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WO2008111407A1 - 熱光学位相シフタ - Google Patents

熱光学位相シフタ Download PDF

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Publication number
WO2008111407A1
WO2008111407A1 PCT/JP2008/053608 JP2008053608W WO2008111407A1 WO 2008111407 A1 WO2008111407 A1 WO 2008111407A1 JP 2008053608 W JP2008053608 W JP 2008053608W WO 2008111407 A1 WO2008111407 A1 WO 2008111407A1
Authority
WO
WIPO (PCT)
Prior art keywords
bridge structure
thermo
phase shifter
refractivity
core
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2008/053608
Other languages
English (en)
French (fr)
Inventor
Morio Takahashi
Shinya Watanabe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to EP08712130A priority Critical patent/EP2136238A4/en
Priority to CN2008800076944A priority patent/CN101632034B/zh
Priority to US12/530,588 priority patent/US8150218B2/en
Priority to JP2009503964A priority patent/JPWO2008111407A1/ja
Publication of WO2008111407A1 publication Critical patent/WO2008111407A1/ja
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/011—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  in optical waveguides, not otherwise provided for in this subclass
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/0147—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on thermo-optic effects
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12133—Functions
    • G02B2006/12142—Modulator
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F2203/00—Function characteristic
    • G02F2203/15—Function characteristic involving resonance effects, e.g. resonantly enhanced interaction
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F2203/00—Function characteristic
    • G02F2203/50—Phase-only modulation

Landscapes

  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
  • Optical Integrated Circuits (AREA)

Abstract

　コアおよびクラッドからなり且つコア屈折率とクラッド屈折率との差のコア屈折率に対する比Δが４％以上の光導波路と、それに付されたヒータとを含んでなる複合体を備えた熱光学位相シフタ。複合体は、空隙により基板の表面から隔てられ基板表面に沿って配置されたブリッジ構造部と、基板に対してブリッジ構造部を支持しその両端部に連なる固定部とからなる。ブリッジ構造部は、基板の表面に沿った面内の形状が半円弧形状をなす。
PCT/JP2008/053608 2007-03-09 2008-02-29 熱光学位相シフタ Ceased WO2008111407A1 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
EP08712130A EP2136238A4 (en) 2007-03-09 2008-02-29 THERMOOPTICAL LIVE SHIFTER
CN2008800076944A CN101632034B (zh) 2007-03-09 2008-02-29 热光学移相器
US12/530,588 US8150218B2 (en) 2007-03-09 2008-02-29 Thermo-optical phase shifter
JP2009503964A JPWO2008111407A1 (ja) 2007-03-09 2008-02-29 熱光学位相シフタ

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007060167 2007-03-09
JP2007-060167 2007-03-09

Publications (1)

Publication Number Publication Date
WO2008111407A1 true WO2008111407A1 (ja) 2008-09-18

Family

ID=39759350

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/053608 Ceased WO2008111407A1 (ja) 2007-03-09 2008-02-29 熱光学位相シフタ

Country Status (5)

Country Link
US (1) US8150218B2 (ja)
EP (1) EP2136238A4 (ja)
JP (1) JPWO2008111407A1 (ja)
CN (1) CN101632034B (ja)
WO (1) WO2008111407A1 (ja)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010098295A1 (ja) * 2009-02-25 2010-09-02 日本電気株式会社 光導波路、光導波回路、および光導波回路の製造方法
US20110235962A1 (en) * 2010-03-24 2011-09-29 Oracle International Corporation Optical device with high thermal tuning efficiency
WO2019062118A1 (zh) * 2017-09-28 2019-04-04 北京万集科技股份有限公司 一种波导移相器及其制备方法
KR20210117111A (ko) * 2020-03-17 2021-09-28 타이완 세미콘덕터 매뉴팩쳐링 컴퍼니 리미티드 변조기 디바이스에서 열 효율성을 향상시키기 위한 가스 충전형 분리 구조체를 갖춘 히터 구조체
JP2023531747A (ja) * 2020-06-29 2023-07-25 ソイテック 熱光学部品を製造するための方法
JP2023150224A (ja) * 2022-03-31 2023-10-16 古河電気工業株式会社 光半導体装置および光半導体装置の製造方法

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Publication number Priority date Publication date Assignee Title
CN101632034B (zh) * 2007-03-09 2012-11-07 日本电气株式会社 热光学移相器
JP5720354B2 (ja) * 2011-03-25 2015-05-20 富士通株式会社 光導波路素子及び光ハイブリッド回路
US9310552B2 (en) 2012-06-15 2016-04-12 Micron Technology, Inc. Methods and apparatus providing thermal isolation of photonic devices
CN102902012B (zh) * 2012-10-12 2013-10-09 中国计量学院 串接三个半圆弧结构的太赫兹波偏振分束器
CN102928927B (zh) * 2012-10-12 2013-10-23 中国计量学院 多边形液晶池结构的太赫兹波偏振分束器
CN102928918B (zh) * 2012-11-12 2013-10-23 中国计量学院 梯状太赫兹波偏振分束器
CN102928917B (zh) * 2012-11-12 2013-10-23 中国计量学院 双扇环形太赫兹波偏振分束器
CN102937730B (zh) * 2012-11-12 2013-10-23 中国计量学院 L形缝隙结构的太赫兹波偏振分束器
US9448422B2 (en) * 2014-03-05 2016-09-20 Huawei Technologies Co., Ltd. Integrated thermo-optic switch with thermally isolated and heat restricting pillars
WO2015157963A1 (zh) * 2014-04-17 2015-10-22 华为技术有限公司 热光移相器
US20170336657A1 (en) * 2014-11-18 2017-11-23 Nec Corporation A heater for optical waveguide and a method for configuring a heater for optical waveguide
JP2018036575A (ja) * 2016-09-02 2018-03-08 国立研究開発法人産業技術総合研究所 光導波路回路及びその製造方法
US10095056B1 (en) * 2017-04-26 2018-10-09 Cisco Technology, Inc. Thermo-optic phase shifter for semiconductor optical waveguide
US10627653B2 (en) * 2017-08-28 2020-04-21 Toyota Motor Engineering & Manufacturing North America, Inc. Thermal guiding for photonic components
US11543687B2 (en) * 2018-05-11 2023-01-03 Rockley Photonics Limited Optoelectronic device
JP7119990B2 (ja) * 2018-12-26 2022-08-17 日本電信電話株式会社 光信号処理装置
US10816832B1 (en) * 2019-09-04 2020-10-27 Veo, Inc. Optical phase shifter using fine lithography defined volumetric junctions
GB2589335B (en) * 2019-11-26 2022-12-14 Rockley Photonics Ltd Integrated III-V/silicon optoelectronic device and method of manufacture thereof
US11982887B2 (en) * 2020-10-14 2024-05-14 Ayar Labs, Inc. Undercut thermo-optic phase shifter
JP7669889B6 (ja) * 2021-09-22 2025-06-19 古河ファイテルオプティカルコンポーネンツ株式会社 光デバイス及び光通信装置
US11803009B2 (en) * 2022-02-25 2023-10-31 Globalfoundries U.S. Inc. Photonics structures having a locally-thickened dielectric layer
EP4508487A1 (en) * 2022-04-13 2025-02-19 Advanced Micro Foundry Pte. Ltd. Thermal optical phase shifter with partial suspended structure
FR3138707B1 (fr) * 2022-08-04 2024-11-22 Commissariat Energie Atomique Modulateur de phase optique, procédé et systèmes associés
CN117572670B (zh) * 2023-11-21 2024-09-17 中国科学院半导体研究所 热光移相器及其制造方法、光芯片
US20250334849A1 (en) * 2024-04-24 2025-10-30 Cisco Technology, Inc. Integrated electro-optical modulator
CN120874476B (zh) * 2025-09-25 2026-01-13 中铁大桥勘测设计院集团有限公司 利用单元制造构形同时优化桥梁内力与线形的方法和装置

Citations (6)

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JPS6477002A (en) * 1987-06-29 1989-03-23 Nippon Telegraph & Telephone Integrated optical device and its manufacture
JPH03267902A (ja) * 1990-02-26 1991-11-28 Nippon Telegr & Teleph Corp <Ntt> 光導波回路の特性調整方法およびその方法に使われる光導波回路
JP2004037524A (ja) 2002-06-28 2004-02-05 Nec Corp 熱光学位相シフタ及びその製造方法
JP2004287093A (ja) 2003-03-20 2004-10-14 Fujitsu Ltd 光導波路、光デバイスおよび光導波路の製造方法
JP2005055882A (ja) * 2003-07-18 2005-03-03 Nec Corp 可変分散補償器および可変分散補償方法
JP2007060167A (ja) 2005-08-23 2007-03-08 Nippon Hoso Kyokai <Nhk> コンテンツ変換装置、コンテンツ変換方法及びコンテンツ変換プログラム

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CN101632034B (zh) * 2007-03-09 2012-11-07 日本电气株式会社 热光学移相器
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JPS6477002A (en) * 1987-06-29 1989-03-23 Nippon Telegraph & Telephone Integrated optical device and its manufacture
JPH03267902A (ja) * 1990-02-26 1991-11-28 Nippon Telegr & Teleph Corp <Ntt> 光導波回路の特性調整方法およびその方法に使われる光導波回路
JP2004037524A (ja) 2002-06-28 2004-02-05 Nec Corp 熱光学位相シフタ及びその製造方法
JP2004287093A (ja) 2003-03-20 2004-10-14 Fujitsu Ltd 光導波路、光デバイスおよび光導波路の製造方法
JP2005055882A (ja) * 2003-07-18 2005-03-03 Nec Corp 可変分散補償器および可変分散補償方法
JP2007060167A (ja) 2005-08-23 2007-03-08 Nippon Hoso Kyokai <Nhk> コンテンツ変換装置、コンテンツ変換方法及びコンテンツ変換プログラム

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Title
See also references of EP2136238A4 *
YAMAZAKI H. ET AL.: "Doharo Ring Kyoshinki to Handotai Hikari Zofukuki ni yoru Hacho Kahen Laser", 2005 NEN IEICE ELECTRONICS SOCIETY TAIKAI, 7 September 2005 (2005-09-07), pages 233, XP008118656 *

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010098295A1 (ja) * 2009-02-25 2010-09-02 日本電気株式会社 光導波路、光導波回路、および光導波回路の製造方法
US20110235962A1 (en) * 2010-03-24 2011-09-29 Oracle International Corporation Optical device with high thermal tuning efficiency
US8971674B2 (en) * 2010-03-24 2015-03-03 Oracle International Corporation Optical device with high thermal tuning efficiency
WO2019062118A1 (zh) * 2017-09-28 2019-04-04 北京万集科技股份有限公司 一种波导移相器及其制备方法
KR20210117111A (ko) * 2020-03-17 2021-09-28 타이완 세미콘덕터 매뉴팩쳐링 컴퍼니 리미티드 변조기 디바이스에서 열 효율성을 향상시키기 위한 가스 충전형 분리 구조체를 갖춘 히터 구조체
KR102478799B1 (ko) * 2020-03-17 2022-12-16 타이완 세미콘덕터 매뉴팩쳐링 컴퍼니 리미티드 변조기 디바이스에서 열 효율성을 향상시키기 위한 가스 충전형 분리 구조체를 갖춘 히터 구조체
JP2023531747A (ja) * 2020-06-29 2023-07-25 ソイテック 熱光学部品を製造するための方法
JP7692441B2 (ja) 2020-06-29 2025-06-13 ソイテック 熱光学部品を製造するための方法
JP2023150224A (ja) * 2022-03-31 2023-10-16 古河電気工業株式会社 光半導体装置および光半導体装置の製造方法

Also Published As

Publication number Publication date
US8150218B2 (en) 2012-04-03
EP2136238A1 (en) 2009-12-23
JPWO2008111407A1 (ja) 2010-06-24
CN101632034A (zh) 2010-01-20
US20100111461A1 (en) 2010-05-06
CN101632034B (zh) 2012-11-07
EP2136238A4 (en) 2010-06-23

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