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WO2008126243A1 - 駆動装置 - Google Patents

駆動装置 Download PDF

Info

Publication number
WO2008126243A1
WO2008126243A1 PCT/JP2007/057068 JP2007057068W WO2008126243A1 WO 2008126243 A1 WO2008126243 A1 WO 2008126243A1 JP 2007057068 W JP2007057068 W JP 2007057068W WO 2008126243 A1 WO2008126243 A1 WO 2008126243A1
Authority
WO
WIPO (PCT)
Prior art keywords
stage
driver unit
elastic body
base
resonance frequency
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2007/057068
Other languages
English (en)
French (fr)
Inventor
Jun Suzuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pioneer Corp
Original Assignee
Pioneer Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pioneer Corp filed Critical Pioneer Corp
Priority to US12/532,794 priority Critical patent/US7884526B2/en
Priority to PCT/JP2007/057068 priority patent/WO2008126243A1/ja
Priority to JP2009508793A priority patent/JP4542617B2/ja
Publication of WO2008126243A1 publication Critical patent/WO2008126243A1/ja
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B9/00—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor
    • G11B9/12—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using near-field interactions; Record carriers therefor
    • G11B9/14—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using near-field interactions; Record carriers therefor using microscopic probe means, i.e. recording or reproducing by means directly associated with the tip of a microscopic electrical probe as used in Scanning Tunneling Microscopy [STM] or Atomic Force Microscopy [AFM] for inducing physical or electrical perturbations in a recording medium; Record carriers or media specially adapted for such transducing of information
    • G11B9/1418—Disposition or mounting of heads or record carriers
    • G11B9/1427—Disposition or mounting of heads or record carriers with provision for moving the heads or record carriers relatively to each other or for access to indexed parts without effectively imparting a relative movement
    • G11B9/1436—Disposition or mounting of heads or record carriers with provision for moving the heads or record carriers relatively to each other or for access to indexed parts without effectively imparting a relative movement with provision for moving the heads or record carriers relatively to each other
    • G11B9/1454—Positioning the head or record carrier into or out of operative position or across information tracks; Alignment of the head relative to the surface of the record carrier
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B9/00—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor
    • G11B9/02—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using ferroelectric record carriers; Record carriers therefor

Landscapes

  • Micromachines (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)

Abstract

駆動装置（１００ｊ）は、ベース部（１１０）と、被駆動物（１２）が搭載されると共に、移動可能なステージ部（１３０）と、ベース部とステージ部とを接続すると共に、ステージ部を一の方向（Ｙ軸）に沿って移動させるような弾性を有する弾性部（１２）と、ステージ部及び弾性部により定まる共振周波数でステージ部が一の方向に沿って共振するようにステージ部を移動させるための加振力を加える印加部（１６１、１６２、２２）と、共振周波数を動的に調整する周波数調整部（１７０）とを備える。
PCT/JP2007/057068 2007-03-30 2007-03-30 駆動装置 Ceased WO2008126243A1 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
US12/532,794 US7884526B2 (en) 2007-03-30 2007-03-30 Driving apparatus
PCT/JP2007/057068 WO2008126243A1 (ja) 2007-03-30 2007-03-30 駆動装置
JP2009508793A JP4542617B2 (ja) 2007-03-30 2007-03-30 駆動装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2007/057068 WO2008126243A1 (ja) 2007-03-30 2007-03-30 駆動装置

Publications (1)

Publication Number Publication Date
WO2008126243A1 true WO2008126243A1 (ja) 2008-10-23

Family

ID=39863424

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2007/057068 Ceased WO2008126243A1 (ja) 2007-03-30 2007-03-30 駆動装置

Country Status (3)

Country Link
US (1) US7884526B2 (ja)
JP (1) JP4542617B2 (ja)
WO (1) WO2008126243A1 (ja)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2008126244A1 (ja) * 2007-03-30 2008-10-23 Pioneer Corporation 駆動装置
JP4542616B2 (ja) * 2007-03-30 2010-09-15 パイオニア株式会社 駆動装置
WO2008126236A1 (ja) * 2007-03-30 2008-10-23 Pioneer Corporation 駆動装置
US8089053B1 (en) * 2009-11-10 2012-01-03 Dudley Finch Dynamically tilting specimen holder for stereo and tomographic imaging in a transmission electron microscope using a combination of micro electro mechanical systems (MEMS) and piezoelectric transducers (PZTs)
EP3000133B1 (en) * 2013-05-23 2021-01-20 Qorvo US, Inc. Piezoelectric sensor
US9527733B2 (en) * 2014-11-07 2016-12-27 The Chinese University Of Hong Kong Method and apparatus for dynamic-tuning

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05126517A (ja) * 1991-11-05 1993-05-21 Canon Inc 走査機構及びこれを用いた走査型顕微鏡及び記録再生装置
JPH06231493A (ja) * 1993-02-03 1994-08-19 Canon Inc 基板位置決め機構および記録再生装置
JPH08146029A (ja) * 1994-11-16 1996-06-07 Murata Mfg Co Ltd 振動子の共振周波数調整方法およびその装置

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62105440A (ja) * 1985-11-01 1987-05-15 Olympus Optical Co Ltd 振動型ステ−ジ装置
JP3029499B2 (ja) * 1992-05-07 2000-04-04 キヤノン株式会社 記録再生装置
US6555829B1 (en) * 2000-01-10 2003-04-29 Applied Materials, Inc. High precision flexure stage
JP3817120B2 (ja) 2000-07-07 2006-08-30 住友重機械工業株式会社 移動テーブルの変位制御方法、部材加工方法、ｘ−ｙステージ装置、該ｘ−ｙステージ装置の製造方法
JP4007767B2 (ja) * 2001-01-18 2007-11-14 日本碍子株式会社 圧電／電歪デバイスおよびその製造方法
KR100552687B1 (ko) * 2003-08-22 2006-02-20 삼성전자주식회사 대면적 스테이지를 구비한 2축 액츄에이터
US7461543B2 (en) * 2005-06-17 2008-12-09 Georgia Tech Research Corporation Overlay measurement methods with firat based probe microscope
JP2007273589A (ja) * 2006-03-30 2007-10-18 Fujitsu Ltd 薄膜圧電デバイスおよびその作製方法
JP4542614B2 (ja) * 2007-03-30 2010-09-15 パイオニア株式会社 駆動装置
JP4542620B2 (ja) * 2007-03-30 2010-09-15 パイオニア株式会社 駆動装置
JP4542615B2 (ja) * 2007-03-30 2010-09-15 パイオニア株式会社 駆動装置
JP4542619B2 (ja) * 2007-03-30 2010-09-15 パイオニア株式会社 駆動装置
JP4542616B2 (ja) * 2007-03-30 2010-09-15 パイオニア株式会社 駆動装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05126517A (ja) * 1991-11-05 1993-05-21 Canon Inc 走査機構及びこれを用いた走査型顕微鏡及び記録再生装置
JPH06231493A (ja) * 1993-02-03 1994-08-19 Canon Inc 基板位置決め機構および記録再生装置
JPH08146029A (ja) * 1994-11-16 1996-06-07 Murata Mfg Co Ltd 振動子の共振周波数調整方法およびその装置

Also Published As

Publication number Publication date
US20100133953A1 (en) 2010-06-03
US7884526B2 (en) 2011-02-08
JPWO2008126243A1 (ja) 2010-07-22
JP4542617B2 (ja) 2010-09-15

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