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WO2006011065B1 - Procede de controle microtopographique de surfaces d'objets transparents par triangulation optique - Google Patents

Procede de controle microtopographique de surfaces d'objets transparents par triangulation optique

Info

Publication number
WO2006011065B1
WO2006011065B1 PCT/IB2005/052164 IB2005052164W WO2006011065B1 WO 2006011065 B1 WO2006011065 B1 WO 2006011065B1 IB 2005052164 W IB2005052164 W IB 2005052164W WO 2006011065 B1 WO2006011065 B1 WO 2006011065B1
Authority
WO
WIPO (PCT)
Prior art keywords
inspection
optical triangulation
layer
microtopographic
transparent materials
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/IB2005/052164
Other languages
English (en)
Other versions
WO2006011065A1 (fr
Inventor
Da Cunha Martins Costa Pereira
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Universidade do Minho
Original Assignee
Universidade do Minho
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Universidade do Minho filed Critical Universidade do Minho
Priority to EP05754181A priority Critical patent/EP1769219A1/fr
Publication of WO2006011065A1 publication Critical patent/WO2006011065A1/fr
Publication of WO2006011065B1 publication Critical patent/WO2006011065B1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/303—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces using photoelectric detection means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

Cette invention concerne un procédé permettant d'utiliser des systèmes reposant sur la triangulation optique dans la mesure perfilométrique et microtopographique de surfaces de matériaux transparents grâce à l'application, sur la surface se trouvant à l'opposé de celle à mesurer, d'une couche de gel de couplage dont l'indice de réfraction est proche de celui du matériau à mesurer. Cette invention se caractérise en ce que cette couche peut comporter des faces non parallèles, en particulier lorsque des pièces minces sont contrôlées.
PCT/IB2005/052164 2004-07-20 2005-06-29 Procede de controle microtopographique de surfaces d'objets transparents par triangulation optique Ceased WO2006011065A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
EP05754181A EP1769219A1 (fr) 2004-07-20 2005-06-29 Procede de controle microtopographique de surfaces d'objets transparents par triangulation optique

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
PT10317304 2004-07-20
PT103173 2004-07-20

Publications (2)

Publication Number Publication Date
WO2006011065A1 WO2006011065A1 (fr) 2006-02-02
WO2006011065B1 true WO2006011065B1 (fr) 2006-04-06

Family

ID=35229758

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/IB2005/052164 Ceased WO2006011065A1 (fr) 2004-07-20 2005-06-29 Procede de controle microtopographique de surfaces d'objets transparents par triangulation optique

Country Status (2)

Country Link
EP (1) EP1769219A1 (fr)
WO (1) WO2006011065A1 (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11049720B2 (en) * 2018-10-19 2021-06-29 Kla Corporation Removable opaque coating for accurate optical topography measurements on top surfaces of transparent films

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4213601A1 (de) * 1992-04-24 1993-10-28 Guenther Dausmann Verfahren zur Bestimmung der Dicke von Körpern aus transparenten Materialien, vorzugsweise von planparallelen Schichten oder Platten, mit einem Triangulationssensor
US6011624A (en) * 1998-01-06 2000-01-04 Zygo Corporation Geometrically-Desensitized interferometer with adjustable range of measurement depths
DE10003194A1 (de) * 2000-01-25 2001-07-26 Wolfgang Dreybrodt Berührungsloses optisches Triangulationsverfahren zur Ermittlung der Oberflächenrauhigkeit von optisch streuenden Oberflächen

Also Published As

Publication number Publication date
WO2006011065A1 (fr) 2006-02-02
EP1769219A1 (fr) 2007-04-04

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