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WO2009008291A1 - カーボンナノチューブ成膜方法、成膜装置及びカーボンナノチューブ膜 - Google Patents

カーボンナノチューブ成膜方法、成膜装置及びカーボンナノチューブ膜 Download PDF

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Publication number
WO2009008291A1
WO2009008291A1 PCT/JP2008/061917 JP2008061917W WO2009008291A1 WO 2009008291 A1 WO2009008291 A1 WO 2009008291A1 JP 2008061917 W JP2008061917 W JP 2008061917W WO 2009008291 A1 WO2009008291 A1 WO 2009008291A1
Authority
WO
WIPO (PCT)
Prior art keywords
carbon nanotube
film
nanotube film
forming
forming apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2008/061917
Other languages
English (en)
French (fr)
Inventor
Takeshi Saito
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
National Institute of Advanced Industrial Science and Technology AIST
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by National Institute of Advanced Industrial Science and Technology AIST filed Critical National Institute of Advanced Industrial Science and Technology AIST
Priority to JP2009522589A priority Critical patent/JP4811690B2/ja
Priority to US12/667,830 priority patent/US20110014446A1/en
Priority to CN2008800209170A priority patent/CN101707904B/zh
Publication of WO2009008291A1 publication Critical patent/WO2009008291A1/ja
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B32/00—Carbon; Compounds thereof
    • C01B32/15—Nano-sized carbon materials
    • C01B32/158—Carbon nanotubes
    • C01B32/16—Preparation
    • C01B32/164—Preparation involving continuous processes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00—Manufacture or treatment of nanostructures

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Nanotechnology (AREA)
  • Materials Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Organic Chemistry (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Composite Materials (AREA)
  • Manufacturing & Machinery (AREA)
  • Carbon And Carbon Compounds (AREA)

Abstract

　本発明は、工業材料として有用な、単層カーボンナノチューブの膜を効率的、且つ大量・安価に低温で製造する方法及び装置を提供することを目的とし、流動気相ＣＶＤ法により原料源からカーボンナノチューブを合成し、合成されたカーボンナノチューブを反応管に連結するチャンバー内において直接基板に付着させて基板上に成膜させることを特徴としている。
PCT/JP2008/061917 2007-07-06 2008-07-01 カーボンナノチューブ成膜方法、成膜装置及びカーボンナノチューブ膜 Ceased WO2009008291A1 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2009522589A JP4811690B2 (ja) 2007-07-06 2008-07-01 カーボンナノチューブ成膜方法及び成膜装置
US12/667,830 US20110014446A1 (en) 2007-07-06 2008-07-01 Method for forming carbon nanotube film, film-forming apparatus, and carbon nanotube film
CN2008800209170A CN101707904B (zh) 2007-07-06 2008-07-01 碳纳米管成膜方法、成膜装置及碳纳米管薄膜

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007-178585 2007-07-06
JP2007178585 2007-07-06

Publications (1)

Publication Number Publication Date
WO2009008291A1 true WO2009008291A1 (ja) 2009-01-15

Family

ID=40228469

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/061917 Ceased WO2009008291A1 (ja) 2007-07-06 2008-07-01 カーボンナノチューブ成膜方法、成膜装置及びカーボンナノチューブ膜

Country Status (4)

Country Link
US (1) US20110014446A1 (ja)
JP (1) JP4811690B2 (ja)
CN (1) CN101707904B (ja)
WO (1) WO2009008291A1 (ja)

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20100260931A1 (en) * 2009-04-10 2010-10-14 Lockheed Martin Corporation Method and apparatus for using a vertical furnace to infuse carbon nanotubes to fiber
CN102602912A (zh) * 2012-03-15 2012-07-25 南昌大学 连续生产晶须状碳纳米管的合成装置
US8784937B2 (en) 2010-09-14 2014-07-22 Applied Nanostructured Solutions, Llc Glass substrates having carbon nanotubes grown thereon and methods for production thereof
US8815341B2 (en) 2010-09-22 2014-08-26 Applied Nanostructured Solutions, Llc Carbon fiber substrates having carbon nanotubes grown thereon and processes for production thereof
US8951632B2 (en) 2007-01-03 2015-02-10 Applied Nanostructured Solutions, Llc CNT-infused carbon fiber materials and process therefor
US8951631B2 (en) 2007-01-03 2015-02-10 Applied Nanostructured Solutions, Llc CNT-infused metal fiber materials and process therefor
US8969225B2 (en) 2009-08-03 2015-03-03 Applied Nano Structured Soultions, LLC Incorporation of nanoparticles in composite fibers
US9005755B2 (en) 2007-01-03 2015-04-14 Applied Nanostructured Solutions, Llc CNS-infused carbon nanomaterials and process therefor
US9138728B2 (en) 2012-02-22 2015-09-22 Mitsubishi Heavy Industries, Ltd. Catalyst for forming carbon nanotubes
JPWO2017057751A1 (ja) * 2015-10-01 2018-08-09 株式会社名城ナノカーボン カーボンナノチューブの製造装置および製造方法
US10138128B2 (en) 2009-03-03 2018-11-27 Applied Nanostructured Solutions, Llc System and method for surface treatment and barrier coating of fibers for in situ CNT growth
US10378104B2 (en) 2013-11-13 2019-08-13 Tokyo Electron Limited Process for producing carbon nanotubes and method for forming wiring

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20120189846A1 (en) * 2007-01-03 2012-07-26 Lockheed Martin Corporation Cnt-infused ceramic fiber materials and process therefor
US20100279569A1 (en) * 2007-01-03 2010-11-04 Lockheed Martin Corporation Cnt-infused glass fiber materials and process therefor
US20100272891A1 (en) * 2009-04-10 2010-10-28 Lockheed Martin Corporation Apparatus and method for the production of carbon nanotubes on a continuously moving substrate
US20100260998A1 (en) * 2009-04-10 2010-10-14 Lockheed Martin Corporation Fiber sizing comprising nanoparticles
JP5629756B2 (ja) * 2009-04-10 2014-11-26 アプライド ナノストラクチャード ソリューションズ リミテッド ライアビリティー カンパニーＡｐｐｌｉｅｄ Ｎａｎｏｓｔｒｕｃｔｕｒｅｄｓｏｌｕｔｉｏｎｓ， Ｌｌｃ 連続的に移動する基材上においてカーボン・ナノチューブを製造する装置及び方法
CA2779489A1 (en) * 2009-11-02 2011-05-05 Applied Nanostructured Solutions, Llc Cnt-infused aramid fiber materials and process therefor
JP6091237B2 (ja) * 2012-02-13 2017-03-08 国立大学法人大阪大学 高純度カーボンナノチューブ、その製造方法及びそれを用いた透明導電膜
CN102994980B (zh) * 2012-12-13 2015-01-14 苏州汉纳材料科技有限公司 高导电碳纳米管薄膜的制备方法及装置
CN104671230B (zh) * 2015-02-10 2016-10-05 中国科学院金属研究所 一种单壁碳纳米管薄膜的连续收集方法与专用装置
FI129565B (en) * 2019-04-24 2022-04-29 Canatu Oy Apparatuses and method for oriented deposition
CN117585669B (zh) * 2023-11-09 2026-01-13 宁波烯沃新材料科技有限公司 一种合成单壁碳纳米管的组合物、反应装置及制备方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2001016414A1 (en) * 1999-09-01 2001-03-08 Nikkiso Company Limited Carbon fibrous matter, production device of carbon fibrous matter, production method of carbon fibrous matter and deposit prevention device for carbon fibrous matter
JP2004149954A (ja) * 2002-10-30 2004-05-27 Nikkiso Co Ltd 金属／金属化合物被覆カーボンナノファイバー及びその製造方法
WO2006099156A2 (en) * 2005-03-10 2006-09-21 Tailored Materials Corporation Thin film production method and apparatus

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6683783B1 (en) * 1997-03-07 2004-01-27 William Marsh Rice University Carbon fibers formed from single-wall carbon nanotubes
US6835591B2 (en) * 2001-07-25 2004-12-28 Nantero, Inc. Methods of nanotube films and articles
CN1325372C (zh) * 2001-07-27 2007-07-11 萨里大学 碳纳米管的制备
JP2004307241A (ja) * 2003-04-04 2004-11-04 Ulvac Japan Ltd カーボンナノチューブの製造方法
US20050163696A1 (en) * 2004-01-28 2005-07-28 Uhm Han S. Synthesis of carbon nanotubes by making use of microwave plasma torch

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2001016414A1 (en) * 1999-09-01 2001-03-08 Nikkiso Company Limited Carbon fibrous matter, production device of carbon fibrous matter, production method of carbon fibrous matter and deposit prevention device for carbon fibrous matter
JP2004149954A (ja) * 2002-10-30 2004-05-27 Nikkiso Co Ltd 金属／金属化合物被覆カーボンナノファイバー及びその製造方法
WO2006099156A2 (en) * 2005-03-10 2006-09-21 Tailored Materials Corporation Thin film production method and apparatus

Cited By (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9573812B2 (en) 2007-01-03 2017-02-21 Applied Nanostructured Solutions, Llc CNT-infused metal fiber materials and process therefor
US9574300B2 (en) 2007-01-03 2017-02-21 Applied Nanostructured Solutions, Llc CNT-infused carbon fiber materials and process therefor
US8951631B2 (en) 2007-01-03 2015-02-10 Applied Nanostructured Solutions, Llc CNT-infused metal fiber materials and process therefor
US9005755B2 (en) 2007-01-03 2015-04-14 Applied Nanostructured Solutions, Llc CNS-infused carbon nanomaterials and process therefor
US8951632B2 (en) 2007-01-03 2015-02-10 Applied Nanostructured Solutions, Llc CNT-infused carbon fiber materials and process therefor
US10138128B2 (en) 2009-03-03 2018-11-27 Applied Nanostructured Solutions, Llc System and method for surface treatment and barrier coating of fibers for in situ CNT growth
EP2417288A4 (en) * 2009-04-10 2013-10-30 Applied Nanostructured Sols METHOD AND DEVICE FOR USING A VERTICAL OVEN FOR INFLUENCING CARBON NANOTONES INTO A FIBER
CN102388172A (zh) * 2009-04-10 2012-03-21 应用纳米结构方案公司 使用立式加热炉将碳纳米管并入纤维的方法和设备
JP2012523368A (ja) * 2009-04-10 2012-10-04 アプライド ナノストラクチャード ソリューションズ リミテッド ライアビリティー カンパニー 繊維にカーボン・ナノチューブを浸出するために垂直炉を用いるための方法及び装置
US20100260931A1 (en) * 2009-04-10 2010-10-14 Lockheed Martin Corporation Method and apparatus for using a vertical furnace to infuse carbon nanotubes to fiber
US8969225B2 (en) 2009-08-03 2015-03-03 Applied Nano Structured Soultions, LLC Incorporation of nanoparticles in composite fibers
US8784937B2 (en) 2010-09-14 2014-07-22 Applied Nanostructured Solutions, Llc Glass substrates having carbon nanotubes grown thereon and methods for production thereof
US8815341B2 (en) 2010-09-22 2014-08-26 Applied Nanostructured Solutions, Llc Carbon fiber substrates having carbon nanotubes grown thereon and processes for production thereof
US9138728B2 (en) 2012-02-22 2015-09-22 Mitsubishi Heavy Industries, Ltd. Catalyst for forming carbon nanotubes
CN102602912A (zh) * 2012-03-15 2012-07-25 南昌大学 连续生产晶须状碳纳米管的合成装置
US10378104B2 (en) 2013-11-13 2019-08-13 Tokyo Electron Limited Process for producing carbon nanotubes and method for forming wiring
JP2019064918A (ja) * 2015-10-01 2019-04-25 株式会社名城ナノカーボン カーボンナノチューブの製造装置および製造方法
JPWO2017057751A1 (ja) * 2015-10-01 2018-08-09 株式会社名城ナノカーボン カーボンナノチューブの製造装置および製造方法

Also Published As

Publication number Publication date
JPWO2009008291A1 (ja) 2010-09-09
CN101707904A (zh) 2010-05-12
US20110014446A1 (en) 2011-01-20
JP4811690B2 (ja) 2011-11-09
CN101707904B (zh) 2013-03-20

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