200914352 九、發明說明 【發明所屬之技術領域】 本發明’是關於使用壓縮空氣等之流體，使對象物上 ί子的上浮式裝置以及一面使之上浮一面進行搬運的上浮式 搬運裝置。 【先前技術】 使用壓縮空氣等之流體’ 一面使對象物上浮而一面進 行搬運的上浮式搬運裝置已被提案有數個。此等之上浮式 搬運裝置’在典型上’爲具備有複數個：各別具備可使空 氣等流體通過之噴出孔的上浮式裝置。噴出於上浮式裝置 與對象物之間的空氣等之流體產生壓力，對象物藉由此壓 力而上浮，並受到由搬運裝置產生的驅動力而被搬運。關 連之技術’係揭示於日本特開2 0 0 6 - 1 8 2 5 6 3號公報。 【發明內容】 本發明，其目的在於提供一種即便對精度的要求較低 ’且爲更簡略的構造，但能實現均等壓力產生的上浮式裝 置及上浮式搬運裝置。 依據本發明之第1樣態，提供一種藉由流體使具有下 表面的對象物上浮的上浮式裝置。上述上浮式裝置，係具 備有：將上述流體通過的氣室予以劃分的基部；及具有上 表面、以及與上述氣室連通而於上述上表面呈開口之一個 以上的噴嘴，並以覆蓋上述氣室之方式所配置的板塊；以 -4- 200914352 及具有朝向上端變狹窄的內面，並使上述內面與上述板塊 的上述上表面以可將連通於上述噴嘴而於上方呈開放的空 虛空間予以包圍之方式，配置在上述板塊之上方的框構件 〇 依據本發明之第2樣態，提供一種用以藉由流體使具 有下表面之對象物上浮而進行搬運之上浮式搬運裝置。上 述上浮式搬運裝置，具備有：上浮式裝置、流體供給裝置 、以及搬運裝置，上述上浮式裝置，係具備有：將上述流 體通過的氣室予以劃分的基部；及具有上表面、以及與上 述氣室連通而於上述上表面呈開口之一個以上的噴嘴，並 以覆蓋上述氣室之方式所配置的板塊；以及具有朝向上端 變狹窄的內面，並使上述內面與上述板塊的上述上表面以 可將連通於上述噴嘴而於上方呈開放的空虛空間予以包圍 之方式’配置在上述板塊之上方的框構件，上述流體供給 裝置’爲將上述流體施予壓力使之朝向上述氣室進行供給 ，上述搬運裝置，是用以搬運上述對象物。 較佳爲，上述噴嘴，是包含沿著由長方形、橢圓形、 以及長圓形所成的群組所選擇出之任一種形狀的周圍且隔 以間隔而排列之由圓形孔、矩形孔、以及狹縫所成的群組 所選擇出之任一種的貫通孔。 【實施方式】 參照圖面說明本發明之實施形態於以下。於本專利說 明書、申請專利範圍、以及圖面所說明之前方、後方、左 -5- 200914352 方、以及右方，係於圖面中分別以標記爲FF、FR、L、以 及R之方向來定義。有關此定義是爲了說明上的方便，本 發明並非受此所限定。 依據本發明之實施形態的上浮式搬運裝置1，是用以 讓對象物 W上浮於垂直方向並搬運於水平之搬運方向（ 例如後方FR )的裝置。作爲對象物W者，係整體性爲平 面狀之比較薄的物體，例如，適合於L C D (液晶顯示器） 所用的玻璃基板等之薄板。對象物W，並不是非得要整體 性爲平面狀才可以，只要其下表面之至少一部分爲平面狀 即可。爲了使其上浮，故例如利用諸如空氣等流體。 對象物W，若爲LCD所用之薄的玻璃基板等之必須 在無塵潔淨的環境下進行搬運之物品時，上述上浮式搬運 裝置1則要使用在無塵室內等之無塵潔淨的環境下。 上每式搬運裝置1，如第1圖所示，係具備有：延伸 於則後方向的基台3、在基台3上於前後方向成列的搬運 裝置5、以及在基台3上於前後方向及左右方向之兩方成 列的複數個上浮式裝置2 1。於上浮式裝置2 1，連結著沒 W ®示出之供給壓縮空氣的空氣供給裝置來作爲用以供給 流體之流體供給裝置。也可以利用氮氣或氬氣等其他氣體 '或是 '液體等其他流體來取代壓縮空氣。 I運3¾置5 ’在基台3上的左端及右端附近，分別具 有於封象物W的搬運方向成列的複數個輥子7。各輥子7 ’分別經由旋轉軸7 s與蝸輪1 1 一體地連結著，並藉由托 架9旋轉自如地被支持。將基台3貫通於前後方向之方式 -6- 200914352 地具備有一對驅動軸1 3，各驅動軸1 3具備有能夠 與各蝸輪11咬合的蝸桿15。於各驅動軸13的前端 聯軸器等可驅動地連結於馬達1 7的輸出軸1 7 s。藉 輥子7 ’受到馬達1 7的驅動力，而成爲能夠以相同 速度旋轉。如第2圖所示，上述各輥子7的上端部 上述上浮式裝置21的上表面些微地突出於上方地 同齊平於單一平面上之方式來配置。對象物w，即 上浮的狀態下，如第2圖所示，也可以接觸於須接 動力的輥子7。 馬達1 7並不必須要有一對，兩驅動軸1 3也可 鏈條等之適切的結合手段而連結於單一的馬達。又 以將能夠驅動的夾持器（clamper)或輸送帶等之 段應用在搬運裝置5中來取代輥子。 參照第3圖及第4圖，各個上浮式裝置21，係 基部23’各基部23’是夾介托架25而被固定在基 。各基部2 3，係於其內側，劃分有：使由空氣供給 供給的壓縮空氣暫時性通過的氣室（chamber ) 27 27係於其上部具有開口，平板狀的板塊29覆蓋著 。於板塊2 9的上方，相對於基部2 3固定有框構件 構件3 3係如圖示地亦可以將板塊2 9夾持在與基部 間，或是直接接觸於基部23亦可。 板塊29，係具有與氣室27連通，並於其上表 口的複數個噴嘴31。噴嘴31，如第5圖所示，爲 方形的周圍排列的圓形孔。亦可以適用橢圓形、或 驅動地 ，經由 此，各 的旋轉 ，僅比 ，以一 使在呈 受到驅 以經由 ’也可 搬運手 具備有 台3上 裝置所 °氣室 該開口 33。框 ;23之 面呈開 沿著長 是長圓 200914352 形等之其他的形狀來取代長方形。並且，取代圓形孔，也 可以適用矩形孔、或是如第6圖所示之貫通的狹縫。如第 5圖及第6圖所示，噴嘴31，從正上方觀察，是以配置排 列在圖面中比以兩點鎖線所示之框構件3 3之上部的開口 還位於外側，且比框構件之內面的下端還要內側爲佳。亦 即，於水平投影面上，噴嘴31是排列在框構件3 3之內面 之正投影的區域。藉此，從噴嘴31所噴出之壓縮空氣， 首先碰撞於框構件3 3的內面，然後沿著內面朝向上方被 引導。或者是，使噴嘴3 1分別朝向框構件3 3的內面、或 是朝向內側傾斜亦可。以上皆有助於使壓縮空氣朝向內側 推壓。 回到第3圖及第4圖，框構件33，係具有：具有開口 之接觸於板塊29 (或是基部23 )的下端、以及朝向大致 爲平面之頂上表面呈開口的上端，而爲上下的開口彼此連 通之長方形的框。其內面3 3 a爲傾斜，朝向上端變爲狹窄 。亦即，其下端是藉由接觸於板塊2 9 (或是基部2 3 )， 使內面3 3 a及板塊2 9的上表面，包圍於上方呈開放的空 虛空間，從上述噴嘴3 1所噴出的壓縮空氣，通過該空間 而能朝向上方噴出。此時，壓縮空氣被引導朝向上方變狹 窄的內面3 3 a而朝向內側被推壓。朝向內側之壓縮空氣的 流動’有助於在框部3 3與對象物W的下表面之間產生均 等的壓力。雖然傾斜愈大的話此一傾向愈爲顯著，不過由 於過大的話，框構件3 3之製作上有困難，因此傾斜例如 以4 5爲佳，但並非僅限於此。 -8- 200914352 較佳爲’複數個上浮式裝置21，其框構件33 表面彼此以成爲單一平面之方式一起齊平。此乃有 對象物W的上浮高度予以安定化。板塊2 9並不限 狀，如第7圖所示’亦可具備大致於中央的突起3 : 可殘留下框構件3 3包圍之空虛空間的方式，使突| 筒度比框構件3 3還低爲佳。 各上浮式裝置21的各氣室27，是藉由沒有圖 配管而相互地連通，然後進一步地連通於空氣供給 生氣供給裝置’經由配管並能夠控制地將壓縮空氣 各上浮式裝置2 1。作爲空氣供給裝置，雖以具備有 性地接連於換流器電源的送風機馬達、以及藉由送 達所驅動的送風機，爲適切，但並非受此所限定。 給裝置，亦可以具備：適宜讀取對象物W之資訊 裝置、或是控制空氣流量的控制器等。 當從空氣供給裝置將壓縮空氣朝向各氣室2 7 ’從各噴嘴3 1噴出壓縮空氣。所噴出的壓縮空氣， 、4、7圖所示，在框構件3 3劃分的空間與對象物 表面之間的空間，形成產生使上述壓縮空氣爲均等 空間S。藉由在具有均等壓力之空間s所支撐，對 象物W施予浮力而使之上浮。另一方面，藉由驅 的馬達1 7 ’使一對的驅動軸1 3同步地旋轉。藉由丨 與蝸桿1 5的咬合，驅動軸1 3的旋轉傳動給各輥子 搬入於上浮式搬運裝置1上的對象物W，藉由接觸 的輥子7而在上浮的狀態下被搬運。 之頂上 利於將 於平板 5。並以 S 35的 示出的 裝置。 供給至 :電氣 風機馬 空氣供 的讀取 供給時 如第3 W的下 壓力的 上述對 動一對 渦輪1 1 7。被 於旋轉 -9- 200914352 本實施形態’係不需要如同由島構件及包圍該島構件 的框構件所劃分出之狹窄狹縫的噴出孔，而僅藉由具有朝 向上方並具有狹窄內面的框構件便可以形成產生均等壓力 的空間S。而藉由狹縫之情形時，爲了使其寬幅均等，對 於島構件及框構件之兩者要有較高度的加工精度，且必須 精密地維持該等的位置關係。本實施形態，並不需要那麼 高的加工精度，也不需要島構件本身。 以上參照適合於本發明之實施形態進行了說明，但本 發明並不受上述實施形態所限定。具有本技術領域之通常 技術者，可依據上述所揭示的內容，藉由對實施形態之修 正乃至於變形來實施本發明。 〔產業上之可利用性〕 本發明，提供一種即便對精度的要求較低，且爲更簡 略的構造，但能實現均等壓力產生的上浮式裝置及上浮式 搬運裝置。 【圖式簡單說明】 第1圖，是本發明之實施形態之上浮式搬運裝置的部 分上視圖。 第2圖，是沿著第1圖之ΙΙ-Π線截取後的部分斷面 圖。 第3圖，是將本發明之實施形態之上浮式裝置予以橫 向方向剖斷後的斷面圖。 -10- 200914352 第4圖，是將上述上浮式裝置予以縱向方向剖斷後的 斷面圖。 第5圖，是對應於第3圖之V - V線之上述上浮式裝置 之板塊的上視圖。 第6圖，是對應於第3圖之V-V線之變形例之板塊的 上視圖。 第7圖，是其他之實施形態之上浮式裝置的斷面圖。 【主要元件符號說明】 1 :上浮式搬運裝置 3 :基台 5 :搬運裝置 7 :輥子 7 s :旋轉軸 9 :托架 1 1 :蝸輪 1 3 :驅動軸 1 5 :蝸桿 21 :上浮式裝置 2 3 :基部 2 5 :托架 27 :氣室 2 9 :板塊 3 1 :噴嘴 -11 - 200914352 33 ： 33a 35 : FF ： FR ： L ： R ： S ： w ： 框構件 :內面 突起 目IJ方 後方 左方 右方 壓縮空氣爲均等壓力的空間 對象物 -12-。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 [Prior Art] Several types of floating transport apparatuses that use a fluid such as compressed air to transport an object while floating up have been proposed. These floating transport apparatuses are typically provided with a plurality of floating devices each having a discharge hole through which a fluid such as air can pass. The fluid ejected from the floating device and the object and the like generates pressure, and the object is lifted by the pressure and is carried by the driving force generated by the conveying device. The related technology is disclosed in Japanese Laid-Open Patent Publication No. 2000-068. SUMMARY OF THE INVENTION An object of the present invention is to provide an upper floating type device and an upper floating type conveying device which can achieve uniform pressure generation even if the accuracy is required to be lower and the structure is simpler. According to a first aspect of the present invention, there is provided a floating apparatus which floats an object having a lower surface by a fluid. The floating device includes: a base portion that partitions a gas chamber through which the fluid passes; and a nozzle having an upper surface and one or more openings that communicate with the gas chamber and open to the upper surface, and cover the gas a slab disposed in a manner of a chamber; -4-200914352 and an inner surface that is narrowed toward the upper end, and the inner surface and the upper surface of the panel are emptied spaces that are open to the upper surface in communication with the nozzle According to a second aspect of the present invention, a frame member disposed above the above-described panel is provided, and a floating transport device for transporting an object having a lower surface by a fluid is provided. The floating transport apparatus includes: a floating apparatus, a fluid supply apparatus, and a transport apparatus, wherein the floating apparatus includes a base partitioning the air chamber through which the fluid passes; and having an upper surface and the a nozzle that communicates with the air chamber and has one or more nozzles that are open on the upper surface, and that is disposed to cover the air chamber; and an inner surface that is narrowed toward the upper end, and the upper surface and the upper surface of the panel The surface member is disposed on the frame member above the plate so as to surround the empty space that is open to the nozzle, and the fluid supply device applies pressure to the gas chamber to face the gas chamber. The carrier device is configured to transport the object. Preferably, the nozzle is a circular hole or a rectangular hole which is arranged around the circumference of any one of the shapes selected by a group consisting of a rectangle, an ellipse, and an oblong shape, and is arranged at intervals. And a through hole of any one selected by the group formed by the slit. [Embodiment] Embodiments of the present invention will be described below with reference to the drawings. The front, rear, left-5-200914352 side, and right side of this patent specification, the scope of the patent application, and the drawings are shown in the directions of FF, FR, L, and R, respectively. definition. This definition is for convenience of explanation, and the present invention is not limited thereto. The floating transport apparatus 1 according to the embodiment of the present invention is a device for transporting the object W in the vertical direction and transporting it in the horizontal transport direction (for example, the rear FR). The object W is a relatively thin object having a flat surface as a whole, and is, for example, a thin plate suitable for a glass substrate used for L C D (liquid crystal display). The object W does not have to be planar as long as it is planar, as long as at least a part of the lower surface thereof is planar. In order to make it float, for example, a fluid such as air is used. When the object W is a thin glass substrate used for an LCD and must be transported in a dust-free environment, the floating transport apparatus 1 is used in a dust-free environment such as a clean room. . As shown in Fig. 1, the above-described transporting device 1 includes a base 3 extending in the rear direction, a transport device 5 arranged in the front-rear direction on the base 3, and a base device 3 A plurality of floating devices 21 are arranged in two rows in the front-rear direction and the left-right direction. The floating device 2 1 is connected to an air supply device for supplying compressed air, not shown as W ® , as a fluid supply device for supplying a fluid. It is also possible to use other gases such as nitrogen or argon or 'liquids' to replace compressed air. In the vicinity of the left end and the right end of the base 3, a plurality of rollers 7 are arranged in the conveying direction of the image forming object W, respectively. Each of the rollers 7' is integrally coupled to the worm wheel 1 1 via a rotating shaft 7 s, and is rotatably supported by the bracket 9. The base 3 is penetrated in the front-rear direction. -6-200914352 includes a pair of drive shafts 1 3, and each drive shaft 13 is provided with a worm 15 that can be engaged with each of the worm wheels 11. The front end of each drive shaft 13 is coupled to the output shaft 1 7 s of the motor 17 in a driveable manner. The roller 7' is driven by the driving force of the motor 17 and can be rotated at the same speed. As shown in Fig. 2, the upper end portion of each of the above rollers 7 is disposed such that the upper surface of the floating device 21 slightly protrudes above the flush plane on a single plane. In the state where the object w, that is, the floating state, as shown in Fig. 2, it is also possible to contact the roller 7 to be powered. The motor 1 7 does not have to have a pair, and the two drive shafts 1 3 can also be coupled to a single motor by suitable coupling means such as a chain. Instead of the roller, a section of a clamper or a conveyor belt that can be driven is applied to the conveying device 5. Referring to Figs. 3 and 4, each of the floating devices 21, the base portions 23' of the base portions 23' are fixed to the base by the interposer bracket 25. Each base portion 2 3 is defined on the inner side thereof, and a chamber 27 27 for temporarily passing compressed air supplied from the air is provided with an opening in the upper portion thereof, and the flat plate 29 is covered. The frame member 3 3 is fixed to the base portion 2 3 above the plate member 29. The plate member 29 may be sandwiched between the base portion and the base portion 23 as shown in the figure. The block 29 has a plurality of nozzles 31 that communicate with the plenum 27 and have a surface thereof. The nozzle 31, as shown in Fig. 5, is a circular hole arranged around the square. It is also possible to apply an elliptical shape or a driving ground, whereby each of the rotations is only provided so that the opening 33 is provided in the chamber of the apparatus 3 by the hand. The frame; the surface of the 23 is opened along the length of the long circle 200914352 and other shapes to replace the rectangle. Further, instead of the circular hole, a rectangular hole or a slit penetrating as shown in Fig. 6 may be applied. As shown in Fig. 5 and Fig. 6, the nozzle 31 is viewed from the upper side, and is disposed on the outer side of the upper surface of the frame member 33 which is arranged in the drawing surface as indicated by the two-point lock line, and is larger than the frame. The inner side of the inner surface of the member is preferably the inner side. That is, on the horizontal projection surface, the nozzle 31 is a region which is arranged in the orthographic projection of the inner surface of the frame member 33. Thereby, the compressed air discharged from the nozzle 31 first collides with the inner surface of the frame member 33, and is guided upward along the inner surface. Alternatively, the nozzles 31 may be inclined toward the inner surface of the frame member 33 or toward the inner side. All of the above helps to push the compressed air toward the inside. Returning to FIGS. 3 and 4, the frame member 33 has a lower end that has an opening in contact with the plate 29 (or the base portion 23), and an upper end that is open toward the substantially planar upper surface, and is upper and lower. A rectangular frame in which the openings communicate with each other. The inner surface 3 3 a is inclined and becomes narrow toward the upper end. That is, the lower end of the inner surface 3 3 a and the upper surface of the plate 2 9 are surrounded by the upper surface of the plate 2 9 (or the base portion 2 3 ), and the open space is opened from the nozzle 31 The compressed air that is ejected can be ejected upward through the space. At this time, the compressed air is guided toward the inner side of the narrowed inner surface 3 3 a and pushed toward the inner side. The flow of compressed air toward the inside contributes to an equal pressure between the frame portion 3 3 and the lower surface of the object W. Although the inclination is greater as the inclination is larger, the frame member 3 3 is difficult to manufacture because it is too large. Therefore, the inclination is preferably, for example, 4 5 , but is not limited thereto. -8- 200914352 is preferably a plurality of floating devices 21 whose surface of the frame member 33 are flush with each other in a single plane. This is because the floating height of the object W is stabilized. The plate 2 9 is not limited, and as shown in FIG. 7 'may also have a protrusion 3 substantially at the center: a manner in which the empty space surrounded by the lower frame member 3 3 can remain, so that the protrusion is more than the frame member 3 3 Low is better. Each of the air cells 27 of each of the floating devices 21 communicates with each other without a drawing pipe, and then further communicates with the air supply gas supply device'. The compressed air is provided to each of the floating devices 21 via a pipe. The air supply device is preferably provided with a blower motor that is selectively connected to the power supply of the inverter and a blower that is driven by the delivery, but is not limited thereto. The feeding device may be provided with an information device suitable for reading the object W or a controller for controlling the air flow rate. Compressed air is ejected from each of the nozzles 3 1 toward the respective air chambers 2 7 ' from the air supply means. The compressed air to be ejected, as shown in Figs. 4 and 7, shows that the space between the space defined by the frame member 33 and the surface of the object is such that the compressed air is equal to the space S. By supporting the space s having an equal pressure, the object W is buoyed to float upward. On the other hand, the pair of drive shafts 1 3 are synchronously rotated by the driven motor 1 7 '. By the engagement of the 丨 with the worm 15 , the rotation of the drive shaft 13 is transmitted to the object W which is carried by the rollers on the floating transport device 1 and is carried by the contact roller 7 in a floating state. On top of it, it will benefit from the tablet 5. And the device shown in S 35. Supply to: Electric fan horse Air supply reading During supply, the above-mentioned pair of turbines 1 1 7 of the 3 W lower pressure. Rotary -9-200914352 This embodiment does not require a discharge hole as a narrow slit defined by the island member and the frame member surrounding the island member, but only by having an upward facing surface and having a narrow inner surface. The frame member can form a space S that produces equal pressure. In the case of a slit, in order to make the width uniform, it is necessary to have a high degree of processing precision for both the island member and the frame member, and it is necessary to precisely maintain the positional relationship. In this embodiment, the processing accuracy is not required, and the island member itself is not required. The above description has been made with reference to the embodiments of the present invention, but the present invention is not limited to the above embodiments. The present invention can be implemented by a person skilled in the art, based on the above-described disclosure, by modification or modification of the embodiment. [Industrial Applicability] The present invention provides an upper floating type device and an upper floating type conveying device which are capable of achieving uniform pressure generation even if the accuracy is low and the structure is simpler. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a partial top view of the floating transport apparatus in accordance with an embodiment of the present invention. Fig. 2 is a partial cross-sectional view taken along line Π-Π of Fig. 1. Fig. 3 is a cross-sectional view showing the floating device of the embodiment of the present invention taken along a lateral direction. -10- 200914352 Fig. 4 is a cross-sectional view showing the above-described floating device in a longitudinal direction. Fig. 5 is a top view of a panel of the above-described floating device corresponding to the V - V line of Fig. 3. Fig. 6 is a top view of a panel corresponding to a modification of the V-V line of Fig. 3. Fig. 7 is a cross-sectional view showing a floating device in another embodiment. [Description of main component symbols] 1 : Floating transport device 3 : Abutment 5 : Transport device 7 : Roller 7 s : Rotary shaft 9 : Bracket 1 1 : Worm gear 1 3 : Drive shaft 1 5 : Worm 21 : Floating device 2 3 : Base 2 5 : Bracket 27 : Air chamber 2 9 : Plate 3 1 : Nozzle-11 - 200914352 33 : 33a 35 : FF : FR : L : R : S : w : Frame member: Inner surface protrusion IJ The space on the left and right sides of the square is compressed by the space object of equal pressure -12-