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WO2008126232A1 - 駆動装置 - Google Patents

駆動装置 Download PDF

Info

Publication number
WO2008126232A1
WO2008126232A1 PCT/JP2007/057041 JP2007057041W WO2008126232A1 WO 2008126232 A1 WO2008126232 A1 WO 2008126232A1 JP 2007057041 W JP2007057041 W JP 2007057041W WO 2008126232 A1 WO2008126232 A1 WO 2008126232A1
Authority
WO
WIPO (PCT)
Prior art keywords
section
stage
moving
resilient
stage section
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2007/057041
Other languages
English (en)
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pioneer Corp
Original Assignee
Pioneer Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pioneer Corp filed Critical Pioneer Corp
Priority to JP2009508782A priority Critical patent/JP4542613B2/ja
Priority to PCT/JP2007/057041 priority patent/WO2008126232A1/ja
Priority to US12/532,878 priority patent/US8022597B2/en
Publication of WO2008126232A1 publication Critical patent/WO2008126232A1/ja
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B9/00—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor
    • G11B9/02—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using ferroelectric record carriers; Record carriers therefor
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B9/00—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor
    • G11B9/12—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using near-field interactions; Record carriers therefor
    • G11B9/14—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using near-field interactions; Record carriers therefor using microscopic probe means, i.e. recording or reproducing by means directly associated with the tip of a microscopic electrical probe as used in Scanning Tunneling Microscopy [STM] or Atomic Force Microscopy [AFM] for inducing physical or electrical perturbations in a recording medium; Record carriers or media specially adapted for such transducing of information
    • G11B9/1418—Disposition or mounting of heads or record carriers
    • G11B9/1427—Disposition or mounting of heads or record carriers with provision for moving the heads or record carriers relatively to each other or for access to indexed parts without effectively imparting a relative movement
    • G11B9/1436—Disposition or mounting of heads or record carriers with provision for moving the heads or record carriers relatively to each other or for access to indexed parts without effectively imparting a relative movement with provision for moving the heads or record carriers relatively to each other
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic

Landscapes

  • Micromachines (AREA)
  • Details Of Measuring And Other Instruments (AREA)

Abstract

駆動装置（１００）は、ベース部（１１０）と、被駆動物（１２）が搭載されると共に、移動可能なステージ部（１３０）と、ベース部とステージ部とを接続すると共に、前記ステージ部を一の方向に沿って移動させるような弾性を有する弾性部（１２０）と、ステージ部及び弾性部により定まる共振周波数でステージ部が一の方向（Ｙ軸）に沿って共振するようにステージ部を移動させるための加振力を加える第１印加部（１４１、１４２、１４３、２２）と、ベース部、ステージ部及び弾性部の夫々を又はステージ部上に搭載される被駆動物を他の方向（Ｘ軸）に沿って段階的に又は連続的に移動させるための駆動力を加える第２印加部（１６１、１６２、２２）とを備える。
PCT/JP2007/057041 2007-03-30 2007-03-30 駆動装置 Ceased WO2008126232A1 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2009508782A JP4542613B2 (ja) 2007-03-30 2007-03-30 駆動装置
PCT/JP2007/057041 WO2008126232A1 (ja) 2007-03-30 2007-03-30 駆動装置
US12/532,878 US8022597B2 (en) 2007-03-30 2007-03-30 Driver

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2007/057041 WO2008126232A1 (ja) 2007-03-30 2007-03-30 駆動装置

Publications (1)

Publication Number Publication Date
WO2008126232A1 true WO2008126232A1 (ja) 2008-10-23

Family

ID=39863413

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2007/057041 Ceased WO2008126232A1 (ja) 2007-03-30 2007-03-30 駆動装置

Country Status (3)

Country Link
US (1) US8022597B2 (ja)
JP (1) JP4542613B2 (ja)
WO (1) WO2008126232A1 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9121875B2 (en) 2012-04-23 2015-09-01 Koganei Corporation Potential measuring device

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2008126244A1 (ja) * 2007-03-30 2008-10-23 Pioneer Corporation 駆動装置
US9527733B2 (en) * 2014-11-07 2016-12-27 The Chinese University Of Hong Kong Method and apparatus for dynamic-tuning

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05126517A (ja) * 1991-11-05 1993-05-21 Canon Inc 走査機構及びこれを用いた走査型顕微鏡及び記録再生装置
JPH06231493A (ja) * 1993-02-03 1994-08-19 Canon Inc 基板位置決め機構および記録再生装置

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4686440A (en) * 1985-03-11 1987-08-11 Yotaro Hatamura Fine positioning device
JPS62105440A (ja) 1985-11-01 1987-05-15 Olympus Optical Co Ltd 振動型ステ−ジ装置
US4798989A (en) * 1986-09-26 1989-01-17 Research Development Corporation Scanning tunneling microscope installed in electron microscope
US5260622A (en) * 1989-03-24 1993-11-09 Topometrix Corporation High resolution electromechanical translation device
JP3029499B2 (ja) * 1992-05-07 2000-04-04 キヤノン株式会社 記録再生装置
US6459088B1 (en) * 1998-01-16 2002-10-01 Canon Kabushiki Kaisha Drive stage and scanning probe microscope and information recording/reproducing apparatus using the same
JP3817120B2 (ja) * 2000-07-07 2006-08-30 住友重機械工業株式会社 移動テーブルの変位制御方法、部材加工方法、ｘ−ｙステージ装置、該ｘ−ｙステージ装置の製造方法
KR100486716B1 (ko) * 2002-10-18 2005-05-03 삼성전자주식회사 2-ｄ 액튜에이터 및 그 제조방법
US7471030B2 (en) * 2006-03-08 2008-12-30 Dynamic Structures And Materials, Llc Spring biasing locking mechanism for step and repeat motors
JP4542614B2 (ja) * 2007-03-30 2010-09-15 パイオニア株式会社 駆動装置
JP4542615B2 (ja) * 2007-03-30 2010-09-15 パイオニア株式会社 駆動装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05126517A (ja) * 1991-11-05 1993-05-21 Canon Inc 走査機構及びこれを用いた走査型顕微鏡及び記録再生装置
JPH06231493A (ja) * 1993-02-03 1994-08-19 Canon Inc 基板位置決め機構および記録再生装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9121875B2 (en) 2012-04-23 2015-09-01 Koganei Corporation Potential measuring device

Also Published As

Publication number Publication date
JP4542613B2 (ja) 2010-09-15
US20100109476A1 (en) 2010-05-06
US8022597B2 (en) 2011-09-20
JPWO2008126232A1 (ja) 2010-07-22

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