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WO2008133088A1 - 含フッ素ポリマー薄膜とその製造方法 - Google Patents

含フッ素ポリマー薄膜とその製造方法 Download PDF

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Publication number
WO2008133088A1
WO2008133088A1 PCT/JP2008/057287 JP2008057287W WO2008133088A1 WO 2008133088 A1 WO2008133088 A1 WO 2008133088A1 JP 2008057287 W JP2008057287 W JP 2008057287W WO 2008133088 A1 WO2008133088 A1 WO 2008133088A1
Authority
WO
WIPO (PCT)
Prior art keywords
fluorine
containing polymer
producing
thin film
polymer thin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2008/057287
Other languages
English (en)
French (fr)
Inventor
Chikaya Tamitsuji
Kunio Watanabe
Yoshihiko Sakane
Jun Minamidate
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AGC Inc
Original Assignee
Asahi Glass Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asahi Glass Co Ltd filed Critical Asahi Glass Co Ltd
Priority to EP08740375A priority Critical patent/EP2143818A1/en
Priority to JP2009511796A priority patent/JP5273041B2/ja
Publication of WO2008133088A1 publication Critical patent/WO2008133088A1/ja
Priority to US12/581,220 priority patent/US20100080903A1/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J5/00—Manufacture of articles or shaped materials containing macromolecular substances
    • C08J5/18—Manufacture of films or sheets
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/12—Organic material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00—Processes for applying liquids or other fluent materials
    • B05D1/60—Deposition of organic layers from vapour phase
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F216/00—Copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by an alcohol, ether, aldehydo, ketonic, acetal or ketal radical
    • C08F216/12—Copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by an alcohol, ether, aldehydo, ketonic, acetal or ketal radical by an ether radical
    • C08F216/14—Monomers containing only one unsaturated aliphatic radical
    • C08F216/1408—Monomers containing halogen
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G61/00—Macromolecular compounds obtained by reactions forming a carbon-to-carbon link in the main chain of the macromolecule
    • C08G61/12—Macromolecular compounds containing atoms other than carbon in the main chain of the macromolecule
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D2506/00—Halogenated polymers
    • B05D2506/10—Fluorinated polymers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D5/00—Processes for applying liquids or other fluent materials to surfaces to obtain special surface effects, finishes or structures
    • B05D5/08—Processes for applying liquids or other fluent materials to surfaces to obtain special surface effects, finishes or structures to obtain an anti-friction or anti-adhesive surface
    • B05D5/083—Processes for applying liquids or other fluent materials to surfaces to obtain special surface effects, finishes or structures to obtain an anti-friction or anti-adhesive surface involving the use of fluoropolymers
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F216/00—Copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by an alcohol, ether, aldehydo, ketonic, acetal or ketal radical
    • C08F216/38—Copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by an alcohol, ether, aldehydo, ketonic, acetal or ketal radical by an acetal or ketal radical

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Health & Medical Sciences (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Metallurgy (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Physical Vapour Deposition (AREA)
  • Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
  • Laminated Bodies (AREA)
  • Manufacture Of Macromolecular Shaped Articles (AREA)

Abstract

　基材との密着性、および膜強度に優れた含フッ素ポリマーの製造方法の提供。 　主鎖に含フッ素脂肪族環構造を有し、重量平均分子量が３，０００～８０，０００の含フッ素ポリマーを蒸着源とする物理的蒸着法により、基材上に含フッ素ポリマー薄膜を形成することを特徴とする含フッ素ポリマー薄膜の製造方法。
PCT/JP2008/057287 2007-04-20 2008-04-14 含フッ素ポリマー薄膜とその製造方法 Ceased WO2008133088A1 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
EP08740375A EP2143818A1 (en) 2007-04-20 2008-04-14 Fluorine-containing polymer thin film and method for producing the same
JP2009511796A JP5273041B2 (ja) 2007-04-20 2008-04-14 含フッ素ポリマー薄膜とその製造方法
US12/581,220 US20100080903A1 (en) 2007-04-20 2009-10-19 Fluoropolymer thin film and method for its production

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2007-112141 2007-04-20
JP2007112141 2007-04-20
JP2007-241155 2007-09-18
JP2007241155 2007-09-18

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US12/581,220 Continuation US20100080903A1 (en) 2007-04-20 2009-10-19 Fluoropolymer thin film and method for its production

Publications (1)

Publication Number Publication Date
WO2008133088A1 true WO2008133088A1 (ja) 2008-11-06

Family

ID=39925546

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/057287 Ceased WO2008133088A1 (ja) 2007-04-20 2008-04-14 含フッ素ポリマー薄膜とその製造方法

Country Status (7)

Country Link
US (1) US20100080903A1 (ja)
EP (1) EP2143818A1 (ja)
JP (1) JP5273041B2 (ja)
KR (1) KR20100014816A (ja)
RU (1) RU2009142805A (ja)
TW (1) TW200909597A (ja)
WO (1) WO2008133088A1 (ja)

Cited By (15)

* Cited by examiner, † Cited by third party
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JP2010131569A (ja) * 2008-12-08 2010-06-17 Asahi Glass Co Ltd 含フッ素重合体薄膜を有する基材及びその製造方法
WO2010095553A1 (ja) * 2009-02-20 2010-08-26 旭硝子株式会社 エレクトレットの製造方法及び静電誘導型変換素子
EP2256761A4 (en) * 2008-02-22 2011-08-31 Asahi Glass Co Ltd ELECTRET AND DEVICE FOR ELECTROSTATIC INDUCTION CONVERSION
US8129869B2 (en) 2008-09-19 2012-03-06 Asahi Glass Company, Limited Electret and electrostatic induction conversion device
US8212433B2 (en) 2008-03-27 2012-07-03 Asahi Glass Company, Limited Electret and electrostatic induction conversion device
JP2012181513A (ja) * 2011-02-10 2012-09-20 Daikin Ind Ltd エレクトロウエッティング用疎水性誘電体フィルム
US8277927B2 (en) 2008-04-17 2012-10-02 Asahi Glass Company, Limited Electret and electrostatic induction conversion device
US8288475B2 (en) 2009-02-20 2012-10-16 Asahi Glass Company, Limited Process for producing electret, and electrostatic induction conversion device
JP2014043600A (ja) * 2012-08-24 2014-03-13 Ulvac Japan Ltd 成膜方法
US8763461B2 (en) 2008-03-31 2014-07-01 Asahi Glass Company, Limited Acceleration sensor device and sensor network system
JP2016001702A (ja) * 2014-06-12 2016-01-07 大日本印刷株式会社 樹脂付リードフレームおよびその製造方法、ならびにｌｅｄパッケージおよびその製造方法
WO2021141065A1 (ja) * 2020-01-08 2021-07-15 ダイキン工業株式会社 エレクトレット材料及び静電誘電型変換素子
JP2021110951A (ja) * 2020-01-08 2021-08-02 ダイキン工業株式会社 ディスプレイ保護膜
WO2021172369A1 (ja) * 2020-02-26 2021-09-02 Ａｇｃ株式会社 含フッ素重合体、膜、膜の製造方法および有機光電子素子
WO2021172371A1 (ja) * 2020-02-26 2021-09-02 Ａｇｃ株式会社 含フッ素重合体、樹脂膜及び光電子素子

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EP2552635A4 (en) * 2010-03-26 2017-10-11 Waters Technologies Corporation Chromatography apparatus having diffusion-bonded and surface-modified components
CN103031528B (zh) * 2011-09-29 2015-08-26 比亚迪股份有限公司 一种防指纹薄膜的制备方法及由该方法制备的防指纹薄膜
WO2013102011A2 (en) * 2011-12-30 2013-07-04 Gvd Corporation Coatings for electrowetting and electrofluidic devices
RU2014153544A (ru) * 2012-05-28 2016-07-20 Намикос Корпорейшн Стеклянный контейнер и способ его изготовления
WO2014127304A1 (en) 2013-02-15 2014-08-21 Massachusetts Institute Of Technology Grafted polymer surfaces for dropwise condensation, and associated methods of use and manufacture
US10543516B2 (en) 2013-04-29 2020-01-28 Gvd Corporation Liquid-impregnated coatings and devices containing the same
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US11338364B2 (en) * 2016-10-14 2022-05-24 Korea Institute Of Materials Science Aluminum powder coated with fluorine-based hydrocarbon polymer layer and preparation method therefor
CN110088928B (zh) * 2016-12-14 2022-04-19 国立大学法人山形大学 组合物和有机光电子元件及其制造方法
WO2018198052A1 (en) 2017-04-26 2018-11-01 Oti Lumionics Inc. Method for patterning a coating on a surface and device including a patterned coating
US11896935B2 (en) 2017-08-17 2024-02-13 Uchicago Argonne, Llc Filtration membranes
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JP7408528B2 (ja) * 2019-11-05 2024-01-05 ダイキン工業株式会社 膜及びこれで表面が被覆された基材
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EP2256761A4 (en) * 2008-02-22 2011-08-31 Asahi Glass Co Ltd ELECTRET AND DEVICE FOR ELECTROSTATIC INDUCTION CONVERSION
US8212433B2 (en) 2008-03-27 2012-07-03 Asahi Glass Company, Limited Electret and electrostatic induction conversion device
US8763461B2 (en) 2008-03-31 2014-07-01 Asahi Glass Company, Limited Acceleration sensor device and sensor network system
US8277927B2 (en) 2008-04-17 2012-10-02 Asahi Glass Company, Limited Electret and electrostatic induction conversion device
US8129869B2 (en) 2008-09-19 2012-03-06 Asahi Glass Company, Limited Electret and electrostatic induction conversion device
JP2010131569A (ja) * 2008-12-08 2010-06-17 Asahi Glass Co Ltd 含フッ素重合体薄膜を有する基材及びその製造方法
CN102308351A (zh) * 2009-02-20 2012-01-04 旭硝子株式会社 驻极体的制造方法及静电感应型转换元件
US8785555B2 (en) 2009-02-20 2014-07-22 Asahi Glass Company, Limited Process for producing electret, and electrostatic induction conversion device
US8288475B2 (en) 2009-02-20 2012-10-16 Asahi Glass Company, Limited Process for producing electret, and electrostatic induction conversion device
EP2400516A4 (en) * 2009-02-20 2014-11-26 Asahi Glass Co Ltd METHOD FOR THE PRODUCTION OF AN ELECTRET AND ELECTROSTATIC INDUCTION CONVERSION ELEMENT
JP5494643B2 (ja) * 2009-02-20 2014-05-21 旭硝子株式会社 エレクトレットの製造方法及び静電誘導型変換素子
JP5533852B2 (ja) * 2009-02-20 2014-06-25 旭硝子株式会社 エレクトレットの製造方法及び静電誘導型変換素子
WO2010095553A1 (ja) * 2009-02-20 2010-08-26 旭硝子株式会社 エレクトレットの製造方法及び静電誘導型変換素子
JP2012181513A (ja) * 2011-02-10 2012-09-20 Daikin Ind Ltd エレクトロウエッティング用疎水性誘電体フィルム
JP2014043600A (ja) * 2012-08-24 2014-03-13 Ulvac Japan Ltd 成膜方法
JP2016001702A (ja) * 2014-06-12 2016-01-07 大日本印刷株式会社 樹脂付リードフレームおよびその製造方法、ならびにｌｅｄパッケージおよびその製造方法
WO2021141065A1 (ja) * 2020-01-08 2021-07-15 ダイキン工業株式会社 エレクトレット材料及び静電誘電型変換素子
JP2021109976A (ja) * 2020-01-08 2021-08-02 ダイキン工業株式会社 エレクトレット材料及び静電誘電型変換素子
JP2021110951A (ja) * 2020-01-08 2021-08-02 ダイキン工業株式会社 ディスプレイ保護膜
WO2021172369A1 (ja) * 2020-02-26 2021-09-02 Ａｇｃ株式会社 含フッ素重合体、膜、膜の製造方法および有機光電子素子
JPWO2021172369A1 (ja) * 2020-02-26 2021-09-02
WO2021172371A1 (ja) * 2020-02-26 2021-09-02 Ａｇｃ株式会社 含フッ素重合体、樹脂膜及び光電子素子
JPWO2021172371A1 (ja) * 2020-02-26 2021-09-02
CN115175947A (zh) * 2020-02-26 2022-10-11 Ａｇｃ株式会社 含氟聚合物、膜、膜的制造方法和有机光电子元件
JP7589734B2 (ja) 2020-02-26 2024-11-26 Ａｇｃ株式会社 含フッ素重合体、膜、膜の製造方法および有機光電子素子
JP7619357B2 (ja) 2020-02-26 2025-01-22 Ａｇｃ株式会社 含フッ素重合体、樹脂膜及び光電子素子

Also Published As

Publication number Publication date
JP5273041B2 (ja) 2013-08-28
US20100080903A1 (en) 2010-04-01
TW200909597A (en) 2009-03-01
KR20100014816A (ko) 2010-02-11
JPWO2008133088A1 (ja) 2010-07-22
RU2009142805A (ru) 2011-05-27
EP2143818A1 (en) 2010-01-13

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