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DE602006005521D1 - Hartbeschichtung, Target zur Herstellung einer Hartbeschichtung, und Verfahren zur Herstellung einer Hartbeschichtung - Google Patents

Hartbeschichtung, Target zur Herstellung einer Hartbeschichtung, und Verfahren zur Herstellung einer Hartbeschichtung

Info

Publication number
DE602006005521D1
DE602006005521D1 DE602006005521T DE602006005521T DE602006005521D1 DE 602006005521 D1 DE602006005521 D1 DE 602006005521D1 DE 602006005521 T DE602006005521 T DE 602006005521T DE 602006005521 T DE602006005521 T DE 602006005521T DE 602006005521 D1 DE602006005521 D1 DE 602006005521D1
Authority
DE
Germany
Prior art keywords
hard coating
layer
target
making
composition
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE602006005521T
Other languages
English (en)
Inventor
Kenji Yamamoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kobe Steel Ltd
Original Assignee
Kobe Steel Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kobe Steel Ltd filed Critical Kobe Steel Ltd
Publication of DE602006005521D1 publication Critical patent/DE602006005521D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C30/00—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B42—BOOKBINDING; ALBUMS; FILES; SPECIAL PRINTED MATTER
    • B42D—BOOKS; BOOK COVERS; LOOSE LEAVES; PRINTED MATTER CHARACTERISED BY IDENTIFICATION OR SECURITY FEATURES; PRINTED MATTER OF SPECIAL FORMAT OR STYLE NOT OTHERWISE PROVIDED FOR; DEVICES FOR USE THEREWITH AND NOT OTHERWISE PROVIDED FOR; MOVABLE-STRIP WRITING OR READING APPARATUS
    • B42D3/00—Book covers
    • B42D3/12—Book covers combined with other articles
    • B42D3/123—Book covers combined with other articles incorporating sound producing or light emitting means or carrying sound records
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B42—BOOKBINDING; ALBUMS; FILES; SPECIAL PRINTED MATTER
    • B42D—BOOKS; BOOK COVERS; LOOSE LEAVES; PRINTED MATTER CHARACTERISED BY IDENTIFICATION OR SECURITY FEATURES; PRINTED MATTER OF SPECIAL FORMAT OR STYLE NOT OTHERWISE PROVIDED FOR; DEVICES FOR USE THEREWITH AND NOT OTHERWISE PROVIDED FOR; MOVABLE-STRIP WRITING OR READING APPARATUS
    • B42D1/00—Books or other bound products
    • B42D1/08—Albums
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0641—Nitrides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0664—Carbonitrides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
    • C23C14/325—Electric arc evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
    • C23C14/3414—Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
    • C23C28/044—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material coatings specially adapted for cutting tools or wear applications
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B42—BOOKBINDING; ALBUMS; FILES; SPECIAL PRINTED MATTER
    • B42P—INDEXING SCHEME RELATING TO BOOKS, FILING APPLIANCES OR THE LIKE
    • B42P2241/00—Parts, details or accessories for books or filing appliances
    • B42P2241/16—Books or filing appliances combined with other articles
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/26—Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Business, Economics & Management (AREA)
  • Educational Administration (AREA)
  • Educational Technology (AREA)
  • Physical Vapour Deposition (AREA)
  • Cutting Tools, Boring Holders, And Turrets (AREA)
  • Drilling Tools (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Laminated Bodies (AREA)
DE602006005521T 2005-02-08 2006-01-20 Hartbeschichtung, Target zur Herstellung einer Hartbeschichtung, und Verfahren zur Herstellung einer Hartbeschichtung Expired - Lifetime DE602006005521D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2005032199 2005-02-08
JP2005310339A JP4939032B2 (ja) 2005-02-08 2005-10-25 硬質皮膜、および硬質皮膜の製造方法

Publications (1)

Publication Number Publication Date
DE602006005521D1 true DE602006005521D1 (de) 2009-04-23

Family

ID=36096355

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602006005521T Expired - Lifetime DE602006005521D1 (de) 2005-02-08 2006-01-20 Hartbeschichtung, Target zur Herstellung einer Hartbeschichtung, und Verfahren zur Herstellung einer Hartbeschichtung

Country Status (6)

Country Link
US (2) US7479331B2 (de)
EP (4) EP2065484B1 (de)
JP (1) JP4939032B2 (de)
KR (1) KR100753738B1 (de)
AT (1) ATE425275T1 (de)
DE (1) DE602006005521D1 (de)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009068047A (ja) * 2007-09-11 2009-04-02 Kobe Steel Ltd 硬質皮膜、硬質皮膜被覆材および冷間塑性加工用金型
KR101508988B1 (ko) * 2008-01-11 2015-04-14 삼성전자주식회사 멀티미디어 컨텐츠 리스트 제공방법 및 이를 적용한멀티미디어 기기
RU2424367C1 (ru) * 2010-04-20 2011-07-20 Государственное образовательное учреждение высшего профессионального образования "Ульяновский государственный технический университет" Способ получения многослойного покрытия для режущего инструмента
JP5976631B2 (ja) * 2010-04-23 2016-08-23 エリコン メタプラス ゲゼルシャフト ミット ベシュレンクテル ハフツンク ＡｌＴｉＮコーティングを被着する被着方法
JP5344204B2 (ja) * 2012-03-05 2013-11-20 三菱マテリアル株式会社 表面被覆切削工具
JP6211858B2 (ja) * 2013-09-12 2017-10-11 株式会社神戸製鋼所 潤滑性と耐摩耗性に優れた硬質皮膜の製造方法
JP6349581B2 (ja) * 2015-01-14 2018-07-04 住友電工ハードメタル株式会社 硬質被膜、切削工具および硬質被膜の製造方法
CN104805404B (zh) * 2015-04-30 2017-03-01 山东大学 Mo‑W‑S‑C自润滑涂层刀具的制备工艺
JP6963932B2 (ja) * 2017-08-14 2021-11-10 Ｄｏｗａサーモテック株式会社 珪炭窒化バナジウム膜、珪炭窒化バナジウム膜被覆部材およびその製造方法
EP3763466B1 (de) 2018-03-07 2025-05-07 Sumitomo Electric Hardmetal Corp. Oberflächenbeschichtetes schneidwerkzeug und verfahren zur herstellung davon
CN111587157B (zh) 2018-03-07 2023-06-20 住友电工硬质合金株式会社 表面被覆切削工具及其制造方法
KR102821766B1 (ko) * 2018-10-26 2025-06-16 외를리콘 서피스 솔루션즈 아게, 페피콘 Ti 및/또는 Si와 미세합금된 바나듐 알루미늄 니트라이드(VAlN)
EP3938556A1 (de) * 2019-03-15 2022-01-19 Nanofilm Technologies International Limited Verbesserte beschichtungsverfahren
KR20230170147A (ko) * 2019-03-20 2023-12-18 가부시키가이샤 프로테리아루 피복 금형, 피복 금형의 제조 방법 및 경질 피막 형성용 타깃
CN112126900B (zh) * 2019-06-24 2023-06-23 中国科学院宁波材料技术与工程研究所 高温低摩擦硬质纳米多层VAlCN/VN-Ag涂层、其制备方法及应用
JP7610782B2 (ja) * 2021-03-23 2025-01-09 三菱マテリアル株式会社 表面被覆切削工具
JP7610781B2 (ja) * 2021-03-23 2025-01-09 三菱マテリアル株式会社 表面被覆切削工具
CN114351087B (zh) * 2021-12-15 2023-03-17 核工业西南物理研究院 一种CrAlVSiN涂层的制备方法
CN119343195A (zh) * 2022-09-22 2025-01-21 住友电气工业株式会社 切削工具
JP7537630B1 (ja) * 2023-05-17 2024-08-21 住友電気工業株式会社 切削工具

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4714660A (en) * 1985-12-23 1987-12-22 Fansteel Inc. Hard coatings with multiphase microstructures
JP3027502B2 (ja) * 1993-03-15 2000-04-04 健 増本 耐摩耗性非晶質硬質膜及びその製造方法
JPH0941127A (ja) * 1995-08-03 1997-02-10 Kobe Steel Ltd 硬質皮膜
JP4019457B2 (ja) 1997-07-15 2007-12-12 日新電機株式会社 アーク式蒸発源
JP2000144376A (ja) * 1998-11-18 2000-05-26 Sumitomo Electric Ind Ltd 摺動特性の良好な皮膜
JP4112834B2 (ja) 2000-12-28 2008-07-02 株式会社神戸製鋼所 切削工具用硬質皮膜を形成するためのターゲット
EP1702997B1 (de) * 2000-12-28 2013-11-20 Kabushiki Kaisha Kobe Seiko Sho Verfahren zur Herstellung einer Hartstoffschicht für Schneidwerkzeuge
JP4062582B2 (ja) * 2001-07-23 2008-03-19 株式会社神戸製鋼所 切削工具用硬質皮膜およびその製造方法並びに硬質皮膜形成用ターゲット
DE10262174B4 (de) 2001-07-23 2007-03-15 Kabushiki Kaisha Kobe Seiko Sho (Kobe Steel, Ltd.), Kobe Harte verschleissfeste Schicht, Verfahren zum Bilden derselben und Verwendung
JP4038448B2 (ja) * 2003-03-25 2008-01-23 株式会社神戸製鋼所 硬質皮膜
JP2005271190A (ja) * 2003-12-05 2005-10-06 Sumitomo Electric Hardmetal Corp 表面被覆切削工具
JP2005271106A (ja) * 2004-03-23 2005-10-06 Sumitomo Electric Hardmetal Corp 被覆切削工具

Also Published As

Publication number Publication date
US20100038232A1 (en) 2010-02-18
EP1688513A1 (de) 2006-08-09
EP1688513B1 (de) 2009-03-11
US7479331B2 (en) 2009-01-20
JP4939032B2 (ja) 2012-05-23
US20060177698A1 (en) 2006-08-10
KR20060090603A (ko) 2006-08-14
EP2065484A1 (de) 2009-06-03
ATE425275T1 (de) 2009-03-15
EP2065484B1 (de) 2011-11-30
EP2060655A1 (de) 2009-05-20
EP2060655B1 (de) 2013-07-17
JP2006249574A (ja) 2006-09-21
KR100753738B1 (ko) 2007-08-31
EP2138602A1 (de) 2009-12-30
EP2138602B1 (de) 2013-07-03
US7790301B2 (en) 2010-09-07

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