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WO2009151856A1 - Dispositif de neutralisation équipé d’un système de nettoyage - Google Patents

Dispositif de neutralisation équipé d’un système de nettoyage Download PDF

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Publication number
WO2009151856A1
WO2009151856A1 PCT/US2009/043732 US2009043732W WO2009151856A1 WO 2009151856 A1 WO2009151856 A1 WO 2009151856A1 US 2009043732 W US2009043732 W US 2009043732W WO 2009151856 A1 WO2009151856 A1 WO 2009151856A1
Authority
WO
WIPO (PCT)
Prior art keywords
shutter member
opening
electrode needle
cleaning
neutralization device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/US2009/043732
Other languages
English (en)
Inventor
Masahiko Ito
Toshikazu Numaguchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
3M Innovative Properties Co
Original Assignee
3M Innovative Properties Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 3M Innovative Properties Co filed Critical 3M Innovative Properties Co
Publication of WO2009151856A1 publication Critical patent/WO2009151856A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B03—SEPARATION OF SOLID MATERIALS USING LIQUIDS OR USING PNEUMATIC TABLES OR JIGS; MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
    • B03C—MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
    • B03C3/00—Separating dispersed particles from gases or vapour, e.g. air, by electrostatic effect
    • B03C3/34—Constructional details or accessories or operation thereof
    • B03C3/74—Cleaning the electrodes
    • B03C3/743—Cleaning the electrodes by using friction, e.g. by brushes or sliding elements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B03—SEPARATION OF SOLID MATERIALS USING LIQUIDS OR USING PNEUMATIC TABLES OR JIGS; MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
    • B03C—MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
    • B03C3/00—Separating dispersed particles from gases or vapour, e.g. air, by electrostatic effect
    • B03C3/34—Constructional details or accessories or operation thereof
    • B03C3/38—Particle charging or ionising stations, e.g. using electric discharge, radioactive radiation or flames
    • B03C3/383—Particle charging or ionising stations, e.g. using electric discharge, radioactive radiation or flames using radiation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B03—SEPARATION OF SOLID MATERIALS USING LIQUIDS OR USING PNEUMATIC TABLES OR JIGS; MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
    • B03C—MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
    • B03C3/00—Separating dispersed particles from gases or vapour, e.g. air, by electrostatic effect
    • B03C3/34—Constructional details or accessories or operation thereof
    • B03C3/40—Electrode constructions
    • B03C3/41—Ionising-electrodes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B03—SEPARATION OF SOLID MATERIALS USING LIQUIDS OR USING PNEUMATIC TABLES OR JIGS; MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
    • B03C—MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
    • B03C2201/00—Details of magnetic or electrostatic separation
    • B03C2201/06—Ionising electrode being a needle
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B03—SEPARATION OF SOLID MATERIALS USING LIQUIDS OR USING PNEUMATIC TABLES OR JIGS; MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
    • B03C—MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
    • B03C2201/00—Details of magnetic or electrostatic separation
    • B03C2201/10—Ionising electrode with two or more serrated ends or sides

Definitions

  • the present invention relates to a neutralization device having a cleaning system for cleaning an electrode needle of the device.
  • 2002-151293 discloses an electrostatic eliminator and describes that "As a fan, a centrifugal sirocco fan or an axial cross-flow fan is used.”
  • the above neutralization device has an electrode needle (or a discharging needle) for generating corona discharging.
  • the discharging performance of the electrode needle may be deteriorated, after use, when dust in the air is adsorbed on the tip of the needle. Therefore, it is necessary to clean the electrode needle periodically.
  • Japanese Unexamined Patent Publication (Kokai) No. 2004-234972 discloses an air-flow type ionizer and describes that "a fin portion receives an air flow and a movable member is activated. Then, a brush member attached to the movable member comes into contact with the tip of a discharging needle, whereby the dust adsorbed on the tip of the needle is removed.”
  • the neutralization device may be installed at a very narrow place or a place where an operator cannot easily access. In such a case, it is difficult to detach the device from the installation place in order to clean an electrode thereof.
  • a neutralization device capable of automatically cleaning an electrode needle thereof and having a structure for preventing dust or particles generated by cleaning the electrode needle from dispersing.
  • a neutralization device comprising: at least one electrode needle for generating ions by corona discharging; an air generating part for conveying air flow by which the ions are conveyed; a housing having a flow path through which generated air flows, and a first opening communicated with the flow path; a cleaning system for cleaning the electrode needle, the cleaning system comprising a shutter member capable of moving between a first position where the shutter member opens the first opening and a second position where the shutter member closes the first opening, and at least one cleaning part configured to clean the electrode needle when the shutter member is positioned at the second position; and a dust-collecting air filter through which air flow from the air generating part to the exterior passes when the shutter member is positioned at the second position.
  • the neutralization device In the neutralization device according to one aspect of the invention, air flow from an air generating part passes through a dust collecting air filter while an electrode needle is cleaned, whereby dust or particles generated by cleaning are collected by the air filter and prevented from dispersing. Therefore, the neutralization device of the invention is useful even in a case, such as a semiconductor manufacturing process, in which dust or particles are highly undesirable.
  • Fig. 1 is a schematic view of a neutralization device according to a first embodiment of the present invention.
  • Fig. 2 is a view showing an example of the constitution of an electrode.
  • Fig. 3 shows cleaning operations of an electrode needle: (a) normal operation is carried out, (b) a shutter member is reciprocated to clean the electrode needle, (c) a shutter member is reciprocated to clean the electrode needle and (d) the shutter member is returned to its original position after cleaning.
  • Fig. 4 is similar to Fig. 1, showing the state in which a shutter member closes a first opening.
  • Fig. 5 is a schematic view of a neutralization device according to a second embodiment of the present invention.
  • Fig. 6 is similar to Fig. 5, showing the state in which a shutter member closes a first opening.
  • Fig. 1 shows a schematic configuration of a neutralization device according to a first embodiment of the present invention. This embodiment may be applied to either DC type or AC type.
  • a neutralization device 1 has a housing 2 schematically illustrated, an air generating part or a centrifugal fan such as a sirocco fan 3 arranged within housing 2, one or more electrode 4 for generating ions by corona discharging, and a high- voltage power supply 5 for applying high voltage to electrode 4.
  • an axial fan or the like may also be used.
  • the centrifugal fan allows greater flexibility of installation.
  • the airflow generated by centrifugal fan 3 passes through a flow path 21 formed in housing 2 and flows out from a first opening 22 communicated with flow path 21 toward an object to be neutralized.
  • Housing 2 has a second opening 23 communicated with flow path 21, and a dust-collecting air filter such as a HEPA filter 6 is arranged such that the filter covers second opening 23. Therefore, at least a part, preferably all, of air flow passing through second opening 23 also passes through HEPA filter 6 before flowing outside the device. As shown in Fig.
  • electrode 4 has a hollow electrode box 41 (the illustrated embodiment has a rectangular box shape from which one pair of opposing surfaces are removed), at least one electrode needle (two electrode needles 42a and 42b in this embodiment), a support member 43 arranged within the box 41 for supporting each electrode needle, and an electric wire 44 connected to high- voltage power supply 5.
  • Electrode box 41 is positioned in flow path 21 such that air flow from centrifugal fan 3 may pass through electrode box 41.
  • High- voltage form power supply 5 is applied to each electrode needle via wire 44, whereby corona discharging is generated between each electrode and electrode box 41 which may function as an opposed electrode.
  • Electrode box 41 is grounded by means of a connecting member (not shown) via housing 2. Air ions generated by corona discharging are conveyed with air flow from centrifugal fan 3 toward an object (not shown) to be neutralized.
  • Neutralization device 1 has a cleaning system 7 for cleaning each electrode needle.
  • Cleaning system 7 has a shutter member 71 configured to close or open flow path 21 (first opening 22 in the embodiment) of housing 2, at least one cleaning part 72 (two brushes 72a, 72b in the embodiment) arranged on shutter member 71, a drive unit 73 for moving shutter member 71, and a control unit 74 for controlling drive unit 73.
  • the number of brushes is the same as the number of the electrode needles, the two numbers may be different.
  • the two electrode needles may be cleaned by one brush.
  • a polishing member such as a polishing film may be used instead of the brush.
  • Shutter member 71 is configured to move between a first position where shutter member 71 opens first opening 22 (Fig.
  • Shutter member 71 in the embodiment is a plate member positioned within housing 2 near a one side or a lower surface 24 (on which first opening 24 is formed), and configured to move parallel to lower surface 24.
  • Brushes 72a, 72b are positioned so as to clean corresponding electrode needle 42a, 42b when shutter member 71 is positioned at the second position.
  • Shutter member 71 may have another constitution as long as the shutter member may close or open the first opening.
  • Drive unit 73 is used for move shutter member 71 between the first and second positions.
  • drive unit 73 has an electric motor 731 and a gear 732 attached to a rotation shaft of electric motor 731.
  • shutter member 71 has a toothed belt 711 at an end thereof opposed to first opening 22, and electric motor 731 is positioned such that gear 732 engages with toothed belt 711.
  • electric motor 731 a stepping motor or a solenoid may be used.
  • Electric motor 731 may be controlled by control unit 74 schematically illustrated.
  • Drive unit may have another constitution as long as the drive unit may move shutter member between the first and second positions.
  • electric motor 731 rotates so as to move shutter member 71 from the first position to the second position, whereby first opening 22 of housing 2 is closed. Then, electric motor 731 alternates between normal and inverse rotations in a short stroke, as shown in Figs. 3(b) and 3(c), whereby shutter member 71 reciprocates in a short stroke such that brushes 72a, 72b clean corresponding electrode needle 42a, 42b in both directions (right and left directions in the embodiment) along the moving direction of the shutter member. At this point, during reciprocating, shutter member 71 does not open first opening 22. Therefore, during each electrode needle is cleaned, dust or particles removed from the electrode needle does not disperse from first opening 22.
  • centrifugal fan 3 continuously rotates while the shutter member reciprocates (or the electrode needle is cleaned), as shown in Figs. 3(b) and 3(c). Since first opening 22 is closed while the shutter member reciprocates, as shown in Fig. 4, air flow from centrifugal fan 3 pass through second opening 23 and HEPA filter 6 positioned at second opening 23 before flowing out. Therefore, dust or particles removed from the electrode needle are collected by HEPA filter 6 and does not disperse outside the device.
  • the above reciprocating movement of the shutter member may be carried out only once or several times, depending on the usage environment and/or the operating time of the neutralization device.
  • each electrode needle By carrying out such a cleaning operation at proper time intervals (for example, once every 12-24 hours), each electrode needle may be maintained clean sufficiently to have the properties thereof.
  • the drive unit moves shutter member 71 to the first position.
  • the position of shutter member 71 may be detected by a position detecting part such as a photo sensor 25 arranged within housing 2 near the shutter member.
  • air flow may be continued for certain period of time. Due to this, dust or particles removed from the electrode may be collected by the filter more surely.
  • the device since dust or particles generated by cleaning the electrode needle does not disperse outside the device, the device is useful, in particular, in a manufacturing environment in which dust or particles are highly undesirable. Further, since the series of operations as shown in Figs. 3(a) to 3(d) may be automatically carried out, the device does not need to be detached from the installation position thereof in order to clean the electrode, whereby the labor of the operations may be greatly reduced.
  • the brush is positioned on the shutter member. Instead, the shutter member and the brush may be separately constituted, and the brush may be configured to clean the electrode needle after the shutter closes the first opening of the housing. However, by the brush is positioned on the shutter member, another means for supporting and moving the brush is not necessary, whereby the number of components of the device may be reduced.
  • first opening 22 is preferably positioned on an extended line along the longitudinal direction (or the air- flow direction) of a part of flow path 21 where the flow path is communicated with the first opening, as shown in Fig 1 or 4.
  • the shutter member may close the first opening, and further, support and move the brush.
  • a means for closing the first opening and a means for supporting and moving the brush may be separately constituted.
  • electrode 4 having the electrode needle is positioned at an upstream side in flow path 21 more than the first embodiment, and thus, cleaning system 7 is positioned at the position where the cleaning system may clean the electrode needle.
  • a shutter member 26 is arranged which is configured to close or open first opening 22.
  • Shutter member 26 is configured to move between a third position (Fig. 5) where shutter member 26 opens first opening 22 and a fourth position (Fig. 6) where the shutter member closes the first opening.
  • shutter member 26 may be rotated about a shaft 27 arranged at a corner of housing 2.
  • the movement of shutter member 26 may be controlled by a control unit (not shown). While cleaning system 7 cleans the electrode needle, shutter member 26 is controlled to be positioned at the fourth position. Therefore, in the second embodiment, the cleaning system needs not to have a structure for closing or opening the first opening.
  • Shutter member 26 at the third position may close the second opening communicated with HEPA filter 6, whereby dust or particles adhered to a sucking surface of the filter may be prevented from dropping from the surface and being conveyed with the air flow. Further, it may be avoided that the amount of air flow to be directed to the object to be neutralized is reduced due to that a part of the air flow enters the filter.
  • housing 2 has two openings and the shutter member may switch the direction of air flow from the fan in order to collect dust or particles generated by cleaning the electrode.
  • housing 2 may not have the second opening and HEPA filter arranged at the second opening, instead, an opening may be formed on at least part of the shutter member and a filter such as HEPA filter may be arranged at the opening of the shutter member. Due to this, while the electrode is cleaned, air flow from the fan may pass through the filter arranged at the opening on the shutter member.
  • the neutralization device is an AC type neutralization device having two electrode needles.
  • the AC type device it is not necessary to position each electrode needle opposed each other.
  • the AC type device may have only one electrode needle.
  • all of the electrode needles may be connected to one AC power supply so as to generate corona discharging between each electrode needle and an electrode opposed to each electrode needle.
  • the invention may also be applied to a DC type neutralization device.
  • the positional relation between the electrode and the cleaning member is not limited to that disclosed in the drawings. Any type of cleaning member may be used, as long as the cleaning member is positioned the position where the cleaning member does not become an obstacle to air flow from the fan while neutralizing, and is moved to the position where the cleaning member can clean the electrode needle while cleaning. Further, the motion of the cleaning member is not limited to the linear motion as described above. For example, the cleaning member may be rotated to clean the electrode needle.
  • neutralizing of an object may be carried out even when an electrode needle of one of the devices is cleaned.

Landscapes

  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Elimination Of Static Electricity (AREA)
  • Electrostatic Separation (AREA)
  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)

Abstract

Dispositif de neutralisation pouvant nettoyer automatiquement son électrode aiguille, et possédant une structure destinée à empêcher la dispersion de la poussière ou des particules produites pendant le nettoyage de ladite électrode aiguille. Au cours d’une opération de nettoyage, un moteur électrique (731) tourne de manière à ce qu’un élément obturateur (71) passe d’une première à une seconde position, ce qui permet de fermer une première ouverture (22) d’un logement (2). Ensuite, le moteur électrique (731) alterne rapidement entre rotations normales et inverses, ce qui fait que ledit élément obturateur (71) effectue un mouvement de va-et-vient rapide sur une distance courte et que des brosses (72a, 72b) nettoient les électrodes aiguilles (42a, 42b) correspondantes dans les deux directions le long de la trajectoire de déplacement de l’élément obturateur. Pendant le va-et-vient, cet élément obturateur (71) n’ouvre pas la première ouverture (22). Par conséquent, lors du nettoyage de chaque électrode aiguille, la poussière ou les particules provenant de l’électrode aiguille ne s’échappent pas de la première ouverture (22).
PCT/US2009/043732 2008-06-12 2009-05-13 Dispositif de neutralisation équipé d’un système de nettoyage Ceased WO2009151856A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2008-154576 2008-06-12
JP2008154576A JP2009301851A (ja) 2008-06-12 2008-06-12 クリーニング機構を備えた除電器

Publications (1)

Publication Number Publication Date
WO2009151856A1 true WO2009151856A1 (fr) 2009-12-17

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Country Status (2)

Country Link
JP (1) JP2009301851A (fr)
WO (1) WO2009151856A1 (fr)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011129504A (ja) * 2010-07-20 2011-06-30 Sharp Corp イオン発生装置および電気機器
EP3043431A1 (fr) 2015-01-08 2016-07-13 Filt Air Ltd. Électrode d'ionisation avec mécanisme de nettoyage intégral
CN107694754A (zh) * 2017-10-17 2018-02-16 电子科技大学中山学院 一种利用高压静电吸附将固体与气体分离的设备
CN110708850A (zh) * 2019-09-09 2020-01-17 吉安市木林森显示器件有限公司 可消除led灯珠静电装置
CN113036612A (zh) * 2021-05-06 2021-06-25 莫世钾 一种具有尘土去除收集结构的电力柜

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011233301A (ja) * 2010-04-26 2011-11-17 Sharp Corp イオン発生装置および電気機器
JP2012128990A (ja) * 2010-12-14 2012-07-05 Sharp Corp イオン発生機
US9859090B2 (en) * 2015-12-10 2018-01-02 Illinois Tool Works Inc. Self-cleaning linear ionizing bar and methods therefor
JP7044151B2 (ja) * 2020-12-28 2022-03-30 マックス株式会社 送風装置

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0743990A (ja) * 1993-05-26 1995-02-14 Minolta Co Ltd コロナ放電器
JP2001085188A (ja) * 1999-09-14 2001-03-30 Sony Corp イオン発生装置
JP2002043092A (ja) * 2000-07-19 2002-02-08 Takayanagi Kenkyusho:Kk バータイプ除電器
JP2002151293A (ja) * 2000-11-16 2002-05-24 Koganei Corp 静電気除去装置
JP2004294972A (ja) * 2003-03-28 2004-10-21 Olympus Corp ストロボシステム及び付属装置

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0743990A (ja) * 1993-05-26 1995-02-14 Minolta Co Ltd コロナ放電器
JP2001085188A (ja) * 1999-09-14 2001-03-30 Sony Corp イオン発生装置
JP2002043092A (ja) * 2000-07-19 2002-02-08 Takayanagi Kenkyusho:Kk バータイプ除電器
JP2002151293A (ja) * 2000-11-16 2002-05-24 Koganei Corp 静電気除去装置
JP2004294972A (ja) * 2003-03-28 2004-10-21 Olympus Corp ストロボシステム及び付属装置

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011129504A (ja) * 2010-07-20 2011-06-30 Sharp Corp イオン発生装置および電気機器
EP3043431A1 (fr) 2015-01-08 2016-07-13 Filt Air Ltd. Électrode d'ionisation avec mécanisme de nettoyage intégral
CN107694754A (zh) * 2017-10-17 2018-02-16 电子科技大学中山学院 一种利用高压静电吸附将固体与气体分离的设备
CN107694754B (zh) * 2017-10-17 2024-02-02 深圳市涤风科技有限公司 一种利用高压静电吸附将固体与气体分离的设备
CN110708850A (zh) * 2019-09-09 2020-01-17 吉安市木林森显示器件有限公司 可消除led灯珠静电装置
CN113036612A (zh) * 2021-05-06 2021-06-25 莫世钾 一种具有尘土去除收集结构的电力柜
CN113036612B (zh) * 2021-05-06 2023-07-07 四川特克利电气有限公司 一种具有尘土去除收集结构的电力柜

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