[go: up one dir, main page]

WO2008152927A1 - Microdevice for display - Google Patents

Microdevice for display Download PDF

Info

Publication number
WO2008152927A1
WO2008152927A1 PCT/JP2008/060017 JP2008060017W WO2008152927A1 WO 2008152927 A1 WO2008152927 A1 WO 2008152927A1 JP 2008060017 W JP2008060017 W JP 2008060017W WO 2008152927 A1 WO2008152927 A1 WO 2008152927A1
Authority
WO
WIPO (PCT)
Prior art keywords
protective film
display
liquid
swelling portion
microdevice
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2008/060017
Other languages
French (fr)
Japanese (ja)
Inventor
Isao Shimoyama
Kiyoshi Matsumoto
Eiji Iwase
Binh-Khiem Nguyen
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
University of Tokyo NUC
Original Assignee
University of Tokyo NUC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by University of Tokyo NUC filed Critical University of Tokyo NUC
Publication of WO2008152927A1 publication Critical patent/WO2008152927A1/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00—Simple or compound lenses
    • G02B3/12—Fluid-filled or evacuated lenses
    • G02B3/14—Fluid-filled or evacuated lenses of variable focal length
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00134—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems comprising flexible or deformable structures
    • B81C1/00158—Diaphragms, membranes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/04—Optical MEMS
    • B81B2201/045—Optical switches
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2201/00—Manufacture or treatment of microstructural devices or systems
    • B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
    • B81C2201/0101—Shaping material; Structuring the bulk substrate or layers on the substrate; Film patterning

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Micromachines (AREA)
  • Cathode-Ray Tubes And Fluorescent Screens For Display (AREA)

Abstract

A highly reliable microdevice for display in which reduction in size and thickness can be attained through a simple arrangement while enhancing productivity. Since a liquid swelling portion (12) is formed of silicon oil having a small quantity of evaporation even in high vacuum, a protective film (13) can be formed on the liquid surface at the liquid swelling portion (12) in liquid state by high vacuum CVD. Consequently, reduction in size and thickness can be attained through a simple arrangement, and since a troublesome assembling process for sticking a protective film can be eliminated, productivity can be enhanced correspondingly. Furthermore, since a protective film (13) is employed, the liquid swelling portion (12) can be prevented from being deformed by impact or gravity resulting in a more reliable microdevice (1) for display.
PCT/JP2008/060017 2007-06-15 2008-05-30 Microdevice for display Ceased WO2008152927A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007158685A JP5092563B2 (en) 2007-06-15 2007-06-15 Microdevice for display
JP2007-158685 2007-06-15

Publications (1)

Publication Number Publication Date
WO2008152927A1 true WO2008152927A1 (en) 2008-12-18

Family

ID=40129537

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/060017 Ceased WO2008152927A1 (en) 2007-06-15 2008-05-30 Microdevice for display

Country Status (2)

Country Link
JP (1) JP5092563B2 (en)
WO (1) WO2008152927A1 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102822721A (en) * 2010-04-02 2012-12-12 株式会社东芝 Display device
CN113805336A (en) * 2021-10-21 2021-12-17 福建华佳彩有限公司 Optical film thickness adaptive design method and system

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5647077B2 (en) * 2011-06-13 2014-12-24 日本電信電話株式会社 Manufacturing method of liquid-sealed package of fine structure
JP6132334B2 (en) * 2013-02-21 2017-05-24 国立大学法人 東京大学 Liquid actuator
JP6089196B2 (en) * 2013-04-02 2017-03-08 スタンレー電気株式会社 Light irradiation device and light source system using the same

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20030020685A1 (en) * 2001-07-26 2003-01-30 Xerox Corporation Display sheet with stacked electrode structure
JP2004046165A (en) * 2002-06-28 2004-02-12 Hewlett-Packard Development Co Lp Switching apparatus
JP2004191910A (en) * 2002-06-04 2004-07-08 Ngk Insulators Ltd Display device
US20070002413A1 (en) * 2005-06-14 2007-01-04 California Institute Of Technology Light conductive controlled shape droplet display device
JP2007086144A (en) * 2005-09-20 2007-04-05 Sony Corp Optical deflection element and variable focus lens

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20030020685A1 (en) * 2001-07-26 2003-01-30 Xerox Corporation Display sheet with stacked electrode structure
JP2004191910A (en) * 2002-06-04 2004-07-08 Ngk Insulators Ltd Display device
JP2004046165A (en) * 2002-06-28 2004-02-12 Hewlett-Packard Development Co Lp Switching apparatus
US20070002413A1 (en) * 2005-06-14 2007-01-04 California Institute Of Technology Light conductive controlled shape droplet display device
JP2007086144A (en) * 2005-09-20 2007-04-05 Sony Corp Optical deflection element and variable focus lens

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102822721A (en) * 2010-04-02 2012-12-12 株式会社东芝 Display device
CN102822721B (en) * 2010-04-02 2014-12-10 株式会社东芝 Display device
US9213179B2 (en) 2010-04-02 2015-12-15 Kabushiki Kaisha Toshiba Display device
CN113805336A (en) * 2021-10-21 2021-12-17 福建华佳彩有限公司 Optical film thickness adaptive design method and system

Also Published As

Publication number Publication date
JP2008310126A (en) 2008-12-25
JP5092563B2 (en) 2012-12-05

Similar Documents

Publication Publication Date Title
USD672967S1 (en) Wipe substrate
USD563981S1 (en) Icon for a display screen or packaging
USD614652S1 (en) Icon for a display screen or packaging with surface ornamentation
USD615551S1 (en) Icon for a display screen or packaging with surface ornamentation
USD625736S1 (en) Fluid meter display with an icon
USD563982S1 (en) Icon for a display screen or packaging
USD614651S1 (en) Icon for a display screen or packaging with surface ornamentation
USD601163S1 (en) Display screen with icon or packaging with surface ornamentation
EP2644563A3 (en) Electronic device comprising differential MEMS sensor and substrate having through hole
USD614649S1 (en) Icon for a display screen or packaging with surface ornamentation
WO2008085391A3 (en) Stacked packages
WO2008152927A1 (en) Microdevice for display
USD619800S1 (en) Portion of a display screen a pill dispenser
WO2007010361A3 (en) A mems package using flexible substrates, and method thereof
WO2006076320A3 (en) Retroreflective film
WO2010132661A3 (en) Roll-to-roll glass material attributes and fingerprint
WO2007021676A3 (en) Fuel cell component with coating including nanoparticles
WO2006007107A3 (en) Abrasive article
WO2009056739A3 (en) Member defining a holder for a device and tyre including such member
USD601161S1 (en) Display screen with icon or packaging with surface ornamentation
WO2012089995A3 (en) Cone and plate fluidic oscillator inserts for use with a subterranean well
TW200636850A (en) Semiconductor device and manufacturing method thereof
WO2008047083A3 (en) Method of manufacturing a stepped riser, an element for forming into a stepped riser and a stepped riser and a member for changing the mechanical dynamic performance of a stepped riser
WO2008117781A1 (en) Cvd film-forming apparatus
USD614650S1 (en) Icon for a display screen or packaging with surface ornamentation

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 08777028

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 08777028

Country of ref document: EP

Kind code of ref document: A1