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DE102005014836A1 - Verfahren und Mittel zum Isolieren der Elemente eines Sensorarrays - Google Patents

Verfahren und Mittel zum Isolieren der Elemente eines Sensorarrays Download PDF

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Publication number
DE102005014836A1
DE102005014836A1 DE102005014836A DE102005014836A DE102005014836A1 DE 102005014836 A1 DE102005014836 A1 DE 102005014836A1 DE 102005014836 A DE102005014836 A DE 102005014836A DE 102005014836 A DE102005014836 A DE 102005014836A DE 102005014836 A1 DE102005014836 A1 DE 102005014836A1
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DE
Germany
Prior art keywords
energy
sensor
substrate
prorogation
obstacle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
DE102005014836A
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English (en)
Inventor
Robert Stephen Lewandowski
Lowell Scott Smith
Charles Edward Baumgartner
David Martin Mills
Douglas Glenn Wildes
Rayette Ann Fisher
George Charles Sogoian
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
General Electric Co
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General Electric Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by General Electric Co filed Critical General Electric Co
Publication of DE102005014836A1 publication Critical patent/DE102005014836A1/de
Ceased legal-status Critical Current

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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B5/00Cleaning by methods involving the use of air flow or gas flow
    • B08B5/02Cleaning by the force of jets, e.g. blowing-out cavities
    • B08B5/023Cleaning travelling work
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B06GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06BMETHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/0292Electrostatic transducers, e.g. electret-type
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B06GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06BMETHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • B06B1/0607Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements
    • B06B1/0622Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements on one surface
    • B06B1/0629Square array
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24HEATING; RANGES; VENTILATING
    • F24FAIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F3/00Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
    • F24F3/12Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
    • F24F3/16Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
    • F24F3/167Clean rooms, i.e. enclosed spaces in which a uniform flow of filtered air is distributed
    • GPHYSICS
    • G10MUSICAL INSTRUMENTS; ACOUSTICS
    • G10KSOUND-PRODUCING DEVICES; METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING, NOISE OR OTHER ACOUSTIC WAVES IN GENERAL; ACOUSTICS NOT OTHERWISE PROVIDED FOR
    • G10K11/00Methods or devices for transmitting, conducting or directing sound in general; Methods or devices for protecting against, or for damping, noise or other acoustic waves in general
    • G10K11/002Devices for damping, suppressing, obstructing or conducting sound in acoustic devices

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Multimedia (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • General Engineering & Computer Science (AREA)
  • Ultra Sonic Daignosis Equipment (AREA)
  • Transducers For Ultrasonic Waves (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)

Abstract

Eine Vorrichtung, die ein Array von Sensoren aufweist, das auf einem Substrat mit einer Halbleiteroberfläche aufgebaut oder in dieses eingebaut ist, und Mittel zum Isolieren jedes Sensorelementes gegenüber seinen Nachbarn werden geschaffen. In dem Fall, dass die Sensoren Ultraschall-Transducerelemente sind, wird eine akustische Isolierung in Gestalt von Gräben zwischen benachbarten Transducerelementen zum Verringern des akustischen Übersprechens geschaffen. Die Gräben können mit einem akustisch dämpfenden Material gefüllt sein. Zwischen benachbarten Transducerelementen wird zur Verringerung des elektrischen Übersprechens eine elektrische Isolierung in Gestalt von Halbleiterübergängen geschaffen. In einem Beispiel werden entgegengerichtete pn-Dioden durch Ionenimplantation in Zonen gebildet, die zwischen benachbarten Transducerelementen angeordnet sind. Diese Art der Isolierung kann einzeln oder zusammen angewandt werden.
DE102005014836A 2004-03-31 2005-03-30 Verfahren und Mittel zum Isolieren der Elemente eines Sensorarrays Ceased DE102005014836A1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US10/814,956 US20040190377A1 (en) 2003-03-06 2004-03-31 Method and means for isolating elements of a sensor array

Publications (1)

Publication Number Publication Date
DE102005014836A1 true DE102005014836A1 (de) 2005-10-20

Family

ID=35034299

Family Applications (1)

Application Number Title Priority Date Filing Date
DE102005014836A Ceased DE102005014836A1 (de) 2004-03-31 2005-03-30 Verfahren und Mittel zum Isolieren der Elemente eines Sensorarrays

Country Status (5)

Country Link
US (1) US20040190377A1 (de)
JP (1) JP4868758B2 (de)
KR (1) KR20060044973A (de)
CN (1) CN1677706A (de)
DE (1) DE102005014836A1 (de)

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Also Published As

Publication number Publication date
CN1677706A (zh) 2005-10-05
JP2005295553A (ja) 2005-10-20
JP4868758B2 (ja) 2012-02-01
US20040190377A1 (en) 2004-09-30
KR20060044973A (ko) 2006-05-16

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