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WO2009004882A1 - 浮上装置及び浮上搬送装置 - Google Patents

浮上装置及び浮上搬送装置 Download PDF

Info

Publication number
WO2009004882A1
WO2009004882A1 PCT/JP2008/060181 JP2008060181W WO2009004882A1 WO 2009004882 A1 WO2009004882 A1 WO 2009004882A1 JP 2008060181 W JP2008060181 W JP 2008060181W WO 2009004882 A1 WO2009004882 A1 WO 2009004882A1
Authority
WO
WIPO (PCT)
Prior art keywords
levitation
plate
chamber
transportation device
fluid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2008/060181
Other languages
English (en)
French (fr)
Inventor
Tomoo Mizuno
Kai Tanaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
IHI Corp
Original Assignee
IHI Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by IHI Corp filed Critical IHI Corp
Priority to KR2020127000029U priority Critical patent/KR20120005263U/ko
Priority to CN200880021700A priority patent/CN101711217A/zh
Publication of WO2009004882A1 publication Critical patent/WO2009004882A1/ja
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • B65G49/065—Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G21/00—Supporting or protective framework or housings for endless load-carriers or traction elements of belt or chain conveyors
    • B65G21/20—Means incorporated in, or attached to, framework or housings for guiding load-carriers, traction elements or loads supported on moving surfaces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G37/00—Combinations of mechanical conveyors of the same kind, or of different kinds, of interest apart from their application in particular machines or use in particular manufacturing processes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
    • B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
    • B65G51/03—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs
    • H10P72/3202—
    • H10P72/36—
    • H10P72/78—
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/02—Controlled or contamination-free environments or clean space conditions

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Advancing Webs (AREA)

Abstract

　下面を有する対象物を流体により浮上させて搬送するための浮上搬送装置が開示されている。前記浮上搬送装置は、前記流体が通過するチャンバを区画する基部と、上面と、前記チャンバと連通して前記上面に開口した一以上のノズルとを有し、前記チャンバを覆うように配置されたプレートと、上端に向かって狭まる内面を有し、前記内面と前記プレートの前記上面とが、前記ノズルに連通して上方向に開放された空虚な空間を囲むべく、前記プレートの上方に配置された枠部材と、を備えた浮上装置と、前記流体を与圧して前記チャンバへ供給する流体供給装置と、前記対象物を搬送するための搬送装置と、を備える。
PCT/JP2008/060181 2007-06-29 2008-06-03 浮上装置及び浮上搬送装置 Ceased WO2009004882A1 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
KR2020127000029U KR20120005263U (ko) 2007-06-29 2008-06-03 부상 장치 및 부상 반송 장치
CN200880021700A CN101711217A (zh) 2007-06-29 2008-06-03 悬浮装置及悬浮输送装置

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007-173423 2007-06-29
JP2007173423A JP2009012872A (ja) 2007-06-29 2007-06-29 浮上ユニット及び浮上搬送装置

Publications (1)

Publication Number Publication Date
WO2009004882A1 true WO2009004882A1 (ja) 2009-01-08

Family

ID=40225938

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/060181 Ceased WO2009004882A1 (ja) 2007-06-29 2008-06-03 浮上装置及び浮上搬送装置

Country Status (5)

Country Link
JP (1) JP2009012872A (ja)
KR (2) KR20120005263U (ja)
CN (1) CN101711217A (ja)
TW (1) TW200914352A (ja)
WO (1) WO2009004882A1 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015522254A (ja) * 2012-05-16 2015-08-06 アルトリア クライアント サービシーズ インコーポレイテッドＡｌｔｒｉａ Ｃｌｉｅｎｔ Ｓｅｒｖｉｃｅｓ Ｉｎｃ． 新規なパターンを有する紙巻きタバコのラッパー

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6213951U (ja) * 1985-07-03 1987-01-28
JPH0359926U (ja) * 1989-10-13 1991-06-12
JP2000100896A (ja) * 1998-09-21 2000-04-07 Rohm Co Ltd ウェハ搬送装置およびウェハ搬送方法
JP2001010724A (ja) * 1999-06-28 2001-01-16 Watanabe Shoko:Kk 浮上搬送装置
JP2006182563A (ja) * 2004-12-01 2006-07-13 Ishikawajima Harima Heavy Ind Co Ltd 浮上装置および搬送装置

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6213951U (ja) * 1985-07-03 1987-01-28
JPH0359926U (ja) * 1989-10-13 1991-06-12
JP2000100896A (ja) * 1998-09-21 2000-04-07 Rohm Co Ltd ウェハ搬送装置およびウェハ搬送方法
JP2001010724A (ja) * 1999-06-28 2001-01-16 Watanabe Shoko:Kk 浮上搬送装置
JP2006182563A (ja) * 2004-12-01 2006-07-13 Ishikawajima Harima Heavy Ind Co Ltd 浮上装置および搬送装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015522254A (ja) * 2012-05-16 2015-08-06 アルトリア クライアント サービシーズ インコーポレイテッドＡｌｔｒｉａ Ｃｌｉｅｎｔ Ｓｅｒｖｉｃｅｓ Ｉｎｃ． 新規なパターンを有する紙巻きタバコのラッパー

Also Published As

Publication number Publication date
CN101711217A (zh) 2010-05-19
KR20100018612A (ko) 2010-02-17
TW200914352A (en) 2009-04-01
TWI355364B (ja) 2012-01-01
KR20120005263U (ko) 2012-07-18
JP2009012872A (ja) 2009-01-22

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