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WO2009016763A1 - Ｔｆｔパネル基板検査装置 - Google Patents

Ｔｆｔパネル基板検査装置 Download PDF

Info

Publication number
WO2009016763A1
WO2009016763A1 PCT/JP2007/065188 JP2007065188W WO2009016763A1 WO 2009016763 A1 WO2009016763 A1 WO 2009016763A1 JP 2007065188 W JP2007065188 W JP 2007065188W WO 2009016763 A1 WO2009016763 A1 WO 2009016763A1
Authority
WO
WIPO (PCT)
Prior art keywords
tft panel
panel substrate
inner frame
electrode
frame
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2007/065188
Other languages
English (en)
French (fr)
Inventor
Tadanobu Shibabuki
Masayasu Suzuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to CN2007800534577A priority Critical patent/CN101680926B/zh
Priority to PCT/JP2007/065188 priority patent/WO2009016763A1/ja
Priority to JP2009525254A priority patent/JP5062444B2/ja
Publication of WO2009016763A1 publication Critical patent/WO2009016763A1/ja
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/302—Contactless testing
    • G01R31/305—Contactless testing using electron beams
    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G3/00—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
    • G09G3/006—Electronic inspection or testing of displays and display drivers, e.g. of LED or LCD displays

Landscapes

  • Liquid Crystal (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Testing Electric Properties And Detecting Electric Faults (AREA)

Abstract

ＴＦＴパネル基板検査装置は、電子線を照射する電子線発生源と、電子線の照射によりピクセルから発生した二次電子を検出する二次電子検出器と、複数のＴＦＴパネル基板上の電極に接触し基準電圧を印加する複数のプローブピンを備える電圧印加ユニットを備える。電圧印加ユニットは、ＴＦＴパネル基板の外周を囲むプローバフレームを有する。プローバフレームは、各ＴＦＴパネル基板を囲む少なくとも１つの内フレームと、内フレームを内側に囲む枠形状の外フレームとを備える。内フレームは、外フレームの内周壁に引っ張り荷重を付加して取り付けることによって、内フレームの自重やプローブピンの反力によるたわみを低減させ、面剛性を高める。これにより、各プローブピンとＴＦＴパネル基板の電極との接触圧力を均一化する。
PCT/JP2007/065188 2007-08-02 2007-08-02 Ｔｆｔパネル基板検査装置 Ceased WO2009016763A1 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
CN2007800534577A CN101680926B (zh) 2007-08-02 2007-08-02 Tft面板基板检查装置
PCT/JP2007/065188 WO2009016763A1 (ja) 2007-08-02 2007-08-02 Ｔｆｔパネル基板検査装置
JP2009525254A JP5062444B2 (ja) 2007-08-02 2007-08-02 Ｔｆｔパネル基板検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2007/065188 WO2009016763A1 (ja) 2007-08-02 2007-08-02 Ｔｆｔパネル基板検査装置

Publications (1)

Publication Number Publication Date
WO2009016763A1 true WO2009016763A1 (ja) 2009-02-05

Family

ID=40304009

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2007/065188 Ceased WO2009016763A1 (ja) 2007-08-02 2007-08-02 Ｔｆｔパネル基板検査装置

Country Status (3)

Country Link
JP (1) JP5062444B2 (ja)
CN (1) CN101680926B (ja)
WO (1) WO2009016763A1 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011043388A (ja) * 2009-08-20 2011-03-03 Shimadzu Corp 基板検査装置

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101356521B1 (ko) 2011-01-19 2014-01-29 엘지전자 주식회사 다중 안테나 무선 통신 시스템에서 사운딩 참조 신호 송신 방법 및 이를 위한 장치
TW201339991A (zh) * 2012-03-30 2013-10-01 rui-cheng Yan 車輛駕駛頭部移動偵測方法與系統
US10442680B2 (en) * 2016-06-14 2019-10-15 Mems Drive, Inc. Electric connection flexures
CN112014657A (zh) * 2019-05-31 2020-12-01 杨润善 使用平板显示器检查装置的z轴进给器来检查针接触压力的装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004245770A (ja) * 2003-02-17 2004-09-02 Shimadzu Corp 液晶基板検査装置
JP2005347458A (ja) * 2004-06-02 2005-12-15 Hioki Ee Corp 被検査基板保持機構

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004245770A (ja) * 2003-02-17 2004-09-02 Shimadzu Corp 液晶基板検査装置
JP2005347458A (ja) * 2004-06-02 2005-12-15 Hioki Ee Corp 被検査基板保持機構

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011043388A (ja) * 2009-08-20 2011-03-03 Shimadzu Corp 基板検査装置

Also Published As

Publication number Publication date
JP5062444B2 (ja) 2012-10-31
CN101680926A (zh) 2010-03-24
JPWO2009016763A1 (ja) 2010-10-14
CN101680926B (zh) 2012-02-29

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