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WO2006011065B1 - Method of microtopographic inspection of surfaces of transparent objects by optical triangulation - Google Patents

Method of microtopographic inspection of surfaces of transparent objects by optical triangulation

Info

Publication number
WO2006011065B1
WO2006011065B1 PCT/IB2005/052164 IB2005052164W WO2006011065B1 WO 2006011065 B1 WO2006011065 B1 WO 2006011065B1 IB 2005052164 W IB2005052164 W IB 2005052164W WO 2006011065 B1 WO2006011065 B1 WO 2006011065B1
Authority
WO
WIPO (PCT)
Prior art keywords
inspection
optical triangulation
layer
microtopographic
transparent materials
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/IB2005/052164
Other languages
French (fr)
Other versions
WO2006011065A1 (en
Inventor
Da Cunha Martins Costa Pereira
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Universidade do Minho
Original Assignee
Universidade do Minho
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Universidade do Minho filed Critical Universidade do Minho
Priority to EP05754181A priority Critical patent/EP1769219A1/en
Publication of WO2006011065A1 publication Critical patent/WO2006011065A1/en
Publication of WO2006011065B1 publication Critical patent/WO2006011065B1/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/303—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces using photoelectric detection means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

A method that allows the use of systems based on optical triangulation in the perfilometric and microtopographical measurement of surfaces of transparent materials by the application, on the surface opposing to that one to measure, of a layer of coupling gel with refractive index approaching the one of the material to be measured, being that this layer may have non parallel faces specially when inspecting thin pieces.

Claims

AMENDED CLAIMS
[received by the International Bureau on 23 January 2006 (23.01.06); original claims 1-2 replaced by new claims 1-2 ]
Claims
[ 1 ] Method of microtopographical inspection of the surface of transparent materials by optical triangulation of surfaces of transparent materials, char¬ acterized by the reduction of the difference of the refractive indexes at the diopter of the second face of the part to be measured, by means of ap¬ plication, on the surface opposing to that one to measure, of a layer of coupling gel of refractive index similar to that of the material to measure, being that this layer will have non parallel faces whenever the thickness of the material to be measured is smaller than 500 μm.
[2] Method of microtopographical inspection of the surface of transparent materials, in accordance with claim ! , characterized by the fact that the coupling gel is homogeneous transparent stable and adheres to both glass and polymeric materials.
PCT/IB2005/052164 2004-07-20 2005-06-29 Method of microtopographic inspection of surfaces of transparent objects by optical triangulation Ceased WO2006011065A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
EP05754181A EP1769219A1 (en) 2004-07-20 2005-06-29 Method of microtopographic inspection of surfaces of transparent objects by optical triangulation

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
PT10317304 2004-07-20
PT103173 2004-07-20

Publications (2)

Publication Number Publication Date
WO2006011065A1 WO2006011065A1 (en) 2006-02-02
WO2006011065B1 true WO2006011065B1 (en) 2006-04-06

Family

ID=35229758

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/IB2005/052164 Ceased WO2006011065A1 (en) 2004-07-20 2005-06-29 Method of microtopographic inspection of surfaces of transparent objects by optical triangulation

Country Status (2)

Country Link
EP (1) EP1769219A1 (en)
WO (1) WO2006011065A1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11049720B2 (en) * 2018-10-19 2021-06-29 Kla Corporation Removable opaque coating for accurate optical topography measurements on top surfaces of transparent films

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4213601A1 (en) * 1992-04-24 1993-10-28 Guenther Dausmann Determining thickness of planar transparent body by triangulation - measuring offset of reflection point, fixed w.r.t beam source, due to refraction through body
US6011624A (en) * 1998-01-06 2000-01-04 Zygo Corporation Geometrically-Desensitized interferometer with adjustable range of measurement depths
DE10003194A1 (en) * 2000-01-25 2001-07-26 Wolfgang Dreybrodt Optical triangulation method for determining surface roughness of optically scattering surface, involves using incoherent light source for surface roughness measurement

Also Published As

Publication number Publication date
WO2006011065A1 (en) 2006-02-02
EP1769219A1 (en) 2007-04-04

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