200916677 九、發明說明： 【發明所屬之技術領域】 本發明係有關於一種用於半導體製造裝置等之流體控 制裝置’特別是有關於一種將複數個流體控制機器積體化 而形成之流體控制裝置。 【先前技術】 在半導體製造裝置使用之流體控制裝置中，已進展成 所謂的積體化，即，複數個流體控制機器配設成直排狀並 將未藉由管或接頭所連接形成之複數條管線並排設置於底 座構件上’專利文獻1所揭示之此種流體控制裝置爲，下 段層之複數個塊狀接頭構件以陽螺紋構件安裝於底座構 件，並以橫跨相鄰之接頭構件之狀態安裝作爲上段層之複 數個流體控制機器。 專利文獻1 :日本專利公開公報平10_22 73 6 8號 【發明內容】 在上述專利文獻1之流體控制裝置中，相較於習知， 具有所謂可減少裝置之佔有空間之減少及通路量之優點， 但有以橫跨相鄰之接頭構件之狀態安裝流體控制機器之際 定位費時之問題。 本發明之目的在於提供可謀求組裝作業效率提升之流 體控制裝置。 本發明之流體控制裝置包含有於前後方向排列配置之 複數個流體控制機器、與流體控制機器成一體或分開之複 數個塊狀接頭構件、確保各接頭構件對合部份之密封性之 200916677 密封手段；其特徵在於各接頭構件彼此相互對合，並且藉 由來自前後方向之陽螺紋構件而結合，在相鄰之接頭構件 間’於方形對合面之約中央處設置密封手段，來自前後方 向之陽螺紋構件僅配置於方形4個角中相距180。的2處， 於1接頭構件之4個角交互設置螺絲插通孔及陰螺紋，於 另一接頭構件之4個角螺絲插通孔與陰螺紋以交互且與一 接頭構件者呈相反位置之狀態作設置。 各接頭構件以來自前後方向之陽螺紋構件依序結合。 流體控制機器預先與接頭構件一體化，若非如此時，藉由 來自上方之陽螺紋構件與接頭構件而結合。因而，不需以 橫跨相鄰之接頭構件之狀態配置流體控制機器，相較於在 此配置使用之流體通路’可獲得使流體直線流動之流體通 路。來自前後方向之陽螺紋構件配置於方形4個角中相距 1 8 0 °的2處，於1接頭構件之4個角交互配置螺絲插通孔 及陰螺紋，於另一接頭構件之4個角，螺絲插通孔與陰螺 紋以交互且與一接頭構件者呈相反位置之狀態作設置，藉 此’能以2根陽螺紋構件將丨對接頭構件結合。結果，可 謀求輕量化’同時，易進行接頭之增減，亦可提高組裝作 業效率。且’由於密封手段設置於相鄰之接頭構件之方形 對合面約中央處’故使用2根陽螺紋構件來結合，即使不 使用4根陽螺紋構件，亦可確保其密封性。 在此說明書中’上下係指第1圖之上下，此上下係方 便說明者，例如’第i圖之左右亦可配置成上下，非與設 置時之上下一致者。 200916677 流體控制機器有開關閥、減壓閥 '壓力顯示器、流量 調整器（或質量流量控制器）等。各流體控制機器由內建 有進行開關功能、流量調整功能等之結構之功能部份及與 功能部份設置成一體，且設有流體通路之本體部份構成’ 此時，本體部份作爲塊狀接頭部（包含在「塊狀接頭構件」 內）。流體控制機器亦有支撐於與本體部份分開之塊狀接 頭構件之情形。 密封手段具有存在於各接頭構件間之墊圏、形成於接 頭構件之對合面之環狀墊圏按壓用突起，藉以環狀墊圏按 壓用突起使墊圈變形，可確保密封性。 此外，「方形對合面約中央處」係指寬度方向（左右 方向）之正中央，在上下方向，係指亦可依配合相鄰之接 頭構件等之需要，適當變更其位置者。 陽螺紋構件宜爲不鏽鋼製（SUS304、SUS316等）， 接頭構件亦宜爲不鏽鋼製（SUS304、SUS316等）。墊圈 宜以不鏽鋼、鎳合金等形成圓環狀（有孔圓板狀）者。 根據本發明之流體控制裝置，由於能以來自前後方向 之陽螺紋構件將於前後方向排列之各塊狀接頭構件依序結 合，故可提高組裝性。 【實施方式】 以下’參照圖式，說明本發明之實施形態。 第1圖至第3圖顯示本發明流體控制裝置之第1實施 形態。 此流體控制裝置（1 )係在半導體製造裝置等使用者， 200916677 具有於下端具連接塊部（2a)之減壓閥（2)、支撐減壓閥 (2 )之第1塊狀接頭構件（3 )、與減壓閥（2 )之出口側 (圖之右側）相鄰配置’於下端具有連接塊部（4 a )之壓 力顯示器（4)、支撐壓力顯示器（4)之第2塊狀接頭構 件（5 )、與壓力顯示器（4 )之出口側相鄰配置，於下方 一體形成位於與接頭構件（3 )( 5 )相同之水平面之塊狀 接頭部（6a)之第1開關閥（6)、與第1開關閥（6)之 出口側相鄰配置，一體形成高度較第1開關閥（6 )之接頭 部（6a )低之塊狀接頭部（7a )之第2開關閥（7 )、下面 位於與接頭構件（3 )( 5 )之下面相同之水平面，支撐第 2開關閥（7 )之第3塊狀接頭構件（8 )、與第2開關閥 (7 )之塊狀接頭構件（7a )之出口側相鄰配置之第4塊狀 接頭構件（9 )、於第4接頭構件（9 )之出口側間隔預定 間隔，配置成相對狀之第5塊狀接頭構件（1 0 )、於入口 側（圖之左側）及出口側具有連接塊部（1 1 a )( 1 1 b )， 入口側連接塊部（1 1 a )支撐於第4接頭構件（9 )，出口 側連接塊部（1 1 b )支撐於第5接頭構件（〗0 )，而橫跨第 4及第5接頭構件（9) (1〇)而支撐之流量調整器（第3 流體控制機器）（1 1 )、與第5接頭構件（1 0 )之出口側 相鄰配置，高度較第5接頭構件（1 〇 )低之塊狀接頭部（1 2 a ) 之第3開關閥（1 2 )、下面位於與其他接頭構件（3 )( 5 ) (8) (9)之下面相同之水平面，支撐第3開關閥（12) 之第6塊狀接頭構件（1 3 )。 於第丨接頭構件（3 )連接用以將程序氣體供給至減壓 200916677 閥（2 )之程序氣體導入用接頭（丨4 )。於第3接頭構件（8 ) 連接將沖洗氣體供給至第2開關閥（7 )之沖洗氣體導入用 接頭（1 5 )。於第6接頭構件（丨3 )連接用以從第3開關 閥（1 2 )排出程序氣體及沖洗氣體之程序氣體及沖洗氣體 排出用接頭（1 6 )。 各零件（2) (3) (4) (5) (6) (7) (8) (9) (1 〇 ) ( 1 1 ) ( 1 2 ) ( 1 3 )組裝時，不僅使用來自上方之 陽螺紋構件（1 7 )( 1 9 )’亦使用來自前後方向之陽螺紋 構件（1 8 ) ’各塊狀接頭構件（3 ) ( 5 ) ( 8 ) ( 9 ) ( 1 〇 ) 、各開關閥（6 ) ( 7 ) ( 1 2 )之塊狀接頭部（6 a ) (12a)及各流體控制機器（2) (4) (11)之連接 塊部（ (2〇 ) 2a) (4a) (lla) (llb)藉由密封部（密封手段） 相對。 減壓閥（2 )及壓力顯示器（4 )及與其對應之接頭構 件（3 ) ( 5 )在前後間隔預定間隔的2處連接流體通路（2 3 ) (24 ) ’對應於此，於減壓閥（2 )及壓力顯示器（4 )與 接頌構件（3 ) ( 5 )間在前後間隔預定間隔設置2個密封 部（2 0 )。 如第3圖所示，於接頭構件（3 ) ( 5 )之前後端部設 置陰螺紋（3 0 )，來自上方之陽螺紋構件（丨7 )於各密封 ( 2 0 )之前後方向外側各配置1根。於支撐壓力顯示器 (4 )之接頭構件（5 )及與其相鄰之第1開關閥（6 )之塊 狀接頭部（6 a )間，於其方形對合面之約中間處設置密封 部（2 0 )，來自前後方向之陽螺紋構件（丨8 )僅配置於方 200916677 (5 )之4個角交 ，於第1開關閥 形4個角中相距180。的2處，於接頭構件 互設置螺絲插通孔（2 9 )及陰螺，紋（3 〇 ) (6 )之塊狀接頭構件 6 a )之4個角’螺絲插通孔（2 9 ) 與陰螺紋（30)以交互且龃掊甩編杜^ ^ 〃技"貝構件（5 )者之位置呈相反 之狀態作設置。 相鄰之接頭構件（3) (5) '相鄰之開關閥（6)(” 之塊狀接頭部（6a) (7a)、開關閥（？） （12)之塊狀接 頭部（7a) (12a)及接頭構件（9) (1〇)亦與第3圖同200916677 IX. DESCRIPTION OF THE INVENTION: 1. Field of the Invention The present invention relates to a fluid control device for a semiconductor manufacturing device or the like, and more particularly to a fluid control device formed by integrating a plurality of fluid control devices. . [Prior Art] In a fluid control device used in a semiconductor manufacturing apparatus, a so-called integrated process has been developed, that is, a plurality of fluid control devices are arranged in a straight line and will be formed by a tube or a joint. The pipelines are arranged side by side on the base member. The fluid control device disclosed in Patent Document 1 has a plurality of block-shaped joint members of the lower layer being mounted to the base member with the male threaded members and spanning the adjacent joint members. The state is installed as a plurality of fluid control machines in the upper layer. [Patent Document 1] Japanese Patent Laid-Open Publication No. Hei No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. However, there is a problem that positioning is time-consuming when the fluid control machine is installed in a state of crossing adjacent joint members. SUMMARY OF THE INVENTION An object of the present invention is to provide a fluid control device which can improve the efficiency of assembly work. The fluid control device of the present invention comprises a plurality of fluid control devices arranged in the front-rear direction, a plurality of block-shaped joint members integrated or separated from the fluid control device, and a seal for ensuring the sealing of the joint portions of the joint members. Means; the joint members are mutually opposed to each other, and are joined by a male threaded member from the front-rear direction, and a sealing means is provided between the adjacent joint members at about the center of the square facing surface, from the front-rear direction The male threaded member is disposed only at a distance of 180 from the four corners of the square. At two places, the screw insertion hole and the female thread are alternately arranged at the four corners of the one joint member, and the four corner screw insertion holes of the other joint member interact with the female thread and are opposite to a joint member. The status is set. Each of the joint members is sequentially joined by a male screw member from the front-rear direction. The fluid control device is previously integrated with the joint member, and if not, the male threaded member from the upper portion is coupled to the joint member. Therefore, it is not necessary to configure the fluid control machine in a state of straddle the adjacent joint members, and a fluid passage for the fluid to flow linearly can be obtained as compared with the fluid passage used in the configuration. The male threaded member from the front-rear direction is disposed at two places at a distance of 180° from the four corners of the square, and the screw insertion hole and the female thread are alternately arranged at the four corners of the one joint member at four corners of the other joint member. The screw insertion hole and the female thread are arranged to interact with each other in a state opposite to a joint member, whereby the pair of joint members can be joined by two male screw members. As a result, it is possible to reduce the weight. At the same time, it is easy to increase or decrease the joint, and the assembly work efficiency can be improved. Further, since the sealing means is provided at the center of the square facing surface of the adjacent joint member, it is joined by using two male screw members, and the sealing property can be ensured even without using four male screw members. In the present specification, the upper and lower parts refer to the upper and lower sides of Fig. 1, and the upper and lower parts are explained. For example, the left and right sides of the i-th image may be arranged up and down, and may not be aligned with the upper and lower sides of the setting. 200916677 Fluid control machines have on-off valves, pressure reducing valves 'pressure displays, flow regulators (or mass flow controllers), etc. Each of the fluid control devices is provided with a functional portion having a structure for performing a switching function, a flow rate adjustment function, and the like, and is integrally provided with the functional portion, and a body portion having a fluid passage is formed. The joint portion (included in the "block joint member"). The fluid control machine also has a support for a block-like joint member that is separate from the body portion. The sealing means has a pad which is interposed between the respective joint members, and an annular pad pressing projection formed on the mating surface of the joint member, whereby the annular pad presses the pressing protrusion to deform the gasket, thereby ensuring the sealing property. In addition, "the center of the square facing surface" refers to the center of the width direction (left-right direction), and in the vertical direction, it means that the position can be appropriately changed according to the needs of the adjacent joint members. The male screw member is preferably made of stainless steel (SUS304, SUS316, etc.), and the joint member is preferably made of stainless steel (SUS304, SUS316, etc.). The gasket should be formed into a ring shape (aperture with a circular plate shape) made of stainless steel or nickel alloy. According to the fluid control device of the present invention, since the block-shaped joint members which are arranged in the front-rear direction by the male screw members from the front-rear direction can be sequentially joined, the assemblability can be improved. [Embodiment] Hereinafter, embodiments of the present invention will be described with reference to the drawings. Fig. 1 to Fig. 3 show a first embodiment of the fluid control device of the present invention. The fluid control device (1) is used by a user such as a semiconductor manufacturing device, and 200916677 has a pressure reducing valve (2) having a connection block portion (2a) at a lower end and a first block-shaped joint member supporting a pressure reducing valve (2) ( 3), adjacent to the outlet side of the pressure reducing valve (2) (on the right side of the figure), a pressure display (4) having a connecting block portion (4a) at the lower end and a second block supporting the pressure display (4) The joint member (5) is disposed adjacent to the outlet side of the pressure display (4), and integrally forms a first on-off valve (a) of the block joint portion (6a) at the same level as the joint member (3) (5). 6), disposed adjacent to the outlet side of the first switching valve (6), integrally forming a second switching valve of a block-shaped joint portion (7a) having a lower height than the joint portion (6a) of the first switching valve (6) ( 7), the lower surface is located at the same level as the lower surface of the joint member (3) (5), and supports the third block-shaped joint member (8) of the second on-off valve (7) and the block of the second on-off valve (7) The fourth block-shaped joint member (9) disposed adjacent to the outlet side of the joint member (7a) is spaced apart from the outlet side of the fourth joint member (9) by a predetermined interval The fifth block-shaped joint member (10) arranged in a relative shape has a joint block portion (1 1 a ) (1 1 b ) on the inlet side (the left side of the drawing) and the outlet side, and an inlet-side joint block portion (1) 1 a ) supported on the 4th joint member (9 ), the outlet side joint block portion (1 1 b ) is supported by the 5th joint member (0), and spans the 4th and 5th joint members (9) (1〇) ) a supported flow regulator (third fluid control device) (1 1 ), a block connector disposed adjacent to the outlet side of the fifth joint member (10), and having a lower height than the fifth joint member (1 〇) The third switching valve (1 2 ) of the portion (1 2 a ) and the lower surface are located at the same level as the lower surface of the other joint members (3) ( 5 ) (8) (9), and support the third switching valve (12) 6 block joint member (13). A program gas introduction joint (丨4) for supplying the program gas to the pressure reduction 200916677 valve (2) is connected to the second joint member (3). A flushing gas introduction joint (15) for supplying flushing gas to the second switching valve (7) is connected to the third joint member (8). A program gas for discharging the program gas and the flushing gas and a flushing gas discharge joint (16) are connected to the sixth joint member (?3) from the third joint member (?3). Parts (2) (3) (4) (5) (6) (7) (8) (9) (1 〇) (1 1 ) ( 1 2 ) ( 1 3 ) When assembling, use not only from the top The male threaded member (17) (1 9 )' also uses the male threaded member (1 8 ) from the front-rear direction. Each of the block-like joint members (3) (5) (8) (9) (1 〇), each switch Block joints (6 a ) (12a) of valves (6) ( 7 ) ( 1 2 ) and connecting block parts ((2〇) 2a) of each fluid control machine (2) (4) (11) (4a (lla) (llb) is opposed by a sealing portion (sealing means). The pressure reducing valve (2) and the pressure display (4) and the corresponding joint member (3) (5) are connected to the fluid passage (2 3 ) (24 ) at a predetermined interval between the front and rear intervals. Two sealing portions (20) are provided between the valve (2) and the pressure display (4) and the joint member (3) (5) at predetermined intervals between the front and rear. As shown in Fig. 3, a female thread (30) is provided at the rear end portion of the joint member (3) (5), and the male screw member (丨7) from the upper side is forward and outward of each seal (20). Configure 1 root. Between the joint member (5) supporting the pressure display (4) and the block joint portion (6a) of the first switch valve (6) adjacent thereto, a seal portion is disposed at a middle portion of the square mating surface ( 2 0 ), the male screw members (丨8) from the front-rear direction are disposed only at the four corners of the square 200916677 (5), and are spaced apart by 180 in the four corners of the first switching valve shape. In the two places, the connector member is provided with a screw insertion hole (2 9 ) and a female screw, the (3 〇) (6) block connector member 6 a ) 4 corners 'screw insertion hole (2 9 ) It is set in the opposite state to the position of the person who interacts with the female thread (30) and the position of the member (5). Adjoining joint member (3) (5) 'The block joint (6a) of the adjacent switch valve (6) (", the block joint (7a) of the switch valve (?) (12) (12a) and joint member (9) (1〇) are also the same as in Figure 3.
樣地結合。因而，由於不需如習知般以橫跨相鄰之接頭構 件之狀態配置’故可提咼組裝作業。又，由於能以2根陽 螺紋構件（1 8)將1對接頭構件（3 )( 5 )結合，故可輕量 化’同時，易進行接頭構件之增減，此點亦可提高組裝作 業效率。由於密封手段（20 )設置於相鄰之接頭構件（3 ) (5 )之方形對合面約中央處’故使用2根陽螺紋構件（1 8 ) 來結合，即使不使用4根陽螺紋構件，亦可確保其密封性。 第4圖顯示本發明流體控制裝置之第2實施形態。此 第2實施形態僅塊狀接頭構件與第1實施形態不同，以下， 與第1實施形態相同之結構附上相同標號，省略說明，僅 說明不同部份。 在第4圖中，於相鄰接頭構件（3) (5)之其中一者 形成由圓柱狀銷構成之凸部（3 1 )，於另一者形成與該凸 部嵌合之圓柱狀凹部（3 2 )。該等凸部（3 1 )及凹部（3 2 ) 共計設置2個，而藉由密封部（20)於寬度方向（左右方 向）排列。當藉由2根陽螺紋構件（1 8 )將1對接頭構件 -10- 200916677 (3 ) ( 5 )結合時’因遊隙，密封部（2 0 )有稍微偏離2 根據陽螺紋構件（1 8 )之正中央之可能性，於鎖固陽螺紋 構件（1 8 )前，藉使凸部（3 1 )與凹部嵌合，可將密封部 (2 0 )定位，即使遊隙大時，亦可防止密封性降低。 產業上可利用性 由於可提高流體控制裝置之組裝性，故藉應用於半導 體製造裝置所使用之流體控制裝置，有助於半導體製造裝 置之性能提高。 【圖式簡單說明】 第1圖係顯示本發明流體控制裝置第1實施形態之縱 截面圖。 第2圖係平面圖。 第3圖係主要部份之放大分解立體圖。 第4圖係顯示本發明流體控制裝置之第2實施形態之 主要部份放大分解立體圖。 【主要元件符號說明】Combine like this. Therefore, the assembly work can be improved because it is not required to be disposed in a state of crossing the adjacent joint member as is conventional. Further, since the pair of joint members (3) and (5) can be joined by the two male screw members (18), the weight can be reduced, and the joint member can be easily increased or decreased. This also improves the assembly work efficiency. . Since the sealing means (20) is disposed at approximately the center of the square facing surface of the adjacent joint member (3) (5), two male male members (18) are used for bonding, even if four male members are not used. It also ensures its tightness. Fig. 4 shows a second embodiment of the fluid control device of the present invention. In the second embodiment, only the block-shaped joint member is different from the first embodiment, and the same components as those in the first embodiment are denoted by the same reference numerals, and the description thereof will be omitted. Only the different portions will be described. In Fig. 4, a convex portion (3 1 ) composed of a cylindrical pin is formed in one of the adjacent joint members (3) (5), and a cylindrical recess portion fitted to the convex portion is formed in the other. (3 2 ). A total of two convex portions (3 1 ) and concave portions (32) are provided, and the sealing portions (20) are arranged in the width direction (left-right direction). When a pair of joint members-10-200916677 (3) (5) are joined by two male screw members (18), the seal portion (20) slightly deviates from 2 due to the play, according to the male thread member (1) 8) The possibility of centering, before the locking male thread member (18), by fitting the convex portion (31) with the concave portion, the sealing portion (20) can be positioned even when the clearance is large, It also prevents the seal from being lowered. Industrial Applicability Since the assemblability of the fluid control device can be improved, the performance of the semiconductor manufacturing device can be improved by the fluid control device used in the semiconductor manufacturing device. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a longitudinal cross-sectional view showing a first embodiment of a fluid control device according to the present invention. Figure 2 is a plan view. Fig. 3 is an enlarged exploded perspective view of the main part. Fig. 4 is an enlarged perspective view showing the main part of a second embodiment of the fluid control device of the present invention. [Main component symbol description]
1 流 am 體 控 制 裝 置 2 減 壓 閥 2a 連 接 塊 部 3 第 1 塊 狀 接 頭 構 件 4 壓 力 顯 示 器 4 a 連 接 塊 部 5 第 2 塊 狀 接 頭 構 件 6 第 1 開 關 閥 6 a 塊 狀 接 頭 部 -11- 200916677 7 第 2 開 關 閥 7a 塊 狀 接 頭 部 8 第 3 塊 狀 接 頭 構 件 9 第 4 塊 狀 接 頭 構 件 10 第 5 塊 狀 接 頭 構 件 11 流 量 三田 m 整 器 ( 第 3 流 體 控 制 機 器 11a 連 接 塊 部 lib 連 接 塊 部 12 第 3 開 關 閥 12a 塊 狀 接 頭 部 13 第 6 塊 狀 接 頭 構 件 14 程 序 氣 體 導 入 用 接 頭 15 沖 洗 氣 體 導 入 用 接 頭 16 程 序 氣 體 及 沖 洗 氣 體 排 出 用 接 頭 17 來 白 上 方 之 陽 螺 紋 構 件 18 來 白 前 後 方 向 之 陽 螺 紋 構 件 19 來 白 上 方 之 陽 螺 紋 構 件 20 密 封 部 23 流 體 通 路 24 流 體 通 路 29 螺 絲 插 通 孔 3 0 陰 螺 紋 3 1 凸 部 3 2 凹 部1 Flow ambody control device 2 Pressure reducing valve 2a Connection block 3 First block joint member 4 Pressure display 4 a Connection block 5 Second block joint member 6 First on/off valve 6 a Block joint portion -11- 200916677 7 2nd on-off valve 7a Block-shaped joint part 8 3rd block-shaped joint member 9 4th block-shaped joint member 10 5th block-shaped joint member 11 Flow Mita M whole (3rd fluid control machine 11a connection block part lib connection Block portion 12 third switching valve 12a block-shaped joint portion 13 sixth block-shaped joint member 14 program gas introduction joint 15 flushing gas introduction joint 16 program gas and flushing gas discharge joint 17 to white male screw member 18 The male threaded member 19 in the direction of the white front and rear comes over the white threaded member 20 of the sealing portion 23 Passage fluid passage 24 screw 29 insertion hole 30 of the female thread 31 recess 32 projecting portion