[go: up one dir, main page]

TW201003076A - Manipulator for positioning a test head - Google Patents

Manipulator for positioning a test head Download PDF

Info

Publication number
TW201003076A
TW201003076A TW098119374A TW98119374A TW201003076A TW 201003076 A TW201003076 A TW 201003076A TW 098119374 A TW098119374 A TW 098119374A TW 98119374 A TW98119374 A TW 98119374A TW 201003076 A TW201003076 A TW 201003076A
Authority
TW
Taiwan
Prior art keywords
substrate
item
supporting
support leg
support
Prior art date
Application number
TW098119374A
Other languages
Chinese (zh)
Inventor
Peter Hirschmann
Original Assignee
Verigy Pte Ltd Singapore
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Verigy Pte Ltd Singapore filed Critical Verigy Pte Ltd Singapore
Publication of TW201003076A publication Critical patent/TW201003076A/en

Links

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16MFRAMES, CASINGS OR BEDS OF ENGINES, MACHINES OR APPARATUS, NOT SPECIFIC TO ENGINES, MACHINES OR APPARATUS PROVIDED FOR ELSEWHERE; STANDS; SUPPORTS
    • F16M7/00Details of attaching or adjusting engine beds, frames, or supporting-legs on foundation or base; Attaching non-moving engine parts, e.g. cylinder blocks
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851Testing of integrated circuits [IC]
    • G01R31/2886Features relating to contacting the IC under test, e.g. probe heads; chucks
    • G01R31/2887Features relating to contacting the IC under test, e.g. probe heads; chucks involving moving the probe head or the IC under test; docking stations

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • Manipulator (AREA)
  • Investigating Strength Of Materials By Application Of Mechanical Stress (AREA)

Abstract

A manipulator for positioning a test head has a manipulator frame having disposed thereon the test head, as well as a plurality of supporting feet. Each supporting foot has a supporting-foot plate, a height adjustment means for the supporting-foot plate, a base plate and a bearing disposed between the base plate and the supporting-foot plate for low-friction horizontal shifting of the supporting-foot plate relative to the base plate.

Description

201003076 六、發明說明: 【發明所屬之技術領域3 發明領域 本發明一般地是關於一種用於測試電子裝置的測試系 統。尤其是,本發明係涉及一種操作器,其係用以將一測 試頭定位於相對於一處理儀器之一特定欲設空間位置。 發明背景 在電子裝置及組合件的自動測試中,自動測試系統係 被使用,其具有一般所稱的測試頭,該測試頭具有被輸送 至其之待測試的該電子裝置。 " 待測試電子裝置的輸送是藉由所謂的處理儀器來完 ' 成。由於欲由該處理儀器所輸送的電子裝置尺寸非常小, 因此,對該裝置相對於測試頭上之接觸點的精確定位有一 很南的要求。該裝置相對測試頭的精確定位之南要求會造 成處理儀器相對於測試頭之精確定位的相對要求。該處理 ί 儀器及該測試頭兩者皆是特別重的儀器。例如,一測試頭 之一般重量為600kg。一處理儀器之重量約為800kg。 為了要局部調整或定位該測試頭,該測試頭係裝載在 一所謂的操作器上。一傳統的操作器具有一該測試頭放置 其上的操作器框架及複數個連接至該操作器框架上的支撐 腳,該等支撐腳藉由螺紋桿而高度可調整地連接至該操作 器框架。該支撐腳的高度調整可使該測試頭的位置作一垂 直調整。進一步,藉由相對支撐腳之些微偏位高度調整, 201003076 該操作器框架可能在χ和y軸上,也就是在水平轴上,進行 些微的傾斜。 一般而言,測試頭在空間排列上需要有一特定的適應 性。例如,一測試系統的使用者可使用不同類型的處理儀 器,該處理儀器必須根據欲測試電子裝置的類型而不時地 互換。這些不同類型的處理儀器需要該操作器對測試頭之 位置作不同的調整。 I:發明内容3 發明概要 因此,對於一用於定位一測試頭之操作器有一需求, 其包含一簡單裝配。 此目標可根據申請專利範圍第1項之一操作器所達到。 一種用以定位一測試頭的操作器包含一具有一測試頭 放置其上的操作器框架,以及複數支撐腳,該等支撐腳係 可調整地配置在操作器框架上,以便於該操作器框架相對 於一軌跡(footprint)在高度方向且/或在水平軸之極軸方向 作位置調整。每一支撐腳包含一支撐腳板、用於該支撐腳 板相對於該操作器框架之高度調整的一高度調整構件、一 基板及一軸承,該軸承放置於該基板和該支撐腳板間且組 配來使該支撐腳板能相對於該基板有低摩擦水平的移動。 較佳地,至少一支撐腳之包含調整構件,該調整構件 與該支撐腳板及該基板偶合且使用來在一水平面調整該支 撐腳板相對於該基板的位置。 在一較佳的具體實施例中,所有支撐腳皆設有調整構 201003076 - 件。 在一較佳的具體實施例中,該軸承係由複數個相同直 徑之球體所構成,該等球體係配置在該基板和該支撐腳板 之間。 根據另一較佳具體實施例,該高度調整構件係由連結 • 在該支撐腳板的一螺紋桿所構成,而該螺紋桿係與一配置 - 在該操作器框架上之反向螺紋結合 於另一較佳具體實施例中,各支撐腳包含一帽蓋,該 帽蓋連接至該基板上且至少包覆該支撐腳板的周圍。 較佳地,一支撐腳的調整構件是由至少三個調整螺釘 所構成。 根據一發展的實施態樣,一支撐腳的調整構件包含兩 對調整螺釘,該等調整螺釘是相對該支撐腳板而相對配置。 較佳地,該兩對調整螺釘在水平面上彼此錯置90°夾 角。 因此該操作器的該等支撐腳不只提供該操作器在高度 上的調整及在水平轴上(即X和y軸)的角度樞轉,也提供該操 作器在x/y平面的移動(也就是平行於軌跡的一平面),而該 操作器框架本身不需要去裝備自己的移動機器,例如調整 滑動臺架。 圖式簡單說明 接著,本發明之較佳具體實施例將參照隨附之圖式而 作描述,其中: 第1圖顯示一用於定位一測試頭之操作器的一概要表 5 201003076 示圖。 #2圖顯不—支撐腳的—概要剖面表示圖。 的平二、二7及9圖顯示具有不同水平位置之該等支撐腳 的平面剖面表示圖。 t又彳牙浙丨 第4'6' 8及1〇圖顯示在圖3、5、7及9的調整中 球相對於該切腳之-切腳板驗置表示圖。 【實施方式^ 較仏實把例之詳細說明 在弟1圖中’所有圖示標號中標定為上的為— ,、具有-放置於其上的測試頭2,接著, ; 圖示標號標定為2。該操細包含-操作dr 測試頭及—操作器框架的—操作 的些γ件的裝配及功能將無需個別的描述。 ^時架±’配置有複數個切 示的具體實施例巾,是提供六個切腳2此所顯 量為三或更多。每-支撐腳跑含-螺紋桿;=的數 沿-垂直方向延伸且與該操作器框架3螺螺紋桿係 螺紋桿5的下端融合於—六角螺帽中,該六:累^結合。該 桿是-體成形且幫助_紋桿 、螺巾胃與該螺紋 内部螺紋的〜旋轉式調整。 、*作器框架3之該 根據第2圖之概要剖面代表圖所示,兮— 支撐腳板7,該支㈣板連接至_ ^切腳包含- 物8。各支撐卿更包含一基板9, 干广-圓柱形附加 之相同直徑承球1〇,該等料^數個放置於其上 -支撐該支撐腳板7且幫 201003076 助該支撐峡7㈣於《板9之低輕水平移動。 儘管顯示在本具體實施例中的該軸承是由複數個相n 直徑之轴承球陶構成,其㈣承也可❹㈣ 腳板相對於«板在關特方⑽,水 動。舉例來說,可在該支撐腳板及該基板間提供 好滑動品質的塗層’以達到該轴承的功用。 、 X基板。又有-沿著其周圍延伸的一突出物^, 賴糟由該突出物而被限留在緊靠於該支撺腳板的二 區域内。 奇疋 連接至該基板9的是一帽蓋12,該帽蓋是 空間相隔料_切峽,且卿蓋_讀^2 員面13相距]、於該軸承球1〇直經的距離 滑動地置於錢切腳板_叩。 4盖係 在°玄巾目盍的頂面’該帽蓋界定-圓柱形的開口,該門 口相對於_检形附加物8在該水平方向上是相隔的, 助該切《叫目料祕板9㈣㈣ = 定方向上的移動。 十面之預 在面向该螺紋桿5的圓柱狀附加物8頂面上 附加物8設有—罢供^圓柱狀 •^15以防止當操作人員相對於該基板9水 °周正邊支擇腳板7時的擠壓傷害。201003076 VI. Description of the Invention: [Technical Field 3 of the Invention] Field of the Invention The present invention generally relates to a test system for testing an electronic device. More particularly, the present invention relates to an operator for positioning a test head in a particular desired spatial position relative to one of the processing instruments. BACKGROUND OF THE INVENTION In automated testing of electronic devices and assemblies, automated test systems are used which have what is commonly referred to as a test head having the electronic device to be tested that is delivered thereto. " The delivery of the electronic device to be tested is done by a so-called processing instrument. Since the size of the electronic device to be transported by the processing instrument is very small, there is a very high requirement for accurate positioning of the device relative to the contact point on the test head. The south position of the device relative to the precise positioning of the test head results in the relative requirement of the precise positioning of the processing instrument relative to the test head. This process ί both the instrument and the test head are particularly heavy instruments. For example, a test head typically weighs 600 kg. A processing instrument weighs approximately 800 kg. In order to partially adjust or position the test head, the test head is loaded on a so-called operator. A conventional operator has an operator frame on which the test head is placed and a plurality of support legs attached to the operator frame, the support legs being height-adjustably coupled to the operator frame by threaded rods. The height adjustment of the support foot allows the position of the test head to be adjusted vertically. Further, by adjusting the slight offset height of the opposite support feet, the 201003076 operator frame may be slightly tilted on the χ and y axes, that is, on the horizontal axis. In general, the test head needs to have a specific adaptation in spatial arrangement. For example, a user of a test system can use different types of processing instruments that must be interchanged from time to time depending on the type of electronic device to be tested. These different types of processing instruments require the operator to make different adjustments to the position of the test head. I: SUMMARY OF THE INVENTION 3 SUMMARY OF THE INVENTION Accordingly, there is a need for an operator for positioning a test head that includes a simple assembly. This goal can be achieved according to the operator of one of the scopes of the patent application. An operator for positioning a test head includes an operator frame having a test head placed thereon, and a plurality of support legs adjustably disposed on the operator frame to facilitate the operator frame Position adjustment in the height direction and/or in the polar axis direction of the horizontal axis with respect to a footprint. Each support leg includes a support leg, a height adjustment member for adjusting the height of the support leg relative to the operator frame, a substrate and a bearing disposed between the substrate and the support leg and assembled The support leg is movable at a low level of friction relative to the substrate. Preferably, at least one of the support legs includes an adjustment member coupled to the support leg and the substrate and used to adjust the position of the support leg relative to the substrate in a horizontal plane. In a preferred embodiment, all of the support legs are provided with an adjustment structure 201003076. In a preferred embodiment, the bearing is formed by a plurality of spheres of the same diameter disposed between the substrate and the support leg. According to another preferred embodiment, the height adjustment member is formed by a threaded rod that is coupled to the support leg, and the threaded rod is coupled to a configuration - a reverse thread on the operator frame. In a preferred embodiment, each support leg includes a cap attached to the substrate and covering at least the periphery of the support leg. Preferably, the adjusting member of a supporting leg is constituted by at least three adjusting screws. According to a further development, an adjustment member for a support leg includes two pairs of adjustment screws that are oppositely disposed relative to the support leg. Preferably, the two pairs of adjustment screws are offset from each other by an angle of 90° in a horizontal plane. Thus the support feet of the manipulator not only provide adjustment of the height of the manipulator and angular pivoting on the horizontal axis (ie the X and y axes), but also provide movement of the manipulator in the x/y plane (also It is a plane parallel to the trajectory, and the operator frame itself does not need to be equipped with its own mobile machine, such as adjusting the sliding gantry. BRIEF DESCRIPTION OF THE DRAWINGS Next, a preferred embodiment of the present invention will be described with reference to the accompanying drawings, in which: Figure 1 shows a schematic diagram of an operator for positioning a test head 5 201003076. #2图显不—Support foot - summary section representation. Figures 2, 2, and 9 show plan cross-sectional representations of the support feet having different horizontal positions. t 彳牙丨浙丨 The 4'6' 8 and 1〇 diagrams show the adjustment of the ball in Figure 3, 5, 7 and 9 with respect to the cutting foot - the cutting board inspection representation. [Embodiment ^ More detailed description of the example is shown in the figure 1 of the '1', all the labels are marked as -, and have the test head 2 placed thereon, and then; the icon label is marked as 2. The assembly and function of the gamma components of the operation including the operation of the dr test head and the operation of the operator frame will not require a separate description. The time frame ±' is provided with a plurality of specific embodiment wipes, which are provided with six cut feet 2 which are three or more. Each of the support feet runs with a threaded rod; the number of = extends in the vertical direction and merges with the lower end of the threaded rod of the operator frame 3 with the threaded rod 5 in the hexagonal nut, the six: the combination. The rod is a body-shaped and helps to rotate the stalk, the stomach of the screw and the internal thread of the thread. According to the schematic cross-sectional view of Fig. 2, the supporting foot plate 7 is connected to the _ ^ cutting foot containing - object 8. Each supporting brilliance further comprises a base plate 9, a dry wide-cylindrical attached ball of the same diameter 1 〇, and the plurality of materials are placed thereon - supporting the supporting foot plate 7 and helping the 201003076 to assist the supporting gorge 7 (four) in the "board" 9 low light horizontal movement. Although the bearing shown in this embodiment is composed of a plurality of n-diameter bearing ball ceramics, the (four) bearing can also be used to move the foot plate relative to the «plate in the Guante side (10). For example, a sliding quality coating can be provided between the support leg and the substrate to achieve the function of the bearing. , X substrate. There is again - a projection extending along its circumference, which is retained by the projection in the two regions immediately adjacent to the support foot. Attached to the substrate 9 is a cap 12 which is spatially spaced apart from the material, and which is slidably spaced apart from the bearing ball by a distance of 1 inch. Put it on the money cutting board _ 叩. 4 cover is attached to the top surface of the "hidden towel" 'the cap defines a cylindrical opening, the door opening is separated from the _ shape attachment 8 in the horizontal direction, which helps the cut Board 9 (4) (4) = movement in the direction. The ten-faced pre-attachment 8 on the top surface of the cylindrical appendage 8 facing the threaded rod 5 is provided with a columnar shape to prevent the operator from selecting the foot plate when the operator is opposite to the water side of the substrate 9 7 o'clock crush damage.

^員示的較佳具體實施例中,至少二個支撐% A =整搆件。缺_科較料中, 件包含兩對相對的調整敎16、17、18、19, = 釘在水平面上彼^ 周整螺 夂此‘置90,且母一調整螺釘一方面與該帽 7 201003076 盖12偶合,另— 偶合。 方面與該圓柱狀附加物8的圓柱狀外部輪廓 各邊支撐腳4也可能設有此種調整螺釘16、π、18、 如同可在第3、5、7及9圖中所看到,可藉由適當二 整該等調整螺釘16、17、18、19來調整該圓桂形附加物 移動(因而使該支擇腳板相對於該基板9而移動)。因此,/ 圖和苐4圖顯示一正中心的調整、第5圖和第6圖顯示—在第』 X方向上的移動、第7圖和第8圖顯示—在正y方向上正 動’及第9圖和第10圖顯示一在正x和正y兩者方向上的:: :。如同可在第6至1〇圖中所看到’該球體1〇藉僅相對 二,該切腳板7相對於該開W基如的 整 調整 由於則述之該等支撐腳4的構型,該操 2直方向上定位,且可在水平方向或…方向上定;= 因在騎作器框架3上之相對支標腳的不同水 :成該操作器在該X和y軸上的些微傾斜及因而的角;’ 正整且因而可達成該測試頭2在該X和y轴上的微傾斜及角度 ,由:適當的水平移動(其可由該調整螺釘m、 來界u可此拖轉該操作器】,因而樞轉該測試頭a。 対戶斤二調整該操作器的方法能夠藉由前述之支擇腳4的 =所元成,吨方㈣單、與畴操作_容且容易操 【啕式簡I說明】 201003076 第1圖顯示一用於定位一測試頭之操作器的一概要表 示圖。 第2圖顯示一支撐腳的一概要剖面表示圖。 第3、5、7及9圖顯示具有不同水平位置之該等支撐腳 的平面剖面表示圖。 第4、6、8及10圖顯示在圖3、5、7及9的調整中,軸承 球相對於該支撐腳之一支撐腳板的位置表示圖。In a preferred embodiment of the invention, at least two of the supports % A = the integral member. In the absence of the material, the piece contains two pairs of relative adjustments 敎 16, 17, 18, 19, = the nail is on the horizontal surface, and the whole screw is set to 90, and the mother-adjusting screw is on the one hand with the cap 7 201003076 Cover 12 coupling, another - coupling. Aspects and the cylindrical outer contour of the cylindrical appendage 8 can also be provided with support screws 4, π, 18, as can be seen in Figures 3, 5, 7 and 9 The movement of the round appendage is adjusted by appropriately adjusting the adjustment screws 16, 17, 18, 19 (thus moving the support plate relative to the substrate 9). Therefore, the / diagram and 苐4 diagrams show a positive center adjustment, and the fifth and sixth diagrams show - movement in the xth X direction, and Fig. 7 and Fig. 8 display - positive movement in the positive y direction. And Figures 9 and 10 show a :: : in both positive x and positive y directions. As can be seen in Figures 6 to 1 'the sphere 1 is only relative to two, the trimming of the cutting board 7 relative to the opening W is as described by the configuration of the supporting legs 4, The operation is positioned in the straight direction and can be determined in the horizontal direction or the direction of the ...; = different water due to the opposite leg on the rider frame 3: a slight tilt of the operator on the X and y axes And thus the angle; 'positive and thus the slight tilt and angle of the test head 2 on the X and y axes, by: appropriate horizontal movement (which can be dragged by the adjustment screw m, the boundary u can be dragged The operator] thus pivots the test head a. The method of adjusting the operator can be performed by the above-mentioned control of the foot 4, the ton square (four) single, and the domain operation _ easy操 说明 说明 2010 2010 2010 2010 201003076 Figure 1 shows a schematic representation of an operator for positioning a test head. Figure 2 shows a schematic cross-sectional representation of a support foot. Figure 9 shows a plan cross-sectional representation of the support feet with different horizontal positions. Figures 4, 6, 8 and 10 are shown in Figures 3, 5 and 7. In the adjustment of 9 and 9, the position of the bearing ball relative to one of the support legs is shown.

【主要元件符號說明】 1操作器 18調整螺釘 10球體 19調整螺釘 11突出物 2測試頭 12帽蓋 3操作器框架 13頂面 4支撐腳 14開口 5螺紋桿 15蓋環 7支撐腳板 16調整螺釘 8圓柱狀附加物 17調整螺釘 9基板 9[Main component symbol description] 1 Operator 18 adjustment screw 10 Ball 19 Adjustment screw 11 Projection 2 Test head 12 Cap 3 Operator frame 13 Top surface 4 Support foot 14 Opening 5 Threaded rod 15 Cover ring 7 Supporting foot plate 16 Adjustment screw 8 cylindrical appendage 17 adjustment screw 9 substrate 9

Claims (1)

201003076 七、申請專利範圍: 1. 一種用以定位一測試頭之操作件,包含: 一操作件框架,其具有放置於其上之該測試頭,及 複數個支撐腳,其可調整地置於操作件框架上,以使 得該操作件框架可相對於一軌跡在高度方向或在水平 軸之樞轉方向上作位置調整, 其中,各該支撐腳包含一支撐腳板、用於該支撐腳板 相對於該操作器框架之高度調整的一高度調整構件、 一基板及一轴承,該軸承放置於該基板和該支撐腳板 間且組配以使該支撐腳板能相對於該基板有低摩擦水 平的移動。 2. 如申請範圍中第1項之操作件,其中至少一支撐腳包含 調整構件,其調整構件與該支撐腳板及該基板偶合且使 用來在一水平面相對於該基板調整該支撐腳板的位置。 3. 如申請範圍中第2項之操作件,其中所有支撐腳皆包含 該調整構件。 4. 如申請範圍中第1項之操作件,其中該軸承係由複數個 相同直徑之球體所構成’該等球體係配置在該基板和該 支撐腳板之間。 5. 如申請範圍中第1項之操作件,其中該高度調整構件係 由一螺紋桿所構成,其係連結至該支撐腳板,且與一配 置在該操作器框架上之反向螺紋結合。 6. 如申請範圍中第1項之操作件,其中該支撐腳更包含一 帽蓋,該帽蓋連接至該基板且至少包覆該支撐腳板的周 10 201003076 圍。 其中一支撐腳的調整構 其中一支撐腳的調整構 螺釘是相對該支撐腳板 7. 如申請範圍中第3項之操作件, 件是包含至少三個調整螺釘。 8. 如申請範圍中第7項之操作件, 件包含兩對調整螺釘,該等調整 彼此相對。201003076 VII. Patent application scope: 1. An operating member for positioning a test head, comprising: an operating member frame having the test head placed thereon, and a plurality of supporting legs, which are adjustably placed Positioning the operating member frame such that the operating member frame is positionally adjustable in a height direction or in a pivoting direction of the horizontal axis, wherein each of the supporting legs includes a supporting leg for the supporting leg relative to A height adjusting member of the height of the operator frame, a substrate and a bearing disposed between the substrate and the supporting leg and assembled to enable the supporting leg to move at a low friction level relative to the substrate. 2. The operating member of item 1, wherein at least one of the support legs comprises an adjustment member coupled to the support leg and the substrate and adapted to adjust the position of the support leg relative to the substrate in a horizontal plane. 3. For the operating part of item 2 of the scope of application, all supporting feet include the adjusting member. 4. The operating member of item 1, wherein the bearing is formed by a plurality of spheres of the same diameter. The ball systems are disposed between the substrate and the support leg. 5. The operating member of item 1, wherein the height adjusting member is formed by a threaded rod coupled to the support leg and coupled to a reverse thread disposed on the operator frame. 6. The operating member of item 1, wherein the support leg further comprises a cap attached to the substrate and covering at least the circumference 10 201003076 of the support leg. The adjustment mechanism of one of the support legs is the support member of the support leg. 7. The operation member of item 3 in the scope of the application includes at least three adjustment screws. 8. As in the operating part of item 7 of the scope of application, the piece contains two pairs of adjusting screws, which are opposite each other. 9·如申請範圍中第8項之操作件,其中該兩對調整螺釘與 另一對在水平面上錯置9〇。夾角。 119. The operating piece of item 8 of the scope of application, wherein the two pairs of adjusting screws are offset from the other pair by 9 turns on a horizontal plane. Angle. 11
TW098119374A 2008-06-11 2009-06-10 Manipulator for positioning a test head TW201003076A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/EP2008/004685 WO2009149725A1 (en) 2008-06-11 2008-06-11 Manipulator for positioning a test head

Publications (1)

Publication Number Publication Date
TW201003076A true TW201003076A (en) 2010-01-16

Family

ID=40347830

Family Applications (1)

Application Number Title Priority Date Filing Date
TW098119374A TW201003076A (en) 2008-06-11 2009-06-10 Manipulator for positioning a test head

Country Status (2)

Country Link
TW (1) TW201003076A (en)
WO (1) WO2009149725A1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108612965B (en) * 2018-05-24 2020-03-17 芜湖贝浩机械科技有限公司 Foot placing cup for industrial automation equipment

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3849857A (en) * 1973-07-05 1974-11-26 M Murray Machine element alignment positioner
US4703911A (en) * 1985-10-21 1987-11-03 Rammell Ray L Concrete insertable retainer apparatus
DD255452A3 (en) * 1985-12-23 1988-04-06 Auerbach Werkzeugmaschf Veb DEVICE FOR ALIGNING BODIES ON A FOUNDATION
US5071097A (en) * 1990-03-21 1991-12-10 International Pool Player Association, Inc. Adjustment apparatus and method
DE10016530C1 (en) * 2000-04-03 2001-10-25 Microhandling Handhabungsgerae Test head handling device, has base frame provided with chassis open on side facing handler for fitting around its outside in docking position
DE10017507B4 (en) * 2000-04-07 2004-08-05 Man Roland Druckmaschinen Ag Heavy load alignment device and method for aligning heavy loads
DE20013480U1 (en) * 2000-08-04 2000-10-26 K & W Gesellschaft für Halbleitergeräteservice Applikations- und Automatisierungstechnik mbH, 85764 Oberschleißheim Semiconductor test device
US6871412B2 (en) * 2002-04-23 2005-03-29 Daniel Markeson Alignment tool and method for aligning large machinery

Also Published As

Publication number Publication date
WO2009149725A1 (en) 2009-12-17

Similar Documents

Publication Publication Date Title
TWI281573B (en) Display with multiple adjustable positions and angles
US20120168587A1 (en) Mount to accommodate an oblong medical instrument
CN102317799B (en) Antenna lifting device and electromagnetic wave measuring system
JP2006145344A (en) Detector support device
JP5954119B2 (en) Grinding wheel centering method in screw grinder and measuring device for centering
KR20120043620A (en) Ball head
JP5943099B1 (en) Roundness measuring device
JP2001059599A (en) Stand unit for magnification observation
CN103117444B (en) Arc guide rail angle adjustment testing frame for field strength antenna
CN208012526U (en) Adjustable portable measuring microscope
WO2019131859A1 (en) X-ray ct imaging device
WO2014170988A1 (en) Support device
JP5971445B1 (en) Roundness measuring device
TW201003076A (en) Manipulator for positioning a test head
JP6519784B2 (en) Roundness measuring device and its measuring object fixing jig
JP2010102344A (en) Magnification observation device and magnification observation method
WO2007072968A1 (en) X-ray ct apparatus
CN104020327A (en) Probe station for chip total dose irradiation test
US10260861B2 (en) Optical measuring system for magnifying displacement, optical measuring apparatus for magnifying displacement and measuring method thereof
CN100447482C (en) Rotary self locating device of lamp body
JP2010230471A (en) Stage posture adjusting apparatus
CN204353050U (en) Adjustable nozzle fixture
TWI645175B (en) Depth of field testing device
KR20120085947A (en) Fixing device of mounted specimen
TW201105944A (en) Impact testing device and method