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WO2008136198A1 - 超音波トランスデューサ及び超音波撮像装置 - Google Patents

超音波トランスデューサ及び超音波撮像装置 Download PDF

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Publication number
WO2008136198A1
WO2008136198A1 PCT/JP2008/050847 JP2008050847W WO2008136198A1 WO 2008136198 A1 WO2008136198 A1 WO 2008136198A1 JP 2008050847 W JP2008050847 W JP 2008050847W WO 2008136198 A1 WO2008136198 A1 WO 2008136198A1
Authority
WO
WIPO (PCT)
Prior art keywords
ultrasonic
cell
imaging apparatus
receiving
transducer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2008/050847
Other languages
English (en)
French (fr)
Inventor
Teiichiro Ikeda
Hiroki Tanaka
Shuntaro Machida
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Hitachi Healthcare Manufacturing Ltd
Original Assignee
Hitachi Ltd
Hitachi Medical Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd, Hitachi Medical Corp filed Critical Hitachi Ltd
Priority to JP2009512886A priority Critical patent/JP5087617B2/ja
Priority to CN2008800137789A priority patent/CN101669375B/zh
Priority to US12/597,765 priority patent/US9636707B2/en
Priority to EP08703691.9A priority patent/EP2152024A4/en
Publication of WO2008136198A1 publication Critical patent/WO2008136198A1/ja
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/0292—Electrostatic transducers, e.g. electret-type
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B8/00—Diagnosis using ultrasonic, sonic or infrasonic waves
    • A61B8/44—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device
    • A61B8/4483—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device characterised by features of the ultrasound transducer
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B2562/00—Details of sensors; Constructional details of sensor housings or probes; Accessories for sensors
    • A61B2562/02—Details of sensors specially adapted for in-vivo measurements
    • A61B2562/028—Microscale sensors, e.g. electromechanical sensors [MEMS]
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B8/00—Diagnosis using ultrasonic, sonic or infrasonic waves

Landscapes

  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Heart & Thoracic Surgery (AREA)
  • Molecular Biology (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Pathology (AREA)
  • Radiology & Medical Imaging (AREA)
  • Physics & Mathematics (AREA)
  • Biomedical Technology (AREA)
  • Gynecology & Obstetrics (AREA)
  • Medical Informatics (AREA)
  • Biophysics (AREA)
  • Surgery (AREA)
  • Animal Behavior & Ethology (AREA)
  • General Health & Medical Sciences (AREA)
  • Public Health (AREA)
  • Veterinary Medicine (AREA)
  • Mechanical Engineering (AREA)
  • Transducers For Ultrasonic Waves (AREA)
  • Ultra Sonic Daignosis Equipment (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
  • Pressure Sensors (AREA)

Abstract

　cMUTセルアレイに均一かつ安定的な特性を与え、音響特性の向上を図る。 　通常の送受信を行いうるトランスデューサとして設計され製造されるcMUTセルの２次元アレイ１０１の最外周部もしくは端の位置に位置するセル１０２に、追加してセルの変位や振動や信号の送受を遮断するための、信号遮断部を設ける。
PCT/JP2008/050847 2007-04-27 2008-01-23 超音波トランスデューサ及び超音波撮像装置 Ceased WO2008136198A1 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2009512886A JP5087617B2 (ja) 2007-04-27 2008-01-23 静電容量型トランスデューサ及び超音波撮像装置
CN2008800137789A CN101669375B (zh) 2007-04-27 2008-01-23 静电容量式传感器以及超声波摄像装置
US12/597,765 US9636707B2 (en) 2007-04-27 2008-01-23 Capacitive micromachined ultrasonic transducer and ultrasonic imaging apparatus
EP08703691.9A EP2152024A4 (en) 2007-04-27 2008-01-23 Ultrasonic transducer and ultrasonic imaging apparatus

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007-118896 2007-04-27
JP2007118896 2007-04-27

Publications (1)

Publication Number Publication Date
WO2008136198A1 true WO2008136198A1 (ja) 2008-11-13

Family

ID=39943318

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/050847 Ceased WO2008136198A1 (ja) 2007-04-27 2008-01-23 超音波トランスデューサ及び超音波撮像装置

Country Status (5)

Country Link
US (1) US9636707B2 (ja)
EP (1) EP2152024A4 (ja)
JP (1) JP5087617B2 (ja)
CN (2) CN103350064B (ja)
WO (1) WO2008136198A1 (ja)

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010073534A1 (en) * 2008-12-25 2010-07-01 Canon Kabushiki Kaisha Electromechanical transducer and production method therefor
CN102128641A (zh) * 2010-01-12 2011-07-20 佳能株式会社 电容检测型机电变换器
JP2011524817A (ja) * 2008-06-10 2011-09-08 ローベルト ボツシユ ゲゼルシヤフト ミツト ベシユレンクテル ハフツング 基板背面からアクセスされる、マイクロメカニカル技術によるメンブラン構造体の製造方法
WO2012108252A1 (en) 2011-02-11 2012-08-16 Canon Kabushiki Kaisha Capacitive electromechanical transducer
WO2012108283A2 (en) 2011-02-11 2012-08-16 Canon Kabushiki Kaisha Method of manufacturing capacitive electromechanical transducer
JP2014510472A (ja) * 2011-03-04 2014-04-24 エプコス アクチエンゲゼルシャフト マイクロフォン及び２つのバックプレート間で膜を位置決めする方法
JP2015073793A (ja) * 2013-10-10 2015-04-20 日立アロカメディカル株式会社 超音波探触子およびそれを用いた超音波診断装置
US9073085B2 (en) 2011-11-14 2015-07-07 Canon Kabushiki Kaisha Electromechanical transducer
WO2016009783A1 (ja) * 2014-07-16 2016-01-21 日立アロカメディカル株式会社 超音波探触子、その性能評価方法及び超音波診断装置
US10139338B2 (en) 2014-01-27 2018-11-27 Canon Kabushiki Kaisha Electromechanical transducer
US10603012B2 (en) 2015-04-16 2020-03-31 Canon Kabushiki Kaisha Probe and information acquiring device

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007029357A1 (ja) * 2005-09-05 2007-03-15 Hitachi Medical Corporation 超音波撮像装置
JP5409138B2 (ja) * 2009-06-19 2014-02-05 キヤノン株式会社 電気機械変換装置、電気機械変換装置の感度ばらつき検出方法、及び補正方法
US9834434B2 (en) * 2013-11-19 2017-12-05 Canon Kabushiki Kaisha Capacitive transducer and method of manufacturing the same
JP6429759B2 (ja) * 2015-10-24 2018-11-28 キヤノン株式会社 静電容量型トランスデューサ及びそれを備える情報取得装置
JP7128693B2 (ja) 2018-09-10 2022-08-31 富士フイルムヘルスケア株式会社 超音波診断装置、及びそれに用いる探触子
FR3097052B1 (fr) 2019-06-07 2021-07-02 Commissariat Energie Atomique Procédé de fabrication d’une pluralité de résonateurs

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6242773A (ja) * 1985-08-16 1987-02-24 株式会社日立製作所 超音波照射装置
JP2004274756A (ja) * 2003-03-06 2004-09-30 General Electric Co <Ge> 超微細加工超音波トランスデューサを用いたモザイク型アレイ
JP2005117159A (ja) * 2003-10-03 2005-04-28 Fuji Photo Film Co Ltd 超音波トランスデューサアレイ及びその製造方法
JP2006186999A (ja) 2004-12-27 2006-07-13 General Electric Co <Ge> エピタキシャル・シリコン膜によって製作した容量性マイクロマシン加工超音波トランスジューサ
JP2006333952A (ja) * 2005-05-31 2006-12-14 Olympus Medical Systems Corp 静電容量型超音波振動子とその製造方法

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US4865042A (en) * 1985-08-16 1989-09-12 Hitachi, Ltd. Ultrasonic irradiation system
JP4445096B2 (ja) * 2000-04-25 2010-04-07 株式会社東芝 超音波プローブおよびこれを用いた超音波診断装置
US6558330B1 (en) * 2000-12-06 2003-05-06 Acuson Corporation Stacked and filled capacitive microelectromechanical ultrasonic transducer for medical diagnostic ultrasound systems
JP3697200B2 (ja) 2001-11-07 2005-09-21 アロカ株式会社 超音波探触子
US6676602B1 (en) 2002-07-25 2004-01-13 Siemens Medical Solutions Usa, Inc. Two dimensional array switching for beamforming in a volume
US7443765B2 (en) 2003-03-06 2008-10-28 General Electric Company Reconfigurable linear sensor arrays for reduced channel count
US7646133B2 (en) * 2004-02-27 2010-01-12 Georgia Tech Research Corporation Asymmetric membrane cMUT devices and fabrication methods
US20060004289A1 (en) * 2004-06-30 2006-01-05 Wei-Cheng Tian High sensitivity capacitive micromachined ultrasound transducer
US20060030780A1 (en) * 2004-08-03 2006-02-09 Jean-Francois Gelly System and method providing controllable attenuation of an ultrasound probe
US7888709B2 (en) * 2004-09-15 2011-02-15 Sonetics Ultrasound, Inc. Capacitive micromachined ultrasonic transducer and manufacturing method
JP4523879B2 (ja) * 2005-06-20 2010-08-11 株式会社日立製作所 電気・音響変換素子、アレイ型超音波トランスデューサおよび超音波診断装置
US7775979B2 (en) * 2005-06-29 2010-08-17 General Electric Company Transmit and receive interface array for highly integrated ultrasound scanner
EP2662153A1 (en) * 2009-03-26 2013-11-13 Norwegian University of Science and Technology (NTNU) CMUT Array

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6242773A (ja) * 1985-08-16 1987-02-24 株式会社日立製作所 超音波照射装置
JP2004274756A (ja) * 2003-03-06 2004-09-30 General Electric Co <Ge> 超微細加工超音波トランスデューサを用いたモザイク型アレイ
JP2005117159A (ja) * 2003-10-03 2005-04-28 Fuji Photo Film Co Ltd 超音波トランスデューサアレイ及びその製造方法
JP2006186999A (ja) 2004-12-27 2006-07-13 General Electric Co <Ge> エピタキシャル・シリコン膜によって製作した容量性マイクロマシン加工超音波トランスジューサ
JP2006333952A (ja) * 2005-05-31 2006-12-14 Olympus Medical Systems Corp 静電容量型超音波振動子とその製造方法

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of EP2152024A4 *

Cited By (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011524817A (ja) * 2008-06-10 2011-09-08 ローベルト ボツシユ ゲゼルシヤフト ミツト ベシユレンクテル ハフツング 基板背面からアクセスされる、マイクロメカニカル技術によるメンブラン構造体の製造方法
US8455964B2 (en) 2008-12-25 2013-06-04 Canon Kabushiki Kaisha Electromechanical transducer and production method therefor
JP2010172181A (ja) * 2008-12-25 2010-08-05 Canon Inc 電気機械変換装置及びその作製方法
WO2010073534A1 (en) * 2008-12-25 2010-07-01 Canon Kabushiki Kaisha Electromechanical transducer and production method therefor
US9276501B2 (en) 2008-12-25 2016-03-01 Canon Kabushiki Kaisha Electromechanical transducer and production method therefor
CN102128641A (zh) * 2010-01-12 2011-07-20 佳能株式会社 电容检测型机电变换器
WO2012108252A1 (en) 2011-02-11 2012-08-16 Canon Kabushiki Kaisha Capacitive electromechanical transducer
WO2012108283A2 (en) 2011-02-11 2012-08-16 Canon Kabushiki Kaisha Method of manufacturing capacitive electromechanical transducer
JP2014510472A (ja) * 2011-03-04 2014-04-24 エプコス アクチエンゲゼルシャフト マイクロフォン及び２つのバックプレート間で膜を位置決めする方法
US9197967B2 (en) 2011-03-04 2015-11-24 Epcos Ag Microphone and method to position a membrane between two backplates
US9073085B2 (en) 2011-11-14 2015-07-07 Canon Kabushiki Kaisha Electromechanical transducer
JP2015073793A (ja) * 2013-10-10 2015-04-20 日立アロカメディカル株式会社 超音波探触子およびそれを用いた超音波診断装置
US10139338B2 (en) 2014-01-27 2018-11-27 Canon Kabushiki Kaisha Electromechanical transducer
WO2016009783A1 (ja) * 2014-07-16 2016-01-21 日立アロカメディカル株式会社 超音波探触子、その性能評価方法及び超音波診断装置
JPWO2016009783A1 (ja) * 2014-07-16 2017-06-08 株式会社日立製作所 超音波探触子、その性能評価方法及び超音波診断装置
US10751027B2 (en) 2014-07-16 2020-08-25 Hitachi, Ltd. Ultrasound probe, performance evaluation method therefor, and ultrasound diagnostic equipment
US10603012B2 (en) 2015-04-16 2020-03-31 Canon Kabushiki Kaisha Probe and information acquiring device

Also Published As

Publication number Publication date
EP2152024A4 (en) 2017-01-04
CN101669375B (zh) 2013-07-10
CN103350064B (zh) 2016-12-28
JPWO2008136198A1 (ja) 2010-07-29
US9636707B2 (en) 2017-05-02
JP5087617B2 (ja) 2012-12-05
US20100137719A1 (en) 2010-06-03
CN101669375A (zh) 2010-03-10
CN103350064A (zh) 2013-10-16
EP2152024A1 (en) 2010-02-10

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