image for determining the presence or absence of a light blocking defect which is a defect that blocks light, the first light Irradiating means stops light irradiation, the second light irradiating means is irradiated with polarized light, and the polarizing plate driving means is arranged to pass the polarized light toward the photographing means, and the transparent body Some refractive index changes When taking a depolarization determination image, which is an image for determining the presence or absence of a depolarization defect, the first light irradiation unit stops light irradiation, and the second light irradiation unit is irradiated with polarized light.
  • a judgment type switching means for example, a switching means 11 for disposing the polarizing plate in the polarizing plate driving means so as to block the polarized light toward the photographing means, and the defect judgment means in the scattering judgment image
  • a judgment type switching means for example, a switching means 11 for disposing the polarizing plate in the polarizing plate driving means so as to block the polarized light toward the photographing means, and the defect judgment means in the scattering judgment image
  • the first light irradiating unit irradiates light having a first wavelength
  • the second light irradiating unit is polarized light having a specific polarization direction having a second wavelength.
  • P wave of the second wavelength and polarized light of a specific polarization direction of the third wavelength
  • P wave of the third wavelength for example, P wave of the third wavelength
  • polarized light of the third wavelength in a specific polarization direction for example, light other than the P wave such as an S wave having the third wavelength
  • a polarizing beam splitter (for example, a polarizing beam splitter) that passes therethrough, and the imaging unit emits light from the first wavelength to the third wavelength by the first light irradiation unit and the second light irradiation unit.
  • the defect determination means When the luminance of pixels of the color corresponding to the first wavelength in the image captured by the imaging unit is non-uniform, it is determined that there is a defect that scatters light, and the second wavelength in the image In the case where the luminance of the pixel of the color according to the color is non-uniform, it is determined that there is a defect that blocks light, and the luminance of the pixel of the color according to the third wavelength in the image is non-uniform Further, a transparent body inspection apparatus for determining that there is a defect in which a refractive index of a part of the transparent body is changed is provided.
  • the first light irradiating unit irradiates blue light as the light having the first wavelength
  • the second light irradiating unit has polarized light having the second wavelength.
  • a transparent body inspection apparatus that irradiates polarized light of green light and irradiates polarized light of red light as the polarized light of the third wavelength is provided.
  • Aspect 10 of the present invention is the storage means (for example, result storage means) for storing a parameter (for example, manufacturing conditions) of the transparent body manufacturing process and the determination result by the defect determination means in any of the aspects 6 to 9. 52), and a transparent body inspection apparatus provided with determination result registration means (for example, determination result registration means 51) that receives the parameters and stores the parameters and the determination results by the defect determination means in a storage means.
  • a parameter for example, manufacturing conditions
  • determination result registration means for example, determination result registration means 51
  • the transparent body is irradiated with light, and the photographing means whose depth of field is shallower than the height of the transparent body is moved in a direction approaching the transparent body and a direction away from the transparent body, The transparent body is photographed a plurality of times, and when the luminance of the pixels in the image photographed by the photographing means is nonuniform, it is determined that there is a defect within the depth of field when the image is photographed.
  • a transparent body inspection method is provided.
  • the transparent body is irradiated with light from the side and the transparent body is sandwiched between the transparent body and the photographing means for photographing the transparent body.
  • Determine whether or not the brightness of the pixels in the image taken by the photographing means is non-uniform while irradiating light and irradiating light from the side to the transparent body, and the opposite to the transparent body Transparency characterized in that it is determined whether or not the luminance of pixels in an image captured by the imaging means in a state irradiated with light from the side is non-uniform, and the presence or absence of defects is determined for a plurality of types of defects A physical examination method is provided.
  • the present invention when a defect exists in the transparent body to be inspected, it is possible to specify how deep the defect is located.
  • the present invention it is possible to determine the presence or absence of defects for a plurality of types of defects with a single apparatus, and to omit the work of transferring the inspection object to another inspection apparatus. As a result, the time for inspecting all of the plurality of types of defects can be shortened.
  • the block diagram which shows the example of the 1st Embodiment of this invention.
  • Explanatory drawing which shows depth of field.
  • Explanatory drawing which shows the positional relationship of a 1st light source and a transparent body.
  • Explanatory drawing which shows the example of arrangement
  • the top view which shows the example of the 1st light source surrounding a transparent body.
  • the flowchart which shows the example of the operation
  • Explanatory drawing which shows the motion of an imaging
  • Explanatory drawing which shows the advancing state of the light at the time of the scattering defect presence when setting it at the time of the image
  • Explanatory drawing which shows the example of the image for scattering determination typically.
  • Explanatory drawing which shows the example of the image for scattering determination typically.
  • Explanatory drawing which shows the example of the defect picked-up image of a scattering defect.
  • Explanatory drawing which shows the advancing state of the light at the time of the light-shielding defect presence when setting as the image
  • Explanatory drawing which shows the example of the image for light shielding determination typically.
  • Explanatory drawing which shows the example of the image for light shielding determination typically.
  • Explanatory drawing which shows the advancing state of the light at the time of the depolarization defect presence when setting it at the time of the imaging
  • Explanatory drawing which shows the example of the defect picked-up image of a depolarization defect.
  • the block diagram which shows the derivative form of 1st Embodiment.
  • the block diagram which shows the example of the 2nd Embodiment of this invention.
  • the flowchart which shows the example of the operation
  • a transparent body inspection apparatus that determines the presence or absence of defects will be described as an example for each of a scattering defect, a light shielding defect, and a depolarization defect.
  • the transparent body inspection apparatus uses a transparent body without birefringence as an inspection target. Further, birefringence occurs in a film formed by stretching or a flat plate-shaped transparent body, so that it is not included in the inspection object of the transparent body inspection apparatus according to the present invention.
  • a transparent body having a birefringence of 0.3 nm / cm or less can be said to be a transparent body having no birefringence. Specific examples of the transparent body having no birefringence include synthetic quartz glass.
  • FIG. 1 is a block diagram showing an example of the first embodiment of the present invention.
  • the transparent body inspection apparatus according to the first embodiment includes a support unit 1, an imaging unit 2, an imaging drive unit 3, a first light source 4, a second light source 5, a polarizing plate 8, and a polarizing plate driving unit. 10, a switching unit 11, and a defect determination unit 12.
  • the transparent body 17 shown in FIG. 1 is a transparent body such as synthetic quartz glass to be inspected. As long as the transparent body has no birefringence, a transparent body other than synthetic quartz glass may be arranged as an inspection target.
  • the transparent body 17 is a block of a columnar body such as a cylinder, and is disposed on the support means 1 so that one of the upper surface and the bottom surface faces the imaging means 2 side and the other faces the second light source 5 side.
  • the height of the transparent body 17 is, for example, several tens mm to several hundreds mm. However, this height is an example, and the height of the transparent body 17 is not limited to this height.
  • Support means 1 is a transparent support member that supports the transparent body 17 from below. Since the support means 1 is transparent, the light emitted from the lower end of the first light source 4 and the light emitted from the second light source can be transmitted in the direction of the transparent body 17.
  • the imaging means 2 images the transparent body 17 to be inspected.
  • the photographing means 2 is realized by a camera provided with an image sensor.
  • the depth of field of the photographing means 2 is shallower than the height of the transparent body 17 (the height of the columnar block).
  • the depth of field is a range where the photographing means 2 is focused.
  • FIG. 2 is an explanatory diagram showing the depth of field.
  • the imaging means 2 performs imaging while focusing on an object that exists within the depth of field. Therefore, an image of an object existing within the depth of field is a focused image, and an image of an object existing outside the depth of field is an out-of-focus image.
  • the photographing drive means 3 is a driving device that moves the photographing means 2 and moves the photographing means 2 in a direction approaching the upper surface of the transparent body 17 and a direction away from the upper surface of the transparent body 17. That is, the photographing means 2 is moved in the A direction and the B direction indicated by arrows in FIG.
  • the photographing unit 2 is driven by the photographing driving unit 3 to photograph the transparent body while moving. Specifically, when the imaging drive unit 3 moves the imaging unit 2 in a direction approaching the upper surface of the transparent body and a direction away from the upper surface of the transparent body, the imaging unit 2 moves the imaging unit 2 at a constant speed. While moving, the imaging of the transparent body 17 is repeated at regular intervals. As the photographing means 2 moves, the position of the depth of field (see FIG. 2) also moves. Therefore, the photographing means 2 can photograph images at various depths inside the transparent body 17.
  • the photographing drive means 3 moves the photographing means 2 in a direction parallel to the upper surface of the transparent body 17.
  • the photographing drive means 3 moves the photographing means 2 to various positions within the surface of the transparent body 17, and moves the photographing means 2 in the A direction and B direction indicated by arrows in FIG.
  • the first light source 4 exists on the side of the transparent body 17 and irradiates the transparent body 17 with light from the side.
  • the case where the photographing unit 2 is present in the direction perpendicular to the upper surface of the transparent body 17 will be described as an example. Therefore, in this example, the first light source 4 irradiates the transparent body with light from a direction shifted by 90 ° from the optical axis direction of the photographing means 2.
  • the first light source 4 has a side wall perpendicular to the upper surface of the transparent body 17 as shown in FIG.
  • the side wall of the first light source 4 is also perpendicular to the surface (support surface) on which the support means 1 supports the transparent body 17.
  • the first light source 4 includes a plurality of point light sources 13 on its side wall, and irradiates light from each point light source 13 to the transparent body 17.
  • Each point light source 13 irradiates light from the point light source itself in each direction not blocked by the side wall 15. In other words, light is not irradiated with directivity, but light is irradiated in various directions such as a horizontal direction and an oblique direction.
  • FIG. 3 is an explanatory diagram showing the positional relationship between the first light source 4 and the transparent body 17 supported by the support means 1. 3, illustration of the polarizing plate 8 shown in FIG. 1 is omitted.
  • the height of the side wall 15 on which the point light source 13 is arranged is higher than the height of the transparent body 17. Therefore, among the point light sources 13 arranged on the side wall 15, the point light source 13 a at the end portion closer to the photographing means 2 is closer to the photographing means 2 than the surface of the transparent body 17 on the photographing means 2 side. Be placed. In other words, the point light source 13 a at the upper end exists at a position higher than the surface of the transparent body 17 on the photographing means 2 side.
  • the point light source 13 b at the end farther from the photographing unit 2 is the photographing unit 2 than the surface of the transparent body 17 opposite to the photographing unit 2. It is arranged in the position away from.
  • the point light source 13 b at the lower end exists at a position lower than the surface of the transparent body 17 opposite to the photographing means 2.
  • light irradiated in an obliquely upward direction from the point light source 13 b can enter the transparent body 17.
  • the support means 1 that supports the transparent body 1 from below is transparent, the light emitted from the lower point light source can pass through the support means 1 and enter the transparent body 17.
  • the variety of directions of light that enters the transparent body 17 and travels inside the transparent body 17. can be secured.
  • the relationship that the height of the side wall 15 on which the point light source 13 is disposed is higher than the height of the transparent body 17 may not be established, but in order to ensure the diversity of the light direction as described above,
  • the height of the side wall 15 on which the point light source 13 is arranged is preferably higher than the height of the transparent body 17.
  • FIG. 4 is an explanatory view showing an arrangement example of the point light sources 13 in the first light source 4.
  • the point light sources 13 are arranged in a row on the wall surface 15 of the first light source 4 as illustrated in FIG.
  • each point light source 13 is arrange
  • By shifting the position of the point light source between adjacent rows the diversity of the direction of light incident on the transparent body 17 and traveling through the transparent body 17 can be improved.
  • FIG. 4 shows an example of the arrangement of point light sources.
  • the arrangement of the point light sources is not limited to the mode shown in FIG. 4, but the point light sources are arranged in the mode shown in FIG. 4 in order to improve the diversity of light directions. It is preferable to do.
  • the first light source 4 is arranged only on the left side of the transparent body 17, but the first light source 4 may be configured to surround the transparent body 17.
  • FIG. 5 is a top view showing an example of the first light source 4 surrounding the transparent body 17.
  • the transparent body 17 is a cylinder, and its upper surface is illustrated.
  • the top view of the 1st light source 4 surrounding the whole side surface of the cylindrical transparent body 17 is represented.
  • the first light source 4 surrounds the transparent body 17 and irradiates light from each direction, whereby the light intensity inside the transparent body 17 can be made uniform.
  • the second light source 5 shown in FIG. 1 irradiates the transparent body 17 with light from the side opposite to the imaging means 2 so as to sandwich the transparent body 17 between the imaging means 2.
  • the second light source 5 emits light from below with respect to the transparent body 17. Irradiate. Since the support means 1 is transparent, the light emitted by the second light source 5 passes through the support means 1 and enters the transparent body 17.
  • the second light source 5 uniformly irradiates the transparent body 17 with polarized light.
  • the second light source 5 includes an irradiation unit 6 that irradiates light, and a polarizing plate 7 provided in the light irradiation direction of the irradiation unit 6, and polarizes the light irradiated by the irradiation unit 6.
  • the plate 7 is configured to change to polarized light.
  • each point light source 13 of the first light source 4 and the irradiation unit 6 of the second light source irradiate white light
  • the photographing unit 2 is a monochrome camera that generates a grayscale image. Will be described as an example.
  • the polarizing plate 7 included in the second light source 5 is referred to as a light source side polarizing plate 7, and the polarizing plate 8 provided on the photographing means 2 side is referred to as a photographing side polarizing plate 8, and the two polarizing plates 7 and 8 are distinguished.
  • the photographing side polarizing plate 8 is a polarizing plate that blocks the polarized light emitted from the second light source 5 and directed to the photographing means 2 when the transparent body 17 is not disposed or when there is no depolarization defect in the transparent body 17.
  • the polarizing plate driving means 10 is a driving device that changes the arrangement state of the photographing side polarizing plate 8. As described above, the imaging-side polarizing plate 8 blocks the polarized light emitted from the second light source 5 when the transparent body 17 is not disposed or when the transparent body 17 has no depolarization defect. When the arrangement state is changed by the plate driving means 10, the polarized light passes through without being blocked by the photographing side polarizing plate 8.
  • the light source side polarizing plate 7 is a linear polarizing plate that changes light into linearly polarized light.
  • a linear polarizing plate may be used as the photographing side polarizing plate 8.
  • the polarizing plate driving means 10 arranges the photographing side polarizing plate 8 so that the light source side polarizing plate 7 and the photographing side polarizing plate 8 are crossed Nicols, the polarized light irradiated from the second light source 5 is the photographing side. It is blocked by the polarizing plate 8.
  • Crossed Nicol means that the polarizing axis of one polarizing plate (here, the light source side polarizing plate 7) and the polarizing axis of the other polarizing plate (here, the photographing side polarizing plate 8) are orthogonal to each other.
  • the polarizing plate driving means 10 arranges the photographing side polarizing plate 8 in front of the photographing means 2 to block the polarized light toward the photographing means 2. Further, the polarizing plate driving unit 10 changes the arrangement of the photographing side polarizing plate 8 from a state where the photographing side polarizing plate 8 blocks the polarized light toward the photographing unit 2 to a state where the polarized light toward the photographing unit 2 is not blocked.
  • the photographing side polarizing plate 8 is moved in the direction parallel to the upper surface of the transparent body 17 to the outside of the photographing range by the photographing means 2.
  • the polarizing plate driving means 10 may rotate the photographing side polarizing plate 8 so that the polarization axis of the light source side polarizing plate 7 and the polarizing axis of the photographing side polarizing plate 8 are parallel.
  • the polarization axes of the two polarizing plates 7 and 8 are parallel to each other, even if the photographing side polarizing plate 8 exists in front of the photographing unit 2, the polarized light toward the photographing unit 2 is polarized by the photographing side polarizing plate 8. I can pass.
  • the light source side polarizing plate 7 is not limited to a linear polarizing plate, and may be a polarizing plate that changes light into circularly polarized light or elliptically polarized light.
  • the light source side polarizing plate 7 is a circular polarizing plate that changes light into circularly polarized light
  • a circular polarizing plate that changes light into circularly polarized light in the direction opposite to the circularly polarized light may be disposed as the photographing side polarizing plate 8. If the polarizing plate driving means 10 arranges the photographing side polarizing plate 8 in front of the photographing means 2, the polarized light traveling toward the photographing means 2 is blocked by the photographing side polarizing plate 8, and the polarizing plate driving means 10 causes the photographing side polarizing plate 8 to move. If it is moved out of the range of the photographing means 2, the polarization toward the photographing means 2 is not blocked.
  • the photographing side polarizing plate 8 When the light source side polarizing plate 7 is an elliptically polarizing plate that changes light into elliptically polarized light, an elliptically polarizing plate that changes light into elliptically polarized light that has the same ellipticity and ellipticity as the elliptically polarized light is used as the photographing side polarizing plate 8. What is necessary is just to arrange. Also in this case, if the polarizing plate driving means 10 arranges the photographing side polarizing plate 8 in front of the photographing means 2, the polarized light toward the photographing means 2 is blocked by the photographing side polarizing plate 8, and the polarizing plate driving means 10 becomes the photographing side.
  • the switching unit 11 is an image for determining the presence / absence of a scattering defect (hereinafter, referred to as a scattering determination image).
  • a light shielding determination When the photographing unit 2 captures an image for determining whether or not there is a depolarization defect (hereinafter, referred to as a depolarization determination image).
  • the states of the polarizing plate driving means 10, the first light source 4, and the second light source 5 are switched.
  • the switching unit 11 causes the movement control unit 3 to move the photographing unit 2 in a direction approaching the upper surface of the transparent body or a direction moving away from the upper surface of the transparent body.
  • the defect determination unit 12 determines whether or not the transparent body 17 has a defect depending on whether or not the luminance of the pixels in the image captured by the imaging unit 2 is uneven. That is, if the brightness of the pixels in the image is uniform, it is determined that there is no defect, and the brightness of the pixels in the image is not uniform, and there are portions that become brighter or darker than the background of the image. If it is, it is determined that a defect exists. The brightness of the portion representing the background and the defect in the image differs depending on the type of defect.
  • the imaging unit 2 moves at a constant speed while moving at a constant speed in a direction approaching the upper surface of the transparent body 17 or a direction away from the upper surface of the transparent body 17. Repeat shooting to generate multiple images. If there is a defect in the depth of field of the photographing means 2, brightness contrast is generated in the image. Further, even if there is no defect within the depth of field, even if the defect exists in the vicinity of the depth of field, brightness contrast is generated in the image. However, when there is no defect within the depth of field, the contrast of light and dark images is low.
  • the defect determination unit 12 applies pixel images to a plurality of images obtained by performing imaging a plurality of times while the imaging unit 2 moves in one direction (a direction approaching the upper surface of the transparent body 17 or a direction away from the upper surface of the transparent body 17).
  • the defect photographed image which is an image with non-uniform brightness is continuous, it is determined that a defect exists within the depth of field at the time when the defect photographed image having the highest contrast among the defect photographed images is photographed.
  • FIG. 6 is a flowchart illustrating an example of an operation in which the imaging unit 2 captures an image.
  • FIG. 7 is an explanatory view schematically showing the movement of the photographing means 2.
  • the photographing means 2 is located above the position P on the upper surface of the transparent body 17 shown in FIG. 7 and is located at a position for photographing the transparent body 17 from a direction perpendicular to the upper surface of the transparent body 17.
  • the transparent body 17 is disposed on the horizontal support means 1 (see FIG. 1), the upper surface of the transparent body 17 is horizontal, and the imaging drive means 3 moves the imaging means 2 horizontally and relative to the upper surface of the transparent body 17.
  • a case of moving vertically will be described as an example.
  • the transparent body 17 to be inspected is placed on the support means 1 in advance.
  • the switching unit 11 sets the polarizing plate driving unit 10, the first light source 4, and the second light source 5 to settings for capturing a scattering determination image, settings for capturing a light shielding determination image, and settings for capturing a depolarization determination image. Either one is set (step S1).
  • a case will be described as an example in which switching is performed in the order of setting at the time of capturing an image for scattering determination, setting at the time of capturing an image for shading determination, and setting at the time of capturing an image for determination of depolarization. Therefore, when the process proceeds to step S1 for the first time, the setting is made at the time of image capturing for shading determination. Further, specific setting contents at the time of image capturing for scattering determination, image capturing for light shielding determination, and image capturing for depolarization determination will be described later.
  • the switching unit 11 causes the imaging driving unit 3 to start moving the imaging unit 2 at a constant speed.
  • the imaging drive unit 3 moves the imaging unit 2 at a constant speed in a direction approaching the upper surface of the transparent body 17 or a direction away from the upper surface of the transparent body 17 according to the switching unit 11 (step S2).
  • the imaging means 2 is moved downward at a constant speed at a position P in the horizontal plane shown in FIG.
  • the switching means 11 determines whether it is the end timing of the constant speed movement of the photographing means 2 (step S3). For example, it may be determined whether or not the end point of the constant speed movement of the photographing unit 2 has been reached.
  • the photographing means 2 determines whether or not a certain time has elapsed since the previous photographing (step S4). At this time, if shooting has not yet been performed, it may be determined whether or not a certain time has elapsed since the start of constant speed movement. If the predetermined time has not elapsed since the previous shooting (when the shooting has not been performed yet, at the start of constant speed movement) (No in step S4), the processing after step S3 is repeated.
  • step S5 the photographing drive unit 3 does not stop the movement of the photographing unit 2, and the photographing unit 2 performs photographing while moving at a constant speed.
  • the photographing unit 2 outputs the photographed image and the position of the photographing unit 2 at the time of photographing to the defect determining unit 12.
  • step S5 the processes after step S3 are repeated.
  • the photographing means 2 can keep the first light source 4, the second light source 5, and the photographing side polarizing plate 8 in a constant state while moving at a constant speed. Will be taken sequentially.
  • step S4 determines whether or not a predetermined time has elapsed.
  • the determination of step S4 is performed by means other than the photographing unit 2 (for example, the switching unit 11). Or the imaging driving means 3), and the imaging means 2 may perform imaging when a certain time has elapsed.
  • the switching unit 11 causes the shooting driving unit 3 to end the constant speed movement of the shooting unit 2.
  • the imaging drive means 3 stops the constant speed movement of the imaging means 2 according to the switching means 11 (step S6).
  • the switching unit 11 captures all three types of settings at the position of the imaging unit 2 in the horizontal plane (settings at the time of scattering determination image capturing, light shielding determination image capturing, and depolarization determination image capturing). Whether or not is completed is determined (step S7). If shooting with all these three types of settings has not been completed (No in step S7), the processes in and after step S1 are repeated. In this example, since only the image at the position P shown in FIG. 7 is captured at the setting at the time of image capturing for scattering determination, the processing after step S1 is repeated.
  • step S1 the switching unit 11 changes the setting of the polarizing plate driving unit 10, the first light source 4, and the second light source 5 from the setting at the time of capturing the image for scattering determination to the setting at the time of capturing the image for determining light shielding.
  • step S1 the switching unit 11 changes the setting of the polarizing plate driving unit 10, the first light source 4, and the second light source 5 from the setting at the time of capturing the image for scattering determination to the setting at the time of capturing the image for determining light shielding.
  • step S1 the switching unit 11 changes the setting of the polarizing plate driving unit 10, the first light source 4, and the second light source 5 from the setting at the time of capturing the image for scattering determination to the setting at the time of capturing the image for determining light shielding.
  • step S1 the imaging drive means 3 moves the imaging means 2 at a constant speed in the direction opposite to the previous constant speed movement when moving the imaging means 2 at a constant speed. Since the photographing means 2 is moved downward at the position P (see FIG. 7)
  • steps S2 to S6 are the same as those already described.
  • the photographing unit 2 sequentially photographs the inside of the transparent body 17 while moving at a constant speed until the end timing of the constant speed movement is reached. After the end of the constant speed movement, and the end of the constant speed movement of the photographing means 2 (step S6), the switching means 11 again determines whether or not photographing with all three types of settings has been completed (step S6). Step S7). In this example, since the photographing with the setting at the time of photographing the depolarization determination image has not been completed yet (No in step S7), the processing after step S1 is repeated.
  • the switching unit 11 changes the setting of the polarizing plate driving unit 10, the first light source 4, and the second light source 5 from the setting at the time of capturing the light shielding determination image to the time of capturing the image for determining the depolarization.
  • Switch to setting step S1
  • step S2 the process after step S2 is started.
  • the photographing means 2 is moved upward at the position P, and the photographing means 2 is away from the upper surface of the transparent body 17, so that the photographing driving means 3 takes the photographing at the position P.
  • the means 2 is moved downward at a constant speed.
  • Other points in steps S2 to S6 are the same as those already described.
  • the switching means 11 again determines whether or not photographing with all three types of settings has been completed (step S6). Step S7).
  • step S8 the photographing unit 2 moves at a constant speed three times in the downward direction, the upward direction, and the downward direction at the position P shown in FIG.
  • step S8 it is determined whether or not there is a portion in the horizontal plane that has not been shot yet. In other words, it is determined whether or not there is an area in the horizontal plane that has not yet entered the imaging range. If there is no part where no image is taken (No in step S8), the process is terminated.
  • the switching unit 11 causes the photographing driving unit 3 to move the photographing unit 2 in the horizontal direction.
  • the photographing means 2 is moved horizontally from position P to position Q shown in FIG.
  • the imaging drive unit 3 moves the imaging unit 2 in the horizontal direction according to the switching unit 11 (step S9).
  • the switching unit 11 moves the photographing unit 2 to the photographing driving unit 3 so that the photographing range before the horizontal movement and the photographing range after the horizontal movement partially overlap in the horizontal plane.
  • step S9 the operations after step S1 are repeated. That is, the uniform movement is repeated three times at the horizontally moved position, and the scattering determination image, the light shielding determination image, and the depolarization determination image are generated in the same manner as at the position P (see FIG. 7).
  • the image pickup means 2 is close to the upper surface of the transparent body 17 at the position Q after the horizontal movement because it has moved at a constant speed three times in the downward direction, the upward direction, and the downward direction at the position P shown in FIG. It has become. Accordingly, at the position Q, the scatter determination image, the shading determination image, and the depolarization determination image are sequentially obtained by performing the constant velocity movement three times in the order of the upward direction, the downward direction, and the upward direction.
  • Step S8 Thereafter, the operations of Steps S1 to S9 are repeated until it is determined in Step S8 that there is no portion that has not been shot in the horizontal plane.
  • three types of image groups inside the transparent body 17 are obtained for each imaging region along the horizontal direction.
  • Each of the image groups is an image captured by changing the depth inside the transparent body 17 at regular intervals.
  • the defect determination means 12 After generating three types of image groups (a plurality of scattering determination images, a plurality of shading determination images, and a plurality of depolarization determination images) in each imaging region, the defect determination means 12 is based on the generated images. Then, the presence or absence of each of the scattering defect, the light shielding defect, and the depolarization defect is determined, and if there is a defect, the depth of the defect in the transparent body 17 is determined.
  • step S1 when the polarizing plate driving unit 10, the first light source 4, and the second light source 5 are set to be used for capturing an image for scattering determination, the switching unit 11 irradiates the first light source 4 with light, and the second light source. 5 stops light irradiation. Further, the switching unit 11 drives the polarizing plate driving unit 10 to drive the photographing side polarizing plate 8 so that the photographing side polarizing plate 8 is out of the photographing range of the photographing unit 2.
  • the switching unit 11 includes a polarizing plate driving unit such that the photographing side polarizing plate 8 is positioned in front of the photographing unit 2 and the polarization axis of the photographing side polarizing plate 8 is parallel to the polarizing axis of the light source side polarizing plate 7. 10 may drive the photographing side polarizing plate 8.
  • FIG. 8 is an explanatory diagram showing the progress of light when a scattering defect is present when setting is made at the time of capturing an image for scattering determination.
  • FIG. 9A schematically shows an image when there is no scattering defect
  • FIG. 9B schematically shows an image when there is a scattering defect. If there is no scattering defect, no light is generated in the direction of the photographing means 2, so that the photographed image is a uniformly dark image as shown in FIG. 9A. On the other hand, if there is a scattering defect, light traveling in the direction of the photographing means 2 is generated by scattering at that portion, so that a defect photographed image in which a bright portion is produced in a dark background as shown in FIG. 9B. An example of a defect photographed image of scattering defects is shown in FIG.
  • the switching unit 11 takes an image on the polarizing plate driving unit 10 so that the imaging side polarizing plate 8 is crossed Nicol with respect to the light source side polarizing plate 7 and is positioned in front of the imaging unit 2.
  • the side polarizing plate 8 may be driven.
  • the photographing side polarizing plate 8 is arranged, the scattered light passes through the photographing side polarizing plate 8, so that the photographing unit 2 can photograph the light generated by the scattering. It should be noted that at the time of image capturing for scattering determination, it is only necessary to capture the presence or absence of light emitted from the first light source 4 and directed toward the image capturing means 2 due to scattering.
  • the polarizing plates 7 and 8 are crossed Nicols as described above, not only the first light source 4 but also the second light source 5 may be irradiated with light. However, if there is a depolarization defect, the light from the second light source 5 reaches the imaging means 2, so it is preferable to stop the light irradiation of the second light source 5.
  • step S1 when the polarizing plate driving unit 10, the first light source 4, and the second light source 5 are set to be used for shooting a light shielding determination image, the switching unit 11 stops the first light source 4 from irradiating light, and second The light source 5 is irradiated with light. Further, the switching unit 11 drives the polarizing plate driving unit 10 to drive the photographing side polarizing plate 8 so that the photographing side polarizing plate 8 is out of the photographing range of the photographing unit 2.
  • the switching unit 11 includes a polarizing plate driving unit such that the photographing side polarizing plate 8 is positioned in front of the photographing unit 2 and the polarization axis of the photographing side polarizing plate 8 is parallel to the polarizing axis of the light source side polarizing plate 7. 10 may drive the photographing side polarizing plate 8.
  • FIG. 11 is an explanatory diagram showing the progress of light when there is a light-blocking defect when setting for shooting a light-blocking determination image.
  • the light that has entered the transparent body 17 from the second light source 5 reaches a location 32 that is a light shielding defect, the light is blocked at that location (see FIG. 11), and the light does not reach the imaging means 2.
  • the light incident on the transparent body 17 from the second light source 5 passes through the transparent body 17 as it is and reaches the photographing means 2.
  • FIG. 12A schematically shows an image when there is no light shielding defect
  • FIG. 12B schematically shows an image when there is a light shielding defect. If there is no light shielding defect, the light emitted from the second light source 5 reaches the photographing means 2, so that the photographed image is uniformly bright as shown in FIG. 12A. On the other hand, if there is a light-shielding defect, the light at that location is blocked, resulting in a defect photographed image in which a dark portion is generated in a bright background, as shown in FIG. 12B. An example of a defect photographed image of a light shielding defect is shown in FIG.
  • step S1 when the polarizing plate driving unit 10, the first light source 4, and the second light source 5 are set to be set for the depolarization determination image capturing, the switching unit 11 stops the first light source 4 from irradiating light. Two light sources 5 are irradiated with polarized light.
  • the switching unit 11 causes the polarizing plate driving unit 10 to drive the photographing side polarizing plate 8 so that the photographing side polarizing plate 8 is crossed Nicol with respect to the light source side polarizing plate 7 and is positioned in front of the photographing unit 2.
  • FIG. 14 is an explanatory diagram showing the progress of light when there is a depolarization defect when the depolarization determination image is set to be taken. If there is no depolarization defect, the polarized light incident on the transparent body 17 from the second light source 5 passes through the transparent body 17 without being changed in polarization state and is blocked by the photographing side polarizing plate 8. On the other hand, when there is a portion 33 that becomes a depolarization defect, the polarized light incident on the transparent body 17 from the second light source 5 changes its polarization state at that location and passes through the transparent body 17. The light whose polarization state has changed due to the depolarization defect reaches the photographing means 2 without being blocked by the photographing side polarizing plate 8.
  • the defect determination means 12 determines the presence or absence of scattering defects using the image for scattering determination.
  • the defect determination means 12 compares the brightness of each pixel of the image for scattering determination, and when the brightness of each pixel is uniformly low (for example, lower than a predetermined threshold for scattering determination), when the image is captured It is determined that there are no scattering defects within the depth of field. Further, the defect determination means 12 compares the luminance of each pixel of the scattering determination image, and the luminance of some of the pixels of the scattering determination image is higher than the luminance of surrounding pixels. It is determined that there is a scattering defect.
  • the scattering determination threshold determines that there is a scattering defect when the luminance of some pixels is equal to or higher than the scattering determination threshold and the luminance of surrounding pixels is lower than the scattering determination threshold. Further, it is determined that a scattering defect exists within the depth of field when the defect photographed image is photographed.
  • the defect determination means 12 is within the depth of field when the defect photographed image having the highest contrast is photographed among the consecutive defect photographed images. It is determined that there is a scattering defect, and no scattering defect exists within the depth of field at the time of photographing another defect photographed image.
  • the defect determination means 12 determines the presence or absence of a light-shielding defect using the image for light-shielding determination.
  • the defect determination unit 12 compares the luminance of each pixel of the light shielding determination image, and when the luminance of each pixel is uniformly high (for example, higher than a predetermined light shielding determination threshold), the image is captured at the time of shooting the image. It is determined that there is no light shielding defect within the depth of field. Further, the defect determination means 12 compares the luminance value of each pixel of the light shielding determination image, and the luminance of some of the pixels of the light shielding determination image is lower than the luminance of surrounding pixels. In this case, it is determined that there is a light shielding defect.
  • the luminance of some pixels is equal to or lower than the light-blocking determination threshold and the luminance of surrounding pixels is higher than the light-blocking determination threshold. Further, it is determined that a light shielding defect exists within the depth of field when the defect photographed image is photographed.
  • the defect determination means 12 is within the depth of field when the defect photographed image having the highest contrast is photographed among the consecutive defect photographed images. It is determined that there is a light-shielding defect, and that there is no light-shielding defect within the depth of field at the time of photographing another defect photographed image.
  • the defect determination means 12 determines the presence / absence of a depolarization defect using the depolarization determination image.
  • the defect determination unit 12 compares the luminance of each pixel of the depolarization determination image, and when the luminance of each pixel is uniformly low (for example, lower than a predetermined depolarization determination threshold), the image is captured. It is determined that there is no depolarization defect within the depth of field at the time. Further, the defect determination means 12 compares the luminance of each pixel of the depolarization determination image, and the luminance of some of the pixels in the depolarization determination image is higher than the luminance of surrounding pixels. In this case, it is determined that there is a depolarization defect. For example, it is determined that there is a depolarization defect when the luminance of some pixels is equal to or higher than the depolarization determination threshold and the luminance of surrounding pixels is lower than the depolarization determination threshold.
  • the defect determination means 12 is within the depth of field when the defect photographed image having the highest contrast is photographed among the consecutive defect photographed images. It is determined that there is a depolarization defect and no depolarization defect exists within the depth of field at the time of photographing another defect image.
  • the depth at which the defect exists can be appropriately determined by specifying the defect photographed image having the highest contrast in this way.
  • the position of the depth of field at the time of shooting the defective captured image may be obtained from the position of the imaging unit 2 at the time of shooting, for example.
  • the imaging drive unit 3 moves the imaging unit 2 in a direction approaching the upper surface of the transparent body 17 and a direction away from the upper surface of the transparent body 17, and the imaging unit 2 is transparent during the movement.
  • Photograph body 17 multiple times. Therefore, the photographing is performed in accordance with the position of the depth of field of the photographing means at a plurality of locations in the transparent body 17. If the luminance of the pixels in the captured image is not uniform, the defect determination unit 12 determines that there is a defect within the depth of field when the image is captured. Therefore, it can be determined how deep the transparent body 17 has a defect.
  • the defect determination unit 12 includes a plurality of images captured while the imaging unit 2 moves in one direction, and a defect captured image with nonuniform pixel brightness is continuously included in the defect captured image. It is determined that there is a defect within the depth of field when a defect-captured image with the highest contrast is captured. Therefore, the position of the defect in the transparent body 17 can be determined more accurately.
  • the photographing drive means 3 moves the photographing means 2 at a constant speed, and the photographing means 2 photographs the transparent body 17 while moving at a constant speed. Accordingly, it is possible to reduce the time required to move the photographing unit 2 and shorten the time required to acquire all the images. As a result, the tact time is shortened. If the photographing means 2 is stopped for each photographing, it takes time until the photographing is completed. However, in the first embodiment, such an increase in time can be prevented. Further, it is conceivable that the photographing means 2 is decelerated every time photographing is performed and accelerated after photographing. In this case, the photographing means 2 is accelerated every time photographing is performed. Then, the acceleration at the time of shooting is not always kept constant, and the shooting condition changes when the acceleration changes. In the present embodiment, since the imaging unit 2 captures images while moving at a constant speed, the imaging conditions (acceleration) can be made constant.
  • the height of the side wall 15 (see FIG. 3) where the point light source 13 is disposed is higher than the height of the transparent body 17.
  • the point light source 13 a (see FIG. 3) at the end closer to the photographing means 2 exists at a position higher than the surface of the transparent body 17 on the photographing means 2 side, and is the end far from the photographing means 2.
  • the point light source 13 b (see FIG. 3) is present at a position lower than the surface of the transparent body 17 on the side opposite to the photographing means 2. Therefore, the direction of light traveling through the transparent body 17 can be diversified. Furthermore, the light traveling direction can be diversified even in the vicinity of the upper surface and the bottom surface of the transparent body 17.
  • Some defects do not cause scattering when light is incident from a specific direction. For example, there is a scattering defect that does not scatter light incident from the horizontal direction but scatters light incident from other directions. By diversifying the direction of light traveling inside the transparent body 17, even such a defect can be detected with high sensitivity. Further, even if such a defect exists near the top surface or bottom surface of the transparent body 17, it can be detected with high sensitivity.
  • the height of the side wall 15 is made higher than the height of the transparent body 17, the light from the point light source disposed above the side wall 15 is regularly reflected on the upper surface of the transparent body 17, and the reflected light is It may reach the photographing means 2 and become an obstacle to defect detection.
  • the height of the side wall 15 is equal to or less than the height at which the light from the point light source disposed at the uppermost position on the side wall 15 does not reach the photographing unit 2 even when the light is regularly reflected on the upper surface of the transparent body 17. It is preferable to make it.
  • the point light sources of the first light source 4 are arranged in rows, and the positions of the point light sources are shifted from each other in adjacent rows. As a result, the diversity of the direction of light traveling inside the transparent body 17 can be improved, and the defect detection accuracy can be further increased.
  • the first light source 4 is provided on the side of the arrangement position of the transparent body 17 and the second light source 5 is provided below. Then, the defect determination unit 12 determines whether or not the luminance of the pixels in the image photographed in a state where the first light source 4 irradiates the transparent body 17 with light, and the second light source 5 Since it is determined whether or not the luminance of the pixels in the image photographed in a state where the transparent body 17 is irradiated with light is uneven, a plurality of types of defects can be inspected. Therefore, it is possible to inspect a plurality of defects with one device without preparing an inspection device for each type of defect and transferring the transparent body to another inspection device.
  • the switching unit 11 performs the setting at the time of image capturing for scattering determination, the setting at the time of image capturing for light shielding determination, and the setting at the time of image capturing for depolarization determination, so that the scattering defect, light shielding defect, and Three types of non-refractive defects can be inspected with one device.
  • FIG. 16 is a block diagram showing a derivative form of the first embodiment.
  • the same components as those in FIG. 1 are denoted by the same reference numerals as those in FIG.
  • the transparent body inspection apparatus according to the present modification includes a determination result registration unit 51 and a result storage unit 52 in addition to the components shown in FIG.
  • the result storage unit 52 is a storage device that stores parameters such as manufacturing conditions of the transparent body 17 to be inspected and a determination result by the defect determination unit 12.
  • the determination result by the defect determination unit 12 is the type of defect detected by the defect determination unit 12 and its position.
  • parameters such as manufacturing conditions of the transparent body 17 to be inspected are input from, for example, an operator of the transparent body inspection apparatus.
  • parameters such as manufacturing conditions for the transparent body 17 include the settings of the apparatus that manufactured the transparent body 17 and environmental conditions, but the types of parameters are not limited.
  • the determination defect registration unit 51 associates the parameter with the determination result (the type of detected defect and its position), and stores it in the result storage unit 52.
  • a set of parameters and inspection result information can be stored in the result storage means 52.
  • the operator can analyze what kind of parameters, what kind of defect occurs at what position, and the like, and feed back to the transparent body manufacturing process.
  • the operator can use the result stored in the result storage means 52 to determine whether to move the transparent body 17 to be inspected to the next process or to move to the process of removing the defective part.
  • the defect determination means 12 may detect foreign matters (for example, minute dust) existing on the upper surface of the transparent body 17 separately from the defects. Specifically, in a plurality of images obtained by photographing a plurality of times while the photographing means 2 moves in one direction, images with nonuniform pixel brightness are continuous, and the contrast of these images decreases monotonously. Or if it is monotonously increasing, the defect determination means 12 may determine that a foreign substance is present on the upper surface of the transparent body 17 instead of a defect existing inside the transparent body 17. Further, when the contrast once increases and then decreases, as already described, the defect determination means 12 selects the image having the highest contrast among the continuous images with nonuniform pixel brightness. What is necessary is just to determine with a defect existing in the depth of field at the time of image
  • the defect determination means 12 selects the image having the highest contrast among the continuous images with nonuniform pixel brightness. What is necessary is just to determine with a defect existing in the depth of field at the time of image
  • the luminance is non-uniform. Even when the depth of field moves to the inside of the transparent body 17, the brightness of the photographed image can be non-uniform due to the influence of the foreign matter. However, the contrast is larger when the foreign object is within the depth of field.
  • an image shot in a state where the depth of field exists at a position higher than the upper surface of the transparent body 17 is excluded from the determination target of the presence or absence of a defect. Therefore, when there is a foreign object on the upper surface of the transparent body 17, the contrast of the image due to the foreign object becomes maximum when the foreign object is within the depth of field.
  • the contrast of the continuous images monotonously decreases or monotonously increases. Specifically, the contrast decreases monotonously when the image capturing unit 2 captures an image while moving downward, and the contrast increases monotonously when the image capturing unit 2 captures an image while moving upward. Become. Therefore, the defect determination means 12 determines that there is a defect inside the transparent body 17 based on the fact that the contrast of these images is monotonously decreased or monotonically increased when images with nonuniform luminance of pixels are continuous. It can be determined that there is a foreign object on the upper surface of the transparent body 17 instead of the presence.
  • the defect determination means 12 may detect foreign matter existing on the upper surface of the transparent body 17 by another method.
  • the transparent body inspection device stores a plurality of images obtained by photographing defects existing inside the transparent body and images obtained by photographing foreign objects present on the upper surface of the transparent body, or the inside of the transparent body.
  • the feature amounts of a plurality of images obtained by photographing the defects existing in the image and the feature amounts of a plurality of images obtained by photographing the foreign matter existing on the upper surface of the transparent body are stored for each image. These images or image feature amounts may be prepared in advance and stored in a storage device (not shown) of the transparent body inspection device. If the brightness of the image obtained by the shooting in step S5 (see FIG.
  • the defect determination means 12 compares the image with the image of the defect and the image of the foreign object prepared in advance. It is only necessary to determine whether the image has a higher probability of being a defect image or a foreign object image. Alternatively, this determination may be made by comparing the feature amount of the image with the feature amount of the defect image and the feature amount of the foreign object prepared in advance. If it is determined that the image has a higher probability of being a defect image than a foreign object image, the defect determination unit 12 determines that a defect exists within the depth of field when the image is captured. Good.
  • the defect determination unit 12 may determine that a foreign object exists on the upper surface of the transparent body 17. .
  • the defect determination means 12 compares the image with the highest contrast with the previously prepared defect image and foreign object image. That's fine.
  • a method for determining whether an image obtained by photographing corresponds to a defect image or a foreign material image prepared in advance For example, the method described in International Publication No. WO2008 / 004559 may be used to determine whether an image obtained by photographing corresponds to an image of a defect or a foreign object.
  • FIG. 17 is a block diagram showing an example of the second embodiment of the present invention.
  • the transparent body inspection apparatus according to the second embodiment includes a support unit 1, an imaging unit 22, an imaging drive unit 23, a first light source 24, a second light source 25, a polarization beam splitter 28, and a defect determination unit. 32.
  • the transparent body 17 to be inspected is the same as that in the first embodiment.
  • the support means 1 is a transparent support member that supports the transparent body 17 as in the first embodiment.
  • the photographing means 22 is a camera having a depth of field shallower than the height of the transparent body 17 as in the photographing means 2 in the first embodiment. However, the photographing means 22 is a camera that generates a color image.
  • the imaging drive means 23 is a drive device that moves the imaging means 22 and moves the imaging means 22 in a direction approaching the upper surface of the transparent body 17 and a direction moving away from the upper surface of the transparent body 17.
  • the imaging drive unit 23 moves the imaging unit 22 at a constant speed, and the imaging unit 2 images the transparent body 17 at regular intervals while moving at a constant speed.
  • the imaging drive unit 23 moves the imaging unit 22 in the horizontal direction.
  • the imaging drive unit 23 moves the imaging unit 22 to various positions in the horizontal plane, and moves the imaging unit 22 at a constant speed in a direction approaching the upper surface of the transparent body 17 or a direction away from the upper surface of the transparent body 17.
  • the first light source 24 irradiates the transparent body with light from a direction shifted by 90 ° from the optical axis direction of the photographing means 22.
  • the first light source 24 in the second embodiment irradiates the transparent body 17 with light of a specific wavelength (hereinafter referred to as the first wavelength).
  • the first light source 24 has a side wall parallel to the moving direction when the photographing means 22 approaches the upper surface of the transparent body 17 and moves away from the upper surface of the transparent body 17.
  • the first light source 24 includes a plurality of point light sources 33 that irradiate light of the first wavelength on its side wall.
  • the positional relationship between the first light source 4 and the transparent body 17 on the support means 1 is the same as that in the first embodiment.
  • the point light source at the end closer to the photographing unit 22 is preferably arranged at a position higher than the surface of the transparent body 17 on the photographing unit 22 side.
  • each point light source 33 forms a row
  • the second light source 25 irradiates the transparent body 17 with polarized light from the side opposite to the photographing means 22 so that the transparent body 17 is sandwiched between the second light source 25 and the photographing means 22.
  • the second light source 25 in the second embodiment irradiates P waves of light of two types of wavelengths different from the first wavelength (represented as the second wavelength and the third wavelength, respectively).
  • the second light source 25 includes, for example, an irradiation unit 26 that irradiates light of the second wavelength and light of the third wavelength, and a polarizing plate 27 provided in the light irradiation direction of the irradiation unit 26.
  • the polarizing plate 27 changes the irradiated light of two wavelengths into P wave light.
  • the first light source 24 emits short-wavelength light (for example, light having a wavelength of up to about 550 nm) as the first-wavelength light. It is preferable. Scattering defects can be detected with high accuracy by using short-wavelength light.
  • the second light source 25 since the light with the second wavelength is used for determining the light shielding defect, the second light source 25 emits light with medium wavelength (for example, light with a wavelength near 550 nm) as the light with the second wavelength. Is preferred. By using light of medium wavelength, it is possible to accurately detect a light shielding defect.
  • the 2nd light source 25 should just irradiate the light of the long wavelength different from a 1st wavelength and a 2nd wavelength as light of a 3rd wavelength.
  • the first light source 24 may irradiate blue light as light having the first wavelength.
  • the second light source 25 may radiate green light as the second wavelength light and radiate red light as the third wavelength light.
  • the case where the first light source 24 and the second light source 25 emit light as described above will be described as an example.
  • the wavelengths of light emitted by the first light source 24 and the second light source 25 are not limited as described above, and may be classified into three types of wavelengths.
  • the first light source 24 may emit green light
  • the second light source 25 may emit blue light and red light.
  • the first light source 24 and the second light source 25 irradiate simultaneously with blue light, green light P wave and red light P wave.
  • the polarization beam splitter 28 reflects only the P wave of light of a specific wavelength and transmits light of other wavelengths. Further, the S wave is transmitted even for light of a specific wavelength.
  • the case where the polarization beam splitter 28 reflects only the P wave of red light will be described as an example. Therefore, the S wave of red light, blue light and green light pass through the polarization beam splitter 28.
  • the defect determination unit 32 inspects each of a scattering defect, a light blocking defect, and a depolarization defect using color images generated by the imaging unit 22 imaging the transparent body 17 in a state where light of three types of wavelengths is simultaneously irradiated. To do.
  • the defect determination means 32 determines the presence / absence of a scattering defect based on whether or not the luminance of the color pixel (blue pixel) corresponding to the first wavelength in the image is uniform.
  • the presence / absence of a light-shielding defect is determined based on whether or not the luminance of the pixel (green pixel) of the color corresponding to the second wavelength in the image is uniform, and the pixel of the color corresponding to the third wavelength.
  • the presence / absence of a depolarization defect is determined based on whether or not the luminance of (red pixel) is uniform.
  • FIG. 18 is a flowchart illustrating an example of an operation in which the photographing unit 22 captures an image.
  • the transparent body 17 to be inspected is placed on the support means 1 in advance.
  • the first light source 24 continues to irradiate the transparent body 17 with blue light.
  • the second light source 25 continues to irradiate the transparent body 17 with green P light and red P wave.
  • the irradiation means 26 emits green light and red light
  • the polarizing plate 27 changes the green light and red light into P waves, respectively.
  • the green light P wave, the red light P wave, and the blue light are simultaneously irradiated to the transparent body 17.
  • the photographing drive means 23 causes the photographing means 22 to start moving at a constant speed (step S21).
  • a case where the photographing means 22 is first moved downward at a constant speed is taken as an example.
  • the photographing driving means 23 determines whether or not the end timing of the constant speed movement of the photographing means 22 has come (step S22). For example, it may be determined whether or not the end point of the constant speed movement of the photographing means 22 has been reached.
  • the imaging means 22 images the transparent body 17 at regular intervals (steps S23 and S24).
  • the operations in steps S22 to S24 are the same as those in steps S3 to S5 (see FIG. 6) in the first embodiment.
  • the photographing drive means 3 does not stop the movement of the photographing means 2 until the end of the constant speed movement, and the photographing means 2 repeats photographing while moving at a constant speed.
  • the photographing unit 22 outputs the photographed image and the position of the photographing unit 22 at the time of photographing to the defect determining unit 32.
  • the determination whether or not a certain time has passed is performed by means other than the photographing means 22 (for example, the photographing driving means 23), and the photographing means 22 performs photographing when the certain time has passed. Good.
  • the photographing drive means 23 stops the constant speed movement of the photographing means 2 (step S25).
  • the photographing drive determining means 23 determines whether or not there is a portion in the horizontal plane that has not yet been photographed (step S26). That is, it is determined whether or not there is an area that is not yet in the imaging range in the horizontal plane. This determination process is the same as step S8 (see FIG. 6) in the first embodiment. If there is no part where no image is taken (No in step S26), the process ends.
  • the photographing drive means 3 moves the photographing means 22 horizontally (step S27). At this time, the imaging drive unit 3 moves the imaging unit 22 so that the imaging range before the horizontal movement and the imaging range after the horizontal movement partially overlap in the horizontal plane.
  • step S21 the processing in steps S21 to S27 is repeated until it is determined in step S26 that there is no portion that has not been shot in the horizontal plane.
  • the photographing means 22 is moved at a constant speed in the opposite direction to the previous step S21. For example, if the photographing unit 22 is moved downward in the previous step S21 and the photographing unit 22 is close to the upper surface of the transparent body 17, the photographing unit 21 may be moved upward at a constant speed. If the photographing means 22 has been moved upward in the previous step S21, it may be moved downward at a constant speed.
  • a color image group inside the transparent body 17 is obtained for each photographing region along the horizontal direction.
  • This group of images is an image captured by changing the depth inside the transparent body 17 at regular intervals.
  • the defect determination means 12 determines the presence / absence of each of the scattering defect, the light shielding defect and the depolarization defect using this color image, and if there is a defect, the defect is at what depth in the transparent body 17. It is determined whether.
  • the P wave of the green light emitted from the second light source 25 reaches the light shielding defect, it is blocked there.
  • the light passes through the transparent body 17 and the polarization beam splitter 28 and reaches the photographing means 22. Therefore, if there is a light-shielding defect, a pixel having a luminance lower than that of the surrounding green pixels exists in the green image of the color image.
  • the P wave of red light emitted from the second light source 25 When the P wave of red light emitted from the second light source 25 reaches the depolarization defect, it is rotated there to generate an S wave.
  • the S wave of red light passes through the polarization beam splitter 28 and reaches the imaging means 22.
  • the P wave of red light passes through the transparent body 17 without being rotated and is reflected by the polarization beam splitter 28, so that it does not reach the photographing means 22. Therefore, if there is a depolarization defect, there are pixels in which the luminance is higher than the surrounding red pixels in the red pixels of the color image.
  • the defect determination means 32 compares the luminance of each blue pixel of the image, and if the luminance is uniformly low (for example, lower than a predetermined scattering determination threshold), the object field at the time of shooting the image It is determined that there are no scattering defects within the depth. Further, the defect determination means 32 compares the luminance of each blue pixel of the image, and if the luminance of some of the blue pixels is higher than the luminance of the surrounding blue pixels, Judge that there is a defect. For example, it is determined that there is a scattering defect when the luminance of some blue pixels is equal to or higher than the scattering determination threshold and the luminance of the surrounding blue pixels is lower than the scattering determination threshold.
  • the defect determination means 32 determines that a scattering defect exists within the depth of field when the image is captured. However, when such images are continuous, the defect determination means 32 is within the depth of field when the image having the highest blue contrast is captured among the images (defect captured images). It is determined that there is a scattering defect and that there is no scattering defect within the depth of field at the time of photographing another defect photographed image.
  • the defect determination means 32 compares the luminance of each green pixel of the image, and when the luminance is uniformly high (for example, higher than a predetermined light-shielding determination threshold value), It is determined that there is no light shielding defect within the depth of field. Further, the defect determination means 32 compares the brightness of each green pixel of the image, and if the brightness of some of the green pixels is lower than the brightness of the surrounding green pixels, the defect determination unit 32 blocks the light. Judge that there is a defect. For example, it is determined that there is a light shielding defect when the luminance of some green pixels is equal to or lower than the light shielding determination threshold and the luminance of the surrounding green pixels is higher than the light shielding determination threshold.
  • the defect determination means 32 determines that a light-shielding defect exists within the depth of field when the image is captured. However, when such images are continuous, the defect determination means 32 is within the depth of field when the image with the highest green contrast is captured among the images (defect captured images). It is determined that there is a light-shielding defect and that there is no light-shielding defect within the depth of field at the time of shooting another defect photographed image.
  • the defect determination means 32 compares the luminance of each red pixel of the image. If the luminance is uniformly low (for example, lower than a predetermined depolarization determination threshold), the image is captured at the time of capturing the image. It is determined that there is no depolarization defect within the depth of field. Further, the defect determination means 32 compares the luminance of each red pixel of the image, and if the luminance of some of the red pixels is higher than the luminance of the surrounding red pixels, It is determined that there is a resolution defect. For example, when the luminance of some red pixels is equal to or higher than the depolarization determination threshold and the luminance of the surrounding red pixels is lower than the depolarization determination threshold, it is determined that there is a depolarization defect.
  • the defect determination means 32 determines that there is a depolarization defect within the depth of field when the image is captured. However, when such images are continuous, the defect determination means 32 is within the depth of field when the image having the highest red contrast is captured among the images (defect captured images). It is determined that there is a depolarization defect and there is no depolarization defect within the depth of field at the time of photographing another defect image.
  • the same effect as in the first embodiment can be obtained.
  • the wavelength of the corresponding light is determined for each type of defect.
  • the transparent body 17 is irradiated with light of three types of wavelengths at the same time, and the presence or absence of three types of defects is determined based on the luminance of the color pixels corresponding to each wavelength. Accordingly, each of the three types of defects can be determined from the image obtained by photographing the transparent body 17 while the photographing means 22 moves at a constant speed. For this reason, the movement amount of the photographing means 22 can be made smaller than in the first embodiment, and the time for acquiring all images used for the inspection can be shortened.
  • determination result registration means 51 and the result storage means 52 described in the derivation form of the first embodiment may be provided in the second embodiment.
  • the defect determination means 12 may detect the foreign matter existing on the upper surface of the transparent body 17 separately from the defect. For example, in a plurality of images obtained by photographing a plurality of times while the photographing means 2 moves in one direction, images with nonuniform pixel brightness are continuous, and the contrast of these images monotonously decreases or monotonously increases. If so, the defect determination means 12 may determine that there is a foreign object on the upper surface of the transparent body 17.
  • an image obtained by photographing defects existing inside the transparent body and an image obtained by photographing foreign substances present on the upper surface of the transparent body may be stored in the transparent body inspection device.
  • the defect determination means 12 compares the image with a defect image and a foreign object image prepared in advance, and the image is a defect image and a foreign object. It is possible to determine which of the images corresponds to the higher probability and detect a foreign object based on the determination.
  • a configuration in which two types of defects, a scattering defect and a light shielding defect, are not inspected for three types of defects, or two types of defects, a scattering defect and a depolarization defect, are used.
  • inspect may be sufficient.
  • a configuration in which a scattering defect and a light shielding defect are inspected without irradiating a P wave having a third wavelength may be employed.
  • the transparent body inspection device includes a light irradiation unit (for example, the first light source 4 and the second light source 5) that irradiates light to the transparent body, and an imaging unit that photographs the transparent body, and has a depth of field of transparent
  • a photographing unit for example, photographing unit 2 that is shallower than the height
  • a photographing driving unit for example, photographing driving unit 3 that moves the photographing unit in a direction toward and away from the transparent body, and a photographing unit.
  • a defect determination unit (for example, a defect determination unit 12) that determines whether or not there is a defect in the transparent body depending on whether or not the luminance of the pixels in the image is uneven, and the imaging unit approaches the transparent body or is transparent When the image is taken multiple times while moving away from the body and the brightness of the pixels in the image taken by the image taking unit is non-uniform, the object scene when the image is taken It is characterized by determining that there is a defect within the depth.
  • the transparent body inspection apparatus includes an imaging unit (for example, the imaging unit 2) that images the transparent body, and a first light irradiation unit (for example, the first light source 4) that irradiates light from the side of the transparent body.
  • a second light irradiating unit (for example, the second light source 5) that irradiates light on the transparent body from the opposite side of the imaging unit with a transparent body sandwiched between the imaging unit and an image captured by the imaging unit
  • a defect determination unit (for example, defect determination unit 12) that determines whether or not there is a defect in the transparent body depending on whether or not the luminance of the pixels is non-uniform, the defect determination unit is transparent to the first light irradiation unit
  • the present invention is preferably applied to a transparent body inspection apparatus for inspecting defects of a transparent body having no birefringence.

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  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
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  • General Physics & Mathematics (AREA)
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Abstract

Dispositif de contrôle de corps transparents muni d’un moyen d’application de lumière servant à appliquer une lumière à un corps transparent, d’un moyen de capture d’image servant à capturer une image du corps transparent, le moyen de capture d’image présentant une profondeur de champ inférieure à la hauteur du corps transparent, d’un moyen d’entraînement pour la capture d’image servant à déplacer le moyen de capture d’image dans la direction tendant à rapprocher le moyen de capture d’image du corps transparent et dans la direction tendant à éloigner le moyen de capture d’image du corps transparent, et d’un moyen de détermination de défauts servant à déterminer la présence ou l’absence d’un défaut dans le corps transparent selon que les luminosités des pixels de l’image capturée par le moyen de capture d’image présentent ou non une non-uniformité, le moyen de capture d’image capturant des images à une pluralité de reprises tout en se déplaçant dans la direction tendant à rapprocher ou à éloigner le moyen de capture d’image du corps transparent, et le moyen de détermination de défauts déterminant que, lorsque les luminosités des pixels d’une image capturée par le moyen de capture d’image sont non-uniformes, un défaut est présent dans la profondeur de champ au moment où l’image est capturée.
PCT/JP2009/069459 2008-11-20 2009-11-16 Dispositif de contrôle de corps transparents Ceased WO2010058759A1 (fr)

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EP09827540.7A EP2352012A4 (fr) 2008-11-20 2009-11-16 Dispositif de contrôle de corps transparents
US13/112,576 US8648905B2 (en) 2008-11-20 2011-05-20 Transparent body inspecting device

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JP2008297112 2008-11-20
JP2008-297113 2008-11-20
JP2008-297112 2008-11-20
JP2008297113 2008-11-20

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