WO2006030854A1 - Complex profile body polishing method and polishing apparatus - Google Patents

Abstract

[PROBLEMS] To provide a complex profile body mirror finish method and apparatus wherein fluid polishing in which the object being polished is not brought into contact is carried out, the entire surface can be mirror finished even if the object is a complex profile body having protrusions and recesses such as grooves, and even a weak strength object can be polished with no stress. [MEANS FOR SOLVING PROBLEMS] The object (3) to be polished is secured to the bottom of a fluid tank (2), a polishing bite (4) is opposed to the object out of contact with the bite (4), and then the tank is filled with a magnetic polishing liquid (1) such that both of them are immersed. The magnetic polishing liquid is mixed with nonmagnetic abrasive grains and α cellulose as thickener. The polishing bite is provided with a permanent magnet (41) and rotated by a rotating means (5). The fluid tank is caused to perform appropriate vibratory operation by a vibration means (6) linked therewith, thus stirring the magnetic polishing liquid in the tank. Magnetic clusters produced in the polishing liquid by the magnetic field of the permanent magnet act to press the abrasive grains in the liquid against the surface of the object. Since the polishing liquid flows, the abrasive grains move even in the recesses of a complex profile.

Description

 Specification

 Polishing method and polishing apparatus for complex shapes

 Technical field

 TECHNICAL FIELD [0001] The present invention relates to a polishing method and a polishing apparatus for a complex-shaped body having a complicated uneven shape such as a precision machine part and a mold, and more specifically, polishing a complex-shaped body to be polished. The present invention relates to an improvement in a technique for performing fluid polishing by facing a bite in a non-contact manner and by causing a magnetic polishing liquid to exist around these tools.

 Background art

 [0002] As a technique for finishing the surface of the object to be polished into a mirror surface, generally, lapping is performed in which a polishing agent in which free particles are dispersed is rubbed between the object to be polished and a lapping platen. Or, using a finer particle than lapping, soft polishing called a polishing pad! / Polishing with a tool to rub against the object to be polished!

 [0003] Further polishing is a non-contact polishing technique. In this float polishing, the tin plate and the object to be polished are simultaneously rotated in a turbid polishing liquid with a fine abrasive so that the polishing object is slightly lifted by the flow pressure of the polishing liquid interposed between them. In other words, the processing proceeds with the polishing agent in the polishing liquid.

 Disclosure of the invention

 Problems to be solved by the invention

 However, such conventional mirror polishing techniques have the following problems. Rubbing and polishing are processing methods that apply force by bringing a tool such as a lapping plate or polishing pad into contact with the object to be polished, resulting in large stresses on the object to be polished. For this reason, it is difficult to polish an object to be polished with low strength, and if it is polished, there is a problem that a work-affected layer is formed on the object to be polished.

[0005] In addition, lapping and polishing are performed by bringing a tool into contact with the object to be polished, and therefore when the object to be polished has a complex shape (complex shape body) having irregularities such as grooves, it is complicated such as the bottom of the groove. It is not possible to polish any part. As a result, the entire surface cannot be finished as a mirror surface. There is a problem of unevenness. The same applies to the above-described float policing. Float polishing is polishing that floats the object to be polished in a non-contact manner, but the point of transferring the flatness of the tin surface plate to the object to be polished is the same as contact polishing, and it cannot deal with complex shapes. The problem with such complex shaped bodies is not limited to mirror polishing, but the same can be said for removal of burrs, film removal and other polishing.

 [0006] The present invention solves the above-described problems, and an object of the present invention is to perform fluid polishing in a non-contact manner with respect to the object to be polished. An object of the present invention is to provide a polishing method and a polishing apparatus for a complex shaped body that can polish a region, have low strength, and can be polished without stress even on a polishing target.

 Means for solving the problem

 [0007] In order to achieve the above-described object, the polishing method according to the present invention makes the polishing tool face non-contact with the object to be polished, which is a complex shape, and has a magnetic polishing liquid around these objects. A polishing method for a complex-shaped body that performs fluid polishing, wherein the polishing tool is provided with a magnetic field generating source for generating a magnetic field, is rotated by a rotating means, and the polishing tool is faced to support the object to be polished. At the same time, the magnetic polishing solution is filled in the periphery so that both of them are immersed, and nonmagnetic abrasive grains are mixed in the magnetic polishing solution, the polishing note is rotated and the magnetic field is generated. A constant or variable magnetic field was applied to the magnetic polishing liquid with a source, and the magnetic polishing liquid was stirred by a stirring means to perform fluid polishing in a non-contact state.

[0008] Further, the polishing apparatus according to the present invention has a rotating means for rotating the output shaft and a magnetic field generating source for generating a magnetic field such as a permanent magnet and an electromagnetic coil, and is detachably attached to the tip of the output shaft. A polishing bite, a fluid tank that supports the object to be polished by facing the polishing bite and fills the magnetic polishing liquid in a state in which both of them are immersed, and a vibration means that provides vibrations of appropriate operation in conjunction with the fluid tank. The magnetic polishing liquid is mixed with non-magnetic abrasive grains, and the polishing tool is rotated at a predetermined interval without being in contact with the object to be polished. A magnetic field that is constant or fluctuating in time is applied to the polishing liquid, and the fluid tank is vibrated to mix the magnetic polishing liquid in the tank vigorously. [0009] The polishing tool may be configured such that a permanent magnet is concentrically embedded in a cylindrical body having a nonmagnetic physical force, and a magnetic field is generated by the permanent magnet. As another configuration, the polishing tool has a configuration in which a plurality of annular permanent magnets are concentrically embedded in a cylindrical body that also has non-magnetic force, and a magnetic part and a non-magnetic part repeat alternately and concentrically. be able to. Of course, the polishing tool may take other configurations.

[0010] The magnetic polishing liquid used in each of the above-mentioned inventions preferably comprises ferromagnetic particles having a particle diameter of 1 to 80 μm in a dispersion medium such as water kerosene having a kinematic viscosity of 0.01 to L00 mm ² Zs. Is a fluid in which spherical magnetite particles having a particle diameter of 10 to 50 nm are uniformly dispersed in a dispersion medium such as water kerosene having an electrical insulation property, with respect to a fluid dispersed in a range of 10 to 5 wt%. Mix the mixed fluid with non-magnetic abrasive grains with a particle size of 0.01 ~: LOO m, and also add a fibrous material such as OL cellulose or a resin such as polybulu alcohol as a thickener. What was comprised can be used.

 Accordingly, in the present invention, the rotating polishing nozzle has a magnetic field generation source, and therefore, a magnetic field acts between the polishing tool and the object to be polished, and magnetic clusters are generated in the magnetic polishing liquid. Specifically, in the compositions shown in claims 2 and 6, a large number of ferromagnetic particles (for example, iron particles) and magnetite particles are aggregated by a magnetic attractive force to form a magnetic cluster. Magnetic clusters follow the magnetic flux. Therefore, a large number of magnetic clusters are arranged in a needle shape in opposition to the object to be polished, whereby the abrasive grains present in the magnetic polishing liquid are held on the surface of the object to be polished. In addition, some abrasive grains are entangled in the magnetic cluster, so they are also pressed against the surface to be polished.

 [0012] Since the polishing tool rotates in this state, the abrasive grains move while contacting the surface of the object to be polished by relative movement with the object to be polished. For this reason, the projections on the surface of the surface to be polished are ground by the gunshot, and a smoother surface can be obtained. Therefore, even if burrs are present in the object to be polished, such sleigh is also removed.

 [0013] In addition, since the magnetic polishing liquid is vigorously mixed by moving the fluidized tank, the magnetic polishing liquid is exchanged even in the concave portion to be polished, and the abrasive grains move around in the magnetic polishing liquid, so that the grinding action acts. Will go on.

[0014] Furthermore, the magnetic cluster may be out of the magnetic field of the magnetic field generation source (permanent magnet). is there. These disperse in the magnetic polishing liquid and eventually disappear, but retain their shape for a while. Therefore, the magnetic cluster that has jumped out of the magnetic field wraps around each part such as the side of the object to be polished due to the flow motion of the magnetic polishing liquid. Then, the magnetic cluster that wraps around hits the part and grinds it, or powers the barrel that exists in the vicinity at the part. As a result, polishing proceeds even on the side that does not face the polishing tool. Of course, this floating magnetic cluster also moves around the recess to be polished and acts as a grinding tool, and polishing proceeds.

 That is, a part of the magnetic cluster generated by agglomeration due to the magnetic field of the magnetic field generation source flows away from the magnetic field force along with the rotation operation of the polishing byte and the vibration operation of the fluidized tank, and the object to be polished. It enters into the recess and hits a part such as the side that does not face the polishing bite, or powers and hits the nearby barrel, and does not face the complicatedly shaped recess or polishing bit. It will be polished.

 [0016] In the composition described above, since the magnetic polishing liquid contains a thickener such as a cellulose, the added thickener acts to hold the magnetic cluster, and as a result, a large number of abrasive grains are formed. The situation of contacting the surface to be polished can be promoted, and polishing can be performed with high efficiency.

 The invention's effect

 In the polishing of a complex shaped body according to the present invention, non-contact fluid polishing can be performed on an object to be polished by a magnetic cluster generated over a magnetic polishing liquid, and the magnetic polishing liquid is stirred. Therefore, even if the object to be polished is a complex shape having irregularities such as grooves, the entire surface can be polished evenly. Further, since the polishing of the present invention is non-contact fluid polishing, polishing can be performed without stress even on a polishing object having low strength. Then, by performing such polishing, it is possible to remove burrs or finish the mirror surface.

 BEST MODE FOR CARRYING OUT THE INVENTION

[0018] The present invention will be described in detail with reference to the accompanying drawings. FIG. 1 shows a preferred embodiment of the present invention. In the present embodiment, the polishing apparatus (mirror polishing apparatus) has a fluid tank 2 filled with magnetic polishing liquid 1, and a polishing tool 4 for a polishing object (sample 3) fixed to the bottom of the fluid tank 2. To face non-contact. The polishing byte 4 includes a magnetic field generation source that generates a magnetic field such as a permanent magnet, for example. Rotate by 5. A vibrating table 6 is linked to the fluidized tank 2 to vibrate appropriately. This polishing apparatus is configured to perform fluid polishing by the action of magnetic clusters generated in the magnetic polishing liquid 1.

 The fluid tank 2 has the sample 3 fixed to the bottom surface, attached to the base 9 of the traverse device 8 with the spring screw 7, and the traverse device 8 is attached to the vibration table 6. A contact type load cell 10 is disposed at the spring screw 7. By moving the base 9 of the traverse device 8, the vertical position of the fluid tank 2 is initially set, and an appropriate vibration operation is performed by the vibration table 6, for example, a figure 8 is drawn on the surface opposite to the rotating shaft of the polishing tool 4. Such a turning operation is given, and the operation state is detected by the load cell 10.

The magnetic polishing liquid 1 is mixed with nonmagnetic abrasive grains. Specifically, in a fluid in which 10 to 95 wt% of ferromagnetic particles having a particle diameter of 1 to 80 μm are dispersed in a dispersion medium such as water kerosene having a kinematic viscosity of 0.01 to LOO mm ² Zs. On the other hand, in a composite fluid in which 5 to 90 wt% of a fluid in which spherical magnetite particles having a particle diameter of 10 to 50 nm are uniformly dispersed in a dispersion medium such as water kerosene having electrical insulation properties is mixed, the particle diameter is 0.01 to: LOO m non-magnetic bombardment is mixed, and as a thickener, a fibrous material such as cellulose, or a resin such as polybulal alcohol is mixed.

 As shown in FIGS. 2 to 4, the polishing tool 4 adopts a configuration in which a permanent magnet 41 is concentrically embedded in a cylindrical body 40 having a non-magnetic force. That is, in the structure shown in FIG. 2, only one cylindrical permanent magnet 41 is embedded in the center of the cylindrical body 40. With respect to the diameter w2 of the cylindrical body 40 and the diameter wl of the permanent magnet 41,

 1. 0≤w2 / wl≤3.0

 It is set to.

 In addition, the structure shown in FIG. 3 is such that only one cylindrical permanent magnet 41 is embedded in the center of the cylindrical body 40 and the bite surface is recessed toward the central permanent magnet 41. 40 diameter w2, permanent magnet 41 diameter wl, depression depth h, depression width w3 w2 / wl = 5

 w3 / h = 4

w3 = (w2 -wl) / 2 1. 0≤w2 / wl≤3.0

 0. I≤h / w3≤10. 0

 It is set to.

 Further, as shown in FIGS. 4 (a) and 4 (b), the polishing tool 4 has a cylindrical body 40 having a nonmagnetic force, and a plurality of annular permanent magnets 41 are concentrically embedded so as not to have a magnetic part. It is also possible to adopt a configuration in which the magnetic part repeats alternately concentrically.

 [0024] As the drive motor 5, for example, a rotary drive mechanism such as a drilling machine, a lathe, an NC lathe, a milling machine, or the like can be used. The shaft of the grinding tool 4 is attached to the chuck portion 11 connected to the output shaft, and can be attached and detached. It can be configured.

 The vibration table 6 has a drive source (not shown), and adopts a configuration in which the fluid tank 4 is moved on a plane opposite to the rotation axis of the polishing tool 4. Several modes are set for the vibration operation, and they are selected or combined as appropriate. In other words, the vibration motion of the shaking table 6 is a simple rotational motion centered on a fixed point, a rotational motion that draws a figure 8, or a constant motion in the plane in the plane opposite to the rotational axis of the polishing tool 4. There are a plurality of vibration modes such as a vibration operation reciprocating in the direction, and these can be selected or combined as appropriate during the polishing operation.

 According to such a configuration, as shown in FIG. 5, a magnetic flux is generated between the polishing tool 4 and the sample 3 to generate a magnetic cluster 12 in the magnetic polishing liquid 1. In other words, since the permanent magnet 41 is embedded in the polishing tool 4, a magnetic field acts, a magnetic flux is generated between the permanent magnet 41 and the sample 3, and ferromagnetic particles (for example, iron particles) and magnetite particles attract magnetic attraction force. As a result, many agglomerate into magnetic clusters 12. Since the magnetic cluster 12 is along the magnetic flux, a large number of needles are arranged in opposition to the sample 3.

At this time, in the magnetic polishing liquid 1, α-cellulose 13 added as a thickener occupies a position in a woven state between the magnetic clusters 12. In addition, since the magnetic polishing liquid 1 has a non-magnetic bullet 14, some of them are entangled in the magnetic cluster 12, but many exist on the surface of the sample 3. Therefore, the gun particles 14 present in the magnetic polishing liquid 1 are pressed against the surface of the sample 3 by the magnetic clusters 12 arranged in a needle shape and the woven cellulose 13. Magnetic cluster 12 and alpha cellulosic There are also barrels 14 entangled in the tube 13, so they are also pressed against the surface of Sample 3.

 In this state, the polishing tool 4 (permanent magnet 41) rotates, so that the barrel 14 moves while contacting the surface of the sample 3 due to the relative movement with the sample 3. For this reason, the projection 14 on the surface of the sample 3 is ground by the gunballs 14, and a smoother surface is obtained. In other words, when burrs have occurred in the object to be polished, such burrs can be removed and mirror polishing can be performed.

 [0029] When the magnetic field is stationary, the magnetic clusters 12 are aligned and aligned along the magnetic flux, and the aligned state is maintained by the magnetic force, so that the abrasive grains 14 can hit the surface (polishing surface) of the sample 3 appropriately to perform polishing. In addition, when the magnetic field is variable, the magnetic cluster 12 is shaken, and at this time, the gunballs 14 hit the polishing surface appropriately and can be polished. As described above, even when the polishing tool 4 is not in contact with the sample 3 without being in contact with the polishing tool 4, it can be polished by the pressing action of the magnetic cluster 12 and the a cell loss 13, and fluid polishing. Can be done.

 [0030] In addition, since the magnetic polishing liquid 1 is vigorously mixed by moving the fluidized tank 2, the magnetic polishing liquid 1 is replaced even in the concave portion of the sample 3, and the gunballs 14 move around in the magnetic polishing liquid 1, so that grinding is performed. Polishing will proceed.

 By the way, the magnetic cluster 12 may be out of the magnetic field of the permanent magnet 41.

 These disperse in the magnetic polishing liquid 1 and eventually disappear. However, since the shape is maintained for a short time, the magnetic polishing liquid 1 flows around each part such as the side of the sample 3 due to the flow motion. It will be. Then, the magnetic cluster 12 that has come around hits the relevant part and acts as a grinding, or acts to move the barrel 14 existing in the vicinity at the relevant part. As a result, polishing proceeds even on the side that does not face the polishing tool 4. Of course, the floating magnetic cluster 12 also moves around the concave portion of the sample 3 and acts as a grinding so that the polishing proceeds.

 That is, a part of the magnetic cluster 12 generated by agglomeration due to the magnetic field of the permanent magnet 41 flows with the magnetic flux force being released along with the rotating operation of the polishing knot 4 and the vibrating operation of the fluid tank 2, and the sample. It enters into the concave part of 3 and hits the part that does not face the polishing bit 4 such as the side, or powers and hits the nearby barrel 14 and does not face the concave part of the complex shape or the polishing note 4 The side will also be polished.

In addition, since the magnetic polishing liquid 1 contains excellulose 13 as a thickener, the added thickener acts to hold the magnetic cluster 12. As a result, a large number of abrasive grains 14 The situation of contacting the surface can be promoted, and polishing can be performed with high efficiency.

 Therefore, according to the mirror polishing according to the present invention, the non-contact fluid polishing can be performed on the sample 3 (polishing target) by the magnetic cluster 12 generated in the magnetic polishing liquid 1. Since the magnetic polishing liquid 1 is agitated by the stirring means, the action of polishing can be promoted. Therefore, even if the object to be polished is a complex shape having irregularities such as grooves, the entire surface can be mirror-finished evenly. And since it is non-contact fluid polishing, polishing can be performed without stress even if the polishing target is weak.

 Example

 [0035] The sample was polished using the mirror polishing apparatus shown in FIG. That is, in order to demonstrate the effect of the present invention, a plurality of samples were polished under different polishing conditions, and the surface roughness Ra (arithmetic average roughness) was evaluated for each sample.

[0036] The magnetic polishing liquid had the composition shown in Table 1, and samples having the dimensions shown in Figs. 6 (a) and (b) were used in the first evaluation test.

 [table 1]

That is, the magnetic polishing liquid contains, in its composition, alumina having a particle diameter of 0.05 / zm as non-magnetic abrasive grains and further containing cellulose as a thickener. In the first evaluation test, as shown in FIGS. 6 (a) and 6 (b), the sample has a disk shape with an outer diameter of 12 mm and a thickness of 5 mm, and has a concentric annular groove. Polishing was performed according to conditions. As a result, the table A surface roughness Ra as shown is obtained.

 [Table 2]

[0038] At this time, the sample is made of brass, and the polishing tool has the configuration shown in FIGS. 4 (a) and 4 (b) and has a concentric ring-shaped permanent magnet, and the rotational speed is 915 rpm. Lm m, polishing time is 1 hour, and the shaking table rotates in a shape of 8 in the face opposite to the rotation axis of the polishing tool! ヽ, its amplitude is 10 mm and 20 times per minute Vibration was assumed.

 As a result, it was confirmed that the surface roughness Ra was 5.7 nm even in the annular groove portion (concave portion), which was on the order of several nm equivalent to the upper surface (convex portion). That is, according to the polishing according to the present invention, it was possible to polish the entire surface of the complex shape body including the concave portion (mirror polishing), and the usefulness of the present invention was confirmed.

 [0040] Next, a second evaluation test was performed with the sample having a flat plate shape. In other words, the sample had a disk shape with an outer diameter of 20 mm and a thickness of 10 mm, and was polished under various conditions shown in Table 3. As a result, a surface roughness Ra as shown in the table was obtained.

[Table 3]

Byte Rotational Speed Interval Bottom stand Rai nm) No. Material (No.) (rpm) (mm) Polishing time

 (Lower table vibration conditions) Before polishing After polishing

Figure 8 vibration

 1 Brass A 515 2 1 hour 240.8 6.8

 (Amplitude 10mm, rotation speed 20 / min)

 Figure 8 vibration

 2 SUS304 A 515 2 1 hour 192 3.4

 (Amplitude 10mm, rotation speed 20 / min)

 Figure 8 vibration

 3 Aluminum A 515 2 1 hour 192.3 7.6

 (Amplitude 10mm, rotation speed 20 / min)

 Figure 8 vibration

 4 Duralumin A 515 2 1 hour 150.3 4.4

 (Amplitude 10mm, Rotation speed 2 (V)

 Figure 8 vibration

 5 Copper A 515 2 1 hour 486.9 4.8

 (Amplitude 10mm, rotation speed 20 / min)

 Figure 8 vibration

 6 Brass B 915 2 1 hour 238.6 7.1

 (Amplitude 10mm, rotation speed 20 / min)

 Figure 8 vibration

 7 Brass B 515 2 30 min 285.1 7.8

 (Amplitude 1 Omm, rotation speed 20 / min)

 Figure 8 vibration

 8 Brass B 515 2 1 hour 207.8 8.4

 (Amplitude 1 Omm, rotation speed 20 / min)

 Figure 8 vibration

 9 Ti B 515 1 1 hour 415.6 7.7

 (Amplitude 10mm, rotation speed 20 / min)

 [0041] In the second evaluation test, the samples are brass, SUS304, aluminum, duralumin, copper, and Ti, and the polishing tool shown in FIG. 2 is tool A, and the tool shown in FIG. The rotation speed is 515 rpm or 915 rpm, the distance from the sample is 2 mm or lmm, the polishing time is 1 hour or 30 minutes, and the shaking table rotates in a shape of 8 on the surface opposite to the rotation axis of the polishing tool. The amplitude was 10 mm and the vibration was 20 times per minute.

 [0042] As a result, the surface roughness Ra was on the order of several nanometers for any of the samples numbered 1 to 9, and at this time, not only the top surface but also the side surface (circumferential surface) could be mirror-polished. It was confirmed. That is, according to the mirror polishing according to the present invention, the mirror polishing can be performed with a sufficient surface roughness, and this covers the entire surface except the bottom surface fixed to the fluid tank, that is, the entire surface in contact with the magnetic polishing liquid. It was possible to polish (mirror polishing), and the usefulness of the present invention was confirmed.

[0043] The experimental results described above prove that the present invention functions effectively for mirror polishing. The effect of the present invention is not limited to the shape of the object to be polished, and is not limited to the above-described mirror polishing, and can be polished even if it has a complicated shape. is there. As one aspect of this polishing, there is a removal of a barrel (barrel polishing). That is, for example, as shown in FIG. 7, an object 45 to be polished formed a circular groove 45a on the surface by machining, and a burr 45b was formed at the end of the groove 45a during the machining. Shall. Further, as shown in FIG. 8, it is assumed that the object to be polished 46 also has a shape force having a slender belt-like plate portion 46a at the tip by performing a press-cage or the like on a flat metal plate. Then, it is assumed that the groove 46b remains on the side edge of the strip-shaped plate portion 46a. In this example, these burrs 45b and 46b have dimensions of several μm force and several tens of μm.

 As the magnetic polishing liquid, the composition shown in Table 4 was used. In the third evaluation test, samples (with burrs) having the shape and dimensions shown in FIG. 7 (No. 10) and FIG. 8 (No. 11) were used. Each sample was polished under the polishing conditions shown in Table 5. The polishing tool used for polishing has the structure shown in FIGS. In addition, for vibration No. 6, the fluid tank was operated so that 2 moved in a circular motion. As a result, all samples were cleanly removed. Thus, it was confirmed that the polishing of the present invention also functions effectively for removing burrs. For example, as shown in FIG. 8, in the case of a member having a complicated shape and a very small and weak force, if the burrs are removed by a normal method, the belt-like plate portion 46a is bent or damaged. However, according to the present invention, it is possible to remove only the glue that does not damage the belt-like plate portion 46a.

[Table 4]

[Table 5] Gap between sample and bite Upper rotation speed Polishing time Lower rotation speed Number Material of workpiece

 imm) (rpm) (seconds) (rpm)

10 SUS403 1 800 10 40

1 1 SUS403 1 800 180 40

Note that the polishing time for mirror polishing and burr removal, and polishing conditions such as the upper rotation speed and the lower rotation speed are appropriately set based on the material, dimensions, and other factors. Brief Description of Drawings

 FIG. 1 is a block diagram showing a preferred embodiment of a mirror polishing apparatus according to the present invention.

 FIG. 2 is a cross-sectional view showing a preferred example 1 of a polishing tool.

 FIG. 3 is a cross-sectional view showing a preferred example 2 of a polishing tool.

 FIG. 4 shows a preferred example 3 of a polishing tool, in which (a) is a sectional view and (b) is a plan view showing the tool surface.

 FIG. 5 is an explanatory diagram showing fluid polishing by magnetic clusters.

 FIG. 6 is a perspective view (a) and a cross-sectional view (b) showing the shape and size of a complex shape body used as a sample for a polishing test.

 FIG. 7 is a diagram showing an example of a complex shape body as a sample to be polished.

 FIG. 8 is a diagram showing an example of a complex shape body used as a sample to be polished.

[0047] 1 Magnetic polishing liquid

 2 Fluid tank

 3 samples (for polishing)

 4 Polishing tool

 5 Drive motor

 6 Shaking table

 7 Spring screw

8 Traverse device Base Load, Senole Chuck part Magnetic cluster α-Cenellose Abrasive grain Cylinder Permanent magnet Polishing target a Groove b Burr Polishing target a Strip plate part b Burr

Claims

The scope of the claims  [1] A method for mirror polishing of a complex-shaped body in which a polishing tool is brought into contact with a polishing object that is a complex-shaped body in a non-contact manner, and a magnetic polishing liquid is present in the periphery to perform fluid polishing.  The polishing tool is provided with a magnetic field generation source for generating a magnetic field, and is rotated by a rotating means. The polishing tool is supported by the polishing tool so as to face the polishing tool, and both of them are immersed in a state where they are immersed. Filled with liquid, and nonmagnetic abrasive grains are mixed in the magnetic polishing liquid,  In this state, the polishing tool is rotated, a magnetic field is applied to the magnetic polishing liquid by the magnetic field generation source, and the magnetic polishing liquid is stirred by a stirring means in a non-contact state. A method for polishing a complex shaped body, comprising performing fluid polishing.  [2] The magnetic polishing liquid is Kinematic viscosity 0.01-: Spherical magnetite with a particle size of 10-50 nm for a fluid in which ferromagnetic particles with a particle size of 1-80 μm are dispersed in a dispersion medium such as water kerosene of L00mm ² Zs To a composite fluid in which 5 to 90 wt% of a fluid that is uniformly dispersed in a dispersion medium such as water kerosene with electrically insulating properties is mixed with non-magnetic abrasive grains with a particle size of 0.01 to: LOO m 2. The method for polishing a complex-shaped body according to claim 1, further comprising mixing a fibrous substance such as X cellulose or a resin such as polybulal alcohol as a thickener.  [3] A polishing tool having a rotating means for rotating the output shaft, a magnetic field generating source for generating a magnetic field such as a permanent magnet or an electromagnetic coil, and detachably attached to the tip of the output shaft, and facing the polishing tool A fluid tank that fills the magnetic polishing liquid in a state where the object to be polished is supported and the both are immersed, and a vibration means that provides vibrations of appropriate operation in conjunction with the fluid tank. The magnetic polishing liquid is mixed with non-magnetic abrasive grains, and the polishing bit rotates at a predetermined interval without being brought into contact with the object to be polished, and is constantly stationary in time with the magnetic polishing liquid by the magnetic field generation source. A polishing apparatus for complex shaped bodies, characterized by applying a magnetic field or a variable magnetic field, and vibrating the fluid tank to stir the magnetic polishing liquid in the tank 4. The polishing apparatus for a complex shaped body according to claim 3, wherein the polishing tool embeds a permanent magnet concentrically in a cylindrical body having a nonmagnetic physical force and generates a magnetic field by the permanent magnet.  [5] The polishing knot is characterized in that a plurality of annular permanent magnets are concentrically embedded in a cylindrical body having nonmagnetic force, and the magnetic part and the nonmagnetic part are alternately and concentrically repeated. 4. The polishing apparatus for complex shapes according to claim 3.  [6] The magnetic polishing liquid is Kinematic viscosity 0.01-: Spherical magnetite with a particle size of 10-50 nm for a fluid in which ferromagnetic particles with a particle size of 1-80 μm are dispersed in a dispersion medium such as water kerosene of L00mm ² Zs A non-magnetic cannonball with a particle size of 0.01 to: L00 m is mixed with a composite fluid in which a fluid in which particles are electrically dispersed in a dispersion medium such as water kerosene having electrical insulation properties is mixed. 4. The mirror polishing apparatus for complex-shaped bodies according to claim 3, wherein a fibrous material such as a cellulose or a resin such as polybulal alcohol is mixed as a thickener.  [7] The magnetic polishing liquid is Kinematic viscosity 0.01-: Spherical magnetite with a particle size of 10-50 nm for a fluid in which ferromagnetic particles with a particle size of 1-80 μm are dispersed in a dispersion medium such as water kerosene of L00mm ² Zs A non-magnetic cannonball with a particle size of 0.01 to: L00 m is mixed with a composite fluid in which a fluid in which particles are electrically dispersed in a dispersion medium such as water kerosene having electrical insulation properties is mixed. 5. The mirror polishing apparatus for complex-shaped bodies according to claim 4, wherein a fibrous substance such as a cellulose or a resin such as polybulal alcohol is mixed as a thickener.  [8] The magnetic polishing liquid is Kinematic viscosity 0.01-: Spherical magnetite with a particle size of 10-50 nm for a fluid in which ferromagnetic particles with a particle size of 1-80 μm are dispersed in a dispersion medium such as water kerosene of L00mm ² Zs A non-magnetic cannonball with a particle size of 0.01 to: L00 m is mixed with a composite fluid in which a fluid in which particles are electrically dispersed in a dispersion medium such as water kerosene having electrical insulation properties is mixed. As a thickener, a fibrous material such as cellulose, or greaves such as polybulal alcohol is mixed. 6. The complex surface mirror polishing apparatus according to claim 5, wherein