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WO2009048018A1 - Magnetic detector - Google Patents

Magnetic detector Download PDF

Info

Publication number
WO2009048018A1
WO2009048018A1 PCT/JP2008/068017 JP2008068017W WO2009048018A1 WO 2009048018 A1 WO2009048018 A1 WO 2009048018A1 JP 2008068017 W JP2008068017 W JP 2008068017W WO 2009048018 A1 WO2009048018 A1 WO 2009048018A1
Authority
WO
WIPO (PCT)
Prior art keywords
magnetic
magnetic body
fixed
layer
magnetic layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2008/068017
Other languages
French (fr)
Japanese (ja)
Inventor
Takafumi Noguchi
Kazushige Seshimo
Tokuo Nakamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Alps Alpine Co Ltd
Original Assignee
Alps Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Alps Electric Co Ltd filed Critical Alps Electric Co Ltd
Priority to JP2009536984A priority Critical patent/JP5066576B2/en
Publication of WO2009048018A1 publication Critical patent/WO2009048018A1/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/003—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring position, not involving coordinate determination
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y25/00—Nanomagnetism, e.g. magnetoimpedance, anisotropic magnetoresistance, giant magnetoresistance or tunneling magnetoresistance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
    • G01R33/09—Magnetoresistive devices
    • G01R33/093—Magnetoresistive devices using multilayer structures, e.g. giant magnetoresistance sensors

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Nanotechnology (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Measuring Magnetic Variables (AREA)

Abstract

[PROBLEMS] To provide a magnetic detector which can especially widen the detection range of a magnet located on the X-Y plane as compared with prior art. [MEANS FOR SOLVING PROBLEMS] A magnetic sensor (12), a first magnetic body (13) and a second magnetic body (14) are mounted on a substrate (11). A magnetoresistive effect element incorporated in the magnetic sensor (12) has a structure laminating a fixed magnetic layer, a free magnetic layer, and a nonmagnetic layer interposed between the fixed magnetic layer and the free magnetic layer at least in the height direction (Z direction). The magnetization direction of the fixed magnetic layer is fixed to one direction of the X direction intersecting the Z direction perpendicularly, and the first magnetic body (13) and the second magnetic body (14) are arranged on the opposite sides of the magnetoresistive effect element in the X direction while spaced apart from each other. The surfaces (13a1, 14a1) of the first magnetic body (13) and the second magnetic body (14) facing each other in the X direction are arranged while being shifted from each other in the Y and Z directions.
PCT/JP2008/068017 2007-10-11 2008-10-03 Magnetic detector Ceased WO2009048018A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2009536984A JP5066576B2 (en) 2007-10-11 2008-10-03 Magnetic detector

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007265354 2007-10-11
JP2007-265354 2007-10-11

Publications (1)

Publication Number Publication Date
WO2009048018A1 true WO2009048018A1 (en) 2009-04-16

Family

ID=40549163

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/068017 Ceased WO2009048018A1 (en) 2007-10-11 2008-10-03 Magnetic detector

Country Status (2)

Country Link
JP (1) JP5066576B2 (en)
WO (1) WO2009048018A1 (en)

Cited By (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011101716A (en) * 2009-11-11 2011-05-26 Sensatec Co Ltd Magnetic detector and method for manufacturing the same
WO2011089978A1 (en) * 2010-01-20 2011-07-28 アルプス電気株式会社 Magnetic sensor
CN102292773A (en) * 2009-09-25 2011-12-21 艾沃思宾技术公司 Three axis magnetic field sensor
JP2012037463A (en) * 2010-08-11 2012-02-23 Alps Electric Co Ltd Magnetic sensor
JP2012112689A (en) * 2010-11-22 2012-06-14 Alps Electric Co Ltd Magnetic sensor
WO2012096132A1 (en) * 2011-01-13 2012-07-19 アルプス電気株式会社 Magnetic sensor
JP2013076698A (en) * 2011-09-29 2013-04-25 Volta Field Technology Corp Magnetoresistive sensing component and magnetoresistive sensing device
JP2013148406A (en) * 2012-01-18 2013-08-01 Alps Electric Co Ltd Magnetic sensor
WO2013118498A1 (en) * 2012-02-07 2013-08-15 旭化成エレクトロニクス株式会社 Magnetic sensor and magnetic detection method thereof
JP2013178226A (en) * 2012-02-07 2013-09-09 Asahi Kasei Electronics Co Ltd Magnetic sensor and magnetism detection method
GB2508375A (en) * 2012-11-29 2014-06-04 Ibm A position sensor comprising a magnetoresistive element
CN105022007A (en) * 2014-04-28 2015-11-04 宇能电科技股份有限公司 Magnetic resistance components and magnetic resistance devices
US9269891B2 (en) 2010-03-31 2016-02-23 Everspin Technologies, Inc. Process integration of a single chip three axis magnetic field sensor
JP2016170028A (en) * 2015-03-12 2016-09-23 Tdk株式会社 Magnetic sensor
US9453890B2 (en) 2013-03-26 2016-09-27 Asahi Kasei Microdevices Corporation Magnetic sensor and magnetic detecting method of the same
CN106461739A (en) * 2014-05-09 2017-02-22 爱知制钢株式会社 Magnetic detection device and method for producing same
WO2017149831A1 (en) * 2016-03-03 2017-09-08 Tdk株式会社 Magnetic sensor
JP2018072026A (en) * 2016-10-25 2018-05-10 Tdk株式会社 Magnetic field detector
JP2018091784A (en) * 2016-12-06 2018-06-14 Tdk株式会社 Magnetic field detector
WO2020148915A1 (en) * 2019-01-18 2020-07-23 艾礼富▲電▼子（深▲セン▼）有限公司 Magnetic field detection device comprising hall element or hall ic and proximity sensor comprising magnetic field detection device
JP2020177024A (en) * 2020-06-30 2020-10-29 Tdk株式会社 Magnetic field detector
WO2021224621A1 (en) * 2020-03-25 2021-11-11 Direct Thrust Designs Limited Magnetic field detector

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006156661A (en) * 2004-11-29 2006-06-15 Alps Electric Co Ltd Thin film magnetoresistive element, manufacturing method thereof, and magnetic sensor using thin film magnetoresistive element
JP2006276983A (en) * 2005-03-28 2006-10-12 Yamaha Corp Magnetic sensor for pointing device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006156661A (en) * 2004-11-29 2006-06-15 Alps Electric Co Ltd Thin film magnetoresistive element, manufacturing method thereof, and magnetic sensor using thin film magnetoresistive element
JP2006276983A (en) * 2005-03-28 2006-10-12 Yamaha Corp Magnetic sensor for pointing device

Cited By (54)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USRE50684E1 (en) 2009-09-25 2025-12-02 Everspin Technologies, Inc. Three axis magnetic field sensor
USRE46428E1 (en) 2009-09-25 2017-06-06 Everspin Technologies, Inc. Three axis magnetic field sensor
CN102292773A (en) * 2009-09-25 2011-12-21 艾沃思宾技术公司 Three axis magnetic field sensor
USRE46180E1 (en) 2009-09-25 2016-10-18 Everspin Technologies, Inc. Three axis magnetic field sensor
KR101849516B1 (en) * 2009-09-25 2018-04-17 에버스핀 테크놀러지스, 인크. Three axis magnetic field sensor
DE112010003775B4 (en) 2009-09-25 2021-11-25 EverSpin Technologies,Inc. Three-axis magnetic field sensor
JP2013506141A (en) * 2009-09-25 2013-02-21 エバースピン テクノロジーズ インコーポレイテッド 3-axis magnetic field sensor
USRE49404E1 (en) 2009-09-25 2023-01-31 Everspin Technologies, Inc. Three axis magnetic field sensor
JP2011101716A (en) * 2009-11-11 2011-05-26 Sensatec Co Ltd Magnetic detector and method for manufacturing the same
JP5297539B2 (en) * 2010-01-20 2013-09-25 アルプス電気株式会社 Magnetic sensor
WO2011089978A1 (en) * 2010-01-20 2011-07-28 アルプス電気株式会社 Magnetic sensor
US10276789B2 (en) 2010-03-31 2019-04-30 Everspin Technologies, Inc. Methods of manufacturing a magnetic field sensor
US9553261B2 (en) 2010-03-31 2017-01-24 Everspin Technologies, Inc. Methods of manufacturing a magnetic field sensor
US9525129B2 (en) 2010-03-31 2016-12-20 Everspin Technologies, Inc. Methods of manufacturing a magnetic field sensor
US11678584B2 (en) 2010-03-31 2023-06-13 Everspin Technologies, Inc. Methods of manufacturing a magnetic field sensor
US9893274B2 (en) 2010-03-31 2018-02-13 Everspin Technologies, Inc. Methods of manufacturing a magnetic field sensor
US11024799B2 (en) 2010-03-31 2021-06-01 Everspin Technologies, Inc. Methods of manufacturing a magnetic field sensor
US9269891B2 (en) 2010-03-31 2016-02-23 Everspin Technologies, Inc. Process integration of a single chip three axis magnetic field sensor
US9362491B2 (en) 2010-03-31 2016-06-07 Everspin Technologies, Inc. Methods of manufacturing a magnetic field sensor
JP2012037463A (en) * 2010-08-11 2012-02-23 Alps Electric Co Ltd Magnetic sensor
JP2012112689A (en) * 2010-11-22 2012-06-14 Alps Electric Co Ltd Magnetic sensor
WO2012096132A1 (en) * 2011-01-13 2012-07-19 アルプス電気株式会社 Magnetic sensor
JP5518215B2 (en) * 2011-01-13 2014-06-11 アルプス電気株式会社 Magnetic sensor
CN103299202A (en) * 2011-01-13 2013-09-11 阿尔卑斯电气株式会社 Magnetic sensor
JP2013076698A (en) * 2011-09-29 2013-04-25 Volta Field Technology Corp Magnetoresistive sensing component and magnetoresistive sensing device
JP2013148406A (en) * 2012-01-18 2013-08-01 Alps Electric Co Ltd Magnetic sensor
US9599681B2 (en) 2012-02-07 2017-03-21 Asahi Kasei Microdevices Corporation Magnetic sensor and magnetic detecting method of the same
WO2013118498A1 (en) * 2012-02-07 2013-08-15 旭化成エレクトロニクス株式会社 Magnetic sensor and magnetic detection method thereof
CN104105978A (en) * 2012-02-07 2014-10-15 旭化成微电子株式会社 Magnetic sensor and magnetic detection method thereof
JP2013178226A (en) * 2012-02-07 2013-09-09 Asahi Kasei Electronics Co Ltd Magnetic sensor and magnetism detection method
CN104105978B (en) * 2012-02-07 2016-07-06 旭化成微电子株式会社 Magnetic Sensor and magnetic detection method thereof
US9719804B2 (en) 2012-11-29 2017-08-01 International Business Machines Corporation Position sensor
GB2508375A (en) * 2012-11-29 2014-06-04 Ibm A position sensor comprising a magnetoresistive element
US9453890B2 (en) 2013-03-26 2016-09-27 Asahi Kasei Microdevices Corporation Magnetic sensor and magnetic detecting method of the same
CN105022007A (en) * 2014-04-28 2015-11-04 宇能电科技股份有限公司 Magnetic resistance components and magnetic resistance devices
US10048329B2 (en) 2014-05-09 2018-08-14 Aichi Steel Corporation Magnetic detection device and method of manufacturing same
CN106461739B (en) * 2014-05-09 2019-06-07 爱知制钢株式会社 Magnetic detection device and manufacturing method thereof
EP3141920A4 (en) * 2014-05-09 2018-01-03 Aichi Steel Corporation Magnetic detection device and method for producing same
CN106461739A (en) * 2014-05-09 2017-02-22 爱知制钢株式会社 Magnetic detection device and method for producing same
JP2016170028A (en) * 2015-03-12 2016-09-23 Tdk株式会社 Magnetic sensor
CN108700637A (en) * 2016-03-03 2018-10-23 Tdk株式会社 Magnetic sensor
CN108700637B (en) * 2016-03-03 2020-09-25 Tdk株式会社 Magnetic sensor
WO2017149831A1 (en) * 2016-03-03 2017-09-08 Tdk株式会社 Magnetic sensor
JP2018072026A (en) * 2016-10-25 2018-05-10 Tdk株式会社 Magnetic field detector
US12313704B2 (en) 2016-10-25 2025-05-27 Tdk Corporation Magnetic field detection device
US11808825B2 (en) * 2016-10-25 2023-11-07 Tdk Corporation Magnetic field detection device
US20220244321A1 (en) * 2016-10-25 2022-08-04 Tdk Corporation Magnetic field detection device
US11353518B2 (en) 2016-12-06 2022-06-07 Tdk Corporation Magnetic field detection device
US11703551B2 (en) 2016-12-06 2023-07-18 Tdk Corporation Magnetic field detection device
JP2018091784A (en) * 2016-12-06 2018-06-14 Tdk株式会社 Magnetic field detector
WO2020148915A1 (en) * 2019-01-18 2020-07-23 艾礼富▲電▼子（深▲セン▼）有限公司 Magnetic field detection device comprising hall element or hall ic and proximity sensor comprising magnetic field detection device
CN115812158A (en) * 2020-03-25 2023-03-17 直接推力设计有限公司 magnetic field detector
WO2021224621A1 (en) * 2020-03-25 2021-11-11 Direct Thrust Designs Limited Magnetic field detector
JP2020177024A (en) * 2020-06-30 2020-10-29 Tdk株式会社 Magnetic field detector

Also Published As

Publication number Publication date
JPWO2009048018A1 (en) 2011-02-17
JP5066576B2 (en) 2012-11-07

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