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WO2008036959A3 - Micromirror array device comprising encapsulated reflective metal layer and method of making the same - Google Patents

Micromirror array device comprising encapsulated reflective metal layer and method of making the same Download PDF

Info

Publication number
WO2008036959A3
WO2008036959A3 PCT/US2007/079256 US2007079256W WO2008036959A3 WO 2008036959 A3 WO2008036959 A3 WO 2008036959A3 US 2007079256 W US2007079256 W US 2007079256W WO 2008036959 A3 WO2008036959 A3 WO 2008036959A3
Authority
WO
WIPO (PCT)
Prior art keywords
metal layer
array device
making
same
reflective metal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/US2007/079256
Other languages
French (fr)
Other versions
WO2008036959A2 (en
Inventor
Jin Young Sohn
Gyoung Il Cho
Cheong Soo Seo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Angstrom Inc
Stereo Display Inc
Original Assignee
Angstrom Inc
Stereo Display Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US11/534,620 external-priority patent/US7589885B2/en
Priority claimed from US11/534,613 external-priority patent/US7589884B2/en
Application filed by Angstrom Inc, Stereo Display Inc filed Critical Angstrom Inc
Publication of WO2008036959A2 publication Critical patent/WO2008036959A2/en
Publication of WO2008036959A3 publication Critical patent/WO2008036959A3/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
    • B81B7/0009—Structural features, others than packages, for protecting a device against environmental influences
    • B81B7/0012—Protection against reverse engineering, unauthorised use, use in unintended manner, wrong insertion or pin assignment
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/04—Optical MEMS
    • B81B2201/042—Micromirrors, not used as optical switches

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)

Abstract

The present invention provides an optical micromirror device and its array device and method for making the same. By introducing a sub coating layer and an over coating layer with a high reflective metal layer, the reflective layer of the micromirrors is protected from environmental circumstances, oxidation, degradation, acid, base, and galvanic corrosion of the micro-mechanical structures. Also the new coating structure enhances the performance of the micromirror array device by reducing degradation of the reflectivity of the metal layer, by providing anti-reflection in the optically non-effective area, and by protecting the micro-mechanical structures.
PCT/US2007/079256 2006-09-22 2007-09-22 Micromirror array device comprising encapsulated reflective metal layer and method of making the same Ceased WO2008036959A2 (en)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US11/534,620 US7589885B2 (en) 2006-09-22 2006-09-22 Micromirror array device comprising encapsulated reflective metal layer and method of making the same
US11/534,613 2006-09-22
US11/534,613 US7589884B2 (en) 2006-09-22 2006-09-22 Micromirror array lens with encapsulation of reflective metal layer and method of making the same
US11/534,620 2006-09-22

Publications (2)

Publication Number Publication Date
WO2008036959A2 WO2008036959A2 (en) 2008-03-27
WO2008036959A3 true WO2008036959A3 (en) 2009-02-26

Family

ID=39201351

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2007/079256 Ceased WO2008036959A2 (en) 2006-09-22 2007-09-22 Micromirror array device comprising encapsulated reflective metal layer and method of making the same

Country Status (1)

Country Link
WO (1) WO2008036959A2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103137884B (en) * 2011-11-25 2016-01-27 海洋王照明科技股份有限公司 A kind of compound encapsulation structure of organic electroluminescence device and method for packing thereof

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6891655B2 (en) * 2003-01-02 2005-05-10 Micronic Laser Systems Ab High energy, low energy density, radiation-resistant optics used with micro-electromechanical devices
US6903860B2 (en) * 2003-11-01 2005-06-07 Fusao Ishii Vacuum packaged micromirror arrays and methods of manufacturing the same
EP1544161A1 (en) * 2002-08-01 2005-06-22 Nikon Corporation Three-dimensional structure element and method of manufacturing the element, optical switch, and micro device
US7068416B2 (en) * 2004-04-12 2006-06-27 Angstrom Inc. Three-dimensional imaging device

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1544161A1 (en) * 2002-08-01 2005-06-22 Nikon Corporation Three-dimensional structure element and method of manufacturing the element, optical switch, and micro device
US6891655B2 (en) * 2003-01-02 2005-05-10 Micronic Laser Systems Ab High energy, low energy density, radiation-resistant optics used with micro-electromechanical devices
US6903860B2 (en) * 2003-11-01 2005-06-07 Fusao Ishii Vacuum packaged micromirror arrays and methods of manufacturing the same
US7068416B2 (en) * 2004-04-12 2006-06-27 Angstrom Inc. Three-dimensional imaging device

Also Published As

Publication number Publication date
WO2008036959A2 (en) 2008-03-27

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