[go: up one dir, main page]

WO2009047867A1 - 硬質皮膜被覆部材、及びその製造方法 - Google Patents

硬質皮膜被覆部材、及びその製造方法 Download PDF

Info

Publication number
WO2009047867A1
WO2009047867A1 PCT/JP2007/069993 JP2007069993W WO2009047867A1 WO 2009047867 A1 WO2009047867 A1 WO 2009047867A1 JP 2007069993 W JP2007069993 W JP 2007069993W WO 2009047867 A1 WO2009047867 A1 WO 2009047867A1
Authority
WO
WIPO (PCT)
Prior art keywords
coating film
hard coating
plane
group
peak intensity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2007/069993
Other languages
English (en)
French (fr)
Inventor
Kazuyuki Kubota
Hitoshi Ohnuma
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Moldino Tool Engineering Ltd
Original Assignee
Hitachi Tool Engineering Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=40549023&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=WO2009047867(A1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Hitachi Tool Engineering Ltd filed Critical Hitachi Tool Engineering Ltd
Priority to US12/682,535 priority Critical patent/US8304098B2/en
Priority to JP2009536907A priority patent/JP5246165B2/ja
Priority to KR1020107010319A priority patent/KR101200785B1/ko
Priority to PCT/JP2007/069993 priority patent/WO2009047867A1/ja
Priority to EP07829729.8A priority patent/EP2208560B2/en
Priority to CN2007801010615A priority patent/CN101855035B/zh
Publication of WO2009047867A1 publication Critical patent/WO2009047867A1/ja
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
    • C23C14/325—Electric arc evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0641—Nitrides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0664—Carbonitrides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0676—Oxynitrides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C30/00—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process
    • C23C30/005—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process on hard metal substrates
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24479—Structurally defined web or sheet [e.g., overall dimension, etc.] including variation in thickness
    • Y10T428/24612—Composite web or sheet
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/26—Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/26—Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension
    • Y10T428/263—Coating layer not in excess of 5 mils thick or equivalent
    • Y10T428/264—Up to 3 mils
    • Y10T428/265—1 mil or less

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Cutting Tools, Boring Holders, And Turrets (AREA)
  • Physical Vapour Deposition (AREA)
  • Ceramic Products (AREA)

Abstract

　本発明の硬質皮膜被覆部材は、圧縮応力を有する厚さ5μm以上の硬質皮膜が被覆された部材であって、前記硬質皮膜が組成式：(Me1-aXa)α(N1-x-yCxOy)［ただし、Meは4a、5a、6a族からなる群から選ばれた少なくとも一種の元素であり、XはAl、Si、B、Sからなる群から選ばれた少なくとも一種の元素であり、a，x，yはそれぞれX、C、Oの含有量（原子比）を表し、αは(Me1-aXa)と(N1-x-yCxOy)との比を表し、0.1≦a≦0.65，0≦x≦0.1，0≦y≦0.1及び0.85≦α≦1.25を満たす。］で表される面心立方構造を有し、前記硬質皮膜のX線回折における(111)面のピーク強度Ir、(200)面のピーク強度Is及び(220)面のピーク強度Itが、2≦Is/Ir及び0.2≦It/Ir≦1を満たし、(200)面の半価幅W(°)が、W≦0.7であることを特徴とする。
PCT/JP2007/069993 2007-10-12 2007-10-12 硬質皮膜被覆部材、及びその製造方法 Ceased WO2009047867A1 (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
US12/682,535 US8304098B2 (en) 2007-10-12 2007-10-12 Hard-coated member, and its production method
JP2009536907A JP5246165B2 (ja) 2007-10-12 2007-10-12 硬質皮膜被覆部材の製造方法
KR1020107010319A KR101200785B1 (ko) 2007-10-12 2007-10-12 경질 피막 피복 부재, 및 그 제조 방법
PCT/JP2007/069993 WO2009047867A1 (ja) 2007-10-12 2007-10-12 硬質皮膜被覆部材、及びその製造方法
EP07829729.8A EP2208560B2 (en) 2007-10-12 2007-10-12 Process for the production of the member covered with hard coating
CN2007801010615A CN101855035B (zh) 2007-10-12 2007-10-12 被覆有硬质被膜的部件及其制造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2007/069993 WO2009047867A1 (ja) 2007-10-12 2007-10-12 硬質皮膜被覆部材、及びその製造方法

Publications (1)

Publication Number Publication Date
WO2009047867A1 true WO2009047867A1 (ja) 2009-04-16

Family

ID=40549023

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2007/069993 Ceased WO2009047867A1 (ja) 2007-10-12 2007-10-12 硬質皮膜被覆部材、及びその製造方法

Country Status (6)

Country Link
US (1) US8304098B2 (ja)
EP (1) EP2208560B2 (ja)
JP (1) JP5246165B2 (ja)
KR (1) KR101200785B1 (ja)
CN (1) CN101855035B (ja)
WO (1) WO2009047867A1 (ja)

Cited By (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012011393A (ja) * 2010-06-29 2012-01-19 Kobe Steel Ltd せん断用金型及びその製造方法
US20120247141A1 (en) * 2010-01-14 2012-10-04 Carrier Corporation Reciprocating Refrigeration Compressor Oil Sealing
JP2014505369A (ja) * 2011-02-01 2014-02-27 エーエスエムエル ネザーランズ ビー．ブイ． 基板テーブル、リソグラフィ装置、およびデバイス製造方法
JP2014145114A (ja) * 2013-01-29 2014-08-14 Kobe Steel Ltd 軟質金属に対する耐凝着性に優れた硬質皮膜
WO2014129273A1 (ja) * 2013-02-21 2014-08-28 住友電工ハードメタル株式会社 表面被覆切削工具およびその製造方法
JP2014526393A (ja) * 2011-09-19 2014-10-06 ラミナ テクノロジーズ ソシエテ アノニム 被膜付き切削工具
JP2015053358A (ja) * 2013-09-06 2015-03-19 三菱マテリアル株式会社 サーミスタ用金属窒化物材料及びその製造方法並びにサーミスタセンサ
JP2016003369A (ja) * 2014-06-17 2016-01-12 住友電工ハードメタル株式会社 硬質被膜、切削工具および硬質被膜の製造方法
JP2016003368A (ja) * 2014-06-17 2016-01-12 住友電工ハードメタル株式会社 硬質被膜、切削工具および硬質被膜の製造方法
EP2463398A4 (en) * 2009-08-04 2017-04-05 Tungaloy Corporation Coated member
WO2017094440A1 (ja) * 2015-12-02 2017-06-08 三菱日立ツール株式会社 硬質皮膜、硬質皮膜被覆部材及びその製造方法、及び硬質皮膜の製造に用いるターゲット及びその製造方法
WO2018230212A1 (ja) * 2017-06-12 2018-12-20 日本特殊陶業株式会社 表面被覆切削工具
JP2019018286A (ja) * 2017-07-18 2019-02-07 三菱マテリアル株式会社 硬質被覆層がすぐれた耐摩耗性と耐チッピング性を発揮する表面被覆切削工具
WO2021193875A1 (ja) * 2020-03-27 2021-09-30 京セラ株式会社 被覆工具および切削工具
JPWO2021193876A1 (ja) * 2020-03-27 2021-09-30
JPWO2022138400A1 (ja) * 2020-12-25 2022-06-30
JPWO2022138147A1 (ja) * 2020-12-25 2022-06-30
WO2023181927A1 (ja) * 2022-03-22 2023-09-28 株式会社神戸製鋼所 被覆部材

Families Citing this family (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102373431A (zh) * 2010-08-26 2012-03-14 鸿富锦精密工业（深圳）有限公司 铝合金表面防腐处理方法及其制品
WO2012056758A1 (ja) * 2010-10-28 2012-05-03 住友電工ハードメタル株式会社 表面被覆焼結体
KR101787496B1 (ko) * 2011-07-25 2017-10-18 쿄세라 코포레이션 절삭 공구
WO2013045454A2 (en) * 2011-09-30 2013-04-04 Cemecon Ag Coating of substrates using hipims
CN104349855B (zh) * 2012-06-27 2016-10-05 京瓷株式会社 切削工具
JP5479658B1 (ja) * 2012-10-02 2014-04-23 株式会社リケン ピストンリング
GB201220462D0 (en) * 2012-11-14 2012-12-26 Rolls Royce Plc Friction welding
DE102012023260A1 (de) * 2012-11-29 2014-06-05 Oerlikon Trading Ag, Trübbach Verfahren zur Strukturierung von Schichtoberflächen und Vorrichtung dazu
JP6206133B2 (ja) * 2012-11-30 2017-10-04 三菱マテリアル株式会社 表面被覆切削工具
JP2014122400A (ja) * 2012-12-21 2014-07-03 Kobe Steel Ltd 軟質金属に対する耐凝着性に優れた硬質皮膜
JP5618429B2 (ja) * 2012-12-28 2014-11-05 住友電工ハードメタル株式会社 表面被覆部材およびその製造方法
KR102178189B1 (ko) 2013-07-03 2020-11-13 외를리콘 서피스 솔루션즈 아게, 페피콘 TixSi1-xN 층 및 그의 생산
HUE061930T2 (hu) * 2014-09-17 2023-09-28 Oerlikon Surface Solutions Ag Pfaeffikon Eljárás javított kopásállóságú kétrétegû bevonatos vágószerszám elõállítására
JP6634647B2 (ja) * 2014-11-27 2020-01-22 三菱マテリアル株式会社 耐チッピング性、耐摩耗性にすぐれた表面被覆切削工具
TR201902064T4 (tr) * 2015-02-24 2019-03-21 Oerlikon Surface Solutions Ag Pfaeffikon Yüksek mukavemetli çeliği soğuk metal biçimlendirmeye yönelik yüksek performanslı kaplama.
CN107427931B (zh) * 2015-03-27 2019-03-15 株式会社泰珂洛 被覆切削工具
TWI617380B (zh) * 2015-09-26 2018-03-11 Kyocera Corporation 棒狀體及切削工具
JP6222675B2 (ja) * 2016-03-28 2017-11-01 住友電工ハードメタル株式会社 表面被覆切削工具、およびその製造方法
US20180061608A1 (en) * 2017-09-28 2018-03-01 Oxford Instruments X-ray Technology Inc. Window member for an x-ray device
DE102018112335A1 (de) * 2018-05-23 2019-11-28 Hartmetall-Werkzeugfabrik Paul Horn Gmbh Magnetronsputtervorrichtung
WO2020026389A1 (ja) * 2018-08-01 2020-02-06 オーエスジー株式会社 硬質被膜および硬質被膜被覆部材
DE112018007876T5 (de) * 2018-08-01 2021-04-22 Osg Corporation Hartbeschichtung und mit Hartbeschichtung bedecktes Element
CN110857465B (zh) * 2018-08-22 2021-11-19 赣州澳克泰工具技术有限公司 刀具及其制造方法
JP7312382B2 (ja) * 2021-03-18 2023-07-21 株式会社タンガロイ 被覆切削工具
WO2025099326A1 (en) * 2023-11-10 2025-05-15 Oerlikon Surface Solutions Ag, Pfäffikon Ti-al-x-n coatings for enhanced fatigue properties

Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07164211A (ja) * 1993-07-21 1995-06-27 Balzers Ag 長い有効寿命を有するコーティング工具
JPH08127862A (ja) * 1994-10-28 1996-05-21 Sumitomo Electric Ind Ltd 積層体
JPH11502775A (ja) * 1995-03-30 1999-03-09 ヒラプ アクチェンゲゼルシャフト 切削工具
JP2002103122A (ja) * 2000-09-29 2002-04-09 Mmc Kobelco Tool Kk 耐摩耗性に優れた硬質皮膜被覆小径軸物工具及びその製造方法
JP2003136303A (ja) * 2001-10-30 2003-05-14 Mmc Kobelco Tool Kk 高速切削加工で硬質被覆層がすぐれた耐摩耗性を発揮する表面被覆超硬合金製切削工具
JP2005186227A (ja) * 2003-12-26 2005-07-14 Nachi Fujikoshi Corp 硬質膜被覆工具
JP2005271155A (ja) * 2004-03-25 2005-10-06 Sumitomo Electric Hardmetal Corp 被覆切削工具
JP2006009059A (ja) * 2004-06-23 2006-01-12 Tadahiro Wada 硬質被膜、硬質被膜被覆工具、および硬質被膜のコーティング方法
JP2006137982A (ja) * 2004-11-11 2006-06-01 Hitachi Tool Engineering Ltd 硬質皮膜被覆部材及びその被覆方法
JP2006316351A (ja) * 2000-12-28 2006-11-24 Kobe Steel Ltd 切削工具用硬質皮膜の製造方法
JP2006342414A (ja) * 2005-06-10 2006-12-21 Hitachi Tool Engineering Ltd 硬質皮膜

Family Cites Families (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5075181A (en) † 1989-05-05 1991-12-24 Kennametal Inc. High hardness/high compressive stress multilayer coated tool
JP2901043B2 (ja) 1993-12-03 1999-06-02 神鋼コベルコツール株式会社 耐摩耗性・耐溶着性硬質皮膜被覆工具およびその製法
JP3546967B2 (ja) 1993-12-28 2004-07-28 日立ツール株式会社 被覆硬質合金
DE69526301T2 (de) 1994-10-28 2002-12-05 Sumitomo Electric Industries, Ltd. Mehrschichtiges Material
JP3638332B2 (ja) 1995-01-31 2005-04-13 日立ツール株式会社 被覆硬質合金
JP3003986B2 (ja) * 1996-05-21 2000-01-31 日立ツール株式会社 表面被覆超硬合金製スローアウェイインサート
CZ301516B6 (cs) * 1997-09-12 2010-03-31 Oerlikon Trading Ag, Truebbach Nástroj s ochranným vrstvovým systémem a zpusob jeho výroby
JP3514127B2 (ja) 1998-07-17 2004-03-31 三菱マテリアル株式会社 粗大ドロップレットの少ない金属化合物薄膜の形成を可能とするアーク式イオンプレーティング装置
CA2327031C (en) * 1999-11-29 2007-07-03 Vladimir Gorokhovsky Composite vapour deposited coatings and process therefor
JP3377090B2 (ja) 2000-03-31 2003-02-17 住友電気工業株式会社 被覆切削工具
JP4112836B2 (ja) 2001-06-19 2008-07-02 株式会社神戸製鋼所 切削工具用硬質皮膜を形成するためのターゲット
ATE343659T1 (de) * 2000-12-28 2006-11-15 Kobe Steel Ltd Hartstoffschicht für schneidwerkzeuge
DE10233222B4 (de) † 2001-07-23 2007-03-01 Kabushiki Kaisha Kobe Seiko Sho (Kobe Steel, Ltd.), Kobe Harte verschleissfeste Schicht, Verfahren zum Bilden derselben und Verwendung
EP1440754A4 (en) * 2001-10-30 2008-05-07 Mitsubishi Materials Corp COATED CEMENTITIOUS CARBIDE CUTTING TOOL COMPRISING A HARD COATING LAYER HAVING EXCELLENT WEAR RESISTANCE PROPERTIES IN HIGH SPEED MACHINING
JP3693001B2 (ja) 2001-10-30 2005-09-07 三菱マテリアル神戸ツールズ株式会社 高速切削加工で硬質被覆層がすぐれた耐摩耗性を発揮する表面被覆超硬合金製切削工具
JP3931328B2 (ja) 2001-11-15 2007-06-13 三菱マテリアル株式会社 高速切削加工で硬質被覆層がすぐれた耐摩耗性を発揮する表面被覆超硬合金製切削工具
JP3659217B2 (ja) 2001-11-15 2005-06-15 三菱マテリアル株式会社 高速切削加工で硬質被覆層がすぐれた耐摩耗性を発揮する表面被覆超硬合金製切削工具
JP4034563B2 (ja) 2001-12-27 2008-01-16 株式会社神戸製鋼所 真空アーク蒸発源
US7226670B2 (en) * 2003-04-28 2007-06-05 Oc Oerlikon Balzers Ag Work piece with a hard film of AlCr-containing material, and process for its production
CN100479955C (zh) * 2003-12-05 2009-04-22 住友电工硬质合金株式会社 表面被覆切削工具
KR20050063463A (ko) † 2003-12-22 2005-06-28 재단법인 포항산업과학연구원 윤활특성이 우수한 경질코팅 제조방법 및 경질코팅 구조
JP2005335040A (ja) 2004-05-31 2005-12-08 Sumitomo Electric Hardmetal Corp 表面被覆切削工具
EP1614655B2 (en) * 2004-06-18 2018-08-08 Hitachi Tool Engineering Ltd. Hard coating and its production method
JP4615259B2 (ja) * 2004-06-18 2011-01-19 日立ツール株式会社 硬質皮膜の製造方法
SE528789C2 (sv) * 2004-09-10 2007-02-13 Sandvik Intellectual Property PVD-belagt skär av hårdmetall samt sätt att tillverka detta
JP4394625B2 (ja) † 2004-09-24 2010-01-06 国立大学法人富山大学 金型表面用保護膜
US7537822B2 (en) 2005-05-26 2009-05-26 Hitachi Tool Engineering, Ltd. Hard-coated member
JP2007056323A (ja) 2005-08-25 2007-03-08 Hitachi Tool Engineering Ltd 硬質皮膜
US7960016B2 (en) * 2007-03-23 2011-06-14 Oerlikon Trading Ag, Truebbach Wear resistant hard coating for a workpiece and method for producing the same

Patent Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07164211A (ja) * 1993-07-21 1995-06-27 Balzers Ag 長い有効寿命を有するコーティング工具
JPH08127862A (ja) * 1994-10-28 1996-05-21 Sumitomo Electric Ind Ltd 積層体
JPH11502775A (ja) * 1995-03-30 1999-03-09 ヒラプ アクチェンゲゼルシャフト 切削工具
JP2002103122A (ja) * 2000-09-29 2002-04-09 Mmc Kobelco Tool Kk 耐摩耗性に優れた硬質皮膜被覆小径軸物工具及びその製造方法
JP2006316351A (ja) * 2000-12-28 2006-11-24 Kobe Steel Ltd 切削工具用硬質皮膜の製造方法
JP2003136303A (ja) * 2001-10-30 2003-05-14 Mmc Kobelco Tool Kk 高速切削加工で硬質被覆層がすぐれた耐摩耗性を発揮する表面被覆超硬合金製切削工具
JP2005186227A (ja) * 2003-12-26 2005-07-14 Nachi Fujikoshi Corp 硬質膜被覆工具
JP2005271155A (ja) * 2004-03-25 2005-10-06 Sumitomo Electric Hardmetal Corp 被覆切削工具
JP2006009059A (ja) * 2004-06-23 2006-01-12 Tadahiro Wada 硬質被膜、硬質被膜被覆工具、および硬質被膜のコーティング方法
JP2006137982A (ja) * 2004-11-11 2006-06-01 Hitachi Tool Engineering Ltd 硬質皮膜被覆部材及びその被覆方法
JP2006342414A (ja) * 2005-06-10 2006-12-21 Hitachi Tool Engineering Ltd 硬質皮膜

Cited By (33)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2463398A4 (en) * 2009-08-04 2017-04-05 Tungaloy Corporation Coated member
US20120247141A1 (en) * 2010-01-14 2012-10-04 Carrier Corporation Reciprocating Refrigeration Compressor Oil Sealing
US9017830B2 (en) 2010-06-29 2015-04-28 Kobe Steel, Ltd. Shearing die and method for manufacturing the same
JP2012011393A (ja) * 2010-06-29 2012-01-19 Kobe Steel Ltd せん断用金型及びその製造方法
JP2014505369A (ja) * 2011-02-01 2014-02-27 エーエスエムエル ネザーランズ ビー．ブイ． 基板テーブル、リソグラフィ装置、およびデバイス製造方法
US9329497B2 (en) 2011-02-01 2016-05-03 Asml Netherlands B.V. Substrate table, lithographic apparatus and device manufacturing method
JP2014526393A (ja) * 2011-09-19 2014-10-06 ラミナ テクノロジーズ ソシエテ アノニム 被膜付き切削工具
JP2014145114A (ja) * 2013-01-29 2014-08-14 Kobe Steel Ltd 軟質金属に対する耐凝着性に優れた硬質皮膜
US9410235B2 (en) 2013-01-29 2016-08-09 Kobe Steel, Ltd. Hard coating film having anti-adhesion property to soft metal
JP2014184546A (ja) * 2013-02-21 2014-10-02 Sumitomo Electric Hardmetal Corp 表面被覆切削工具およびその製造方法
WO2014129273A1 (ja) * 2013-02-21 2014-08-28 住友電工ハードメタル株式会社 表面被覆切削工具およびその製造方法
US9920423B2 (en) 2013-02-21 2018-03-20 Sumitomo Electric Hardmetal Corp. Surface-coated cutting tool and process for producing same
JP2015053358A (ja) * 2013-09-06 2015-03-19 三菱マテリアル株式会社 サーミスタ用金属窒化物材料及びその製造方法並びにサーミスタセンサ
JP2016003369A (ja) * 2014-06-17 2016-01-12 住友電工ハードメタル株式会社 硬質被膜、切削工具および硬質被膜の製造方法
JP2016003368A (ja) * 2014-06-17 2016-01-12 住友電工ハードメタル株式会社 硬質被膜、切削工具および硬質被膜の製造方法
JPWO2017094440A1 (ja) * 2015-12-02 2018-04-12 三菱日立ツール株式会社 硬質皮膜、硬質皮膜被覆部材及びその製造方法、及び硬質皮膜の製造に用いるターゲット及びその製造方法
WO2017094440A1 (ja) * 2015-12-02 2017-06-08 三菱日立ツール株式会社 硬質皮膜、硬質皮膜被覆部材及びその製造方法、及び硬質皮膜の製造に用いるターゲット及びその製造方法
WO2018230212A1 (ja) * 2017-06-12 2018-12-20 日本特殊陶業株式会社 表面被覆切削工具
CN110730698A (zh) * 2017-06-12 2020-01-24 日本特殊陶业株式会社 覆表面切削工具
CN110730698B (zh) * 2017-06-12 2021-08-24 日本特殊陶业株式会社 覆表面切削工具
US11173555B2 (en) 2017-06-12 2021-11-16 Ngk Spark Plug Co., Ltd. Surface-coated cutting tool
JP2019018286A (ja) * 2017-07-18 2019-02-07 三菱マテリアル株式会社 硬質被覆層がすぐれた耐摩耗性と耐チッピング性を発揮する表面被覆切削工具
JPWO2021193875A1 (ja) * 2020-03-27 2021-09-30
WO2021193876A1 (ja) * 2020-03-27 2021-09-30 京セラ株式会社 被覆工具および切削工具
JPWO2021193876A1 (ja) * 2020-03-27 2021-09-30
WO2021193875A1 (ja) * 2020-03-27 2021-09-30 京セラ株式会社 被覆工具および切削工具
JPWO2022138400A1 (ja) * 2020-12-25 2022-06-30
JPWO2022138147A1 (ja) * 2020-12-25 2022-06-30
WO2022138147A1 (ja) * 2020-12-25 2022-06-30 京セラ株式会社 被覆工具および切削工具
JP7507887B2 (ja) 2020-12-25 2024-06-28 京セラ株式会社 被覆工具および切削工具
WO2023181927A1 (ja) * 2022-03-22 2023-09-28 株式会社神戸製鋼所 被覆部材
JP2023140002A (ja) * 2022-03-22 2023-10-04 株式会社神戸製鋼所 被覆部材
JP7760424B2 (ja) 2022-03-22 2025-10-27 株式会社神戸製鋼所 被覆部材

Also Published As

Publication number Publication date
KR20100063822A (ko) 2010-06-11
JP5246165B2 (ja) 2013-07-24
US20100215912A1 (en) 2010-08-26
EP2208560A1 (en) 2010-07-21
US8304098B2 (en) 2012-11-06
EP2208560B2 (en) 2017-09-20
CN101855035A (zh) 2010-10-06
KR101200785B1 (ko) 2012-11-13
EP2208560A4 (en) 2011-06-15
JPWO2009047867A1 (ja) 2011-02-17
EP2208560B1 (en) 2013-09-25
EP2208560B9 (en) 2017-07-26
CN101855035B (zh) 2013-03-27

Similar Documents

Publication Publication Date Title
WO2009047867A1 (ja) 硬質皮膜被覆部材、及びその製造方法
TW200833851A (en) Layer system with at least a mixed crystal layer of a multiple oxide
EP1905863A3 (en) Slide member
DE60139818D1 (de) Target zur Bildung einer Hartschicht
EP1970462A3 (en) Low stress metallic based coating
WO2009031383A1 (ja) 触媒およびその製造方法ならびにその用途
WO2007048098A3 (en) Erosion resistant coatings
WO2007115959A3 (en) Process for producing metal oxide flakes
WO2009028671A1 (ja) 高温強度に優れたボイラ用低熱膨張Ｎｉ基超耐熱合金及びそれを用いたボイラ部品並びにボイラ部品の製造方法
WO2008133302A1 (ja) 軟磁性薄帯、その製造方法、磁性部品、およびアモルファス薄帯
WO2009131902A3 (en) Yttrium and titanium high-k dielectric films
WO2007120205A3 (en) Compositions of corrosion-resistant fe-based amorphous metals suitable for producing thermal spray coatings
WO2008123046A1 (ja) チタン酸カリウム及びその製造方法並びに摩擦材及び樹脂組成物
WO2008114605A1 (ja) 軟磁性薄帯、磁心、磁性部品、および軟磁性薄帯の製造方法
ECSP088597A (es) Sal de sulfato de hidrógeno novedosa
MX2010005951A (es) Material anticorrosion.
WO2009072989A3 (en) A hydrogen storage material and a process for release of hydrogen
WO2008108363A1 (ja) 冷間圧延鋼板および合金化溶融亜鉛めっき鋼板ならびにそれらの製造方法
FR2901721B1 (fr) Poudres de phase max et procede de fabrication des dites poudres
EP1932889A4 (en) Pearly plant pigment, preparation method therefor, coating composition and coating composition
DE602006005521D1 (de) Hartbeschichtung, Target zur Herstellung einer Hartbeschichtung, und Verfahren zur Herstellung einer Hartbeschichtung
MX2019009260A (es) Lamina de acero galvanizada y metodo para fabricar la misma.
WO2008130011A1 (ja) 圧電磁器組成物及び圧電素子
WO2007031454A3 (en) Coating compositions comprising a latent activator for marking substrates
WO2007062056A3 (en) Silicon-germanium hydrides and methods for making and using same

Legal Events

Date Code Title Description
WWE Wipo information: entry into national phase

Ref document number: 200780101061.5

Country of ref document: CN

121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 07829729

Country of ref document: EP

Kind code of ref document: A1

WWE Wipo information: entry into national phase

Ref document number: 2009536907

Country of ref document: JP

WWE Wipo information: entry into national phase

Ref document number: 2007829729

Country of ref document: EP

WWE Wipo information: entry into national phase

Ref document number: 12682535

Country of ref document: US

NENP Non-entry into the national phase

Ref country code: DE

ENP Entry into the national phase

Ref document number: 20107010319

Country of ref document: KR

Kind code of ref document: A