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WO2009078284A1 - Angular velocity sensor - Google Patents

Angular velocity sensor Download PDF

Info

Publication number
WO2009078284A1
WO2009078284A1 PCT/JP2008/072037 JP2008072037W WO2009078284A1 WO 2009078284 A1 WO2009078284 A1 WO 2009078284A1 JP 2008072037 W JP2008072037 W JP 2008072037W WO 2009078284 A1 WO2009078284 A1 WO 2009078284A1
Authority
WO
WIPO (PCT)
Prior art keywords
detection
drive
portions
mass
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2008/072037
Other languages
French (fr)
Japanese (ja)
Inventor
Yoichi Mochida
Masaya Tamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Priority to KR20107013320A priority Critical patent/KR101149266B1/en
Priority to JP2009546214A priority patent/JP4929489B2/en
Publication of WO2009078284A1 publication Critical patent/WO2009078284A1/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5705—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis
    • G01C19/5712—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis the devices involving a micromechanical structure

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)

Abstract

Drive mass portions (4 to 7) are arranged above a surface of a substrate (2). The drive mass portions (4 to 7) are arranged symmetrically against a central point O. The drive mass portions (4 to 7) are connected to a detection mass portion (15) by using a drive beam (8) while a connection beam (9) is used for connection in the vicinity of support points (4B to 7B) of the drive mass portions (4 to 7). The detection mass portion (15) is fixed to a support portion (3) on the substrate (2) by using detection beams (16, 17). The drive mass portions (4 to 7) adjacent in the circumferential direction are oscillated with the opposite phases by oscillation generation portions (10 to 13). When angular velocities Ω1, Ω2 are applied in this state, the detection mass portion (15) is displaced to be oscillated in the thickness direction of the substrate (2) with respect to detection axes A and B as centers. Displacement detection units (18 to 21) detect the displacement of the detection mass portion (15) in the thickness direction of the detection mass portion (15).
PCT/JP2008/072037 2007-12-19 2008-12-04 Angular velocity sensor Ceased WO2009078284A1 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
KR20107013320A KR101149266B1 (en) 2007-12-19 2008-12-04 Angular velocity sensor
JP2009546214A JP4929489B2 (en) 2007-12-19 2008-12-04 Angular velocity sensor

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2007327502 2007-12-19
JP2007-327502 2007-12-19
JP2008265489 2008-10-14
JP2008-265489 2008-10-14

Publications (1)

Publication Number Publication Date
WO2009078284A1 true WO2009078284A1 (en) 2009-06-25

Family

ID=40795402

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/072037 Ceased WO2009078284A1 (en) 2007-12-19 2008-12-04 Angular velocity sensor

Country Status (4)

Country Link
JP (1) JP4929489B2 (en)
KR (1) KR101149266B1 (en)
TW (1) TW200942776A (en)
WO (1) WO2009078284A1 (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012508373A (en) * 2008-11-11 2012-04-05 フラウンホファー ゲセルシャフト ツール フェールデルンク ダー アンゲヴァンテン フォルシュンク エー．ファオ． Coriolis rotation speed sensor by micromechanics
JP2012177610A (en) * 2011-02-25 2012-09-13 Sony Corp Angular velocity sensor
EP2610588A3 (en) * 2011-12-28 2015-06-17 Maxim Integrated Products, Inc. Micro rate of rotation sensor and method for operating a micro rate of rotation sensor
JP2020064054A (en) * 2018-10-03 2020-04-23 株式会社村田製作所 Piezo Z-axis gyroscope

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101299731B1 (en) * 2012-05-29 2013-08-22 삼성전기주식회사 Angular velocity sensor

Citations (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5203208A (en) * 1991-04-29 1993-04-20 The Charles Stark Draper Laboratory Symmetrical micromechanical gyroscope
JPH0791958A (en) * 1993-09-27 1995-04-07 Canon Inc Angular velocity sensor
JPH1089968A (en) * 1996-09-12 1998-04-10 Murata Mfg Co Ltd Angular velocity sensor
JPH10239347A (en) * 1997-02-28 1998-09-11 Japan Aviation Electron Ind Ltd Motion sensor
JPH11183179A (en) * 1997-12-22 1999-07-09 Toyota Central Res & Dev Lab Inc Detector
US5955668A (en) * 1997-01-28 1999-09-21 Irvine Sensors Corporation Multi-element micro gyro
JP2000180177A (en) * 1998-12-15 2000-06-30 Mitsumi Electric Co Ltd Rotary vibration gyro
JP2000509812A (en) * 1996-10-07 2000-08-02 ハーン―シッカート―ゲゼルシャフト フア アンゲワンテ フォルシュンク アインゲトラーゲナー フェライン Rotational speed gyroscope preventing mutual interference between orthogonal primary and secondary vibrations
JP2004354109A (en) * 2003-05-27 2004-12-16 Matsushita Electric Works Ltd Rotational vibration type angular velocity sensor
JP2006153798A (en) * 2004-12-01 2006-06-15 Denso Corp Rotation-vibration type angular velocity sensor
JP2006250850A (en) * 2005-03-14 2006-09-21 Japan Aviation Electronics Industry Ltd Vibrating gyro
US20060272411A1 (en) * 2005-06-06 2006-12-07 Cenk Acar Torsional rate sensor with momentum balance and mode decoupling
JP2007271611A (en) * 2006-03-10 2007-10-18 Stmicroelectronics Srl Micro-electromechanical integrated sensor structure using rotational drive motion

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09196682A (en) * 1996-01-19 1997-07-31 Matsushita Electric Ind Co Ltd Angular velocity sensor and acceleration sensor
JP3999377B2 (en) * 1997-11-04 2007-10-31 日本碍子株式会社 Vibrator, vibratory gyroscope, linear accelerometer and measuring method of rotational angular velocity
JP4529203B2 (en) * 1999-08-05 2010-08-25 パナソニック株式会社 Angular velocity sensor
JP3627618B2 (en) 2000-04-19 2005-03-09 株式会社デンソー Angular velocity sensor
JP2002296038A (en) 2001-03-30 2002-10-09 Mitsubishi Electric Corp Angular velocity sensor
JP3870895B2 (en) 2002-01-10 2007-01-24 株式会社村田製作所 Angular velocity sensor
JP2005241500A (en) * 2004-02-27 2005-09-08 Mitsubishi Electric Corp Angular velocity sensor
JP4631992B2 (en) * 2008-01-07 2011-02-16 株式会社村田製作所 Angular velocity sensor

Patent Citations (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5203208A (en) * 1991-04-29 1993-04-20 The Charles Stark Draper Laboratory Symmetrical micromechanical gyroscope
JPH0791958A (en) * 1993-09-27 1995-04-07 Canon Inc Angular velocity sensor
JPH1089968A (en) * 1996-09-12 1998-04-10 Murata Mfg Co Ltd Angular velocity sensor
JP2000509812A (en) * 1996-10-07 2000-08-02 ハーン―シッカート―ゲゼルシャフト フア アンゲワンテ フォルシュンク アインゲトラーゲナー フェライン Rotational speed gyroscope preventing mutual interference between orthogonal primary and secondary vibrations
US5955668A (en) * 1997-01-28 1999-09-21 Irvine Sensors Corporation Multi-element micro gyro
JPH10239347A (en) * 1997-02-28 1998-09-11 Japan Aviation Electron Ind Ltd Motion sensor
JPH11183179A (en) * 1997-12-22 1999-07-09 Toyota Central Res & Dev Lab Inc Detector
JP2000180177A (en) * 1998-12-15 2000-06-30 Mitsumi Electric Co Ltd Rotary vibration gyro
JP2004354109A (en) * 2003-05-27 2004-12-16 Matsushita Electric Works Ltd Rotational vibration type angular velocity sensor
JP2006153798A (en) * 2004-12-01 2006-06-15 Denso Corp Rotation-vibration type angular velocity sensor
JP2006250850A (en) * 2005-03-14 2006-09-21 Japan Aviation Electronics Industry Ltd Vibrating gyro
US20060272411A1 (en) * 2005-06-06 2006-12-07 Cenk Acar Torsional rate sensor with momentum balance and mode decoupling
JP2007271611A (en) * 2006-03-10 2007-10-18 Stmicroelectronics Srl Micro-electromechanical integrated sensor structure using rotational drive motion

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012508373A (en) * 2008-11-11 2012-04-05 フラウンホファー ゲセルシャフト ツール フェールデルンク ダー アンゲヴァンテン フォルシュンク エー．ファオ． Coriolis rotation speed sensor by micromechanics
JP2012177610A (en) * 2011-02-25 2012-09-13 Sony Corp Angular velocity sensor
US9885576B2 (en) 2011-02-25 2018-02-06 Sony Semiconductor Solutions Corporation Angular velocity sensor
EP2610588A3 (en) * 2011-12-28 2015-06-17 Maxim Integrated Products, Inc. Micro rate of rotation sensor and method for operating a micro rate of rotation sensor
US9151611B2 (en) 2011-12-28 2015-10-06 Maxim Integrated Products, Inc. Micro rate of rotation sensor and method for operating a micro rate of rotation sensor
US9784580B2 (en) 2011-12-28 2017-10-10 Hanking Electronics Ltd. Micro rate of rotation sensor and method for operating a micro rate of rotation sensor
JP2020064054A (en) * 2018-10-03 2020-04-23 株式会社村田製作所 Piezo Z-axis gyroscope
US11280610B2 (en) 2018-10-03 2022-03-22 Murata Manufacturing Co., Ltd. Piezoelectric z-axis gyroscope

Also Published As

Publication number Publication date
TW200942776A (en) 2009-10-16
KR20100086059A (en) 2010-07-29
KR101149266B1 (en) 2012-07-20
JP4929489B2 (en) 2012-05-09
TWI379992B (en) 2012-12-21
JPWO2009078284A1 (en) 2011-04-28

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