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WO2008146778A1 - Fluid control apparatus - Google Patents

Fluid control apparatus Download PDF

Info

Publication number
WO2008146778A1
WO2008146778A1 PCT/JP2008/059631 JP2008059631W WO2008146778A1 WO 2008146778 A1 WO2008146778 A1 WO 2008146778A1 JP 2008059631 W JP2008059631 W JP 2008059631W WO 2008146778 A1 WO2008146778 A1 WO 2008146778A1
Authority
WO
WIPO (PCT)
Prior art keywords
corners
control apparatus
fluid control
members
joint
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2008/059631
Other languages
French (fr)
Japanese (ja)
Inventor
Tomohiro Nakata
Tsutomu Shinohara
Michio Yamaji
Wataru Okase
Shuji Moriya
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Fujikin Inc
Original Assignee
Tokyo Electron Ltd
Fujikin Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd, Fujikin Inc filed Critical Tokyo Electron Ltd
Priority to TW097119845A priority Critical patent/TW200916677A/en
Publication of WO2008146778A1 publication Critical patent/WO2008146778A1/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00—Construction of housing; Use of materials therefor
    • F16K27/003—Housing formed from a plurality of the same valve elements

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Valve Housings (AREA)
  • Quick-Acting Or Multi-Walled Pipe Joints (AREA)
  • Chemical Vapour Deposition (AREA)

Abstract

Provided is a fluid control apparatus wherein assembly efficiency is improved. Joint members (3, 6a) are permitted to abut to each other and connected by a male screw member (18) from the front-rear direction. Between the adjacent joint members (3, 6a), a seal section (20) is arranged substantially at the center on the rectangular abutting surface. The male screw members (18) in the front-rear direction are arranged only at two parts separated 180°, among the four corners of the rectangle. At the four corners of one joint member (3), screw inserting holes (29) and female screws (30) are alternately arranged, and at the four corners of the other joint member (6a), screw inserting holes (29) and female screws (30) are alternately arranged at the positions inverse to those on the joint member (3).
PCT/JP2008/059631 2007-05-31 2008-05-26 Fluid control apparatus Ceased WO2008146778A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW097119845A TW200916677A (en) 2007-05-31 2008-05-29 Fluid control device

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007-144919 2007-05-31
JP2007144919A JP2008298177A (en) 2007-05-31 2007-05-31 Fluid control device

Publications (1)

Publication Number Publication Date
WO2008146778A1 true WO2008146778A1 (en) 2008-12-04

Family

ID=40075019

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/059631 Ceased WO2008146778A1 (en) 2007-05-31 2008-05-26 Fluid control apparatus

Country Status (3)

Country Link
JP (1) JP2008298177A (en)
TW (1) TW200916677A (en)
WO (1) WO2008146778A1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPWO2017221893A1 (en) * 2016-06-21 2019-04-11 株式会社フジキン Fluid control device

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10895329B2 (en) 2016-09-12 2021-01-19 Fujikin Incorporated Fluid control system, base block used for same, and method for manufacturing fluid control system
JP6917068B2 (en) * 2016-10-24 2021-08-11 株式会社フジキン Fluid control device and product manufacturing method using this fluid control device
KR20200015691A (en) 2017-08-31 2020-02-12 가부시키가이샤 후지킨 Joint block and manufacturing method thereof

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS46614Y1 (en) * 1966-09-14 1971-01-11
JPS5086322U (en) * 1973-12-11 1975-07-23
US20060027275A1 (en) * 2001-07-13 2006-02-09 Talon Innovations, Inc. Shear-resistant modular fluidic blocks
JP2008133933A (en) * 2006-11-29 2008-06-12 Ckd Corp Adapter for connection

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS46614Y1 (en) * 1966-09-14 1971-01-11
JPS5086322U (en) * 1973-12-11 1975-07-23
US20060027275A1 (en) * 2001-07-13 2006-02-09 Talon Innovations, Inc. Shear-resistant modular fluidic blocks
JP2008133933A (en) * 2006-11-29 2008-06-12 Ckd Corp Adapter for connection

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPWO2017221893A1 (en) * 2016-06-21 2019-04-11 株式会社フジキン Fluid control device
JP2020115040A (en) * 2016-06-21 2020-07-30 株式会社フジキン Fluid control device
JP7015071B2 (en) 2016-06-21 2022-02-02 株式会社フジキン Fluid control device

Also Published As

Publication number Publication date
JP2008298177A (en) 2008-12-11
TW200916677A (en) 2009-04-16

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