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WO2009048018A1 - 磁気検出装置 - Google Patents

磁気検出装置 Download PDF

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Publication number
WO2009048018A1
WO2009048018A1 PCT/JP2008/068017 JP2008068017W WO2009048018A1 WO 2009048018 A1 WO2009048018 A1 WO 2009048018A1 JP 2008068017 W JP2008068017 W JP 2008068017W WO 2009048018 A1 WO2009048018 A1 WO 2009048018A1
Authority
WO
WIPO (PCT)
Prior art keywords
magnetic
magnetic body
fixed
layer
magnetic layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2008/068017
Other languages
English (en)
French (fr)
Inventor
Takafumi Noguchi
Kazushige Seshimo
Tokuo Nakamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Alps Alpine Co Ltd
Original Assignee
Alps Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Alps Electric Co Ltd filed Critical Alps Electric Co Ltd
Priority to JP2009536984A priority Critical patent/JP5066576B2/ja
Publication of WO2009048018A1 publication Critical patent/WO2009048018A1/ja
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/003—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring position, not involving coordinate determination
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y25/00—Nanomagnetism, e.g. magnetoimpedance, anisotropic magnetoresistance, giant magnetoresistance or tunneling magnetoresistance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
    • G01R33/09—Magnetoresistive devices
    • G01R33/093—Magnetoresistive devices using multilayer structures, e.g. giant magnetoresistance sensors

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Nanotechnology (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Measuring Magnetic Variables (AREA)

Abstract

【課題】　特に、従来に比べてＸ－Ｙ平面上に位置する磁石の検知範囲を広げることが可能な磁気検出装置を提供することを目的としている。 【解決手段】　基板１１には磁気センサ１２、第１の磁性体１３及び第２の磁性体１４が組み込まれている。前記磁気センサ１２に内蔵される磁気抵抗効果素子は、少なくとも、高さ方向（Ｚ方向）に固定磁性層、フリー磁性層、及び、前記固定磁性層とフリー磁性層との間に介在する非磁性層を積層した構造を備える。前記固定磁性層の磁化方向は、前記Ｚ方向に直交するＸ方向の一方向に固定されており、前記第１の磁性体１３及び第２の磁性体１４は、前記磁気抵抗効果素子のＸ方向の両側に間隔を空けて配置されている。前記第１の磁性体１３及び第２の磁性体１４のＸ方向に向く対向面１３ａ１，１４ａ１は、Ｙ方向及びＺ方向に互いにずれて配置されている。
PCT/JP2008/068017 2007-10-11 2008-10-03 磁気検出装置 Ceased WO2009048018A1 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2009536984A JP5066576B2 (ja) 2007-10-11 2008-10-03 磁気検出装置

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007265354 2007-10-11
JP2007-265354 2007-10-11

Publications (1)

Publication Number Publication Date
WO2009048018A1 true WO2009048018A1 (ja) 2009-04-16

Family

ID=40549163

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/068017 Ceased WO2009048018A1 (ja) 2007-10-11 2008-10-03 磁気検出装置

Country Status (2)

Country Link
JP (1) JP5066576B2 (ja)
WO (1) WO2009048018A1 (ja)

Cited By (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011101716A (ja) * 2009-11-11 2011-05-26 Sensatec Co Ltd 磁気検出器及びその製造方法
WO2011089978A1 (ja) * 2010-01-20 2011-07-28 アルプス電気株式会社 磁気センサ
CN102292773A (zh) * 2009-09-25 2011-12-21 艾沃思宾技术公司 三轴磁场传感器
JP2012037463A (ja) * 2010-08-11 2012-02-23 Alps Electric Co Ltd 磁気センサ
JP2012112689A (ja) * 2010-11-22 2012-06-14 Alps Electric Co Ltd 磁気センサ
WO2012096132A1 (ja) * 2011-01-13 2012-07-19 アルプス電気株式会社 磁気センサ
JP2013076698A (ja) * 2011-09-29 2013-04-25 Volta Field Technology Corp 磁気抵抗センシング部材及び磁気抵抗センシング装置
JP2013148406A (ja) * 2012-01-18 2013-08-01 Alps Electric Co Ltd 磁気センサ
WO2013118498A1 (ja) * 2012-02-07 2013-08-15 旭化成エレクトロニクス株式会社 磁気センサ及びその磁気検出方法
JP2013178226A (ja) * 2012-02-07 2013-09-09 Asahi Kasei Electronics Co Ltd 磁気センサ及びその磁気検出方法
GB2508375A (en) * 2012-11-29 2014-06-04 Ibm A position sensor comprising a magnetoresistive element
CN105022007A (zh) * 2014-04-28 2015-11-04 宇能电科技股份有限公司 磁阻组件及磁阻装置
US9269891B2 (en) 2010-03-31 2016-02-23 Everspin Technologies, Inc. Process integration of a single chip three axis magnetic field sensor
JP2016170028A (ja) * 2015-03-12 2016-09-23 Tdk株式会社 磁気センサ
US9453890B2 (en) 2013-03-26 2016-09-27 Asahi Kasei Microdevices Corporation Magnetic sensor and magnetic detecting method of the same
CN106461739A (zh) * 2014-05-09 2017-02-22 爱知制钢株式会社 磁检测装置及其制造方法
WO2017149831A1 (ja) * 2016-03-03 2017-09-08 Tdk株式会社 磁気センサ
JP2018072026A (ja) * 2016-10-25 2018-05-10 Tdk株式会社 磁場検出装置
JP2018091784A (ja) * 2016-12-06 2018-06-14 Tdk株式会社 磁場検出装置
WO2020148915A1 (ja) * 2019-01-18 2020-07-23 艾礼富▲電▼子（深▲セン▼）有限公司 ホール素子又はホールｉｃを用いた磁界検出装置及び磁界検出装置を用いた近接センサ
JP2020177024A (ja) * 2020-06-30 2020-10-29 Tdk株式会社 磁場検出装置
WO2021224621A1 (en) * 2020-03-25 2021-11-11 Direct Thrust Designs Limited Magnetic field detector

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006156661A (ja) * 2004-11-29 2006-06-15 Alps Electric Co Ltd 薄膜磁気抵抗素子及びその製造方法並びに薄膜磁気抵抗素子を用いた磁気センサ
JP2006276983A (ja) * 2005-03-28 2006-10-12 Yamaha Corp ポインティングデバイス用の磁気センサ

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006156661A (ja) * 2004-11-29 2006-06-15 Alps Electric Co Ltd 薄膜磁気抵抗素子及びその製造方法並びに薄膜磁気抵抗素子を用いた磁気センサ
JP2006276983A (ja) * 2005-03-28 2006-10-12 Yamaha Corp ポインティングデバイス用の磁気センサ

Cited By (54)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USRE50684E1 (en) 2009-09-25 2025-12-02 Everspin Technologies, Inc. Three axis magnetic field sensor
USRE46428E1 (en) 2009-09-25 2017-06-06 Everspin Technologies, Inc. Three axis magnetic field sensor
CN102292773A (zh) * 2009-09-25 2011-12-21 艾沃思宾技术公司 三轴磁场传感器
USRE46180E1 (en) 2009-09-25 2016-10-18 Everspin Technologies, Inc. Three axis magnetic field sensor
KR101849516B1 (ko) * 2009-09-25 2018-04-17 에버스핀 테크놀러지스, 인크. ３ 축선 자기장 센서
DE112010003775B4 (de) 2009-09-25 2021-11-25 EverSpin Technologies,Inc. Dreiachsen-Magnetfeldsensor
JP2013506141A (ja) * 2009-09-25 2013-02-21 エバースピン テクノロジーズ インコーポレイテッド ３軸磁場センサー
USRE49404E1 (en) 2009-09-25 2023-01-31 Everspin Technologies, Inc. Three axis magnetic field sensor
JP2011101716A (ja) * 2009-11-11 2011-05-26 Sensatec Co Ltd 磁気検出器及びその製造方法
JP5297539B2 (ja) * 2010-01-20 2013-09-25 アルプス電気株式会社 磁気センサ
WO2011089978A1 (ja) * 2010-01-20 2011-07-28 アルプス電気株式会社 磁気センサ
US10276789B2 (en) 2010-03-31 2019-04-30 Everspin Technologies, Inc. Methods of manufacturing a magnetic field sensor
US9553261B2 (en) 2010-03-31 2017-01-24 Everspin Technologies, Inc. Methods of manufacturing a magnetic field sensor
US9525129B2 (en) 2010-03-31 2016-12-20 Everspin Technologies, Inc. Methods of manufacturing a magnetic field sensor
US11678584B2 (en) 2010-03-31 2023-06-13 Everspin Technologies, Inc. Methods of manufacturing a magnetic field sensor
US9893274B2 (en) 2010-03-31 2018-02-13 Everspin Technologies, Inc. Methods of manufacturing a magnetic field sensor
US11024799B2 (en) 2010-03-31 2021-06-01 Everspin Technologies, Inc. Methods of manufacturing a magnetic field sensor
US9269891B2 (en) 2010-03-31 2016-02-23 Everspin Technologies, Inc. Process integration of a single chip three axis magnetic field sensor
US9362491B2 (en) 2010-03-31 2016-06-07 Everspin Technologies, Inc. Methods of manufacturing a magnetic field sensor
JP2012037463A (ja) * 2010-08-11 2012-02-23 Alps Electric Co Ltd 磁気センサ
JP2012112689A (ja) * 2010-11-22 2012-06-14 Alps Electric Co Ltd 磁気センサ
WO2012096132A1 (ja) * 2011-01-13 2012-07-19 アルプス電気株式会社 磁気センサ
JP5518215B2 (ja) * 2011-01-13 2014-06-11 アルプス電気株式会社 磁気センサ
CN103299202A (zh) * 2011-01-13 2013-09-11 阿尔卑斯电气株式会社 磁传感器
JP2013076698A (ja) * 2011-09-29 2013-04-25 Volta Field Technology Corp 磁気抵抗センシング部材及び磁気抵抗センシング装置
JP2013148406A (ja) * 2012-01-18 2013-08-01 Alps Electric Co Ltd 磁気センサ
US9599681B2 (en) 2012-02-07 2017-03-21 Asahi Kasei Microdevices Corporation Magnetic sensor and magnetic detecting method of the same
WO2013118498A1 (ja) * 2012-02-07 2013-08-15 旭化成エレクトロニクス株式会社 磁気センサ及びその磁気検出方法
CN104105978A (zh) * 2012-02-07 2014-10-15 旭化成微电子株式会社 磁传感器及其磁检测方法
JP2013178226A (ja) * 2012-02-07 2013-09-09 Asahi Kasei Electronics Co Ltd 磁気センサ及びその磁気検出方法
CN104105978B (zh) * 2012-02-07 2016-07-06 旭化成微电子株式会社 磁传感器及其磁检测方法
US9719804B2 (en) 2012-11-29 2017-08-01 International Business Machines Corporation Position sensor
GB2508375A (en) * 2012-11-29 2014-06-04 Ibm A position sensor comprising a magnetoresistive element
US9453890B2 (en) 2013-03-26 2016-09-27 Asahi Kasei Microdevices Corporation Magnetic sensor and magnetic detecting method of the same
CN105022007A (zh) * 2014-04-28 2015-11-04 宇能电科技股份有限公司 磁阻组件及磁阻装置
US10048329B2 (en) 2014-05-09 2018-08-14 Aichi Steel Corporation Magnetic detection device and method of manufacturing same
CN106461739B (zh) * 2014-05-09 2019-06-07 爱知制钢株式会社 磁检测装置及其制造方法
EP3141920A4 (en) * 2014-05-09 2018-01-03 Aichi Steel Corporation Magnetic detection device and method for producing same
CN106461739A (zh) * 2014-05-09 2017-02-22 爱知制钢株式会社 磁检测装置及其制造方法
JP2016170028A (ja) * 2015-03-12 2016-09-23 Tdk株式会社 磁気センサ
CN108700637A (zh) * 2016-03-03 2018-10-23 Tdk株式会社 磁传感器
CN108700637B (zh) * 2016-03-03 2020-09-25 Tdk株式会社 磁传感器
WO2017149831A1 (ja) * 2016-03-03 2017-09-08 Tdk株式会社 磁気センサ
JP2018072026A (ja) * 2016-10-25 2018-05-10 Tdk株式会社 磁場検出装置
US12313704B2 (en) 2016-10-25 2025-05-27 Tdk Corporation Magnetic field detection device
US11808825B2 (en) * 2016-10-25 2023-11-07 Tdk Corporation Magnetic field detection device
US20220244321A1 (en) * 2016-10-25 2022-08-04 Tdk Corporation Magnetic field detection device
US11353518B2 (en) 2016-12-06 2022-06-07 Tdk Corporation Magnetic field detection device
US11703551B2 (en) 2016-12-06 2023-07-18 Tdk Corporation Magnetic field detection device
JP2018091784A (ja) * 2016-12-06 2018-06-14 Tdk株式会社 磁場検出装置
WO2020148915A1 (ja) * 2019-01-18 2020-07-23 艾礼富▲電▼子（深▲セン▼）有限公司 ホール素子又はホールｉｃを用いた磁界検出装置及び磁界検出装置を用いた近接センサ
CN115812158A (zh) * 2020-03-25 2023-03-17 直接推力设计有限公司 磁场检测器
WO2021224621A1 (en) * 2020-03-25 2021-11-11 Direct Thrust Designs Limited Magnetic field detector
JP2020177024A (ja) * 2020-06-30 2020-10-29 Tdk株式会社 磁場検出装置

Also Published As

Publication number Publication date
JP5066576B2 (ja) 2012-11-07
JPWO2009048018A1 (ja) 2011-02-17

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