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WO2009016763A1 - Tft panel substrate inspecting device - Google Patents

Tft panel substrate inspecting device Download PDF

Info

Publication number
WO2009016763A1
WO2009016763A1 PCT/JP2007/065188 JP2007065188W WO2009016763A1 WO 2009016763 A1 WO2009016763 A1 WO 2009016763A1 JP 2007065188 W JP2007065188 W JP 2007065188W WO 2009016763 A1 WO2009016763 A1 WO 2009016763A1
Authority
WO
WIPO (PCT)
Prior art keywords
tft panel
panel substrate
inner frame
electrode
frame
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2007/065188
Other languages
French (fr)
Japanese (ja)
Inventor
Tadanobu Shibabuki
Masayasu Suzuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to CN2007800534577A priority Critical patent/CN101680926B/en
Priority to PCT/JP2007/065188 priority patent/WO2009016763A1/en
Priority to JP2009525254A priority patent/JP5062444B2/en
Publication of WO2009016763A1 publication Critical patent/WO2009016763A1/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/302—Contactless testing
    • G01R31/305—Contactless testing using electron beams
    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G3/00—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
    • G09G3/006—Electronic inspection or testing of displays and display drivers, e.g. of LED or LCD displays

Landscapes

  • Liquid Crystal (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Testing Electric Properties And Detecting Electric Faults (AREA)

Abstract

A TFT panel substrate inspecting device includes an electron beam generating source for performing irradiation with an electron beam, a second electron detector for detecting a second electron generated from a pixel by the irradiation with the electron beam, and a voltage application unit composed of a plurality of probe pins for applying a reference voltage to an electrode on a plurality of TFT panel substrates by coming into contact with the electrode. The voltage application unit includes a prober frame surrounding the outer periphery of the TFT panel substrate. The prober frame includes at least one inner frame surrounding the TFT panel substrate and a rim-like outer frame surrounding the inner frame inwardly. The flexure of the inner frame generated by the weight of the inner frame and the reactive force of the probe pin is reduced and the surface rigidity is increased by attaching the inner frame to the inner periphery wall of the outer frame, applying a pulling load thereto. Consequently, contact pressure between each probe pin and the electrode of the TFT panel substrate is uniformized.
PCT/JP2007/065188 2007-08-02 2007-08-02 Tft panel substrate inspecting device Ceased WO2009016763A1 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
CN2007800534577A CN101680926B (en) 2007-08-02 2007-08-02 TFT panel substrate inspection device
PCT/JP2007/065188 WO2009016763A1 (en) 2007-08-02 2007-08-02 Tft panel substrate inspecting device
JP2009525254A JP5062444B2 (en) 2007-08-02 2007-08-02 TFT panel substrate inspection equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2007/065188 WO2009016763A1 (en) 2007-08-02 2007-08-02 Tft panel substrate inspecting device

Publications (1)

Publication Number Publication Date
WO2009016763A1 true WO2009016763A1 (en) 2009-02-05

Family

ID=40304009

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2007/065188 Ceased WO2009016763A1 (en) 2007-08-02 2007-08-02 Tft panel substrate inspecting device

Country Status (3)

Country Link
JP (1) JP5062444B2 (en)
CN (1) CN101680926B (en)
WO (1) WO2009016763A1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011043388A (en) * 2009-08-20 2011-03-03 Shimadzu Corp Substrate inspection device

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101356521B1 (en) 2011-01-19 2014-01-29 엘지전자 주식회사 Method for transmitting sounding reference signal in multiple antenna wireless communication system and apparatus therefor
TW201339991A (en) * 2012-03-30 2013-10-01 rui-cheng Yan Method and system for detecting head movement of vehicle driver
US10442680B2 (en) * 2016-06-14 2019-10-15 Mems Drive, Inc. Electric connection flexures
CN112014657A (en) * 2019-05-31 2020-12-01 杨润善 Apparatus for inspecting contact pressure of needle using z-axis feeder of flat panel display inspection apparatus

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004245770A (en) * 2003-02-17 2004-09-02 Shimadzu Corp LCD substrate inspection equipment
JP2005347458A (en) * 2004-06-02 2005-12-15 Hioki Ee Corp Substrate holding mechanism for inspection

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004245770A (en) * 2003-02-17 2004-09-02 Shimadzu Corp LCD substrate inspection equipment
JP2005347458A (en) * 2004-06-02 2005-12-15 Hioki Ee Corp Substrate holding mechanism for inspection

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011043388A (en) * 2009-08-20 2011-03-03 Shimadzu Corp Substrate inspection device

Also Published As

Publication number Publication date
JP5062444B2 (en) 2012-10-31
CN101680926A (en) 2010-03-24
JPWO2009016763A1 (en) 2010-10-14
CN101680926B (en) 2012-02-29

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