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WO2009149725A1 - Manipulator for positioning a test head - Google Patents

Manipulator for positioning a test head Download PDF

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Publication number
WO2009149725A1
WO2009149725A1 PCT/EP2008/004685 EP2008004685W WO2009149725A1 WO 2009149725 A1 WO2009149725 A1 WO 2009149725A1 EP 2008004685 W EP2008004685 W EP 2008004685W WO 2009149725 A1 WO2009149725 A1 WO 2009149725A1
Authority
WO
WIPO (PCT)
Prior art keywords
supporting
manipulator
foot
foot plate
base plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/EP2008/004685
Other languages
French (fr)
Inventor
Peter Hirschmann
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Verigy Singapore Pte Ltd
Original Assignee
Verigy Singapore Pte Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Verigy Singapore Pte Ltd filed Critical Verigy Singapore Pte Ltd
Priority to PCT/EP2008/004685 priority Critical patent/WO2009149725A1/en
Priority to TW098119374A priority patent/TW201003076A/en
Publication of WO2009149725A1 publication Critical patent/WO2009149725A1/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16MFRAMES, CASINGS OR BEDS OF ENGINES, MACHINES OR APPARATUS, NOT SPECIFIC TO ENGINES, MACHINES OR APPARATUS PROVIDED FOR ELSEWHERE; STANDS; SUPPORTS
    • F16M7/00Details of attaching or adjusting engine beds, frames, or supporting-legs on foundation or base; Attaching non-moving engine parts, e.g. cylinder blocks
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851Testing of integrated circuits [IC]
    • G01R31/2886Features relating to contacting the IC under test, e.g. probe heads; chucks
    • G01R31/2887Features relating to contacting the IC under test, e.g. probe heads; chucks involving moving the probe head or the IC under test; docking stations

Definitions

  • the present invention generally relates to test systems for testing electronic devices.
  • the invention involves a manipulator for positioning a test head in a certain desired spatial position relative to a handling apparatus.
  • the feeding of the electronic devices to be tested is effected by means of so-called handling apparatuses.
  • handling apparatuses As a consequence of the very small dimensions of the electronic devices to be fed by the handling apparatuses, there is a high demand on the exact positioning of the device relative to contact points on the test head. These high demands on the exact positioning of the device relative to the test head result in corresponding demands on the exact positioning of the handling apparatus relative to the test head.
  • Both the handling apparatus and the test head are markedly heavy apparatuses.
  • the typical weight of a test head amounts to 600 kg, for example. That of a handling apparatus amounts to approximately 800 kg.
  • a conventional manipulator has a manipulator frame having the test head disposed thereon, and a plurality of supporting feet attached to the manipulator frame, which are attached to the manipulator frame height-adjustably by means of threaded bars. Height-adjusting the supporting feet enables a vertical adjustment of the position of the test head. Furthermore, it is possible to perform slight tiltings of the manipulator frame on the x and y axes, that is on the horizontal axes, by means of slightly deviating height adjustments of opposing supporting feet.
  • the manipulator for positioning a test head comprises a manipulator frame having the test head disposed thereon, as well as a plurality of supporting feet, which are adjustably disposed on the manipulator frame so as to facilitate a positional adjustment of the manipulator frame relative to a footprint in a direction of the height and/or a pivoting direction on horizontal axes.
  • Each of the supporting feet comprises a supporting-foot plate, height adjustment means for a height adjustment of the supporting- foot plate relative to the manipulator frame, a base plate and a bearing disposed between the base plate and the supporting-foot plate, which is configured to facilitate low-friction horizontal shifting of the supporting-foot plate relative to the base plate.
  • At least one of the supporting feet comprises adjusting means engaging the supporting-foot plate and the base plate, and serving to adjust the position of the supporting-foot plate relative to the base plate in a horizontal plane.
  • all the supporting feet are provided with adjusting means.
  • the bearing is formed by a plurality of balls of identical diameter, which are disposed between the base plate and the supporting-foot plate.
  • the height adjustment means is formed by a threaded bar connected with the supporting-foot plate, which cooperates with a counter thread disposed on the manipulator frame.
  • each supporting foot comprises a cup, which is attached to the base plate and encloses the supporting-foot plate at least at its perimeter.
  • the adjusting means of a supporting foot are formed by at least three adjusting screws.
  • the adjusting means of a supporting foot comprise two pairs of adjusting screws that are opposed relative to the supporting-foot plate.
  • the two pairs of adjusting screws are offset from each other at an angle Of 90° in the horizontal plane.
  • the supporting feet of the manipulator therefore allow for not only a height adjustment and angular pivoting of the manipulator on horizontal axes, that is the x and y axes, but also a shifting of the manipulator in the x/y plane, that is a plane in parallel to the footprint, without the manipulator frame itself having to be equipped with its own shifting mechanisms such as adjusting carriages.
  • Fig. 1 shows a schematic representation of a manipulator for positioning a test head
  • Fig. 2 shows a schematic sectional representation of a supporting foot
  • Figs. 3, 5, 7 and 9 show horizontal sectional representations of the supporting foot with different horizontal positionings
  • Figs. 4, 6, 8 and 10 show representations of the positions of bearing balls relative to a supporting-foot plate of the supporting foot in the adjustments shown in Figs. 3, 5, 7 and 9.
  • a manipulator having disposed thereon a test head 2 which in turn is designated in its entirety with the reference numeral 2.
  • the manipulator 1 comprises a manipulator frame 3.
  • a manipulator having a test head and a manipulator frame is as such known in the art so that there is no need for a separate description of the set-up or the functionality of these components.
  • Each of the supporting feet 4 comprises a threaded bar 5 extending in a vertical direction and cooperating with an internal thread in the manipulator frame 3.
  • the lower end of the threaded bar 5 blends into a hexagonal nut integrally formed with the threaded bar and facilitating a rotary adjustment of the threaded bar relative to the internal thread on the manipulator frame 3.
  • each of the supporting feet comprises a supporting-foot plate 7, which is attached to a cylindrical appendix 8 of the threaded bar 5.
  • Each supporting foot further comprises a base plate 9 having disposed thereon a plurality of bearing balls 10 of identical diameter, which support the supporting-foot plate
  • bearing is formed by a multitude of bearing balls 10 of identical diameter in the embodiment shown here, other bearings may be employed that facilitate low-friction shifting of the supporting-foot plate relative to the base plate into the various horizontal directions, that is in the horizontal plane.
  • bearings may be provided between the supporting-foot plate and the base plate a coating with good sliding qualities, forming the function of the bearing.
  • the base plate is provided with a protrusion 11 extending along its perimeter, by means of which the bearing balls 10 are retained within a given area close to the supporting- foot plate.
  • a cup 12 which encloses the supporting-foot plate horizontally spaced, and which is spaced from a top face 13 of the supporting-foot plate a distance that is small relative to the diameter of the bearing balls 10, or which is slidably seated against the top face 13 of the supporting-foot plate.
  • the cup defines a cylindrical opening, which is spaced relative to the cylindrical appendix 8 in the horizontal direction so as to facilitate a shifting of the supporting-foot plate 7 in the desired directions of the horizontal plane relative to the base plate 9 and the cup 12.
  • the cylindrical appendix 8 On its top face facing the threaded bar 5, the cylindrical appendix 8 is provided with a cover ring 15, which prevents crushing injuries of operating personnel when horizontally adjusting the supporting-foot plate 7 relative to the base plate 9.
  • At least two of the supporting feet are provided with adjusting means in the preferred embodiment shown here.
  • the adjusting means comprise two pairs of opposing adjusting screws 16, 17, 18, 19 offset relative to one another in the horizontal plane by 90°, each of which engaging the cup 12 on the one hand and the cylindrical external profile of the cylindrical appendix 8 on the other hand.
  • each of the supporting feet 4 be provided with such adjusting screws 16, 17, 18, 19.
  • Figs. 3 and 4 show an on-center adjustment
  • Figs. 5 and 6 show a movement in the positive x direction
  • Figs. 7 and 8 show a movement in the positive y direction
  • Figs. 9 and 10 show a movement both in the positive x and in the positive y directions.
  • the balls 10 follow the relative movement of the supporting-foot plate 7 relative to the opening 14 and/or the base plate 9 by half the relative travel only.
  • the manipulator 1 may be positioned not only in the vertical direction but also in the horizontal directions or the x and y directions. Furthermore, due to a different horizontal adjustment of opposing supporting feet on the manipulator frame 3, slight tiltings and therefore angular adjustments of the manipulator and therefore of the test head 2 may be performed on the x and y axes.

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • Manipulator (AREA)
  • Investigating Strength Of Materials By Application Of Mechanical Stress (AREA)

Abstract

A manipulator for positioning a test head has a manipulator frame (3) having disposed thereon the test head (2), as well as a plurality of supporting feet (4). Each supporting foot has a supporting-foot plate (7), a height adjustment means for the supporting-foot plate (7), a base plate (9) and a bearing disposed between the base plate (9) and the supporting-foot plate (7) for low-friction horizontal shifting of the supporting-foot plate (7) relative to the base plate (9).

Description

Manipulator for Positioning a Test Head
Description
The present invention generally relates to test systems for testing electronic devices. In particular, the invention involves a manipulator for positioning a test head in a certain desired spatial position relative to a handling apparatus.
In automatic testing of electronic devices and assemblies, automated test systems are used, which exhibit so-called test heads having the electronic devices to be tested fed thereto.
The feeding of the electronic devices to be tested is effected by means of so-called handling apparatuses. As a consequence of the very small dimensions of the electronic devices to be fed by the handling apparatuses, there is a high demand on the exact positioning of the device relative to contact points on the test head. These high demands on the exact positioning of the device relative to the test head result in corresponding demands on the exact positioning of the handling apparatus relative to the test head. Both the handling apparatus and the test head are markedly heavy apparatuses. The typical weight of a test head amounts to 600 kg, for example. That of a handling apparatus amounts to approximately 800 kg.
For locally adjusting or positioning the test head, same is mounted on a so-called manipulator. A conventional manipulator has a manipulator frame having the test head disposed thereon, and a plurality of supporting feet attached to the manipulator frame, which are attached to the manipulator frame height-adjustably by means of threaded bars. Height-adjusting the supporting feet enables a vertical adjustment of the position of the test head. Furthermore, it is possible to perform slight tiltings of the manipulator frame on the x and y axes, that is on the horizontal axes, by means of slightly deviating height adjustments of opposing supporting feet.
As a rule, a certain flexibility in the spatial arrangement of the test head is required. Users of a test system may for example employ different types of handling apparatuses, which must be interchanged from time to time depending on the type of electronic device to be tested. These different types of handling apparatuses require different adjustments of the manipulator with respect to the position of the test head.
Therefore, there is a need for a manipulator for positioning a test head, which comprises a simple set-up.
This object is achieved by a manipulator according to claim 1.
The manipulator for positioning a test head comprises a manipulator frame having the test head disposed thereon, as well as a plurality of supporting feet, which are adjustably disposed on the manipulator frame so as to facilitate a positional adjustment of the manipulator frame relative to a footprint in a direction of the height and/or a pivoting direction on horizontal axes. Each of the supporting feet comprises a supporting-foot plate, height adjustment means for a height adjustment of the supporting- foot plate relative to the manipulator frame, a base plate and a bearing disposed between the base plate and the supporting-foot plate, which is configured to facilitate low-friction horizontal shifting of the supporting-foot plate relative to the base plate.
Preferably, at least one of the supporting feet comprises adjusting means engaging the supporting-foot plate and the base plate, and serving to adjust the position of the supporting-foot plate relative to the base plate in a horizontal plane.
In a preferred embodiment, all the supporting feet are provided with adjusting means.
In a preferred embodiment, the bearing is formed by a plurality of balls of identical diameter, which are disposed between the base plate and the supporting-foot plate.
According to a further preferred embodiment, the height adjustment means is formed by a threaded bar connected with the supporting-foot plate, which cooperates with a counter thread disposed on the manipulator frame.
In a further preferred embodiment, each supporting foot comprises a cup, which is attached to the base plate and encloses the supporting-foot plate at least at its perimeter.
Preferably, the adjusting means of a supporting foot are formed by at least three adjusting screws.
According to a development, the adjusting means of a supporting foot comprise two pairs of adjusting screws that are opposed relative to the supporting-foot plate.
Preferably, the two pairs of adjusting screws are offset from each other at an angle Of 90° in the horizontal plane.
The supporting feet of the manipulator therefore allow for not only a height adjustment and angular pivoting of the manipulator on horizontal axes, that is the x and y axes, but also a shifting of the manipulator in the x/y plane, that is a plane in parallel to the footprint, without the manipulator frame itself having to be equipped with its own shifting mechanisms such as adjusting carriages. In the following, preferred embodiments of the present invention are discussed referring to the accompanying drawings, in which:
Fig. 1 shows a schematic representation of a manipulator for positioning a test head;
Fig. 2 shows a schematic sectional representation of a supporting foot;
Figs. 3, 5, 7 and 9 show horizontal sectional representations of the supporting foot with different horizontal positionings, and
Figs. 4, 6, 8 and 10 show representations of the positions of bearing balls relative to a supporting-foot plate of the supporting foot in the adjustments shown in Figs. 3, 5, 7 and 9.
In Fig. 1, there is designated in its entirety with reference numeral 1 a manipulator having disposed thereon a test head 2, which in turn is designated in its entirety with the reference numeral 2. The manipulator 1 comprises a manipulator frame 3. A manipulator having a test head and a manipulator frame is as such known in the art so that there is no need for a separate description of the set-up or the functionality of these components.
On the manipulator frame there are disposed a plurality of supporting feet 4. In the embodiment shown here, six supporting feet are provided. The number of the supporting feet amounts to three or more. Each of the supporting feet 4 comprises a threaded bar 5 extending in a vertical direction and cooperating with an internal thread in the manipulator frame 3. The lower end of the threaded bar 5 blends into a hexagonal nut integrally formed with the threaded bar and facilitating a rotary adjustment of the threaded bar relative to the internal thread on the manipulator frame 3.
As can be seen from the schematic sectional representation according to Fig. 2, each of the supporting feet comprises a supporting-foot plate 7, which is attached to a cylindrical appendix 8 of the threaded bar 5. Each supporting foot further comprises a base plate 9 having disposed thereon a plurality of bearing balls 10 of identical diameter, which support the supporting-foot plate
7 and facilitate low-friction horizontal shifting of the supporting-foot plate 7 relative to the base plate 9.
While the bearing is formed by a multitude of bearing balls 10 of identical diameter in the embodiment shown here, other bearings may be employed that facilitate low-friction shifting of the supporting-foot plate relative to the base plate into the various horizontal directions, that is in the horizontal plane. As an example, there may be provided between the supporting-foot plate and the base plate a coating with good sliding qualities, forming the function of the bearing.
The base plate is provided with a protrusion 11 extending along its perimeter, by means of which the bearing balls 10 are retained within a given area close to the supporting- foot plate.
Attached to the base plate 9 there is a cup 12, which encloses the supporting-foot plate horizontally spaced, and which is spaced from a top face 13 of the supporting-foot plate a distance that is small relative to the diameter of the bearing balls 10, or which is slidably seated against the top face 13 of the supporting-foot plate.
At its top face, the cup defines a cylindrical opening, which is spaced relative to the cylindrical appendix 8 in the horizontal direction so as to facilitate a shifting of the supporting-foot plate 7 in the desired directions of the horizontal plane relative to the base plate 9 and the cup 12.
On its top face facing the threaded bar 5, the cylindrical appendix 8 is provided with a cover ring 15, which prevents crushing injuries of operating personnel when horizontally adjusting the supporting-foot plate 7 relative to the base plate 9.
At least two of the supporting feet are provided with adjusting means in the preferred embodiment shown here. In the preferred embodiment shown here, the adjusting means comprise two pairs of opposing adjusting screws 16, 17, 18, 19 offset relative to one another in the horizontal plane by 90°, each of which engaging the cup 12 on the one hand and the cylindrical external profile of the cylindrical appendix 8 on the other hand.
It is also possible that each of the supporting feet 4 be provided with such adjusting screws 16, 17, 18, 19.
As can be seen in Figs. 3, 5, 7 and 9, movements of the cylindrical appendix 8 and therefore of the supporting-foot plate relative to the base plate 9 may be adjusted by means of appropriately adjusting the adjusting screws 16, 17, 18, 19. Thus, Figs. 3 and 4 show an on-center adjustment, Figs. 5 and 6 show a movement in the positive x direction, Figs. 7 and 8 show a movement in the positive y direction, and Figs. 9 and 10 show a movement both in the positive x and in the positive y directions. As can be seen from Figs. 6 to 10, the balls 10 follow the relative movement of the supporting-foot plate 7 relative to the opening 14 and/or the base plate 9 by half the relative travel only.
As a result of the configuration of the supporting feet 4 described, the manipulator 1 may be positioned not only in the vertical direction but also in the horizontal directions or the x and y directions. Furthermore, due to a different horizontal adjustment of opposing supporting feet on the manipulator frame 3, slight tiltings and therefore angular adjustments of the manipulator and therefore of the test head 2 may be performed on the x and y axes.
By an appropriate horizontal movement, which may be defined by the adjusting screws 16, 17, 18, 19, it is also possible to pivot the manipulator 1 and therefore the test head 2.
Therefore, a way of adjusting the manipulator, which is simple, compatible with existing manipulators and easy to operate, is enabled by the design of the supporting feet 4 described.

Claims

Claims
1. Manipulator for positioning a test head (2), comprising :
a manipulator frame (3) having disposed thereon the test head (2) , and
a plurality of supporting feet (4) disposed adjustably on the manipulator frame so as to enable a positional adjustment of the manipulator frame (3) relative to a footprint in the direction of the height and/or in a pivoting direction on horizontal axes,
wherein each of the supporting feet (4) comprises a supporting-foot plate (7), height adjustment means (5) for a height adjustment of the supporting-foot plate (7) relative to the manipulator frame (3), a base plate (9) and a bearing (10) disposed between the base plate (9) and the supporting-foot plate (7) and configured to enable low-friction horizontal shifting of the supporting-foot plate (7) relative to the base plate (9) .
2. Manipulator of claim 1, wherein at least one of the supporting feet comprises adjusting means (16, 17, 18, 19) engaging the supporting-foot plate (7) and the base plate (9) and serving to adjust the position of the supporting-foot plate (7) relative to the base plate (9) in a horizontal plane.
3. Manipulator of claim 2, wherein all the supporting feet (4) comprise the adjusting means (16, 17, 18, 19) .
4. Manipulator of any one of claims 1 to 3, wherein the bearing is formed by a plurality of balls (10) of identical diameter, which are disposed between the base plate (9) and the supporting-foot plate (7) .
5. Manipulator of any one of claims 1 to 4 , wherein the height adjustment means is formed by a threaded bar
(5) connected to the supporting-foot plate (7) and cooperating with a counter thread disposed on the manipulator frame (3) .
6. Manipulator of any one of claims 1 to 5, wherein the supporting foot (4) further comprises a cup (12), which is attached to the base plate (9) and encloses the supporting-foot plate (7) at least on its perimeter.
7. Manipulator of any one of claims 3 to 6, wherein the adjusting means of a supporting foot (4) comprise at least three adjusting screws (16, 17, 18, 19) .
8. Manipulator of claim 7, wherein the adjusting means of a supporting foot (4) comprise two pairs of adjusting screws (16, 17, 18, 19) opposing one another relative to the supporting-foot plate (7) .
9. Manipulator of claim 8, wherein the two pairs of adjusting screws are offset to one another in the horizontal plane at an angle of 90° .
PCT/EP2008/004685 2008-06-11 2008-06-11 Manipulator for positioning a test head Ceased WO2009149725A1 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
PCT/EP2008/004685 WO2009149725A1 (en) 2008-06-11 2008-06-11 Manipulator for positioning a test head
TW098119374A TW201003076A (en) 2008-06-11 2009-06-10 Manipulator for positioning a test head

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/EP2008/004685 WO2009149725A1 (en) 2008-06-11 2008-06-11 Manipulator for positioning a test head

Publications (1)

Publication Number Publication Date
WO2009149725A1 true WO2009149725A1 (en) 2009-12-17

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ID=40347830

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2008/004685 Ceased WO2009149725A1 (en) 2008-06-11 2008-06-11 Manipulator for positioning a test head

Country Status (2)

Country Link
TW (1) TW201003076A (en)
WO (1) WO2009149725A1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108612965A (en) * 2018-05-24 2018-10-02 芜湖贝浩机械科技有限公司 A kind of industrial automation equipment placement footed glass

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3849857A (en) * 1973-07-05 1974-11-26 M Murray Machine element alignment positioner
US4703911A (en) * 1985-10-21 1987-11-03 Rammell Ray L Concrete insertable retainer apparatus
DD255452A3 (en) * 1985-12-23 1988-04-06 Auerbach Werkzeugmaschf Veb DEVICE FOR ALIGNING BODIES ON A FOUNDATION
US5071097A (en) * 1990-03-21 1991-12-10 International Pool Player Association, Inc. Adjustment apparatus and method
DE20013480U1 (en) * 2000-08-04 2000-10-26 K & W Gesellschaft für Halbleitergeräteservice Applikations- und Automatisierungstechnik mbH, 85764 Oberschleißheim Semiconductor test device
DE10017507A1 (en) * 2000-04-07 2001-10-18 Roland Man Druckmasch Appliance for lining-up printing unit of printing press is supported on floating feet to provide adjustment in horizontal plane
DE10016530C1 (en) * 2000-04-03 2001-10-25 Microhandling Handhabungsgerae Test head handling device, has base frame provided with chassis open on side facing handler for fitting around its outside in docking position
US20030196342A1 (en) * 2002-04-23 2003-10-23 Daniel Markeson Alignment tool and method for aligning large machinery

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3849857A (en) * 1973-07-05 1974-11-26 M Murray Machine element alignment positioner
US4703911A (en) * 1985-10-21 1987-11-03 Rammell Ray L Concrete insertable retainer apparatus
DD255452A3 (en) * 1985-12-23 1988-04-06 Auerbach Werkzeugmaschf Veb DEVICE FOR ALIGNING BODIES ON A FOUNDATION
US5071097A (en) * 1990-03-21 1991-12-10 International Pool Player Association, Inc. Adjustment apparatus and method
DE10016530C1 (en) * 2000-04-03 2001-10-25 Microhandling Handhabungsgerae Test head handling device, has base frame provided with chassis open on side facing handler for fitting around its outside in docking position
DE10017507A1 (en) * 2000-04-07 2001-10-18 Roland Man Druckmasch Appliance for lining-up printing unit of printing press is supported on floating feet to provide adjustment in horizontal plane
DE20013480U1 (en) * 2000-08-04 2000-10-26 K & W Gesellschaft für Halbleitergeräteservice Applikations- und Automatisierungstechnik mbH, 85764 Oberschleißheim Semiconductor test device
US20030196342A1 (en) * 2002-04-23 2003-10-23 Daniel Markeson Alignment tool and method for aligning large machinery

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108612965A (en) * 2018-05-24 2018-10-02 芜湖贝浩机械科技有限公司 A kind of industrial automation equipment placement footed glass

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