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WO2008078688A1 - ステージ装置、露光装置、及びデバイスの製造方法 - Google Patents

ステージ装置、露光装置、及びデバイスの製造方法 Download PDF

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Publication number
WO2008078688A1
WO2008078688A1 PCT/JP2007/074673 JP2007074673W WO2008078688A1 WO 2008078688 A1 WO2008078688 A1 WO 2008078688A1 JP 2007074673 W JP2007074673 W JP 2007074673W WO 2008078688 A1 WO2008078688 A1 WO 2008078688A1
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WO
WIPO (PCT)
Prior art keywords
substages
moving surface
moving
device manufacturing
stage apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2007/074673
Other languages
English (en)
French (fr)
Inventor
Kazuya Ono
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp filed Critical Nikon Corp
Priority to KR1020097015661A priority Critical patent/KR20090106555A/ko
Priority to JP2008551084A priority patent/JP5146323B2/ja
Priority to KR20157004515A priority patent/KR20150036734A/ko
Priority to EP07859953A priority patent/EP2109133A4/en
Publication of WO2008078688A1 publication Critical patent/WO2008078688A1/ja
Priority to US12/457,914 priority patent/US20100066992A1/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70716—Stages
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70716—Stages
    • G03F7/70725—Stages control
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70758—Drive means, e.g. actuators, motors for long- or short-stroke modules or fine or coarse driving
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70775—Position control, e.g. interferometers or encoders for determining the stage position
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70808—Construction details, e.g. housing, load-lock, seals or windows for passing light in or out of apparatus
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/7085—Detection arrangement, e.g. detectors of apparatus alignment possibly mounted on wafers, exposure dose, photo-cleaning flux, stray light, thermal load
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70858—Environment aspects, e.g. pressure of beam-path gas, temperature
    • G03F7/709—Vibration, e.g. vibration detection, compensation, suppression or isolation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • H01L21/682—Mask-wafer alignment
    • H10P72/30—
    • H10P72/57—

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Epidemiology (AREA)
  • Public Health (AREA)
  • Atmospheric Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Toxicology (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

　所定の移動面（１６ａ）を備えた固定部（１６）と、移動面（１６ａ）に沿って第１方向を含む複数の方向に移動可能な第１移動体とを有する。第１移動体の移動と同期して、移動面（１６ａ）に対して第１方向に移動するサブステージ（６１Ａ、６１Ｂ）と、サブステージ（６１Ａ、６１Ｂ）に少なくとも一部が設けられ、サブステージ（６１Ａ、６１Ｂ）と移動面（１６ａ）との間の第１方向の相対位置に関する情報を検出する第１計測装置（６７）と、サブステージ（６１Ａ、６１Ｂ）に少なくとも一部が設けられ、サブステージと第１移動体との間の第１方向と略直交しかつ移動面（１６ａ）に沿う第２方向の相対位置に関する情報を検出する第２計測装置（７１、７２）とを有する。
PCT/JP2007/074673 2006-12-27 2007-12-21 ステージ装置、露光装置、及びデバイスの製造方法 Ceased WO2008078688A1 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
KR1020097015661A KR20090106555A (ko) 2006-12-27 2007-12-21 스테이지 장치, 노광 장치, 및 디바이스의 제조 방법
JP2008551084A JP5146323B2 (ja) 2006-12-27 2007-12-21 ステージ装置、露光装置、及びデバイスの製造方法
KR20157004515A KR20150036734A (ko) 2006-12-27 2007-12-21 스테이지 장치, 노광 장치, 및 디바이스의 제조 방법
EP07859953A EP2109133A4 (en) 2006-12-27 2007-12-21 PLATTER APPARATUS, EXPOSURE APPARATUS, AND METHOD FOR MANUFACTURING THE APPARATUS
US12/457,914 US20100066992A1 (en) 2006-12-27 2009-06-25 Stage apparatus, exposure apparatus, and device fabricating method

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2006351479 2006-12-27
JP2006-351479 2006-12-27

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US12/457,914 Continuation US20100066992A1 (en) 2006-12-27 2009-06-25 Stage apparatus, exposure apparatus, and device fabricating method

Publications (1)

Publication Number Publication Date
WO2008078688A1 true WO2008078688A1 (ja) 2008-07-03

Family

ID=39562477

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2007/074673 Ceased WO2008078688A1 (ja) 2006-12-27 2007-12-21 ステージ装置、露光装置、及びデバイスの製造方法

Country Status (6)

Country Link
US (1) US20100066992A1 (ja)
EP (2) EP2998983B1 (ja)
JP (1) JP5146323B2 (ja)
KR (2) KR20150036734A (ja)
TW (1) TWI457978B (ja)
WO (1) WO2008078688A1 (ja)

Cited By (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010062209A (ja) * 2008-09-01 2010-03-18 Nikon Corp 露光装置、露光方法、及びデバイス製造方法
JP2011211180A (ja) * 2010-03-29 2011-10-20 Nikon Corp 露光方法及び露光装置、並びにデバイス製造方法
US8379187B2 (en) 2007-10-24 2013-02-19 Nikon Corporation Optical unit, illumination optical apparatus, exposure apparatus, and device manufacturing method
US8446579B2 (en) 2008-05-28 2013-05-21 Nikon Corporation Inspection device and inspecting method for spatial light modulator, illumination optical system, method for adjusting the illumination optical system, exposure apparatus, and device manufacturing method
US8451427B2 (en) 2007-09-14 2013-05-28 Nikon Corporation Illumination optical system, exposure apparatus, optical element and manufacturing method thereof, and device manufacturing method
US8462317B2 (en) 2007-10-16 2013-06-11 Nikon Corporation Illumination optical system, exposure apparatus, and device manufacturing method
US8520291B2 (en) 2007-10-16 2013-08-27 Nikon Corporation Illumination optical system, exposure apparatus, and device manufacturing method
US20130271945A1 (en) 2004-02-06 2013-10-17 Nikon Corporation Polarization-modulating element, illumination optical apparatus, exposure apparatus, and exposure method
US8675177B2 (en) 2003-04-09 2014-03-18 Nikon Corporation Exposure method and apparatus, and method for fabricating device with light amount distribution having light larger in first and second pairs of areas
US8854601B2 (en) 2005-05-12 2014-10-07 Nikon Corporation Projection optical system, exposure apparatus, and exposure method
US9097981B2 (en) 2007-10-12 2015-08-04 Nikon Corporation Illumination optical apparatus, exposure apparatus, and device manufacturing method
US9116346B2 (en) 2007-11-06 2015-08-25 Nikon Corporation Illumination apparatus, illumination method, exposure apparatus, and device manufacturing method
US9140992B2 (en) 2003-10-28 2015-09-22 Nikon Corporation Illumination optical apparatus and projection exposure apparatus
US9164209B2 (en) 2003-11-20 2015-10-20 Nikon Corporation Illumination optical apparatus, exposure apparatus, and exposure method with optical member with optical rotatory power having different thicknesses to rotate linear polarization direction
JP2017142522A (ja) * 2009-08-20 2017-08-17 株式会社ニコン 移動体装置、露光装置、フラットパネルディスプレイの製造方法、デバイス製造方法、及び露光方法
JP2022048443A (ja) * 2020-09-15 2022-03-28 キオクシア株式会社 位置計測装置及び計測方法

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2917169B2 (ja) 1990-07-27 1999-07-12 大成建設株式会社 鉄筋コンクリート柱と鉄骨梁の仕口構造
US8598538B2 (en) * 2010-09-07 2013-12-03 Nikon Corporation Movable body apparatus, object processing device, exposure apparatus, flat-panel display manufacturing method, and device manufacturing method
NL2008696A (en) * 2011-05-25 2012-11-27 Asml Netherlands Bv A multi-stage system, a control method therefor, and a lithographic apparatus.
US9169895B2 (en) * 2011-11-29 2015-10-27 Hennessy Industries, Inc. Vehicle wheel balance weights
US8779635B2 (en) * 2012-04-10 2014-07-15 Kla-Tencor Corporation Arrangement of reticle positioning device for actinic inspection of EUV reticles
CN108983554A (zh) 2012-10-02 2018-12-11 株式会社尼康 曝光装置以及器件制造方法
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CN105684108A (zh) 2013-09-04 2016-06-15 Ckd株式会社 电磁致动器用电枢线圈、电磁致动器、曝光装置及器件制造方法
WO2016104513A1 (ja) 2014-12-24 2016-06-30 株式会社ニコン 移動体の制御方法、露光方法、デバイス製造方法、移動体装置、及び露光装置
CN111045302B (zh) 2014-12-24 2022-12-30 株式会社尼康 测量装置及方法、曝光装置及方法、以及器件制造方法
CN108168442B (zh) * 2018-03-28 2023-09-08 河北省同创交通工程配套产品产业技术研究院 一种止水带凹凸槽动态测量装置的动态测量方法
DE202019000816U1 (de) * 2019-02-20 2020-05-28 isel GmbH & Co. KG Planarläuferpositionsmesssystem

Citations (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2369299A (en) 1942-05-16 1945-02-13 Kafowi Jan Apparatus for working metals
JPH05326369A (ja) * 1992-05-26 1993-12-10 Sony Corp パターニング装置
JPH06124873A (ja) 1992-10-09 1994-05-06 Canon Inc 液浸式投影露光装置
US5677758A (en) 1995-02-09 1997-10-14 Mrs Technology, Inc. Lithography System using dual substrate stages
US5825043A (en) 1996-10-07 1998-10-20 Nikon Precision Inc. Focusing and tilting adjustment system for lithography aligner, manufacturing apparatus or inspection apparatus
JPH10303114A (ja) 1997-04-23 1998-11-13 Nikon Corp 液浸型露光装置
JPH11135400A (ja) 1997-10-31 1999-05-21 Nikon Corp 露光装置
JPH11164543A (ja) * 1997-09-25 1999-06-18 Nikon Corp 電磁力モータ、ステージ装置および露光装置
WO1999034255A1 (en) 1997-12-25 1999-07-08 Nikon Corporation Method and apparatus for manufacturing photomask and method of fabricating device
JPH11194479A (ja) 1997-12-26 1999-07-21 Nikon Corp フォトマスクの製造方法及び装置
WO1999049504A1 (fr) 1998-03-26 1999-09-30 Nikon Corporation Procede et systeme d'exposition par projection
WO1999050712A1 (en) 1998-03-26 1999-10-07 Nikon Corporation Exposure method and system, photomask, method of manufacturing photomask, micro-device and method of manufacturing micro-device
WO1999066370A1 (en) 1998-06-17 1999-12-23 Nikon Corporation Method for producing mask
JP2000012453A (ja) 1998-06-18 2000-01-14 Nikon Corp 露光装置及びその使用方法、露光方法、並びにマスクの製造方法
JP2000029202A (ja) 1998-07-15 2000-01-28 Nikon Corp マスクの製造方法
JP2000164504A (ja) 1998-11-30 2000-06-16 Nikon Corp ステージ装置、露光装置、及び前記ステージ装置を用いた位置決め方法
WO2001035168A1 (en) 1999-11-10 2001-05-17 Massachusetts Institute Of Technology Interference lithography utilizing phase-locked scanning beams
JP2003224961A (ja) 2002-01-28 2003-08-08 Canon Inc リニアモータ、ステージ装置、露光装置及びデバイス製造方法
US6611316B2 (en) 2001-02-27 2003-08-26 Asml Holding N.V. Method and system for dual reticle image exposure
US6778257B2 (en) 2001-07-24 2004-08-17 Asml Netherlands B.V. Imaging apparatus
JP2005046941A (ja) * 2003-07-31 2005-02-24 Canon Inc ケーブル微動ユニット付きステージ装置
US6897963B1 (en) 1997-12-18 2005-05-24 Nikon Corporation Stage device and exposure apparatus
JP2006351479A (ja) 2005-06-20 2006-12-28 Sumitomo Wiring Syst Ltd コネクタ

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01164543A (ja) 1987-12-21 1989-06-28 Okuma Mach Works Ltd ワーク判別方法
JPH01194479A (ja) 1988-01-29 1989-08-04 Murata Mfg Co Ltd 積層熱電素子およびその製造方法
US6222614B1 (en) * 1996-12-06 2001-04-24 Nikon Corporation Exposure elements with a cable-relaying support
JPH10293611A (ja) * 1997-04-21 1998-11-04 Canon Inc 位置決め装置
AU1554901A (en) * 1999-12-16 2001-06-25 Nikon Corporation Exposure method and exposure apparatus
US6437463B1 (en) * 2000-04-24 2002-08-20 Nikon Corporation Wafer positioner with planar motor and mag-lev fine stage
JP2002043213A (ja) * 2000-07-25 2002-02-08 Nikon Corp ステージ装置および露光装置
US6842248B1 (en) * 2000-11-28 2005-01-11 Nikon Corporation System and method for calibrating mirrors of a stage assembly
JP2002305140A (ja) * 2001-04-06 2002-10-18 Nikon Corp 露光装置及び基板処理システム
JP4814438B2 (ja) * 2001-05-02 2011-11-16 日本トムソン株式会社 リニアモータを内蔵したステージ装置
DE60232568D1 (de) * 2001-07-09 2009-07-23 Canon Kk Belichtungsapparat
JP3971701B2 (ja) * 2001-11-30 2007-09-05 エーエスエムエル ネザーランズ ビー．ブイ． リソグラフィ装置およびデバイス製造方法
US6937911B2 (en) * 2002-03-18 2005-08-30 Nikon Corporation Compensating for cable drag forces in high precision stages
CN1327295C (zh) * 2002-06-13 2007-07-18 Asml荷兰有限公司 光刻装置、器件的制造方法和由此制得的器件
JP2004260116A (ja) * 2003-02-27 2004-09-16 Nikon Corp ステージ装置、露光装置、及びデバイス製造方法
JP2005159322A (ja) * 2003-10-31 2005-06-16 Nikon Corp 定盤、ステージ装置及び露光装置並びに露光方法
JP4586367B2 (ja) * 2004-01-14 2010-11-24 株式会社ニコン ステージ装置及び露光装置
JP2005285881A (ja) * 2004-03-29 2005-10-13 Nikon Corp ステージ装置及び露光装置
JP2005317916A (ja) * 2004-03-30 2005-11-10 Canon Inc 露光装置及びデバイス製造方法
JP4677267B2 (ja) * 2005-04-04 2011-04-27 キヤノン株式会社 平面ステージ装置及び露光装置

Patent Citations (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2369299A (en) 1942-05-16 1945-02-13 Kafowi Jan Apparatus for working metals
JPH05326369A (ja) * 1992-05-26 1993-12-10 Sony Corp パターニング装置
JPH06124873A (ja) 1992-10-09 1994-05-06 Canon Inc 液浸式投影露光装置
US5677758A (en) 1995-02-09 1997-10-14 Mrs Technology, Inc. Lithography System using dual substrate stages
US5825043A (en) 1996-10-07 1998-10-20 Nikon Precision Inc. Focusing and tilting adjustment system for lithography aligner, manufacturing apparatus or inspection apparatus
JPH10303114A (ja) 1997-04-23 1998-11-13 Nikon Corp 液浸型露光装置
JPH11164543A (ja) * 1997-09-25 1999-06-18 Nikon Corp 電磁力モータ、ステージ装置および露光装置
JPH11135400A (ja) 1997-10-31 1999-05-21 Nikon Corp 露光装置
US6897963B1 (en) 1997-12-18 2005-05-24 Nikon Corporation Stage device and exposure apparatus
WO1999034255A1 (en) 1997-12-25 1999-07-08 Nikon Corporation Method and apparatus for manufacturing photomask and method of fabricating device
JPH11194479A (ja) 1997-12-26 1999-07-21 Nikon Corp フォトマスクの製造方法及び装置
WO1999049504A1 (fr) 1998-03-26 1999-09-30 Nikon Corporation Procede et systeme d'exposition par projection
WO1999050712A1 (en) 1998-03-26 1999-10-07 Nikon Corporation Exposure method and system, photomask, method of manufacturing photomask, micro-device and method of manufacturing micro-device
WO1999066370A1 (en) 1998-06-17 1999-12-23 Nikon Corporation Method for producing mask
JP2000012453A (ja) 1998-06-18 2000-01-14 Nikon Corp 露光装置及びその使用方法、露光方法、並びにマスクの製造方法
JP2000029202A (ja) 1998-07-15 2000-01-28 Nikon Corp マスクの製造方法
JP2000164504A (ja) 1998-11-30 2000-06-16 Nikon Corp ステージ装置、露光装置、及び前記ステージ装置を用いた位置決め方法
WO2001035168A1 (en) 1999-11-10 2001-05-17 Massachusetts Institute Of Technology Interference lithography utilizing phase-locked scanning beams
US6611316B2 (en) 2001-02-27 2003-08-26 Asml Holding N.V. Method and system for dual reticle image exposure
JP2004519850A (ja) 2001-02-27 2004-07-02 エイエスエムエル ユーエス， インコーポレイテッド デュアルレチクルイメージを露光する方法および装置
US6778257B2 (en) 2001-07-24 2004-08-17 Asml Netherlands B.V. Imaging apparatus
JP2003224961A (ja) 2002-01-28 2003-08-08 Canon Inc リニアモータ、ステージ装置、露光装置及びデバイス製造方法
JP2005046941A (ja) * 2003-07-31 2005-02-24 Canon Inc ケーブル微動ユニット付きステージ装置
JP2006351479A (ja) 2005-06-20 2006-12-28 Sumitomo Wiring Syst Ltd コネクタ

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of EP2109133A4

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KR20150036734A (ko) 2015-04-07
JPWO2008078688A1 (ja) 2010-04-22
EP2998983A2 (en) 2016-03-23
EP2109133A1 (en) 2009-10-14
JP5146323B2 (ja) 2013-02-20
US20100066992A1 (en) 2010-03-18
KR20090106555A (ko) 2009-10-09
EP2998983B1 (en) 2018-03-21
EP2998983A3 (en) 2016-06-08
EP2109133A4 (en) 2011-12-28
HK1218185A1 (en) 2017-02-03
TWI457978B (zh) 2014-10-21
TW200845118A (en) 2008-11-16

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