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WO2007128369A1 - Dispositif de mesure de position hyperfréquence et procédé de mesure de position - Google Patents

Dispositif de mesure de position hyperfréquence et procédé de mesure de position Download PDF

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Publication number
WO2007128369A1
WO2007128369A1 PCT/EP2007/002534 EP2007002534W WO2007128369A1 WO 2007128369 A1 WO2007128369 A1 WO 2007128369A1 EP 2007002534 W EP2007002534 W EP 2007002534W WO 2007128369 A1 WO2007128369 A1 WO 2007128369A1
Authority
WO
WIPO (PCT)
Prior art keywords
microwaves
position measuring
measuring device
calibration
actuator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/EP2007/002534
Other languages
German (de)
English (en)
Inventor
Thomas Reininger
Matthias Von Zeppelin
Marcus Maier
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Festo SE and Co KG
Original Assignee
Festo SE and Co KG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Festo SE and Co KG filed Critical Festo SE and Co KG
Priority to EP07723491A priority Critical patent/EP2016292A1/fr
Publication of WO2007128369A1 publication Critical patent/WO2007128369A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/48—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using wave or particle radiation means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B15/00—Fluid-actuated devices for displacing a member from one position to another; Gearing associated therewith
    • F15B15/20—Other details, e.g. assembly with regulating devices
    • F15B15/28—Means for indicating the position, e.g. end of stroke
    • F15B15/2815—Position sensing, i.e. means for continuous measurement of position, e.g. LVDT
    • F15B15/2869—Position sensing, i.e. means for continuous measurement of position, e.g. LVDT using electromagnetic radiation, e.g. radar or microwaves

Definitions

  • the invention relates to a position-measuring method and a microwave position-measuring device for detecting the position of an actuator member of an actuator movably arranged in an interior of an actuator housing, having a high-frequency microwave antenna arrangement for transmitting microwaves into the interior and for receiving at least partial reflection of the transmitted Microwaves formed on the actuator member reflection microwaves from the interior, and with evaluation means for forming a respective position of the Aktorglieds representative position signal from the reflection microwaves.
  • the position measuring device transmits, for example, pulse radar waves or frequency modulated radar waves in the direction of the piston, which are reflected by the piston.
  • the interior forms a waveguide.
  • the evaluation means determine the distance of the piston from the microwave antenna arrangement and thus the position of the piston in the interior space or movement space.
  • fats or other deposits can accumulate, which influence the propagation behavior of the microwaves.
  • the propagation speed changes depending on the conductivity of an inner wall of the inner space. The measurement accuracy of the position measuring device is thereby worse.
  • the microwave position measuring device of the type mentioned that at least one stationary reflection means is disposed in the interior of the actuator housing, and that evaluate the evaluation means by means of at least one reflection by means of reflected microwaves. Furthermore, a position measuring method according to another independent claim is proposed for achieving the object.
  • the fixed reflection means allows calibration of the position measuring device.
  • the position of the reflection medium in the interior of the actuator housing is known. Based on a transit time measurement or a phase comparison between transmitted and received microwaves the evaluation means can determine the propagation velocity of the microwaves in the interior.
  • the at least one reflection means has a fixed distance to the microwave position measuring device. But even if the distance changes due to, for example, mechanical influences during operation of the actuator, due to thermal fluctuations or the like, it is possible according to the invention then calibrated Position measuring device, for example, to determine a relative distance of the actuator member to the stationary reflection means for determining the position of the actuator member in the interior. If, for example, the propagation velocity of the microwaves increases due to a cross-sectional enlargement of the interior, this is taken into account by the calibration according to the invention.
  • the actuator element is expediently a piston of a fluid-technical, for example pneumatic actuator, e.g. a pneumatic working cylinder.
  • a pneumatic cylinder is described with a piston rod
  • the invention also includes rodless construction variants.
  • the actuator can also be an electric drive or a combined fluidic and pneumatic drive, wherein the actuator is, for example, the rotor of an electric motor, in particular a linear motor. It goes without saying that the position determination and calibration of the position measuring device according to the invention is also possible with rotary drive principles.
  • FMCW Frequency Modulated Continuous Wave.
  • the position measuring device operates advantageously based on the so-called time domain reflectometry.
  • a reflection means according to the invention can also be, as it were, a geometric and / or electrical impurity which influences the propagation and reflection of microwaves. Furthermore, electrical reflector sites, for microwaves partially transparent areas, for example in the manner of semitransparent mirror, or the like reflection means.
  • passive reflection means can be, for example, metallizations, geometric changes in the region of the interior, for example projections, recesses, stops or the like.
  • a fluid channel for example a channel for supplying and removing air to a pneumatic cylinder, may also form a calibration reflection means.
  • a change in cross section for example a jump in cross section or stop, is present in the region of an end position damping of a pneumatic cylinder.
  • grooves, protrusions or the like can serve as calibration reflection means.
  • the grooves, projections or other geometric elements in the interior, which serve as Kalibrier- reflection means have expediently such a dimension, eg depth or height, which is reflected part of the microwaves.
  • the interior space has a substantially electrically conductive surface and a recess serving as a calibration reflection means is filled with a dielectric, for example plastic. This creates a mechanically continuous surface.
  • the reflection means may be arranged at different points in the interior of the actuator housing, for example on a peripheral wall or a lid, in particular an end face of the actuator housing. If the lid is a removable lid, it is easier to produce the reflective material.
  • the reflection means is arranged on a rear end wall of the actuator housing opposite the microwave antenna arrangement or is formed by the end wall.
  • the at least one stationary reflection means may also comprise active reflection means, for example transponders.
  • the transponder receives the microwaves and affects them before sending them back to the position measuring device. For example, the transponder amplifies the microwaves, modulates them, changes their polarization and / or frequency or the like.
  • transponders for example a first transponder on the actuator element and a second transponder as a calibration reflection means in the sense of the invention.
  • a nonlinear device may be provided as a passive assembly that generates one or more mixing frequencies from two or more received frequencies.
  • RFID Radio Frequency Identification
  • the at least one first transponder arranged on the actuator member and the at least one calibration reflection means e.g. an impurity and / or the at least one second transponder forming a calibration reflec- tion means has different reflection properties for the microwaves transmitted by the position-measuring device.
  • the position measuring device thus receives different reflection microwaves, for example microwaves with different modulation, polarization or the like, and can thus distinguish the microwaves reflected by the transponder on the actuator element from the microwaves reflected by the calibration reflection means.
  • the at least one reflection means is expediently arranged in a region between the microwave antenna arrangement and an end position of the actuator member.
  • This end position is, for example, a front, a maximum of the microwave antenna arrangement zoomed or a rear, maximum remote end position. If the reflection means are arranged as far forward as possible in front of the front end position of the actuator member, it is possible to calibrate the position measuring device independently of the position of the actuator member, for example, before startup, during operation or the like. However, it is important in this case that the reflection microwaves, which as it were generate the actuator element and the calibration reflection means as an echo, are distinguishable from one another.
  • an expedient variant of the invention provides that the actuator member, e.g. on the piston of a pneumatic cylinder, an area which is at least partially permeable to the microwaves, at least for those microwaves used for the calibration.
  • the calibration microwaves may pass through the actuator member and reach a rear end wall of the actuator housing where they are reflected and then form calibration microwaves.
  • the calibration microwaves reach a calibration reflection means arranged behind the actuator member on a circumferential wall of the actuator housing. The microwaves can then pass through the actuator member and / or past the actuator member to the calibration reflection means.
  • the permeable region is, for example, a passageway, e.g. an air passage, a peripheral seal on the outer periphery of the actuator member, a distance between an inner wall of the actuator housing and an outer periphery of the Aktorglieds or the like. It has been shown in practice that, for example, about 10% of transmitted microwaves are not reflected by the actuator element, but pass past it in a rear region remote from the microwave antenna arrangement. These microwaves are evaluated according to the invention for calibration purposes.
  • microwaves with special properties for example suitable frequencies, can advantageously be used. are sent, which reach particularly well over the at least partially transmissive region of the actuator member to the calibration reflection means and are reflected by this for calibrating the position measuring device.
  • the microwave antenna arrangement comprises, for example, a coupling probe held by a holding body.
  • one or more reflection means for example metallizations on a dielectric material, or the like can be arranged on the holding body.
  • at least one inventive calibration reflection means is arranged on a baffle body which serves to protect the microwave antenna arrangement relative to the actuator member or other environmental influences.
  • the position measuring device expediently has transmitting means which are suitable for transmitting calibration microwaves intended for calibration purposes.
  • the calibration microwaves are different from the microwaves used for the position measurement of the actuator element.
  • the calibration microwaves have different frequencies or are different frequency or pulse modulated compared to the position measuring microwaves.
  • the position-measuring microwaves and the calibration microwaves have different polarizations, for example linear and circular polarizations or vice versa.
  • the at least one reflection means is expediently adapted to the calibration microwaves.
  • a geometry of the reflection means is such that in particular the calibration microwaves are reflected, the Influence on the position measuring microwaves, however, different, especially lower.
  • the transponder is tuned to the calibration microwaves.
  • the reflection means only reflects microwaves of a predetermined polarization, frequency or the like.
  • an angular position or rotational position of a reflecting means arranged on a rear end wall of the actuator housing is such that only microwaves of a predetermined polarization or angular position of the polarization are reflected.
  • at least one reflection means changes a polarization of microwaves, for example linearly polarized microwaves, into circularly polarized microwaves or vice versa. Differentially polarized reflection microwaves can be distinguished from the position measuring device, so that they can distinguish calibration and position measuring microwaves.
  • the radio-frequency microwave antenna arrangement expediently has a separate antenna for transmitting the position-measuring microwaves and the calibration microwaves, namely a position-measuring antenna and a calibration antenna.
  • the antennas may be separate units or an integrated unit.
  • the two antennas may be arranged on a common carrier structure of a coupling probe.
  • the carrier structure is formed, for example, by a dielectric, onto which metal surfaces for forming the microwave antennas are applied, for example vapor-deposited or the like.
  • the antenna is formed directly by a holding body, the for example, has corresponding metallizations. For the different antennas separate connections are expediently available.
  • the position measuring method according to the invention can be used in different operating states. For example, it is triggered by a control command.
  • the control command can be triggered manually, for example locally on the position measuring device, by an external control, for example a programmable logic controller, or a monitoring device, for example a personal computer. It is advantageous if the position measuring device performs the calibration automatically, for example, before startup, interruptions in operation or the like. A cyclic or continuous calibration during the operation of the actuator is also advantageous.
  • the plastic-filled groove on the inner circumference of the waveguide does not change fluid-technical, in particular pneumatic properties of the housing interior, which encompasses a movement space for the piston member.
  • the position measuring antenna is expediently arranged on the front side, that is to say in the direction of movement of the actuator member, in the interior space.
  • the calibration antenna is advantageously oriented transversely to the direction of movement of the actuator member.
  • the calibration antenna has, for example, a single electrode, two angularly, in particular at right angles, mutually arranged electrodes or the like.
  • FIG. 1 shows a sectional and partially schematic view of an actuator equipped with a first position-measuring device according to the invention
  • FIG. 2 is a sectional and partially schematic view of a second actuator equipped with a second position measuring device according to the invention.
  • Figure 3 is a perspective view of a microwave antenna for a position measuring device according to the invention.
  • a pneumatic working cylinder 10 forms an actuator 11, in particular a fluidic actuator.
  • an actuator member 14 is arranged linearly reciprocatingly.
  • the actuator member 14 is formed by a piston 15 of the working cylinder 10.
  • it is a pneumatic working cylinder with a piston rod, which also rodless versions, electric drives, combined electropneumatic actuators, especially linear drives, are readily possible.
  • a valve assembly 16 for example, has a 2/2 valve, feeds compressed air 17 from a compressed air source 18 via compressed air connections 19, 20 in the interior 12 or allows the outflow of compressed air from the compressed air connections 19, 20 to drive the piston 15 , the interior 12 in two unspecified sub-chambers separates. Between an outer periphery 27 of the piston 15 and an inner wall 28 of a central part 22 of the housing 13, a seal 21 is provided for example for this purpose.
  • the middle part 22 is closed at the end by a bearing cap 23 5 with a rear end wall 26 and a cover plate 24, and thus limits the interior 12 b, which comprises or forms a piston chamber.
  • the bearing cap 23 is penetrated by a piston rod 25, which forms a Kraftabgriffselement of the working cylinder 10.
  • a position measuring device 30 serves to detect the position of the actuator member 14 within the interior space 12, for example a distance 31 of the piston 15 from an end stop 32.
  • the end stop 32 is advantageously formed by a protective device 33, for example a plastic element which transmits a microwave Antenna assembly 34 of the position measuring device 30 against mechanical influences, such as pressure surges, impact of the piston 15 or the like, protects.
  • the microwave antenna assembly 34 includes a coupling probe 2o 35 for transmitting and receiving high frequency microwave, for example, in a frequency range of about 10 MHz to 30 GHz.
  • the coupling probe 35 may be, for example, a metallic probe.
  • the coupling probe 35 contains a plastic element 36 which has an emission area 5 towards the interior 12, to which a channel section 37 adjoins to the rear.
  • the channel section 37 forms a coaxial conductor.
  • the radiation area 38 is designed, for example, in a stepped cylinder.
  • the plastic element 36 (it could also be made of ceramic or another dielectric) is internally and externally provided with an electrically conductive coating 39, 40.
  • the channel section 37 connects the emission area 38 with a high-frequency device 41, for example a high-frequency board or the like, and an evaluation device 42.
  • microwaves 43 can be generated, which couples the coupling probe 35 into the interior 12.
  • the interior space 12 is substantially electrically conductive and forms a waveguide which conducts the microwaves 43 to the actuator member 14 which reflects the microwaves 43 and forms reflection microwaves 44.
  • the coatings 39, 40 are electrically connected to the high-frequency device 41, which contains unspecified coupling elements and coupling elements, for example capacitors, millimeter-wave integrated circuits (MMICs), directional couplers or the like. These components are arranged on a substantially planar rear end-face support structure 45.
  • the radio-frequency device 41 can transmit the microwaves 43 e.g. frequency modulated and / or pulse modulated send, for example by means of a voltage controlled oscillator (VCO) or the like.
  • VCO voltage controlled oscillator
  • the high-frequency device 41 as well as the evaluation device 42, which contains or forms evaluation means in the sense of the invention, are electrically connected to one another and expediently arranged on the same support structure 45.
  • the evaluation device 42 determines based on the transit time and / or the phase difference between the microwaves 43, 44 a respective position x, for example, the distance 31 corresponds to the actuator member 14 within the interior 12.
  • the evaluation device 42 includes, for example, a processor 46, a memory 47 and / or other electronic components see, for example ASICs (Application Specific Integrated Circuits) or the like.
  • the evaluation By means of at least one predetermined condition, for example a temporal condition or a control command, the position measuring device 30 carries out a calibration by means of a position signal 48 with the position x, for example wired (not shown) or wirelessly.
  • the measurement accuracy of the position measuring device 30 is improved, which is caused for example by electrical and / or geometric and / or thermal changes in the interior 12, which forms an electrical conductive structure or a waveguide.
  • fat deposits on the inner wall 28 lead to changes in the transit times of the microwaves 43 and 44, so that the distance x can no longer be measured with sufficient accuracy.
  • calibration reflection means 50 are arranged fixedly in the interior 12.
  • reflection means according to the invention which may be provided individually or in combination with each other, are presented on the basis of the reflection means 50.
  • the reflection means 50 comprise, for example, one or both compressed-air connections 19, 20.
  • the evaluation device 42 measures, for example, cyclically, based on an externally given control command, before the activation of the actuator 11 or the like a running time of the microwaves 43, the latter until a reflection at the terminals 19 and 20, the fluid channels 51 form, need.
  • cross-sectional changes, protrusions, grooves or the like in the interior 12 can form components of the reflection means 50.
  • the end stop 32 could be used as a Librier reflection means 50 for the position measuring device 30 serve.
  • separate reflection means 50 which are especially suitable for the reflection of calibration microwaves, can also be positioned in the interior 12 in a stationary manner.
  • the otherwise electrically insulating or consisting of dielectric material protection device 33 includes an electrically conductive surface 52, which reflects the microwaves 43 and can be used for calibration purposes.
  • the microwaves 43 may advantageously comprise microwaves of different frequencies, frequency- and / or pulse-modulated microwaves, it being possible for the purpose of the calibration to use microwaves with other properties to advantage, such as for determining the position of the actuator member 14.
  • calibration reflection means 50 are positioned in a rear portion 29 of the inner space 12.
  • the positioning in the rear region 29 has the advantage that influences which are significant for the calibration, for example due to contamination of the inner space 12, to the microwaves 43 and to calibration microwaves 53 described in more detail below, are particularly great.
  • the microwaves 43 pass, for example, on the outer circumference 27 of the piston 15 to a recess 55, for example a groove, on the inner wall 28 of the peripheral wall of the actuator housing 13.
  • the recess 55 is filled with a dielectric 56, for example a plastic material.
  • a dielectric 56 for example a plastic material.
  • the recess 55 changes the reflection behavior of the hollow conductor or inner space 12 in the rear region 29, so that the Evaluation device 42 reflected reflection microwaves 44, which are reflected by the piston 15 and reflection microwaves 44 ', which are influenced by the recess 55 different.
  • the microwaves 43 which pass on the outer circumference 27, to be influenced by a dielectric 58, which is arranged in a recess 57 on the rear end wall 26, during the formation of the reflection microwaves 44 '.
  • the piston 15 has a permeable portion 59 for passing the microwaves 43 and / or the microwaves 53 and reflection microwaves 44 and 54 formed therefrom.
  • the permeable portion 59 comprises, for example, a passageway 60 containing fluid, e.g. Air, through.
  • the passageway 60 allows the microwaves 43 to one at the rear
  • End wall 26 arranged reflector 61 by.
  • the passage 60 extends substantially parallel to the direction of movement 67 of the actuator member 14.
  • the reflector 61 may be a passive reflector, for example a recess filled with a dielectric. It is also conceivable that the reflector 61 is a transponder 71 which, for example, alters a frequency of and / or a pulse sequence and / or a polarization of the microwaves 43.
  • the microwave antenna arrangement 34 and the high-frequency device 41 are configured to transmit calibration microwaves 53 and form corresponding transmission means 62.
  • the calibration microwaves 53 are different from the position-measuring microwaves 43.
  • the calibration microwaves 53 are frequency-modulated or pulse-modulated microwaves.
  • the same microwaves 43, 44 can be used for position measuring purposes and Kalibriermess section.
  • the position measuring microwaves 43 are, for example, linearly polarized microwaves
  • the calibration microwaves 53 are circularly polarized microwaves or vice versa.
  • the microwaves 43, 53 may be microwaves linearly polarized at different angles to each other.
  • the microwaves 53 pass, for example, on the outer circumference 27 of the piston 15 and thus reach the rear end wall 26, where the reflector 61 is arranged specifically for the calibration microwaves 53.
  • the actuator 11 shown in FIG. 2 with a position measuring device 30 'with its position measuring device 30' corresponds to the actuator 11 and the position measuring device 30, the same reference numerals are used for identical or equivalent components.
  • a microwave antenna arrangement 34 ' corresponds in part to the microwave antenna arrangement 34.
  • the antenna arrangement 34' contains a Kalbrier antenna 64 for transmitting the Calibration microwaves 53 and for receiving the resulting reflection microwaves 54.
  • the calibration antenna 64 contains perpendicular to each other positioned transmit and receive electrodes 65, 66.
  • the electrodes 65, 66 are oriented transversely to a direction of movement 67 of the actuator member 14.
  • the electrodes 65, 66 are metalizations on the protective device 33.
  • the electrodes 65, 66 are connected, for example, with electrical lines 70 to the radio-frequency device 41.
  • the protective device 33 is in the embodiments, a holding body 68 for holding the coupling probe 35 vorgela- siege separate, lid-like device.
  • a one-piece component can be provided on which, for example, the reflection means 50 and / or the electrodes 65, 66 can be arranged.
  • a polarization reflection means 69 is arranged at the rear end wall 26 of the actuator II 1 .
  • the polarization reflection means 69 is designed for the reflection of the polarized calibration microwaves 53.
  • the reflection means 69 is arranged on the rear end wall 26 in an angular position or inclined position oriented in the direction of polarization of the calibration microwaves 53.
  • the reflection means 69 it is conceivable for the reflection means 69 to change a polarization of the calibration microwaves 53, for example to convert a circular into a linear polarization or vice versa.
  • the coupling probe 35 has a circular cross section and is expediently positioned coaxially with the piston 15 or the piston rod 25 in the inner space 12.
  • a coupling probe 80 shown in FIG. 3 could also be used.
  • a plate member 83 is arranged in front.
  • the plate member 83 has, for example, a rectangular contour.
  • the support structure 82 is preferably made of a Dielectric provided with metal surfaces, for example, coated, steamed, etc.
  • an electrically conductive surface 84 of a position-measuring antenna 86 on a front end side of the plate part 83 serves to transmit and / or receive the position-measuring microwaves 43, 44.
  • electrically conductive surfaces 85 are electrically insulated from the surface 84, for example by suitable distances from the surface 85.
  • the surfaces 85 form electrodes of a calibration antenna 87 for transmitting and receiving, for example, the calibration microwaves 53, 54.

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Electromagnetism (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Toxicology (AREA)
  • Fluid Mechanics (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Length-Measuring Devices Using Wave Or Particle Radiation (AREA)

Abstract

L'invention concerne un procédé de mesure de position et un dispositif de mesure de position hyperfréquence permettant de détecter la position d'un élément (14) d'un actionneur (11), placé de manière mobile dans un espace intérieur (12) d'un corps d'actionneur (13). Ledit dispositif comporte un ensemble d'antennes à micro-ondes haute fréquence (34), destiné à émettre des micro-ondes (43) dans l'espace intérieur (12) et à recevoir, de cet espace intérieur (12), des micro-ondes de réflexion (44, 44') formées par réflexion au moins partielle des micro-ondes émises (43, 53) sur l'élément d'actionneur (14), ainsi que des moyens d'évaluation (42) destinés à former un signal de position (52) à partir des micro-ondes de réflexion (44, 44'), lequel signal représente la position respective (x) de l'élément d'actionneur (14). Dans le dispositif de mesure de position hyperfréquence (30) selon l'invention, au moins un moyen de réflexion stationnaire (50) est placé dans l'espace intérieur du corps d'actionneur (13) et les moyens d'évaluation (42) évaluent des micro-ondes (43) réfléchies à l'aide dudit au moins un moyen de réflexion pour l'étalonnage du dispositif de mesure.
PCT/EP2007/002534 2006-05-06 2007-03-22 Dispositif de mesure de position hyperfréquence et procédé de mesure de position Ceased WO2007128369A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
EP07723491A EP2016292A1 (fr) 2006-05-06 2007-03-22 Dispositif de mesure de position hyperfréquence et procédé de mesure de position

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102006021205.3 2006-05-06
DE200610021205 DE102006021205A1 (de) 2006-05-06 2006-05-06 Mikrowellen-Positionsmessvorrichtung und Positionsmessverfahren

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Publication Number Publication Date
WO2007128369A1 true WO2007128369A1 (fr) 2007-11-15

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EP (1) EP2016292A1 (fr)
DE (1) DE102006021205A1 (fr)
WO (1) WO2007128369A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2008055590A1 (fr) 2006-11-09 2008-05-15 Festo Ag & Co. Kg Dispositif de mesure de position pour la détermination d'une position d'un objet de mesure

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102008061227A1 (de) 2008-11-14 2010-07-15 Astyx Gmbh Abstandsmessvorrichtung und Verfahren zur Ermittlung eines Abstands in einer Leitungsstruktur

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1998023867A1 (fr) * 1996-11-27 1998-06-04 Case Corporation Procede et appareil permettant de detecter la position d'un piston
DE19833220A1 (de) 1997-12-15 1999-06-17 Mikrowellen Technologie Und Se Abstandsmeßvorrichtung und Verfahren zur Bestimmung eines Abstandes
US6722261B1 (en) * 2002-12-11 2004-04-20 Rosemount Inc. Hydraulic piston position sensor signal processing

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1998023867A1 (fr) * 1996-11-27 1998-06-04 Case Corporation Procede et appareil permettant de detecter la position d'un piston
DE19833220A1 (de) 1997-12-15 1999-06-17 Mikrowellen Technologie Und Se Abstandsmeßvorrichtung und Verfahren zur Bestimmung eines Abstandes
US6722261B1 (en) * 2002-12-11 2004-04-20 Rosemount Inc. Hydraulic piston position sensor signal processing
DE10393842T5 (de) * 2002-12-11 2007-03-29 Rosemount Inc., Eden Prairie Hydraulikkolbenpositionssensorsignal- Verarbeitung

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2008055590A1 (fr) 2006-11-09 2008-05-15 Festo Ag & Co. Kg Dispositif de mesure de position pour la détermination d'une position d'un objet de mesure
EP2078214B1 (fr) * 2006-11-09 2011-05-11 FESTO AG & Co. KG Dispositif de mesure de position pour la détermination d'une position d'un objet de mesure

Also Published As

Publication number Publication date
EP2016292A1 (fr) 2009-01-21
DE102006021205A1 (de) 2007-11-15

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