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WO2008152927A1 - ディスプレイ用マイクロデバイス - Google Patents

ディスプレイ用マイクロデバイス Download PDF

Info

Publication number
WO2008152927A1
WO2008152927A1 PCT/JP2008/060017 JP2008060017W WO2008152927A1 WO 2008152927 A1 WO2008152927 A1 WO 2008152927A1 JP 2008060017 W JP2008060017 W JP 2008060017W WO 2008152927 A1 WO2008152927 A1 WO 2008152927A1
Authority
WO
WIPO (PCT)
Prior art keywords
protective film
display
liquid
swelling portion
microdevice
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2008/060017
Other languages
English (en)
French (fr)
Inventor
Isao Shimoyama
Kiyoshi Matsumoto
Eiji Iwase
Binh-Khiem Nguyen
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
University of Tokyo NUC
Original Assignee
University of Tokyo NUC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by University of Tokyo NUC filed Critical University of Tokyo NUC
Publication of WO2008152927A1 publication Critical patent/WO2008152927A1/ja
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00—Simple or compound lenses
    • G02B3/12—Fluid-filled or evacuated lenses
    • G02B3/14—Fluid-filled or evacuated lenses of variable focal length
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00134—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems comprising flexible or deformable structures
    • B81C1/00158—Diaphragms, membranes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/04—Optical MEMS
    • B81B2201/045—Optical switches
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2201/00—Manufacture or treatment of microstructural devices or systems
    • B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
    • B81C2201/0101—Shaping material; Structuring the bulk substrate or layers on the substrate; Film patterning

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Micromachines (AREA)
  • Cathode-Ray Tubes And Fluorescent Screens For Display (AREA)

Abstract

簡易な構成で小型化、薄型化を図ることができ、かつ生産性を向上させながら信頼性の高いディスプレイ用マイクロデバイスを提供することを目的とする。 高真空の中でも蒸発量が少ないシリコンオイルによって液体膨出部12を形成したことで、高真空ＣＶＤ法を用いて、液体状の液体膨出部12の液表面に保護膜13を積層形成できるようにした。かくして簡易な構成で小型化、薄型化を図ることができ、また従来のようにを貼着する煩雑な組立工程を省くことができるので、その分生産性を向上させることができる。さらに、保護膜13を用いていることから、衝撃や重力などによって液体膨出部12が変形してしまうことを防止でき、一段と信頼性の高いディスプレイ用マイクロデバイス１を提供できる。
PCT/JP2008/060017 2007-06-15 2008-05-30 ディスプレイ用マイクロデバイス Ceased WO2008152927A1 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007-158685 2007-06-15
JP2007158685A JP5092563B2 (ja) 2007-06-15 2007-06-15 ディスプレイ用マイクロデバイス

Publications (1)

Publication Number Publication Date
WO2008152927A1 true WO2008152927A1 (ja) 2008-12-18

Family

ID=40129537

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/060017 Ceased WO2008152927A1 (ja) 2007-06-15 2008-05-30 ディスプレイ用マイクロデバイス

Country Status (2)

Country Link
JP (1) JP5092563B2 (ja)
WO (1) WO2008152927A1 (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102822721A (zh) * 2010-04-02 2012-12-12 株式会社东芝 显示装置
CN113805336A (zh) * 2021-10-21 2021-12-17 福建华佳彩有限公司 光学膜片厚度自适应设计方法及系统

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5647077B2 (ja) * 2011-06-13 2014-12-24 日本電信電話株式会社 微細構造体の液体封入パッケージの製造方法
JP6132334B2 (ja) * 2013-02-21 2017-05-24 国立大学法人 東京大学 液体アクチュエータ
JP6089196B2 (ja) * 2013-04-02 2017-03-08 スタンレー電気株式会社 光照射装置及びこれを用いた光源システム

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20030020685A1 (en) * 2001-07-26 2003-01-30 Xerox Corporation Display sheet with stacked electrode structure
JP2004046165A (ja) * 2002-06-28 2004-02-12 Hewlett-Packard Development Co Lp スイッチング装置
JP2004191910A (ja) * 2002-06-04 2004-07-08 Ngk Insulators Ltd 表示装置
US20070002413A1 (en) * 2005-06-14 2007-01-04 California Institute Of Technology Light conductive controlled shape droplet display device
JP2007086144A (ja) * 2005-09-20 2007-04-05 Sony Corp 光偏向素子および可変焦点レンズ

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20030020685A1 (en) * 2001-07-26 2003-01-30 Xerox Corporation Display sheet with stacked electrode structure
JP2004191910A (ja) * 2002-06-04 2004-07-08 Ngk Insulators Ltd 表示装置
JP2004046165A (ja) * 2002-06-28 2004-02-12 Hewlett-Packard Development Co Lp スイッチング装置
US20070002413A1 (en) * 2005-06-14 2007-01-04 California Institute Of Technology Light conductive controlled shape droplet display device
JP2007086144A (ja) * 2005-09-20 2007-04-05 Sony Corp 光偏向素子および可変焦点レンズ

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102822721A (zh) * 2010-04-02 2012-12-12 株式会社东芝 显示装置
CN102822721B (zh) * 2010-04-02 2014-12-10 株式会社东芝 显示装置
US9213179B2 (en) 2010-04-02 2015-12-15 Kabushiki Kaisha Toshiba Display device
CN113805336A (zh) * 2021-10-21 2021-12-17 福建华佳彩有限公司 光学膜片厚度自适应设计方法及系统

Also Published As

Publication number Publication date
JP5092563B2 (ja) 2012-12-05
JP2008310126A (ja) 2008-12-25

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