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WO2008105382A1 - 積層型圧電素子 - Google Patents

積層型圧電素子 Download PDF

Info

Publication number
WO2008105382A1
WO2008105382A1 PCT/JP2008/053229 JP2008053229W WO2008105382A1 WO 2008105382 A1 WO2008105382 A1 WO 2008105382A1 JP 2008053229 W JP2008053229 W JP 2008053229W WO 2008105382 A1 WO2008105382 A1 WO 2008105382A1
Authority
WO
WIPO (PCT)
Prior art keywords
sections
internal electrode
margin
stress relaxing
piezoelectric element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2008/053229
Other languages
English (en)
French (fr)
Inventor
Satoshi Suzuki
Atsushi Murai
Hiroaki Asano
Kouji Noda
Toshiatu Nagaya
Akio Iwase
Akira Fujii
Shige Kadotani
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Denso Corp
Original Assignee
Denso Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Denso Corp filed Critical Denso Corp
Priority to US12/528,683 priority Critical patent/US8240582B2/en
Priority to EP08711958.2A priority patent/EP2141751B1/en
Priority to CN2008800062104A priority patent/CN101622727B/zh
Publication of WO2008105382A1 publication Critical patent/WO2008105382A1/ja
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
    • H10N30/508—Piezoelectric or electrostrictive devices having a stacked or multilayer structure adapted for alleviating internal stress, e.g. cracking control layers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/05—Manufacture of multilayered piezoelectric or electrostrictive devices, or parts thereof, e.g. by stacking piezoelectric bodies and electrodes
    • H10N30/053—Manufacture of multilayered piezoelectric or electrostrictive devices, or parts thereof, e.g. by stacking piezoelectric bodies and electrodes by integrally sintering piezoelectric or electrostrictive bodies and electrodes
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F02—COMBUSTION ENGINES; HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
    • F02M—SUPPLYING COMBUSTION ENGINES IN GENERAL WITH COMBUSTIBLE MIXTURES OR CONSTITUENTS THEREOF
    • F02M63/00—Other fuel-injection apparatus having pertinent characteristics not provided for in groups F02M39/00 - F02M57/00 or F02M67/00; Details, component parts, or accessories of fuel-injection apparatus, not provided for in, or of interest apart from, the apparatus of groups F02M39/00 - F02M61/00 or F02M67/00; Combination of fuel pump with other devices, e.g. lubricating oil pump
    • F02M63/0012—Valves
    • F02M63/0014—Valves characterised by the valve actuating means
    • F02M63/0015—Valves characterised by the valve actuating means electrical, e.g. using solenoid
    • F02M63/0026—Valves characterised by the valve actuating means electrical, e.g. using solenoid using piezoelectric or magnetostrictive actuators

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
  • Fuel-Injection Apparatus (AREA)

Abstract

圧電セラミック層と内部電極層とを交互に積層してなるセラミック積層体と、一対の側面電極とを有する積層型圧電素子１である。内部電極層１３、１４は、内部電極部１３１、１４１と、控え部１３２、１４２とを有する。セラミック積層体１５は、応力緩和部１１、１２を有する。応力緩和部１１、１２を挟む２つの内部電極層１３、１４における控え部１３２、１４２のうち、応力緩和部１１、１２と同じ側面に位置する控え部１３２、１４２の控え距離は、応力緩和部１１、１２の深さよりも大きくなっている。
PCT/JP2008/053229 2007-02-26 2008-02-26 積層型圧電素子 Ceased WO2008105382A1 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
US12/528,683 US8240582B2 (en) 2007-02-26 2008-02-26 Stacked piezoelectric device
EP08711958.2A EP2141751B1 (en) 2007-02-26 2008-02-26 Laminated piezoelectric element
CN2008800062104A CN101622727B (zh) 2007-02-26 2008-02-26 层叠型压电元件

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
JP2007-046070 2007-02-26
JP2007046070 2007-02-26
JP2008017946 2008-01-29
JP2008042111A JP4911066B2 (ja) 2007-02-26 2008-02-22 積層型圧電素子
JP2008-042111 2008-02-22
JP2008-017946 2008-07-11

Publications (1)

Publication Number Publication Date
WO2008105382A1 true WO2008105382A1 (ja) 2008-09-04

Family

ID=39721214

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/053229 Ceased WO2008105382A1 (ja) 2007-02-26 2008-02-26 積層型圧電素子

Country Status (5)

Country Link
US (1) US8240582B2 (ja)
EP (1) EP2141751B1 (ja)
JP (1) JP4911066B2 (ja)
CN (1) CN101622727B (ja)
WO (1) WO2008105382A1 (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014183054A (ja) * 2013-03-15 2014-09-29 Ricoh Co Ltd 圧電素子、液滴吐出ヘッド、液滴吐出装置、画像形成装置及び圧電素子の製造方法
JP2015050289A (ja) * 2013-08-30 2015-03-16 太平洋セメント株式会社 圧電素子

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2082444B1 (en) * 2006-10-20 2012-05-23 Kyocera Corporation Piezoelectric actuator unit and method for manufacturing the same
US8212451B2 (en) * 2006-10-31 2012-07-03 Kyocera Corporation Multi-layer piezoelectric element having a plurality of junction sections and injection apparatus employing the same
DE102006062076A1 (de) * 2006-12-29 2008-07-10 Siemens Ag Piezokeramischer Vielschichtaktor und Verfahren zu seiner Herstellung
DE102010020192A1 (de) * 2010-05-11 2011-11-17 Epcos Ag Piezoelektrisches Vielschichtbauelement
KR101463706B1 (ko) * 2010-11-04 2014-11-19 알그라 홀딩 아게 압전 신호 발생기
JP5842635B2 (ja) * 2012-01-27 2016-01-13 Tdk株式会社 積層型圧電素子
DE102012111023A1 (de) * 2012-11-15 2014-05-15 Epcos Ag Vielschichtkondensator und Verfahren zur Herstellung eines Vielschichtkondensators
DE102013200242A1 (de) * 2013-01-10 2014-07-10 Robert Bosch Gmbh Piezoelektrisches Bauteil und Verfahren zur Herstellung eines piezoelektrischen Bauteils
JP6226451B2 (ja) * 2013-06-26 2017-11-08 日本特殊陶業株式会社 圧電素子および圧電アクチュエータ
CN103573506B (zh) * 2013-11-19 2016-03-16 中国第一汽车股份有限公司无锡油泵油嘴研究所 带压电执行元件的电控高压共轨喷油器
EP3188506B1 (en) * 2014-08-28 2021-03-03 Kyocera Corporation Piezoelectric element and acoustic generator, acoustic generation device, and electronic apparatus provided with same
US9786831B1 (en) * 2016-01-27 2017-10-10 Magnecomp Corporation Suspension having a stacked D33 mode PZT actuator with constraint layer
US11201571B2 (en) * 2016-03-25 2021-12-14 Canon Kabushiki Kaisha Method of manufacturing an oscillator
DE102019201650A1 (de) * 2019-02-08 2020-08-13 Pi Ceramic Gmbh Verfahren zur Herstellung eines piezoelektrischen Stapelaktors und piezoelektrischer Stapelaktor, vorzugsweise hergestellt nach dem Verfahren
JP7517005B2 (ja) * 2020-09-11 2024-07-17 株式会社リコー 液体吐出ヘッドおよび液体を吐出する装置

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Publication number Priority date Publication date Assignee Title
JPS62271478A (ja) 1986-05-19 1987-11-25 Nec Corp 電歪効果素子の製造方法
JPH11186625A (ja) * 1997-12-24 1999-07-09 Hitachi Ltd 圧電素子
JP2004288794A (ja) * 2003-03-20 2004-10-14 Nec Tokin Corp 積層型圧電素子およびその製造方法
JP2005340540A (ja) * 2004-05-27 2005-12-08 Kyocera Corp 積層型圧電素子及びその製造方法ならびにこれを用いた噴射装置
JP2006179525A (ja) * 2004-12-20 2006-07-06 Denso Corp セラミック積層体の製造方法
JP2006216850A (ja) 2005-02-04 2006-08-17 Tdk Corp 積層型圧電素子

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JPH065794B2 (ja) 1982-05-11 1994-01-19 日本電気株式会社 電歪効果素子
DE3378393D1 (en) 1982-05-11 1988-12-08 Nec Corp Multilayer electrostrictive element which withstands repeated application of pulses
US5163209A (en) * 1989-04-26 1992-11-17 Hitachi, Ltd. Method of manufacturing a stack-type piezoelectric element
JPH0353572A (ja) * 1989-07-21 1991-03-07 Nec Corp 電歪効果素子
JPH03241782A (ja) 1990-02-19 1991-10-28 Nec Corp 電歪効果素子
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JPH08274381A (ja) 1995-03-31 1996-10-18 Chichibu Onoda Cement Corp 積層型圧電アクチュエータ及びその製造方法
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JP4470504B2 (ja) 2004-02-03 2010-06-02 株式会社デンソー 積層型圧電素子及びその製造方法
JP4569153B2 (ja) * 2004-04-14 2010-10-27 株式会社デンソー 積層型圧電素子及び、その製造方法
DE102004047105A1 (de) 2004-09-29 2006-05-24 Robert Bosch Gmbh Piezoaktor mit spannungsabbauenden Strukturen
JP2006165193A (ja) 2004-12-06 2006-06-22 Denso Corp 中空積層型圧電素子及びその製造方法
JP4806929B2 (ja) 2004-12-15 2011-11-02 Ｔｄｋ株式会社 積層型圧電素子の製造方法
JP2006210423A (ja) 2005-01-25 2006-08-10 Denso Corp 積層型圧電素子及びその製造方法
JP2006229068A (ja) 2005-02-18 2006-08-31 Tdk Corp 積層型圧電素子の製造方法
JP5068936B2 (ja) 2005-02-24 2012-11-07 Ｔｄｋ株式会社 積層型圧電素子の製造方法
JP2006303045A (ja) * 2005-04-18 2006-11-02 Denso Corp 積層型圧電体素子
ATE508483T1 (de) 2005-09-16 2011-05-15 Delphi Tech Holding Sarl Piezoelektrischer aktor
KR20090047523A (ko) * 2006-08-23 2009-05-12 니뽄 가이시 가부시키가이샤 초음파 모터용 압전 액츄에이터 소자
JP4930410B2 (ja) * 2007-02-26 2012-05-16 株式会社デンソー 積層型圧電素子
JP2008216850A (ja) * 2007-03-07 2008-09-18 Konica Minolta Business Technologies Inc 定着装置及び画像形成装置

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62271478A (ja) 1986-05-19 1987-11-25 Nec Corp 電歪効果素子の製造方法
JPH11186625A (ja) * 1997-12-24 1999-07-09 Hitachi Ltd 圧電素子
JP2004288794A (ja) * 2003-03-20 2004-10-14 Nec Tokin Corp 積層型圧電素子およびその製造方法
JP2005340540A (ja) * 2004-05-27 2005-12-08 Kyocera Corp 積層型圧電素子及びその製造方法ならびにこれを用いた噴射装置
JP2006179525A (ja) * 2004-12-20 2006-07-06 Denso Corp セラミック積層体の製造方法
JP2006216850A (ja) 2005-02-04 2006-08-17 Tdk Corp 積層型圧電素子

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Title
See also references of EP2141751A4

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014183054A (ja) * 2013-03-15 2014-09-29 Ricoh Co Ltd 圧電素子、液滴吐出ヘッド、液滴吐出装置、画像形成装置及び圧電素子の製造方法
JP2015050289A (ja) * 2013-08-30 2015-03-16 太平洋セメント株式会社 圧電素子

Also Published As

Publication number Publication date
CN101622727A (zh) 2010-01-06
US20100140379A1 (en) 2010-06-10
EP2141751B1 (en) 2016-12-14
CN101622727B (zh) 2011-01-12
JP4911066B2 (ja) 2012-04-04
EP2141751A4 (en) 2014-04-02
US8240582B2 (en) 2012-08-14
JP2009206109A (ja) 2009-09-10
EP2141751A1 (en) 2010-01-06

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