TWI379992B - - Google Patents

Description

1379992 IX. Description of the Invention: [Technical Field] The present invention relates to an angular velocity sensor suitable for detecting an angular velocity of two axial directions using, for example, a vibrating body. [Prior Art] As an angular velocity sensor, it is known that a plurality of mass portions are provided on a substrate (for example, refer to Patent Document 3). In the patent reading, a configuration is disclosed in which four mass portions are provided along a circumference surrounding a center point on a substrate, and the four mass portions are disposed at positions symmetrical along two orthogonal axes. . In this case, the four mass portions drive the vibration in the circumferential direction. In this state, when the angular velocity around the vertical axis of the substrate acts, the four mass portions are displaced in the diameter direction by the Coriolis force. Therefore, the angular velocity sensor of Patent Document 1 detects the displacement in the radial direction of the four mass portions, thereby detecting the angular velocity around the axis of the workpiece. Patent Document 2 discloses a configuration in which four mass portions are provided along the circumference of a center point on a surrounding substrate, and the four mass portions are mounted on the front end of the beam extending from the center point. In this case, the four mass portions drive the vibration ' in the circumferential direction' and the mass portions adjacent in the circumferential direction vibrate in opposite directions to each other. In this state, when the angular velocity around the two axes parallel to the surface of the substrate acts, the four mass portions are displaced in the vertical direction (thickness direction) of the substrate by the Coriolis force. Therefore, the angular velocity sensor of Patent Document 2 detects the angular displacement around the two axes by detecting the displacement in the vertical direction of the four mass portions. 137I27.doc ^/9992 discloses a configuration in which two mass portions are arranged side by side in the lateral direction of the substrate, and a frame of a circle « is provided so as to surround the two mass portions. . In this case, the frame is connected to two masses. Further, the two mass portions are connected by a connecting device, and are vibrated in opposite directions in the vertical direction of the substrate. In this state, when the angular velocity acts on the axis of the side-by-side direction of the mass portion, the frame system rotates in the circumferential direction by the Coriolis force acting on the mass portion. Therefore, the angular velocity sensor of Patent Document 3 detects the displacement of the frame in the circumferential direction, thereby detecting the angular velocity around the respective axes. [Patent Document 1] Japanese Laid-Open Patent Publication No. 2000-1801 No. Hei.

[Problem to be Solved by the Invention] The angular velocity sensor of Patent Document 1 is configured to detect an angular velocity around one axis. Therefore, in order to detect the angular velocity around the two axes, it is necessary to use two angular velocity sensors, so that there is a problem that the manufacturing cost increases. On the other hand, the angular velocity sensor of Patent Document 2 is configured to detect the angular velocity around two axes. However, the angular velocity sensor detects the displacement of the mass portion caused by the Coriolis force, but the mass portion itself drives the vibration. Therefore, for example, when the displacement of the driving vibration is swayed in the detecting direction due to the processing unevenness of the mass portion, even if the angular velocity is not produced, the effect of the displacement is greater in the detecting portion of the displacement. Signal (noise signal). By using the difference between the phase of the signal generated by Coriolis force, the noise signal generated even at rest can be separated. However, the amplification rate before the synchronous detection by the noise signal is limited, and it is necessary to perform a large amplification in the latter half of the signal processing, so that the noise becomes relatively large. Moreover, due to the phase error generated by the synchronous detection, a large offset output accompanying the noise signal is generated. Further, the offset output causes a drift caused by a change in degree, and there is a problem that the detection accuracy of the angular velocity is lowered. Further, the angular velocity sensor of Patent Document 3 has a configuration in which the frame of the detecting portion is held stationary during the driving vibration, so that the driving vibration signal is not generated when it is stationary. However, since the mass portion is configured to drive vibration with respect to the vertical direction of the substrate, it is difficult to secure a large driving amplitude, and there is a tendency that the detection sensitivity of the angular velocity is lowered. Further, since the angular velocity around one axis is detected, it is necessary to use two angular velocity sensors in order to detect the angular velocity around the two axes, which also causes an increase in manufacturing cost. The present invention has been made in view of the above-described problems of the prior art, and an object of the present invention is to provide an angular velocity sensor capable of detecting an angular velocity around two axes with high precision and high sensitivity. [Means for Solving the Problems] In order to solve the above problem, the angular velocity sensor of the invention of claim 1 is configured by: a substrate; four driving mass portions that face each other with a gap therebetween, and Arranging at a position symmetrical with respect to the center of the core 37127.doc 1379992 - driving the beam, in a state parallel to the substrate, so that each of the driving materials 1 can vibrate around a fulcrum located on the center side In the manner of supporting the above-mentioned respective inner portions of the driving elements, the connecting beam is connected to the vicinity of the fulcrums of the four driving mass portions, and the driving mechanism is disposed on the side of the substrate, and the four driving qualities are provided. a portion vibrating in a circumferential direction surrounding the center portion around the fulcrum; a detecting mass portion connected to the four driving mass portions by using the driving beam; and a detecting beam provided on the φ detecting mass portion and the substrate And supporting the detecting mass portion so that the detecting mass portion can vibrate around two axes parallel to the substrate; and the displacement detecting mechanism, wherein the detecting portion The mass unit is vibrated about the two axes, a case where the detection unit mass shift in the thickness direction of the substrate of the detected bit. In the invention of claim 2, the four driving mass portions are disposed at equal intervals in a circumferential direction surrounding the center portion, and the detecting beam is disposed between adjacent two driving mass portions and along The above two axes are extended and stretched. In the invention of claim 3, the displacement detecting mechanism is disposed between the adjacent two driving mass portions, is disposed at a point symmetry with respect to the center portion, and is disposed opposite to the detecting mass portion. It is composed of four detection electrodes. According to the invention of claim 4, the detecting mass portion is provided with a cover plate that covers the detection mass with a gap between the cover and the four driving mass portions. The displacement detecting mechanism is disposed at a center portion. The position of the point is symmetrical, and is constituted by four detecting electrodes disposed opposite to the cover plate 137127.doc 1379992. In the invention of claim 5, the detecting mass portion is configured such that all or a part thereof has a thickness smaller than a thickness dimension of the driving mass portion, the driving beam, the connecting beam, and the detecting beam. According to the invention of claim 6, the monitoring means for monitoring the shift of the vibration direction of the driving mass portion is provided. In the invention of claim 7, the detecting beam is formed using a torsion support beam which is torsionally deformed when the detecting mass portion is displaced in the thickness direction of the substrate. In the invention of claim 8, the detecting beam is configured to be connected to the detecting mass portion and the substrate by using a stress reducing connecting portion, and the stress reducing connecting portion is reduced in torsion deformation to act on an end side of the detecting beam. The stress. [Effects of the Invention] According to the invention of claim 1, the four driving mass portions are disposed at positions that are point-symmetric with respect to the center portion. Therefore, the two driving mass portions sandwich the center portion and face each other, and the remaining The two drive mass units also miss the center portion and face each other. At this time, the two drive mass portions and the remaining two drive mass portions are disposed at different positions. Therefore, for example, when the substrate extends along the χγ plane parallel to the X axis and the Y axis, the two driving mass portions are arranged along one line (for example, the χ axis) via the center portion, and the remaining two driving qualities are The portion is disposed along the other line (for example, the x-axis) passing through the center portion, and the four driving mass portions vibrate in the circumferential direction surrounding the center portion. Therefore, for example, the two driving mass portions arranged along the x-axis are In the direction of the x-axis, 137127.doc 1379992 vibrates, and the two driving masses arranged along the Y-axis vibrate in the X-axis direction. On the other hand, the detecting mass portion is connected to the four driving mass portions ' using the driving beam, and the detecting mass portion is rotatable about two axes (detection axes A, Β) parallel to the substrate. In this case, the two axes of the detecting mass portion may be two axes (inclination axes) located between the X axis and the Y axis, and may be an X axis and a γ axis.

Further, if an angular velocity around one of the detection axes A is generated, the component around the X-axis direction of the angular velocity around the detection axis A acts on the driving mass portion vibrating in the Y-axis direction, corresponding to the component, The Coriolis force is generated in the z-axis direction (the thickness direction of the substrate). Similarly, the component around the γ-axis direction around the angular velocity of the detection axis A acts on the driving mass portion vibrating in the X-axis direction, and corresponding to the component, the Coriolis direction is generated in the Z-axis direction (thickness direction of the substrate). force. Further, if the angular velocity around the detection axis B of the other side is generated, the component around the axis direction of the angular velocity of the detection axis B acts on the driving mass portion vibrating in the γ pumping direction, corresponding to the component, resulting in Coriolis force toward the z-axis direction (thickness direction of the substrate). Similarly, the component around the γ-axis direction around the angular velocity of the detection axis B acts on the driving mass portion vibrating in the z-axis direction, and corresponding to the component, is generated in the Z-axis direction (the thickness direction of the base 'plate) Coriolis force. Then, the Coriolis force acting on the four driving mass portions is transmitted to the detecting mass portion via the driving beam, and therefore, the detecting mass portion is swung around the two detecting axes. Further, the driving mass portions adjacent in the circumferential direction are vibrated in opposite directions with each other, whereby the force which is opposed to the center portion and reversed in the Z-axis direction is 137127.doc 11 1379992 for detecting the mass portion. As a result, the detection mass portion vibrates around the two detection axes in accordance with the angular catch around the two detection axes acting on the χ_γ plane. Therefore, the displacement detecting means detects the displacement of the detecting mass portion in the thickness direction of the substrate, whereby the angular catch around the two detecting axes can be detected. Thereby, compared with the case where two sensors surrounding one axis are used, the manufacturing cost β can be reduced, and the four driving mass portions are disposed at positions that are point-symmetric with respect to the center portion, thus The driving mass portions adjacent to each other in the circumferential direction vibrate in the opposite direction (reverse phase), whereby the position of the center of gravity of the entire four driving mass portions can be fixed, and the circumferential direction generated by the entire four driving mass portions can be offset. Torque. In this case, since the connecting beam connects the vicinity of the fulcrums of the four driving masses, for example, even if machining unevenness occurs in the four driving masses, the respective driving masses vibrate in a state where the driving amplitude and the phase are uniform. . As a result, it is possible to reliably reduce the fluctuation or torque of the center of gravity of the entire four driving mass portions, and it is possible to prevent the driving vibration of the driving mass portion from affecting the substrate. Further, since the Coriolis force acting on the driving mass portion is transmitted to the detecting mass portion via the driving beam, the detecting mass portion does not drive the vibration and is displaced only by the Coriolis force. Therefore, for example, when the driving mass portion is vibrated in a state where the driving mass portion is shaken (tilted) in the vertical direction (thickness direction) of the substrate by uneven processing, the detecting mass portion is not shaken. Therefore, the displacement detecting mechanism can detect the displacement of the detecting mass portion without being affected by the shaking of the driving mass portion. Therefore, when the shift detecting mechanism outputs the shift detection signal, the temperature variation and the detection accuracy of the miscellaneous J37I27.doc •12· 1379992 signal, the offset output, and the output can be reduced. Further, since the driving mass portion vibrates in a state in which the 质量 柘 〜 / / / / / / , , , , , , 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 Therefore, the Coriolis force acting on the driving force can be increased, so that the displacement of the detecting mass portion and the crucible caused by the Coriolis force can be increased, and the detection sensitivity of the angular velocity can be improved.

According to the invention of claim 2, the four driving mass portions are arranged at equal intervals in the circumferential direction surrounding the center portion, and the detecting beam is located between the adjacent two driving core portions and along the two axes (detection axis) extend. Therefore, the detecting beam extending along one of the detecting axes can support the detecting mass portion such that the detecting mass portion can be displaced in the thickness direction of the substrate centering on the detecting beam (the fulcrum). Similarly, along the other side The detection axis extension detecting beam also supports the detection mass portion such that the detection mass portion can be displaced in the thickness direction of the substrate centering on the detection beam. As a result, the detection beam can

Thereby, the detection quality portion can be supported in such a manner that the sensor can vibrate around two detection axes parallel to the substrate. Further, the detecting beam is formed to be located between the adjacent two driving mass portions and extend along the two detecting axes. Therefore, the entire sensor can be miniaturized as compared with the case where the detecting beam is disposed on the outer peripheral side of the relatively driven mass portion. According to the invention of the third aspect, the displacement detecting mechanism is located between the adjacent two driving mass portions, is disposed at a position symmetrical with respect to the center portion, and is disposed opposite to the detecting mass portion. It is composed of detection electrodes. 137127.doc 2, when the angular velocity acts on two detection axes that are parallel to the substrate, the detection mass vibrates around the two detection axes parallel to the substrate and the displacement portion and the four detection electrodes in the thickness direction of the substrate The distance between the two varies depending on the angular velocity. Therefore, the angular velocity around the two detection axes can be detected by detecting the electrostatic capacitance between the continuous detecting electrode and the detecting mass portion. According to the invention of claim 4, a cover covering the detecting quality portion is provided, and the displacement detecting mechanism is constituted by four detecting electrodes provided opposite to the i-plate. Therefore, since the cover plate is displaced together with the detecting mass portion, the angular velocity around the two detecting axes can be detected by detecting the electrostatic capacitance between the cover plate and the detecting electrode. Further, the cover plate may be disposed between the driving mass portion and the detecting electrode. Thereby, since the influence of the driving mass portion can be blocked by the cover plate, the detecting electrode can be extended to a position facing the driving mass portion. As a result, the area of the detecting electrode can be increased, and the detection sensitivity of the angular velocity can be improved. According to the invention of claim 5, the detection mass portion is configured such that all or a part of the thickness dimension is thinner than the thickness of the driving mass portion, the driving beam, the connecting beam, and the detecting beam, so that the detecting quality portion can be reduced. The mass ' thereby increasing the amount of displacement of the proof mass caused by the Coriolis force. By this, the detection sensitivity of the angular velocity can be improved. According to the invention of claim 6, since the monitoring means for monitoring the displacement of the vibration direction of the driving mass portion is provided, the monitoring mechanism can be used to detect the vibration amplitude and phase of the driving mass portion. Therefore, the vibration-shocking circuit can use the output signal of the monitoring mechanism as the reference signal' to stabilize the resonance state of I37127.doc -14-1379992. Moreover, the angular velocity detecting circuit can also use the output signal of the monitoring mechanism as the reference signal, so that the (4) (4) quality can be correctly synchronized in the vibration state. According to the invention of claim 7, the detecting beam is formed by using the torsion support beam to form a torsional deformation when the torsion support beam is displaced in the thickness direction of the substrate by the detecting mass portion, for example, by the vertical of the substrate In the direction, Shi Xicai (4) is reinforced and the support beam is transferred to the beam so that it can be easily processed. Further, the spring constant of the torsion support beam fluctuates in proportion to the third power of the width dimension, but this is the same as the drive beam and the connection beam. Therefore, the processing unevenness of the i-width dimension can be reduced to affect the resonance frequency difference between the driving mode and the detection mode, thereby reducing the sensitivity unevenness of the sensor. According to the invention of claim 8, the detecting beam is connected to the detecting mass portion and the substrate by using the stress reducing connecting portion. Here, for example, when a torsion support beam having a long plate shape is used to constitute the detection beam, and the both ends of the detection beam are fixed, the stress acting on the fixed portion hinders the torsional deformation of the detection beam, thus When the thickness dimension changes, the change in the resonance frequency corresponding to the amount of change in the thickness dimension becomes large. As a result, there is a tendency that the processing unevenness has a large influence on the resonance frequency difference between the drive mode and the detection mode. In contrast, in the present invention, the detecting beam is connected to the detecting mass portion and the substrate by using a stress reducing connecting portion having a degree of freedom in the longitudinal direction of the detecting beam. Therefore, when the detecting beam is subjected to torsional deformation, the end 4 side of the detecting beam can be displaced in the longitudinal direction thereof, and therefore, the change or stress acting on both end sides of the detecting body can be reduced. Thereby, the processing of the thickness dimension can be reduced. 137127.doc 15 137993⁄4 The unevenness affects the resonance frequency difference between the driving mode and the detection mode, thereby reducing the sensitivity unevenness of the sensor. [Embodiment] Hereinafter, an angular velocity sensor according to an embodiment of the present invention will be described in detail with reference to the accompanying drawings. First, Fig. 1 to Fig. 9 show an angular velocity sensor 第 according to the first embodiment. In the figure, the angular velocity sensor 1 is composed of a substrate 2, driving mass portions 4 to 7, a driving beam 8, a connecting beam 9, vibration generating portions 10 to 13, a detecting mass portion 15, detecting beams 16, 17, and shifting. The detection units 18 to 21 and the vibration monitoring units 22 and 23 are configured. The substrate 2 forms the basis of the angular velocity sensor 丨. Further, the substrate 2 is formed in a square shape of a square shape by, for example, a glass material, and horizontally extends along, for example, the X-axis and the γ-axis directions of the X-axis, Y-axis, and z-axis directions of the parent. Further, on the substrate 2, for example, an electrically conductive low-resistance crucible material or the like is etched to form the support portion 3, the drive mass portions 4 to 7, the drive beam 8, the connection beam 9, and the detection mass portion 15, The beams 16, 17 and the like are detected. The support portion 3 is provided on the surface of the substrate 2. Further, the support portion 3 is located on the outer edge side of the base plate 2 and formed in a frame shape. Then, inside the support portion 3, the drive mass portions 4 to 7, the drive beam 8, the connection beam 9, the detection mass portion 15, and the detection beams 16, 17 are provided in a state where the substrate 2 is floated, and the support portion is passed through the support portion. 3 is connected to the ground. At this time, the movable side drive electrodes 10A to 13A of the vibration generating units 1A to 13 and the movable side detecting electrodes 18A to 21A of the displacement detecting portions 18 to 2A are also connected to the ground via the support portion 3. On the other hand, the fixed side drive electrodes 10B to 13B of the vibration 137127.doc -16 - 1379992 motion generating portions 10 to 13 are connected to the fixed side detecting electrodes 丨 8β to 21B of the electrode supporting portion 14 'shift detecting portions 18 to 21 The detection lead portion 24 is connected via the wiring on the substrate 2. The driving mass portions 4 to 7 are opposed to the surface of the substrate 2 with a gap therebetween, and are disposed at a point symmetry with respect to the center portion (center point 〇). . Further, the drive mass units 4 to 7 are every 90. The X-axis side driving mass portions 4 and 5 are disposed along the χ axis, and are sandwiched with the center point 0 so as to face each other at equal intervals in the circumferential direction around the center point 》. On the other hand, the yaw axis side driving mass portions 6, 7 are arranged along the γ axis orthogonal to the X axis, and sandwich the center point Ο to face each other. Further, the driving mass portions 4 to 7 are formed, for example, in a substantially triangular shape. Further, the apex portion of the triangle in the driving mass portions 4 to 7 is located on the center point side (inner diameter side) with respect to the diameter direction. Further, the apex portions (inner diameter side portions) of the driving mass portions 4 to 7 are provided with connecting portions 4a to 7b that protrude toward the inner diameter side. Further, the intermediate portions of the connecting portions 4A to 7A in the longitudinal direction are the fulcrums 4B to 7B when the driving mass portions 4 to 7 drive the vibration. The drive beams 8 are respectively disposed on both sides in the circumferential direction of the respective drive mass portions 4 to 7, and are connected between the drive mass portions 4 to 7 and the following detection mass portions 丨5. Therefore, two drive beams 8 are provided for each of the drive mass units 4 to 7, and a total of eight drive beams 8 are provided. Further, each of the drive beams 8 extends along the sides of the circumferential sides of the drive mass portions 4 to 7. At this time, the two drive beams 8 located on both sides in the circumferential direction of the drive mass portion 4 extend radially around the fulcrum 4B. Similarly, the other drive beams 8 are also radially extended around the fulcrums 5b to 7b. Thereby, the drive beam 8 can be flexibly deformed with respect to the circumferential direction. 137127.doc -17- 1379992 Further, the drive beam 8 is formed in a state in which it is folded back in the middle in the longitudinal direction, and is formed to be expandable and contractible with respect to the circumferential direction. Thereby, the driving beam 8 supports the driving mass portions 4 to 7 in such a manner as to be able to vibrate around the fulcrums 4B to 7B on the side of the center point in a state parallel to the substrate 2. The connecting beam 9 connects the vicinity of the fulcrums 4B to 7B of the driving mass portions 4 to 7 to each other. Specifically, the connecting beam 9 is formed in a frame shape of a substantially octagonal shape, for example, and is 90. The position on the four sides of the interval arrangement is connected to the intermediate position of the connection portions 4A to 7A. At this time, the portions of the connecting portions 4 to 7 that are in contact with the connecting beam 9 serve as the fulcrums 4b to 7b of the driving mass portions 4 to 7. Then, when the driving mass portions 4 to 7 drive the vibration, the entire connecting beam 9 is deflected and deformed. Thereby, the amplitude and phase of the connecting beam 9 are adjusted to match the driving amplitude and phase of the respective driving mass portions 4 to 7. Further, the connecting beam 9 is not limited to an octagonal shape, and may be formed in other polygonal shapes. In this case, the connecting beam 9 is preferably formed into a polygonal shape having an angle of a multiple of four, such as a quadrangular shape or a twelve-corner shape. Further, the connecting beam 9 is not limited to an angular shape, and may have a circular shape. The vibration generating units 10 to 13 constitute driving mechanisms for driving the driving mass units 4 to 7 to vibrate. Further, the vibration generating units 1A to 13 are fixed by the movable side drive electrodes 10A to 13A attached to the front ends of the connection portions 4A to 7A of the drive mass portions 4 to 7 and the electrode support portions 14 mounted on the substrate 2. The side drive electrodes 10B to 13B are configured. At this time, the electrode supporting portion 丨4 is located near the center point , and is driven by the mass. Further, the electrode supporting portion 14 is fixed to the substrate 2, and fixed side driving electrodes 137127.doc • 18-1379992 10B to 13B protruding toward the driving mass portions 4 to 7 are provided around the electrode supporting portion 14. Further, the movable side drive electrodes 1A and 11A are configured by, for example, comb-shaped electrodes including a plurality of electrode plates arranged at intervals in the γ-axis direction, and the electrode plates are parallel to each other along the X-axis direction. extend. The fixed-side driving electrode 10'' is also constituted by, for example, a comb-shaped electrode including a plurality of electrode plates arranged at intervals in the γ-axis direction, and the electrode plates extend in parallel with each other along the X-axis direction. Further, the electrode plates of the movable side drive electrodes 1 and 11 and the electrode plates of the fixed side drive electrodes 10 and 11 are meshed with each other to form a parallel plate electrode. Therefore, if the same driving signal (voltage signal, etc.) is applied to the fixed side driving electrodes 10Β, 丨1Β, the movable side driving electrodes 10Α, 11Α and the fixed side driving electrodes 10Β, 11] 会 will face the γ axis. The direction generates a driving force F F (electrostatic force). Further, the electrode plate of the movable side drive electrode 1 〇 A is disposed on one side in the γ-axis direction with respect to the electrode plate of the fixed-side drive electrode 10B. On the other hand, the electrode plate of the movable side drive electrode 11A is disposed on the other side (opposite side) of the Y-axis direction with respect to the electrode plate of the fixed side drive electrode 11b. Therefore, the driving force F1 and the driving force F2 act in opposite directions (inverse phase) from each other along the Y-axis direction. On the other hand, the movable side drive electrodes 12A and 13A are configured by, for example, comb-shaped electrodes including a plurality of electrode plates arranged at intervals in the X-axis direction, and the electrode plates are parallel to each other along the Y-axis direction. extend. The fixed side drive electrodes 12B and 13B are also constituted by, for example, comb-shaped electrodes including a plurality of electrode plates arranged at intervals in the X-axis direction, and the 137127.doc 1379992 electrode plates are parallel to each other along the γ-axis direction. Extend the ground. Further, the electrode plates of the movable side drive electrodes 丨2, 13 and the electrode plates of the fixed side drive electrodes 12B, 13B are meshed with each other with a gap therebetween, and constitute a parallel plate electrode. As a result, when the same driving signal is applied to the fixed side driving electrodes 12B and 13B, the driving force is generated in the X-axis direction between the movable-side driving electrodes 12 A and 13 A and the fixed-side driving electrodes 12B and 13B. The electrostatic force of F3 and F4. Further, the electrode plate of the movable side drive electrode 12A is disposed on one side in the X-axis direction with respect to the electrode plate of the fixed side drive electrode 12B. On the other hand, the electrode plate of the movable side drive electrode 13A is disposed on the other side (opposite side) in the X-axis direction with respect to the electrode plate of the fixed side drive electrode 13B. Therefore, the driving force F3 and the driving force F4 act in opposite directions (inverting positions) in the X-axis direction. Further, when the electrode plates of the fixed side drive electrodes 10B and 11B are used as the reference, the electrode plates of the movable side drive electrodes 10A and 11A are arranged at a clockwise position with respect to the circumferential direction around the center point 0, for example. On the other hand, when the electrode plates of the fixed side drive electrodes 12B and 13B are used as a reference, the electrode plates of the movable side drive electrodes 12A and 13A are disposed, for example, counterclockwise with respect to the circumferential direction around the center point 。. Thereby, when the vibration generating portions 10, 11 and the vibration generating portions 12, 13 adjacent to each other generate the driving forces FI, F2 and the driving forces F3, F4, the driving forces FI, F2 and the driving forces F3, F4 are in the circumferential direction. Reverse each other. Further, the movable side drive electrodes 10A to 13A are disposed at the fulcrums 4B to 7B of the both ends of the connection portions 4A to 7A at positions 137127.doc -20-1379992 on the opposite side of the drive mass portions 4 to 7. Therefore, the driving forces F1 to F4 act on the driving mass portions 4 to 7 in a direction opposite to the direction in which the movable side driving electrodes 1A to 138 are displaced. The detecting mass unit 15 is connected to the driving mass units 4 to 7 by using the driving beam 8. Further, the detecting mass portion 15 (vibrating body) is formed in a square frame shape, for example, and surrounds the outer peripheral sides of the driving mass portions 4 to 7. Further, the detecting mass portion 15 includes four inner protruding portions 15A to 15D that protrude toward the inner peripheral side along the diagonal line. Here, the inner protruding portions 15A to 15D are formed in a quadrangular plate shape, for example, and φ is disposed between the driving mass portions 4 to 7, respectively. Therefore, the inner protruding portion 15 is disposed between the driving mass portions 4, 6, and the inner protruding portion 15 is disposed between the driving mass portions 5, 7. Similarly, the inner protruding portion 15 is disposed between the driving mass portions 4 and 7, and the inner protruding portion 15D is disposed between the driving mass portions 5 and 6. Further, the detecting mass portion 15 is centered on the center point 而The shape of the point symmetry. Then, the proof mass portion 15 is formed as a rigid body and is opposed to the surface of the substrate 2 with a gap therebetween. The detecting beams 16, 17 are disposed between the detecting mass portion 15 and the substrate 2, and are along the Φ The two detection axes (the detection axis A and the detection axis B) which are parallel to the substrate 2 (the Χ-Υ plane) extend. Further, the detection beams 16 and 17 are formed into a plate shape having a width dimension of § The torsion support beam is formed, and the torsion support beam is deformed when the proof mass portion 15 is displaced in the thickness direction of the substrate 2. Specifically, the first detection beam 16 is located at, for example, the drive mass portions 4, 7 and the drive. Between the texture portions 5 and 6, and extending along the detection axis a inclined with respect to the axis 45. Further, the second detection beams 16 are respectively disposed inside the inner protrusions 15B. Further, the detection beam is The two ends are set separately at 137127.doc 1379992 with The connecting beam 16A extending in the direction in which the beam 16 is orthogonal (detecting the direction of the axis B) is detected. Therefore, one end side of the detecting beam 16 is connected to the detecting mass portion 15 via the connecting beam 16A, and the other end side of the detecting beam 16 is via The connecting beam 16A is connected to the support portion 3 » On the other hand, the second detecting beam 17 is located between, for example, the driving mass portions 4, 6 and the driving mass portions 5, 7 and is inclined at -45 with respect to the X-axis. Further, the second detecting beam 17 is disposed inside the inner protruding portions 丨5〇 and 15D, respectively, and further, on both end sides of the detecting beam 17, is disposed in a direction orthogonal to the detecting beam 17 ( The connecting beam 17 A extending in the direction of the axis A is detected. Therefore, one end side of the detecting beam 17 is connected to the detecting mass portion 15 via the connecting beam 丨 7 A, and the other end side of the detecting beam 17 is connected via the connecting beam 丨 7 A The first detecting beam 16 is subjected to torsional deformation (torsional vibration) when the detecting mass unit 15 vibrates (shakes) around the detecting axis A. On the other hand, the second detecting beam 17 is used. Connecting the beam 17 A to the detecting mass portion 15 and the supporting portion 3. Therefore, the deflection of the connecting beam 17A allows the detecting mass portion 15 to vibrate around the detecting axis A. Similarly, when the detecting mass portion 15 vibrates (shakes) around the detecting axis B, The second detecting beam 17 is subjected to torsional deformation (torsional vibration). On the other hand, the first detecting beam 16 is connected to the detecting mass portion 15 and the supporting portion 3 by using the connecting beam 16A. Therefore, the connecting beam 16A is flexibly deformed. The detection quality portion 15 is allowed to vibrate around the detection axis B. Thereby, the detection beams 16 and 17 are supported by the detection quality portion 15 in a state in which the detection axis eight orthogonal to each other and the detection b vibration are detected. . 137127.doc -22- Then, when the angular velocity 围绕 around the detection axis A acts, the component around the X-axis direction of the angular velocity Ω1 acts on the driving mass portion 4, 5' vibrating in the γ-axis direction corresponding to the The composition generates a Coriolis force Fax in the Z-axis direction (the thickness direction of the substrate). At this time, the component around the Y-axis direction in the angular velocity Ω1 acts on the driving mass portions 6, 7 vibrating in the X-axis direction, and the Coriolis force Fay which is generated in the Z-axis direction (the thickness direction of the substrate) corresponding to the component ' . As a result, the detection mass portion 丨5 vibrates in the z-axis direction at both end sides in the detection axis B direction, for example, centering on the detection axis a. On the other hand, when the angular velocity Ω2 around the detection axis B acts, the component around the X-axis direction of the angular velocity Ω2 acts on the driving mass portions 4, 5 vibrating in the γ-axis direction, corresponding to the component, generating the orientation z Coriolis force Fbx in the axial direction (thickness direction of the substrate). At this time, the component around the Y-axis direction of the angular velocity Ω2 acts on the driving mass portion 6, 7' vibrating in the X-axis direction corresponding to the component, and generates a Coriolis force Fby toward the z-axis direction (the thickness direction of the substrate). . As a result, the detection mass portion 15 vibrates in the z-axis direction at both end sides of the detection axis a direction, for example, centering on the detection axis B. The shift detecting units 18 to 2 1 constitute a shift detecting mechanism that detects the displacement of the detecting mass portion 15 in the thickness direction of the substrate 2. Further, the displacement detecting units 18 to 21 are constituted by the movable side detecting electrodes 18A to 21A including the inner protruding portions 丨5a to 15D and the fixed side detecting electrodes 18B to 21B provided on the cover plate 26 to be described later. . Here, the movable side detecting electrodes 18A to 21A and the fixed side detecting electrodes 18B to 21B are opposed to each other in the Z-axis direction. Therefore, the fixed side detecting electrodes 18B to 21B are opposed to the inner protruding portions i5A to 15D, and are disposed in opposite directions. At the center point, it is a point symmetrical position. 137127.doc • 23-1379992 Further, when the detecting mass portion 15 vibrates around the detecting axis B, the inner protruding portions 15 A, 15B are displaced in the thickness direction of the substrate 2. At this time, the distance between the movable side detecting electrodes 18A, 19A and the fixed side detecting electrodes 18B, 19B changes. Therefore, the electrostatic capacitance Cs between the movable side detecting electrodes 18A, 19A and the fixed side detecting electrodes 18B, 19B 1. Cs2 also changes. On the other hand, when the detecting mass portion 15 vibrates around the detecting axis A, the inner protruding portions 15C, 15D are displaced in the thickness direction of the substrate 2. At this time, the distance between the movable-side detecting electrodes 20A and 21A and the fixed-side detecting electrodes 20B and 2 1B changes. Therefore, the electrostatic capacitance Cs3 between the movable-side detecting electrodes 20A and 21A and the fixed-side detecting electrodes 20B and 21B changes. And Cs4 also changed. Therefore, when the detection mass portion 15 is displaced in the Z-axis direction by the angular velocities Ω1, Ω2 around the detection extractions a and B, the displacement detecting portions 18 to 21 are detected based on the movable-side detecting electrodes 18A to 21A and the fixed side. The change of the electrostatic valleys Cs1 to Cs4 between the electrodes 18B to 21B detects the displacement amount as the angular velocities qi and Ω2. The vibration monitoring units 22 and 23 constitute a monitoring unit that detects, for example, the displacement of the vibration direction (γ-axis direction) of the driving mass units 4 and 5. Further, the vibration monitoring units 22 and 23 are constituted by the slits 22A and 23A and the fixed-side monitoring electrodes 22B and 238. The slits 22 and 23 are formed in the driving mass units 4 and 5 in the X-axis direction. The fixed-side monitoring electrodes 22B and 23B are attached to the cover plate 26 so as to face the slits 22A and 23A, and extend in the z-axis direction. Then, the opposing areas between the fixed-side monitoring electrodes 22A, 23A and the driving mass portions 4, 5 are changed in accordance with the driving vibrations of the driving mass portions 4, 5. 137127.doc •24· 1379992 Here, in the state in which the driving mass units 4 and 5 are stationary, the fixed-side monitoring electrodes 22B and 23B are arranged offset with respect to the slits 22A and 23A in the Y-axis direction, and partially and narrowly. The slits 22A, 23A are opposed to each other. Then, when the driving mass portions 4, 5 are displaced in the Y-axis direction, the opposing area between the slits 22A, 23 and the fixed-side monitoring electrodes 22B, 23B is increased and decreased. Therefore, the electrostatic capacitance Cml between the fixed-side monitoring electrodes 22B and 23B and the driving mass portions 4 and 5 is changed in accordance with the driving vibration of the driving mass stem portions 4 and 5, so that the vibration monitoring unit 22 is changed. The vibration state of the driving mass units 4 and 5 is monitored by the change of the electrostatic capacitances Cm1 and Cm2. The detecting lead portion 24 is located outside the detecting mass unit 丨5, corresponding to the fixed side detecting electrodes 18B to 2 In addition, the detection lead-out portion 24 is disposed on both sides in the z-axis direction, for example, while sandwiching the detection mass portion 丨5, and the detection-use portion 24 is the same as the support portion 3 and the like. In the case of the detection lead portion 24, the fixed side detecting electrodes 8B to 21B are connected to each other. The monitoring lead portion 25 is located outside the detecting mass unit 15 and corresponds to the island. Two monitoring lead portions 25 are provided on the fixed-side monitoring electrodes 22B and 23B. The monitoring lead-out portion 25 is formed in an island shape using a low-resistance material or the like in the same manner as the detecting lead-out portion 24. The monitoring lead portion 25 is divided The fixed side monitoring electrodes 22B and 23B are connected to each other. The cover plate 26 is formed in a square plate shape by, for example, a glass material, and is joined to the support portion 3, the electrode support portion 14, and the detection lead portion by a mechanism such as anodic bonding. 24 and the monitoring lead portion 25. Further, a concave portion 137127.doc • 25· 1379992 is formed into a rectangular shape cavity 26A on the opposite side (back surface) side of the cover portion % and the detecting mass portion 15 and the like. Further, the cavity 26A is provided at a position facing the driving mass portions 4 to 7, the driving beam 8, the connecting beam 9, the detecting mass portion 15, and the detecting beams 16, 17. Thereby, the driving mass portions 4 to 7 and the detection are provided. The mass portion 15 is vibrated and displaced without being in contact with the cover plate 26. Further, in the cavity 26A of the cover plate 26, the fixed side detecting electrodes 18B to 21B of the displacement detecting portions 18 to 21 are provided, and vibration monitoring is provided. The fixed side monitor electrodes 228 and 2313 of the portions 22 and 23. Further, a protruding portion 26B for bonding to the electrode support portion 14 is formed at a central portion of the cavity 26, and is formed in the thickness direction in the cover plate 26. A plurality of through holes 27 are formed in the ground. The through holes 27 are respectively formed at positions corresponding to the support portion 3, the electrode support portion 14, and the detection lead portion 24. Thereby, the support portion 3 or the like is connected to the external electrode provided on the cover plate 26 via the through hole 27. Therefore, the vibration generating units 10 to 13, the displacement detecting units 18 to 21, and the vibration monitoring units 22 and 23 can be connected to the vibration control circuit 31 and the angular velocity detecting circuit 41 described below via external electrodes. Next, a description will be given of a vibration control circuit 31 which faces the vibration state of the control drive mass portions 4 to 7 with reference to Fig. 10'. The vibration control circuit 3 uses the monitor signal Vm generated by the vibration monitoring units 22 and 23 to control the drive signals Vd output to the vibration generating units 10 to 13. Further, the vibration control circuit 31 is constituted by C-V conversion circuits 32, 33, a differential amplifier 34, an automatic gain control circuit 35 (hereinafter referred to as an AGC circuit 35), a drive signal generating circuit 36, and the like. The C-V conversion circuits 32 and 33 are connected to the output sides of the vibration monitoring units 22 and 23, respectively. Then, the CV conversion circuits 32 and 33 convert the changes of the 137127.doc • 26·static capacitances Cm 1 and Cm2 of the vibration monitoring units 22 and 23 into voltage changes, and the electric dust changes are used as the preliminary monitoring signals Vml and Vm2. Output separately. Further, a differential amplifier 34» is connected to the output side of the cV conversion circuits 32 and 33. Here, when the driving mass units 4 and 5 vibrate in opposite phases, the two preliminary monitoring signals Vml and Vm2 are inverted from each other. The vibration monitoring units 22 and 23 are configured in a bit manner. Therefore, the two preliminary monitor signals Vml and Vm2 are differentially amplified by the differential amplifier 34, and output to the AGC circuit 35 as the final monitor signal Vm. The output side of the AGC circuit 35 is connected to the drive signal generating circuit 36 which outputs the drive signal vd. Then, the AGC circuit 35 adjusts the gain so that the monitor signal Vm becomes fixed. Further, the drive signal generating circuit 36 is connected to the vibration generating units 1A to 13» via the amplifier 37. Thereby, the driving signal generating circuit 36 inputs the driving signals Vd to the vibration generating portions 1A1 to 13, respectively, and the vibration generating portions 10 to 13 The driving mass portions 4, 6 and the driving mass portions 5, 7 are vibrated in opposite phases. Next, the angular velocity detecting circuit 41 (angular velocity detecting means) for detecting the angular velocities Ω1 and Ω2 around the two axes (around the detecting axes a and B) will be described. The angular velocity detecting circuit 41 uses the monitoring signal Vm ' generated by the vibration monitoring unit 22' 23 to be used by the shift detecting portion! The shift detecting signals Va and Vb generated at 8 to 21 are synchronously detected, and the angular velocities Ω1 and Ω2 acting on the driving mass portions 4 to 7 are detected. Further, the angular velocity detecting circuit 41 is constituted by, for example, c_v converting circuits 42 to 45, differential amplifiers 仏, 5 〇, and synchronous detecting circuits 47 and 51. The CV conversion circuits 42 to 45 convert the static electricity of the shift detecting units ι 8 to 21, the change of 137127.doc • 27·1379992 3 Cs4 into a voltage change, and use these voltage changes as the preliminary shift detecting signals Vsi, vs2. , vs3, Vs4 and output separately. Here, when the adjacent driving mass portions 4 to 7 vibrate in opposite phases, when the angular velocity (1) around the detecting axis acts, the detecting mass portion 15 takes the detecting axis a as the center and detects the axis. Both end sides of the B direction are alternately displaced in the z-axis direction. At this time, the preliminary shift detecting signal Vs3 and the shift detecting signal Vs4 are opposite to each other. On the other hand, the preliminary shift detecting signal Vs1 and the shift detecting signal Vs2 are in phase with each other. Therefore, the 'difference amplifier 46 is connected to the output side of the C-V conversion circuits 44 and 45, and the final shift detection signal Va is calculated based on the difference between the preparatory shift detection signals Vs3 and Vs4. The input side of the synchronous detection circuit 47 is connected to the differential amplifier 46, and is connected to the AGC circuit 35 via the phase shift circuit 38. Further, a low-pass filter 48 (hereinafter referred to as LPF 48) for extracting an angular velocity signal is connected to the output side of the synchronous detection circuit 47, and an adjustment circuit 49 for adjusting the gain and the offset is connected to the output side of the LPF 48. Here, the phase shifting circuit 38 outputs a phase shift signal Vm', which is a signal obtained by shifting the phase of the monitor signal Vm outputted through the AGC circuit 35 by 90°. Thereby, the synchronization detecting circuit 47 performs synchronous detection based on the shift detecting signal Va and using the phase shift signal Vm', and outputs an angular velocity signal corresponding to the angular velocity Ω1 around the detecting axis 8 via the LPF 48 and the adjusting circuit 49. On the other hand, when the adjacent driving mass portions 4 to 7 vibrate in opposite phases, when the angular velocity Ω2 around the detecting axis B acts, the detection 137127.doc -28-1379992 mass portion 15 is detected. The axis B is centered, and both end sides of the detection axis a direction are alternately displaced in the z-axis direction. At this time, the preliminary shift detecting signal Vs1 and the shift detecting signal Vs2 are opposite to each other. On the other hand, the preliminary shift detecting signal Vs3 and the shift detecting signal Vs4 are in phase with each other. Therefore, the differential amplifier 50 is connected to the output side of the C-V conversion circuits 42, 43 and calculates the shift detection signal Vb at the end of the table based on the difference between the preparatory shift detection signals VS1, Vs2. In the same manner as the synchronous detection circuit 47, the synchronous detection circuit 51 performs synchronous detection based on the shift detection signal Vb using the phase shift signal Vm·, and outputs the output via the low pass filter 52 (hereinafter referred to as LPF 52) and the adjustment circuit 53. An angular velocity signal corresponding to the angular velocity Q2 of the detection axis b. Next, a method of manufacturing the angular velocity sensor 1 of the present embodiment will be described with reference to Figs. 11 to 14 . In the substrate bonding step shown in Fig. 11, the back surface of the germanium substrate 61 is etched in advance to form a substantially quadrangular depressed portion 62, and the protruding portion 63 is formed at the center of the recessed portion 62. Thereafter, the back surface of the ruthenium substrate 61 is bonded to the surface of the glass substrate 64 to be the substrate 2 by using an bonding mechanism such as anodic bonding. Then, in the thinning step shown in Fig. 12, the surface side of the ruthenium substrate 61 is polished to form a ruthenium layer 65 having a small thickness. At this time, the outer edge side of the enamel layer 65 and the central protrusion portion 63 are joined to the glass substrate 64. Further, the thin portion 65A corresponding to the depressed portion 62 of the ruthenium layer 65 is separated from the glass substrate 64 with a gap therebetween. Next, a contact portion 66 is formed on the surface of the tantalum layer 65 using, for example, a conductive metal material. At this time, the contact portion 66 is disposed on the outer edge side of the thin portion 65A of the 137127.doc • 29-1379992 in the crotch layer 65. Next, in the functional portion forming step shown in FIG. 13, the engraving processing is performed to form the driving mass portions 4 to 7, the driving beam 8, and the connecting beam 9 at positions corresponding to the thin portion 65A of the stone layer 65. The detecting mass unit 15 and the detecting beams 16 and 17» form a detecting lead portion 24 and a monitoring lead portion 25 at positions corresponding to the contact portion 66 of the dream layer (4). The electrode support portion 14 is formed at a position corresponding to the protrusion portion 63 in the ruthenium layer 65, and the movable side drive electrodes i 〇a to 3 A and the fixed side drive electrodes 10B to 13B are formed around the electrode support portion 14. The vibration generating units 1 to 13 are provided. The support portion 3 is formed on the middle outer edge side of the 矽 layer so as to surround the driving quality Zou 4 to 7, the proof mass portion 15, etc. Then, the cover bonding step 10 shown in Fig. 14 becomes a cover sheet ^ The back side of the glass plate 67 is formed in advance as a recessed portion 68 as a cavity 26A. At this time, the recessed portion 68 is formed in the driving mass portions 4 to 7, the driving beam 8, the connecting beam 9, the detecting mass portion 15, and the detecting beam. Further, the projections 69 which are in contact with the electrode support portion 14 are formed at the center of the recessed portion 68. Further, the fixed side detection electrodes 18B to 21B are provided inside the recessed portion 68, and are provided. The side monitoring electrodes 22B and 23B are fixed. Then, the back surface of the glass plate 67 is bonded to the surface of the ruthenium layer 65 by using an bonding mechanism such as anodic bonding. Thereby, the outer edge side of the glass substrate 67 is bonded to the support portion 3, and the protrusion is formed. The fixed-side detecting electrodes 18B to 2B are fixed to the position facing the detecting mass portion 15 in order to form the displacement detecting portions 18 to 21. Further, the fixed-side monitoring electrode 22B is fixed. 23B to form a vibration The monitoring units 22 and 23 and 137127.doc -30· 1379992 are fixed to the position β facing the slits 22A and 23A. Next, in the electrode forming step, the cover plate 26 is subjected to a drilling process such as sandblasting to form an opening process. Through holes 27. At this time, the through holes 27 are respectively formed at positions corresponding to the support portion 3, the electrode support portion 14, and the detecting lead portion. Finally, the surface of the cover plate 26 is provided for connection with an external circuit. An external electrode (not shown). Then, the external electrode is electrically connected to the support portion 3, the electrode support portion 14, and the detection lead portion 24 via a conductor film provided on the inner surface of the through hole 27. j to the angular velocity sensor 1 shown in Fig. 9. Then, the vibration generating portions 10 to 13, the displacement detecting portions 18 to 21, and the vibration monitoring portions 22 and 23 are connected to the vibration control circuit 31 and the angular velocity via the external electrodes. The detection circuit 4, etc. The angular velocity sensor 第 of the first embodiment has the above configuration, and the operation thereof will be described next. First, the case of detecting the angular velocity Ω1 around the detection axis A will be described. When the driving control circuit 31 inputs the driving signal Vd to the electrode supporting portion 14, the driving signal Vd is applied to the solid-side driving electrodes 10B to 13B of the vibration generating portions 1A to 13. Thereby, the electrostatic attraction force in the γ-axis direction acts on The driving mass portions 4 and 5 and the driving mass portions 4 and 5 vibrate in the Y-axis direction. On the other hand, the electrostatic attraction force in the X-axis direction acts on the driving mass portions 6, 7 and the driving mass portions 6 and 7 in the X-axis direction. Then, the driving mass portions 4 to 7 adjacent in the circumferential direction vibrate in opposite phases with each other. In the state where the driving mass portions 4 to 7 vibrate, if the angular velocity Ω1 around the detecting axis A acts, it corresponds to the angular velocity. The component around the X-axis of Ωι, the Coriolis force Fax shown in the following 1 acts on the driving mass portions 4, 5. On the other hand, in the aspect of the 137127.doc -31, the Coriolis force Fay shown by the following 2 corresponds to the driving mass portions 6, 7 corresponding to the component around the Y-axis in the angular velocity Ω1. Then, the Coriolis forces Fax and Fay generated in the drive mass units 4 to 7 are transmitted to the detection mass unit 15 via the drive beam 8. As a result, the detecting mass portion 15 is displaced by the combined force of the Coriolis force Fax and Fay, and the both ends of the detecting axis B direction are alternately displaced in the z-axis direction, and are vibrated in accordance with the angular velocity Ω1. [Number 1]

Fax=2xMxQlxxv where ' Μ: mass of the driving mass portions 4, 5 Ωΐχ: a component around the X-axis in the angular velocity Ω1 around the detection axis v v : velocity in the Y-axis direction of the driving mass portions 4, 5 [2]

Fay=2xMxQlyxv where 'Μ: the quality of the drive quality parts 6, 7

Qly: the component around the x-axis in the angular velocity Ω1 of the detection axis v1: the velocity in the X-axis direction of the driving mass portions 6, 7 Therefore, the displacement detecting portions 18 to 21 correspond to the Z-axis of the detecting mass portion 15. The displacement of the direction changes the static capacitances cs1 to Cs4 between the movable side detecting electrodes UA to 21A and the fixed side detecting electrodes 18B to 21B. At this time, the C-V switching circuits 42 to 45 of the angular velocity detecting circuit 41 convert the changes of the electrostatic capacitances Cs1 to Cs4 into the preliminary shift detecting signals Vs1 to Vs4. Then, the differential amplifier 46 outputs a final shift detecting signal va corresponding to the angular velocity Ω1 around the detecting axis A based on the difference between the shift detecting signals vs3 and Vs4. The synchronous detection circuit 47 detects the signal U7127.doc • 32- which is synchronized with the phase shift signal Vm' based on the shift detection signal Va. Thereby, the angular velocity detecting circuit 41 outputs an angular velocity signal corresponding to the angular velocity Ω1 around the detecting axis A. Further, when the angular velocity Ω1 around the detection axis A acts, the preparatory shift detecting signals Vs 1 and Vs2 are in phase with each other. At this time, the shift detection signal Vb is calculated using the difference between the shift detection signals Vs1 and Vs2. Therefore, when the angular velocity Ω1 around the detection axis A acts, even if the synchronous detection circuit 51 performs synchronous detection on the displacement detecting signal Vb, the angular velocity signal corresponding to the angular velocity Ω2 is not output. Next, the case of detecting the angular velocity Ω2 around the detection axis B will be described. The external vibration control circuit 31 inputs the drive signal Vd to the electrode support portion 14 to vibrate the drive mass portions 4 to 7 in the vibration state, and if the angular velocity Ω2 around the detection axis B acts, the following three The Coriolis force Fbx is shown to act on the driving mass portions 4, 5, and the Coriolis force Fby shown in the following 4 is applied to the driving mass portions 6, 7. Then, the Coriolis forces Fbx and Fby generated in the drive mass units 4 to 7 are transmitted to the detection mass unit 15 via the drive beam 8. Therefore, the detecting mass portion 15 is displaced in the alternate Z-axis direction by the combined force of the Coriolis force Fbx and Fby, centering on the detecting axis B, and vibrating in accordance with the angular velocity Ω2. [Number 3]

Fbx=2 χΜχΩ2χχ v where Μ: the mass of the driving mass portion 4, 5 Ω2 χ : the component around the X-axis among the angular velocities Ω2 around the detecting axis ν: the velocity in the z-axis direction of the driving mass portions 4, 5 [4 ] 137127.doc •33· 1379992

Fby=2xMxn2yxv where M: the mass Q2y of the driving mass portions 6, 7 : the component around the Υ axis in the angular velocity Ω2 around the detection axis ν: the velocity in the X-axis direction of the driving mass portions 6, 7 Therefore, the displacement detection In the portions 18 to 21, the electrostatic capacitances Cs1 to Cs4 between the movable-side detecting electrodes 18A to 21A and the fixed-side detecting electrodes 18B to 21B change in accordance with the shift in the z-axis direction of the detecting mass portion 丨5. At this time, the C-V conversion circuits 42 to 45 of the angular velocity detecting circuit 41 convert the changes of the electrostatic capacitances Cs1 to Cs4 into the shift detecting signals Vs 1 to Vs4. Then, the differential amplifier 5 输出 outputs the shift detecting signal Vb corresponding to the angular velocity Ω2 around the detecting axis b based on the difference Δ between the shift detecting signals Vs 1 and Vs2. The synchronous detection circuit 5 detects the signal synchronized with the phase shift signal Vm' based on the shift detection signal Vb. Thereby, the angular velocity detecting circuit 41 outputs an angular velocity signal corresponding to the angular velocity Q2 around the detecting axis B. Further, when the angular velocity Ω2 around the detection axis B acts, the preparatory shift detecting signals Vs3 and Vs4 are in phase with each other. At this time, the shift detection signal Va is calculated using the difference between the shift detection signals Vs3 and Vs4. Therefore, when the angular velocity Ω2 around the detection axis B acts, even if the synchronous detection circuit 47 synchronously detects the displacement detecting signal Va, the angular velocity signal corresponding to the angular velocity Ω1 is not output. In the present embodiment, since the four driving mass portions 4 to 7 are disposed at positions that are point-symmetric with respect to the center point ,, the two driving mass portions 4 and 5 can be placed on the X-axis while sandwiching the center point Ο On both sides of the direction, the two driving mass portions 6, 7 can be placed on both sides in the γ-axis direction by sandwiching the center point 。. Further, the driving mass portions 4 to 7 adjacent in the direction of the circumference 137127.doc - 34 - 1379992 vibrate in opposite phases with each other. Therefore, when the driving mass portions 4 to 7 approach the detecting axis a, the driving mass portions 4 to 7 can be moved away from the detecting axis B. Further, when the driving mass portions 4 to 7 are away from the detecting axis a, the driving mass portions 4 to 7 can be Close to the detection axis B. Thereby, when the angular velocity Ω1 around the detection axis A acts, the driving mass portions 4 to 7 can generate the Coriolis forces Fax and Fay in the z-axis direction. Therefore, when the angular velocity Ω1 acts, the detecting mass portion 15 is alternately displaced and vibrated in the Z-axis direction at both ends of the detecting axis B in the center of the detecting axis a. Therefore, the vibration is detected using the displacement detecting portions 18 to 21, whereby the angular velocity Ω1 around the detection axis A can be detected. On the other hand, when the angular velocity Ω2 around the detection axis B acts, the drive mass portions 4 to 7 can generate the Coriolis forces Fbx and Fby toward the Z-axis direction. Therefore, when the angular velocity Ω2 acts, the detection mass portion 15 is centered on the detection axis b, and both end sides in the detection axis A direction are alternately displaced and vibrated in the z-axis direction. Therefore, the vibration is detected using the displacement detecting portions 18 to 21, whereby the angular velocity Ω2 around the detection axis B can be detected. Thereby, the angular velocity Ω1, Ω2 acting around the two detection axes A, B can be detected using a single angular velocity sensor 1 . Therefore, compared with the case where two sensors surrounding one axis are used, Can reduce manufacturing costs. Further, since the four driving mass portions 4 to 7 are disposed at positions that are point-symmetric with respect to the center point ,, the driving mass portions 4 to 7 adjacent to each other in the circumferential direction can be reversed (reverse phase). The center of gravity of the four drive mass portions 4 to 7 is fixed by vibration, and the torque (rotational moment) in the circumferential direction generated by the four drive mass portions 4 to 7 as a whole can be canceled. At this time, since the connecting beam 9 connects the vicinity of the fulcrums 4B to 7B of the four driving mass units 4 to 7 of 137127.doc - 35 - 1379992, for example, even if the four driving mass portions 4 to 7 are unevenly processed, Each of the driving mass units 4 to 7 also vibrates in a state where the driving amplitude and the phase are identical. As a result, the fluctuation or torque of the center of gravity of the entire four driving mass units 4 to 7 can be reliably reduced, and the driving vibrations of the driving mass portions 4 to 7 do not affect the detecting quality portion 15, the substrate 2, and the like. Thereby, the offset output of the 'angular velocity signal becomes stable. Further, with respect to the detecting beams 16 and 17 (detecting axes A and B), the driving mass portions 4 to 7 as the movable portions, the drive beam 8, the connecting beam 9, and the detecting mass portion 15 are linearly symmetrical. Therefore, even if the acceleration acts in the vertical direction (Z-axis direction) of the substrate 2, the entire movable portion may be displaced in the z-axis direction, but the displacement detecting portion 18 to 2 is caused by the displacement. The change in electrostatic capacitance becomes the same value. Therefore, the displacement detecting units 18 to 2 are used to differentially detect the shift detecting signals Vs1 to Vs4, whereby the components generated by the acceleration can be removed from the angular velocity signal. Further, since the fifth portion is configured as follows, the Coriolis forces Fax, Fay, Fbx, and Fby acting on the driving mass portions 4 to 7 are transmitted to the detecting texture portion 15 via the driving beam 8, so that the detecting mass portion 15 itself is not Will drive vibration. Therefore, even if the driving mass portions 4 to 7 vibrate in a state where the driving mass portions 4 to 7 are shaken in the vertical direction (z-axis direction) of the substrate 2, for example, unevenness in processing, the detecting mass portion 15 does not wobble. Therefore, the displacement detecting sections 18 to 21 can detect the shift in the direction of the square of the detecting mass portion 而^ without being affected by the shaking of the driving mass portions 4 to 7. That is, because the shift detecting unit i 8~2 i does not generate a vibration shaking signal (10) signal signal), the output signal of the diagonal variable speed sensor t (the angular velocity signal 137127.doc -36 - 1379992) is performed. As a result of the adjustment, for example, even when the shift detection signals Vs1 to Vs4 are directly amplified, or when the differential amplifiers 46 and 5 are used for differential amplification, the gain is not saturated by the noise signal. Therefore, the amplification factor in the initial stage before the synchronous detection can be improved, so that the noise signal contained in the angular velocity signal can be relatively reduced, thereby obtaining an angular velocity signal of SN (signal_Noise, 4 Lu-noise) ratio. . Further, in the shift detecting signals Vs 1 to Vs4 generated by the shift detecting sections 18 to 21, the offset voltage generated by the shaking of the driving vibration is not added. Therefore, even when the adjustment circuits 49, 53 are used to adjust the offset voltage, the adjustment range of the offset voltage becomes small, and the temperature change (temperature drift) of the offset voltage becomes small. As a result, the detection accuracy of the angular velocity ^^ and Ω2 can be improved. Further, the driving mass portions 4 to 7 vibrate in a state of being parallel to the substrate 2, so that the driving amplitude can be increased as compared with the case of vibrating in the direction perpendicular to the x-axis of the substrate 2. Therefore, the Coriolis forces Fax, Fay, Fbx, and Fby acting on the driving mass portions 4 to 7 can be increased, so that the displacement of the detecting mass portion 15 caused by the Coriolis forces Fax, Fay, Fbx, and Fby can be increased. Therefore, the detection sensitivity of the angular velocities Ω1 and Ω2 can be improved. Further, in the present embodiment, the four driving mass portions 4 to 7 are arranged at equal intervals in the circumferential direction around the center point ,, and the detecting beams 16 and 17 are located adjacent to each other in the two driving qualities. Between the parts 4 to 7, and extending along the two detection axes A and B. Therefore, the detecting beam 16 extending along the detecting axis A supports the detecting mass portion 15 so that the detecting mass portion 15 can be displaced in the thickness direction of the substrate 2 around the detecting beam 16. Similarly, the detection beam 17 extending along the detection axis B also supports the detection mass portion 15 so that the detection mass portion 15 can be centered on the detection beam 17 in the thickness direction of the substrate 2, 137127.doc • 37-1379992 Shift up. As a result, the detecting beams 16 and 17 support the detecting mass unit 15 so as to be able to vibrate around the detecting axes A and B parallel to the substrate 2. Further, the detection beams 16 and 17 are located between the adjacent two driving mass portions 4 to 7 and extend along the two detection axes A and B. Therefore, the overall angular velocity sensor 1 can be miniaturized as compared with the case where the detecting beam is disposed on the outer peripheral side of the driving mass portions 4 to 7. Further, the displacement detecting units 18 to 21 are located between the adjacent two driving mass units 4 to 7, and are disposed at positions that are point-symmetric with respect to the center point ,, and are disposed opposite to the detecting mass unit 15 The four fixed side detecting electrodes 1 8 B to 21B are formed. Here, when the detection mass portion 15 vibrates in the Z-axis direction centering on the center point 对应 corresponding to the angular velocities Ω1 and Ω2, the detecting mass portion 15 (movable side detecting electrode) 8 a corresponds to the angular velocities Ω1 and Ω2. ～21 A) The distance from the fixed side detecting electrodes 18B to 21B changes. Therefore, the angular velocities Ω1 and Ω2 around the two detection axes a and b can be detected by detecting the electrostatic capacitances Cs 1 to Cs4 between the detection mass unit 15 and the four fixed side detection electrodes 18B to 21B. Further, the vibration monitoring units 22 and 23 are provided for monitoring the displacement of the vibration directions of the driving mass units 4 and 5, so that the driving quality units 4 and 5 can be detected using the vibration monitoring units 22 and 23 (the driving mass unit 6) , 7) Vibration amplitude and phase. Therefore, the monitoring signal 7〇1 of the vibration monitoring units 22 and 23 can be used as the reference signal of the vibration control circuit 31, thereby realizing the stability of the resonance state 137127.doc • 38· 1379992. Further, the monitoring signals Vm of the vibration monitoring units 22 and 23 can be used as reference signals (shifting signals vm) of the angular velocity detecting circuit 41, so that accurate synchronous detection can be performed based on the vibration states of the driving mass portions 4 to 7. Further, the detecting beams 16 and 17 are formed using a torsion support beam which is torsionally deformed when the detecting mass portion 15 is displaced in the thickness direction of the substrate 2, and thus, for example, may be caused by the vertical direction of the substrate 2 The stone slab material and the like are processed to form a torsion support beam, so that the processing can be easily performed. Further, the spring constant of the torsion support beam fluctuates in proportion to the third power of the width dimension, but this is the same as the drive beam 8 and the connection beam 9. Therefore, the influence of the processing unevenness of the width dimension on the resonance frequency difference between the driving mode and the detecting mode can be reduced, so that the sensitivity unevenness of the angular velocity sensor 1 can be reduced. In the first embodiment, the vibration generating units 1A to 3b are configured as follows: the electrode plates of the movable side drive electrodes 1A to 13A and the fixed side drive electrodes 10B to 13B are driven by the drive signals. The distance between the electrode plates is changed to generate an electrostatic force (driving force F1-F4). However, the present invention is not limited to this. For example, the movable side drive electrode 13A' may be formed and fixed by using two comb-shaped electrodes that mesh with each other as in the vibration generating portion 13' of the first modification shown in FIG. Side drive electrode 13B,. In this case, the vibration generating portion is such that the meshing depth (opposing area) between the movable side drive electrode ΠΑ' and the fixed side drive electrode 13B' is changed to generate static electricity. In the first embodiment, the vibration monitoring units 22 and 23 are provided in the drive mass units 4 and 5. However, the present invention is not limited thereto, and the example 137127.doc • 39· 1379992 may be configured such that the vibration monitoring unit is provided to the driving mass units 6 and 7′ to detect the vibration direction of the driving mass units 6 and 7 ( Shift in the direction of the x-axis. In addition, the vibration monitoring unit may be provided in the drive mass unit 4 and the drive mass unit ,, and the vibration monitoring unit may be provided only in any one of the drive mass units 4 to 7 . . In the first embodiment, the slits 22A and 23 are provided in the driving quality summer portions 4 and 5. However, the present invention is not limited thereto, and may be configured to be oriented in the X-axis direction. The protruding protrusions are provided to the driving mass portions 4 and 5, and correspond to the driving vibrations of the protrusions and the driving mass portions 4 and 5, and the opposing areas of the solid-side monitoring electrodes 22B and 23B are changed. Further, in the first embodiment, the vibration monitoring units 22 and 23 are configured by the slits 22A and 23A and the fixed-side monitoring electrodes 22B and 23B facing each other in the Z-axis direction. However, the present invention is not limited thereto. For example, the vibration monitoring unit may be configured by using two comb-shaped electrodes, and the spray depth of the two comb-shaped electrodes may change in accordance with the displacement of the drive mass portions 4 and 5 in the Y-axis direction. Next, Fig. 16 to Fig. 18 show a second embodiment of the present invention. Further, the present embodiment is characterized in that a cover covering the detecting mass portion is provided, and four fixed side detecting electrodes provided to face the disk plate are used to constitute a displacement detecting portion. In the present embodiment, the same components as those in the first embodiment are denoted by the same reference numerals, and their description will be omitted. Similarly to the angular velocity sensor 1 of the first embodiment, the angular velocity sensor 71 is mainly composed of the substrate 2, the driving mass portions 4 to 7, the driving beam 8, the connecting beam 9, the vibration generating portions 10 to 13, and the detecting quality portion. 15. The detecting beams 16, 17 and J37127.doc - 40· 1379992 are configured by the shift detecting units 76 to 79 and the like. Here, cover plates 72 to 75 are provided on the opposing surface (surface) of the detecting mass portion ι5 facing the cover plate 26. The cover plates 72 to 75 are formed, for example, by a thin plate having a substantially trapezoidal shape, and are disposed between the detecting beams 16, 17 and respectively disposed at positions corresponding to the driving mass portions 4 to 7. Here, the cover plates 72 to 75 cover the drive mass portions 4 to 7 and the drive beam 8 by the thin plate-shaped detection side plate portions 72A to 75 octagonal to the surface of the proof mass portion 15 and the gaps. And the drive side plate parts 72B-75B of the surface of the beam 9 are connected. Further, the cover plates 72 to 75 are formed using, for example, a low-resistance polysilicon material, and are connected to the ground via the detecting portion 15, the support portion 3, and the like. Further, a gap is formed between the driving side plate portions 72B to 75B and the driving mass portions 4 to 7 and the like. Therefore, even when the driving mass portions 4 to 7 drive the vibration, the driving side plate portions 72B to 75B do not come into contact with the driving mass portions 4 to 7 and the like. The shift detecting units 76 to 79 constitute a shift detecting mechanism that detects the displacement of the mass portion 15 in the thickness direction of the substrate 2. Further, the displacement detecting portions 76 to 79 are configured by being provided on the fixed side detecting electrodes 76A to 79A of the cover plate 26 so as to face the cover plates 72 to 75. Further, the fixed-side detecting electrode 76A 79A is disposed at a position which is symmetrical with respect to the middle to the point 0 with respect to the inner protruding portion 15 ～15〇. In addition, the fixed side detecting electrodes 76A to 79Ail are not limited to the inner protruding portions 15A to 15D, and are stretched to positions corresponding to the driving mass portions 4 to 7. Therefore, the fixed side detecting electrodes 76 to 79 are larger than the fixed side detecting electrodes 183 to 21] 8 of the first embodiment. Then, when the detecting mass portion 15 vibrates around the detecting axis B, the inner protruding portion 137127.doc 1379992 portions 15A, 15B are displaced in the thickness direction of the substrate 2. At this time, the distance between the portions on the both end sides in the detection axis A direction of the cover plates 72 to 75 and the fixed side detection electrodes 76A and 77A changes, and therefore, the cover plates 72 to 75 and the fixed side detection electrodes 76A and 77A The static capacitance Csl 'Cs2 also changes. On the other hand, when the detecting mass portion 15 vibrates around the detecting axis A, the inner protruding portions 15C, 15D are displaced in the thickness direction of the substrate 2. At this time, the distance between the portions of the cover plates 72 to 75 on the both end sides in the detection axis B direction and the fixed side detection electrodes 78A and 79A changes, so that the cover plates 72 to 75 and the fixed side detection electrodes 78A and 79A are changed. The static capacitances Cs3 and Cs4 also change. Therefore, when the detecting mass portion 15 is displaced in the Z-axis direction by the angular velocities Ω1 and Ω2 around the detecting axes A and B, the displacement detecting portions 76 to 79 are based on the cover plates 72 to 75 and the fixed-side detecting electrodes 76A to The change in the static capacitances Cs1 to Cs4 between 79A is detected as the angular velocities Ω1 and Ω2. Thus, in the present embodiment configured as described above, substantially the same operational effects as those of the first embodiment can be obtained. Further, in particular, in the present embodiment, the cover plates 72 to 75 covering the detecting mass portion 丨5 are provided, and the four fixed side detecting electrodes 76a to 79 which are provided opposite to the cover plates 72 to 75 are used to constitute the shift. Detection units 76 to 79. Therefore, the cover plates 72 to 75 are integrated with the detecting mass portion 15 and vibrate around the detecting axes A and B. Therefore, by detecting the electrostatic capacitances Cs1 to Cs4 between the cover plate 72 75 and the solid-side detecting electrodes % a to 79A, The angular velocities Ω 丨 and Ω 2 around the two detection axes a and B can be detected. Further, the cover plates 72 to 75 can be disposed between the driving mass portions 4 to 7 and the fixed side detecting electrodes 76 to 79. Thereby, the influence of the driving quality I37l27.doc • 42-1379992 parts 4 to 7 can be blocked by the cover plates 72 to 75, and therefore, the fixed side detecting electrodes 76A to 79A can be extended to the driving mass parts 4 to 7 Relatively to the position. As a result, the area of the fixed side detecting electrodes 7 6 A to 79 A can be increased, so that the electrostatic capacitances Cs1 to Cs4 can be largely changed, and the detection sensitivities of the angular velocities Ω1 and Ω2 can be improved. Further, in the second embodiment, four cover plates 72 to 75 are provided at positions other than the detecting beams 16 and 17. However, the present invention is not limited thereto, and as long as it is possible to ensure a sufficient gap that does not interfere with the detection beams 16 and 17, it is also possible to cover the detection beam 16 by one cover plate, In the second embodiment, the vibration monitoring unit is omitted. However, if the fixed-side monitoring electrode is formed on the substrate 2 side, for example, the same vibration monitoring as in the first embodiment can be applied. unit. Next, Fig. 19 to Fig. 21 show a third embodiment of the present invention. Further, the present embodiment is characterized in that the thickness of the detecting mass portion is thinner than the thickness of the driving mass portion, the driving beam, the connecting beam, and the detecting beam. In the present embodiment, the same components as those in the above-described first embodiment are denoted by the same reference numerals, and their description will be omitted. Similarly to the angular velocity sensor 第 of the first embodiment, the angular velocity sensor 81 is composed of the substrate 2, the driving mass portions 4 to 7, the driving beam 8, the connecting beam 9, the vibration generating portions 10 to 13, and the detecting mass portion. 82. The detecting beams 16 and 17, the displacement detecting units 18 to 21, and the vibration monitoring units 22 and 23 are configured. The detection quality unit 82 is the same as the first! The detection mass portion 15 of the embodiment is configured in substantially the same manner, and the detection mass portion 8 2 has a projection toward the inner circumference side along the diagonal line I37l27.doc • 43-1379992 and the 'inside projection portion 82A-82D - between and constitutes a shift The four inner protruding portions 82A-82D of the position detecting portion. Further, the movable side detecting electrodes 18A to 21A are disposed between the driving mass units 4 to 7 and 18 to 21, respectively. However, the detecting mass portion 82 has a thin portion 83 having a small thickness, and is different from the detecting mass portion 第5 of the first embodiment. At this time, the thickness of the thin portion 83 is smaller than that of the driving mass portions 4 to 7, and the driving beam is formed.

The portion 83 has a point symmetrical shape centering on the center point 〇. As described above, in the present embodiment configured as described above, substantially the same operational effects as those of the first embodiment can be obtained. Further, in particular, in the present invention, the detection quality portion 82 has a configuration in which the thin portion 83 having a thickness smaller than that of the driving mass portions 4 to 7 is provided, so that the detection quality portion 82 can be reduced. The mass, thereby increasing the amount of displacement of the proof mass portion 82 caused by the Coriolis force. Thereby, the detection sensitivities of the angular velocities Ω 丨 and 卩 2 can be improved. In the third embodiment, the thickness of the portion (the thin portion 83) of the detecting mass portion 82 is thin, but the thickness of the entire inner portion 8 2 may be set. The composition of the thinning of the size. Further, in the third embodiment, the detection mass portion 82 having a small thickness is applied to the same configuration as that of the first embodiment. However, the present invention is not limited to this. For example, the detection quality portion having a small thickness may be applied to the same configuration as that of the second embodiment. Next, Fig. 22 to Fig. 24 show a fourth embodiment of the present invention. Further, the present embodiment is characterized in that the both ends of the detecting beam are connected to the detecting mass portion and the substrate, respectively, using the stress reducing connecting portion. Further, in the present embodiment, the same components as those of the above-described first embodiment 1 are denoted by the same reference numerals, and the description thereof will be omitted. Similarly to the angular velocity sensor of the i-th embodiment, the angular velocity sensor 91 is composed of the substrate 2, the driving mass portions 4 to 7, the driving beam 8, the connecting beam 9, the vibration generating portion 1〇13, and the detection quality. The portion 15, the detection beam %%, the displacement detecting portions 18 to 21, and the vibration monitoring portions 22, 23 and the like are configured. The first detecting beam 92 is formed in substantially the same manner as the detecting beam 16 of the first embodiment, and is formed in an elongated plate shape. Therefore, the detecting beam 92 is disposed between the detecting mass portion 15 and the substrate 2, and extends along the detecting axis 平行 parallel to the substrate 2 (χγ plane). Further, the detecting beam 92 is formed by using the torsion support beam. When the detecting mass portion 移位5 is displaced in the thickness direction of the substrate 2 around the detecting axis A, the torsion deformation is generated. Specifically, the first detecting beam 92 is located, for example, between the driving mass portions 4 and 7 and the driving mass portions 5 and 6 and is inclined at 45 with respect to the X-axis. The detection axis a extends. Further, the first detecting beams 92 are provided inside the inner protruding portions 15a and 15B, respectively. However, one end side of the detecting beam 92 is connected to the detecting mass portion 15 by using the stress reducing connecting beam 93 as a stress reducing connecting portion. Further, the other end side of the detecting beam 92 is connected to the support portion 3 by using the stress reducing connecting beam 93. The use of the stress reduction connecting beam 93' in this manner is different from the detecting beam 92 in this respect and the detecting beam 16 of the first embodiment.

At this time, the stress reduction connecting beam 93 is constituted by two L-shaped beams 93A, and the two L-shaped beams 93 A are respectively placed in the direction orthogonal to the detecting beam 92 by sandwiching the detecting beam 92 (detecting axis) Both sides of the B direction). Further, each of the L-shaped beams 93A 137127.doc •45· 1379992 extends in the direction of the detecting axis B, and its both ends f are curved to 4 (four), and one end side of each of the L-shaped beams 93A is connected to the end of the detecting beam %, The other end side of each (four) beam 93A is connected to the detecting mass portion 15 or the supporting portion 3. Thereby, both end sides of the first detecting beam 92 are supported in a state of having a degree of freedom in the direction of the detecting axis A in the longitudinal direction. As a result, when the detecting beam 92 is subjected to torsional deformation, the both ends of the detecting (4) can be: Length: Upward displacement, due to Jt, distortion or stress acting on both end sides of the detecting beam 92 is reduced. ' The second detection beam 94 is the same as the first! The detecting beam 17 of the embodiment is formed substantially in the same manner and formed in an elongated plate shape. Therefore, the detecting beam 94 is disposed between the detecting mass portion 15 and the substrate 2, and extends along the detecting axis 平行 parallel to the substrate 2 (χ_γ plane). Further, the detecting beam 94 is formed by using a torsion support beam which is torsionally deformed when the detecting mass portion 15 is displaced in the thickness direction of the substrate 2 around the detecting axis. Specifically, the second detecting beam 94 is located, for example, between the driving mass portions 4, 6 and the driving mass portions 5, 7, and is inclined by -45 with respect to the X-axis. The detection axis 延伸 extends, and the second detection beam 94 is disposed inside the inner protrusions 15C and 15D, respectively. However, the end portion of the detecting beam 94 is connected to the detecting mass portion 15 by using the stress reducing connecting beam 95 as a stress reducing connecting portion. Further, the other end side of the detecting beam 94 is connected to the supporting portion by using the stress reducing connecting beam 95. In this manner, the stress reducing connecting beam 95 is used, which is different from the detecting beam 94 and the first embodiment in this respect. The detection beam 17 is detected. At this time, the stress reduction connecting beam 95 is constituted by two L-shaped beams 95A, 37127.d • 46-1379992. The two L-shaped beams 95A are respectively placed on the detecting beam 94, for example, by sandwiching the detecting beam 94. Both sides of the orthogonal direction (detection axis a direction). Further, each of the l-shaped beams 95A extends in the direction of the detection axis A, and both end sides thereof are bent in a l-shape. Further, one end side of each of the L-shaped beams 95A is connected to the end of the detecting beam 94, and the other end side of each of the L-shaped beams 95A is connected to the detecting mass portion 15 or the supporting portion 3. The both ends of the second detecting beam 94 are supported in a state of having a degree of freedom in the direction of the detecting axis B in the longitudinal direction. As a result, when the detecting beam 94 is subjected to the torsional deformation, the both end sides of the detecting beam 94 can be displaced in the longitudinal direction, and therefore, the distortion or stress acting on both end sides of the detecting beam 94 is reduced. Then, when the detecting mass unit 15 vibrates (shakes) around the detecting axis A, the first detecting beam 92 generates torsional deformation (torsional vibration). On the other hand, the second detecting beam 94 is connected to the detecting mass portion 15 and the supporting portion 3 by using the stress reducing connecting beam 95. Therefore, the deflection of the connecting beam 95 by the stress is reduced, and the detecting mass portion 15 is allowed to vibrate around the detecting axis a. Similarly, when the detecting mass portion 15 vibrates (shakes) around the detecting axis B, the second detecting beam 94 generates torsional deformation (torsional vibration). On the other hand, the first detecting beam 92 is connected to the detecting mass portion 15 and the supporting portion 3 by using the stress reducing connecting beam 93. Therefore, the stress is reduced by the stress reducing connecting beam, and the detecting mass portion 15 is allowed to be detected. The detection axis B is centered for vibration. Thereby, the detecting beams 92, 94 support the detecting mass portion 15 in a state in which the detecting axis eight and the detecting axis B are vibrated around each other. As described above, in the present embodiment configured as described above, it is possible to obtain substantially the same operational effects as those of the first embodiment of 137127.doc -47 - 1379992. Further, in the present embodiment, the other ends of the detecting beams 92 and 94 are connected to the detecting mass portion 15 and the supporting portion 3 fixed to the substrate 2 by using the stress reducing connecting beams 93 and 95, respectively. The sensitivity of the small angular velocity sensor 91 is uneven. Here, the relationship between the stress reduction connecting beams 93, 95. and the sensitivity unevenness will be described in detail. First, when the ends of the detecting beams 92, 94 are fixed, the stress acting on the fixed portion hinders the torsional deformation of the detecting beams 92, 94. Therefore, when the thickness dimension of the detecting beams 92, 94 changes, the change in the resonance frequency corresponding to the amount of change in the thickness dimension becomes large. As a result, there is a tendency that the unevenness of processing increases the influence of the resonance frequency difference between the drive mode and the detection mode. On the other hand, in the present embodiment, the both ends of the detecting beams 92 and 94 are connected to the detecting mass portion 丨5 and the supporting portion 3 by using the stress reducing connecting beams 93 and 95, respectively. When the torsional deformation is generated, the distortion or stress acting on both end sides of the detecting beams 92, 94 can be reduced. Thereby, the influence of the processing unevenness of the thickness dimension on the resonance frequency difference between the driving mode and the detecting mode can be reduced, so that the sensitivity unevenness of the sensor can be reduced. Further, in the fourth embodiment, the stress reduction connecting beams 93 and 95 are formed using the L-shaped beams 93A and 95A. However, the present invention is not limited thereto, and the stress reduction connecting portion is only required to be the length of the detecting beam. It is sufficient to have a degree of freedom in the direction (torsion axis direction). Therefore, for example, the stress-reduction connecting beam 93 of the second modification shown in FIG. 25 can be used, and a τ-shaped beam 93A connected to the end side of the detecting mass portion 15 in a z-shape can be used to form a stress-reduction connection. Beam. Further, for example, the stress reduction connecting beam 137127.doc • 48· 1379992 93 of the third modification shown in FIG. 26 may be used repeatedly in the direction orthogonal to the detecting beam 92 for one or more times. In the above embodiments, the detection beams 16, Π, 92, and 94 are formed by using a torsion support beam that extends linearly along the detection axes A and B, and the return beam 93A " • For example, it is also possible to use a torsion support beam that is repeated one or more times along the detection axes A and B. In the above embodiments, the detection beams 16, i 7, 92, and 94 are used to make φ as follows. The torsion support beam is formed by twisting the torsion support beam when the proof mass portions 15 and 82 are displaced in the thickness direction of the substrate 2. However, the present invention is not limited thereto, and for example, the following deflection may be used. The support beam is formed to support the beam, and the deflection support beam is deflected when the detection mass portion is displaced in the thickness direction of the substrate. Further, in each of the above embodiments, the detection beams 16 and 17 are configured as follows. 'that' will be set in the inspection quality department 5 and 82 are connected between the support portion 3 on the outer circumferential side and the inner circumferential side of the detection mass portions 15 and 82. However, the invention is not limited thereto, and for example, the support portion may be provided in the configuration The inner peripheral side of the detecting mass portion is connected between the supporting portion and the outer peripheral side of the detecting mass portion by using a detecting beam. [Brief Description of the Drawing] Fig. 1 shows the first aspect of the present invention in a state in which the cover is removed. Fig. 2 is a plan view showing an enlarged portion of the angular velocity sensor in Fig. 2. Fig. 3 is an enlarged plan view showing the vibration generating portion of Fig. 1. .doc -49- 1379992 Fig. 4 is a plan view showing the state of the angular velocity sensor in which the fixed side detecting electrode is overlapped in the drawing. Fig. 5 is an angle velocity sensor viewed from the direction of the arrow ν·ν in Fig. 1. Fig. 6 is a cross-sectional view of the angular velocity sensor viewed from the direction of the arrow ¥1_¥1 in Fig. 1. Fig. 7 is a diagram showing the state of the angular velocity sensor by detecting the state of the mass portion vibrating in the x-axis direction. 6 section view of the same position. Figure 8 is a Fig. 9 is a schematic explanatory diagram showing the angular velocity sensor in a state where the driving mass portion has vibrated. Fig. 1 shows the vibration control circuit of the angular velocity sensor and the angular velocity detection Fig. 11 is a cross-sectional view showing a substrate bonding step and the same position as Fig. 5. Fig. 12 is a cross-sectional view showing a thinning step and the same position as Fig. 5. Fig. 13 is a view showing a functional portion forming step. Fig. 14 is a cross-sectional view showing a state in which the cover is joined and is the same as Fig. 5. Fig. 1 is a view showing a vibration generating portion of the angular velocity sensor according to the first modification. Figure 3 is a plan view of the same position. Fig. 16 is a plan view showing the angular velocity sensor of the second embodiment in a state in which the cover is removed. 137127.doc • 50-1379992 Fig. 17 is a plan view showing a state in which the fixed side detecting electrode is superimposed on the angular velocity sensor in Fig. 16. Figure 18 is a cross-sectional view of the angular velocity sensor viewed from the direction of the arrow xviII-XVIII in Figure 6. Fig. 19 is a plan view showing the angular velocity sensation of the third embodiment in a state in which the cover is removed.

Figure 20 is a cross-sectional view of the angular velocity sensor viewed from the direction of the arrow χχ-χχ in Figure 19. Figure 21 is a cross-sectional view of the observation angular velocity sensor from the arrow χΧΙ_ΧΧΙ* in Fig. 19. Fig. 22 is a plan view showing the angular velocity sensor of the fourth embodiment in a state in which the cover is removed. Figure 23 is a plan view showing an enlarged view of an essential part of the angular velocity sensor of Figure 22; Fig. 24 is a plan view showing the vicinity of the connecting portion in an enlarged manner without stress.

Fig. 25 is a plan view showing, in an enlarged manner, the periphery of the stress reduction connecting portion of the second modification. Fig. 26 is a plan view showing, in an enlarged manner, a stress reduction connecting portion of a third modification. [Explanation of main component symbols] 1, 71, 81, 91 2 4~7 4Β ~7Β Angular velocity sensor Substrate Driving quality section Pivot

137127.doc 5U 1379992 8 Drive beam 9 Connecting beams 10 to 13 and 13 丨 Vibration generating unit (driving mechanism) 15 and 82 Detecting mass parts 16 , 17 , 92 , 94 Detecting beams 18 to 21 , 76 to 79 Displacement detecting unit (Shift detection mechanism) 22 ' 23 Vibration monitoring unit (monitoring mechanism) 72 to 75 Cover plate 93, 95, 93', 93" Stress reduction connection beam (stress reduction connection) 137127.doc -52-

Claims (1)

1379992 X. Patent Application Range: 1. An angular velocity sensor composed of the following members: a substrate; four driving mass portions that are opposed to the substrate and that are disposed opposite to the center portion a position symmetrical; the driving beam supports the respective driving mass portions in such a manner as to be parallel to the substrate such that the respective driving mass portions can vibrate around a fulcrum located on the center portion side; The drive points are disposed on a side of a center portion of the substrate, and the four drive mass portions are vibrated in a circumferential direction surrounding the center portion around the fulcrum; a detecting mass portion connected to the four driving mass portions by using the driving beam; a detecting beam disposed between the detecting mass portion and the substrate, so that the detecting mass portion can be parallel to the substrate a shaft and vibration support the detection mass portion; and a displacement detecting mechanism that vibrates around the two axes at the detection mass portion At the time of the detection, the detection quality portion is displaced in the thickness direction of the substrate. 2. The angular velocity sensor of claim 1, wherein the four driving mass portions are disposed at equal intervals from each other in a circumferential direction surrounding the central portion, • 37127.doc 1379992 The two drive mass portions are formed to extend along the two axes. 3) The angular velocity sensor of claim 1 or 2, wherein the displacement detecting mechanism is located between two adjacent driving mass portions, disposed at a position symmetrical with respect to the central portion, and by the above The detection mass unit is configured by four detection electrodes that are disposed opposite to each other. 4. The angular velocity sensor of claim 1 or 2, wherein the detecting mass portion is provided with a cover plate that covers the detecting mass portion with a gap between the four driving mass portions, and the displacement detecting mechanism It is disposed at a position symmetrical with respect to the center portion and is configured by four detecting electrodes provided to face the cover plate. 5. The angular velocity sensor of claim 1 or 2, wherein said detecting mass portion is configured such that all or a portion thereof has a thickness dimension that is thinner than said driving mass portion, said driving beam 'coupling beam, and thickness of said detecting beam. 6. The angular velocity sensor of claim 1 or 2, wherein a monitoring mechanism for monitoring a shift in a vibration direction of said driving mass portion is provided. 7. The angular velocity sensor of claim 1 or 2, wherein said detecting beam is formed using a torsion support beam which is subjected to torsional deformation when said detecting mass portion is displaced in a thickness direction of said substrate. 8. The angular velocity sensor of claim 7, wherein the detecting beam is configured to be connected to the detecting mass portion and the substrate by using a stress reducing connecting portion, wherein the stress reducing connecting portion is reduced in torsional deformation The stress on the end side of the test beam 137127.doc