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WO2008117736A1 - インターポーザ基板、それを利用したｌｓｉチップ及び情報端末装置、インターポーザ基板製造方法、並びにｌｓｉチップ製造方法 - Google Patents

インターポーザ基板、それを利用したｌｓｉチップ及び情報端末装置、インターポーザ基板製造方法、並びにｌｓｉチップ製造方法 Download PDF

Info

Publication number
WO2008117736A1
WO2008117736A1 PCT/JP2008/055215 JP2008055215W WO2008117736A1 WO 2008117736 A1 WO2008117736 A1 WO 2008117736A1 JP 2008055215 W JP2008055215 W JP 2008055215W WO 2008117736 A1 WO2008117736 A1 WO 2008117736A1
Authority
WO
WIPO (PCT)
Prior art keywords
interposer substrate
lsi chip
manufacturing
layer
electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2008/055215
Other languages
English (en)
French (fr)
Inventor
Hanae Hata
Masato Nakamura
Masaki Nakanishi
Nobuhiro Kinoshita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Renesas Technology Corp
Original Assignee
Renesas Technology Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Renesas Technology Corp filed Critical Renesas Technology Corp
Priority to US12/521,602 priority Critical patent/US20100309641A1/en
Publication of WO2008117736A1 publication Critical patent/WO2008117736A1/ja
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • H10W90/701—
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/22—Secondary treatment of printed circuits
    • H05K3/24—Reinforcing the conductive pattern
    • H05K3/244—Finish plating of conductors, especially of copper conductors, e.g. for pads or lands
    • H05K3/3465—
    • H10W70/60—
    • H10W72/0112—
    • H10W72/019—
    • H10W74/012—
    • H10W74/15—
    • H10W90/00—
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/09—Shape and layout
    • H05K2201/09818—Shape or layout details not covered by a single group of H05K2201/09009 - H05K2201/09809
    • H05K2201/0989—Coating free areas, e.g. areas other than pads or lands free of solder resist
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/10—Details of components or other objects attached to or integrated in a printed circuit board
    • H05K2201/10613—Details of electrical connections of non-printed components, e.g. special leads
    • H05K2201/10621—Components characterised by their electrical contacts
    • H05K2201/10674—Flip chip
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/01—Tools for processing; Objects used during processing
    • H05K2203/0104—Tools for processing; Objects used during processing for patterning or coating
    • H05K2203/013—Inkjet printing, e.g. for printing insulating material or resist
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/04—Soldering or other types of metallurgic bonding
    • H05K2203/049—Wire bonding
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
    • H05K3/108—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern by semi-additive methods; masks therefor
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/30—Assembling printed circuits with electric components, e.g. with resistor
    • H05K3/32—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits
    • H05K3/34—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by soldering
    • H05K3/3452—Solder masks
    • H10W72/01225—
    • H10W72/01235—
    • H10W72/01255—
    • H10W72/072—
    • H10W72/07232—
    • H10W72/07236—
    • H10W72/221—
    • H10W72/241—
    • H10W72/242—
    • H10W72/252—
    • H10W72/29—
    • H10W72/5522—
    • H10W72/59—
    • H10W72/856—
    • H10W72/877—
    • H10W72/884—
    • H10W72/90—
    • H10W72/923—
    • H10W72/932—
    • H10W74/00—
    • H10W90/724—
    • H10W90/732—
    • H10W90/734—
    • H10W90/754—

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Wire Bonding (AREA)

Abstract

　狭ピッチのフリップチップ接続電極とワイヤボンド接続電極を同時に形成する方法を提供し、基板の低コスト化を図り、あわせて、薄いＡｕ層に対しての廉価なハンダの供給方法及びフリップチップ接続方法を提供することを目的とする。 　電極構成をＣｕ層２３とＮｉ層２４の積層とし、その外周にＡｕ層２５をメッキする。フリップチップ接続に際しては電極へのハンダ付けにメタルジェット方式を用いることでＡｕのハンダへの溶解を最小限にすることで、融点の高いＳｎ－Ａｕの生成を防止し、あわせてワイヤボンド可能なＡｕ層２５を確保する。
PCT/JP2008/055215 2007-03-23 2008-03-21 インターポーザ基板、それを利用したｌｓｉチップ及び情報端末装置、インターポーザ基板製造方法、並びにｌｓｉチップ製造方法 Ceased WO2008117736A1 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
US12/521,602 US20100309641A1 (en) 2007-03-23 2008-03-21 Interposer substrate, lsi chip and information terminal device using the interposer substrate, manufacturing method of interposer substrate, and manufacturing method of lsi chip

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007-077766 2007-03-23
JP2007077766A JP2008243853A (ja) 2007-03-23 2007-03-23 インターポーザ基板、それを利用したｌｓｉチップ及び情報端末装置、インターポーザ基板製造方法、並びにｌｓｉチップ製造方法

Publications (1)

Publication Number Publication Date
WO2008117736A1 true WO2008117736A1 (ja) 2008-10-02

Family

ID=39788471

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/055215 Ceased WO2008117736A1 (ja) 2007-03-23 2008-03-21 インターポーザ基板、それを利用したｌｓｉチップ及び情報端末装置、インターポーザ基板製造方法、並びにｌｓｉチップ製造方法

Country Status (4)

Country Link
US (1) US20100309641A1 (ja)
JP (1) JP2008243853A (ja)
TW (1) TW200847368A (ja)
WO (1) WO2008117736A1 (ja)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPWO2010103941A1 (ja) 2009-03-09 2012-09-13 株式会社村田製作所 フレキシブル基板
US8760882B2 (en) 2010-11-18 2014-06-24 Xintec Inc. Wiring structure for improving crown-like defect and fabrication method thereof
JP2014513870A (ja) * 2011-05-18 2014-06-05 サンディスク セミコンダクター （シャンハイ） カンパニー， リミテッド ウォータフォール・ワイヤボンディング
DE102012213566A1 (de) * 2012-08-01 2014-02-06 Robert Bosch Gmbh Verfahren zum Herstellen eines Bondpads zum Thermokompressionsbonden und Bondpad
JP6128367B2 (ja) * 2012-08-28 2017-05-17 東芝ライテック株式会社 発光装置、および配線基板の製造方法
US9754909B2 (en) 2015-05-26 2017-09-05 Monolithic Power Systems, Inc. Copper structures with intermetallic coating for integrated circuit chips
JP6676935B2 (ja) * 2015-11-13 2020-04-08 セイコーエプソン株式会社 電気デバイス、圧電モーター、ロボット、ハンド及び送液ポンプ
JP6989603B2 (ja) * 2017-06-07 2022-01-05 日本特殊陶業株式会社 配線基板、及び配線基板の製造方法
US10347507B2 (en) 2017-09-29 2019-07-09 Lg Innotek Co., Ltd. Printed circuit board
KR102531762B1 (ko) 2017-09-29 2023-05-12 엘지이노텍 주식회사 인쇄회로기판 및 이의 제조 방법
EP4002428B1 (en) 2020-11-19 2023-11-01 Murata Manufacturing Co., Ltd. Method of manufacturing an interposer product

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003303937A (ja) * 2002-04-05 2003-10-24 Nec Electronics Corp 半導体装置及びその製造方法
JP2004207381A (ja) * 2002-12-24 2004-07-22 Shinko Electric Ind Co Ltd 配線基板及びその製造方法並びに半導体装置
JP2005085854A (ja) * 2003-09-05 2005-03-31 Renesas Technology Corp 電子部品の実装方法および電子部品実装用基板
JP2006269502A (ja) * 2005-03-22 2006-10-05 Fujikura Ltd プリント配線基板及び電子回路装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003298007A (ja) * 2002-04-01 2003-10-17 Matsushita Electric Ind Co Ltd 半導体装置およびその製造方法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003303937A (ja) * 2002-04-05 2003-10-24 Nec Electronics Corp 半導体装置及びその製造方法
JP2004207381A (ja) * 2002-12-24 2004-07-22 Shinko Electric Ind Co Ltd 配線基板及びその製造方法並びに半導体装置
JP2005085854A (ja) * 2003-09-05 2005-03-31 Renesas Technology Corp 電子部品の実装方法および電子部品実装用基板
JP2006269502A (ja) * 2005-03-22 2006-10-05 Fujikura Ltd プリント配線基板及び電子回路装置

Also Published As

Publication number Publication date
US20100309641A1 (en) 2010-12-09
JP2008243853A (ja) 2008-10-09
TW200847368A (en) 2008-12-01

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